Pipeline assembly and coating device
By setting a one-way valve structure and a spray part in the pipeline assembly, the problem of premature reaction of the reactants in the pipeline is solved, and the normal use of the pipeline and the stable operation of the experimental equipment are achieved.
Patent Information
- Application Number
- CN202422322515.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-23
- Publication Date
- 2025-09-19
- Estimated Expiration
- 2034-09-23
AI Technical Summary
In the prior art, the unreasonable structure of the pipeline assembly causes the reactants to react prematurely in the third pipeline, generating a deposited film, causing blockage and affecting the normal use of the experimental equipment.
Multiple pipeline structures and spray parts are used, and a one-way valve structure is set at each connecting port to ensure that the reactants only flow into the flow chamber of the spray part in one direction and are sprayed into the reaction chamber through the spray port to avoid premature reaction.
It effectively prevents the reactants from reacting prematurely in the pipeline, avoids the formation of deposited films, ensures that the pipeline structure is not blocked, and guarantees the normal operation of the experimental equipment.
Smart Images
Figure CN223357745U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of atomic layer deposition experimental equipment, in particular to a pipeline component and a film coating device. Background Art
[0002] In the prior art, the pipeline assembly includes a spray structure and a three-way pipeline. The first and second pipelines in the three-way pipeline are respectively used to connect with two sources of reactants to be reacted, and then converge into the third pipeline in the three-way pipeline. At the same time, the other end of the third pipeline is connected to the spray structure and sprayed into the reaction chamber through the spray port of the spray structure for subsequent reaction.
[0003] However, the length of the third pipe mentioned above is relatively long. When the two reactants are sensitive to each other, it is easy for the two reactants to react quickly in the third pipe first. Long-term use will easily produce a deposited film in the third pipe, and the presence of the deposited film will block the third pipe, causing part of the reactants to be blocked by the deposited film during subsequent use and remain in the third pipe to continue reacting. This cycle will cause the entire experimental equipment to be unable to be used normally. Utility Model Content
[0004] The main purpose of the utility model is to provide a pipeline assembly and a coating device to solve the problem that the structure of the pipeline assembly in the prior art is unreasonable, which causes the reactants to react in the third pipeline in advance and produce a deposited film.
[0005] In order to achieve the above-mentioned purpose, according to one aspect of the present invention, a pipeline assembly is provided, including multiple pipeline structures and a spray part, the first ends of the multiple pipeline structures are respectively connected to multiple different sources of reactants; the spray part has a flow chamber, a spray port, and a connecting port, the spray port and the connecting port are both connected to the flow chamber, there are multiple connecting ports, and the second ends of the multiple pipeline structures are respectively connected to the multiple connecting ports one by one; wherein, a one-way valve structure is provided at each connecting port.
[0006] Furthermore, the spray port and the communication port are respectively located on different surfaces of the spray portion.
[0007] Furthermore, each pipeline structure includes a main pipeline and multiple branch pipelines, wherein the first end of the main pipeline is connected to the source of the reactant to be reacted; the first end of each branch pipeline is connected to the second end of the main pipeline, there are multiple spray parts, and the multiple spray parts are arranged one-to-one correspondingly to the multiple branch pipelines, and the second end of each branch pipeline is respectively connected one-to-one with the connecting ports on the corresponding spray parts.
[0008] Furthermore, there are two pipeline structures, each pipeline structure has a main pipeline and two branch pipelines, and the two branch pipelines of the same pipeline structure are arranged in a Y shape with the main pipeline; there are two spray parts, each spray part has two connecting ports, one of the two connecting ports on the same spray part is connected to the second end of a branch pipeline of the first pipeline structure, and the other connecting port of the two connecting ports on the same spray part is connected to the second end of a branch pipeline of the second pipeline structure, so that the two spray parts, the two branch pipelines of the first pipeline structure, and the two branch pipelines of the second pipeline structure form a ring-shaped structure.
[0009] Furthermore, the spray part has a columnar structure, and multiple communication ports are arranged around the circumferential outer surface of the spray part. The end surface of at least one axial end of the spray part has a spray port, and there are multiple spray ports, which are arranged at intervals.
[0010] Furthermore, the spray portion includes multiple groups of spray port groups, and one group of spray port groups includes one or more spray ports, wherein, when the spray port group includes one spray port, the spray port is located at the geometric center of the spray portion; when the spray port group includes multiple spray ports, the multiple spray ports in the same group are arranged at circumferential intervals around the spray portion, and the multiple groups of spray port groups are arranged at radial intervals along the spray portion.
[0011] Furthermore, the apertures of the multiple spray ports in the same spray port group are equal.
[0012] Furthermore, in the radial direction from the inside to the outside of the spray portion, the number of spray openings in each spray opening group gradually increases.
[0013] Furthermore, at least the aperture of the spray port located at the geometric center of the spray portion is smaller than the apertures of the remaining spray ports.
[0014] According to another aspect of the present invention, a coating device is provided, comprising a shell and a pipeline assembly, the shell having a reaction chamber; at least the spray part of the pipeline assembly is located in the reaction chamber, and the spray port of the spray part is connected to the reaction chamber, so that each reactant flows into the flow chamber of the spray part in only one direction through the corresponding pipeline structures, and is sprayed into the reaction chamber through the spray port for reaction; wherein the pipeline assembly is the above-mentioned pipeline assembly.
[0015] By applying the technical solution of the present invention, a pipeline assembly is provided, in which the first ends of multiple pipeline structures are respectively used to connect with the source of the reactant, and the second ends of the multiple pipeline structures are respectively connected with the multiple connecting ports of the spray part in a one-to-one correspondence. Since a one-way valve structure is provided at each connecting port, each reactant flows into the flow cavity in only one direction through the corresponding pipeline structure and is sprayed out through the spray port. The phenomenon of premature reaction of the reactant in the pipeline structure will not occur, and the phenomenon of deposition film will not occur, thereby ensuring that each pipeline structure will not be blocked by the deposition film. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] The drawings constituting part of this application are provided to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are provided to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:
[0017] Figure 1 A structural schematic diagram of a pipeline assembly according to an optional embodiment of the utility model is shown.
[0018] The above drawings include the following reference numerals:
[0019] 10. Pipeline structure; 11. Trunk pipeline; 12. Branch pipeline;
[0020] 20. Spraying part; 211. Spraying port; 212. Connecting port. DETAILED DESCRIPTION
[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is in no way intended to limit the present invention and its application or use. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0022] In order to solve the problem in the prior art that the structure of the pipeline assembly is unreasonable, which causes the reactants to react prematurely in the third pipeline to produce a deposited film, in some embodiments, the utility model provides a pipeline assembly and a coating device, wherein the coating device includes a shell and a pipeline assembly, and the shell has a reaction chamber; at least the spray part 20 of the pipeline assembly is located in the reaction chamber, and the spray port 211 of the spray part 20 is connected to the reaction chamber, so that each reactant can flow into the flow chamber of the spray part 20 in only one direction through the corresponding pipeline structures 10, and be sprayed into the reaction chamber through the spray port 211 for reaction; wherein the pipeline assembly is the pipeline assembly mentioned above and below.
[0023] like Figure 1 As shown, the pipeline assembly includes multiple pipeline structures 10 and a spray part 20. The first ends of the multiple pipeline structures 10 are respectively used to communicate with the source of the reactant to be reacted; the spray part 20 has a flow cavity, a spray port 211, and a connecting port 212. The spray port 211 and the connecting port 212 are both connected to the flow cavity. There are multiple connecting ports 212, and the second ends of the multiple pipeline structures 10 are respectively connected to the multiple connecting ports 212 one by one; wherein, each connecting port 212 is provided with a one-way valve structure.
[0024] In some embodiments, a pipeline assembly is provided, in which the first ends of multiple pipeline structures 10 are respectively used to connect with the source of the reactant, and the second ends of the multiple pipeline structures 10 are respectively connected with the multiple connecting ports 212 of the spray part 20 in a one-to-one correspondence. Since a one-way valve structure is provided at each connecting port 212, each reactant flows into the flow cavity in only one direction through the corresponding pipeline structure 10 and is sprayed out through the spray port 211. The reactant will not react prematurely in the pipeline structure 10, and the deposition film will not be generated, thereby ensuring that each pipeline structure 10 will not be blocked by the deposition film.
[0025] It should be noted that, as a possible scenario, the first ends of multiple pipeline structures 10 are respectively connected to multiple different sources of reactants.
[0026] It should be noted that, as a possible scenario, the spray port 211 and the communication port 212 are located on different surfaces of the spray portion 20. In this way, the overall structure of the spray portion 20 is ensured to be regular, and the reactants sprayed from the spray port 211 are prevented from being sprayed onto the pipe structure 10, thereby ensuring that the reactants sprayed from the spray port 211 can enter the reaction chamber as smoothly as possible to facilitate subsequent sufficient reaction.
[0027] It should be noted that, as a possible scenario, each pipeline structure 10 includes a main pipeline 11 and multiple branch pipelines 12, wherein the first end of the main pipeline 11 is connected to the source of the reactant; the first end of each branch pipeline 12 is connected to the second end of the main pipeline 11, there are multiple spray sections 20, and the multiple spray sections 20 are provided in a one-to-one correspondence with the multiple branch pipelines 12, and the second end of each branch pipeline 12 is connected to each communication port 212 on the corresponding spray section 20. This ensures that each pipeline structure 10 is independent and prevents the reactant from reacting prematurely within the pipeline structure 10.
[0028] It should be noted that, in a specific embodiment of the present application, Figure 1As shown, there are two pipeline structures 10, each pipeline structure 10 has a main pipeline 11 and two branch pipelines 12, and the two branch pipelines 12 of the same pipeline structure 10 are arranged in a Y shape with the main pipeline 11; there are two spray parts 20, each spray part 20 has two connecting ports 212, one of the two connecting ports 212 on the same spray part 20 is connected to the second end of a branch pipeline 12 of the first pipeline structure 10, and the other of the two connecting ports 212 on the same spray part 20 is connected to the second end of a branch pipeline 12 of the second pipeline structure 10, so that the two spray parts 20, the two branch pipelines 12 of the first pipeline structure 10, and the two branch pipelines 12 of the second pipeline structure 10 form a circular structure. In this way, while ensuring the regularity of the overall structure of the pipeline assembly, it is also possible to ensure the uniformity of the reactants sprayed into the reaction chamber.
[0029] like Figure 1 As shown, the spray section 20 is a cylindrical structure with multiple communication ports 212 disposed around the circumferential outer surface of the spray section 20. At least one axial end of the spray section 20 has a spray port 211 disposed on its end surface. Multiple spray ports 211 are provided, and the multiple spray ports 211 are spaced apart. This ensures that different reactants can be sprayed into the reaction chamber as quickly as possible through the multiple spray ports 211, thereby preventing the different reactants from remaining in the flow chamber for extended periods of time.
[0030] It should be noted that, as a possible scenario, the spray section 20 includes multiple groups of spray port groups, each of which includes one or more spray ports 211. When a spray port group includes one spray port 211, the spray port 211 is located at the geometric center of the spray section 20. When a spray port group includes multiple spray ports 211, the multiple spray ports 211 in the same group are spaced apart circumferentially around the spray section 20, and the multiple groups of spray port groups are spaced apart radially along the spray section 20. This ensures uniformity in the spray of the reactants from the spray section 20.
[0031] Preferably, the apertures of the multiple spray ports 211 in the same spray port group are equal.
[0032] Optionally, in the radial direction from the inside to the outside of the spray portion 20 , the number of the spray ports 211 in each spray port group gradually increases.
[0033] It should be noted that, in a specific embodiment of the present application, considering that the suction force in the middle of the spraying part 20 is greater than the suction force on the outer peripheral side, in order to further ensure the spraying effect of each spraying port 211 of the spraying part 20, as shown in FIG. Figure 1As shown, the aperture of at least the spray port 211 located at the geometric center of the spray portion 20 is smaller than the apertures of the other spray ports 211. In this way, when the reactant used in this application is a gas, the gas sprayed through all the spray ports 211 can be evenly dispersed into the reaction chamber.
[0034] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.
[0035] Unless otherwise specifically stated, the relative arrangement of the parts and steps, the numerical expressions and the numerical values set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. The techniques, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the techniques, methods and equipment should be considered as part of the authorization specification. In all examples shown and discussed here, any specific values should be interpreted as being merely exemplary and not as limitations. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar numbers and letters represent similar items in the following figures, and therefore, once an item is defined in one figure, it does not need to be further discussed in subsequent figures.
[0036] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used herein to describe the spatial positional relationship of a device or feature to other devices or features as shown in the figures. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figures. For example, if the device in the drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.
[0037] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, tasks, devices, components and / or combinations thereof.
[0038] It should be noted that the terms "first," "second," and the like in the specification and claims of this application and the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.
[0039] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.
Claims
1. A pipeline assembly, characterized in that: include: A plurality of pipeline structures (10), wherein first ends of the plurality of pipeline structures (10) are respectively used to communicate with a source of a substance to be reacted; A spray portion (20), the spray portion (20) comprising a flow cavity, a spray port (211), and a communication port (212), the spray port (211) and the communication port (212) both being in communication with the flow cavity, the communication port (212) being multiple, and the second ends of the multiple pipe structures (10) being in communication with the multiple communication ports (212) in a one-to-one correspondence; Wherein, each of the communication ports (212) is provided with a one-way valve structure.
2. The pipe assembly according to claim 1, wherein: The spray port (211) and the communication port (212) are respectively located on different surfaces of the spray portion (20).
3. The pipe assembly according to claim 1, wherein: Each of the pipeline structures (10) comprises: A trunk pipeline (11), wherein a first end of the trunk pipeline (11) is connected to the source of the substance to be reacted; There are a plurality of branch pipes (12), the first end of each branch pipe (12) is connected to the second end of the main pipe (11), there are a plurality of spray parts (20), the plurality of spray parts (20) are arranged in a one-to-one correspondence with the plurality of branch pipes (12), and the second end of each branch pipe (12) is connected to each communication port (212) on the corresponding spray part (20) in a one-to-one correspondence.
4. The pipe assembly according to claim 3, wherein: There are two pipeline structures (10), each pipeline structure (10) has a main pipeline (11) and two branch pipelines (12), and the two branch pipelines (12) of the same pipeline structure (10) are arranged in a Y shape with the main pipeline (11); There are two spray parts (20), and each spray part (20) has two communication ports (212). One of the two communication ports (212) on the same spray part (20) is connected to the second end of a branch pipe (12) of the first pipe structure (10), and the other of the two communication ports (212) on the same spray part (20) is connected to the second end of a branch pipe (12) of the second pipe structure (10), so that the two spray parts (20), the two branch pipes (12) of the first pipe structure (10), and the two branch pipes (12) of the second pipe structure (10) form a circular structure.
5. The pipe assembly according to claim 3, wherein: The spray portion (20) is a columnar structure, and a plurality of communication ports (212) are arranged around the circumferential outer surface of the spray portion (20). The end surface of at least one axial end of the spray portion (20) has the spray port (211), and there are a plurality of spray ports (211), which are arranged at intervals.
6. The pipe assembly according to claim 5, wherein: The spraying portion (20) includes a plurality of spraying port groups, and one of the spraying port groups includes one or more spraying ports (211), wherein: When the spray port group includes one spray port (211), the spray port (211) is located at the geometric center of the spray portion (20); When the spray port group includes a plurality of the spray ports (211), the plurality of the spray ports (211) in the same group are arranged at intervals around the circumference of the spray portion (20), and the plurality of groups of the spray port groups are arranged at intervals along the radial direction of the spray portion (20).
7. The pipe assembly according to claim 6, wherein: The apertures of the plurality of spray ports (211) in the same spray port group are equal.
8. The pipe assembly according to claim 6, wherein: In the radial direction from the inside to the outside of the spray portion (20), the number of spray ports (211) in each group of spray ports gradually increases.
9. The pipe assembly according to claim 6, wherein: The aperture of at least the spray opening (211) located at the geometric center of the spray portion (20) is smaller than the apertures of the remaining spray openings (211).
10. A film coating device, characterized in that: include: a housing having a reaction chamber; A pipeline assembly, wherein at least a spray portion (20) of the pipeline assembly is located in the reaction chamber, and a spray port (211) of the spray portion (20) is connected to the reaction chamber, so that each reactant flows into the flow chamber of the spray portion (20) in only one direction through each corresponding pipeline structure (10), and is sprayed into the reaction chamber through the spray port (211) for reaction; Wherein, the pipeline assembly is the pipeline assembly according to any one of claims 1 to 9.