Hemispherical harmonic oscillator anchor post mask device
By designing a hemispherical resonator anchor post mask device, a damage-free and pollution-free anchor post mask is achieved, which solves the problem of clamping damage to the anchor post during processing and testing, and improves the processing accuracy and assembly reliability of the hemispherical resonator.
Patent Information
- Application Number
- CN202422100921.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-28
- Publication Date
- 2025-09-16
- Estimated Expiration
- 2034-08-28
AI Technical Summary
The anchor post of the hemispherical resonator is easily damaged by clamping during processing and testing, and the surface roughness of the anchor post increases after chemical etching, affecting the conductivity and assembly accuracy. The existing clamping tooling is difficult to meet the high standard requirements.
A hemispherical resonator anchor post mask device is designed, which includes a mask seat and a base. The mask seat is detachably connected to the base. The inner anchor post extends into the mask cavity through a through hole. A seal is used to prevent the mask liquid from overflowing, thereby achieving isolation and precise clamping between the inner anchor post and the spherical shell. The device is suitable for masking by immersion, brushing or magnetron sputtering of the mask in the mask liquid.
A damage-free and pollution-free anchor mask is achieved, the surface roughness and integrity of the hemispherical resonator are maintained, high-standard electrode assembly and conduction requirements are met, and processing accuracy and reliability are improved.
Smart Images
Figure CN223342799U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of hemispherical resonator gyroscope preparation, in particular to a hemispherical resonator anchor post mask device. Background Art
[0002] The HRG, a solid-state wave gyroscope based on the Coriolis effect, is an advanced inertial navigation sensor featuring high precision, high reliability, long life, and low noise. Its applications include navigation, guidance, and control systems for various strategic and tactical weapons in aerospace, aviation, maritime, and ground-based applications. The HRG's core component, the HRG, is made of high-purity fused quartz, which is hard and brittle, requiring long processing times and high production costs. Chemical etching of the HRG after machining increases the surface roughness of the anchor post. Furthermore, the HRG testing process typically requires fixtures to hold the anchor post, which inevitably causes clamping damage. This compromises the conductivity of the HRG's post after coating, resulting in failure to meet the high standards for assembly and continuity with the bottom electrode. Therefore, masking is often required before subsequent machining of the HRG to maintain the post's surface roughness and integrity, thereby improving HRG assembly accuracy.
[0003] However, since the hemispherical resonator is made of fused quartz material, it is brittle, thin-walled, and fragile, and its hemispherical shell structure is the main component for realizing angular velocity measurement, the processing precision requirements are extremely high and it is not allowed to be clamped. The outer anchor rod is very short and difficult to clamp stably for a long time. Therefore, it is difficult to clamp the hemispherical resonator anchor column with ordinary clamping tooling without causing clamping damage. Therefore, the hemispherical resonator anchor column mask is very important, and a specific clamping tooling for the hemispherical resonator anchor column mask needs to be designed. Utility Model Content
[0004] In response to the problems in the background technology, the utility model proposes a hemispherical resonator anchor column masking device, which can completely isolate the inner anchor column and spherical shell of the hemispherical resonator, and can conveniently and accurately clamp and fix the hemisphere, so as to achieve damage-free and pollution-free masking of the inner anchor column of the hemispherical resonator.
[0005] The utility model adopts the following technical solutions:
[0006] A hemispherical resonator anchor column mask device includes a mask seat and a base. The mask seat is detachably connected to the top of the base. The hemispherical resonator is placed on the base with its opening facing upward.
[0007] The center of the mask seat is recessed downward to form a mask cavity for accommodating the mask liquid. A through hole is provided on the bottom wall of the mask cavity, which penetrates the mask seat. The inner anchor post of the hemispherical resonator extends into the mask cavity after the mask portion passes through the through hole. A seal is provided between the inner anchor post and the wall of the through hole to prevent the mask liquid from overflowing out of the mask cavity.
[0008] Optionally, an annular groove is provided on the wall of the through hole, and the sealing member is an annular sealing ring, the outer end of the annular sealing ring is clamped in the annular groove, and the inner end thereof is in contact with the circumferential wall of the inner anchor column.
[0009] Optionally, the annular sealing ring is made of fluororubber.
[0010] Optionally, a mounting hole is provided at the center of the base to match the outer anchor post of the hemispherical resonator, and the outer anchor post of the hemispherical resonator is inserted into the mounting hole so that the hemispherical resonator is placed on the base with its opening facing upward.
[0011] Optionally, the end surface of the outer anchor column of the hemispherical resonator is bonded to the top surface of the base, so that the hemispherical resonator is placed on the base with its opening facing upward.
[0012] Optionally, a positioning cylinder is provided on the bottom surface of the mask seat, and a positioning pin cooperating with the positioning cylinder is provided on the top surface of the base. The positioning pin is inserted into the positioning cylinder to detachably connect the mask seat to the top of the base.
[0013] Optionally, a positioning pin is provided on the bottom surface of the mask seat, and a positioning cylinder cooperating with the positioning pin is provided on the top surface of the base. The positioning pin is inserted into the positioning cylinder to detachably connect the mask seat to the top of the base.
[0014] Optionally, a plurality of positioning cylinders are provided, and a plurality of positioning pins are provided accordingly, and the plurality of positioning cylinders are evenly distributed circumferentially around the mask cavity.
[0015] Optionally, a plurality of first weight-reducing holes are formed on the mask seat, and the plurality of first weight-reducing holes are evenly distributed circumferentially around the mask cavity.
[0016] Optionally, a plurality of second weight-reducing holes are provided on the base, and the plurality of second weight-reducing holes are evenly distributed circumferentially around the mounting hole.
[0017] Compared with the prior art, the advantages of the present invention are:
[0018] The utility model discloses a masking device for an anchor post of a hemispherical resonator. The base is designed to support the hemispherical resonator with its opening facing upward, and the masking seat is detachably connected to the top of the base. Specifically, the center of the masking seat is recessed downward to form a masking cavity for accommodating masking liquid. The bottom wall of the masking cavity is provided with a through hole that penetrates the masking seat, so that the masked portion of the inner anchor post of the hemispherical resonator can pass through the through hole and extend into the masking cavity. A sealing member is provided between the inner anchor post and the hole wall of the through hole to prevent the masking liquid from overflowing the masking cavity. Thus, the inner anchor post of the hemispherical resonator and the spherical shell can be completely isolated, and the hemisphere can be conveniently and accurately clamped and fixed to achieve damage-free and pollution-free masking of the inner anchor post of the hemispherical resonator. After the masking is completed, the excess masking liquid is removed from the masking cavity. After the masking liquid forms a film at the clamping end of the inner anchor post, the hemispherical resonator can be removed from the masking device. After the mask is successfully formed, the hemispherical resonator anchor column can be protected during chemical etching, testing or other subsequent process treatments, meeting the high standards for assembly and conduction with the bottom electrode. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] In order to make the present invention more easily understood, the present invention will be described in more detail with reference to the specific embodiments shown in the accompanying drawings. These drawings only depict typical embodiments of the present invention and should not be considered as limiting the scope of protection of the present invention.
[0020] Figure 1 This is a schematic diagram of the three-dimensional structure of the hemispherical resonator anchor post mask device according to an embodiment of the present utility model.
[0021] Figure 2 This is a schematic diagram of the explosion structure of the hemispherical resonator anchor column mask device according to an embodiment of the present utility model.
[0022] Figure 3 This is a schematic cross-sectional structure diagram of a hemispherical resonator anchor post mask device according to an embodiment of the present utility model.
[0023] Figure 4 Schematic diagram of the three-dimensional structure of the mask holder.
[0024] Figure 5 Schematic diagram of the three-dimensional structure of the base.
[0025] Reference numerals:
[0026] 1. Mask seat; 11. Mask cavity; 12. Through hole; 13. Annular groove; 14. Positioning cylinder; 15. First weight-reducing hole; 2. Base; 21. Mounting hole; 22. Positioning pin; 23. Second weight-reducing hole; 3. Hemispherical resonator; 31. Inner anchor column; 32. Outer anchor column; 4. Sealing element. DETAILED DESCRIPTION
[0027] The following describes the implementation methods of the present invention with reference to the accompanying drawings so that those skilled in the art can better understand the present invention and implement it. However, the enumerated embodiments are not intended to limit the present invention. Unless there is a conflict, the following embodiments and the technical features in the embodiments can be combined with each other, and the same components are represented by the same figure marks.
[0028] like Figure 1-Figure 5 As shown, the hemispherical resonator anchor column mask device of this embodiment includes a mask seat 1 and a base 2. The mask seat 1 is detachably connected to the top of the base 2. The hemispherical resonator 3 is placed on the base 2 with its opening facing upward.
[0029] The center of the mask seat 1 is recessed downward to form a mask cavity 11 for accommodating the masking liquid. A through hole 12 is provided on the bottom wall of the mask cavity 11 and penetrates the mask seat 1. The inner anchor post 31 of the hemispherical resonator 3 extends into the mask cavity 11 after the mask portion passes through the through hole 12. A seal 4 is provided between the inner anchor post 31 and the wall of the through hole 12 to prevent the masking liquid from overflowing out of the mask cavity 11.
[0030] As a result, the masking device can completely isolate the inner anchor post 31 of the hemispherical resonator 3 from the spherical shell, and can conveniently and accurately clamp and secure the hemispherical resonator 3, achieving damage-free and contamination-free masking of the inner anchor post 31 of the hemispherical resonator 3. After masking is completed, the excess masking fluid is removed from the masking cavity 11. Once a film of masking fluid has formed on the clamping end of the inner anchor post 31, the hemispherical resonator 3 can be removed from the masking device. After successful masking, the inner anchor post of the hemispherical resonator is protected during chemical etching, testing, or other subsequent processing steps, meeting the high standards required for assembly and conductivity with the bottom electrode.
[0031] In this embodiment, in order to facilitate the installation of the seal 4, an annular groove 13 is opened on the hole wall of the through hole 12. The seal 4 is an annular sealing ring, the outer end of the annular sealing ring is clamped in the annular groove 13, and the inner end is in contact with the circumferential wall of the inner anchor column 31.
[0032] In this embodiment, in order to prevent the masking liquid from corroding the sealing member 4, the annular sealing ring is made of fluororubber.
[0033] In this embodiment, a mounting hole 21 is provided at the center of the base 2 for cooperating with the outer anchor column 32 of the hemispherical resonator 3. The outer anchor column 32 of the hemispherical resonator 3 is inserted into the mounting hole 21 so that the hemispherical resonator 3 is placed on the base 2 with its opening facing upward.
[0034] In other embodiments, the end surfaces of the outer anchor columns 32 of the hemispherical resonator 3 may be bonded to the top surface of the base 2 so that the hemispherical resonator 3 is placed on the base 2 with its opening facing upward.
[0035] In this embodiment, a positioning cylinder 14 is provided on the bottom surface of the mask holder 1 , and a positioning pin 22 is provided on the top surface of the base 2 to cooperate with the positioning cylinder 14 . The positioning pin 22 is inserted into the positioning cylinder 14 to detachably connect the mask holder 1 to the top of the base 2 .
[0036] Specifically, a plurality of positioning cylinders 14 are provided, and a plurality of positioning pins 22 are provided accordingly, and the plurality of positioning cylinders 14 are evenly distributed circumferentially around the mask cavity.
[0037] In other embodiments, the reverse can be done, with positioning pins set on the bottom surface of the mask holder 1 and positioning cylinders matching the positioning pins set on the top surface of the base 2, and the positioning pins inserted into the positioning cylinders to detachably connect the mask holder 1 to the top of the base 2.
[0038] In this embodiment, the mask seat 1 is provided with a plurality of first weight-reducing holes 15 , which are uniformly distributed circumferentially around the mask cavity 11 ; the base 2 is provided with a plurality of second weight-reducing holes 23 , which are uniformly distributed circumferentially around the mounting hole 21 .
[0039] The masking process of this embodiment is as follows:
[0040] The outer anchor post 32 of the hemispherical resonator 3 is inserted into the mounting hole 21 provided in the center of the base 2, and then the clamping end of the inner anchor post 31 is inserted into the mask cavity 11. The mask seat 1 and the base 2 are firmly connected by the positioning pin 22 and the positioning cylinder 14. After the support is completed, the clamping end of the inner anchor post 31 in the mask cavity can be masked, such as: adding masking liquid to the mask cavity 11 to soak the mask, brushing it with masking liquid, placing the jig into a magnetron sputtering device for masking, etc. The fluororubber ring is stuck in the annular groove 13 designed in the mask cavity 11 and moves with the movement of the base 2. Due to the characteristics of the fluororubber material itself, it has a certain elasticity. During the above-mentioned masking process, the fluororubber ring is tightly fitted with the bottom of the inner anchor post 31 of the hemispherical resonator 3, thereby preventing the masking liquid and the like from flowing down and contaminating the spherical shell of the hemispherical resonator, thereby isolating the inner anchor post 31 and the spherical shell. After the masking is completed, the excess masking liquid is removed from the masking cavity 11 . After the masking liquid forms a film at the clamping end of the inner anchor column 31 , the hemispherical resonator 3 is taken out from the masking fixture and the next step is continued.
[0041] Compared with the existing technology, this device has the following advantages:
[0042] 1) The device is simple to operate, convenient to use, safe and efficient, and can achieve full masking of the anchor post. The use and transfer process will not damage or contaminate the hemispherical resonator shell, thereby maintaining the good surface roughness and integrity of the hemispherical resonator anchor post after machining, and improving the test and assembly accuracy of the hemispherical resonator gyroscope;
[0043] 2) Suitable for various anchor post masking methods, including masking liquid immersion, brushing or magnetron sputtering masking.
[0044] The embodiments described above are merely preferred embodiments of the present invention. The phrases "in one embodiment," "in another embodiment," "in yet another embodiment," or "in other embodiments" used in this specification may refer to one or more of the same or different embodiments of the present disclosure. Any common changes and substitutions made by those skilled in the art within the scope of the present invention are intended to be encompassed within the scope of protection of the present invention.
Claims
1. A hemispherical resonator anchor post mask device, characterized in that: The invention comprises a mask seat (1) and a base (2), wherein the mask seat (1) is detachably connected to the upper part of the base (2), and the hemispherical resonator (3) is placed on the base (2) with its opening facing upward. The center of the mask seat (1) is recessed downward to form a mask cavity (11) for accommodating a masking liquid. A through hole (12) penetrating the mask seat (1) is provided on the bottom wall of the mask cavity (11). The inner anchor column (31) of the hemispherical resonator (3) extends into the mask cavity (11) after the mask portion passes through the through hole (12). A sealing member (4) is provided between the inner anchor column (31) and the wall of the through hole (12) to prevent the masking liquid from overflowing out of the mask cavity (11).
2. The hemispherical resonator anchor post mask device according to claim 1, characterized in that: An annular groove (13) is provided on the wall of the through hole (12); the sealing member (4) is an annular sealing ring, the outer end of which is clamped in the annular groove (13) and the inner end of which is in contact with the circumferential wall of the inner anchor column (31).
3. The hemispherical resonator anchor post mask device according to claim 2, characterized in that: The material of the annular sealing ring is fluororubber.
4. The hemispherical resonator anchor post mask device according to any one of claims 1 to 3, characterized in that: A mounting hole (21) is provided at the center of the base (2) and is matched with an outer anchor column (32) of the hemispherical resonator (3). The outer anchor column (32) of the hemispherical resonator (3) is inserted into the mounting hole (21) so that the hemispherical resonator (3) is placed on the base (2) with its opening facing upward.
5. The hemispherical resonator anchor post mask device according to any one of claims 1 to 3, characterized in that: The end surface of the outer anchor column (32) of the hemispherical resonator (3) is bonded to the top surface of the base (2), so that the hemispherical resonator (3) is placed on the base (2) with its opening facing upward.
6. The hemispherical resonator anchor post mask device according to claim 1, characterized in that: The bottom surface of the mask seat (1) is provided with a positioning cylinder, and the top surface of the base (2) is provided with a positioning pin that cooperates with the positioning cylinder. The positioning pin is inserted into the positioning cylinder to detachably connect the mask seat (1) to the top of the base (2).
7. The hemispherical resonator anchor post mask device according to claim 1, characterized in that: The bottom surface of the mask seat (1) is provided with a positioning pin, and the top surface of the base (2) is provided with a positioning cylinder that cooperates with the positioning pin. The positioning pin is inserted into the positioning cylinder to detachably connect the mask seat (1) to the top of the base (2).
8. The hemispherical resonator anchor post mask device according to claim 6 or 7, characterized in that: There are multiple positioning cylinders, and there are correspondingly multiple positioning pins. The multiple positioning cylinders are evenly distributed circumferentially around the mask cavity.
9. The hemispherical resonator anchor post mask device according to any one of claims 1 to 3, characterized in that: A plurality of first weight-reducing holes (15) are provided on the mask seat (1), and the plurality of first weight-reducing holes (15) are evenly distributed circumferentially around the mask cavity (11).
10. The hemispherical resonator anchor post mask device according to any one of claims 1 to 3, characterized in that: A plurality of second weight-reducing holes (23) are provided on the base (2), and the plurality of second weight-reducing holes (23) are evenly distributed circumferentially around the mounting hole (21).