Multilayer protection enhanced ion implanter insulator

Abstract

The utility model relates to the technical field of insulation assemblies, in particular to a multilayer protection enhanced ion implanter insulation part which comprises an insulation sleeve and an insulation protection sleeve, one end of the insulation sleeve is provided with an ion inlet, and one end of the insulation sleeve far away from the ion inlet is abutted against an insulation flange. An insulating ring is convexly arranged on the end face, away from the insulating sleeve, of the insulating flange, a shielding cylinder is arranged on the insulating sleeve facing the insulating flange, the shielding cylinder abuts against the insulating flange, and a communicating hole is formed in the end, away from the ion inlet, of the shielding cylinder; the insulating protective sleeve abuts against the insulating ring and is clamped to the shielding cylinder, and the insulating protective sleeve is provided with an ion outlet opposite to the communicating hole. The utility model aims to efficiently isolate an ion beam optical path transmission system and reduce the maintenance cost.

Description

Technical Field

[0001] The utility model relates to the technical field of insulating components, in particular to a multi-layer protection enhanced ion implanter insulating component. Background Art

[0002] The ion implanter is a very important step in the semiconductor manufacturing process. The gas source is ionized into ions by the ion implanter, and the ions are accelerated by the electric field. Finally, the ions are implanted into the silicon wafer to complete the material modification. The ion source and other components must be continuously insulated and isolated. Usually, an insulating sleeve is used to isolate the inside and outside to protect the internal ions from the influence of the external electric field. However, when the ions leave the ion source, they will collide with the cavity of the ion source, and tiny substances will often be attached to the insulating sleeve of the ion source. These substances often form discharge points under high voltage, causing the insulation to deteriorate, thereby affecting the ion implantation effect.

[0003] In the related technology, the insulating part includes an insulating sleeve and a threaded connecting block. The insulating sleeve includes a low-pressure area and a high-pressure area. A barrier area is provided between the low-pressure area and the high-pressure area. The barrier area can be used to decelerate ions. A shielding tube is provided in the barrier area facing the high-pressure area to avoid ions colliding with the insulating ring to generate electrons. The shielding tube will directly form an electric current to avoid affecting the transmission of ions. The threaded connecting block is plugged into the threaded groove of the ion source insulating sleeve, and the ion beam outlet is provided facing the connecting hole of the shielding tube.

[0004] However, because the related components will be in a high-voltage working environment for a long time when the ion source is working, they need to be disassembled, cleaned and maintained frequently to ensure the normal operation of the components. However, after the insulating sleeve is removed, the shielding tube will cover the barrier area inside the insulating sleeve, which has better insulation protection performance, but will cause great trouble for cleaning and maintenance. Utility Model Content

[0005] The main purpose of the utility model is to provide a multi-layer protection enhanced ion implanter insulating component, which is intended to efficiently isolate the ion beam optical path transmission system and reduce maintenance costs.

[0006] To achieve the above-mentioned purpose, the utility model proposes a multi-layer protection enhanced ion implanter insulation component, comprising an insulating sleeve and an insulating protective sleeve:

[0007] An ion entrance port is formed at one end of the insulating sleeve, an insulating flange is abutted against an end of the insulating sleeve away from the ion entrance port, an insulating ring is convexly provided on the end face of the insulating flange facing away from the insulating sleeve, a shielding cylinder is provided on the insulating sleeve facing the insulating flange, the shielding cylinder abuts against the insulating flange, and a connecting hole is formed at the end of the shielding cylinder away from the ion entrance port; and

[0008] The insulating protective sleeve is in contact with the insulating ring and is clamped on the shielding cylinder. The insulating protective sleeve is provided with an ion outlet relative to the communicating hole.

[0009] In one embodiment of the present application, the insulating sleeve is provided with a limiting opening facing the insulating flange, and the limiting opening surrounds the inner edge of the insulating flange.

[0010] In one embodiment of the present application, the shielding cylinder is provided with a limiting portion protruding circumferentially facing the limiting opening, and the limiting portion is connected to the insulating flange and clamped in the limiting opening.

[0011] In one embodiment of the present application, the shielding tube is inserted into the insulating protective sleeve, and the shielding tube includes a clamping portion and a guide portion:

[0012] One end of the clamping portion is connected to the limiting portion, and one end of the clamping portion away from the limiting portion is clamped to the insulating protective sleeve; and

[0013] The guide portion is provided with an end portion of the clamping portion facing the ion outlet, and the communicating hole is opened in the guide portion.

[0014] In one embodiment of the present application, the inner cavity of the insulating sleeve is coated with an insulating layer, and a low-pressure area is provided at one end of the insulating sleeve close to the ion inlet.

[0015] In one embodiment of the present application, the insulating protective sleeve is provided with a high-pressure area opposite to the low-pressure area, and the high-pressure area is connected to the ion outlet.

[0016] In one embodiment of the present application, both the inner wall and the outer wall of the insulating ring are provided with wavy folds.

[0017] The technical solution of the present invention is to divide the insulating part into an insulating sleeve and an insulating protective sleeve. One end of the insulating sleeve is provided with an ion inlet, and the other end is connected to an insulating flange. The end face of the insulating flange facing away from the insulating sleeve is convexly provided with an insulating ring. The inner wall and the outer wall of the insulating ring are provided with wavy folds. The relatively arranged wavy folds can increase the insulation distance and improve the insulation effect. The insulating protective sleeve abuts against the inside of the insulating ring. The insulating protective sleeve can cover the wavy folds to prevent ions from colliding with the insulating ring to generate secondary electrons. After these secondary electrons gradually accumulate and increase over time, the insulating ring will fail to function and cause a short circuit in the power supply. Covering the insulating ring with the insulating protective sleeve can effectively avoid problems with the insulating ring. The insulating protective sleeve includes an outer edge, which abuts against the insulating ring to play a role of limiting. It also allows the insulating protective sleeve to be more conveniently removed from the insulating ring. To facilitate subsequent cleaning and maintenance, a shielding tube is abutted on the insulating flange, one end of the shielding tube is clamped on the insulating sleeve, the shielding tube is passed through the insulating protective sleeve, and a connecting hole is opened, which can have better ion beam introduction and is used to guide the movement trajectory of the ion beam, and cooperate with the shielding tube to achieve a multi-level protection effect. The insulating flange and the insulating sleeve can be directly provided with a connection structure that is easy to disassemble. When the insulating flange is removed, the shielding tube can be removed at the same time, which is convenient for the subsequent maintenance of the insulating parts and can effectively improve the use effect. A locking structure can be formed between the shielding tube and the insulating ring, and the insulating protective sleeve can be clamped between the insulating ring and the shielding tube, which can be convenient to use, and the insulating protective sleeve is provided with an ion outlet relative to the connecting hole. The above design can achieve an efficient and multi-level isolation effect on the ion beam optical path transmission system, and the detachable structure can effectively reduce maintenance costs and improve user experience. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0019] Figure 1 This is a structural diagram of an embodiment of a multi-layer protection enhanced ion implanter insulation component of the utility model;

[0020] Figure 2 This is a cross-sectional view of an embodiment of a multi-layer protection enhanced ion implanter insulation component of the present invention.

[0021] Description of Figure Numbers:

[0022] 1. Insulating sleeve; 11. Ion inlet; 12. Limiting port; 13. Low-voltage zone; 2. Shielding tube; 21. Limiting portion; 22. Clamping portion; 23. Guide portion; 24. Connecting hole; 3. Insulating flange; 4. Insulating ring; 41. Corrugated portion; 5. Insulating protective sleeve; 51. Ion outlet; 52. High-voltage zone.

[0023] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solutions and advantages of this application more clearly understood, the present application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application.

[0025] Reference Figures 1 to 2 In one embodiment of the present utility model, a multi-layer protection enhanced ion implanter insulation component is proposed, including an insulating sleeve 1 and an insulating protective sleeve 5. An ion entrance port 11 is opened at one end of the insulating sleeve 1, and an insulating flange 3 is abutted at the end of the insulating sleeve 1 away from the ion entrance port 11. An insulating ring 4 is convexly provided on the end face of the insulating flange 3 facing away from the insulating sleeve 1. A shielding tube 2 is provided on the insulating sleeve 1 facing the insulating flange 3, and the shielding tube 2 is abutted against the insulating flange 3. A connecting hole 24 is opened at the end of the shielding tube 2 away from the ion entrance port 11; the insulating protective sleeve 5 abuts against the insulating ring 4 and is clamped on the shielding tube 2, and an ion outlet 51 is opened on the insulating protective sleeve 5 relative to the connecting hole 24.

[0026] In a low-loss insulating part of the present application, the insulating part is divided into an insulating sleeve 1 and an insulating protective sleeve 5. One end of the insulating sleeve 1 is provided with an ion inlet 11, and the other end is connected to an insulating flange 3. The end face of the insulating flange 3 facing away from the insulating sleeve 1 is convexly provided with an insulating ring 4. The inner wall and the outer wall of the insulating ring 4 are both provided with a wavy folded portion 41. The wavy folded portions 41 are arranged relatively to each other, and the insulation distance can be increased and the insulation effect can be improved. The insulating protective sleeve 5 abuts against the inside of the insulating ring 4. The insulating protective sleeve 5 can cover the wavy folded portion 41 to prevent ions from colliding with the insulating ring 4 to generate secondary electrons. After these secondary electrons gradually accumulate and increase over time, the insulating ring 4 will fail to function, causing a short circuit and sparking of the power supply. Covering the insulating ring 4 with the insulating protective sleeve 5 can effectively avoid problems with the insulating ring 4, and the insulating protective sleeve 5 includes an outer edge, which abuts against the insulating ring 4 to play a limiting role, and also allows the insulating protective sleeve 5 to be more conveniently removed from the insulating ring 4. The shielding tube 2 is a kind of shielding material that is easy to remove and easy to operate, and the shielding tube 2 is a kind of shielding material that is easy to remove and easy to operate.

[0027] Furthermore, the insulating flange 3 is provided with a through hole for allowing the ion beam to pass freely, and the end of the insulating sleeve 1 away from the ion entrance port 11 is provided with a limit opening 12 facing the through hole. In this embodiment, the diameter of the limit opening 12 is larger than the through hole, and the limit opening 12 is wrapped around the outer edge of the through hole to cooperate with the locking shielding tube 2 and ensure that the insulating parts can be disassembled more conveniently when maintenance is required.

[0028] Furthermore, the shielding tube 2 includes a limiting portion 21, a clamping portion 22 and a guide portion 23. The outer edge of the limiting portion 21 is clamped to the limiting opening 12, and the two can be tightly connected to prevent ions from falling into the gap between the two, and the limiting portion 21 abuts against the insulating flange 3, one end of the clamping portion 22 is connected to the limiting portion 21, and the outer wall of the clamping portion 22 abuts against the through hole of the insulating flange 3. In this embodiment, the clamping portion 22 and the insulating flange 3 are tightly connected by extrusion. Similarly, a threaded structure is provided on the outer wall of the clamping portion 22 near the limiting portion 21, which can also more conveniently lock the two, save maintenance time, and improve insulation. The service life of the edge part, the guide part 23 is connected to the end face of the clamping part 22 away from the limiting part 21, the guide part 23 is hemispherical in design, which can effectively guide the movement direction of the ion beam, and a connecting hole 24 is provided at the bottom end of the guide part 23 for guiding the ion beam and improving the isolation of the ion beam optical path transmission system. In this embodiment, a connecting structure is provided between the insulating flange 3 and the insulating sleeve 1, which can be a pin, a clamping space, etc. The shielding tube 2 is abutted against the insulating flange 3, and the limiting part 21 of the shielding tube 2 is docked with the limiting opening 12 to play a preliminary limiting role, and the docking effect can make disassembly and assembly more convenient, which can effectively reduce maintenance costs.

[0029] Furthermore, the insulating protective sleeve 5 is inserted between the insulating ring 4 and the clamping portion 22, and an ion outlet 51 is provided relative to the connecting hole 24 to guide the trajectory of the ion beam. In this embodiment, the inner cavity of the insulating sleeve 1 is provided with a low-pressure area 13 at the end near the ion entrance 11. The low-pressure area 13 is used to control the initial speed and direction of the ion beam. In this area, the ion beam is usually initially accelerated by a regulator and focused into a beam by a focusing electric field. This helps to ensure that the ion beam has a consistent speed and direction when it departs from the source, thereby reducing errors and improving injection accuracy. A high-pressure area 52 is provided at the ion outlet 51 to help maintain the stability of the ion beam and prevent it from diverging or losing focus. When the ion beam moves from the low-pressure area 13 to the high-pressure area 52, the positive ions are decelerated under the action of the negative electric field. The shielding tube 2, the insulating protective cover 5 and the insulating ring 4 cooperate with each other to achieve a multi-layer protection effect, which can effectively isolate the ion beam optical transmission system and improve the accuracy and stability of the injection. Moreover, through the cooperation of various structures, the maintenance cost can be effectively reduced and the service life of the insulating parts can be increased.

[0030] See also Figure 2 In one embodiment of the present application, the insulating sleeve 1 is provided with a limiting opening 12 facing the insulating flange 3 , and the limiting opening 12 surrounds the inner edge of the insulating flange 3 .

[0031] In a low-loss insulating part of the present application, an insulating flange 3 is provided with a through hole for allowing the ion beam to pass freely, and a limiting opening 12 is provided on the end of the insulating sleeve 1 away from the ion entrance port 11 facing the through hole. In this embodiment, the diameter of the limiting opening 12 is larger than the through hole, and the limiting opening 12 is wrapped around the outer edge of the through hole to cooperate with the locking shielding tube 2 and ensure that the insulating part can be disassembled more conveniently when maintenance is required.

[0032] See also Figure 2 In one embodiment of the present application, the shielding tube 2 is provided with a limiting portion 21 circumferentially protruding toward the limiting opening 12 . The limiting portion 21 is connected to the insulating flange 3 and is clamped in the limiting opening 12 .

[0033] In a low-loss insulating component of the present application, the outer edge of the limiting portion 21 is clamped to the limiting opening 12, and the two can be tightly connected to prevent ions from falling into the gap between the two. When the insulating flange 3 is connected to the insulating sleeve 1, the limiting portion 21 can limit the state of the insulating flange 3, so that the insulating flange 3 can be more easily assembled to the insulating sleeve 1, and can also be more conveniently disassembled, which can reduce maintenance time.

[0034] See also Figure 2 In one embodiment of the present application, the shielding tube 2 is passed through the insulating protective sleeve 5, and the shielding tube 2 includes a clamping portion 22 and a guide portion 23. One end of the clamping portion 22 is connected to the limiting portion 21, and the end of the clamping portion 22 away from the limiting portion 21 is clamped to the insulating protective sleeve 5; the guide portion 23 is provided with an end of the clamping portion 22 facing the ion outlet 51, and a connecting hole 24 is opened in the guide portion 23.

[0035] In a low-loss insulating part of the present application, the shielding tube 2 includes a limiting portion 21, a clamping portion 22 and a guide portion 23. The outer edge of the limiting portion 21 is clamped to the limiting opening 12, and the two can be tightly connected to prevent ions from falling into the gap between the two. The limiting portion 21 abuts against the insulating flange 3, one end of the clamping portion 22 is connected to the limiting portion 21, and the outer wall of the clamping portion 22 abuts against the through hole of the insulating flange 3. In this embodiment, the clamping portion 22 and the insulating flange 3 are tightly connected by extrusion. Similarly, a threaded structure is provided on the outer wall of the clamping portion 22 near the limiting portion 21, which can more conveniently lock the two, saving the time required for maintenance. The service life of the insulating part is improved. The guide part 23 is connected to the end face of the clamping part 22 away from the limiting part 21. The guide part 23 is hemispherical in design and can effectively guide the movement direction of the ion beam. A connecting hole 24 is provided at the bottom end of the guide part 23 for guiding the ion beam and improving the isolation of the ion beam optical path transmission system. In this embodiment, a connecting structure is provided between the insulating flange 3 and the insulating sleeve 1, which can be a pin, a clamping space, etc. The shielding tube 2 is abutted against the insulating flange 3, and the limiting portion 21 of the shielding tube 2 is docked with the limiting opening 12 to play a preliminary limiting role, and the docking effect can make disassembly and assembly more convenient, which can effectively reduce maintenance costs.

[0036] See also Figure 2 In one embodiment of the present application, the inner cavity of the insulating sleeve 1 is coated with an insulating layer, and a low-pressure area 13 is provided at one end of the insulating sleeve 1 close to the ion inlet 11 .

[0037] In a low-loss insulator of the present application, an insulating protective sleeve 5 is inserted between an insulating ring 4 and a clamping portion 22, and an ion outlet 51 is provided relative to the connecting hole 24 to guide the trajectory of the ion beam. In this embodiment, a low-pressure region 13 is provided at the end of the inner cavity of the insulating sleeve 1 near the ion entrance 11. The low-pressure region 13 is used to control the initial velocity and direction of the ion beam. Within this region, the ion beam is typically initially accelerated by a regulator and focused into a beam by a focusing electric field. This helps ensure that the ion beam has a consistent velocity and direction when it departs from the source, thereby reducing errors and improving injection accuracy.

[0038] See also Figure 2 In one embodiment of the present application, the insulating protective cover 5 is provided with a high-pressure area 52 relative to the low-pressure area 13 , and the high-pressure area 52 is connected to the ion outlet 51 .

[0039] In a low-loss insulating component of the present application, a high-voltage region 52 is provided at the ion outlet 51 to help maintain the stability of the ion beam and prevent it from diverging or losing focus. When the ion beam moves from the low-voltage region 13 to the high-voltage region 52, the positive ions are decelerated by the negative electric field. The shielding tube 2, the insulating protective sleeve 5, and the insulating ring 4 cooperate with each other to achieve a multi-layer protection effect, effectively isolating the ion beam optical transmission system, improving the accuracy and stability of the injection, and through the interaction of the various structures, it can effectively reduce maintenance costs and increase the service life of the insulating component.

[0040] See also Figure 2 In one embodiment of the present application, both the inner wall and the outer wall of the insulating ring 4 are provided with a wavy fold portion 41.

[0041] In a low-loss insulating part of the present application, an insulating ring 4 is protruding from the end face of the insulating flange 3 facing away from the insulating sleeve 1, and the inner wall and outer wall of the insulating ring 4 are both provided with a wavy corrugated portion 41. The relatively arranged wavy corrugated portions 41 can increase the insulation distance and improve the insulation effect.

[0042] The same or similar numbers in the drawings of this embodiment correspond to the same or similar parts; in the description of this application, it should be understood that if the terms "upper", "lower", "left", "right", etc. indicate an orientation or position relationship, they are based on the orientation or position relationship shown in the drawings. This is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, the terms describing the position relationship in the drawings are only used for illustrative purposes and cannot be understood as a limitation on this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0043] The above are only preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent replacements, and improvements made within the spirit and principles of the present application should be included in the scope of protection of the present application.

Claims

1. A multi-layer protection enhanced ion implanter insulation component, characterized in that: include: an insulating sleeve, wherein an ion inlet is formed at one end of the insulating sleeve, an insulating flange is abutted at one end of the insulating sleeve away from the ion inlet, an insulating ring is convexly provided on the end face of the insulating flange facing away from the insulating sleeve, a shielding cylinder is provided on the insulating sleeve facing the insulating flange, the shielding cylinder abuts the insulating flange, and a communicating hole is formed at the end of the shielding cylinder away from the ion inlet; and The insulating protective sleeve is in contact with the insulating ring and is clamped on the shielding cylinder. The insulating protective sleeve is provided with an ion outlet relative to the communicating hole.

2. The multi-layer protection enhanced ion implanter insulation component according to claim 1, characterized in that: The insulating sleeve is provided with a limiting opening facing the insulating flange, and the limiting opening surrounds the inner edge of the insulating flange.

3. The multi-layer protection enhanced ion implanter insulation component according to claim 2, characterized in that: The shielding cylinder is provided with a limiting portion circumferentially protruding toward the limiting opening. The limiting portion is connected to the insulating flange and clamped in the limiting opening.

4. The multi-layer protection enhanced ion implanter insulation component according to claim 3, characterized in that: The shielding tube is passed through the insulating protective sleeve, and the shielding tube includes: a clamping portion, one end of which is connected to the limiting portion, and one end of which is away from the limiting portion and is clamped to the insulating protective sleeve; and The guide portion is provided with an end portion of the clamping portion facing the ion outlet, and the communicating hole is opened in the guide portion.

5. The multi-layer protection-enhanced ion implanter insulation component according to any one of claims 1 to 4, characterized in that: The inner cavity of the insulating sleeve is coated with an insulating layer, and a low-pressure area is provided at one end of the insulating sleeve close to the ion inlet.

6. The multi-layer protection enhanced ion implanter insulation component according to claim 5, characterized in that: The insulating protective sleeve is provided with a high-pressure area opposite to the low-pressure area, and the high-pressure area is connected to the ion outlet.

7. The multi-layer protection enhanced ion implanter insulation component according to claim 6, characterized in that: The inner wall and the outer wall of the insulating ring are both provided with wave-shaped folds.

Images