Atmosphere isolation device and coating equipment

Abstract

The utility model discloses an atmosphere isolation device and coating equipment, the atmosphere isolation device is arranged between adjacent coating chambers and performs atmosphere isolation, the atmosphere isolation device comprises a first air exhaust chamber, a second air exhaust chamber, an isolation chamber, a first air exhaust mechanism, a second air exhaust mechanism and an air inflation mechanism, the first air suction chamber is provided with a first air inlet and a second air inlet which are oppositely arranged, and the second air suction chamber is provided with a third air inlet and a fourth air inlet which are oppositely arranged. Convection is formed between the first gas inlet and the second gas inlet and between the third gas inlet and the fourth gas inlet, gas in the coating chamber can be prevented from passing through, atmosphere isolation is achieved, when the carrier plate carries a substrate to pass through the first gas extraction cavity or the second gas extraction cavity, gas flow at the second gas inlet or the third gas inlet blows gas flow around the carrier plate, and gas flow around the carrier plate is prevented from flowing through the first gas extraction cavity or the second gas extraction cavity. And gas in the coating chambers is prevented from continuously flowing, so that the atmosphere isolation effect between the coating chambers and the coating quality are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaics, in particular to an atmosphere isolation device and a coating device. Background Art

[0002] During the preparation process of photovoltaic cells, multiple battery film layers are plated at one time. Different battery film layers are formed by reaction deposition in different coating chambers. Adjacent coating chambers need to be isolated to avoid mutual contamination of the atmosphere between the coating chambers. In related technologies, an isolation chamber is added between the coating chambers, and the atmosphere is isolated by vacuum pumping. The reaction gas in the coating chamber is brought from the coating chamber to the isolation chamber by the carrier plate and is pumped away by the vacuum pump. However, some gas will still be transported into another coating chamber along with the carrier plate. The atmosphere isolation effect is limited, which affects the purity of the film layer. Summary of the Invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes an atmosphere isolation device that can improve the isolation effect between coating chambers and the coating quality.

[0004] The utility model also provides a device with the atmosphere isolation device.

[0005] According to the first embodiment of the present invention, the atmosphere isolation device is provided between adjacent coating chambers and performs atmosphere isolation, comprising:

[0006] A first exhaust chamber, having a first exhaust cavity inside, and further comprising a first air inlet and a second air inlet arranged opposite to each other and communicating with the first exhaust cavity, wherein the first air inlet is used to communicate with one of the coating chambers;

[0007] The second exhaust chamber has a second exhaust cavity inside, and further has a third air inlet and a fourth air inlet arranged opposite to each other and connected to the second exhaust cavity, and the fourth air inlet is used to communicate with another coating chamber;

[0008] an isolation chamber located between the first air pumping chamber and the second air pumping chamber, wherein an isolation cavity is provided inside the isolation chamber, the first air pumping cavity is connected to the isolation cavity through the second air inlet, and the second air pumping cavity is connected to the isolation cavity through the third air inlet;

[0009] a first air extraction mechanism connected to the first air extraction chamber and used to extract the gas in the first air extraction cavity;

[0010] a second air extraction mechanism connected to the second air extraction chamber and used to extract the gas in the second air extraction cavity;

[0011] The inflation mechanism is connected to the isolation chamber and is used to inflate air into the isolation chamber.

[0012] The atmosphere isolation device according to the embodiment of the present invention has at least the following beneficial effects:

[0013] In the present invention, convection is formed between the first air inlet and the second air inlet, and between the third air inlet and the fourth air inlet, which can block the passage of gas in the coating chamber and realize atmosphere isolation. When the carrier carries the substrate through the first exhaust cavity or the second exhaust cavity, the airflow at the second air inlet or the third air inlet blows the airflow around the carrier, blocking the gas in the coating chamber from continuing to flow, thereby improving the atmosphere isolation effect between the coating chambers, and making the coating on the surface of the substrate to be plated have a higher cleanliness, thereby improving the coating quality.

[0014] According to some embodiments of the present invention, the inflation mechanism includes a conveying port defined for passing the carrier plate, the inflation mechanism includes an inflation body, and the inflation body is arranged on at least one side of the conveying port; wherein the inflation body is provided with an inflation slit on a side facing the conveying port, and the airflow released by the inflation slit forms an air curtain in the conveying port;

[0015] Alternatively, a plurality of air outlets are provided on a side of the inflatable body facing the delivery port, and the airflow released from the air outlets forms an air curtain in the delivery port.

[0016] According to some embodiments of the present invention, the inflatable body is provided with an inflation port and a plurality of flow channels arranged at intervals along the extension direction of the inflation slit, the inflation port is used to receive airflow introduced from the outside, the flow channels in each of the inflatable bodies extend toward the other inflatable body, and an inflation slit is provided on the opposite side of the inflatable bodies, the extension direction of the inflation slit is perpendicular to the arrangement direction of the first exhaust chamber and the second exhaust chamber, the airflow released by the inflation slit forms an air curtain in the delivery port, one end of each of the flow channels is connected to the inflation port, and the other end of each of the flow channels is connected to the inflation slit.

[0017] According to some embodiments of the present invention, at least one of the inflatable bodies is slidably connected to the isolation chamber and is capable of moving along the arrangement direction of the two inflatable bodies.

[0018] According to some embodiments of the present invention, the inflation mechanism also includes a fixed structure, the peripheral side of the fixed structure is connected to the inner wall of the isolation chamber, the fixed structure has a through groove, the through groove is used for the carrier plate to pass through, and at least one of the inflation bodies is slidably connected to the fixed structure.

[0019] According to some embodiments of the present invention, two guide grooves are provided inside the fixed structure, which are respectively located on the upper and lower sides of the through groove, and the guide grooves are connected to the through groove. One of the inflatable bodies is slidably connected to the guide groove on the upper side and can be lifted and lowered along the guide groove, and the other inflatable body is fixed in the guide groove on the lower side.

[0020] According to some embodiments of the present invention, the airflow intensity at the second air inlet is set to be greater than the airflow intensity at the first air inlet; the airflow intensity at the third air inlet is set to be greater than the airflow intensity at the fourth air inlet.

[0021] According to some embodiments of the present invention, a plurality of the inflation mechanisms are provided, and the plurality of inflation mechanisms are arranged at intervals along the arrangement direction of the first air pumping chamber and the second air pumping chamber.

[0022] According to some embodiments of the present invention, the first air pumping chamber, the isolation chamber, and the second air pumping chamber are arranged along a first direction, the first air inlet and the second air inlet are respectively provided on opposite sides of the first air pumping chamber along the first direction, and the third air inlet and the fourth air inlet are provided on opposite sides of the second air pumping chamber along the first direction;

[0023] The first air pumping chamber is also provided with a first air pumping port connected to the first air pumping cavity, the first air pumping mechanism is arranged at the first air pumping port, and the first air pumping port is located on the side of the first air pumping chamber in the second direction; the second air pumping chamber is also provided with a second air pumping port connected to the second air pumping cavity, the second air pumping mechanism is arranged at the second air pumping port, and the second air pumping port is located on the side of the second air pumping chamber in the second direction, and the first direction is perpendicular to the second direction.

[0024] The coating device according to the second embodiment of the present invention includes:

[0025] A first coating chamber, wherein a first coating cavity is provided;

[0026] a second coating chamber, wherein a second coating cavity is provided;

[0027] The atmosphere isolation device in the embodiment of the first aspect is located between the first coating chamber and the second coating chamber, the first coating chamber is connected to the first air inlet, and the second coating chamber is connected to the fourth air inlet.

[0028] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0030] Figure 1 This is a schematic diagram of an embodiment of the coating equipment of the present invention;

[0031] Figure 2 for Figure 1 Enlarged view of point A in the middle;

[0032] Figure 3 for Figure 1 Enlarged view of point B in the middle;

[0033] Figure 4 is a schematic diagram of an embodiment of an inflation mechanism;

[0034] Figure 5 A schematic diagram of the coordination between the inflatable body and the driving component according to one embodiment;

[0035] Figure 6 for Figure 5 Enlarged view of point C in the middle;

[0036] Figure 7 It is an exploded diagram of the inflation mechanism and the fixed structure;

[0037] Figure 8 This is a schematic diagram of the coordination between the inflation mechanism and the fixing structure according to one embodiment.

[0038] Reference numerals:

[0039] A first air extraction chamber 100, an air extraction cavity 110, a first air inlet 120, a second air inlet 130, and a first air extraction port 140;

[0040] Second air extraction chamber 200, second air extraction cavity 210, third air inlet 220, fourth air inlet 230, second air extraction port 240;

[0041] Isolation room 300, isolation cavity 310;

[0042] First coating chamber 400;

[0043] Second coating chamber 500;

[0044] First air extraction mechanism 600;

[0045] Inflating mechanism 700, inflating body 710, inflating slit 711, inflating port 712, flow channel 713, delivery port 720, driving component 730, fixing structure 740, through groove 741, guide groove 742;

[0046] The second air extraction mechanism 800 . DETAILED DESCRIPTION

[0047] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0048] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.

[0049] In the description of this utility model, "several" means more than one, "plurality" means more than two, "greater than," "less than," and "exceed" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. The use of the terms "first" and "second" is solely for the purpose of distinguishing technical features and is not to be construed as indicating or implying relative importance, implicitly specifying the number of the indicated technical features, or implicitly specifying the order of the indicated technical features.

[0050] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0051] In the description of the present invention, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the exemplary expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0052] An embodiment of the present invention provides an atmosphere isolation device, which is arranged between adjacent coating chambers and performs atmosphere isolation to isolate the two coating chambers and prevent the gases in the two coating chambers from contaminating each other and affecting the coating quality.

[0053] Reference Figure 1The atmosphere isolation device includes a first exhaust chamber 100, a second exhaust chamber 200, and an isolation chamber 300. The isolation chamber 300 is located between the first exhaust chamber 100 and the second exhaust chamber 200. The first exhaust chamber 100, the second exhaust chamber 200, and the isolation chamber 300 are located between the two coating chambers. The coating chamber close to the first exhaust chamber 100 is defined as the first coating chamber 400, and the coating chamber close to the second exhaust chamber 200 is defined as the second coating chamber 500. The carrier can move bidirectionally between the first coating chamber 400 and the second coating chamber 500. Taking the transportation of the carrier from the first coating chamber 400 to the second coating chamber 500 as an example, the substrate to be coated is loaded on the carrier. After the substrate to be coated is coated in the first coating chamber 400, the carrier carries the substrate to be coated through the first exhaust chamber 100, the isolation chamber 300, and the second exhaust chamber 200 in sequence and enters the second coating chamber 500 for coating again.

[0054] Reference Figure 1 and Figure 2 The isolation chamber 300 is provided with an isolation chamber 310, and the first exhaust chamber 100 is provided with a first exhaust chamber 110. The first exhaust chamber 100 further has a first air inlet 120 and a second air inlet 130 communicating with the first exhaust chamber 110. The first air inlet 120 is used to communicate with one of the coating chambers (the first coating chamber 400), and the first exhaust chamber 110 is communicated with the isolation chamber 310 via the second air inlet 130. The atmosphere isolation device further includes a first exhaust mechanism 600 and an inflation mechanism 700. The first exhaust mechanism 600 is connected to the first exhaust chamber 100 and extracts gas from the first exhaust chamber 110. The inflation mechanism 700 is connected to the isolation chamber 300 and inflates the isolation chamber 300. The first exhaust mechanism 600 and the inflation mechanism 700 work simultaneously. Under the exhaust action of the first exhaust mechanism 600, the gas in the first coating chamber 400 enters the first exhaust cavity 110 through the first air inlet 120, and the gas in the isolation cavity 310 enters the first exhaust cavity 110 through the second air inlet 130, and is exhausted from the first exhaust cavity 110 through the first exhaust mechanism 600. Since the first air inlet 120 and the second air inlet 130 are arranged opposite to each other, the air flow flowing into the first exhaust cavity 110 through the first air inlet 120 and the second air inlet 130 forms convection, and the air flow at the second air inlet 130 blocks the air flow at the first air inlet 120 from continuing to flow toward the isolation chamber 300 and the second coating chamber 500, thereby realizing atmosphere isolation between the two coating chambers.

[0055] Similarly, refer to Figure 1 and Figure 3A second vacuum chamber 210 is provided inside the second vacuum chamber 200. The second vacuum chamber 200 also has a third air inlet 220 and a fourth air inlet 230 connected to the second vacuum chamber 210. The fourth air inlet 230 is used to connect with another coating chamber (the second coating chamber 500). The second vacuum chamber 210 is connected to the isolation chamber 310 through the third air inlet 220. The atmosphere isolation device also includes a second vacuum mechanism 800. The second vacuum mechanism 800 is connected to the second vacuum chamber 200 and extracts the gas in the second vacuum chamber 210; the first vacuum mechanism 600 and the second vacuum mechanism 800 both include mechanical pumps, diaphragm pumps, molecular pumps and other power components that can extract gas. Under the suction action of the second suction mechanism 800, the gas in the second coating chamber 500 enters the second suction cavity 210 through the fourth air inlet 230, and the gas in the isolation cavity 310 enters the second suction cavity 210 through the third air inlet 220, and is extracted from the second suction cavity 210 through the second suction mechanism 800; since the third air inlet 220 and the fourth air inlet 230 are arranged opposite to each other, the air flow flowing into the second suction cavity 210 through the third air inlet 220 and the fourth air inlet 230 forms convection, and the air flow at the third air inlet 220 blocks the air flow at the fourth air inlet 230 from continuing to flow toward the isolation chamber 300 and the first coating chamber 400, thereby realizing atmosphere isolation between the two coating chambers.

[0056] When the carrier carrying the substrate passes through the first exhaust chamber 110, the flow direction of the airflow at the second air inlet 130 is opposite to the conveying direction of the carrier. The airflow at the second air inlet 130 blows the airflow around the carrier toward the first coating chamber 400, blocking the airflow in the first coating chamber 400 from entering the first exhaust chamber 110 and continuing to follow the carrier to flow toward the isolation chamber 300 and the second coating chamber 500; similarly, when the carrier carrying the substrate passes through the second exhaust chamber 210, the airflow at the third air inlet 220 blows the airflow around the carrier toward the second coating chamber 500, blocking the airflow in the second coating chamber 500 from entering the isolation chamber 300 and the first coating chamber 400, thereby improving the atmosphere isolation effect between the coating chambers, and making the coating on the surface of the substrate to be coated have a higher degree of cleanliness, thereby improving the coating quality.

[0057] It should be noted that since the inflation mechanism 700 inflates the isolation chamber 300, and the air flow in the isolation chamber 300 is affected by the exhaust action of the first exhaust mechanism 600 and the second exhaust mechanism 800 and flows toward the second air inlet 130 and the third air inlet 220 respectively, after the carrier carrying the substrate enters the isolation chamber 310, even if part of the gas follows the carrier to flow to the isolation chamber 310, the gas filled in the isolation chamber 310 will also blow the gas that follows the carrier to flow to the isolation chamber 310 into the first exhaust chamber 110 or the second exhaust chamber 210, preventing the gas from further flowing to the next coating chamber, thereby further improving the atmosphere isolation effect between the coating chambers.

[0058] It is understandable that the coating processes in the first coating chamber 400 and the second coating chamber 500 can be carried out simultaneously, and the first coating chamber 400 and the first air inlet 120, the second air inlet 130 and the isolation chamber 310, the third air inlet 220 and the isolation chamber 310, and the fourth air inlet 230 and the second coating chamber 500 are always kept in a connected state. The carrier is continuously transported through the first coating chamber 400, the first air inlet 120, the first exhaust chamber 110, the second air inlet 130, the isolation chamber 310, the third air inlet 220, the second exhaust chamber 210, and the fourth exhaust chamber into the second coating chamber 500, which is beneficial to improving the coating efficiency. The first exhaust mechanism 600, the second exhaust mechanism 800 and the inflation mechanism 700 work simultaneously. The gas flowing along the carrier plate will be blocked due to the convection of the gas when passing through the first exhaust chamber 100 and the second exhaust chamber 200. The atmosphere isolation device forms two isolation zones between the first coating chamber 400 and the second coating chamber 500 to ensure effective atmosphere isolation between the coating chambers.

[0059] In addition, the gas injected into the isolation chamber 310 by the inflation mechanism 700 is set to be an inert gas, such as nitrogen, argon, etc. Multiple inflation mechanisms 700 can be provided, and multiple inflation mechanisms 700 are spaced apart along the arrangement direction of the first pumping chamber 100 and the second pumping chamber 200. Multiple inflation mechanisms 700 can simultaneously inflate the isolation chamber 310. On the one hand, this increases the flow rate of gas in the isolation chamber 310, ensuring sufficient airflow at the second air inlet 130 to block the gas in the first coating chamber 400. On the other hand, when the carrier carrying the substrate passes through the isolation chamber 310, it can be sequentially blown by the airflow of multiple inflation mechanisms 700, thereby preventing the gas that has flowed into the isolation chamber 310 along with the carrier from continuing to flow forward, thereby improving the atmosphere isolation effect. Of course, the first pumping mechanism 600 and the second pumping mechanism 800 can also work in conjunction with different inflation mechanisms 700 to isolate the gas in different coating chambers, achieving flexible adjustment of the atmosphere isolation.

[0060] In one embodiment, the airflow intensity at the second air inlet 130 is set to be greater than the airflow intensity at the first air inlet 120. When the first air inlet 120 and the second air inlet 130 form a countercurrent, the gas entering the first pumping chamber 110 from the first air inlet 120 is blocked by the stronger airflow at the second air inlet 130 and is blocked within the first pumping chamber 110 and pumped out of the first pumping chamber 110, thereby preventing the airflow in the first coating chamber 400 from continuing to flow forward and improving the atmosphere isolation effect between the coating chambers. Similarly, the airflow intensity at the third air inlet 220 is set to be greater than the airflow intensity at the fourth air inlet 230 to effectively prevent the gas in the second coating chamber 500 from continuing to flow into the isolation chamber 310. Airflow intensity can be expressed in the form of air pressure, airflow velocity, etc. Taking the comparison of airflow intensity at the first air inlet 120 and the second air inlet 130 as an example, the air pressure at the second air inlet 130 can be set to be greater than the air pressure at the first air inlet 120, or the airflow velocity at the second air inlet 130 can be set to be greater than the airflow velocity at the first air inlet 120, so that the airflow at the second air inlet 130 has a greater impact and blocks the gas in the first air extraction cavity 110 from continuing to flow into the isolation cavity 310. Methods for adjusting airflow intensity are not limited to changing the flow rate of gas introduced into the isolation cavity 310 by the inflation mechanism 700 or changing the opening widths of the first air inlet 120 and the second air inlet 130.

[0061] In addition, the first exhaust chamber 100, the isolation chamber 300 and the second exhaust chamber 200 are defined as being arranged along the first direction, and the first air inlet 120 and the second air inlet 130 are respectively arranged on opposite sides of the first exhaust chamber 100 along the first direction, so that the airflow at the first air inlet 120 and the second air inlet 130 can form convection. Similarly, the third air inlet 220 and the fourth air inlet 230 are arranged on opposite sides of the second exhaust chamber 200 along the first direction.

[0062] Reference Figure 2 and Figure 3The first exhaust chamber 100 is further provided with a first exhaust port 140 communicating with the first exhaust cavity 110. The first exhaust mechanism 600 is disposed at the first exhaust port 140 and extracts the gas within the first exhaust cavity 110 through the first exhaust port 140. The first exhaust port 140 is located on the side of the first exhaust chamber 100 in the second direction, with the first direction being perpendicular to the second direction. Thus, the airflows at the first air inlet 120 and the second air inlet 130 are directed in opposite directions and are both parallel to the first direction. The first exhaust port 140 avoids the flow direction of the airflows at the first air inlet 120 and the second air inlet 130. The gas entering the first exhaust cavity 110 from the first air inlet 120 and the second air inlet 130 is pulled in the second direction by the airflow applied by the first exhaust mechanism 600 and is extracted outside the first exhaust cavity 110, thereby preventing the airflow generated by the exhaust from affecting the convection of the airflows at the first air inlet 120 and the second air inlet 130. Similarly, the second air pumping chamber 200 is also provided with a second air pumping port 240 connected to the second air pumping cavity 210. The second air pumping mechanism 800 is arranged at the second air pumping port 240, and the gas in the second air pumping cavity 210 is extracted through the second air pumping port 240. The second air pumping port 240 is arranged on the side of the second air pumping chamber 200 in the second direction, so that the second air pumping port 240 can avoid the third air inlet 220 and the fourth air inlet 230 to avoid affecting the airflow therebetween. The airflow at the third air inlet 220 and the fourth air inlet 230 can flow together in the second direction and be extracted from the second air pumping cavity 210.

[0063] The inflation mechanism 700 is not limited to the method for inflating the isolation chamber 310. The inflation mechanism 700 includes an inflation tube, one end of which is inserted into the isolation chamber 310 and the other end is connected to an external gas source. The gas source inflates the isolation chamber 310 through the inflation tube. Multiple inflation tubes can be provided and distributed at different locations on the top and bottom of the isolation chamber 300. The ends of the inflation tubes can also be adjusted to vent gas toward the second gas inlet 130 or the third gas inlet 220, thereby facilitating the blowing of gas from the isolation chamber 310 into the exhaust chamber.

[0064] In one embodiment, referring to Figure 4The inflatable mechanism 700 defines a delivery port 720 for the carrier to pass through. The inflatable mechanism 700 also includes an inflatable body 710. The inflatable body 710 is arranged on at least one side of the delivery port 720. The inflatable body 710 is provided with an inflatable slit 711 on the side facing the delivery port 720. The inflatable mechanism 700 inflates air into the isolation chamber 310 through the inflatable slit 711. When the inflatable slit 711 is exhausted, an air curtain is formed in the delivery port 720. The air curtain is formed in the isolation chamber 310. 0, and separates the isolation chamber 310 into two areas to prevent the gas interaction in the coating chambers on both sides of the isolation chamber 310; and, taking the transportation of the carrier from the first coating chamber 400 to the second coating chamber 500 as an example, when the carrier passes through the delivery port 720, the air curtain in the delivery port 720 blocks the gas that follows the carrier into the isolation chamber 310 from continuing to move forward, so that the gas enters the first exhaust chamber 110 and is extracted out of the first exhaust chamber 110 by the first exhaust mechanism 600.

[0065] Furthermore, in one embodiment, the inflation mechanism 700 includes two inflation bodies 710 arranged opposite to each other, the delivery port 720 is located between the two inflation bodies 710, and an inflation slit 711 is provided on the opposite side of the inflation body 710. The extension direction of the inflation slit 711 is perpendicular to the arrangement direction of the first exhaust chamber 100 and the second exhaust chamber 200. The inflation mechanism 700 inflates air into the isolation chamber 310 through the inflation slit 711. The exhaust directions of the inflation slits 711 of the two inflation bodies 710 are opposite. When the inflation slit 711 is exhausted, an air curtain is formed in the delivery port 720. The air curtain forms a curtain wall in the isolation chamber 310 and separates the isolation chamber 310 into two areas to block the gas interaction in the coating chambers on both sides of the isolation chamber 310.

[0066] In another embodiment, a plurality of air outlets are provided on the side of the inflatable body 710 facing the delivery port 720, and the inflatable mechanism 700 inflates air into the isolation cavity 310 through the air outlets. The plurality of air outlets in the inflatable body 710 exhaust air at the same time, and an air curtain is formed in the delivery port 720 when the air outlets exhaust air.

[0067] Furthermore, the inflation mechanism 700 can be provided with two inflation bodies 710 arranged opposite to each other, the delivery port 720 is located between the two inflation bodies 710, and the arrangement direction of the multiple air outlets is perpendicular to the arrangement direction of the first exhaust chamber 100 and the second exhaust chamber 200. The inflation mechanism 700 inflates air into the isolation cavity 310 through the air outlet. The air outlets of the two inflation bodies 710 are arranged in opposite directions, and the multiple air outlets in each inflation body 710 are exhausted at the same time, and an air curtain is formed in the delivery port 720 when the air outlet is exhausted.

[0068] Further, refer to Figure 5 and Figure 6Taking the inflatable body 710 as an example, the inflatable body 710 is further provided with an inflatable port 712 and a plurality of flow channels 713 arranged at intervals along the extension direction of the inflatable slit 711. The inflatable port 712 is used to receive an air flow introduced from the outside. For example, the inflatable port 712 is connected to an external air pipe, and an external air source is connected through the air pipe. The flow channels 713 in each inflatable body 710 extend toward the other inflatable body 710, and one end of each flow channel 713 is connected to the inflatable port 712. , the other end of each flow channel 713 is connected to the inflation slit 711; the airflow entering from the inflation port 712 is diverted through different flow channels 713, and flows into the inflation slit 711 at different positions of the inflation slit 711 through different flow channels 713, and is finally discharged from the inflation slit 711. By setting the flow channels 713 to divert the airflow, the airflow discharged from different positions of the inflation slit 711 is made more uniform, thereby improving the gas blocking effect of the air curtain formed by the inflation slit 711.

[0069] It is understandable that a multi-stage flow diversion can be provided in the inflatable body 710 to further improve the uniformity of the airflow discharged from the inflatable slit 711. For example, along the outflow direction of the airflow from the inflatable slit 711, the inflatable body 710 is provided with at least two flow channel groups, each flow channel group includes a plurality of flow channels 713 arranged at intervals along the extension direction of the inflatable slit 711, and the different flow channel groups are interconnected and staggered in the extension direction of the inflatable slit 711. The number of flow channels 713 in the flow channel group close to the inflatable slit 711 is greater than the number of flow channels 713 in the flow channel group close to the inflatable port 712. After the airflow enters from the inflatable port 712, it passes through different flow channel groups in sequence and undergoes multiple diversions, making the airflow flowing to the inflatable slit 711 more evenly distributed.

[0070] If multiple outlets are provided on one side of the inflatable body 710, the number of flow channels 713 is equal to the number of outlets. One end of the flow channel 713 is connected to the inflatable port 712, and the other end is connected to the outlet. If multiple stages of flow diversion are provided within the inflatable body 710, the number of flow channels 713 in the flow channel group closest to the outlet is the same as the number of outlets.

[0071] In one embodiment, at least one inflatable body 710 is slidably connected to the isolation chamber 300 and is capable of moving along the arrangement direction of the two inflatable bodies 710, allowing the two inflatable bodies 710 to move closer or further apart to change the size of the delivery port 720. When a carrier does not need to pass through the delivery port 720 for transportation, the two inflatable bodies 710 are moved closer together, reducing the opening of the delivery port 720 and enhancing the effectiveness of the air curtain isolation atmosphere. When a carrier needs to pass through the delivery port 720, the two inflatable bodies 710 are moved apart, increasing the opening of the delivery port 720 to allow the carrier to pass through.

[0072] It can be understood that the inflation mechanism 700 includes a driving component 730, such as a cylinder, an electric cylinder, etc., which drives the inflation body 710 to move. The driving component 730 is installed on the outside of the isolation chamber 300. One end of the inflation body 710 is connected to the driving component, and the other end is inserted into the interior of the isolation chamber 300 and is driven to move in the isolation chamber 300.

[0073] Further, refer to Figure 7 and Figure 8 The inflation mechanism 700 further includes a fixed structure 740, the circumference of which is connected to the inner wall of the isolation chamber 300. The fixed structure 740 has a through slot 741 extending along the arrangement direction of the first pumping chamber 100 and the second pumping chamber 200. The through slot 741 allows a carrier to pass through. At least one inflatable body 710 is slidably connected to the fixed structure 740. Specifically, the circumference of the fixed structure 740 seals the gap between the inner wall of the isolation chamber 300 and the fixed structure 740, blocking airflow so that the carrier can only move through the through slot 741. The fixed structure 740 provides a mounting base for the inflatable body 710 and makes the movement of the inflatable body 710 more stable.

[0074] Specifically, two inflatable bodies 710 are vertically distributed, and at least one of the inflatable bodies 710 can be driven up and down to change the vertical opening of the delivery port 720. The through slot 741 should be larger than the delivery port 720 to ensure that the carrier can move through the through slot 741 and the delivery port 720.

[0075] In one embodiment, the inflatable body 710 is slidably connected to the side of the fixed structure 740 facing the first pumping chamber 100 or the side of the fixed structure 740 facing the second pumping chamber 200. The fixed structure 740 is provided with a slide groove that slidably cooperates with the inflatable body 710, allowing the inflatable body 710 to be smoothly raised and lowered along the slide groove. The carrier plate can pass through the through groove 741 and then enter the conveying port 720, or first pass through the conveying port 720 and then enter the through groove 741.

[0076] In another embodiment, two guide grooves 742 are provided inside the fixed structure 740. The guide grooves 742 are respectively arranged on the upper and lower sides of the through groove 741 and are connected to the through groove 741. At least one inflatable body 710 is slidably connected to the guide groove 742, and the inflatable body 710 can be smoothly raised and lowered along the guide groove 742. When the inflatable body 710 is driven to rise and fall, it can be inserted into the through groove 741 to cover part of the through groove 741 and change the opening of the through groove 741. The lower inflatable body 710 can be fixed in the lower guide groove 742, and the upper end of the inflatable body 710 protrudes outside the guide groove 742. The upper inflatable body 710 is slidably connected to the upper guide groove 742. The driving component is installed on the top of the isolation chamber 300 and connected to the upper inflatable body 710, so that the inflatable body 710 can be driven to extend into the through groove 741 or retract into the guide groove 742. Integrating the inflation body 710 into the interior of the fixed structure 740 can simplify the structure of the inflation mechanism 700 and facilitate the assembly of the inflation mechanism 700 and the isolation chamber 300 .

[0077] The inflation mechanism 700 also includes an inflation nozzle, which is used to connect to an external air source. The inflation port 712 of each inflatable body 710 can be connected to an inflation nozzle, and the external air source can inflate the two inflatable bodies 710 at the same time; alternatively, a guide channel is set inside the fixed structure 740, and the inflation ports 712 of the two inflatable bodies 710 are connected to the guide channel. The inflation nozzle is connected to the guide channel, and the two inflatable bodies 710 are inflated through the guide channel.

[0078] The utility model also provides a coating device, referring to Figure 1 The coating equipment includes a first coating chamber 400, a second coating chamber 500 and the above-mentioned atmosphere isolation device. The atmosphere isolation device is located between the first coating chamber 400 and the second coating chamber 500. A first coating cavity is provided inside the first coating chamber 400, and a second coating cavity is provided inside the second coating chamber 500. The first coating cavity is connected to the first air inlet 120. The process gas in the first coating cavity is exhausted by the first exhaust mechanism 600 and enters the first exhaust cavity 110 through the first air inlet 120 and is then exhausted from the first exhaust cavity 110. The second coating cavity is connected to the fourth air inlet 230. The process gas in the second coating cavity is exhausted by the second exhaust mechanism 800 and enters the second exhaust cavity 210 through the fourth air inlet 230 and is then exhausted from the second exhaust cavity 210. The atmosphere isolation device can isolate the atmosphere between the first coating chamber 400 and the second coating chamber 500 to prevent the process gases in the first coating chamber 400 and the second coating chamber 500 from contaminating each other.

[0079] In addition, buffer chambers can be set between the first exhaust chamber 100 and the first coating chamber 400, between the first exhaust chamber 100 and the isolation chamber 300, between the second exhaust chamber 200 and the second coating chamber 500, and between the second exhaust chamber 200 and the isolation chamber 300. The buffer chambers are used to buffer and isolate the airflow to further improve the atmosphere isolation effect.

[0080] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various modifications can be made within the scope of knowledge possessed by a person skilled in the art without departing from the spirit of the present invention. In addition, the embodiments of the present invention and the features of the embodiments can be combined with each other unless there is a conflict.

Claims

1. An atmosphere isolation device is provided between adjacent coating chambers to isolate the atmosphere, characterized in that: include: A first exhaust chamber, having a first exhaust cavity inside, and further comprising a first air inlet and a second air inlet arranged opposite to each other and communicating with the first exhaust cavity, wherein the first air inlet is used to communicate with one of the coating chambers; The second exhaust chamber has a second exhaust cavity inside, and further has a third air inlet and a fourth air inlet arranged opposite to each other and connected to the second exhaust cavity, and the fourth air inlet is used to communicate with another coating chamber; an isolation chamber located between the first air pumping chamber and the second air pumping chamber, wherein an isolation cavity is provided inside the isolation chamber, the first air pumping cavity is connected to the isolation cavity through the second air inlet, and the second air pumping cavity is connected to the isolation cavity through the third air inlet; a first air extraction mechanism connected to the first air extraction chamber and used to extract the gas in the first air extraction cavity; a second air extraction mechanism connected to the second air extraction chamber and used to extract the gas in the second air extraction cavity; The inflation mechanism is connected to the isolation chamber and is used to inflate air into the isolation chamber.

2. The atmosphere isolation device according to claim 1, characterized in that: The inflatable mechanism defines a delivery port for the carrier plate to pass through, and the inflatable mechanism includes an inflatable body, which is arranged on at least one side of the delivery port; wherein the inflatable body is provided with an inflatable slit on a side facing the delivery port, and the airflow released by the inflatable slit forms an air curtain in the delivery port; Alternatively, a plurality of air outlets are provided on a side of the inflatable body facing the delivery port, and the airflow released by the plurality of air outlets forms an air curtain in the delivery port.

3. The atmosphere isolation device according to claim 2, characterized in that: The inflatable body is provided with an inflation port and a plurality of flow channels arranged at intervals along the extension direction of the inflation slit. The inflation port is used to receive airflow introduced from the outside. The flow channels in each of the inflatable bodies extend toward the other inflatable body. An inflation slit is provided on the opposite side of the inflatable bodies. The extension direction of the inflation slit is perpendicular to the arrangement direction of the first exhaust chamber and the second exhaust chamber. The airflow released by the inflation slit forms an air curtain in the delivery port. One end of each of the flow channels is connected to the inflation port, and the other end of each of the flow channels is connected to the inflation slit.

4. The atmosphere isolation device according to claim 2, characterized in that: At least one of the inflatable bodies is slidably connected to the isolation chamber and is movable along the arrangement direction of the two inflatable bodies.

5. The atmosphere isolation device according to claim 4, characterized in that: The inflation mechanism further comprises a fixed structure, the peripheral side of which is connected to the inner wall of the isolation chamber, the fixed structure having a through slot for allowing a carrier plate to pass through, and at least one of the inflation bodies is slidably connected to the fixed structure.

6. The atmosphere isolation device according to claim 5, characterized in that: Two guide grooves are provided inside the fixed structure, which are respectively located on the upper and lower sides of the through groove. The guide grooves are connected to the through groove. One of the inflatable bodies is slidably connected to the guide groove on the upper side and can be lifted and lowered along the guide groove. The other inflatable body is fixed in the guide groove on the lower side.

7. The atmosphere isolation device according to claim 1, characterized in that: The air flow intensity at the second air inlet is set to be greater than the air flow intensity at the first air inlet; the air flow intensity at the third air inlet is set to be greater than the air flow intensity at the fourth air inlet.

8. The atmosphere isolation device according to any one of claims 1 to 7, characterized in that: A plurality of the inflation mechanisms are provided, and the plurality of inflation mechanisms are arranged at intervals along the arrangement direction of the first air pumping chamber and the second air pumping chamber.

9. The atmosphere isolation device according to claim 1, characterized in that: The first pumping chamber, the isolation chamber, and the second pumping chamber are arranged along a first direction, the first air inlet and the second air inlet are respectively arranged on two opposite sides of the first pumping chamber along the first direction, and the third air inlet and the fourth air inlet are respectively arranged on two opposite sides of the second pumping chamber along the first direction; The first air pumping chamber is also provided with a first air pumping port connected to the first air pumping cavity, the first air pumping mechanism is arranged at the first air pumping port, and the first air pumping port is located on the side of the first air pumping chamber in the second direction; the second air pumping chamber is also provided with a second air pumping port connected to the second air pumping cavity, the second air pumping mechanism is arranged at the second air pumping port, and the second air pumping port is located on the side of the second air pumping chamber in the second direction, and the first direction is perpendicular to the second direction.

10. Coating equipment, characterized in that, include: A first coating chamber, wherein a first coating cavity is provided; a second coating chamber, wherein a second coating cavity is provided; The atmosphere isolation device according to any one of claims 1 to 9 is located between the first coating chamber and the second coating chamber, the first coating chamber is connected to the first air inlet, and the second coating chamber is connected to the fourth air inlet.

Images