Diaphragm valve

Abstract

The utility model relates to the technical field of fluid control valves, in particular to a diaphragm valve. The diaphragm valve comprises a valve body and a first valve deck, the valve body is provided with a containing space and a first opening, a first flow channel communicates with a second flow channel through a first valve port, and the first opening is covered with the first valve deck; the valve further comprises a first valve element and a first supporting piece, the first valve element comprises a first body part, a first deformation part, a first connecting part and a first sealing part which are sequentially connected in the radial direction of the first valve element, the first body part is used for selectively opening or blocking the first valve port so that the first flow channel and the second flow channel can be communicated or disconnected, and the first supporting piece is used for supporting the first valve element in the axial direction of the valve body. The projection of the first connecting part is located in the projection of the first opening; the first supporting piece is axially fixed to the side, away from the first opening, of the first valve element, and in the axial direction of the valve body, at least part of the projection of the first supporting piece is overlapped with the projection of the first connecting part. The risk of corrosive fluid leakage caused by sealing failure of a sealing part is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of fluid control valves, and in particular to a diaphragm valve. Background Art

[0002] In the semiconductor industry, fluid control valves are commonly used to transport highly corrosive liquids. These control valves primarily consist of a valve body and a valve core. To prevent leakage of these highly corrosive fluids, an annular slot is typically provided in the valve body to mate with a sealing element. The sealing element and the slot form an interference fit to achieve a seal. However, in actual use, the movement of the valve core to open or close the valve can cause the sealing element to move slightly, causing it to loosen and, in turn, creating the risk of leaking the highly corrosive fluid. Utility Model Content

[0003] The present application provides a diaphragm valve, which improves the sealing effect of the sealing part and reduces the risk of sealing failure of the sealing part due to swinging of the valve core deformation part, thereby causing leakage of corrosive fluid.

[0004] In order to achieve the above objectives, the main technical solutions adopted in this application include:

[0005] An embodiment of the present application provides a diaphragm valve, including a valve body and a first valve cover, the valve body having a accommodating space and a first opening connected to the accommodating space, the accommodating space including a first flow channel and a second flow channel, the first flow channel and the second flow channel being connected through a first valve port, and the first valve cover is arranged on the first opening; it also includes a first valve core and a first support member, along the radial direction of the first valve core, the first valve core includes a first main body portion, a first deformation portion, a first connecting portion and a first sealing portion connected in sequence, the first main body portion is used to selectively open or block the first valve port so that the first flow channel is connected to or disconnected from the second flow channel, along the axial direction of the valve body, the projection of the first connecting portion is located within the projection of the first opening, and the first sealing portion is arranged between the valve body and the first valve cover; the first support member is axially fixed to the side of the first valve core away from the first opening, and in the axial direction of the valve body, at least part of the projection of the first support member overlaps with the projection of the first connecting portion.

[0006] The diaphragm valve proposed in the embodiment of the present application has a first connecting part connected between the first sealing part and the first deformation part. Along the axial direction of the valve body, at least part of the projection of the first support member overlaps with the projection of the first connecting part. When the first main body opens the first valve port and moves, and drives the first deformation member and the first connecting part to swing, the first support member located on the side of the first valve core away from the first opening can support the first connecting part, reduce the swing of the first connecting part, and then reduce the swing of the first sealing part, thereby improving the sealing stability of the first sealing part and reducing the risk of fluid leakage between the valve body and the first valve cover.

[0007] Optionally, a driving component for driving the first valve core to open or close the first opening is provided in the first valve cover, and the driving component has a mating portion and a second supporting portion; the mating portion is connected to the first valve core; the second supporting portion is arranged along the circumference of the mating portion, and in the axial direction of the valve body, the projection of the second supporting portion at least partially overlaps with the projection of the first deformation portion.

[0008] When the first valve core moves toward the first valve port to close the first valve port, the second support portion can reduce the swing of the first deformation portion, thereby reducing the continued swing of the first connecting portion; when the first valve core opens the first valve port, the accommodating cavity of the valve body is filled with fluid, and the fluid generates pressure on the first deformation portion. The second support portion supports the first deformation portion, reducing the continued deformation of the first deformation portion, thereby reducing the swing caused by deformation, and also reducing the probability of rupture due to excessive deformation of the first deformation portion.

[0009] Optionally, when the first valve port is in a closed state, in the axial direction of the valve body, the supporting surface of the second supporting portion gradually moves away from the first supporting portion during the process of extending from the outside to the inside.

[0010] When the first valve port is in a closed state, a transition is formed between the second support portion and the first support member, and an intermediate transition is also formed between the first deformation portion and the first connecting portion, thereby reducing damage caused by continued swinging between the first deformation portion and the first connecting portion and improving the service life of the first deformation portion and the first connecting portion.

[0011] Optionally, the supporting surface of the second supporting portion is configured as a curved surface or an inclined surface, which can better match the deformation shape of the first deformable portion, thereby enhancing the supporting effect on the first deformable portion and further increasing the life of the first deformable portion.

[0012] Optionally, the first supporting member includes a main body portion and a first supporting portion, the main body portion is crimped to the first sealing portion, and the first supporting portion extends inward from the main body portion to support the first connecting portion.

[0013] The main body is pressed against the first sealing portion, forming a pressure seal between the first sealing portion and the valve body. The first support portion extends inward from the main body. When the first valve core moves away from the valve body, the first support portion can press against the first connecting portion, reducing further swing of the first connecting portion, thereby reducing swing of the first sealing member and improving the sealing stability of the first sealing member.

[0014] Optionally, the first support member further includes a pressure-bearing portion integrally provided on the outer periphery of the main body portion, the pressure-bearing portion is pressed by the first valve cover and is provided with a gap between the pressure-bearing portion and the valve body and the first sealing portion.

[0015] The gap between the pressure-bearing part, the valve body and the first sealing part is set so that the force of the first valve cover can act more on the pressure-bearing part, thereby increasing the force of the main body acting on the first sealing part, thereby reducing the disturbance of the sealing part when the first main body moves, and further improving the sealing effect of the first sealing part.

[0016] Optionally, the valve body is provided with a sealing groove extending along its axial direction and an abutment surface located radially inside the sealing groove; the first sealing portion includes a first portion and a second portion connected in sequence, and along the radial direction of the first valve core, the first portion is connected to the first connecting portion and is sealed with the abutment surface, and the second portion is sealed with the sealing groove.

[0017] The main body of the first support member presses the first part against the abutting surface, and the main body presses the second part into the sealing groove to achieve double sealing of the valve body and improve the sealing effect of the diaphragm valve.

[0018] Optionally, along the radial direction of the first valve core, the size of the first connecting portion is X1, and the sum of the size of the first connecting portion and the size of the first deformation portion is X2, satisfying: 20%≤X1 / X2≤60%.

[0019] A larger X1 / X2 ratio indicates a larger first connection portion, and less impact on the first seal when the first deformable portion swings. However, an excessively large X1 / X2 ratio indicates an undersized first deformable portion, resulting in an undersized stroke of the first valve core and an increased risk of rupture.

[0020] Optionally, the thickness of the first connecting portion is a, the thickness of the first deformable portion is b, and (ab) / a≤10%.

[0021] Along the axial direction of the valve body, the thickness of the first connecting part is a, and the thickness of the first deformation part is b. The smaller the ratio of (ab) / a, the smaller the thickness difference between the first connecting part and the first deformation part. This setting takes into account both the stability of the first connecting part and the pressure resistance of the first deformation part, so that the first connecting part has little impact on the first sealing part and can also increase the service life of the first deformation part.

[0022] Optionally, the accommodating space also includes a third flow channel, the first flow channel and the third flow channel are connected through a second valve port, and the valve body has a second opening connected to the accommodating space and opposite to the first opening; the diaphragm valve also includes a second valve cover, a second valve core and a second support member, the second valve cover is arranged on the second opening, along the radial direction of the second valve core, the second valve core includes a second body part, a second deformation part, a second connecting part and a second sealing part connected in sequence, the second body part is used to selectively open or block the second valve port to connect or disconnect the first flow channel with the third flow channel, along the axial direction of the valve body, the projection of the second connecting part is located within the projection of the second opening, and the second sealing part is arranged between the valve body and the second valve cover; the second support member is axially fixed to the side of the second valve core away from the second opening, and in the axial direction of the valve body, at least part of the projection of the second support member overlaps with the projection of the second connecting part.

[0023] A second connecting part is connected between the second sealing part and the second deforming part. In the axial direction of the valve body, at least part of the projection of the second supporting member overlaps with the projection of the second connecting part. When the second main body opens the second valve port and moves, and drives the second deforming member and the first connecting part to swing, the second supporting member located on the second valve core away from the second opening side can support the second connecting part, reduce the swing of the second connecting part, and then reduce the swing of the second sealing part, thereby improving the sealing stability of the second sealing part. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the specific implementation methods or the description of the prior art. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0025] Figure 1 This is a structural diagram of a diaphragm valve in one embodiment of the present application, wherein the valve is in a closed state;

[0026] Figure 2 This is a structural diagram of a diaphragm valve in one embodiment of the present application, wherein the valve is in an open state;

[0027] Figure 3 This is a schematic diagram of the valve body structure of a diaphragm valve in one embodiment of the present application;

[0028] Figure 4 This is a schematic structural diagram of a first supporting member in one embodiment of the present application;

[0029] Figure 5This is a structural diagram of a diaphragm valve in another embodiment of the present application;

[0030] Figure 6 This is a structural diagram of a diaphragm valve in another embodiment of the present application.

[0031] [Description of Reference Numerals]

[0032] 1: Valve body; 10: First opening; 11: First flow channel; 12: Second flow channel; 13: Third flow channel; 14: First valve port; 15: Second valve port; 16: Abutment surface; 17: Sealing groove; 18: Sealing rib; 19: Second opening;

[0033] 2: first valve core; 21: first body portion; 22: first deformation portion; 23: first connecting portion; 24: first sealing portion; 241: first portion; 242: second portion;

[0034] 3: First valve cover;

[0035] 4: first support member; 41: main body; 42: first support portion; 43: pressure-bearing portion;

[0036] 5: driving assembly; 51: mating portion; 52: second supporting portion; 521: supporting surface;

[0037] 6: Second valve cover;

[0038] 7: second valve core; 71: second body portion; 72: second deformation portion; 73: second connecting portion; 74: second sealing portion;

[0039] 8: second driving assembly; 81: driving portion; 82: third supporting portion;

[0040] 9: The second support member. DETAILED DESCRIPTION

[0041] To make the purpose, technical solutions, and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without making creative efforts shall fall within the scope of protection of this application.

[0042] Unless otherwise defined, all technical and scientific terms used in this application have the same meanings as commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The terms "including" and "having" and any variations thereof in the specification and claims of this application and the above-mentioned drawings are intended to cover non-exclusive inclusions. The terms "first" and "second" in the specification and claims of this application or the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific order or a primary-secondary relationship.

[0043] References to "embodiments" in this application mean that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described in this application may be combined with other embodiments.

[0044] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," "connected," and "attached" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to direct connections, indirect connections through an intermediate medium, or internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0045] The term "and / or" in this application simply describes an association between related objects, indicating that three possible relationships exist. For example, A and / or B can represent: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this application generally indicates that the related objects are in an "or" relationship.

[0046] The term "multiple" in this application refers to more than two (including two). Similarly, "multiple groups" refers to more than two groups (including two groups), and "multiple pieces" refers to more than two pieces (including two pieces).

[0047] A control valve primarily consists of a valve body, a valve core, and a drive assembly. To prevent the leakage of highly corrosive fluids, an annular slot is typically provided in the valve body to mate with the sealing element. The sealing element and the annular slot form an interference fit to achieve a seal. However, in actual use, the drive assembly causes the sealing element to move slightly when opening or closing the valve core. This prolonged oscillation of the seal can cause it to loosen, leading to the risk of leaking highly corrosive fluids.

[0048] In view of this, the embodiment of the present application provides a diaphragm valve, referring to Figure 1 、 Figure 2 、 Figure 5 and Figure 6 The diaphragm valve includes a valve body 1 and a first valve cover 3. The valve body 1 has a receiving space and a first opening 10 connected to the receiving space. The receiving space includes a first flow channel 11 and a second flow channel 12. The first flow channel 11 and the second flow channel 12 are connected through a first valve port 14. The first valve cover 3 covers the first opening 10. It also includes a first valve core 2 and a first support member 4. Along the radial direction of the first valve core 2, the first valve core 2 includes a first body portion 21, a first deformation portion 22, a first connection portion 23 and a first sealing portion connected in sequence. Part 24, the first main body portion 21 is used to selectively open or block the first valve port 14 to connect or disconnect the first flow channel 11 and the second flow channel 12. Along the axial direction of the valve body 1, the projection of the first connecting portion 23 is located within the projection of the first opening 10, and the first sealing portion 24 is arranged between the valve body 1 and the first valve cover 3; the first support member 4 is axially fixed to the side of the first valve core 2 away from the first opening 10, and in the axial direction of the valve body 1, at least part of the projection of the first support member 4 overlaps with the projection of the first connecting portion 23.

[0049] The first valve core 2 is located between the first valve cover 3 and the valve body 1 and is used to open or block the first valve port 14. Specifically, the valve body 1 has a first flow channel 11 and a second flow channel 12 for wet chemicals to flow through. The first valve core 2 is provided on one axial side of the valve body 1. The first body portion 21 of the first valve core 2 can be selectively connected to the first valve port 14. When the first body portion 21 abuts against the first valve port 14, the first valve port 14 is closed, and the first flow channel 11 and the second flow channel 12 are disconnected; when the first body portion 21 is spaced apart from the first valve port 14, the first valve port 14 is opened, and the first flow channel 11 and the second flow channel 12 are connected through the first valve port 14.

[0050] The first valve core 2 includes a first body portion 21, a first deformable portion 22, a first connecting portion 23, and a first sealing portion 24, which are sequentially connected. The first body portion 21 is positioned opposite the first valve port 14 to open or close the first valve port 14. The first sealing portion 24 is positioned between the valve body 1 and the first valve cover 3 to seal the valve body 1 and prevent fluid leakage within the containment space of the valve body 1. When the first body portion 21 moves to open or close the first valve port 14, it causes the first deformable portion 22 to deform and oscillate, which in turn causes the first connecting portion 23 and the first sealing portion 24 to oscillate.

[0051] The first support member 4 is axially fixed to the side of the first valve core 2 away from the first opening 10 , that is, the first support member is provided on a side of the first valve core close to the first valve cover 3 .

[0052] The diaphragm valve proposed in the embodiment of the present application has a first connecting portion 23 connected between the first sealing portion 24 and the first deformable portion 22. Along the axial direction of the valve body 1, at least part of the projection of the first support member 4 overlaps with the projection of the first connecting portion 23. When the first main body portion 21 opens the first valve port 14 and moves, and drives the first deformable portion 21 and the first connecting portion 23 to swing, the first support member 4 located on the side of the first valve core 2 away from the first opening 10 can support the first connecting portion 23, reduce the swing of the first connecting portion 23, and further reduce the swing of the first sealing portion 24, thereby improving the sealing stability of the first sealing portion 24 and reducing the risk of fluid leakage between the valve body 1 and the first valve cover 3.

[0053] It should be understood that, in the axial direction of the valve body 1, at least a portion of the projection of the first support member 4 overlaps with the projection of the first connecting portion 23. It should be understood that, in the axial direction of the valve body 1, the projection of the first support member 4 may overlap only with the projection of the radially outer side of the first connecting portion 23, or may overlap with the projection of the entire first connecting portion 23.

[0054] Optionally, refer to Figure 1 and Figure 5 A driving assembly 5 for driving the first valve core 2 to open or block the first opening 10 is provided in the first valve cover 3. The driving assembly 5 has a matching portion 51 and a second supporting portion 52. The matching portion 51 is connected to the first valve core 2. The second supporting portion 52 is arranged along the circumference of the matching portion 51, and in the axial direction of the valve body 1, the projection of the second supporting portion 52 at least partially overlaps with the projection of the first deformation portion 22.

[0055] The driving assembly 5 is provided with a mating portion 51 connected to the first valve core 2 to achieve the purpose of driving the first valve core 2 to open or block the first valve port 14. The second supporting portion 52 is arranged along the circumference of the mating portion 51, and along the axial direction of the valve body 1, at least part of the second supporting portion 52 overlaps with the projection of the first deformable portion 22. When the first valve core 2 moves to close the first valve port 14, the second supporting portion 52 can reduce the swing of the first deformable portion 22, thereby reducing the continued swing of the first connecting portion 23; when the first valve core 2 opens the first valve port 14, the accommodating space of the valve body 1 is filled with fluid, and the fluid generates pressure on the first deformable portion 22, refer to Figure 2 In the direction of the middle arrow, the second support portion 52 supports the first deformable portion 22 , reducing the continued deformation of the first deformable portion 22 and the swing caused by the deformation, thereby reducing the probability of the first deformable portion 22 being excessively deformed and cracked.

[0056] It should be understood that the drive assembly 5 can be manually driven or pneumatically driven, depending on the specific usage. The second support portion 52 is integrally provided on the drive piston of the drive assembly 5 .

[0057] In one specific embodiment, the second support portion 52 is located on the side of the drive assembly 5 facing the first valve core 2. A mounting hole is formed at the center of the second support portion 52, and the mounting hole is configured as a mating portion 51 that is mated with the first valve core 2. When the first valve core 2 closes the first valve port 14, the second support portion 52 abuts against the first deformable portion 22, reducing the continued deformation of the first deformable portion 22. At the same time, the second support portion 52 can also act simultaneously with the first support member 4 to reduce the continued swinging of the first connecting portion 23. When the first valve core 2 opens the first valve port 14, the accommodating space of the valve body 1 is filled with fluid, which exerts pressure on the first deformable portion 22. The second support portion 52 abuts against the first deformable portion 22 to support the first deformable portion 22, reducing the continued deformation of the first deformable portion 22 and the swinging caused by the deformation, thereby reducing the probability of the first deformable portion 22 being excessively deformed and ruptured.

[0058] Optionally, refer to Figure 1 When the first valve port 14 is closed, the support surface 521 of the second support portion 52 gradually moves away from the first support portion 42 as it extends inward from the outside in the axial direction of the valve body 1. In other words, along the axial direction of the valve body 1, the support surface 521 of the second support portion 52 gradually extends inward from the outside toward the first valve port 14. When the first valve port 14 is closed, a transition is formed between the second support portion 52 and the first support member 4, and an intermediate transition is also formed between the first deformable portion 22 and the first connecting portion 23. This reduces damage caused by continued swinging between the first deformable portion 22 and the first connecting portion 23, thereby extending the lifespan of the first deformable portion 22 and the first connecting portion 23.

[0059] Optionally, refer to Figure 1 、 Figure 2 、 Figure 5 and Figure 6 The supporting surface 521 of the second supporting portion 52 is configured as a curved surface or an inclined surface. The supporting surface 521 of the second supporting portion 52 is configured as a curved surface or an inclined surface, which can better fit the deformed shape of the first deformable portion 22, thereby improving the support effect on the first deformable portion 22 and further increasing the life of the first deformable portion 22.

[0060] Optionally, refer to Figure 2 、 Figure 4 and Figure 5 The first support member 4 includes a main body portion 41 and a first support portion 42 . The main body portion 41 is pressed against the first sealing portion 24 . The first support portion 42 extends inward from the main body portion 41 to support the first connecting portion 23 .

[0061] Specifically, the valve body 1 has a first end, with a first opening 10 formed radially inwardly thereon. The first sealing portion 24 is sealed to the first end to reduce leakage of fluid from the accommodating space of the valve body 1 through the first opening 10. The main body 41 is crimped against the first sealing portion 24, forming a pressure seal between the first sealing portion 24 and the first end. The first support portion 42 extends inwardly from the main body 41. When the first valve core 2 moves in a direction away from the valve body 1, the first support portion 42 can press against the first connecting portion 23, reducing the continued swing of the first connecting portion 23, thereby reducing the swing of the first sealing component, and further improving the sealing stability of the first sealing component.

[0062] Optionally, refer to Figure 2 、 Figure 4 and Figure 5 The first support member 4 further includes a pressure-bearing portion 43 integrally provided on the outer periphery of the main body portion 41 . The pressure-bearing portion 43 is pressurized by the first valve cover 3 and is provided with a gap between the valve body 1 and the first sealing portion 24 .

[0063] Specifically, the first support member 4 includes a main body portion 41, a first support portion 42 on the radial inner side of the main body portion 41, and a pressure-bearing portion 43 on the radial outer side of the main body portion 41. The side of the pressure-bearing portion 43 away from the valve body 1 is pressurized by the first valve cover 3, and the side of the pressure-bearing portion 43 close to the valve body 1 is arranged in a gap between the valve body 1 and the first sealing portion 24, so that the force of the first valve cover 3 can act more on the pressure-bearing portion 43, thereby increasing the force of the main body portion 41 acting on the first sealing portion 24, thereby reducing the disturbance of the sealing portion when the first main body portion 21 moves, and thereby improving the sealing effect of the first sealing portion 24.

[0064] Optionally, refer to Figure 3 The valve body 1 is provided with a sealing groove 17 extending along its axial direction and an abutting surface 16 located radially inside the sealing groove 17; the first sealing portion 24 includes a first portion 241 and a second portion 242 connected in sequence. Along the radial direction of the first valve core 2, the first portion 241 is connected to the first connecting portion 23 and is sealed with the abutting surface 16, and the second portion 242 is sealed with the sealing groove 17.

[0065] The first sealing portion 24 includes a second portion 242 sealedly connected to the sealing groove 17 and a first portion 241 connected to the first connecting portion 23 and sealedly connected to the abutting surface 16 of the valve body 1. The main body 41 of the first support member 4 presses the first portion 241 against the abutting surface 16, and the main body 41 presses the second portion 242 into the sealing groove 17, thereby achieving double sealing of the valve body 1 and improving the sealing effect of the diaphragm valve.

[0066] refer to Figure 3The abutting surface 16 of the valve body 1 is provided with a sealing rib 18. The first portion 241 squeezes the sealing rib 18 and abuts the abutting surface 16, further enhancing the sealing effect of the first sealing portion 24. Of course, it should be noted that the double sealing is intended to enhance the sealing performance between the first sealing portion and the valve body 1. In other embodiments, either sealing method may be selected.

[0067] Optionally, refer to Figure 2 Along the radial direction of the first valve core 2, the dimension of the first connecting portion 23 is X1, and the sum of the dimensions of the first connecting portion 23 and the first deformable portion 22 is X2, satisfying the following: 20% ≤ X1 / X2 ≤ 60%. A larger X1 / X2 ratio indicates a larger first connecting portion 23, and less impact on the first sealing element during swinging of the first deformable portion 22. However, if the X1 / X2 ratio is too large, such as exceeding 60%, it indicates that the first deformable portion 22 is too small, resulting in an insufficient stroke of the first valve core 2 and an increased risk of rupture of the first deformable portion 22.

[0068] Optionally, refer to Figure 2 The thickness of the first connecting portion 23 is a, the thickness of the first deforming portion 22 is b, and (ab) / a≤10%.

[0069] Along the axial direction of the valve body 1, the thickness of the first connecting part 23 is a, and the thickness of the first deformation part 22 is b. The smaller the ratio of (ab) / a, the smaller the thickness difference between the first connecting part 23 and the first sealing part 24, which is equivalent to increasing the thickness of the first connecting part 23 and the first sealing part 24, thereby improving the life of the first valve core 2.

[0070] Example 2:

[0071] refer to Figure 5 and Figure 6 The accommodating space also includes a third flow channel 13, the first flow channel 11 and the third flow channel 13 are connected through a second valve port 15, and the valve body 1 has a second opening 19 that is connected to the accommodating space and opposite to the first opening 10; the diaphragm valve also includes a second valve cover 6, a second valve core 7 and a second support member, the second valve cover 6 is covered with the second opening 19, along the radial direction of the second valve core 7, the second valve core 7 includes a second body portion 71, a second deformation portion 72, a second connecting portion 73 and a second sealing portion 74 that are connected in sequence, the second body portion 71 is used to selectively open or block the second valve port 15 to connect or disconnect the first flow channel 11 and the third flow channel 13, along the axial direction of the valve body 1, the projection of the second connecting portion 73 is located within the projection of the second opening 19, and the second sealing portion 74 is arranged between the valve body 1 and the second valve cover 6; the second support member is axially fixed to the side of the second valve core 7 away from the second opening 19, and in the axial direction of the valve body 1, at least part of the projection of the second support member overlaps with the projection of the second connecting portion 73.

[0072] The second valve core 7 is located between the second valve cover 6 and the valve body 1 and is used to open or block the second valve port 15. Specifically, the valve body 1 has a first flow channel 11 and a third flow channel 13 for wet chemicals to flow through. The second valve core 7 is arranged on one axial side of the valve body 1. The second body portion 71 of the second valve core 7 can be selectively connected to the second valve port 15. When the second body portion 71 abuts the second valve port 15, the second valve port 15 is closed, and the first flow channel 11 and the third flow channel 13 are disconnected; when the second body portion 71 is spaced apart from the second valve port 15, the second valve port 15 is opened, and the first flow channel 11 and the third flow channel 13 are connected through the second valve port 15.

[0073] The second valve core 7 includes a second body portion 71, a second deformable portion 72, a second connecting portion 73, and a second sealing portion 74, which are sequentially connected. The second body portion 71 is positioned opposite the second valve port 15 to open or close the second valve port 15. The second sealing portion 74 is positioned between the valve body 1 and the second valve cover 6 to seal the valve body 1 and prevent fluid leakage within the space within the valve body 1. When the second body portion 71 moves to open or close the second valve port 15, it causes the second deformable portion 72 to deform and oscillate, which in turn causes the second connecting portion 73 and the second sealing portion 74 to oscillate.

[0074] A second connecting portion 73 is connected between the second sealing portion 74 and the second deforming portion 72. Along the axial direction of the valve body 1, at least part of the projection of the second supporting member overlaps with the projection of the second connecting portion 73. When the second main body portion 71 opens the second valve port 15 and moves, and drives the second deforming portion 72 and the first connecting portion 23 to swing, the second supporting member located on the side of the second valve core 7 away from the second opening 19 can support the second connecting portion 73, reduce the swing of the second connecting portion 73, and further reduce the swing of the second sealing portion 74, thereby improving the sealing stability of the second sealing portion 74.

[0075] It should be understood that the diaphragm valve in the present application can be a two-way valve or a three-way valve.

[0076] A second drive assembly 8 is housed within the second valve cover 6. The second drive assembly 8 comprises a drive portion 81 and a connecting portion. The first valve core 2 and the second valve core 7 are connected via a connecting shaft. In one embodiment, the connecting portion includes an integral third support portion 82. The fluid within the containment space of the valve body 1 exerts a force on the second deformable portion 72, causing the first deformable portion 22 to deform and pull. The third support portion 82 supports and limits the second deformable portion 72, thereby increasing its lifespan.

[0077] Among them, the first valve core 2 and the second valve core 7 have the same structure, the first support member 4 and the second support member 9 have the same structure, and the second support portion 42 and the third support portion 82 have the same structure, which will not be repeated here.

[0078] The diaphragm valve provided in this application provides a first connecting portion 23 between the first deformable portion 22 and the first sealing portion 24. Along the axial direction of the valve body 1, at least a portion of the projection of the first support member 4 coincides with the projection of the first connecting portion 23. When the first valve core 2 moves away from the valve body 1, the first support member 4 can abut against the first connecting portion 23, reducing the disturbance of the first sealing portion 24 caused by the first connecting portion 23 following the movement of the first deformable portion 22, thereby improving the sealing stability of the first sealing member. At the same time, the abutment of the first support member 4 against the first sealing portion 24 further strengthens the sealing effect of the first sealing portion 24. A second supporting portion 52 is integrally provided on the drive assembly 5. The fluid within the accommodating space of the valve body 1 exerts a force on the first deformable portion 22, causing the first deformable portion 22 to deform and pull. The second supporting portion 52 can support and limit the first deformable portion 22, thereby improving the life of the first deformable portion 22.

[0079] It should also be noted that the terms "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, commodity, or apparatus that includes a series of elements includes not only those elements but also other elements not explicitly listed, or includes elements inherent to such process, method, commodity, or apparatus. In the absence of further limitations, an element defined by the phrase "comprises a ..." does not exclude the presence of other identical elements in the process, method, commodity, or apparatus that includes the element.

[0080] The various embodiments in this specification are described in a progressive manner, and the same or similar parts between the various embodiments can be referred to each other. Each embodiment focuses on the differences from other embodiments.

[0081] The above are merely embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application should all be included within the scope of the claims of the present application.

[0082] Although the embodiments of the present application have been described with reference to the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present application, and such modifications and variations shall fall within the scope defined by the appended claims.

Claims

1. A diaphragm valve, comprising: The valve body has a receiving space and a first opening communicating with the receiving space, the receiving space includes a first flow channel and a second flow channel, the first flow channel and the second flow channel are communicated through a first valve port, A first valve cover, which is provided on the first opening; characterized in that it further comprises: a first valve core, comprising a first body portion, a first deformable portion, a first connecting portion, and a first sealing portion connected in sequence along a radial direction of the first valve core, the first body portion being used to selectively open or block the first valve port to connect or disconnect the first flow channel with the second flow channel, the first connecting portion being projected within a projection of the first opening along an axial direction of the valve body, and the first sealing portion being disposed between the valve body and the first valve cover; A first support member is axially fixed to a side of the first valve core away from the first opening. In the axial direction of the valve body, at least a portion of a projection of the first support member overlaps with a projection of the first connecting portion.

2. The diaphragm valve according to claim 1, characterized in that A driving assembly for driving the first valve core to open or block the first opening is provided in the first valve cover, and the driving assembly comprises: a matching portion connected to the first valve core; The second supporting portion is arranged along the circumference of the matching portion, and in the axial direction of the valve body, a projection of the second supporting portion at least partially overlaps with a projection of the first deformation portion.

3. The diaphragm valve according to claim 2, characterized in that When the first valve port is in a closed state, in the axial direction of the valve body, the supporting surface of the second supporting portion gradually moves away from the first supporting member during the process of extending from the outside to the inside.

4. The diaphragm valve according to claim 2 or 3, characterized in that: The supporting surface of the second supporting portion is configured as a curved surface or an inclined surface.

5. The diaphragm valve according to claim 1, characterized in that The first supporting member includes a main body and a first supporting portion. The main body is pressed against the first sealing portion. The first supporting portion extends inward from the main body to support the first connecting portion.

6. The diaphragm valve according to claim 5, characterized in that The first support member further includes a pressure-bearing portion integrally provided on the outer periphery of the main body portion. The pressure-bearing portion is pressed by the first valve cover and is provided with a gap between the pressure-bearing portion and the valve body and the first sealing portion.

7. The diaphragm valve according to claim 5, characterized in that The valve body is provided with a sealing groove extending along its axial direction and an abutment surface located radially inside the sealing groove; the first sealing portion includes a first portion and a second portion connected in sequence, and along the radial direction of the first valve core, the first portion is connected to the first connecting portion and is sealed with the abutment surface, and the second portion is sealed with the sealing groove.

8. The diaphragm valve according to claim 1, characterized in that Along the radial direction of the first valve core, the size of the first connecting portion is X1, and the sum of the size of the first connecting portion and the size of the first deformation portion is X2, satisfying: 20%≤X1 / X2≤60%.

9. The diaphragm valve according to claim 1 or 8, characterized in that: The thickness of the first connecting portion is a, the thickness of the first deformable portion is b, and (ab) / a≤10%.

10. The diaphragm valve according to claim 1, wherein The accommodating space further includes a third flow channel, the first flow channel and the third flow channel are connected through a second valve port, and the valve body has a second opening connected to the accommodating space and opposite to the first opening; The diaphragm valve further includes a second valve cover, a second valve core, and a second support member. The second valve cover is arranged to cover the second opening. Along the radial direction of the second valve core, the second valve core includes a second body portion, a second deforming portion, a second connecting portion, and a second sealing portion that are connected in sequence. The second body portion is used to selectively open or block the second valve port to connect or disconnect the first flow channel with the third flow channel. Along the axial direction of the valve body, the projection of the second connecting portion is located within the projection of the second opening. The second sealing portion is arranged between the valve body and the second valve cover. The second support member is axially fixed to the side of the second valve core away from the second opening. In the axial direction of the valve body, at least a portion of the projection of the second support member overlaps with the projection of the second connecting portion.

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