XYZ precision detection motion platform with recoil force damping function

Abstract

An XYZ precision detection motion platform with recoil force damping relates to the technical field of semiconductor detection and comprises an X-axis driving mechanism, a Y-axis driving mechanism, a Z-axis driving mechanism and a detection optical head. The X-axis driving mechanism comprises an X-axis base, an X-axis linear motor, an X-axis linear guide rail and an X-axis buffering and damping piece. The Y-axis driving mechanism comprises a Y-axis base, a Y-axis linear motor, a Y-axis linear guide rail and a Y-axis buffering and damping piece. The Z-axis driving mechanism comprises a Z-axis base, a Z-axis lifting seat and a Z-axis driving assembly; and the detection optical head is used for detecting the chips on the material sheets. According to the technical scheme, the X-axis buffer damping part and the Y-axis damping part are used for absorbing counter-acting force borne by the X-axis linear motor stator and the Y-axis linear motor rotor respectively, so that impact on the X-axis base and the Y-axis base is avoided, high-speed, high-response and high-precision movement of the movement platform is achieved, and stability and shooting precision of a detection optical head are guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor detection, in particular to an XYZ precision detection motion platform with recoil force damping. Background Art

[0002] In the semiconductor industry, we generally refer to the square invisible frame of an integrated chip as a sheet (filled with many chips). To improve efficiency, sheets are generally stored in magazines, each of which can hold twenty to thirty sheets. The sheets in the magazine need to be inspected. The general process is that a loader transports the sheets from the magazine full of sheets to the inspection position via a conveyor belt, where an XYZ (front, back, left, right, up, and down) motion platform with an inspection optical head inspects the chips. Because the spacing between each chip on the sheet is very small (for example, 8mm), the XYZ motion platform with the inspection optical head stops when it moves above the chip. The camera takes a picture of the chip and then moves to the next chip to take a picture, repeating this process of moving, stopping, and taking pictures. During the inspection process, the XYZ motion platform with the inspection optical head requires high speed (to improve inspection efficiency) and a short movement distance, meaning it accelerates and decelerates instantly.

[0003] Traditional motion platforms typically use a servo / stepper motor to drive a ball screw, which in turn drives the linear motion of the worktable. However, the clearance between the balls and the screw in the ball screw limits the rotational speed, making it difficult to achieve high-speed and high-precision positioning. In recent years, linear motor-driven linear motion platforms have gained popularity in the semiconductor industry. These platforms offer significant advantages over traditional screw-driven platforms. Without a ball screw or other structural elements, the linear motor directly drives the worktable, achieving high speed and high precision.

[0004] However, whether it is a traditional motor-driven screw mechanism drive platform or a linear motor-driven platform, there is a problem of system vibration caused by the impact force acting on the base: when the platform accelerates or stops suddenly, the reaction force acts on the base, causing the base to vibrate violently, which in turn causes the camera lens to shake, resulting in unsatisfactory photography effects and affecting photography accuracy.

[0005] Based on this, the present application provides an XYZ precision detection motion platform with recoil shock absorption to solve the above problems. Utility Model Content

[0006] The purpose of this utility model is to address the defects and shortcomings of the existing technology and provide an XYZ precision detection motion platform with recoil shock absorption. The hydraulic buffer absorbs the impact force of the platform on the base during instantaneous acceleration and deceleration, thereby reducing platform vibration and ensuring photography accuracy. At the same time, the platform has the advantages of high speed, high frequency and high precision.

[0007] The technical solution adopted by the utility model is: an XYZ precision detection motion platform with recoil shock absorption, comprising:

[0008] An X-axis drive mechanism includes an X-axis base, an X-axis linear motor, an X-axis linear guide, and an X-axis buffer shock absorber. The X-axis linear motor includes an X-axis linear motor stator and an X-axis linear motor mover. The X-axis linear motor stator is slidably arranged on the X-axis base. The X-axis linear motor mover can slide along the X-axis direction. The X-axis linear motor stator is connected to the X-axis buffer shock absorber. When the X-axis linear motor mover is energized and moves along the X-axis direction under the action of electromagnetic force, the X-axis linear motor stator slides in a direction opposite to the movement direction of the X-axis linear motor mover under the drive of a reaction force in the opposite direction of the electromagnetic force and transmits the reaction force to the X-axis buffer shock absorber.

[0009] The Y-axis driving mechanism includes a Y-axis base, a Y-axis linear motor, a Y-axis linear guide and a Y-axis buffer shock absorber, wherein the Y-axis base is slidably connected to the X-axis linear guide, and the Y-axis base is fixedly arranged on the X-axis linear motor mover, the Y-axis linear motor includes a Y-axis linear motor mover and a Y-axis linear motor stator, the Y-axis linear motor mover can slide along the Y-axis direction, the Y-axis linear motor mover is connected to the Y-axis buffer shock absorber, when the Y-axis linear motor mover is energized and forces the Y-axis linear motor stator to move along the Y-axis direction under the action of electromagnetic force, the Y-axis linear motor mover slides in the direction opposite to the movement direction of the Y-axis linear motor stator under the drive of a reaction force in the opposite direction of the electromagnetic force and transmits the reaction force to the Y-axis buffer shock absorber;

[0010] The Z-axis drive mechanism includes a Z-axis base, a Z-axis lift and a Z-axis drive assembly. The Z-axis base is slidably connected to the Y-axis linear guide rail, and the Z-axis base is fixedly mounted on the Y-axis linear motor mover. The Z-axis drive assembly is used to drive the Z-axis lift to move up and down along the Z-axis direction; and a detection optical head is provided on the Z-axis lift, which is used to detect the chips on the sheet.

[0011] Optionally, the X-axis buffer shock absorber includes an X-axis stator mounting plate and an X-axis hydraulic buffer arranged on the X-axis base, and the X-axis base is provided with an X-axis floating linear guide rail that slides with the X-axis stator mounting plate, so that the X-axis stator mounting plate can slide freely on the X-axis base, the X-axis hydraulic buffer is fixed on the X-axis base, and the X-axis stator mounting plate is connected to the X-axis hydraulic buffer.

[0012] Optionally, the X-axis buffer shock absorber further includes an X-axis impact plate, and both sides of the X-axis impact plate are respectively in contact with the X-axis hydraulic buffer.

[0013] Optionally, the X-axis drive mechanism also includes an X-axis magnetic grating reading scale and an X-axis magnetic grating reading head. The X-axis magnetic grating reading scale is fixedly mounted on the stator of the X-axis linear motor, and the X-axis magnetic grating reading head is disposed on the bottom side of the Y-axis base corresponding to the X-axis magnetic grating reading scale, so that when the X-axis linear motor mover drives the Y-axis base to slide, the distance and direction of the X-axis linear motor mover relative to the X-axis linear motor stator can be accurately measured through the cooperation between the X-axis magnetic grating reading head and the X-axis magnetic grating reading scale.

[0014] Optionally, the X-axis drive mechanism also includes an X-axis grating reading scale and an X-axis grating reading head. The X-axis grating reading scale is arranged along the length direction of the X-axis linear guide, the X-axis grating reading scale is arranged on the outside of the X-axis linear guide, and the X-axis grating reading head is arranged at the Y-axis base corresponding to the X-axis grating reading scale, so that when the X-axis linear motor mover drives the Y-axis base to slide, the exact position of the Y-axis base relative to the X-axis base is accurately measured through the cooperation between the X-axis grating reading scale and the X-axis grating reading head.

[0015] Optionally, the Y-axis buffer shock-absorbing component includes a Y-axis hydraulic buffer provided on the Y-axis base, the Y-axis base is provided with a Y-axis floating linear motor guide rail (211) that is slidably matched with the Y-axis linear motor mover, so that the Y-axis linear motor mover can slide freely on the Y-axis base, the Y-axis hydraulic buffer is fixed on the Y-axis base, and the Y-axis linear motor mover is slidably connected to the Y-axis hydraulic buffer, so that when the Y-axis linear motor stator is energized and forced to move along the Y-axis direction under the action of electromagnetic force, the Y-axis linear motor mover slides in the direction opposite to the movement direction of the Y-axis linear motor stator under the drive of the reaction force in the opposite direction of the electromagnetic force and transmits the reaction force to the Y-axis hydraulic buffer.

[0016] Optionally, the Y-axis drive mechanism also includes a Y-axis magnetic scale and a Y-axis magnetic scale reading head. The Y-axis magnetic scale is arranged along the length direction of the Y-axis base, the Y-axis magnetic scale is fixed on the Y-axis base, and the Y-axis magnetic scale reading head is arranged on the Z-axis base corresponding to the Y-axis magnetic scale reading head. When the Y-axis linear motor stator drives the Z-axis base to slide, the distance and direction of the Y-axis linear motor mover relative to the Y-axis linear motor stator are accurately measured through the cooperation between the Y-axis magnetic scale and the Y-axis magnetic scale reading head.

[0017] Optionally, the Y-axis drive mechanism also includes a Y-axis grating reading scale and a Y-axis grating reading head. The Y-axis grating reading scale is arranged along the length direction of the Y-axis linear guide, the Y-axis grating reading scale is arranged on the Y-axis linear motor stator, and the Y-axis grating reading head is arranged on the inner side of the Y-axis linear guide and facing the Y-axis grating reading scale. When the Y-axis linear motor stator moves, the exact position of the Z-axis base relative to the Y-axis base is accurately measured through the cooperation between the Y-axis grating reading scale and the Y-axis grating reading head.

[0018] Optionally, the Z-axis drive assembly includes a Z-axis linear guide, a Z-axis voice coil linear motor, a Z-axis cylinder and a gas tank. The Z-axis lift is slidably connected to the Z-axis linear guide. The stator of the Z-axis voice coil linear motor is fixedly arranged on the side wall of the Z-axis base. The mover of the Z-axis voice coil linear motor is connected to the Z-axis lift. The Z-axis cylinders are all arranged on the Z-axis base. The piston rod of the Z-axis cylinder is connected to the Z-axis lift. The gas tank is used to provide gas to the Z-axis cylinder. The Z-axis voice coil linear motor and the Z-axis cylinder cooperate to drive the Z-axis lift to rise or fall relative to the Z-axis base.

[0019] Optionally, the motion platform further includes a control mechanism, and the control mechanism is electrically connected to the X-axis drive mechanism, the Y-axis drive mechanism, the Z-axis drive mechanism, and the detection optical head.

[0020] After adopting the above technical solution, the beneficial effects of the utility model are:

[0021] 1. When the present application is in use, by setting the X-axis hydraulic buffer and the Y-axis hydraulic buffer, when the X-axis linear motor mover and the Y-axis linear motor stator are in motion, the reaction force on the X-axis linear motor stator and the Y-axis linear motor mover will not directly act on the X-axis base and the Y-axis base. The reaction force will drive the X-axis linear motor stator and the Y-axis linear motor stator to move in the direction opposite to the movement direction of the X-axis linear motor mover and the Y-axis linear motor stator, respectively, so that most of the kinetic energy is absorbed by the X-axis hydraulic buffer and the Y-axis hydraulic buffer, avoiding direct impact on the X-axis base and the Y-axis base, thereby ensuring the stability of the detection optical head, avoiding the situation where the detection optical head shakes due to the intense vibration of the base, resulting in unsatisfactory photographic effect, and ensuring photographic accuracy;

[0022] 2. The present application, through the provision of an X-axis magnetic scale, an X-axis magnetic scale reading head, a Y-axis magnetic scale, and a Y-axis magnetic scale reading head, can accurately measure the distance and direction of the X-axis linear motor mover and the X-axis linear motor stator relative to the X-axis linear motor stator and the Y-axis linear motor, respectively. Thus, the speed and direction of the X-axis and Y-axis directions can be controlled by controlling the current and direction of the X-axis linear motor mover and the Y-axis linear motor mover. At the same time, by reading the X-axis scale and the Y-axis scale respectively through the high-precision X-axis grating reading head and the Y-axis grating reading head, the movement distance of the X-axis linear motor mover and the Y-axis linear motor mover can be accurately measured, that is, the exact position of the Y-axis base relative to the X-axis base and the exact position of the Z-axis base relative to the Y-axis base can be accurately measured, thereby achieving high-response, high-frequency, and high-precision motion of the platform;

[0023] 3. The present application drives the Z-axis lifting seat to rise and fall vertically relative to the Z-axis base through the cooperation of the Z-axis voice coil motor and the Z-axis cylinder, so that when the power is off, the air is supplied to the Z-axis cylinder through the air tank, thereby preventing the detection optical head from suddenly falling after the Z-axis voice coil motor is powered off, thereby preventing the detection optical head from being damaged, thereby extending the service life of the detection optical head. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0025] Figure 1 Schematic diagram of the overall structure of this embodiment;

[0026] Figure 2 This is another perspective view of this embodiment;

[0027] Figure 3 Schematic diagram showing the coordination relationship between the Y-axis grating reading scale, the Y-axis grating reading head, the Y-axis linear motor guide rail, and the Y-axis linear motor stator in this embodiment;

[0028] Figure 4 Schematic diagram showing the positional relationship between the Y-axis linear motor mover, the Y-axis hydraulic buffer, and the Y-axis linear guide in this embodiment;

[0029] Figure 5 yes Figure 4 Enlarged view of part A.

[0030] Explanation of reference numerals: 100, X-axis drive mechanism; 101, X-axis base; 102, X-axis linear motor stator; 103, X-axis linear motor mover; 104, X-axis linear guide; 105, X-axis stator mounting plate; 106, X-axis hydraulic buffer; 107, X-axis impact plate; 108, X-axis magnetic grating reading scale; 109, X-axis magnetic grating reading head; 110, X-axis grating reading scale; 111, X-axis grating reading head; 112, X-axis floating linear guide; 200, Y-axis drive mechanism; 201, Y-axis base; 202, Y-axis linear motor stator; 203, Y 204, Y-axis linear motor mover; 206, Y-axis hydraulic buffer; 207, Y-axis magnetic grating reading scale; 208, Y-axis magnetic grating reading head; 209, Y-axis grating reading scale; 210, Y-axis grating reading head; 211, Y-axis floating linear guide; 300, Z-axis drive mechanism; 301, Z-axis base; 302, Z-axis lifting seat; 303, Z-axis linear guide; 304, Z-axis voice coil linear motor; 305, Z-axis cylinder; 306, gas tank; 307, Z-axis grating reading scale; 308, Z-axis grating reading head; 400, detection optical head. DETAILED DESCRIPTION

[0031] The following is a combination of the appended examples of the present invention Figure 1-5 The technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort shall fall within the scope of protection of the present invention.

[0032] It should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "back," "left," "right," "top," "bottom," "inner," "outer," "back," "side," and "circumferential" used in the present invention to indicate positions or positional relationships are based on the positions or positional relationships shown in the accompanying drawings and are intended only to facilitate the description of the present invention and simplify the description. They do not indicate or imply that the devices or elements referred to must have a specific position, be constructed, or operate in a specific position. Therefore, they should not be construed as limiting the present invention. In addition, terms such as first and second are used only to distinguish multiple components or structures having the same or similar structures and do not represent any special limitation on the arrangement order or connection relationship.

[0033] This embodiment relates to an XYZ precision detection motion platform with recoil force damping, which is applied in the field of semiconductor detection to detect chips on wafers to achieve high-speed and high-precision detection of chips.

[0034] Reference Figure 1-Figure 5The motion platform includes an X-axis drive mechanism 100, a Y-axis drive mechanism 200, a Z-axis drive mechanism 300, and a detection optical head 400 arranged on the Z-axis motion mechanism, wherein the X-axis drive mechanism 100 can drive the detection optical head 400 to move along the X-axis direction, the Y-axis drive mechanism 200 can drive the detection optical head 400 to move along the Y-axis direction, and the Z-axis drive mechanism 300 can drive the detection optical head 400 to move along the Z-axis direction, thereby realizing the movement of the detection optical head 400 in the XYZ directions, so that the detection optical head 400 can quickly photograph and detect the chips on the wafer.

[0035] The X-axis drive mechanism 100 includes an X-axis base 101, an X-axis linear motor, an X-axis linear guide 104 and an X-axis buffer shock absorber, wherein the X-axis linear motor includes an X-axis linear motor stator 102 slidably set on the X-axis base 101 and an X-axis linear motor mover 103 slidably set on the X-axis linear motor stator 102, the X-axis linear motor stator 102 and the X-axis linear motor guide are both arranged along the X-axis direction (in this embodiment, the length direction of the X-axis base 101 is set as the X-axis direction), and the X-axis linear motor mover 103 can slide along the X-axis direction relative to the X-axis linear motor stator 102. There are two X-axis linear guides 104, which are symmetrically arranged on both sides of the X-axis base 101. The X-axis linear motor stator 102 is connected to the X-axis buffer shock absorber. When the X-axis linear motor mover 103 is energized and performs linear motion on the X-axis linear motor stator 102 under the action of electromagnetic force, the X-axis linear motor stator 102 is subjected to a reaction force in the opposite direction of the electromagnetic force (the action of force is mutual. When the X-axis linear motor mover is energized and performs linear motion under the action of electromagnetic force, the X-axis linear motor stator will be subjected to a reaction force in the opposite direction of the electromagnetic force). The reaction force drives the X-axis linear motor stator 102 to slide in the direction opposite to the movement of the X-axis linear motor mover 103 and transmits the reaction force to the X-axis shock absorber, so that the force is absorbed by the X-axis buffer shock absorber.

[0036] The Y-axis drive mechanism 200 includes a Y-axis base 201, a Y-axis linear motor, a Y-axis linear guide 204, and a Y-axis buffer shock absorber. The Y-axis base 201 is slidably connected to the X-axis linear guide 104 and fixedly mounted on the X-axis linear motor mover 103, so that when the X-axis linear motor mover 103 moves, it can drive the Y-axis base 201 to move synchronously. The Y-axis linear motor includes a Y-axis linear motor stator 202 slidably disposed on the Y-axis base 201 and a Y-axis linear motor mover 203 slidably disposed on the bottom side of the Y-axis linear motor stator 202. The Y-axis linear motor stator 202 and the Y-axis linear motor guide are both arranged along the Y-axis direction (in this embodiment, the length direction of the Y-axis base 201 is set as the Y-axis direction). The Y-axis linear motor stator 202 can slide along the Y-axis direction relative to the Y-axis linear motor mover 203. Two Y-axis linear guides 204 are symmetrically arranged on either side of the Y-axis base 201. The Y-axis linear motor mover 203 is connected to the Y-axis buffer and shock absorber. When the Y-axis linear motor mover 203 is energized and the electromagnetic force forces the Y-axis linear motor stator 202 to move linearly along the Y-axis, the Y-axis linear motor mover 203 experiences a reaction force in the opposite direction of the electromagnetic force. Driven by this reaction force, the mover 203 slides in a direction opposite to the direction of motion of the Y-axis linear motor stator 202 and transmits this reaction force to the Y-axis buffer and shock absorber, where it is absorbed by the Y-axis buffer.

[0037] The Z-axis drive mechanism 300 includes a Z-axis base 301, a Z-axis lift 302, and a Z-axis drive assembly. The Z-axis base 301 is slidably connected to the Y-axis linear guide 204 and fixedly mounted on the Y-axis linear motor stator 202, so that movement of the Y-axis linear motor stator 202 drives the Z-axis base 301 in sync. The Z-axis lift 302 is slidably mounted on the Z-axis base 301 and is capable of moving along the Z-axis direction (in this embodiment, the height direction of the Z-axis base 301 is defined as the Z-axis direction). The Z-axis drive assembly is used to drive the Z-axis lift 302 to move up and down along the Z-axis.

[0038] The inspection optical head 400 is mounted on the Z-axis lift 302 and is used to inspect the chips on the wafer. In this embodiment, there are three inspection optical heads 400, which are mounted on the Z-axis lift 302 via a turntable. In other embodiments, the number and mounting method of the inspection optical heads 400 can be adjusted accordingly based on actual conditions.

[0039] By setting the X-axis driving mechanism 100, the Y-axis driving mechanism 200 and the Z-axis driving mechanism 300, the detection optical head 400 can move along the XYZ three-axis direction, so that the detection optical head 400 can quickly detect the chip on the sheet. At the same time, by installing the X-axis linear motor stator 102 and the Y-axis linear motor mover 202 on the X-axis base 101 and the Y-axis base 201 in a sliding manner, the X-axis linear motor mover 103 and the Y-axis linear motor stator 202 can move. The reaction force 2 is not directly applied to the X-axis base 101 and the Y-axis base 201, but drives the X-axis linear motor stator 102 and the Y-axis linear motor mover 203 to move in the direction opposite to the movement direction of the X-axis linear motor mover 102 and the Y-axis linear motor stator 202, and is finally absorbed by the X-axis buffer shock absorber and the Y-axis shock absorber, thereby effectively avoiding the situation where the base vibration causes the shooting lens of the detection optical head 400 to shake, resulting in unsatisfactory photography effect and affecting photography accuracy, thereby ensuring the detection accuracy and detection quality of the detection optical head 400.

[0040] Reference Figure 1 and Figure 2 In some embodiments, the X-axis buffer shock absorber includes an X-axis stator mounting plate 105 and an X-axis hydraulic buffer 106 provided on the X-axis base 101. The X-axis base 101 is provided with an X-axis floating linear guide 112 that slides with the X-axis stator mounting plate 105, so that the X-axis stator mounting plate 105 can slide freely on the X-axis base 101. The X-axis hydraulic buffer 106 is fixedly installed on the X-axis base 101, and the X-axis stator mounting plate 105 is slidably connected to the X-axis hydraulic buffer 106.

[0041] It can be understood that when the X-axis linear motor mover 103 drives the Y-axis base 201 to move along the X-axis direction, since the force is mutual, the X-axis linear motor mover 103 moves along the X-axis direction under the action of electromagnetic force after being energized, and the X-axis linear motor stator 102 will be subjected to a reaction force in the opposite direction to the X-axis linear motor mover 103. Under the action of this reaction force, the X-axis linear motor stator 102 is driven to slide in the direction opposite to the movement direction of the X-axis linear motor mover 103. At this time, the X-axis linear motor stator 102 is connected to the X-axis hydraulic buffer 106, so that the reaction force is absorbed by the X-axis hydraulic buffer 106, thereby avoiding the reaction force directly acting on the X-axis base 101 and causing the X-axis base 101 to vibrate.

[0042] In some embodiments, the X-axis buffer and shock absorber further includes an X-axis impact plate 107 , and two sides of the X-axis impact plate 107 are respectively in contact with the X-axis hydraulic buffer 106 .

[0043] By setting the X-axis impact plate 107, the connection between the X-axis linear motor stator 102 and the X-axis hydraulic buffer 106 is achieved, so that the reaction force exerted on the X-axis linear motor stator 102 can be transmitted to the X-axis hydraulic buffer 106 and absorbed by the X-axis hydraulic buffer 106.

[0044] In some embodiments, the X-axis drive mechanism 100 further includes an X-axis magnetic grating reading scale 108 and an X-axis magnetic grating reading head 109. The X-axis magnetic grating reading scale 108 is fixedly mounted on the X-axis linear motor stator 102, and the X-axis magnetic grating reading head 109 is fixedly disposed on the Y-axis base 201 at a position corresponding to the X-axis magnetic grating reading scale 108, so that when the X-axis linear motor mover 103 drives the Y-axis base 201 to slide, the distance and direction of the X-axis linear motor mover 103 relative to the X-axis linear motor stator 102 are accurately measured through the cooperation between the X-axis magnetic grating reading head 109 and the X-axis magnetic grating reading scale 108.

[0045] When the X-axis linear motor mover 103 drives the Y-axis base 201 to move, it also drives the X-axis magnetic grating reading head 109 to move synchronously. The X-axis magnetic grating reading head 109 reads the value on the X-axis magnetic grating reading scale, thereby achieving accurate measurement of the distance and direction of the X-axis linear motor mover 103 relative to the X-axis linear motor stator 102.

[0046] Reference Figure 1 and Figure 2 In some embodiments, the X-axis drive mechanism 100 further includes an X-axis grating reading scale 110 and an X-axis grating reading head 111. The X-axis grating reading scale 110 is arranged along the length direction of the X-axis linear guide 104. The X-axis grating reading scale 110 is arranged along the length direction of the X-axis linear guide 104. The X-axis grating reading head 111 is arranged at a position of the Y-axis base 201 corresponding to the X-axis grating reading scale 110, so that when the X-axis linear motor mover 103 drives the Y-axis base 201 to slide, the exact position of the Y-axis base 201 relative to the X-axis base 101 is accurately measured through the cooperation between the X-axis grating reading scale 110 and the grating reading head.

[0047] When the X-axis linear motor mover 103 drives the Y-axis base 201 to move, it also drives the X-axis magnetic grating reading head 109 to move synchronously. The X-axis grating reading head 111 reads the value on the X-axis grating reading scale 110, thereby accurately measuring the position of the Y-axis base 201 relative to the X-axis base 101.

[0048] In this embodiment, the X-axis drive mechanism 100 includes an X-axis magnetic grating reading scale 108 and an X-axis magnetic grating reading head 109, an X-axis grating reading scale 110 and an X-axis grating reading head 111. In other embodiments, the X-axis drive mechanism 100 may include one of the X-axis magnetic grating reading scale 108 and the X-axis magnetic grating reading head 109, an X-axis grating reading scale 110 and an X-axis grating reading head 111.

[0049] Reference Figure 2 and Figure 3 In some embodiments, the Y-axis buffer shock absorber includes a Y-axis hydraulic buffer 206 fixedly mounted on the Y-axis base 201. The Y-axis base 201 is provided with a Y-axis floating linear guide rail that slides with the Y-axis linear motor mover 203, so that the Y-axis linear motor mover 203 can slide freely on the Y-axis base 201. The Y-axis hydraulic buffer 206 is fixedly mounted on the Y-axis base 201, and the Y-axis linear motor mover 203 is slidably connected to the Y-axis hydraulic buffer 206.

[0050] When the Y-axis linear motor mover 203 moves along the Y-axis direction, since the force is mutual, after the Y-axis linear motor mover 203 is energized, it forces the Y-axis linear motor stator 202 to move linearly along the Y-axis direction under the action of the electromagnetic force. The Y-axis linear motor mover 203 will be subjected to a reaction force in the opposite direction of the electromagnetic force. Under the action of this reaction force, the Y-axis linear motor mover 203 is driven to slide in the direction opposite to the movement direction of the Y-axis linear motor stator 202. At this time, the Y-axis linear motor mover 203 is connected to the Y-axis hydraulic buffer 206, so that the reaction force is absorbed by the Y-axis hydraulic buffer 206, thereby avoiding the reaction force directly acting on the Y-axis base 201 and causing the Y-axis base 201 to vibrate.

[0051] In some embodiments, the Y-axis drive mechanism 200 also includes a Y-axis magnetic grating reading scale 207 and a Y-axis magnetic grating reading head 208. The Y-axis magnetic grating reading scale 207 is fixedly mounted on the Y-axis base 201, and the Y-axis magnetic grating reading head 208 is fixedly arranged on the Z-axis base 301 at a position corresponding to the Y-axis magnetic grating reading scale 207, so that when the Y-axis linear motor stator 202 drives the Y-axis base 201 to slide, the distance and direction of the Y-axis linear motor mover 203 relative to the Y-axis linear motor stator 202 are accurately measured through the cooperation between the Y-axis magnetic grating reading head 208 and the Y-axis magnetic grating reading scale 207.

[0052] Reference Figure 2 and Figure 3In some embodiments, the Y-axis drive mechanism 200 further includes a Y-axis grating reading scale 209 and a Y-axis grating reading head 210. The Y-axis grating reading scale 209 is arranged along the length direction of the Y-axis linear guide 204. The Y-axis grating reading scale 209 is fixedly mounted on the outside of the Y-axis linear motor stator 202. The Y-axis grating reading head 210 is fixedly mounted on the inside of the Y-axis linear guide 204 and faces the grating reading scale. When the Y-axis linear motor mover 203 moves, the exact position of the Z-axis base 301 relative to the Y-axis base 201 is accurately measured through the cooperation between the Y-axis grating reading scale 209 and the Y-axis grating reading head 210.

[0053] In this embodiment, the Y-axis drive mechanism 200 includes a Y-axis magnetic grating reading scale 207 and a Y-axis magnetic grating reading head 208, a Y-axis grating reading scale 209 and a Y-axis grating reading head 210. In other embodiments, the Y-axis drive mechanism 200 may include one of the Y-axis magnetic grating reading scale 207 and the Y-axis magnetic grating reading head 208, the Y-axis grating reading scale 209 and the Y-axis grating reading head 210.

[0054] Reference Figure 4 and Figure 5 In some embodiments, the Z-axis drive assembly includes a Z-axis linear guide 303, a Z-axis voice coil linear motor 304, a Z-axis cylinder 305, and an air tank 306. The Z-axis linear guide 303 is vertically arranged on the side wall of the Z-axis base 301. The Z-axis lifting seat 302 is slidably connected to the Z-axis linear guide 303. The stator of the Z-axis voice coil linear motor 304 is fixedly installed on the side wall of the Z-axis base 301. The mover is fixedly connected to the Z-axis lift 302, the Z-axis cylinder 305 is vertically installed on the Z-axis base 301, the piston rod of the Z-axis cylinder 305 is fixedly connected to the Z-axis lift 302, the air tank 306 is connected to the Z-axis cylinder 305 through an air pipe to realize the air supply to the Z-axis cylinder 305, and the Z-axis voice coil linear motor 304 and the Z-axis cylinder 305 cooperate to drive the Z-axis lift 302 to rise or fall relative to the Z-axis base 301.

[0055] In addition, refer to Figure 4 and Figure 5 In order to enable the Z-axis lifting seat 302 to stably rise or fall relative to the Z-axis base 301, in this embodiment, the number of Z-axis voice coil linear motors 304 is two, and the number of Z-axis linear guides 303 and Z-axis cylinders 305 are four. The two Z-axis linear guides 303, the four Z-axis voice coil linear motors 304 and the four Z-axis cylinders 305 are symmetrically arranged on both sides of the Z-axis base 301.

[0056] When the inspection optical head 400 needs to rise, current is input to the Z-axis voice coil linear motor 304, while the air supply tank continuously supplies air to the Z-axis cylinder 305. Consequently, the Z-axis lift 302 is synchronously driven to slide upward along the length of the Z-axis guide rail by the Z-axis voice coil linear motor 304 and the Z-axis cylinder 305, thereby causing the inspection optical head 400 to rise relative to the Z-axis base 301. Furthermore, when power is cut off, the Z-axis voice coil motor stops operating, but the air storage tank 306 can still supply air to the Z-axis cylinder 305, supporting the Z-axis lift 302. This effectively prevents the Z-axis lift 302 from suddenly falling after the Z-axis voice coil linear motor loses power, potentially damaging the inspection optical head 400.

[0057] Furthermore, the Z-axis drive mechanism 300 also includes a Z-axis grating reading scale 307 and a Z-axis grating reading head 308. The Z-axis grating reading scale 307 is arranged along the Z-axis direction, and the Z-axis grating reading scale 307 is arranged on the outside of the Z-axis linear guide 303. The Z-axis grating reading head 308 is arranged at the position of the Z-axis lifting seat 302 corresponding to the Z-axis grating reading scale 307, and the Z-axis grating reading head 308 is used to read the value on the Z-axis grating reading scale 307 to achieve accurate measurement of the rising or falling distance of the Z-axis lifting seat 302 relative to the Z-axis base 301.

[0058] The motion platform provided in this embodiment also includes a control mechanism, which is electrically connected to the X-axis drive mechanism 100, the Y-axis drive mechanism 200, the Z-axis drive mechanism 300, and the detection optical head 400. Through the electrical connection between the control mechanism and the X-axis drive mechanism 100, the Y-axis drive mechanism 200, the Z-axis drive mechanism 300, and the detection optical head 400, control of the X-axis drive mechanism 100, the Y-axis drive mechanism 200, the Z-axis drive mechanism 300, and the detection optical head 400 is achieved, so that the detection optical head 400 can move rapidly in the XYZ three-axis directions, thereby ensuring detection efficiency and detection quality.

[0059] The above is only used to illustrate the technical solution of the present invention and is not intended to limit it. Other modifications or equivalent substitutions made to the technical solution of the present invention by ordinary technicians in this field should be included in the scope of the claims of the present invention as long as they do not depart from the spirit and scope of the technical solution of the present invention.

Claims

1. An XYZ precision detection motion platform with recoil damping, characterized in that: include: An X-axis driving mechanism (100) comprises an X-axis base (101), an X-axis linear motor, an X-axis linear guide rail (104), and an X-axis buffer shock-absorbing component. The X-axis linear motor comprises an X-axis linear motor stator (102) and an X-axis linear motor mover (103). The X-axis linear motor stator (102) is slidably arranged on the X-axis base (101). The X-axis linear motor stator (102) is connected to the X-axis buffer shock-absorbing component. When the X-axis linear motor mover (103) is energized and moves along the X-axis direction under the action of electromagnetic force, the X-axis linear motor stator (102) slides in a direction opposite to the movement direction of the X-axis linear motor mover (103) under the drive of a reaction force in a direction opposite to the electromagnetic force, and transmits the reaction force to the X-axis buffer shock-absorbing component. The Y-axis driving mechanism (200) comprises a Y-axis base (201), a Y-axis linear motor, a Y-axis linear guide rail (204), and a Y-axis buffer shock absorbing member. The Y-axis base (201) is slidably connected to the X-axis linear guide rail (104), and the Y-axis base (201) is fixedly arranged on the X-axis linear motor mover (103). The Y-axis linear motor comprises a Y-axis linear motor mover (203) and a Y-axis linear motor stator (202). The Y-axis linear motor stator (202) and the Y-axis linear motor mover (203) are all slidably arranged on the Y-axis base (201), the Y-axis linear motor mover (203) is connected to the Y-axis buffer shock absorber, when the Y-axis linear motor mover (203) is energized, it forces the Y-axis linear motor stator (202) to move along the Y-axis direction under the action of the electromagnetic force, and the Y-axis linear motor mover (203) slides in the direction opposite to the movement direction of the Y-axis linear motor stator (202) under the drive of the reaction force in the opposite direction to the electromagnetic force and transmits the reaction force to the Y-axis buffer shock absorber; A Z-axis driving mechanism (300) comprises a Z-axis base (301), a Z-axis lifting seat (302) and a Z-axis driving assembly, wherein the Z-axis base (301) is slidably connected to a Y-axis linear guide rail (204), and the Z-axis base (301) is fixedly mounted on a Y-axis linear motor stator (202), and the Z-axis driving assembly is used to drive the Z-axis lifting seat (302) to move up and down along the Z-axis direction; as well as The detection optical head (400) is arranged on the Z-axis lifting seat (302) and is used to detect the chips on the sheet.

2. The XYZ precision detection motion platform with recoil damping according to claim 1 is characterized in that: The X-axis buffer and shock-absorbing component comprises an X-axis stator mounting plate (105) and an X-axis hydraulic buffer (106) arranged on an X-axis base (101); an X-axis floating linear guide rail (112) slidingly matched with the X-axis stator mounting plate (105) is provided on the X-axis base (101), so that the X-axis stator mounting plate (105) can slide freely on the X-axis base (101); the X-axis hydraulic buffer (106) is fixedly arranged on the X-axis base (101), and the X-axis stator mounting plate (105) is slidably connected to the X-axis hydraulic buffer (106).

3. The XYZ precision detection motion platform with recoil damping according to claim 2 is characterized in that: The X-axis buffer and shock-absorbing component further comprises an X-axis impact plate (107), and two sides of the X-axis impact plate (107) are respectively in contact with the X-axis hydraulic buffer (106).

4. The XYZ precision detection motion platform with recoil damping according to claim 1 is characterized in that: The X-axis driving mechanism (100) further comprises an X-axis magnetic grating reading scale (108) and an X-axis magnetic grating reading head (109), wherein the X-axis magnetic grating reading scale (108) is fixedly arranged on the X-axis linear motor stator (102), and the X-axis magnetic grating reading head (109) is arranged on the bottom side of the Y-axis base (201) corresponding to the X-axis magnetic grating reading scale (108), so that when the X-axis linear motor mover (103) drives the Y-axis base (201) to slide, the distance and direction of the X-axis linear motor mover (103) relative to the X-axis linear motor stator (102) are accurately measured through the cooperation between the X-axis magnetic grating reading head (109) and the X-axis magnetic grating reading scale (108).

5. The XYZ precision detection motion platform with recoil damping according to claim 1 is characterized in that: The X-axis driving mechanism (100) further comprises an X-axis grating reading scale (110) and an X-axis grating reading head (111), wherein the X-axis grating reading scale (110) is arranged along the length direction of the X-axis linear guide rail (104), the X-axis grating reading scale (110) is arranged outside the X-axis linear guide rail (104), and the X-axis grating reading head (111) is arranged at a position of the Y-axis base (201) corresponding to the X-axis grating reading scale (110), so that when the X-axis linear motor mover (103) drives the Y-axis base (201) to slide, the accurate position of the Y-axis base (201) relative to the X-axis base (101) is accurately measured through the cooperation between the X-axis grating reading scale (110) and the X-axis grating reading head (111).

6. The XYZ precision detection motion platform with recoil damping according to claim 1, characterized in that: The Y-axis buffering and shock absorbing component comprises a Y-axis hydraulic buffer (206) provided on a Y-axis base (201); a Y-axis floating linear guide rail (211) slidingly matched with a Y-axis linear motor mover (203) is provided on the Y-axis base (201), so that the Y-axis linear motor mover (203) can slide freely on the Y-axis base (201); the Y-axis hydraulic buffer (206) is fixedly provided on the Y-axis base (201), and the Y-axis linear motor mover (203) is slidably connected to the Y-axis hydraulic buffer (206), so that when the Y-axis linear motor stator (202) is energized and forced to move along the Y-axis direction under the action of electromagnetic force, the Y-axis linear motor mover (203) slides in a direction opposite to the movement direction of the Y-axis linear motor stator (202) under the drive of a reaction force in a direction opposite to the electromagnetic force, and transmits the reaction force to the Y-axis hydraulic buffer (206).

7. The XYZ precision detection motion platform with recoil damping according to claim 1, characterized in that: The Y-axis driving mechanism (200) further comprises a Y-axis magnetic scale and a Y-axis magnetic scale reading head (208), wherein the Y-axis magnetic scale is arranged along the length direction of the Y-axis base (201), the Y-axis magnetic scale is fixedly arranged on the Y-axis base (201), and the Y-axis magnetic scale reading head (208) is arranged at a position of the Z-axis base (301) corresponding to the Y-axis magnetic scale reading scale (207). When the Y-axis linear motor stator (202) drives the Z-axis base (301) to slide, the distance and direction of the Y-axis linear motor mover (203) relative to the Y-axis linear motor stator (202) are accurately measured through the cooperation between the Y-axis magnetic scale and the Y-axis magnetic scale reading head (208).

8. The XYZ precision detection motion platform with recoil damping according to claim 1, characterized in that: The Y-axis driving mechanism (200) further comprises a Y-axis grating reading scale (209) and a Y-axis grating reading head (210), wherein the Y-axis grating reading scale (209) is arranged along the length direction of the Y-axis linear guide rail (204), the Y-axis grating reading scale (209) is arranged on the Y-axis linear motor stator (202), and the Y-axis grating reading head (210) is arranged on the inner side of the Y-axis linear guide rail (204) and faces the Y-axis grating reading scale (209). When the Y-axis linear motor stator (202) moves, the accurate position of the Z-axis base (301) relative to the Y-axis base (201) is accurately measured through the cooperation between the Y-axis grating reading scale (209) and the Y-axis grating reading head (210).

9. The XYZ precision detection motion platform with recoil damping according to claim 1, characterized in that: The Z-axis drive assembly comprises a Z-axis linear guide rail (303), a Z-axis voice coil linear motor (304), a Z-axis cylinder (305) and an air storage tank (306); the Z-axis lifting seat (302) is slidably connected to the Z-axis linear guide rail (303); the stator of the Z-axis voice coil linear motor (304) is fixedly arranged on the side wall of the Z-axis base (301); the mover of the Z-axis voice coil linear motor (304) is fixedly arranged on the side wall of the Z-axis base (301); and the movable element of the Z-axis voice coil linear motor (304) is fixedly arranged on the side wall of the Z-axis base (301). 302), the Z-axis cylinder (305) is arranged on the Z-axis base (301), the piston rod of the Z-axis cylinder (305) is connected to the Z-axis lifting seat (302), the gas tank (306) is used to provide gas to the Z-axis cylinder (305), and the Z-axis voice coil linear motor (304) and the Z-axis cylinder (305) cooperate to drive the Z-axis lifting seat (302) to rise or fall relative to the Z-axis base (301).

10. The XYZ precision detection motion platform with recoil damping according to any one of claims 1 to 9, characterized in that: The motion platform further comprises a control mechanism, which is electrically connected to the X-axis drive mechanism (100), the Y-axis drive mechanism (200), the Z-axis drive mechanism (300) and the detection optical head (400).

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