Energy-saving ion plating machine

Abstract

The utility model relates to the technical field of film plating equipment, in particular to an energy-saving ion film plating machine which comprises a film plating cavity, a target material is arranged in the side wall of the film plating cavity, a plurality of rod frames for hanging workpieces are arranged in the middle of the film plating cavity, the bottoms of the rod frames are coaxially and rotatably connected into a positioning sleeve, and the positioning sleeve is arranged in a rotating disc in a penetrating mode. The position, corresponding to the positioning sleeve, of the rotary disc is provided with radial and annularly-arranged bottom arc grooves, the upper portion of the rotary disc is provided with a coaxial positioning disc, the position, corresponding to the positioning sleeve, of the positioning disc is provided with radial and annularly-arranged upper arc grooves, the upper arc grooves and the bottom arc grooves are arranged in a crossed mode, and positioning bolts are arranged between the positioning disc and the rotary disc.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to an energy-saving ion coating machine. Background Art

[0002] In vacuum sputtering equipment, the distance between the target and the workpiece (substrate or sample) is a critical parameter, directly impacting coating quality and efficiency. Existing coating machines typically use a fixed distance between the workpiece mounting bracket and the target, making them inadequate for coating workpieces of varying sizes. Excessively large distances increase coating time and energy consumption. Utility Model Content

[0003] The technical problem to be solved by the present invention is to provide an energy-saving ion plating machine in response to the above-mentioned technical deficiencies. The upper arc groove in the positioning plate is combined with the bottom arc groove of the turntable to realize radial adjustment of the rod frame position, thereby solving the problem that the existing plating equipment cannot adapt to workpieces of different sizes and has high energy consumption for plating.

[0004] In order to solve the above technical problems, the technical solution adopted by the utility model is: an energy-saving ion plating machine, including a plating chamber, a target material is provided in the side wall of the plating chamber, and a plurality of rod racks for hanging workpieces are provided in the middle of the plating chamber. The bottom of the rod rack is coaxially connected to the positioning sleeve, the positioning sleeve is passed through the turntable, and the corresponding positions of the turntable and the positioning sleeve are provided with radial and annular bottom arc grooves. A coaxial positioning plate is provided on the upper part of the turntable, and the corresponding positions of the positioning plate and the positioning sleeve are provided with radial and annular upper arc grooves. The upper arc grooves and the bottom arc grooves are cross-arranged, and positioning bolts are provided between the positioning plate and the turntable.

[0005] To further optimize this technical solution, the turntable is rotatably connected in the fixed sleeve, the fixed sleeve is fixedly connected to the bottom of the coating chamber, a driving motor is provided between the fixed sleeve and the turntable, a flat gear ring is provided on one side of the turntable, and the output shaft of the driving motor is driven by meshing with the flat gear ring through a gear.

[0006] To further optimize this technical solution, an inner gear ring is provided at the bottom of the fixed sleeve, and a plurality of planetary gears are rotatably connected to the bottom of the turntable. The planetary gears are meshed with the inner gear ring, and the plurality of planetary gears are rotatably connected to the bottom of the turntable. The arc center of the bottom arc groove is coaxial with the corresponding planetary gear. A driven wheel is provided at the bottom end of the rod frame, and a driving wheel is provided at the bottom of the planetary gear. The driving wheel is connected to the corresponding driven wheel belt transmission on one side.

[0007] To further optimize this technical solution, a plurality of radially arranged hanging positions are provided on the upper part of the rod frame.

[0008] Compared with the prior art, the present invention has the following advantages: 1. The target material is fixed in the side wall of the coating chamber. When it is necessary to coat workpieces of different sizes, the positioning plate can be rotated clockwise or counterclockwise, and the positioning sleeve moves radially outward or inward along the bottom arc groove under the push of the upper arc groove, thereby driving the radial position of the rod frame to move, which can adapt to the hanging of workpieces of different sizes and reduce energy consumption; 2. The turntable is driven by a driving motor to rotate, and the revolution of the turntable drives the planetary gear to revolve while also rotating under the action of the inner ring gear. The rotation of the planetary gear drives the driven wheel and the rod frame to rotate, so that the rod frame can rotate while rotating, and the hung workpiece can be coated more evenly. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 This is a schematic diagram of the internal structure of an energy-saving ion plating machine;

[0010] Figure 2 This is a schematic diagram of the structure of the rod frame part of an energy-saving ion plating machine;

[0011] Figure 3 This is a schematic diagram of the structure of the bottom of the turntable of an energy-saving ion plating machine;

[0012] Figure 4 This is a front view of the turntable drive part of an energy-saving ion plating machine.

[0013] In the figure: 1. Coating chamber; 11. Target material; 2. Rod holder; 20. Positioning sleeve; 21. Turntable; 211. Plane gear ring; 210. Bottom arc groove; 22. Positioning plate; 221. Positioning bolt; 220. Upper arc groove; 23. Driven wheel; 23. Driven wheel; 24. Mounting position; 3. Fixing sleeve; 30. Inner gear ring; 31. Driving motor; 4. Planetary gear; 41. Driving wheel. DETAILED DESCRIPTION

[0014] To make the objectives, technical solutions, and advantages of the present invention more clearly understood, the present invention is further described below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be understood that these descriptions are merely illustrative and are not intended to limit the scope of the present invention. Furthermore, descriptions of known structures and technologies are omitted in the following description to avoid unnecessary confusion regarding the concepts of the present invention.

[0015] It should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" used in this application document to indicate positions or locations are based on the positions or locations shown in the accompanying drawings and are intended solely to facilitate and simplify the description of this disclosure. They are not intended to indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this disclosure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0016] Combine Figures 1 to 4 As shown, an energy-saving ion plating machine includes a coating chamber 1, a target material 11 is provided in the side wall of the coating chamber 1, a plurality of rod racks 2 for hanging workpieces are provided in the middle of the coating chamber 1, and a plurality of radially arranged hanging positions 24 are provided on the upper part of the rod rack 2.

[0017] Combine Figures 2 to 4 As shown, the bottom of the coating chamber 1 is provided with a fixed sleeve 3, a turntable 21, and a positioning disc 22. The positioning disc 22 is arranged on the upper part of the turntable 21. The turntable 21 is rotatably connected to the fixed sleeve 3. The fixed sleeve 3 is fixedly connected to the bottom of the coating chamber 1. A drive motor 31 is provided between the fixed sleeve 3 and the turntable 21. A flat ring gear 211 is provided on one side of the turntable 21. The output shaft of the drive motor 31 is meshed with the flat ring gear 211 through a gear.

[0018] Combine Figures 2 to 4 As shown, the bottom of the rod frame 2 is coaxially connected to the positioning sleeve 20, the positioning sleeve 20 is inserted into the turntable 21, and the positions corresponding to the turntable 21 and the positioning sleeve 20 are provided with radial and annular bottom arc grooves 210, and the positions corresponding to the positioning plate 22 and the positioning sleeve 20 are provided with radial and annular upper arc grooves 220, the upper arc grooves 220 and the bottom arc grooves 210 are cross-arranged in an "X" shape, and a positioning bolt 221 is provided between the positioning plate 22 and the turntable 21.

[0019] Combine Figures 2 to 4 As shown, an inner gear ring 30 is provided at the bottom edge of the fixed sleeve 3, and a plurality of planetary gears 4 are rotatably connected to the bottom of the turntable 21. The planetary gears 4 are meshed with the inner gear ring 30. The plurality of planetary gears 4 are rotatably connected to the bottom of the turntable 21. The arc center of the bottom arc groove 210 is coaxial with the corresponding planetary gear 4. A driven wheel 23 is provided at the bottom end of the rod frame 2, and a driving wheel 41 is provided at the bottom of the planetary gear 4. The driving wheel 41 is connected to the corresponding driven wheel 23 on one side with a belt transmission.

[0020] When used, combine Figures 1 to 4As shown, the target material 11 is fixed in the side wall of the coating chamber 1. When it is necessary to coat workpieces of different sizes, the positioning disk 22 can be rotated clockwise or counterclockwise. The positioning sleeve 20 moves radially outward or inward along the bottom arc groove 210 under the push of the upper arc groove 220, thereby driving the radial position of the rod frame 2 to move, which can adapt to the hanging of workpieces of different sizes. The turntable 21 is driven to rotate by the drive motor 31. The revolution of the turntable 21 drives the planetary gear 4 to revolve while also rotating under the action of the inner ring gear 30. The rotation of the planetary gear 4 drives the driven wheel 23 and the rod frame 2 to rotate, so that the rod frame 2 can revolve while also rotating, and the hung workpiece can be coated more evenly. Since the arc center of the bottom arc groove 210 is concentric with the corresponding driving wheel 41, the movement of the rod frame 2 will not affect the motion transmission between the driving wheel 41 and the driven wheel 23.

[0021] Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

Claims

1. An energy-saving ion plating machine, comprising a plating chamber (1), a target material (11) being provided in the side wall of the plating chamber (1), and a plurality of rod racks (2) for hanging workpieces being provided in the middle of the plating chamber (1), characterized in that: The bottom of the rod frame (2) is coaxially rotatably connected to the positioning sleeve (20), the positioning sleeve (20) is inserted into the turntable (21), and the positions of the turntable (21) and the positioning sleeve (20) are provided with radial and annular bottom arc grooves (210), and the upper part of the turntable (21) is provided with a coaxial positioning plate (22), and the positions of the positioning plate (22) and the positioning sleeve (20) are provided with radial and annular upper arc grooves (220), the upper arc grooves (220) and the bottom arc grooves (210) are arranged crosswise with each other, and a positioning bolt (221) is provided between the positioning plate (22) and the turntable (21).

2. The energy-saving ion plating machine according to claim 1, characterized in that: The turntable (21) is rotatably connected in a fixed sleeve (3), the fixed sleeve (3) is fixedly connected to the bottom of the coating chamber (1), a driving motor (31) is provided between the fixed sleeve (3) and the turntable (21), a plane gear ring (211) is provided on one side of the turntable (21), and an output shaft of the driving motor (31) is meshed with the plane gear ring (211) for transmission through a gear.

3. The energy-saving ion plating machine according to claim 2, characterized in that: The bottom of the fixed sleeve (3) is provided with an inner gear ring (30), the bottom of the turntable (21) is rotatably connected to a plurality of planetary gears (4), the planetary gears (4) are meshed with the inner gear ring (30), the plurality of planetary gears (4) are rotatably connected to the bottom of the turntable (21), the arc center of the bottom arc groove (210) is coaxial with the corresponding planetary gear (4), the bottom end of the rod frame (2) is provided with a driven wheel (23), the bottom of the planetary gear (4) is provided with a driving wheel (41), and the driving wheel (41) is connected to the driven wheel (23) corresponding to one side by a belt transmission.

4. The energy-saving ion plating machine according to claim 1, characterized in that: The upper portion of the rod frame (2) is provided with a plurality of radially arranged hooking positions (24).

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