Plasma enhanced chemical vapor deposition (PECVD) furnace tube fragment and dust collecting equipment

Abstract

The PECVD furnace tube fragment and dust collecting equipment comprises a lifting table, and a collecting device is placed on a platform at the top of the lifting table; the collecting device comprises a storage box in butt joint with the furnace tube, the interior of the storage box is made of stainless steel materials, the exterior of the storage box is made of heat-resistant materials, and a grip is arranged on the outer wall of the storage box. A stepped opening is formed in the front end of the storage box, and a suction device is arranged on the lower side of the bottom of the stepped opening; and the upper cover made of the same material as the storage box is arranged on the upper side of the stepped opening. When furnace tube fragments and dust drawn out from a furnace tube need to be received by the storage box, the suction device can fix and limit the storage box on the lower side of the furnace tube, so that the risk of scalding caused by displacement of the storage box during operation of a worker is avoided; and meanwhile, after the sundries in the furnace tube are cleaned, the opening can be directly sealed by using the upper cover, so that the sundries in the storage box are effectively prevented from being scattered out, and secondary damage is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cell preparation equipment, in particular to a PECVD furnace tube fragment and dust collection device. Background Art

[0002] PECVD, or plasma-enhanced chemical vapor deposition, is used during the solar cell manufacturing process to deposit a deep blue anti-reflective coating on the surface of solar cells. Tubular PECVD systems use a quartz tube similar to a diffusion furnace as the deposition chamber, a resistance furnace as the heater, and a graphite boat, capable of accommodating multiple silicon wafers, inserted into the tube for deposition. After prolonged use or when the vacuum pump shuts down, reactants can deposit on the tube walls, causing dust accumulation. During use, this dust can flow within the chamber and adhere to the solar cell surface, contaminating the product. Currently, a quartz rake is often used to remove dust from the tube walls.

[0003] With the rapid development of my country's photovoltaic industry, the demand for equipment production capacity continues to increase. Existing equipment has grown from two furnace tubes to six, arranged vertically. Currently, when cleaning dust from the tube walls, maintenance personnel, while cooling the equipment, use a rake to scrape the dust from the interior toward the furnace opening. Then, holding a plastic box with one hand, they scrape the debris into the box with the other. Cleaning the top three tubes requires climbing, making this operation inconvenient. When scraping debris directly from the tubes without cooling the equipment (around 500°C), debris and dust are scattered all over the floor, significantly impacting machine hygiene and cleanliness, and increasing the risk of burns for operators. Utility Model Content

[0004] In response to the technical problems that it is inconvenient for operators to operate at heights, and there are many disadvantages caused by directly scraping debris out of the furnace tubes before the temperature is lowered, the present technical solution provides a PECVD furnace tube fragment and dust collection device. The collection device and equipment maintenance personnel can be lifted to the upper side by a lifting platform to facilitate the handling of debris in the upper furnace tubes. The storage box and upper cover in the collection device can effectively store debris and provide good heat insulation to avoid burns to equipment maintenance personnel. It can effectively solve the above problems.

[0005] The utility model is achieved through the following technical solutions:

[0006] A PECVD furnace tube fragment and dust collection device includes a lifting platform, and a collection device is placed on the platform at the top of the lifting platform; the collection device includes a storage box connected to the furnace tube, the interior of the storage box is made of stainless steel, the exterior is made of heat-resistant material, and a handle is provided on the outer wall; and a stepped opening is provided at the front end of the storage box, and a suction device is provided on the lower side of the bottom of the stepped opening; an upper cover made of the same material as the storage box is provided on the upper side of the stepped opening.

[0007] Furthermore, the collecting device is cylindrical and is cut at a set opening to obtain a stepped opening that matches the storage box and the upper cover; and matching magnetic buckles are provided at corresponding positions at the stepped openings of the storage box and the upper cover.

[0008] Furthermore, the magnetic buckle is embedded and fixed in the side wall of the oblique opening.

[0009] Furthermore, a base is provided at the bottom of the storage box, and a telescopic block is provided at the front end of the base, and the telescopic block can be extended to a length greater than or equal to the length of the bottom of the upper cover; when the upper cover is covered on the stepped opening of the storage box, the telescopic block of the base is pulled out to the bottom of the upper cover to bear the weight of the upper cover.

[0010] Furthermore, a hook hole is provided on the side wall at the front end of the base, so that the hook can hook the hole to pull out the extension block.

[0011] Furthermore, the tops of the storage box and the upper cover are both provided with handles, and a locking device is provided between the handles of the storage box and the upper cover.

[0012] Furthermore, the locking device includes a rotating shaft arranged on the upper cover handle, which is installed in the vertical rod of the upper cover handle close to the storage box handle. A traction rope is wound around the rotating shaft, and the end of the traction rope passes through the side wall of the upper cover handle and is fixed with a rectangular block.

[0013] Furthermore, a locking through hole is provided on the side of the storage box handle close to the upper cover handle, and the diameter of the locking through hole is larger than the diagonal of the minimum area of ​​the rectangular block; a locking hole for locking the square is provided on the upper cover handle, and the diameter of the locking hole is larger than the diagonal of the minimum area of ​​the rectangular block and smaller than the length of the rectangular block.

[0014] Furthermore, one end or both ends of the rotating shaft are installed in the vertical rod of the upper cover handle close to the storage box handle through a torsion spring, which is convenient for recovering the traction rope.

[0015] Furthermore, a suction device is installed on the side wall at the front end of the base. The suction device adopts a magnetic buckle or a suction cup, which is selected according to the material of the lower side of the furnace tube.

[0016] Furthermore, rollers are provided at the bottom of the lifting platform to facilitate the movement of the lifting platform; brakes and height adjustment devices are provided on the rollers, so that after the lifting platform moves to a specified position, the position of the lifting platform can be limited by the brakes to prevent the lifting platform from shifting. At the same time, when the ground is uneven, the height of the rollers can be adjusted by the height adjustment device to ensure that the platform is in a horizontal state; a groove for limiting the storage box is provided on the platform, and placing the storage box in the groove can further prevent the storage box from shifting. Beneficial effects

[0017] The PECVD furnace tube fragment and dust collection device proposed in this utility model has the following beneficial effects compared with the prior art:

[0018] The utility model can lift the collection device and equipment maintenance personnel to the upper side via a lifting platform, making it easier to handle debris in the three upper furnace pipes. When a storage box is needed to collect the furnace pipe fragments and dust removed from the furnace pipes, the storage box is placed in the groove to effectively prevent the storage box from shifting. The front end of the storage box is fixed to the lower side of the furnace pipe by a suction device, avoiding the storage box from shifting during operation and increasing the risk of burns. At the same time, after the debris in the furnace pipes is cleaned, the opening can be directly closed with the upper cover, effectively preventing the debris in the storage box from spilling out and avoiding secondary injuries.

[0019] The utility model can effectively store debris through the arrangement of the storage box and the upper cover in the collection device. The arrangement of the heat insulation layer on the outside of the storage box and the upper cover can insulate the debris in the storage box and prevent burns to the equipment maintenance personnel. The magnetic buckles corresponding to the stepped openings in the storage box and the upper cover can fix the upper cover to the opening of the storage box through magnetic force, thereby increasing the stability of the upper cover; the arrangement of the extension block on the base can bear the weight of the upper cover, reduce the probability of the upper cover sliding down due to gravity, and further increase the stability of the upper cover when it is closed. The arrangement of the locking device further limits the upper cover to avoid the possibility of the upper cover opening due to bumps when the collection device is transported to the landfill. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the overall structure of the collection device of the present invention.

[0021] Figure 2 This is a front view of the overall structure of the collecting device in the present invention.

[0022] Figure 3 It is a structural schematic diagram of the storage box in the collection device.

[0023] Figure 4 It is a structural schematic diagram of the upper cover in the collection device.

[0024] The numbers in the accompanying drawings are: 1-main unit, 2-lifting platform, 21-platform, 22-roller, 3-furnace tube, 4-collecting device, 41-storage box, 42-upper cover, 43-handle, 44-stepped opening, 45-base, 451-telescopic block, 452-hook hole, 5-magnetic buckle, 6-suction device, 7-locking device, 71-rotating shaft, 72-traction rope, 73-rectangular block, 74-locking through hole, 75-locking hole. DETAILED DESCRIPTION

[0025] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. The described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Under the premise of not departing from the design concept of the present invention, various modifications and improvements made by ordinary persons in this field to the technical solutions of the present invention should fall within the scope of protection of the present invention. Example

[0026] like Figure 1 As shown, a PECVD furnace tube fragment and dust collection device includes a lifting platform 2, and a collection device 4 is placed on the platform 21 at the top of the lifting platform 2; a roller 22 is provided at the bottom of the lifting platform 2 to facilitate the movement of the lifting platform 2; a brake and a height adjustment device are provided at the roller 22, so that after the lifting platform 2 moves to the specified position, the position of the lifting platform 2 can be limited by the brake to prevent the lifting platform 2 from shifting. At the same time, when the ground is uneven, the height of the roller can be adjusted by the height adjustment device to ensure that the platform is in a horizontal state. The rollers and height adjustment device of the lifting platform, as well as the lifting mechanism of the lifting platform, all use conventional structures in the prior art. This embodiment does not make effective improvements to this, and will not be elaborated here.

[0027] The platform 21 is provided with a groove matching the storage box base for limiting the storage box 41. When in use, the storage box 41 is placed in the groove, which can initially limit the storage box 41 and prevent the storage box 41 from shifting.

[0028] like Figure 2 As shown, the collecting device 4 includes a storage box 41 docked with the furnace tube, and an upper cover 42 arranged on the upper side of the storage box 41; the storage box 41 is made of stainless steel inside the upper cover 42 and heat-resistant material outside, and a handle 43 is provided on the top of the outer wall.

[0029] like Figure 3 and Figure 4As shown, the collecting device 4 is cylindrical and is cut at a set opening to obtain a stepped opening 44 that matches the storage box 41 and the upper cover 42. At the stepped opening 44 of the storage box 41 and the upper cover 42, matching magnetic buckles 5 are provided at corresponding positions; the magnetic buckles 5 are embedded and fixed in the side walls of the stepped opening 44.

[0030] The storage box 41 has a base 45 at its bottom. A telescopic block 451 is located at the front end of the base 45. The telescopic block 451 can be extended to a length greater than or equal to the length of the bottom of the upper cover 42. A hook hole 452 is located on the sidewall of the base front end. When the upper cover 42 is placed over the stepped opening 44 of the storage box 41, a hook can be hooked into the hook hole 452 to pull the extension block 451 out to the bottom of the upper cover 42, thereby supporting the upper cover 42.

[0031] At the bottom of the storage box 41, on the sidewall at the front end of the base 45, is a suction device 6. This suction device 6 can be a magnetic buckle or a suction cup, depending on the material of the underside of the furnace tube 3. If the underside of the furnace tube 3 is made of steel, which has a certain magnetic force, a magnetic buckle 5 is used; if the underside of the furnace tube 3 is made of a smooth, non-magnetic material, a suction cup is used. If the material of the underside of the furnace tube 3 does not meet the above two conditions, other suction devices can be used. This embodiment merely provides corresponding implementation methods and does not limit them.

[0032] A handle 43 is provided on the top of the storage box 41 and the upper cover 42, and a locking device 7 is provided between the handle 43 of the storage box 41 and the upper cover 42. The vertical rod of the upper cover handle close to the storage box handle is set to be hollow and strong for installing the locking device 7.

[0033] The locking device 7 includes a rotating shaft 71 mounted on the lid handle. One or both ends of the rotating shaft 71 are mounted in a vertical rod on the lid handle near the storage box handle via a torsion spring. (The torsion spring is not shown in the accompanying drawings and is installed using conventional techniques, so this will not be elaborated upon.) A traction rope 72 is wound around the rotating shaft 71. A through hole for guiding the traction rope 72 is provided in the side wall of the lid handle near the storage box handle. The end of the traction rope 72 passes through the side wall of the lid handle and is then secured to a rectangular block 73.

[0034] A locking hole 74 for the block to pass through is provided on the side of the storage box handle close to the upper cover handle, and the diameter of the locking hole 74 is larger than the diagonal of the minimum area of ​​the rectangular block 73; a locking hole 75 for locking the rectangular block 73 is provided on the upper cover handle, and the diameter of the locking hole 75 is larger than the diagonal of the minimum area of ​​the rectangular block 73 and smaller than the maximum length of the rectangular block 73.

[0035] When closing the upper cover 42 onto the storage box 41, pull the traction cord 72 through the locking hole 74 on the storage box handle, and then stretch it all the way to the locking hole 75 on the upper cover handle. Insert the rectangular block 73 into the locking hole 75 to lock the upper cover. If one turn is not enough to secure the box, you can wrap it a few more times. If more turns are needed, you can wrap it around the back of the upper cover handle.

[0036] The above embodiments are intended only to illustrate the technical concepts and features of the present invention. Their purpose is to enable those familiar with the art to understand the contents of the present invention and implement them accordingly. They are not intended to limit the scope of protection of the present invention. All equivalent changes or modifications based on the spirit of the present invention are intended to be covered by the present invention.

Claims

1. A PECVD furnace tube fragment and dust collection device, comprising a lifting platform (2), a collecting device (4) being placed on a platform (21) at the top of the lifting platform (2); characterized in that: The collecting device (4) comprises a storage box (41) connected to the furnace tube, the interior of the storage box (41) is made of stainless steel, the exterior is made of heat-resistant material, and a handle (43) is provided on the outer wall; a stepped opening (44) is provided at the front end of the storage box (41), and a suction device (6) is provided at the bottom lower side of the stepped opening (44); and an upper cover (42) made of the same material as the storage box (41) is provided on the upper side of the stepped opening (44).

2. The PECVD furnace tube fragment and dust collection device according to claim 1, characterized in that: The collecting device (4) is cylindrical and is cut at a set opening to obtain a stepped opening that matches the storage box (41) and the upper cover (42); a magnetic buckle (5) that matches each other is provided at a corresponding position at the stepped opening between the storage box (41) and the upper cover (42).

3. The PECVD furnace tube fragment and dust collection device according to claim 2, characterized in that: The magnetic buckle (5) is embedded and fixed in the side wall of the oblique opening (44).

4. The PECVD furnace tube fragment and dust collection device according to claim 2, characterized in that: The bottom of the storage box (41) is provided with a base (45), and the front end of the base (45) is provided with a telescopic block (451), and the telescopic block (451) can be extended to a length greater than or equal to the length of the bottom of the upper cover (42); when the upper cover (42) is covered on the stepped opening (44) of the storage box (41), the telescopic block (451) of the base (45) is pulled out to the bottom of the upper cover (42); the side wall of the front end of the base (45) is provided with a hook hole (452).

5. A PECVD furnace tube fragment and dust collection device according to claim 1 or 4, characterized in that: The tops of the storage box (41) and the upper cover (42) are both provided with handles (43), and a locking device (7) is provided between the handles (43) of the storage box (41) and the upper cover (42).

6. The PECVD furnace tube fragment and dust collection device according to claim 5, characterized in that: The locking device (7) comprises a rotating shaft (71) arranged on the upper cover handle, the rotating shaft (71) being installed in a vertical rod of the upper cover handle close to the storage box handle, a traction rope (72) being wound around the rotating shaft (71), and an end of the traction rope (72) passing through the side wall of the upper cover handle and then being fixed with a rectangular block (73).

7. The PECVD furnace tube fragment and dust collection device according to claim 6, characterized in that: A locking through hole (74) is provided on one side of the storage box handle close to the upper cover handle, and the diameter of the locking through hole (74) is larger than the diagonal of the smallest area of ​​the rectangular block (73); a locking hole (75) for locking the rectangular block (73) is provided on the upper cover handle, and the diameter of the locking hole (75) is larger than the diagonal of the smallest area of ​​the rectangular block (73) and smaller than the length of the rectangular block (73).

8. The PECVD furnace tube fragment and dust collection device according to claim 6 or 7, characterized in that: One end or both ends of the rotating shaft (71) are installed in a vertical rod of the upper cover handle close to the storage box handle through a torsion spring.

9. The PECVD furnace tube fragment and dust collection device according to claim 4, characterized in that: A suction device (6) is installed on the side wall at the front end of the base (45). The suction device (6) adopts a magnetic buckle or a suction cup, which is selected according to the material of the lower side of the furnace tube (3).

10. The PECVD furnace tube fragment and dust collection device according to claim 1, characterized in that: The bottom of the lifting platform (2) is provided with a roller (22); the roller (22) is provided with a brake and a height adjustment device; the platform (21) is provided with a groove for limiting the storage box (41); when in use, the storage box (41) is placed in the groove.

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