Binding rotary target material and sealing assembly used for binding target material
By setting a polytetrafluoroethylene sealing ring and a detachable positioning ring at the expansion joint of the binding rotating target, the problem of film quality degradation caused by sputtering of the binding layer is solved, and an efficient binding effect and convenient binding operation are achieved.
Patent Information
- Application Number
- CN202422305576.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-23
- Publication Date
- 2025-09-16
- Estimated Expiration
- 2034-09-23
AI Technical Summary
During the sputtering process of the existing bonded rotating target, the bonding layer at the expansion joint is easily sputtered out by the plasma, resulting in a decrease in the quality of the film.
A sealing ring and a detachable positioning ring are set at the expansion joint. The sealing ring is made of polytetrafluoroethylene, with an outer diameter equal to the inner diameter of the target tube and an inner diameter equal to the outer diameter of the back tube to prevent plasma from sputtering the binding layer; the detachable positioning ring is used for positioning and sealing to ensure that the binding layer is not sputtered.
It effectively prevents sputtering of the binding layer and maintains the quality of the film. The sealing component plays a role of positioning and sealing at the same time, which improves the convenience of the binding work.
Smart Images
Figure CN223342805U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of target material production, in particular to a binding rotary target material and a sealing component used for binding the target material. Background Art
[0002] Coating targets are sputtering sources used to deposit various functional thin films on substrates using magnetron sputtering, multi-arc ion plating, or other coating systems under appropriate process conditions. Simply put, a target is the target material bombarded by high-speed energetic particles. Targets can be categorized by shape as either planar or rotary targets. Rotary targets offer higher utilization rates and can withstand greater sputtering power, resulting in higher sputtering efficiency.
[0003] The bound rotating target material in the prior art includes a back tube, a plurality of target tubes are sleeved on the outside of the back tube, a binding layer (generally low-melting-point metal indium with good electrical and thermal conductivity) is provided between the back tube and the target tube, an expansion gap of about 0.5 mm is provided between adjacent target tubes, and a binding layer is also provided on the back tube at the expansion gap. When sputtering starts, since the target tube is thicker and the binding layer is farther away from the outer wall of the target tube, it is difficult for plasma to reach the binding layer in the expansion gap and the binding layer will not be sputtered out. When the sputtering time is longer and the target tube is thinner, the binding layer is much closer to the outer wall of the target tube, and the plasma can easily reach the binding layer in the expansion gap, thereby sputtering out the binding layer. The sputtered binding layer material will also be deposited in the film, resulting in a decrease in the quality of the film. Utility Model Content
[0004] The technical problem to be solved by the present invention is to provide a binding rotating target material in view of the above-mentioned technical deficiencies.
[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is: a bound rotating target material, including a back tube, at least two target tubes are sleeved on the outside of the back tube, a binding layer is provided between the back tube and the target tube, an expansion joint is provided between adjacent target tubes, a sealing ring is provided at the expansion joint, the sealing ring is sleeved on the outside of the back tube, the outer diameter of the sealing ring is equal to the inner diameter of the target tube, the inner diameter of the sealing ring is equal to the outer diameter of the back tube, and the material of the sealing ring is polytetrafluoroethylene.
[0006] The sealing assembly used for binding the above-mentioned rotating target material includes a sealing ring and a detachable positioning ring, the inner diameter of the detachable positioning ring is equal to the outer diameter of the sealing ring, the thickness of the detachable positioning ring is greater than the thickness of the sealing ring, and the detachable positioning ring is provided with grooves on the upper and lower sides near its inner diameter, the outer diameter of the groove is equal to the outer diameter of the target tube, and the thickness of the part of the detachable positioning ring where the groove is provided is equal to the thickness of the sealing ring.
[0007] To further optimize the technical solution, the detachable positioning ring includes two sector rings, and the central angles of the two sector rings are both 180°.
[0008] Compared with the prior art, the present invention has the following advantages: 1. There is no binding layer on the back tube at the expansion joint, and a sealing ring is provided on the back tube at the expansion joint, so that the plasma will not sputter out the binding layer and will not reduce the quality of the film; 2. The sealing component plays both a sealing role and a positioning role, thereby facilitating the binding work. BRIEF DESCRIPTION OF THE DRAWINGS
[0009] Figure 1 This is a schematic diagram of the structure of a bound rotating target.
[0010] Figure 2 for Figure 1 Magnified view of point I in the middle.
[0011] Figure 3 Schematic diagram of the sealing assembly.
[0012] Figure 4 This is a schematic diagram of the structure of the fan ring in the detachable positioning ring.
[0013] In the figure: 1, back tube; 2, target tube; 3, binding layer; 4, sealing assembly; 41, sealing ring; 42, detachable positioning ring; 421, groove. DETAILED DESCRIPTION
[0014] Exemplary embodiments will be described in detail herein, with examples illustrated in the accompanying drawings. In the following description, when referring to the drawings, identical numerals in different figures represent identical or similar elements, unless otherwise indicated. The embodiments described in the following exemplary embodiments are not intended to represent all embodiments consistent with the present application. Rather, they are merely examples of apparatuses or methods consistent with certain aspects of the present application, as detailed in the appended claims.
[0015] Example 1
[0016] Combine Figure 1-2As shown, a bound rotating target material includes a back tube 1, the back tube 1 is made of stainless steel or titanium, and the outer sleeve of the back tube 1 is provided with at least two target tubes 2, the inner diameter of the target tube 2 is about 1 mm larger than the outer diameter of the back tube 1. During vacuum magnetron sputtering, the material on the target tube 2 is sputtered and deposited on the substrate to form a thin film. A binding layer 3 is provided between the back tube 1 and the target tube 2, and the binding layer 3 is preferably indium. An expansion gap is provided between adjacent target tubes 2, and the width of the expansion gap is about 0.5 mm. A sealing ring is provided at the expansion gap. 41, the sealing ring 41 is sleeved on the outside of the back tube 1, the outer diameter of the sealing ring 41 is equal to or slightly smaller than the inner diameter of the target tube 2, the inner diameter of the sealing ring 41 is equal to or slightly larger than the outer diameter of the back tube 1, and the thickness of the sealing ring 41 is equal to the width of the expansion joint (i.e., the distance between two adjacent target tubes 2), so that there is no binding layer 3 on the back tube 1 at the expansion joint. The material of the sealing ring 41 is polytetrafluoroethylene, which has good electrical insulation and will not break. Since the sealing ring 41 is an insulator, it will not be sputtered by the plasma. During vacuum magnetron sputtering, since there is no binding layer 3 on the outside of the sealing ring 41 and the sealing ring 41 basically blocks the binding layer 3 on both sides of the expansion joint, the plasma will not sputter out the binding layer 3 (ultimately, the target tube 2 will not be used up. Generally, when the thickness of the target tube 2 is about 2 mm, the binding rotating target material will be replaced, and about 20 mm of the outer ends of the target tube 2 at both ends of the binding rotating target material will not be sputtered, so the binding layer 3 at the end will not be sputtered), and the quality of the film will not be reduced.
[0017] Example 2
[0018] Combine Figure 3-4 As shown, the sealing assembly 4 for binding the rotating target in Example 1 includes a sealing ring 41 and a detachable positioning ring 42. The material of the detachable positioning ring 42 can be stainless steel or polytetrafluoroethylene. The inner diameter of the detachable positioning ring 42 is equal to the outer diameter of the sealing ring 41. The thickness of the detachable positioning ring 42 is greater than the thickness of the sealing ring 41. The detachable positioning ring 42 is provided with grooves 421 on the upper and lower sides near its inner diameter. The outer diameter of the groove 421 is equal to the outer diameter of the target tube 2. The thickness of the part of the detachable positioning ring 42 provided with the groove 421 is equal to the thickness of the sealing ring 41. When performing the binding operation, combined with Figure 1As shown, after the lower target tube 2 is bound, a sealing ring 41 is placed from the upper end of the back tube 1 onto it. The sealing ring 41 is then lowered to the binding layer 3 at the top of the lower target tube 2 (the top surface of the binding layer 3 is flush with the top surface of the target tube 2). A removable positioning ring 42 is then placed coaxially on the outside of the sealing ring 41. Another target tube 2 is then placed coaxially on the outside of the back tube 1, with its lower end resting in the groove 421 on the upper side of the sealing ring 41. The target tube 2 and back tube 1 are now coaxial, and the removable positioning ring 42 acts as a seal. Indium melt is then injected from above into the cavity formed by the next target tube 2 and the back tube 1. After the indium solution solidifies, the removable positioning ring 42 is removed, leaving an expansion gap between the two target tubes 2. Repeat the above steps for additional target tubes 2 to obtain a bound rotating target.
[0019] Furthermore, the detachable positioning ring 42 includes two sector rings, and the central angles of the two sector rings are both 180°. By pulling the two sector rings outward, the detachable positioning ring 42 can be removed from the bound rotating target, which is more convenient.
[0020] It should be understood that the present application is not limited to the exact structures described above and shown in the drawings, and that various modifications and changes may be made without departing from the scope thereof. The scope of the present application is limited only by the appended claims.
Claims
1. A bound rotating target material, comprising a back tube (1), wherein the back tube (1) is provided with at least two target tubes (2) on its outer sleeve, a binding layer (3) is provided between the back tube (1) and the target tubes (2), and expansion joints are provided between adjacent target tubes (2), characterized in that: A sealing ring (41) is provided at the expansion joint, and the sealing ring (41) is sleeved on the outside of the back tube (1). The outer diameter of the sealing ring (41) is equal to the inner diameter of the target tube (2), the inner diameter of the sealing ring (41) is equal to the outer diameter of the back tube (1), the thickness of the sealing ring (41) is equal to the width of the expansion joint, and the material of the sealing ring (41) is polytetrafluoroethylene.
2. A sealing assembly for binding a rotating target according to claim 1, characterized in that: The invention comprises a sealing ring (41) and a detachable positioning ring (42), wherein the inner diameter of the detachable positioning ring (42) is equal to the outer diameter of the sealing ring (41), the thickness of the detachable positioning ring (42) is greater than the thickness of the sealing ring (41), and the detachable positioning ring (42) is provided with grooves (421) on the upper and lower sides of a portion close to the inner diameter thereof, the outer diameter of the groove (421) is equal to the outer diameter of the target tube (2), and the thickness of the portion of the detachable positioning ring (42) provided with the groove (421) is equal to the thickness of the sealing ring (41).
3. The sealing assembly according to claim 2, wherein: The detachable positioning ring (42) comprises two sector rings, and the central angles of the two sector rings are both 180°.