Conveying mechanism of semiconductor bracket

By designing a semiconductor rack conveying mechanism with adjustable track width, height and inclination, the problem that the existing feeding module is difficult to seamlessly connect with automated equipment in an automated production line is solved, and efficient and stable semiconductor rack conveying is achieved.

CN223356641UActive Publication Date: 2025-09-19GUANGDONG ADA SEMICON EQUIP CO LTD
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Patent Information

Application Number
CN202422687536.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-11-05
Publication Date
2025-09-19
Estimated Expiration
2034-11-05

AI Technical Summary

Technical Problem

In existing semiconductor manufacturing automated production lines, the feeding module adopts a top-down feeding and unloading method, which makes it difficult for the automated equipment to be seamlessly connected, increases the complexity and cost of the production line, and is not conducive to flexible adjustment and expansion.

Method used

A semiconductor bracket conveying mechanism is designed, including a carrier platform, a track assembly, a drive assembly, a first adjustment assembly, a second adjustment assembly and a third adjustment assembly. These components can realize flexible adjustment of the track width, height and inclination to meet the needs of different product brackets.

Benefits of technology

The versatility and flexibility of the transmission mechanism are improved, the accuracy and stability of the semiconductor bracket during the transmission process are ensured, the transmission error is reduced, and the production efficiency is improved.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to a conveying mechanism of a semiconductor support. The conveying mechanism has the functions of being adjustable in height, track width and inclination. The conveying mechanism comprises a bearing table, a rail assembly, a driving assembly and a three-stage adjusting assembly. The rail assembly is composed of a first connecting plate and a second connecting plate, and the bearing table is slidably connected to the rail assembly. The driving assembly drives the bearing table to move through the synchronous belt wheel. The first adjusting assembly adjusts the rail width through a cross guide rail, the second adjusting assembly adjusts the height through a height adjusting plate and an adjusting piece, and the third adjusting assembly adjusts the gradient through a rotating shaft and an adjusting piece. In addition, an inductive switch and a limiting piece are further arranged to improve safety and stability, and a reinforcing block enhances the structural strength. The conveying mechanism can flexibly adapt to semiconductor supports of different sizes, accurate and stable conveying is achieved, and the production efficiency is improved; and through the three-stage adjusting assembly, different production requirements can be met, and wide application prospects are achieved.
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Description

Technical Field

[0001] The utility model relates to the technical field of design and manufacturing of automated production equipment, and more specifically, to a conveying mechanism for a semiconductor bracket. Background Art

[0002] With the continuous development of the global economy, the continuous rise in the price level has led to a significant increase in labor costs. Especially in high-tech fields such as semiconductor manufacturing, the requirements for production efficiency and precision are extremely high, and the introduction of automated production lines is particularly urgent. However, the feeding modules of wire bonding machines currently on the market generally adopt a top-down feeding and discharging method, such as the top-down feeding and discharging equipment with patent publication number CN209427678U. This design has many inconveniences during the integration process of automated production lines. On the one hand, the top-down feeding and discharging mode limits the seamless connection with automated equipment such as robots, increasing the complexity and cost of automated production lines. On the other hand, this mode is not conducive to the flexible adjustment and expansion of production lines, limiting the widespread application and in-depth development of automated production lines.

[0003] In response to the above problems, the market urgently needs a conveying mechanism that can easily connect to external automated equipment, has strong adaptability and is easy to integrate; the mechanism should have the function of flexibly adjusting the track width, overall height and inclination to meet the needs of different product brackets and provide more options and possibilities for the access to automated production lines; therefore, this patent proposes a semiconductor bracket conveying mechanism, which aims to solve the shortcomings of existing feeding modules in the application of automated production lines and promote the automation process of industries such as semiconductor manufacturing. Utility Model Content

[0004] In view of the deficiencies in the prior art, the present invention aims to provide a conveying mechanism for a semiconductor bracket to solve the problems in the above-mentioned background technology.

[0005] The above technical objectives of the present utility model are achieved through the following technical solutions: A conveying mechanism for a semiconductor bracket, comprising: a carrier platform for transporting the semiconductor bracket, a track assembly for moving the carrier platform, a driving assembly for driving the carrier platform to move on the track assembly, a first adjusting assembly for adjusting the track width of the track assembly, a second adjusting assembly for adjusting the height of the first adjusting assembly, and a third adjusting assembly for adjusting the inclination of the second adjusting assembly; the carrier platform is slidably connected to the track assembly; the driving assembly is fixedly connected to the track assembly, and the output end of the driving assembly is transmission-connected to the carrier platform; the track assembly is fixedly connected to the first adjusting assembly; the first adjusting assembly is fixedly connected to the second adjusting assembly; the second adjusting assembly is fixedly connected to the third adjusting assembly.

[0006] Optionally, the track assembly includes: a first connecting plate and a second connecting plate adapted to the first connecting plate; the first connecting plate and the second connecting plate are respectively fixedly connected to the first adjustment assembly; the first connecting plate and the second connecting plate are arranged opposite to each other; guide grooves for the movement of the supporting platform are provided on the opposite surfaces of the first connecting plate and the second connecting plate; the two guide grooves cooperate to form a track for the movement of the supporting platform; the two sides of the supporting platform are respectively slidably connected to the corresponding guide grooves.

[0007] Optionally, the drive assembly includes: a plurality of first synchronous pulleys, a plurality of second synchronous pulleys, a first idler pulley, a second idler pulley, a first synchronous belt, a second synchronous belt, an output rod and a driving member; the plurality of first synchronous pulleys are rotatably arranged on the first connecting plate; the plurality of second synchronous pulleys are rotatably arranged on the second connecting plate; the first synchronous belt is respectively wound around the plurality of first synchronous pulleys and the first idler pulley; the second synchronous belt is respectively wound around the plurality of second synchronous pulleys and the second idler pulley; the first synchronous belt and the second synchronous belt are respectively connected to the support platform for transmission; the first idler pulley is rotatably arranged on the first connecting plate, and the second idler pulley is rotatably arranged on the second connecting plate; one end of the output rod is fixedly connected to the output end of the driving member, and the other end is respectively connected to the first idler pulley and the second idler pulley for transmission; the driving member is fixedly connected to the first adjustment assembly.

[0008] Optionally, the first adjustment component includes: two first sliders connected to the first connecting plate, two second sliders connected to the second connecting plate, two first cross guide rails corresponding to the first slider one-to-one for adjusting the position of the first slider, two second cross guide rails corresponding to the second slider one-to-one for adjusting the second slider, two first limiting members corresponding to the first slider for limiting the first slider, two second limiting members corresponding to the second slider for limiting the second slider and a first support plate; the two first sliders are respectively connected to the first cross guide rails for transmission, and the first slider is respectively fixedly connected to one end of the first limiting member; the two second sliders are respectively connected to the second cross guide rails for transmission, and the second slider is respectively fixedly connected to one end of the second limiting member; the first cross guide rail and the second cross guide rail are respectively fixedly connected to the first support plate; and the first support plate is fixedly connected to the driving component.

[0009] Optionally, the second adjusting assembly includes: a first support column, a second support plate, a height-adjusting plate, at least one first adjusting member for adjusting the height of the height-adjusting plate, a third limiting member for preventing the first adjusting assembly from rocking left and right, a plurality of first limiting screws and a plurality of first limiting nuts corresponding to the plurality of first limiting screws; the first support column is fixedly connected to the second support plate; the first adjusting member is threadedly connected to the second support plate; one end of the first adjusting member passes through the second support plate and is fixedly connected to the height-adjusting plate; a first limiting hole is provided on the height-adjusting plate for the third limiting member to move; one end of the third limiting member is fixedly connected to the first support column, and the other end passes through the first limiting hole and then abutting against the height adjustment plate; the height adjustment plate is also provided with at least one second limiting hole; the first support column is provided with a plurality of first mounting screw holes corresponding to a plurality of first limiting nuts one by one; a plurality of first mounting screw holes are connected with the second limiting holes; a plurality of first limiting nuts are respectively arranged in the corresponding first mounting screw holes; a plurality of first limiting screws are respectively passed through the second limiting holes and threadedly connected with the corresponding first limiting nuts; the first limiting screw can abut against the height adjustment plate; when the first limiting screw and the first limiting nut are in threaded contact, the first limiting screw abuts against the height adjustment plate, so that the height adjustment plate and the first support column are in relative stationary state.

[0010] Optionally, the third adjusting component includes: a second support column, a base, an angle adjustment plate, a rotating shaft, at least one second adjusting member for adjusting the angle of the angle adjustment plate, a plurality of second limiting nuts and a second limiting screw corresponding to the plurality of second limiting nuts; the second support column is fixedly connected to the base; one end of the rotating shaft is rotatably connected to the second support column, and the other end is fixedly connected to the angle adjustment plate; the angle adjustment plate is fixedly connected to the second adjusting component; the second adjusting member is fixedly connected to the second adjusting component; one end of the second adjusting member passes through the second adjusting component and is threadedly connected to the second support column; at least one third member is provided on the second support column. Limiting hole; the third limiting hole is an arc-shaped hole; the angle adjustment plate is provided with a plurality of second mounting screw holes corresponding one to one with the plurality of second limiting nuts; the plurality of second mounting screw holes are respectively connected with the third limiting hole; the plurality of second limiting nuts are respectively arranged in the corresponding second mounting screw holes; the plurality of second limiting screws are respectively passed through the third limiting hole and threadedly connected with the corresponding second limiting nuts; the second limiting screw can abut against the angle adjustment plate; when the second limiting screw and the second limiting nut are in threaded contact, the second limiting screw abuts against the angle adjustment plate, so that the angle adjustment plate and the second support column are relatively stationary.

[0011] Optionally, it further includes: a first induction switch and a second induction switch; the first induction switch is arranged at one end of the first connecting plate, and the second induction switch is arranged at the other end of the first connecting plate.

[0012] Optionally, the first limiting member includes: a first limiting plate and a first limiting block; the first limiting plate is detachably connected to the first support plate; one end of the first limiting block is fixedly connected to the first slider; a fourth limiting hole is provided on the first limiting plate; the other end of the first limiting block is slidably limited and placed in the fourth limiting hole.

[0013] Optionally, the second limiting member includes: a second limiting plate and a second limiting block; the second limiting plate is detachably connected to the first support plate; one end of the second limiting block is fixedly connected to the second slider; a fifth limiting hole is provided on the second limiting plate; the other end of the second limiting block is slidably limited and placed in the fifth limiting hole.

[0014] Optionally, it also includes: a plurality of reinforcing blocks for increasing the strength of the overall supporting structure; the plurality of reinforcing blocks are fixedly connected to the second adjustment component and the third adjustment component respectively.

[0015] In summary, the present invention has the following beneficial effects:

[0016] The conveying mechanism realizes comprehensive adjustment of the track width, height and inclination through the first adjustment component, the second adjustment component and the third adjustment component; this design enables the conveying mechanism to adapt to semiconductor brackets of different sizes and shapes, greatly improving its versatility and flexibility.

[0017] The sliding connection between the carrier and the track assembly, as well as the transmission connection between the drive assembly and the carrier, ensure the accuracy and stability of the semiconductor bracket during the transmission process; this design reduces transmission errors and improves production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is the overall structural diagram of the utility model;

[0019] Figure 2 This is a rear view of the overall structure of the utility model;

[0020] Figure 3 It is a side view of the overall structure of the utility model;

[0021] Figure 4 yes Figure 1 Schematic diagram of the specific structure of part A.

[0022] In the figure: 1. carrier platform; 2. track assembly; 21. first connecting plate; 22. second connecting plate; 23. guide groove; 24. track; 3. drive assembly; 31. first synchronous pulley; 32. second synchronous pulley; 33. first idler pulley; 34. second idler pulley; 35. first synchronous belt; 36. second synchronous belt; 37. output rod; 38. drive member; 4. first adjustment assembly; 41. first slider; 42. second slider; 43. first cross guide rail; 44. second cross guide rail; 45. first limiting member; 451. first limiting plate; 452. first limiting block; 453. fourth limiting hole; 46. second limiting member; 461. second limiting plate; 462. Second limiting block; 463. Fifth limiting hole; 47. First support plate; 5. Second adjusting assembly; 51. First support column; 52. Second support plate; 53. Height adjustment plate; 531. First limiting hole; 532. Second limiting hole; 54. First adjusting member; 55. Third limiting member; 56. First limiting screw; 57. First limiting nut; 6. Third adjusting assembly; 61. Second support column; 611. Third limiting hole; 62. Base; 63. Angle adjustment plate; 64. Rotating shaft; 65. Second adjusting member; 66. Second limiting nut; 67. Second limiting screw; 7. First induction switch; 8. Second induction switch; 9. Reinforcement block. DETAILED DESCRIPTION

[0023] To make the objectives, features, and advantages of the present invention more readily apparent, the following detailed description of the present invention is provided with reference to the accompanying drawings. The accompanying drawings illustrate several embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein.

[0024] In the present invention, unless otherwise expressly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a communication between the two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances. The terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of such features.

[0025] In the present invention, unless otherwise expressly specified and limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature includes the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature. The terms "vertical," "horizontal," "left," "right," "above," "below," and similar expressions are for illustrative purposes only and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be understood as limiting the present invention.

[0026] The present invention will be described in detail below with reference to the accompanying drawings and embodiments.

[0027] The utility model provides a semiconductor bracket transmission mechanism, such as Figure 1 As shown, it includes: a carrier platform 1 for transporting semiconductor brackets, a track component 2 for moving the carrier platform 1, a driving component 3 for driving the carrier platform 1 to move on the track component 2, a first adjusting component 4 for adjusting the width of the track 24 of the track component 2, a second adjusting component 5 for adjusting the height of the first adjusting component 4 and a third adjusting component 6 for adjusting the inclination of the second adjusting component 5; the carrier platform 1 is slidably connected to the track component 2; the driving component 3 is fixedly connected to the track component 2, and the output end of the driving component 3 is transmission-connected to the carrier platform 1; the track component 2 is fixedly connected to the first adjusting component 4; the first adjusting component 4 is fixedly connected to the second adjusting component 5; the second adjusting component 5 is fixedly connected to the third adjusting component 6.

[0028] Specifically, a basic framework of a conveying mechanism is first constructed, which includes a carrier platform 1 for directly transporting semiconductor brackets; a track component 2, which serves as a path for the movement of the carrier platform 1; a drive component 3, which provides power for the movement of the carrier platform 1; a first adjustment component 4, which is used to adjust the width of the track component 2 to accommodate semiconductor brackets of different sizes; a second adjustment component 5, which is used to adjust the height of the first adjustment component 4 (that is, the entire track component 2 and the drive component 3, etc.); a third adjustment component 6, which is used to adjust the inclination of the second adjustment component 5 (that is, the entire upper half structure); these components are fixedly connected to form a whole to ensure the stability and accuracy of the transmission.

[0029] Furthermore, the track assembly 2 includes: a first connecting plate 21 and a second connecting plate 22 adapted to the first connecting plate 21; the first connecting plate 21 and the second connecting plate 22 are respectively fixedly connected to the first adjustment assembly 4; the first connecting plate 21 and the second connecting plate 22 are arranged opposite to each other; the first connecting plate 21 and the second connecting plate 22 are provided with guide grooves 23 for the movement of the supporting platform 1 on the opposite surfaces of each other; the two guide grooves 23 cooperate to form a track 24 for the movement of the supporting platform 1; the two sides of the supporting platform 1 are respectively slidably connected to the corresponding guide grooves 23.

[0030] Specifically, such as Figure 1 As shown, the specific implementation of the track assembly 2 is to design the first connecting plate 21 and the second connecting plate 22 to be arranged relative to each other, and to open guide grooves 23 on their opposite surfaces. The two guide grooves 23 cooperate to form a track 24, and the two sides of the supporting platform 1 are respectively slidably connected to the corresponding guide grooves 23 to ensure that the supporting platform 1 can move smoothly on the track 24; the first connecting plate 21 and the second connecting plate 22 are connected to the first adjustment assembly 4 through a fixed connection to realize the adjustability of the width of the track 24.

[0031] Furthermore, the drive assembly 3 includes: a plurality of first synchronous pulleys 31, a plurality of second synchronous pulleys 32, a first idler pulley 33, a second idler pulley 34, a first synchronous belt 35, a second synchronous belt 36, an output rod 37 and a driving member 38; the plurality of first synchronous pulleys 31 are rotatably set on the first connecting plate 21; the plurality of second synchronous pulleys 32 are rotatably set on the second connecting plate 22; the first synchronous belt 35 is respectively wound around the plurality of first synchronous pulleys 31 and the first idler pulleys 33; the second synchronous belt 36 is respectively wound around the plurality of second synchronous pulleys 32 and the second idler pulleys 34; the first synchronous belt 35 and the second synchronous belt 36 are respectively transmission connected to the supporting platform 1; the first idler pulley 33 is rotatably set on the first connecting plate 21, and the second idler pulley 34 is rotatably set on the second connecting plate 22; one end of the output rod 37 is fixedly connected to the output end of the electric driving member 38, and the other end is transmission connected to the first idler pulley 33 and the second idler pulley 34 respectively; the driving member 38 is fixedly connected to the first adjustment assembly 4.

[0032] Specifically, such as Figure 1As shown, the implementation method of the drive assembly 3 is to use a synchronous belt for transmission, including a first synchronous pulley 31, a second synchronous pulley 32, a first idler pulley 33, a second idler pulley 34, a first synchronous belt 35, a second synchronous belt 36, an output rod 37 and a driving member 38; the first synchronous pulley 31 and the second synchronous pulley 32 are respectively mounted on the first connecting plate 21 and the second connecting plate 22, and are respectively connected to the supporting platform 1 through the first synchronous belt 35 and the second synchronous belt 36; the tightness of the first synchronous belt 35 can be changed by adjusting the first idler pulley 33, and the tightness of the second synchronous belt 36 can be changed by adjusting the second idler pulley 34. The output rod 37 transmits the output power of the driving member 38 to the first idler pulley 33 and the second idler pulley 34, thereby driving the supporting platform 1 to move; the tightness of the first synchronous belt 35 and the second synchronous belt 36 can also be achieved by adjusting the tightness of the screws on the first idler pulley 33 and the second idler pulley 34 to achieve the change of the left and right positions, thereby achieving the purpose of loosening the first synchronous belt 35 and the second synchronous belt 36.

[0033] Furthermore, the first adjustment component 4 includes: two first sliders 41 connected to the first connecting plate 21, two second sliders 42 connected to the second connecting plate 22, two first cross guide rails 43 corresponding to the first sliders 41 for adjusting the position of the first slider 41, two second cross guide rails 44 corresponding to the second sliders 42 for adjusting the second slider 42, two first limiting members 45 corresponding to the first sliders 41 for limiting the position of the first slider 41, two second limiting members 46 corresponding to the second sliders 42 for limiting the position of the second slider 42, and a first support plate 47; the two first sliders 41 are respectively connected to the first cross guide rails 43 in a transmission manner, and the first sliders 41 are respectively fixedly connected to one end of the first limiting block; the two second sliders 42 are respectively connected to the second cross guide rails 44 in a transmission manner, and the second sliders 42 are respectively fixedly connected to one end of the second limiting block; the first cross guide rails 43 and the second cross guide rails 44 are respectively fixedly connected to the first support plate 47; and the first support plate 47 is fixedly connected to the driving component 3.

[0034] Specifically, such as Figure 1 As shown, the specific implementation of the first adjustment component 4 is to achieve adjustment of the width of the track 24 by driving the first slider 41 to move through the first cross guide rail 43, and driving the second slider to move through the second cross guide rail 44; the first limit member 45 and the second limit member 46 are used to limit the movement range of the first slider 41 and the second slider 42 respectively to ensure the accuracy and stability of the adjustment; the first support plate 47 serves as the supporting structure of the entire first adjustment component 4 and is fixedly connected to the drive component 3.

[0035] Furthermore, the second adjustment component 5 includes: a first support column 51, a second support plate 52, a height adjustment plate 53, at least one first adjustment member 54 for adjusting the height of the height adjustment plate 53, a third limiting member 55 for preventing the first adjustment component 4 from rocking left and right, a plurality of first limiting screws 56 and a plurality of first limiting nuts 57 corresponding to the plurality of first limiting screws 56; the first support column 51 is fixedly connected to the second support plate 52; the first adjusting member 54 is threadedly connected to the second support plate 52; one end of the first adjusting member 54 passes through the second support plate 52 and is fixedly connected to the height adjustment plate 53; a first limiting hole 531 is provided on the height support plate for the third limiting member 55 to move; one end of the third limiting member 55 is fixedly connected to the first support column 51, and the other end passes through the first limiting The first limiting screw 56 is threadedly connected to the first limiting nut 57 after passing through the second limiting hole 532; the first limiting screw 56 is in contact with the height adjustment plate 53; when the first limiting screw 56 and the first limiting nut 57 are threadedly fastened, the first limiting screw 56 abuts against the height adjustment plate 53, so that the height adjustment plate 53 and the first support column 51 are relatively stationary.

[0036] Specifically, such as Figure 2 As shown, the implementation method of the second adjustment component 5 is to use the first support column 51 and the second support plate 52 as the supporting structure, and the height adjustment plate 53 is threadedly connected to the second support plate 52 through a first adjusting member 54 (such as a screw) to achieve height adjustment; the third limiting member 55 is used to prevent the first adjustment component 4 from shaking left and right during the height adjustment process; a second limiting hole 532 corresponding to the first limiting screw 56 is opened on the height support plate, and a first mounting screw hole corresponding to the first limiting nut 57 is opened on the first support column 51; when the height is adjusted to the desired position, the first limiting screw 56 is passed through the second limiting hole 532 and then threadedly connected to the corresponding first limiting nut 57, and tightened until it abuts against the height adjustment plate 53; in this way, under the joint action of the first limiting screw 56 and the first limiting nut 57, the height adjustment plate 53 is locked at the desired height to prevent height changes due to vibration or external force, thereby ensuring stability after adjustment.

[0037] Furthermore, the third adjusting component 6 includes: a second support column 61, a base 62, an angle adjustment plate 63, a rotating shaft 64, at least one second adjusting member 65 for adjusting the angle of the angle adjustment plate 63, a plurality of second limiting nuts 66 and a second limiting screw 67 corresponding to the plurality of second limiting nuts 66; the second support column 61 is fixedly connected to the base 62; one end of the rotating shaft 64 is rotatably connected to the second support column 61, and the other end is fixedly connected to the angle adjustment plate 63; the angle adjustment plate 63 is fixedly connected to the second adjusting component 5; the second adjusting member 65 is fixedly connected to the second adjusting component 5; one end of the second adjusting member 65 passes through the second adjusting component 5 and is threadedly connected to the second support column 61; at least one A third limiting hole 611; the third limiting hole 611 is an arc-shaped hole; the angle adjustment plate 63 is provided with a plurality of second mounting screw holes corresponding one to one with the plurality of second limiting nuts 66; the plurality of second mounting screw holes are respectively connected to the third limiting hole 611; the plurality of second limiting nuts 66 are respectively arranged in the corresponding second mounting screw holes; the plurality of second limiting screws 67 respectively pass through the third limiting hole 611 and are threadedly connected with the corresponding second limiting nuts 66; the second limiting screw 67 can abut against the angle adjustment plate 63; when the second limiting screw 67 and the second limiting nut 66 are in threaded contact, the second limiting screw 67 abuts against the angle adjustment plate 63, so that the angle adjustment plate 63 and the second support column 61 are in relative stationary state.

[0038] Specifically, such as Figure 3 As shown, the specific implementation of the third adjustment component 6 is to rotatably connect the angle adjustment plate 63 with the second support column 61 through the rotating shaft 64, and change the angle of the angle adjustment plate 63 by rotating the second adjustment member 65, thereby adjusting the inclination of the entire upper part structure; the second limiting screw 67 and the second limiting nut 66 are used to fix the position of the angle adjustment plate 63 after the adjustment is completed; when the angle is adjusted to the desired position, the second limiting screw 67 is passed through the limiting hole on the angle adjustment plate 63 and threadedly connected to the second limiting nut 66; then, the second limiting nut 66 is tightened until it abuts against the angle adjustment plate 63 or the fixed structure, thereby locking the position of the angle adjustment plate 63.

[0039] Furthermore, it also includes: a first induction switch 7 and a second induction switch 8 ; the first induction switch 7 is arranged at one end of the first connecting plate 21 , and the second induction switch 8 is arranged at the other end of the first connecting plate 21 .

[0040] Specifically, such as Figure 1As shown, a first induction switch 7 and a second induction switch 8 are respectively provided at both ends of the first connecting plate 21, for detecting the moving position of the carrying platform 1 to realize automatic control and safety protection; when the carrying platform 1 moves, when the first induction switch 7 senses the material, a start signal can be triggered; when it moves to the second induction switch 8, a stop signal can be triggered or the next operation can be performed.

[0041] Furthermore, the first limiting member 45 includes: a first limiting plate 451 and a first limiting block 452; the first limiting plate 451 is detachably connected to the first support plate 47; one end of the first limiting block 452 is fixedly connected to the first slider 41; a fourth limiting hole 453 is provided on the first limiting plate 451; the other end of the first limiting block 452 is slidably limited and placed in the fourth limiting hole 453.

[0042] Specifically, such as Figure 1 As shown, the first limiting member 45 is a structure adopting a first limiting plate 451 and a first limiting block 452. The first limiting plate 451 is detachably connected to the first support plate 47, and the first limiting block 452 is fixedly connected to the first slider 41; the fourth limiting hole 453 is used to limit the moving range of the first limiting block 452 to ensure stable sliding of the first slider 41 on the cross guide rail.

[0043] Furthermore, the second limiting member 46 includes: a second limiting plate 461 and a second limiting block 462; the second limiting plate 461 is detachably connected to the first support plate 47; one end of the second limiting block 462 is fixedly connected to the second slider 42; a fifth limiting hole 463 is provided on the second limiting plate 461; the other end of the second limiting block 462 is slidably limited and placed in the fifth limiting hole 463.

[0044] Specifically, such as Figure 4 As shown, the implementation method of the second limit member 46 is similar to that of the first limit member 45, but is only used for the second slider 42 and the second cross guide rail 44; the structure of the second limit plate 461 and the second limit block 462 is the same as that of the first limit member 45, but the size and position may be different to adapt to the size and position requirements of the second slider 42.

[0045] Furthermore, it also includes: a plurality of reinforcing blocks 9 for increasing the strength of the overall supporting structure; the plurality of reinforcing blocks 9 are fixedly connected to the second adjusting component 5 and the third adjusting component 6 respectively.

[0046] Specifically, such as Figure 1As shown, in order to increase the strength of the overall supporting structure, several reinforcement blocks 9 can be added between the second adjustment component 5 and the third adjustment component 6; these reinforcement blocks 9 are fixedly connected to the second adjustment component 5 and the third adjustment component 6 respectively to form a more stable structure, thereby improving the carrying capacity and service life of the transmission mechanism.

[0047] In a specific implementation process, first, a carrier 1 is assembled for directly transporting the semiconductor rack;

[0048] Next, install the track assembly 2, which consists of a first connecting plate 21 and a second connecting plate 22. The two connecting plates are arranged opposite to each other and have guide grooves 23 on their opposite surfaces. The two guide grooves 23 cooperate to form a track 24 for the carrier 1 to move.

[0049] Install the drive assembly 3, which includes a first synchronous pulley 31, a second synchronous pulley 32, a first idler pulley 33, a second idler pulley 34, a first synchronous belt 35, a second synchronous belt 36, an output rod 37, and a driving member 38; the first synchronous pulley 31 and the second synchronous pulley 32 are respectively mounted on the first connecting plate 21 and the second connecting plate 22, and are connected to the supporting platform 1 through the first synchronous belt 35 and the second synchronous belt 36; the first idler pulley 33 and the second idler pulley 34 are used to change the direction of the synchronous belt, and the output rod 37 transmits the output power of the driving member 38 to the first idler pulley 33 and the second idler pulley 34, thereby driving the supporting platform 1 to move;

[0050] The track assembly 2 is fixedly connected to the first adjustment assembly 4. The first adjustment assembly 4 includes a first slider 41, a second slider 42, a first cross guide 43, a second cross guide 44, a first limiter 45, and a second limiter 46. The first cross guide 43 drives the first slider 41 to move, and the second cross guide 44 drives the second slider 42 to move, thereby adjusting the width of the track 24. The first limiter 45 and the second limiter 46 respectively limit the movement range of the first slider 41 and the second slider 42 to ensure the accuracy and stability of the adjustment.

[0051] The first adjustment assembly 4 is fixedly connected to the second adjustment assembly 5. The second adjustment assembly 5 includes a first support column 51, a second support plate 52, a height adjustment plate 53, a first adjusting member 54, a third limiting member 55, a first limiting screw 56 and a first limiting nut 57. The height adjustment plate 53 is threadedly connected to the second support plate 52 through the first adjusting member 54 (such as a screw) to achieve height adjustment; the third limiting member 55 prevents the first adjustment assembly 4 from shaking left and right during the height adjustment process; when the height is adjusted to the desired position, the first limiting screw 56 is passed through the second limiting hole 532 and then threadedly connected to the corresponding first limiting nut 57, and tightened until it abuts against the height adjustment plate 53, thereby locking the height;

[0052] Finally, the second adjustment assembly 5 is fixedly connected to the third adjustment assembly 6. The third adjustment assembly 6 includes a second support column 61, a base 62, an angle adjustment plate 63, a rotating shaft 64, a second adjusting member 65, a second limiting screw 67 and a second limiting nut 66; the angle adjustment plate 63 is rotatably connected to the second support column 61 through the rotating shaft 64, and the angle of the angle adjustment plate 63 is changed by rotating the second adjusting member 65, thereby adjusting the inclination of the entire upper half structure; when the angle is adjusted to the desired position, the second limiting screw 67 is passed through the limiting hole on the angle adjustment plate 63 and threadedly connected to the second limiting nut 66, and then the second limiting nut 66 is tightened until it abuts against the angle adjustment plate 63 or the fixed structure, thereby locking the position of the angle adjustment plate 63, and they together realize the adjustment of the inclination;

[0053] A first induction switch 7 and a second induction switch 8 are respectively provided at both ends of the first connecting plate 21 for detecting the moving position of the carrying platform 1. When the carrying platform 1 moves, the first induction switch 7 senses the material and triggers a start signal; when it moves to the second induction switch 8, a stop signal is triggered or the next operation is performed.

[0054] Several reinforcement blocks 9 are added between the second adjustment component 5 and the third adjustment component 6. These reinforcement blocks 9 are fixedly connected to the second adjustment component 5 and the third adjustment component 6 respectively to form a more stable structure, thereby improving the carrying capacity and service life of the transmission mechanism.

[0055] The utility model provides a conveying mechanism for a semiconductor bracket. Through the coordinated action of the first adjusting component 4, the second adjusting component 5 and the third adjusting component 6, the conveying mechanism can flexibly adjust the width, overall height and inclination of the track 24, so as to adapt to semiconductor brackets of different sizes, weights and transportation requirements; this height adjustability ensures the wide applicability of the conveying mechanism in various application scenarios; the sliding connection between the carrier 1 and the track component 2, and the transmission connection between the drive component 3 and the carrier 1 through the first synchronous belt 35 and the second synchronous belt 36 ensure the stability and accuracy of the conveying process; at the same time, the provision of the first induction switch 7 and the second induction switch 8 realizes the accurate detection of the moving position of the carrier 1, further improving the stability and reliability of the conveying. The first adjusting component 4 realizes fine adjustment of the width of the track 24 through the transmission connection of the cross guide rail and the slider; the second adjusting component 5 realizes precise adjustment of the overall height through the threaded connection between the first adjusting member 54 and the second support plate 52; the third adjusting component 6 realizes flexible adjustment of the inclination through the cooperation of the rotating shaft 64 and the second adjusting member 65; these fine adjustment mechanisms enable the conveying mechanism to be customized according to different needs; the setting of the reinforcement block 9 effectively increases the strength of the overall support structure of the conveying mechanism, improves its load-bearing capacity and service life; in summary, the semiconductor bracket conveying mechanism of this utility model patent has the advantages of high adjustability, stable and reliable conveying performance, fine adjustment mechanism, compact structure and easy maintenance.

[0056] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiment. All technical solutions based on the concept of the present invention are within the scope of protection of the present invention. It should be noted that for those skilled in the art, certain improvements and modifications that do not depart from the principles of the present invention should also be considered within the scope of protection of the present invention.

Claims

1. A conveying mechanism for a semiconductor support, characterized in that: include: A carrier for transporting a semiconductor rack, a track assembly for moving the carrier, a driving assembly for driving the carrier to move on the track assembly, a first adjusting assembly for adjusting a track width of the track assembly, a second adjusting assembly for adjusting a height of the first adjusting assembly, and a third adjusting assembly for adjusting an inclination of the second adjusting assembly; The bearing platform is slidably connected to the track assembly; the driving assembly is fixedly connected to the track assembly, and the output end of the driving assembly is transmission-connected to the bearing platform; The track assembly is fixedly connected to the first adjustment assembly; The first adjustment component is fixedly connected to the second adjustment component; The second adjustment component is fixedly connected to the third adjustment component.

2. The semiconductor support conveying mechanism according to claim 1, characterized in that: The track assembly includes: a first connecting plate and a second connecting plate adapted to the first connecting plate; The first connecting plate and the second connecting plate are respectively fixedly connected to the first adjusting assembly; The first connecting plate and the second connecting plate are arranged opposite to each other; the first connecting plate and the second connecting plate are both provided with guide grooves for the movement of the carrying platform on their opposite surfaces; the two guide grooves cooperate to form a track for the movement of the carrying platform; Both sides of the supporting platform are slidably connected to the corresponding guide grooves respectively.

3. The semiconductor support conveying mechanism according to claim 2, characterized in that: The driving assembly includes: a plurality of first synchronous pulleys, a plurality of second synchronous pulleys, a first idler pulley, a second idler pulley, a first synchronous belt, a second synchronous belt, an output rod and a driving member; A plurality of first synchronous pulleys are rotatably mounted on the first connecting plate; a plurality of second synchronous pulleys are rotatably mounted on the second connecting plate; The first synchronous belt is respectively wound around the plurality of first synchronous pulleys and the first idler pulley; the second synchronous belt is respectively wound around the plurality of second synchronous pulleys and the second idler pulley; the first synchronous belt and the second synchronous belt are respectively connected to the supporting platform for transmission; The first idler wheel is rotatably mounted on the first connecting plate, and the second idler wheel is rotatably mounted on the second connecting plate; One end of the output rod is fixedly connected to the output end of the driving member, and the other end is transmission-connected to the first idler wheel and the second idler wheel respectively; the driving member is fixedly connected to the first adjustment assembly.

4. The semiconductor support conveying mechanism according to claim 2, characterized in that: The first adjustment assembly includes: two first sliders connected to the first connecting plate, two second sliders connected to the second connecting plate, two first cross guide rails corresponding one-to-one to the first sliders for adjusting the positions of the first sliders, two second cross guide rails corresponding one-to-one to the second sliders for adjusting the second sliders, two first limiters corresponding to the first sliders for limiting the positions of the first sliders, two second limiters corresponding to the second sliders for limiting the positions of the second sliders, and a first support plate; The two first sliding blocks are respectively connected to the first cross guide rail in a transmission manner, and the first sliding blocks are respectively fixedly connected to one end of the first limiting member; The two second sliding blocks are respectively connected to the second cross guide rail in a transmission manner, and the second sliding blocks are respectively fixedly connected to one end of the second limit member; The first cross guide rail and the second cross guide rail are respectively fixedly connected to the first support plate; the first support plate is fixedly connected to the driving assembly.

5. The semiconductor support conveying mechanism according to claim 1, characterized in that: The second adjustment assembly includes: a first support column, a second support plate, a height adjustment plate, at least one first adjustment member for adjusting the height of the height adjustment plate, a third limiting member for preventing the first adjustment assembly from rocking left and right, a plurality of first limiting screws, and a plurality of first limiting nuts corresponding to the plurality of first limiting screws; The first support column is fixedly connected to the second support plate; The first adjusting member is threadedly connected to the second supporting plate; one end of the first adjusting member passes through the second supporting plate and is fixedly connected to the height adjusting plate; The height adjustment plate is provided with a first limiting hole for the third limiting member to move; one end of the third limiting member is fixedly connected to the first support column, and the other end passes through the first limiting hole and abuts against the height adjustment plate; The height adjustment plate is further provided with at least one second limiting hole; the first support column is provided with a plurality of first mounting screw holes corresponding one-to-one to the plurality of first limiting nuts; the plurality of first mounting screw holes are connected to the second limiting holes; A plurality of the first limiting nuts are respectively arranged in the corresponding first mounting screw holes; A plurality of the first limiting screws are respectively passed through the second limiting holes and are threadedly connected to the corresponding first limiting nuts; the first limiting screws can abut against the height adjustment plate; When the first limiting screw and the first limiting nut are in threaded contact, the first limiting screw contacts the height adjustment plate, so that the height adjustment plate and the first supporting column are relatively stationary.

6. The semiconductor support conveying mechanism according to claim 1, characterized in that: The third adjustment assembly includes: a second support column, a base, an angle adjustment plate, a rotating shaft, at least one second adjustment member for adjusting the angle of the angle adjustment plate, a plurality of second limiting nuts and second limiting screws corresponding to the plurality of second limiting nuts; The second support column is fixedly connected to the base; One end of the rotating shaft is rotatably connected to the second support column, and the other end is fixedly connected to the angle adjustment plate; the angle adjustment plate is fixedly connected to the second adjustment assembly; The second adjusting member is fixedly connected to the second adjusting assembly; one end of the second adjusting member passes through the second adjusting assembly and is threadedly connected to the second support column; At least one third limiting hole is formed on the second support column; the third limiting hole is an arc-shaped hole; the angle adjustment plate is formed with a plurality of second mounting screw holes corresponding one-to-one to the plurality of second limiting nuts; the plurality of second mounting screw holes are respectively connected to the third limiting hole; and the plurality of second limiting nuts are respectively disposed in the corresponding second mounting screw holes; A plurality of second limiting screws are respectively passed through the third limiting holes and are threadedly connected to the corresponding second limiting nuts; the second limiting screws can abut against the angle adjustment plate; When the second limiting screw and the second limiting nut are in thread-tight contact, the second limiting screw contacts the angle adjustment plate, so that the angle adjustment plate and the second support column are relatively stationary.

7. The semiconductor support conveying mechanism according to claim 2, characterized in that: Also includes: A first induction switch and a second induction switch; the first induction switch is arranged at one end of the first connecting plate, and the second induction switch is arranged at the other end of the first connecting plate.

8. The semiconductor support conveying mechanism according to claim 4, characterized in that: The first limiting member includes: a first limiting plate and a first limiting block; The first limiting plate is detachably connected to the first supporting plate; one end of the first limiting block is fixedly connected to the first sliding block; A fourth limiting hole is formed on the first limiting plate; the other end of the first limiting block is slidably and limitedly received in the fourth limiting hole.

9. The semiconductor support conveying mechanism according to claim 4, characterized in that: The second limiting member includes: a second limiting plate and a second limiting block; The second limiting plate is detachably connected to the first supporting plate; one end of the second limiting block is fixedly connected to the second sliding block; A fifth limiting hole is formed on the second limiting plate; the other end of the second limiting block is slidably limited and accommodated in the fifth limiting hole.

10. The semiconductor support conveying mechanism according to claim 1, characterized in that: Also includes: Several reinforcement blocks are used to increase the strength of the overall supporting structure; the several reinforcement blocks are fixedly connected to the second adjustment component and the third adjustment component respectively.

Citation Information

Patent Citations

  • Up-and-down feeding and discharging equipment

    CN209427678U