Multi-degree-of-freedom floating docking device and test equipment

Abstract

The utility model discloses a multi-degree-of-freedom floating docking device and test equipment, and the multi-degree-of-freedom floating docking device comprises a sleeve, a pedestal, and a floating assembly. The interior of the sleeve is of a hollow structure so that a first through hole with the small diameter, a second through hole with the large diameter and a conical transition face connected to the inner wall of the first through hole and the inner wall of the second through hole can be formed. The base is detachably connected to the sleeve, a third through hole is formed in the base, and the third through hole communicates with the second through hole through a spherical groove formed by the first spherical surface; the floating assembly comprises a floating shaft with one end extending out of the first through hole, an abutting block located on the periphery of the floating shaft and capable of abutting against the conical transition face, a guide block arranged on the floating shaft in a sleeving mode and capable of being attached to the first spherical face, and an elastic piece located between the abutting block and the guide block and used for restoring the floating shaft. The included angle between the end face of the floating shaft and the horizontal plane can be changed, so that the problem that contact is not in place due to low parallelism precision between a circuit board and an interface is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of chip testing, in particular to a multi-degree-of-freedom floating docking device and testing equipment. Background Art

[0002] With the development and advancement of semiconductor technology, wafer sizes and the number of devices under test (DUTs) are increasing. The signal density between automated test equipment (ATE) and probe stations is also increasing, placing increasing demands on docking accuracy and signal transmission. Existing docking methods typically rely on rigid, manual methods, which have significant shortcomings in both efficiency and accuracy, resulting in a low overall level of automation.

[0003] With manual mechanical docking, it's difficult to accurately determine if the tester and probe card are properly docked. Low precision in coarse and fine positioning, as well as parallelism of the docking planes, can lead to inadequate contact between the circuit board and the interface, impacting wafer inspection efficiency and accuracy.

[0004] Therefore, how to provide a multi-degree-of-freedom floating docking device and testing equipment to at least partially solve the above-mentioned drawbacks is a technical problem that technical personnel in this field currently need to solve. Utility Model Content

[0005] The purpose of the utility model is to provide a multi-degree-of-freedom floating docking device and testing equipment, which can solve the problem of insufficient contact caused by low parallelism accuracy between the circuit board and the interface, so as to improve the detection efficiency and detection accuracy of the wafer.

[0006] To achieve the above objectives, the present invention provides a multi-degree-of-freedom floating docking device, comprising:

[0007] The sleeve has a hollow structure inside to form a first through hole with a smaller diameter, a second through hole with a larger diameter, and a conical transition surface connected to the inner wall of the first through hole and the inner wall of the second through hole;

[0008] The base is detachably connected to the sleeve, and a third through hole is formed on the base, and the third through hole is connected to the second through hole through a spherical groove formed by the first spherical surface;

[0009] The floating assembly includes a floating shaft with one end extending to the outside of the first through hole, an abutment block located on the outer periphery of the floating shaft and capable of abutting against the conical transition surface, a guide block sleeved on the floating shaft and capable of fitting to the first spherical surface, and an elastic member located between the abutment block and the guide block for restoring the floating shaft.

[0010] Preferably, the guide block is provided with a second spherical surface which can rotate relative to the first spherical surface, so that the guide block driven by the floating shaft can rotate relative to the spherical groove.

[0011] Preferably, the axes of the first through hole and the third through hole are the same, and the diameters of the first through hole and the third through hole are both larger than the outer diameter of the floating shaft to provide space required for the floating shaft to tilt relative to the axes of the first through hole and / or the third through hole.

[0012] Preferably, the outer diameter of the abutment block is smaller than the diameter of the second through hole, so that the abutment block can move in the second through hole;

[0013] The outer diameter of the abutment block is greater than the diameter of the first through hole, so as to limit the abutment block from being separated from the sleeve along the first through hole.

[0014] Preferably, the diameter of the guide block is larger than the diameter of the third through hole to prevent the guide block from being separated from the base along the third through hole.

[0015] Preferably, an annular groove is formed on a side of the guide block facing away from the third through hole to accommodate an end portion of the elastic member facing away from the abutting block.

[0016] Preferably, a conical surface is provided on the side of the abutting block facing away from the elastic member, and the conical surface is used to abut against the conical transition surface, and the conical surface and the conical transition surface have the same taper.

[0017] Preferably, one end of the floating shaft extending to the outside of the first through hole is provided with a countersunk hole for detachable connection of an interface plate, and the interface plate is spaced apart from the sleeve.

[0018] A testing device, comprising the multi-degree-of-freedom floating docking device, further comprising:

[0019] a test head detachably connected to the base;

[0020] Locking mechanism, used to lock and drive the test head to move;

[0021] an interface plate detachably connected to one end of the floating shaft extending outside the first through hole, with the interface plate and the sleeve spaced apart;

[0022] The probe station has a probe card on the top, which is used to connect to the side of the interface board facing away from the test head.

[0023] Preferably, the interface board is provided with a coarse guide hole, a fine guide post and a connector, and the connector and the fine guide post are located on a side of the interface board facing away from the test head;

[0024] The circumference of the probe card includes coarse guide posts arranged opposite to the coarse guide holes and fine guide holes arranged opposite to the fine guide posts, so that the probe card and the connector are snap-fitted.

[0025] Compared with the above-mentioned background technology, the multi-degree-of-freedom floating docking device provided by the present invention includes a sleeve, a base and a floating assembly. The interior of the sleeve is a hollow structure to form a first through hole with a smaller diameter, a second through hole with a larger diameter, and a conical transition surface connected to the inner wall of the first through hole and the inner wall of the second through hole; the base is detachably connected to the sleeve, and a third through hole is opened on the base, and the third through hole is connected to the second through hole through a spherical groove formed by the first spherical surface; the floating assembly includes a floating shaft with one end extending to the outside of the first through hole, an abutment block located on the outer periphery of the floating shaft and capable of abutting the conical transition surface, a guide block sleeved on the floating shaft and capable of fitting to the first spherical surface, and an elastic member located between the abutment block and the guide block for restoring the floating shaft.

[0026] Specifically, the floating shaft is in a centered state through the elastic member between the abutment block and the guide block, and the abutment block abuts against the conical transition surface. When the floating shaft extends to the end outside the first through hole and is subjected to force, the floating shaft floats up and down, driving the abutment block to move down and disengage from the conical transition surface. When the floating shaft is tilted by force, it can drive the guide block to rotate relative to the spherical groove formed by the first spherical surface, and can change the angle between the end face of the floating shaft and the horizontal plane to solve the problem of low parallelism accuracy. The interface is installed on the end of the floating shaft extending to the outside of the first through hole through the interface board, which can solve the problem of poor contact caused by the low parallelism accuracy between the circuit board and the interface, thereby improving the detection efficiency and detection accuracy of the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0028] Figure 1 A schematic structural diagram of a multi-degree-of-freedom floating docking device provided by an embodiment of the present utility model;

[0029] Figure 2 A schematic structural diagram of the multi-degree-of-freedom floating docking device provided by an embodiment of the present utility model in use;

[0030] Figure 3 This is a schematic diagram of the structure of the testing equipment provided in an embodiment of the present utility model.

[0031] in:

[0032] 100-sleeve, 110-first through hole, 120-second through hole, 130-conical transition surface;

[0033] 200 - base, 210 - third through hole, 220 - first spherical surface, 230 - spherical groove;

[0034] 310 - floating shaft, 320 - abutment block, 321 - tapered surface, 330 - guide block, 331 - second spherical surface, 332 - annular groove, 340 - elastic member;

[0035] 400-test head;

[0036] 500-interface board, 510-coarse guide hole, 520-fine guide column, 530-connector, 540-connector;

[0037] 600-probe station, 610-probe card, 620-coarse guide column, 630-fine guide hole. DETAILED DESCRIPTION

[0038] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0039] In order to enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0040] In the description of the present invention, it should be understood that the terms "upper", "lower", "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the position or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, they cannot be understood as limitations of the present invention.

[0041] The purpose of the utility model is to provide a multi-degree-of-freedom floating docking device and testing equipment, which can solve the problem of insufficient contact caused by low parallelism accuracy between the circuit board and the interface, so as to improve the detection efficiency and detection accuracy of the wafer.

[0042] See also Figure 1 To achieve the above objectives, the present invention provides a multi-degree-of-freedom floating docking device, including a sleeve 100, a base 200 and a floating assembly.

[0043] The interior of the sleeve 100 is a hollow structure to form a first through hole 110 with a smaller diameter, a second through hole 120 with a larger diameter, and a conical transition surface 130 connected to the inner wall of the first through hole 110 and the inner wall of the second through hole 120 .

[0044] The base 200 is detachably connected to the sleeve 100. A third through hole 210 is provided on the base 200, and the third through hole 210 is connected to the second through hole 120 through a spherical groove 230 formed by the first spherical surface 220. A threaded hole can be provided at the end of the sleeve 100, and bolts are passed through the corresponding threaded holes to realize the detachable connection of the base 200 to the sleeve 100. Considering its stability in the connected state, the threaded holes should be evenly arranged along the circumference of the sleeve 100.

[0045] The floating assembly includes a floating shaft 310 with one end extending to the outside of the first through hole 110, an abutment block 320 located on the outer periphery of the floating shaft 310 and capable of abutting against the conical transition surface 130, a guide block 330 sleeved on the floating shaft 310 and capable of fitting to the first spherical surface 220, and an elastic member 340 located between the abutment block 320 and the guide block 330 for restoring the floating shaft 310.

[0046] The guide block 330 is sleeved on the floating shaft 310 and can fit into the first spherical surface 220. An elastic member 340 is provided between the abutment block 320 and the guide block 330, so that the floating shaft 310 can move along its own axial direction relative to the guide block 330, and the moving stroke of the floating shaft 310 is constrained by the elastic member 340. When there is no external force, the elastic force of the elastic member 340 causes the abutment block 320 to abut against the conical transition surface 130, thereby keeping the position of the floating shaft 310 relatively stable.

[0047] Among them, the abutment block 320 and the floating shaft 310 can adopt an integral structure, or the abutment block 320 and the floating shaft 310 can be set separately, and then the abutment block 320 is assembled to the corresponding position of the floating shaft 310 to complete the above-mentioned abutment block 320 for abutting the conical transition surface 130, and can be driven by the elastic member 340 to move the floating shaft 310.

[0048] It should be noted that the elastic member 340 can be a spring. By using different spring models, the amount of compression of the spring after being subjected to force can be changed, thereby controlling the up and down floating distance of the floating shaft 310, thereby preventing the floating shaft 310 from floating too much and causing the entire floating shaft 310 to be located inside the sleeve 100.

[0049] See also Figure 2When the locking cam 320 is in the unlocked position, the locking cam 320 is in the unlocked position, and the locking cam 320 is in the unlocked position, so that the locking cam 320 is locked.

[0050] It can be understood that the guide block 330 is provided with a second spherical surface 331 that can rotate relative to the first spherical surface 220. Through the contact between the first spherical surface 220 and the second spherical surface 331, the guide block 330 is provided with a through opening for the floating shaft 310 to pass through. One end of the opening extends to the first spherical surface 220. The guide block 330 driven by the floating shaft 310 can rotate relative to the spherical groove 230, so that the axial direction of the opening is consistent with the axial direction of the floating shaft 310.

[0051] In this embodiment, the axes of the first through hole 110 and the third through hole 210 are the same, and the diameters of the first through hole 110 and the third through hole 210 are both larger than the outer diameter of the floating shaft 310 to provide the space required for the floating shaft 310 to tilt relative to the axes of the first through hole 110 and / or the third through hole 210.

[0052] When the pressed floating shaft 310 is tilted relative to the first through hole 110 and / or the third through hole 210, a gap exists between the portion of the floating shaft 310 located in the first through hole 110 and the first through hole 110 to avoid contact between the inner wall of the first through hole 110 and the floating shaft 310, which would restrict the movement of the floating shaft 310.

[0053] In this embodiment, the outer diameter of the abutment block 320 is smaller than the diameter of the second through hole 120, so that the abutment block 320 can move in the second through hole 120. When an external force exists, the abutment block 320 that is pressed down has no contact with the inner wall of the second through hole 120 and the conical transition surface 130, so as to avoid obstruction of the movement of the floating shaft 310.

[0054] To ensure the abutting effect of the abutting block 320, the outer diameter of the abutting block 320 is larger than the diameter of the first through hole 110 to prevent the abutting block 320 from separating from the sleeve 100 along the first through hole 110. The diameter of the guide block 330 is larger than the diameter of the third through hole 210 to prevent the guide block 330 from separating from the base 200 along the third through hole 210. In this way, the abutting block 320 and the guide block 330 are ensured to be located in the internal space enclosed by the sleeve 100 and the base 200.

[0055] It should be noted that a limiting surface is provided on the side of the abutment block 320 facing the guide block 330 for abutting one end of the elastic member 340, and an annular groove 332 is provided on the side of the guide block 330 away from the third through hole 210 to accommodate an end of the elastic member 340 away from the abutment block 320. By sleeved the elastic member 340 on the outer periphery of the floating shaft 310, and the two ends of the elastic member 340 respectively abut against the limiting surface and the annular groove 332 to limit the position of the elastic member 340, a limiting protrusion or limiting groove for fixing one end of the elastic member 340 can also be provided on the limiting surface to increase the stability of the connection of the elastic member 340.

[0056] A conical surface 321 is provided on the side of the abutting block 320 facing away from the elastic member 340 . The conical surface 321 is used to abut against the conical transition surface 130 , and the conical surface 321 has the same taper as the conical transition surface 130 .

[0057] By setting the conical surface 321, the abutment between the above-mentioned abutment block 320 and the conical transition surface 130 can be achieved. When the floating shaft 310 is pressed downward under the action of external force, the conical surface 321 separates from the conical transition surface 130. When the external force is removed, the abutment block 320 drives the floating shaft 310 to move upward under the action of the elastic member 340. When the conical surface 321 partially contacts the conical transition surface 130, the conical transition surface 130 with the same taper can play a guiding role, driving the floating shaft 310 to restore its axis to coincide with the axis of the first through hole 110.

[0058] By configuring the conical transition surface 130 , the first spherical surface 220 and the elastic member 340 , the floating shaft 310 can automatically return to its original position after the external force is removed, thereby reducing alignment deviation and improving the repeatability of docking accuracy.

[0059] The floating shaft 310 extends to one end outside the first through hole 110 and is provided with a countersunk hole for detachable connection of the interface plate 500. The connecting piece 540 is passed through the interface plate 500 and fixed in the countersunk hole to realize the connection between the interface plate 500 and the floating shaft 310. The interface plate 500 is spaced apart from the sleeve 100. When the interface plate 500 is subjected to force, it will drive the floating shaft 310 to move relative to the sleeve 100 to adjust the angle between the end face of the floating shaft 310 and the horizontal plane, and then adjust the angle between the interface plate 500 and the horizontal plane.

[0060] See also Figure 3 This embodiment also includes a testing device, which includes the above-mentioned multi-degree-of-freedom floating docking device, and also includes a test head 400, a locking mechanism, an interface board 500 and a probe station 600.

[0061] The test head 400 is detachably connected to the base 200. Corresponding threaded holes can be provided on the test head 400, and bolts can be installed at corresponding positions on the base 200 to achieve a stable connection between the test head 400 and the base 200. The locking mechanism is used to lock and drive the test head 400 to move. The interface board 500 is detachably connected to one end of the floating shaft 310 extending to the outside of the first through hole 110, and the interface board 500 and the sleeve 100 are spaced apart. A probe card 610 is provided on the top of the probe station 600, and the probe card 610 is used to dock with the side of the interface board 500 facing away from the test head 400.

[0062] Among them, the interface board 500 is provided with a coarse guide hole 510, a fine guide post 520 and a connector 530, and the connector 530 and the fine guide post 520 are located on the side of the interface board 500 away from the test head 400; the circumference of the probe card 610 includes a coarse guide post 620 arranged opposite to the coarse guide hole 510 and a fine guide hole 630 arranged opposite to the fine guide post 520, so that the probe card 610 and the connector 530 are snap-fitted.

[0063] It should be noted that the connector 530 may use a pogo pin module to achieve connection with the probe card 610 .

[0064] The interface board 500 is connected to the test head 400 via multiple multi-degree-of-freedom floating docking devices, which enable floating adjustment of the interface board 500 in multiple degrees of freedom. The probe card 610 is fixed to the probe station 600. During the docking process, the test head 400 and the interface board 500 fall together. First, the coarse guide posts 620 on the probe station 600 engage with the coarse guide holes 510 on the interface board 500, and the interface board 500 automatically adjusts and aligns via the floating docking device. Next, the fine guide posts 520 on the interface board 500 engage with the fine guide holes 630 on the probe card 610, and the interface board 500 automatically adjusts and aligns. Finally, driven by the locking mechanism, the interface board 500 descends and docks with the probe card 610. During this process, the interface board 500 floats to ensure parallelism with the probe card 610, ensuring alignment and contact consistency of the connector 530 or spring pins.

[0065] With the top of the probe station 600 as the reference plane, the floating shaft 310 of the interface plate 500 floats up and down in the vertical direction when receiving force. After the floating shaft 310 is pressed down, the docking interface can float in the horizontal direction. At the same time, the floating shaft 310 can be tilted relative to the reference plane, and the parallelism with the reference plane is ensured by the floating of the floating shaft 310.

[0066] It should be noted that, in this specification, relational terms such as first and second are merely used to distinguish one entity from other entities, but do not necessarily require or imply any actual relationship or order between these entities.

[0067] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0068] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only intended to help understand the method and core concept of the present invention. It should be noted that those skilled in the art can make various improvements and modifications to the present invention without departing from the principles of the present invention, and such improvements and modifications also fall within the scope of protection of the present invention.

Claims

1. A multi-degree-of-freedom floating docking device, characterized in that: include: The sleeve has a hollow structure inside to form a first through hole with a smaller diameter, a second through hole with a larger diameter, and a conical transition surface connected to the inner wall of the first through hole and the inner wall of the second through hole; a base detachably connected to the sleeve, wherein a third through hole is formed on the base, and the third through hole is connected to the second through hole through a spherical groove formed by the first spherical surface; The floating assembly includes a floating shaft with one end extending to the outside of the first through hole, an abutment block located on the outer periphery of the floating shaft and capable of abutting against the conical transition surface, a guide block sleeved on the floating shaft and capable of fitting to the first spherical surface, and an elastic member located between the abutment block and the guide block for restoring the floating shaft.

2. The multi-degree-of-freedom floating docking device according to claim 1, characterized in that: The guide block is provided with a second spherical surface which can rotate relative to the first spherical surface, so that the guide block driven by the floating shaft can rotate relative to the spherical groove.

3. The multi-degree-of-freedom floating docking device according to claim 1, characterized in that: The axes of the first through hole and the third through hole are the same, and the diameters of the first through hole and the third through hole are both larger than the outer diameter of the floating shaft to provide the space required for the floating shaft to tilt relative to the axes of the first through hole and / or the third through hole.

4. The multi-degree-of-freedom floating docking device according to claim 1, characterized in that: The outer diameter of the abutment block is smaller than the diameter of the second through hole, so that the abutment block can move in the second through hole; The outer diameter of the abutment block is greater than the diameter of the first through hole, so as to limit the abutment block from being separated from the sleeve along the first through hole.

5. The multi-degree-of-freedom floating docking device according to claim 1, characterized in that: The diameter of the guide block is greater than the diameter of the third through hole to prevent the guide block from being separated from the base along the third through hole.

6. The multi-degree-of-freedom floating docking device according to claim 1, characterized in that: An annular groove is formed on a side of the guide block away from the third through hole to accommodate an end portion of the elastic member away from the abutting block.

7. The multi-degree-of-freedom floating docking device according to claim 1, characterized in that: A conical surface is provided on the side of the abutting block facing away from the elastic member. The conical surface is used to abut against the conical transition surface, and the conical surface has the same taper as that of the conical transition surface.

8. The multi-degree-of-freedom floating docking device according to claim 1, characterized in that: One end of the floating shaft extending to the outside of the first through hole is provided with a countersunk hole for detachable connection of an interface plate, and the interface plate is spaced apart from the sleeve.

9. A testing device comprising the multi-degree-of-freedom floating docking device according to any one of claims 1 to 8, characterized in that: Also includes: a test head detachably connected to the base; A locking mechanism, used for locking and driving the test head to move; an interface plate detachably connected to one end of the floating shaft extending to the outside of the first through hole, with the interface plate and the sleeve spaced apart; A probe station is provided with a probe card on the top, and the probe card is used to connect with the side of the interface board away from the test head.

10. The testing device according to claim 9, characterized in that The interface board is provided with a coarse guide hole, a fine guide post and a connector, and the connector and the fine guide post are located on a side of the interface board away from the test head; The circumference of the probe card includes coarse guide posts arranged opposite to the coarse guide holes and fine guide holes arranged opposite to the fine guide posts, so that the probe card and the connector are snap-fitted.

Images