Wet etching device

Abstract

The utility model relates to a wet etching device. The wet etching device comprises an etching groove. The bearing rollers are arranged in the etching groove and are sequentially arranged in the first direction at the same horizontal height; a bearing face used for bearing and transferring materials is formed on the tops, in the vertical direction, of the multiple bearing rollers. The pressure rollers are arranged in the etching groove and are sequentially arranged in the first direction at the same horizontal height; the plurality of pressure rollers form a pressure surface for applying pressure to materials along the bottom in the vertical direction; the pressure surface and the bearing surface are oppositely arranged at intervals. Each pressure roller comprises a first roller and a connecting shaft penetrating through the first roller in the axis direction of the first roller, and the two ends of the connecting shaft are connected to the groove wall of the etching groove. A liquid storage cavity is formed in the connecting shaft, and a liquid moving hole used for injecting liquid into the liquid storage cavity is formed in the connecting shaft. According to the wet etching device, the weight of the pressure roller can be conveniently adjusted.

Description

Technical Field

[0001] The present application relates to the field of photovoltaic technology, and in particular to a wet etching device. Background Art

[0002] During the preparation of solar cells, it is usually necessary to etch the cell, and wet etching is a commonly used etching method. During the wet etching process, in order to ensure that the etching solution has a better wetting and etching effect on the cell, a pressure roller is usually used to apply pressure to the cell, so that the cell is immersed in the etching solution and transported via a transfer roller. In traditional wet etching equipment, the weight of the pressure roller cannot be adjusted. As the thickness of silicon wafers continues to decrease, an overweight pressure roller can easily cause defects such as hidden cracks, fragments, and roller marks on the cell, thereby affecting the yield and efficiency of the cell.

[0003] Therefore, when wet etching cells of varying thicknesses, the wet etching device's pressure rollers must be remanufactured to achieve the appropriate pressure, increasing costs. Furthermore, after replacement, the pressure rollers require acid and alkali cleaning and polishing, wasting time before resetting the machine and impacting production efficiency. Utility Model Content

[0004] Therefore, it is necessary to provide a wet etching device. In the wet etching device of the present application, the weight of the pressure roller can be easily adjusted, thereby reducing the risk of hidden cracks, fragments, and roller marks on the cell. At the same time, the weight adjustment of the pressure roller is simple to operate, which can save costs and improve production efficiency.

[0005] The present application provides a wet etching device, comprising: an etching tank;

[0006] A plurality of carrying rollers, each of the carrying rollers is disposed in the etched groove and sequentially arranged at the same horizontal height along a first direction; the plurality of carrying rollers form a carrying surface for carrying and transferring materials along the top of the vertical direction;

[0007] a plurality of pressure rollers, each of the pressure rollers being disposed in the etching groove and sequentially arranged at the same horizontal height along the first direction; the plurality of pressure rollers forming a pressure surface along the bottom of the vertical direction for applying pressure to the material; the pressure surface and the bearing surface being relatively spaced apart;

[0008] Each of the pressure rollers includes a first roller and a connecting shaft that passes through the first roller along the axial direction of the first roller, and the two ends of the connecting shaft are respectively connected to the groove walls of the etched groove; the interior of the connecting shaft has a liquid storage cavity, and the connecting shaft is provided with a pipetting hole for injecting liquid into the liquid storage cavity.

[0009] In some embodiments, the pipetting holes are provided at both ends where the connecting shaft is connected to the etching groove.

[0010] In some embodiments, the liquid storage cavity extends along the axial direction of the connecting shaft, and the two end surfaces of the connecting shaft are respectively provided with the pipetting holes.

[0011] In some embodiments, a liquid storage hole is provided inside the first roller, and the liquid storage hole is communicated with the liquid storage cavity.

[0012] In some embodiments, there are multiple liquid storage holes, and the multiple liquid storage holes are distributed at intervals in the first roller.

[0013] In some embodiments, the connecting shaft extends along a second direction, which is perpendicular to the first direction; and a plurality of the first rollers are spaced apart and distributed along the second direction on each connecting shaft.

[0014] In some embodiments, each of the supporting rollers includes a plurality of second rollers, and a rotating shaft passing through the second roller along the axial direction of the second roller, and both ends of the rotating shaft are respectively connected to the groove walls of the etched groove; the rotating shaft extends along the second direction, and on each of the rotating shafts, a plurality of second rollers are spaced apart along the second direction.

[0015] In some embodiments, the number of the carrying rollers and the pressure rollers is the same, the number of the second rollers on each rotating shaft is the same as the number of the first rollers on each carrying roller, and the first rollers and the second rollers correspond one to one.

[0016] In some embodiments, the wet etching device further includes a detection member, which is disposed on the etching groove and is used to detect the gravity of each of the pressure rollers.

[0017] In some embodiments, the number of the detection elements is the same as the number of the pressure rollers, and the detection elements and the pressure rollers correspond one to one, and each detection element is used to detect the gravity of one of the pressure rollers.

[0018] In the above-mentioned wet etching device, the material is carried and transported by the carrying roller, and the material on the carrying surface is pressurized by the pressure roller. When adjusting the pressure applied by the pressure roller to the material, the weight of the pressure roller needs to be adjusted. Liquid can be added to the liquid storage chamber inside the connecting shaft or liquid can be removed from the liquid storage chamber through the pipetting hole opened on the connecting shaft, thereby adjusting the overall weight of the pressure roller. In the wet etching device of the present application, it is convenient to adjust the weight of the pressure roller, thereby reducing the risk of hidden cracks, fragments, and roller marks on the battery cells. At the same time, the operation of adjusting the weight of the pressure roller is simple, which can save costs and improve production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic structural diagram of a wet etching device provided in one embodiment of the present application;

[0020] Figure 2 A schematic diagram of a partial structure of a wet etching device provided in one embodiment of the present application;

[0021] Figure 3 A schematic structural diagram of a first roller provided in an embodiment of the present application.

[0022] Description of Reference Numerals

[0023] 10. Etching groove; 20. Carrying roller; 30. Pressure roller; 31. Connecting shaft; 32. First roller; 320. Liquid storage hole; 33. Transfer hole; 40. Battery cell. DETAILED DESCRIPTION

[0024] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this application pertains. The terms used herein in the specification of this application are for the purpose of describing specific embodiments only and are not intended to limit this application. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0026] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0027] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. In the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0028] In this application, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0029] For example, see Figure 1 As shown, Figure 1 A schematic diagram of the structure of a wet etching device provided in an embodiment of the present application. The wet etching device of the present application can be used to wet etch a material. For example, the wet etching device can be used to wet etch silicon wafers or solar cells during the production of solar cells.

[0030] Reference Figure 1~Figure 2As shown, the present application provides a wet etching device, comprising: an etching groove 10. A plurality of carrying rollers 20, each of which is disposed in the etching groove 10 and sequentially arranged at the same horizontal height along a first direction; the plurality of carrying rollers 20 form a carrying surface for carrying and transferring materials along the top in the vertical direction. A plurality of pressure rollers 30, each of which is disposed in the etching groove 10 and sequentially arranged at the same horizontal height along the first direction; the plurality of pressure rollers 30 form a pressure surface for applying pressure to the material along the bottom in the vertical direction; the pressure surface and the carrying surface are arranged relative to each other. Each pressure roller 30 includes a first roller 32, and a connecting shaft 31 that passes through the first roller 32 along the axis of the first roller 32, with both ends of the connecting shaft 31 respectively connected to the groove wall of the etching groove 10. The connecting shaft 31 has a liquid storage chamber inside, and a pipetting hole 33 is provided on the connecting shaft 31 for injecting liquid into the liquid storage chamber.

[0031] It should be understood that the rollers being arranged at the same horizontal height means that their axes are at the same height. Multiple carrier rollers 20 form a bearing surface along their vertical tops for carrying and transporting materials, while multiple pressure rollers 30 form a pressure surface along their vertical bottoms for applying pressure to the materials. The pressure surface and the carrier surface are spaced relative to each other, with the gap between the pressure surface and the carrier surface allowing for the passage of materials. The carrier rollers 20 and pressure rollers 30 can rotate in opposite directions to transport the materials. In the wet etching device described above, the carrier rollers 20 carry and transport the materials, while the pressure rollers 30 apply pressure to the materials on the bearing surface. Adjusting the pressure applied by the pressure rollers 30 requires adjusting the weight of the pressure rollers 30. Liquid can be added to or removed from the liquid storage chamber within the connecting shaft 31 through the pipetting port 33 provided on the connecting shaft 31, thereby adjusting the overall weight of the pressure rollers 30. The wet etching device of the present application facilitates adjustment of the pressure roller weight, thereby reducing the risk of hidden cracks, fragmentation, and roller marks on the cell. At the same time, the weight adjustment of the pressure roller is simple, which can save costs and improve production efficiency. Figure 1 、 Figure 2 As shown, Figure 1 、 Figure 2 The X direction is the first direction.

[0032] In some embodiments, the pipetting holes 33 are formed on the end surfaces of both ends where the connecting shaft 31 is connected to the etching groove 10 .

[0033] The pipetting holes 33 are formed on the end surfaces of the connecting shaft 31 and the etching groove 10 , so that the operator can easily add liquid to the liquid storage cavity inside the connecting shaft 31 or remove liquid from the liquid storage cavity through the pipetting holes 33 .

[0034] In some embodiments, the liquid storage cavity extends from one of the pipetting holes 33 to another of the pipetting holes 33 along the axial direction of the connecting shaft 31 .

[0035] The liquid storage cavity extends from one of the pipetting holes 33 to the other pipetting hole 33 along the axial direction of the connecting shaft 31. When the gravity of the pressure roller 30 is adjusted by injecting liquid into the liquid storage cavity, the gravity changes of various parts of the pressure roller 30 can be made more uniform.

[0036] Reference Figure 3 As shown, in some embodiments, a liquid storage hole 320 is provided inside the first roller 32, and the liquid storage hole 320 is communicated with the liquid storage cavity.

[0037] In some embodiments, there are multiple liquid storage holes 320 , and the multiple liquid storage holes 320 are distributed at intervals within the first roller 32 .

[0038] Multiple liquid storage holes 320 are distributed at intervals in the first roller 32. When the gravity of the pressure roller 30 is adjusted by injecting liquid into the liquid storage cavity, the gravity of each first roller 32 can also change synchronously, so that the gravity change of each part of the pressure roller 30 can be more uniform.

[0039] In some embodiments, the connecting shaft 31 extends along a second direction that is perpendicular to the first direction. On each connecting shaft 31, a plurality of first rollers 32 are spaced apart and distributed along the second direction.

[0040] For example, referring to Figure 2 As shown, Figure 2 The Y direction is the first direction.

[0041] In some embodiments, each carrier roller 20 includes a plurality of second rollers and a rotating shaft extending along the axis of the second rollers, with both ends of the rotating shaft connected to the walls of the etched groove 10. The rotating shaft extends along the second direction, and each rotating shaft has a plurality of second rollers spaced apart along the second direction.

[0042] In some embodiments, the number of carrying rollers 20 and pressure rollers 30 is the same, the number of second rollers on each rotating shaft is the same as the number of first rollers 32 on each carrying roller 20, and the multiple first rollers 32 correspond to the multiple second rollers one by one.

[0043] It can be understood that the one-to-one correspondence between the multiple first rollers 32 and the multiple second rollers means that one first roller 32 is positioned opposite to and spaced apart from a second roller, and the other first rollers 32 and the other second rollers are arranged according to the above rules.

[0044] In some embodiments, the wet etching apparatus further includes a detection element. The detection element is disposed on the etching tank 10. The detection element is used to detect the weight of each pressure roller 30. By detecting the weight of the pressure roller 30 through the detection element, changes in the weight of the pressure roller 30 can be detected, thereby facilitating accurate adjustment of the weight of the pressure roller 30.

[0045] In some embodiments, the number of the detection elements is the same as the number of the pressure rollers 30 , and the detection elements and the pressure rollers 30 correspond one to one, and each detection element is used to detect the gravity of one pressure roller 30 .

[0046] Refer again Figures 1 to 3 As shown, in some embodiments, the wet etching apparatus includes: an etching tank 10; a plurality of carrying rollers 20, each disposed within the etching tank 10 and arranged in sequence along a first direction at the same horizontal height; the plurality of carrying rollers 20 form a carrying surface along the vertical top for carrying and transferring materials; a plurality of pressure rollers 30, each disposed within the etching tank 10 and arranged in sequence along the first direction at the same horizontal height; the plurality of pressure rollers 30 form a pressure surface along the vertical bottom for applying pressure to the materials; the pressure surface and the carrying surface are spaced relative to each other. Each pressure roller 30 includes a first roller 32 and a connecting shaft 31 extending through the first roller 32 along its axis. The connecting shaft 31 has two ends connected to the walls of the etching tank 10. The connecting shaft 31 has a liquid storage cavity within it and a pipetting hole 33 formed on the connecting shaft 31 for injecting liquid into the liquid storage cavity. The pipetting hole 33 is formed on the end surfaces of the connecting shaft 31 where it connects to the etching tank 10. The liquid storage cavity extends from one transfer hole 33 to the other transfer hole 33 along the axial direction of the connecting shaft 31. A liquid storage hole 320 is provided within the first roller 32, communicating with the liquid storage cavity. There are multiple liquid storage holes 320, spaced apart within the first roller 32. The connecting shaft 31 extends along a second direction, which is perpendicular to the first direction. Multiple first rollers 32 are spaced apart along the second direction on each connecting shaft 31. Each supporting roller 20 includes multiple second rollers and a rotating shaft extending along the axis of the second roller, with both ends of the rotating shaft connected to the walls of the etched groove 10. The rotating shaft extends along the second direction, and multiple second rollers are spaced apart along the second direction on each rotating shaft. The number of supporting rollers 20 and pressure rollers 30 is the same, and the number of second rollers on each rotating shaft is the same as the number of first rollers 32 on each supporting roller 20, with a one-to-one correspondence between the multiple first rollers 32 and the multiple second rollers. The wet etching device also includes a detection member disposed on the etching tank 10 and configured to detect the weight of each pressure roller 30. The number of detection members is the same as the number of pressure rollers 30, and there is a one-to-one correspondence between each detection member and each pressure roller 30. Each detection member is configured to detect the weight of a pressure roller 30.

[0047] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0048] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent. It should be noted that a person skilled in the art could make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of protection of the patent in this application shall be based on the appended claims, and the specification and drawings may be used to interpret the claims.

Claims

1. A wet etching device, characterized in that: include: Etched groove (10); A plurality of carrying rollers (20), each of the carrying rollers (20) being disposed in the etching groove (10) and sequentially arranged at the same horizontal height along a first direction; the plurality of carrying rollers (20) forming a carrying surface for carrying and transferring materials along the top of the vertical direction; A plurality of pressure rollers (30), each of the pressure rollers (30) being arranged in the etching groove (10) and sequentially arranged at the same horizontal height along the first direction; the plurality of pressure rollers (30) forming a pressure surface for applying pressure to the material along the bottom of the vertical direction; the pressure surface and the bearing surface being arranged relative to each other with a spacing therebetween; Each of the pressure rollers (30) includes a first roller (32) and a connecting shaft (31) that passes through the first roller (32) along the axial direction of the first roller (32), and the two ends of the connecting shaft (31) are respectively connected to the groove wall of the etching groove (10); the connecting shaft (31) has a liquid storage cavity inside, and the connecting shaft (31) is provided with a pipetting hole (33) for injecting liquid into the liquid storage cavity.

2. The wet etching device according to claim 1, wherein: The pipetting holes (33) are opened on the end surfaces at both ends where the connecting shaft (31) is connected to the etching groove (10).

3. The wet etching device according to claim 2, characterized in that: The liquid storage cavity extends from one of the pipetting holes (33) to the other pipetting hole (33) along the axial direction of the connecting shaft (31).

4. The wet etching device according to claim 1, wherein: A liquid storage hole (320) is provided inside the first roller (32), and the liquid storage hole (320) is communicated with the liquid storage cavity.

5. The wet etching device according to claim 4, characterized in that: There are a plurality of liquid storage holes (320), and the plurality of liquid storage holes (320) are distributed at intervals within the first roller (32).

6. The wet etching device according to any one of claims 1 to 5, characterized in that: The connecting shaft (31) extends along a second direction, which is perpendicular to the first direction; and a plurality of the first rollers (32) are spaced apart and distributed along the second direction on each connecting shaft (31).

7. The wet etching device according to claim 6, characterized in that: Each of the supporting rollers (20) includes a plurality of second rollers and a rotating shaft that passes through the second roller along the axial direction of the second roller, and both ends of the rotating shaft are respectively connected to the groove wall of the etched groove (10); the rotating shaft extends along the second direction, and on each of the rotating shafts, a plurality of second rollers are spaced apart and distributed along the second direction.

8. The wet etching device according to claim 7, characterized in that: The number of the bearing rollers (20) and the pressure rollers (30) is the same, the number of the second rollers on each rotating shaft is the same as the number of the first rollers (32) on each bearing roller (20), and the first rollers (32) and the second rollers correspond one to one.

9. The wet etching device according to any one of claims 1 to 5, characterized in that: The wet etching device further comprises a detection member, which is arranged on the etching groove (10) and is used to detect the gravity of each pressure roller (30).

10. The wet etching device according to claim 9, characterized in that: The number of the detection members is the same as the number of the pressure rollers (30), and the detection members and the pressure rollers (30) correspond one to one, and each detection member is used to detect the gravity of one pressure roller (30).

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