Short-circuit self-locking structure of target material assembly and vacuum coating equipment

Abstract

The utility model discloses a target material assembly short circuit self-locking structure and vacuum coating equipment, relates to vacuum film deposition technical field, including first box body, second box body and control circuit, control circuit includes power supply, the first box body is equipped with target back plate and contact subassembly, contact subassembly includes movable pin and contact piece, and the movable pin is equipped with the contact piece. When the first box body and the second box body are closed, the movable pin elastically presses the top column, the contact piece does not make contact with the target back plate, and when the first box body moves away from the second box body, the contact piece makes contact with the target back plate, so that the first box body and the target back plate are short-circuited. The control circuit can disconnect the target backboard and the power supply, so that the equipment is not electrified after being opened, the electric shock risk of operators is avoided, and the operation safety is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum thin film deposition, in particular to a target material component short-circuit self-locking structure and vacuum coating equipment. Background Art

[0002] In related technology, planar target sputtering equipment is filled with an appropriate amount of argon gas under high vacuum conditions. A DC voltage of several hundred volts is applied between the cathode (planar target) and the anode (coating chamber wall), generating a magnetron glow discharge within the coating chamber. Under the influence of the electric field, electrons collide with argon atoms as they fly toward the substrate, ionizing the argon gas. The incident ions (Ar+) bombard the target material under the influence of the electric field, causing neutral atoms or molecules on the target surface to gain sufficient kinetic energy to break away from the target surface and deposit on the substrate to form a thin film. During the process, a negative DC voltage of -500 to -1000V is often applied. When cleaning or maintaining the chamber, the planar target assembly must be opened. If the power is not disconnected in time or the planar target assembly is opened by mistake, the negative high voltage planar target assembly will be exposed to the outside of the equipment, posing a risk of electric shock to the operator. Utility Model Content

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a target assembly short-circuit self-locking structure and vacuum coating equipment, which can prevent the target back plate from becoming electrically charged when the equipment is turned on, thereby ensuring operational safety.

[0004] According to an embodiment of the first aspect of the present invention, a target assembly short-circuit self-locking structure includes:

[0005] A first box body, a second box body and a control circuit, the first box body and the second box body can open and close with each other, the control circuit includes a power supply, a target back plate and a contact assembly are installed on the first box body, the contact assembly includes a movable pin and a contact piece, the target back plate is connected to the power supply and carries a negative voltage, the contact piece is fixed to the end of the movable pin, and a top column is provided on the second box body. When the first box body and the second box body are closed, the movable pin elastically presses the top column, and the contact piece does not contact the target back plate. When the first box body moves and moves away from the second box body, the contact piece contacts the target back plate to short-circuit the first box body and the target back plate, and the control circuit can disconnect the target back plate from the power supply.

[0006] According to a short-circuit self-locking structure of a target material assembly according to an embodiment of the first aspect of the utility model, there are at least the following beneficial effects: this embodiment is provided with a first box body, a second box body and a control circuit, the control circuit includes a power supply, a target back plate and a contact assembly are installed on the first box body, the contact assembly includes a movable pin and a contact piece, the target back plate is connected to the power supply and carries a negative voltage, the contact piece is fixed to the end of the movable pin, a top column is provided on the second box body, when the first box body and the second box body are closed, the movable pin elastically presses the top column, and the contact piece does not contact the target back plate, when the first box body moves and moves away from the second box body, the contact piece contacts the target back plate to short-circuit the first box body and the target back plate, and the control circuit can disconnect the target back plate from the power supply so that the equipment is not electrified after opening, avoiding the risk of electric shock to the operator and improving operational safety.

[0007] According to an embodiment of the first aspect of the present utility model, the contact assembly is provided with a mounting seat fixedly mounted in the first housing, and the movable pin is slidably connected to the mounting seat.

[0008] According to an embodiment of the first aspect of the present invention, an elastic member is provided in the mounting seat, and the elastic member pushes the movable pin to maintain an extended state.

[0009] According to the embodiment of the first aspect of the present utility model, the mounting seat, the elastic member, the movable pin and the contact piece are all able to conduct electricity with each other.

[0010] According to an embodiment of the first aspect of the present invention, the contact assembly is installed on one side of the target backing plate, and the other side of the target backing plate is connected to a power source.

[0011] According to an embodiment of the first aspect of the present utility model, a first insulating block is provided between the target backing plate and the inner wall of the first box body, and the first insulating block is provided on both sides of the target backing plate.

[0012] According to the embodiment of the first aspect of the present invention, a second insulating block is provided on the second box body, and the second insulating block is located on both sides of the target backing plate. When the first box body and the second box body are closed, the target backing plate presses against the second insulating block.

[0013] According to an embodiment of the first aspect of the present utility model, the contact piece is located on a side of the target back plate facing away from the second box body.

[0014] According to an embodiment of the first aspect of the present utility model, a guide wire is provided on the first box body, and the guide wire is connected to the first box body and the contact piece to make the two conductive.

[0015] According to an embodiment of the second aspect of the present invention, a vacuum coating device is provided, which includes the above-mentioned short-circuit self-locking structure of the target assembly.

[0016] A vacuum coating device according to an embodiment of the second aspect of the present invention has at least the following beneficial effects:

[0017] Compared with the existing technology, the vacuum coating equipment includes a first box body and a second box body. The target back plate and the contact assembly are installed on the first box body. The contact assembly includes a movable pin and a contact piece. The target back plate is connected to the power supply and carries a negative voltage. The contact piece is fixed to the end of the movable pin. A top column is provided on the second box body. When the first box body moves and moves away from the second box body, the contact piece contacts the target back plate to short-circuit the first box body and the target back plate. The target back plate is disconnected from the power supply so that the equipment is not electrified after opening, avoiding the risk of electric shock to the operator and having good operational safety.

[0018] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0020] Figure 1 A cross-sectional view of the first box body and the second box body combined in the embodiment of the first aspect of the present utility model;

[0021] Figure 2 A cross-sectional view of the embodiment of the first aspect of the present utility model in which the first box body and the second box body are separated;

[0022] Figure 3 A cross-sectional view of a vacuum coating device in an embodiment of the second aspect of the present utility model;

[0023] Figure 4 It is a partial cross-sectional view of a short-circuit self-locking structure of a target assembly in an embodiment of the first aspect of the present utility model.

[0024] Reference numerals:

[0025] First housing 100; target backing plate 101; target material 102; first insulating block 103; first sealing member 104; second sealing member 105; third sealing member 106;

[0026] Contact assembly 110; movable pin 111; mounting seat 112; elastic member 113; contact piece 114; guide wire 115;

[0027] a second housing 120 ; a substrate stage 121 ; a top column 122 ; a second insulating block 123 ; and a fourth sealing member 124 . DETAILED DESCRIPTION

[0028] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0029] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.

[0030] In the description of this utility model, "several" means one or more, "many" means more than two, "greater than," "less than," and "exceed" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. The use of "first" and "second" in the description is solely for the purpose of distinguishing technical features and is not to be construed as indicating or implying relative importance, implicitly specifying the number of the indicated technical features, or implicitly specifying the order of the indicated technical features.

[0031] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0032] Reference Figure 1 and Figure 2 In the embodiment of the first aspect of the present invention, a short-circuit self-locking structure of a target assembly includes a first box body 100, a second box body 120 and a control circuit. The first box body 100 and the second box body 120 can open and close with each other. The control circuit includes a power supply. A target back plate 101 and a contact assembly 110 are installed on the first box body 100. The contact assembly 110 includes a movable pin 111 and a contact piece 114. The target back plate 101 is connected to the power supply and carries a negative voltage. The contact piece 114 is fixed to the end of the movable pin 111. A top column 122 is provided on the second box body 120. It can be understood that the movable pin 111 is elastically connected to the first box body 100, and the contact piece 114 is located on the side of the target back plate 101 facing away from the second box body 120. When the first box body 100 and the second box body 120 are closed (such as Figure 1 ), the movable pin 111 elastically presses the top column 122, causing the movable pin 111 to shrink in the direction close to the first box body 100, so that the contact piece 114 moves in the direction away from the target back plate 101 and does not contact the target back plate 101; when the first box body 100 moves and moves away from the second box body 120 (such as Figure 2), the movable pin 111 disengages from the top column 122 and resets and extends, so that the contact piece 114 contacts the target back plate 101, so that the first box body 100 and the target back plate 101 are connected and short-circuited. The control circuit detects that the target back plate 101 is short-circuited, thereby disconnecting the target back plate 101 from the power supply, so that the device is not powered after being turned on. Therefore, during the cleaning process or when the operator accidentally turns on the device, the risk of electric shock is avoided, thereby improving operational safety.

[0033] Reference Figure 3 It can be understood that the contact assembly 110 is installed on one side of the target back plate 101, and the other side of the target back plate 101 is connected to the power supply. The contact assembly 110 is provided with a mounting seat 112 fixedly installed in the first box body 100. The mounting seat 112 is fixed to the first box body 100 by bolt connection, and the movable pin 111 is slidably connected in the mounting seat 112. Furthermore, an elastic member 113 is provided in the mounting seat 112. The elastic member 113 pushes the end of the movable pin 111 away from the second box body 120 to keep the movable pin 111 in an extended state. It can be understood that the elastic member 113 is a coil spring. Furthermore, the mounting seat 112, the elastic member 113, the movable pin 111 and the contact piece 114 are all made of conductive metal materials so that they can be conductive with each other, so that a short circuit can be generated when the contact piece 114 contacts the target back plate 101. Refer to Figure 4 In other embodiments, a guide wire 115 is provided on the first box body 100 , and the guide wire 115 is connected to the first box body 100 and the contact piece 114 to make the two conductive.

[0034] It is understood that a first insulating block 103 is provided between the target backing plate 101 and the inner wall of the first housing 100. The first insulating block 103 is disposed on both sides of the target backing plate 101 to achieve insulation between the target backing plate 101 and the first housing 100, thereby preventing the device housing from being electrically charged. When the contact piece 114 is not in contact with the target backing plate 101, there is a potential difference between the target backing plate 101 and the first housing 100. Furthermore, a second insulating block 123 is provided on the second housing 120. The second insulating block 123 is located on both sides of the target backing plate 101. When the first housing 100 and the second housing 120 are closed, the target backing plate 101 presses against the second insulating block 123 to prevent the second housing 120 from being electrically charged.

[0035] Furthermore, since an inner cavity for accommodating the substrate stage 121 and the substrate is generated when the first box body 100 and the second box body 120 are buckled together, the inner cavity is in a vacuum state, and the substrate is subjected to a coating process under a certain vacuum state. Therefore, a first seal 104 is provided between the first box body 100 and the first insulating block 103, a second seal 105 is provided between the first insulating block 103 and the target backing plate 101, a third seal 106 is provided between the target backing plate 101 and the second insulating block 123, and a fourth seal 124 is provided between the second insulating block 123 and the second box body 120. Seals are provided in the gaps between the various components that are combined with each other to effectively ensure the sealing effect of the inner cavity. In this embodiment, the first seal 104, the second seal 105, the third seal 106 and the fourth seal 124 are all O-shaped sealing rings or sealing rings. The first seal 104 is embedded in the side wall of the first box body 100, the second seal 105 is embedded in the side wall of the first insulating block 103, the third seal 106 is embedded in the side wall of the target backing plate 101 facing the second box body 120, and the fourth seal 124 is embedded in the side wall of the second box body 120 facing the second insulating block 123.

[0036] According to an embodiment of the second aspect of the present invention, a vacuum coating apparatus is provided, comprising the aforementioned target assembly short-circuit self-locking structure. It is understood that the vacuum coating apparatus includes all the technical features of a target assembly short-circuit self-locking structure, and thus, the vacuum coating apparatus also possesses all the beneficial effects of a target assembly short-circuit self-locking structure.

[0037] The embodiments of the present invention are described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made within the scope of knowledge possessed by ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A target assembly short-circuit self-locking structure, characterized in that: include: A first box, a second box and a control circuit, the first box and the second box can open and close with each other, the control circuit includes a power supply, a target back plate and a contact assembly are installed on the first box, the contact assembly includes a movable pin and a contact piece, the target back plate is connected to the power supply and carries a negative voltage, the contact piece is fixed to the end of the movable pin, a top column is provided on the second box, when the first box and the second box are closed, the movable pin elastically presses the top column, and the contact piece does not contact the target back plate, when the first box moves and moves away from the second box, the contact piece contacts the target back plate to short-circuit the first box and the target back plate, and the control circuit can disconnect the target back plate from the power supply.

2. A target assembly short-circuit self-locking structure according to claim 1, characterized in that: The contact assembly is provided with a mounting seat fixedly mounted in the first box body, and the movable pin is slidably connected to the mounting seat.

3. A target assembly short-circuit self-locking structure according to claim 2, characterized in that: An elastic member is provided in the mounting seat, and the elastic member pushes the movable pin to maintain an extended state.

4. A target assembly short-circuit self-locking structure according to claim 3, characterized in that: The mounting seat, the elastic member, the movable pin and the contact piece are all electrically connected to each other.

5. The target assembly short-circuit self-locking structure according to claim 1, characterized in that: The contact assembly is installed on one side of the target backing plate, and the other side of the target backing plate is connected to the power supply.

6. The target assembly short-circuit self-locking structure according to claim 1, characterized in that: A first insulating block is provided between the target backing plate and the inner wall of the first box body, and the first insulating block is arranged on both sides of the target backing plate.

7. The target assembly short-circuit self-locking structure according to claim 1, characterized in that: The second box body is provided with second insulating blocks, and the second insulating blocks are located on both sides of the target backing plate. When the first box body and the second box body are closed, the target backing plate presses against the second insulating blocks.

8. The target assembly short-circuit self-locking structure according to claim 1, characterized in that: The contact piece is located on a side of the target back plate facing away from the second box body.

9. The target assembly short-circuit self-locking structure according to claim 1, characterized in that: A guide wire is provided on the first box body, and the guide wire is connected to the first box body and the contact piece to make the two conductive.

10. Vacuum coating equipment, characterized in that, The invention comprises a target assembly short-circuit self-locking structure according to any one of claims 1 to 9.

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