Drying plate for glass passivation printing and drying furnace with drying plate

Abstract

The utility model provides a drying plate for glass passivation printing and a drying furnace with the drying plate, relates to the technical field of wafer processing, and aims to solve the problems that in the prior art, because a wafer is arranged in the middle of the drying plate, the edge of the wafer cannot be heated and dried by the drying plate at the position of a moving rod, and the drying plate is only provided with one temperature zone, so that the drying efficiency is high. The technical problems that local drying is not thorough, wafers are heated unevenly, and the quality and the yield of products are affected exist. Comprising a drying plate body, a conveying assembly and a heating assembly, the conveying assembly is arranged on the drying plate body and used for conveying a wafer to be dried, and the width of the drying plate body is not smaller than the diameter of the wafer to be dried; the beneficial effects of the utility model are that the wafer heating uniformity is better, the problems that the local glass powder cannot be dried and the wafer leaks electricity after the wafer is printed are solved, and the quality and the yield of products are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a drying plate for glass passivation printing and a drying furnace with the drying plate. Background Art

[0002] During the wafer processing process, the product glass powder paste is printed onto the wafer and then enters the oven.

[0003] Current drying ovens, such as Figure 1 As shown, the drying plate 61 is generally set in the middle of the two moving rods 62 of the conveying assembly, and the drying plate 61 is provided with a temperature zone. When drying, the wafer is placed in the middle of the drying plate for drying.

[0004] The applicant has discovered that the prior art has at least the following technical problems:

[0005] Since the wafer is placed in the middle of the drying plate, the edge of the wafer cannot be heated and dried by the drying plate at the position of the moving rod. In addition, the drying plate is only designed with one temperature zone, so there is a problem of incomplete drying in some parts and uneven heating of the wafer, which affects the quality and output of the product.

[0006] Therefore, there is an urgent need for a drying plate for glass passivation printing and a drying furnace having the drying plate to solve the above technical problems. Utility Model Content

[0007] The purpose of this utility model is to provide a drying plate for glass passivation printing and a drying furnace equipped with the drying plate. This solves the technical problems in the prior art where, due to the wafer being placed in the middle of the drying plate, the edges of the wafers at the position of the movable rods cannot be heated and dried by the drying plate. Furthermore, the drying plate is designed with only one temperature zone, resulting in partial incomplete drying and uneven heating of the wafers, which affects product quality and yield. The various technical effects that can be achieved by the preferred technical solution among the various technical solutions provided by this utility model are detailed below.

[0008] To achieve the above objectives, the present invention provides the following technical solutions:

[0009] The utility model provides a drying plate for glass passivation printing, comprising a drying plate body, a conveying assembly and a heating assembly, wherein:

[0010] The conveying assembly is provided on the drying plate body, and the conveying assembly is used to convey the wafers to be dried. The width of the drying plate body is not less than the diameter of the wafers to be dried.

[0011] At least three groups of heating components are provided, and the three groups of heating components are arranged in sequence along the length direction of the baking plate body.

[0012] Preferably, the baking plate body includes a first baking plate, a second baking plate and a third baking plate arranged in sequence, and a group of the heating components is respectively provided on the first baking plate, the second baking plate and the third baking plate.

[0013] Preferably, the first baking plate, the second baking plate, and the third baking plate are all provided with first strip holes and second strip holes along the length direction, wherein:

[0014] The transmission components include two groups, and the two groups of transmission components are respectively arranged in a first strip hole group consisting of a plurality of the first strip holes and a second strip hole group consisting of a plurality of the second strip holes.

[0015] Preferably, the conveying assembly includes a power device and a conveying rail electrically connected to the power device, and the conveying rail is arranged in the first strip hole group and the second strip hole group.

[0016] Preferably, the heating assembly includes an electric heating module and a temperature control sensor, and the electric heating module is electrically connected to the temperature control sensor.

[0017] Preferably, the drying plate for glass passivation printing further comprises a control device, and the power device, the electric heating module, and the temperature control sensor are all electrically connected to the control device.

[0018] Preferably, the maximum heating temperature of the electric heating module is 250°C.

[0019] Preferably, the baking plate body is made of aluminum alloy, and the surface of the baking plate body is provided with anti-slip grooves.

[0020] A drying furnace comprises a furnace body and the above-mentioned drying plate for glass passivation printing, wherein the drying plate for glass passivation printing is installed on the furnace body.

[0021] The utility model provides a drying plate for glass passivation printing and a drying furnace with the drying plate, which includes a drying plate body, a conveying assembly, and a heating assembly. By arranging the conveying assembly on the drying plate body, and the width of the drying plate body is not less than the diameter of the wafer to be dried, the wafer to be dried can be completely placed on the drying plate body, thereby avoiding the problem of uneven heating of the wafer caused by arranging the moving rods on both sides of the drying plate in the prior art, which prevents the contact part between the wafer and the moving rod from being heated by the drying plate. In addition, at least three groups of heating assemblies are arranged in sequence along the length direction of the drying plate body, so that the wafer is heated on the drying plate body and is heated in three temperature zones, thereby making the heating uniformity of the wafer better, solving the problem of local glass powder of the wafer being unable to be dried after printing, and further solving the problem of wafer leakage, thereby improving the quality and output of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 This is a schematic diagram of the structure of the drying plate inside the drying furnace in the background technology of the present utility model;

[0024] Figure 2 This is a structural diagram of an embodiment of a drying plate for glass passivation printing according to the present invention;

[0025] Figure 3 This is a structural diagram of the drying plate main body in the drying plate for glass passivation printing of the utility model;

[0026] Figure 4 yes Figure 2 Schematic diagram of the main structure;

[0027] Figure 5 This is a schematic structural diagram of the temperature zone distribution of a drying plate for glass passivation printing according to the present invention;

[0028] Figure 6 This is a control principle diagram of a drying plate for glass passivation printing according to the utility model.

[0029] In the figure: 1, baking plate body; 11, first baking plate; 12, second baking plate; 13, third baking plate; 110, first strip hole; 120, second strip hole;

[0030] 2. Conveyor assembly; 21. Power unit; 22. Conveyor rail;

[0031] 3. Heating component; 31. Electric heating module; 32. Temperature control sensor;

[0032] 4. Wafer;

[0033] 5. Control device;

[0034] 61. Drying plate; 62. Moving rod;

[0035] 7. Belt transmission mechanism. DETAILED DESCRIPTION

[0036] To make the purpose, technical solution, and advantages of the present invention more clear, the technical solution of the present invention will be described in detail below. Obviously, the embodiments described are only some of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other implementation methods obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0037] In the current wafer processing process, after the product glass frit slurry is printed onto the wafer, it enters the drying oven via a belt conveyor mechanism 7. Due to uneven heating of the product, some areas are not completely dried. After the next firing step, the glass frit flows unevenly in the grooves next to the wafer cores, ultimately causing product leakage and a decrease in yield. Therefore, the root cause of the yield reduction is a structural problem of the drying oven.

[0038] To this end, the utility model provides a drying furnace, which comprises a furnace body and a drying plate for glass passivation printing, wherein the drying plate is installed on the furnace body.

[0039] Figure 1 Schematic diagram of the structure of the drying plate in this embodiment. Figure 1 As shown, it includes a baking plate body 1, a conveying component 2 and a heating component 3.

[0040] The drying plate body 1 is provided with a conveyor assembly 2 for conveying wafers 4 to be dried. The width of the drying plate body 1 is not less than the diameter of the wafers 4 to be dried. This arrangement allows the wafers 4 to be completely placed on the drying plate body 1, avoiding the problem of uneven heating of the wafers 4 caused by the conventional arrangement of movable rods on both sides of the drying plate, which prevent the contact area between the wafers and the movable rods from being heated by the drying plate.

[0041] In this embodiment, at least three groups of heating components 3 are provided, and the three groups of heating components 3 are arranged in sequence along the length direction of the baking plate body 1 .

[0042] By arranging three groups of heating components 3 in sequence along the length direction of the baking plate main body 1, the wafer 4 is heated on the baking plate main body 1 and is heated in three temperature zones. This can improve the heating uniformity of the wafer 4, solve the problem that the local glass powder of the wafer cannot be dried after printing, and further solve the problem of wafer leakage.

[0043] As an optional embodiment, the baking plate body 1 includes a first baking plate 11, a second baking plate 12 and a third baking plate 13 arranged in sequence, and a group of heating components 3 are respectively provided on the first baking plate 11, the second baking plate 12 and the third baking plate 13.

[0044] Specifically, Figure 3 Schematic diagram of the structure of the baking plate in this embodiment. Figure 3As shown, the first baking plate 11 , the second baking plate 12 , and the third baking plate 13 are all provided with first strip holes 110 and second strip holes 120 along the length direction.

[0045] The transmission components 2 include two groups, and the two groups of transmission components 2 are respectively disposed in a first strip hole group consisting of a plurality of first strip holes 110 and a second strip hole group consisting of a plurality of second strip holes 120 .

[0046] Figure 4 yes Figure 2 The main structure diagram of Figure 5 It is a structural diagram of the temperature zone distribution of the drying plate, such as Figure 4 and Figure 5 As shown, the drying plate in this embodiment includes eight drying plate bodies 1. The width of the drying plate body is 140 mm and the length is 1800 mm, which can meet the needs of conveying and drying 125 mm and 135 mm wafers 4.

[0047] By setting the first strip holes 110 and the second strip holes 120 on the first baking plate 11, the second baking plate 12 and the third baking plate 13, and the first strip holes 110 on the first baking plate, the second baking plate 12 and the third baking plate 13 are set on the same straight line, the installation of the conveying component 2 is facilitated, and the second strip holes 120 are set similarly.

[0048] Such a configuration is beneficial for conveying the wafer 4 on the conveying component 2 , and can also ensure that the wafer 4 is heated in three temperature zones by the three groups of heating components 3 during the conveying process, thereby ensuring uniform heating of the wafer 4 .

[0049] Optionally, the maximum heating temperature of the electric heating module 31 in this embodiment is 250°C. The set temperature of each temperature zone in this embodiment is 30°C-200°C. The temperature during normal use is preferably not more than 200°C. With this setting, it can be heated from room temperature to the set temperature in 15-20 minutes, so that the wafer drying can be carried out efficiently and smoothly.

[0050] As an optional embodiment, the conveying assembly 2 includes a power device 21 and a conveying rail 22 electrically connected to the power device 21, and the conveying rail 22 is arranged in the first strip hole group and the second strip hole group.

[0051] Optionally, the conveying rail 22 in this embodiment is made of steel wire.

[0052] The heating assembly 3 in this embodiment includes an electric heating module 31 and a temperature control sensor 32 , and the electric heating module 31 is electrically connected to the temperature control sensor 32 .

[0053] Figure 6 This is the control principle diagram of this embodiment, as shown in Figure 6As shown, the drying plate for glass passivation printing in this embodiment further includes a control device 5 , and the power device 21 , the electric heating module 31 , and the temperature control sensor 32 are all electrically connected to the control device 5 .

[0054] In this embodiment, the control device 5 adopts PLC. By setting up the control device 5, and the power device 21, the electric heating module 31, and the temperature control sensor 32 are all electrically connected to the control device 5, intelligent and automatic control can be performed through the control device 5, saving manpower and improving production efficiency.

[0055] Optionally, the specific control method can be to set a touch screen, remote control adjustment, etc. The temperatures of the three groups of heating components 3 in this embodiment can be set and displayed separately.

[0056] Compared with the prior art, this embodiment improves the structure of the baking plate body 1, thereby completely solving the problem of uneven heating of the glass powder and increasing the daily production capacity by at least 5,000 pieces.

[0057] As an optional embodiment, the baking plate body 1 is made of aluminum alloy, and the surface of the baking plate body 1 is provided with anti-slip grooves.

[0058] The drying plate body 1 in this embodiment is made of 7075 aluminum alloy, and the surface is made of anti-slip grooves and anodized. The three drying plates are connected as a whole. It is important to note that the surface of the drying plate body 1 should be free of burrs to avoid damage to the wafer 4.

[0059] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any modifications or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A drying plate for glass passivation printing, characterized in that: It includes a baking plate body, a conveying assembly and a heating assembly, wherein: The conveying assembly is provided on the drying plate body, and the conveying assembly is used to convey the wafers to be dried. The width of the drying plate body is not less than the diameter of the wafers to be dried. At least three groups of heating components are provided, and the three groups of heating components are arranged in sequence along the length direction of the baking plate body.

2. The drying plate for glass passivation printing according to claim 1, characterized in that: The drying plate body includes a first drying plate, a second drying plate and a third drying plate which are arranged in sequence, and a group of heating components is respectively provided on the first drying plate, the second drying plate and the third drying plate.

3. The drying plate for glass passivation printing according to claim 2, characterized in that: The first baking plate, the second baking plate, and the third baking plate are all provided with first strip holes and second strip holes along the length direction, wherein: The transmission components include two groups, and the two groups of transmission components are respectively arranged in a first strip hole group consisting of a plurality of the first strip holes and a second strip hole group consisting of a plurality of the second strip holes.

4. The drying plate for glass passivation printing according to claim 3, characterized in that: The conveying assembly includes a power device and a conveying rail electrically connected to the power device, and the conveying rail is arranged in the first strip hole group and the second strip hole group.

5. The drying plate for glass passivation printing according to claim 4, characterized in that: The heating component includes an electric heating module and a temperature control sensor, and the electric heating module is electrically connected to the temperature control sensor.

6. The drying plate for glass passivation printing according to claim 5, characterized in that: The drying plate for glass passivation printing further comprises a control device, and the power device, the electric heating module, and the temperature control sensor are all electrically connected to the control device.

7. A drying plate for glass passivation printing according to claim 5 or 6, characterized in that: The maximum heating temperature of the electric heating module is 250°C.

8. A drying plate for glass passivation printing according to any one of claims 1 to 3, characterized in that: The baking plate body is made of aluminum alloy, and the surface of the baking plate body is provided with anti-slip grooves.

9. A drying furnace, characterized in that: The invention comprises a furnace body and a drying plate for glass passivation printing according to any one of claims 1 to 8, wherein the drying plate for glass passivation printing is installed on the furnace body.

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