Waterproof folding collapsing table

Abstract

The utility model relates to a waterproof folding collapsing table which comprises a collapsing table body, and an installation window is formed in the side portion of production equipment relative to the collapsing table body. The bottom of the collapsing table body is connected with a supporting connecting rod; an operation handle is arranged on the supporting connecting rod; folding pull rods are connected to the inner sides of the supporting connecting rods; the two sides of the collapse table body are rotationally connected into the mounting windows through upper fixing pieces. And the tail end of the folding pull rod is rotationally connected into the mounting window through a lower fixing piece. The collapsing table body can be folded and stored in the mounting window during automatic movement of the equipment; when manual operation serial operation needs to be achieved, the collapsing table body can be turned out downwards and supported by the supporting connecting rod and the folding connecting rod, manual operation interfaces are added, and the equipment utilization rate is increased.

Description

Technical Field

[0001] The utility model relates to a collapse platform, in particular to a waterproof folding collapse platform, and belongs to the technical field of semiconductor basic materials, large silicon wafer production equipment and peripheral supporting facilities. Background Art

[0002] A wafer refers to the silicon chip used in the manufacture of silicon semiconductor integrated circuits. Due to its round shape, it is called a wafer. During the wafer production process, one of the processes is to grind both sides of the wafer. There are many wafer grinding technologies. The grinding method commonly used in the modern semiconductor industry is chemical-mechanical polishing (CMP). By using chemical mechanical polishing, the etched surface of the wafer is flattened to nanometer-level smoothness, while taking into account various indicators such as the warpage and flatness of the silicon wafer, to avoid problems encountered in the microlithography and etching process of silicon wafers in high-end applications. Therefore, wafer grinding is an important part of semiconductor processing technology.

[0003] For double-sided processing units, wafer polishing requires placing the wafer into the groove of a carrier. In existing technology, this process is performed manually, resulting in low production efficiency, high operator labor intensity, and low precision, which can easily affect wafer quality. Therefore, there is an urgent need to design a system that can achieve both automated and manual operation in the wafer polishing automation system; and to add a manual operation interface during automated maintenance optimization to increase equipment utilization. Utility Model Content

[0004] The purpose of the utility model is to solve the above shortcomings, provide a waterproof folding collapse platform, increase the manual operation structure, increase the equipment utilization rate, and be convenient and quick to use.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical solutions:

[0006] A waterproof folding collapse platform includes a collapse platform body, and an installation window is opened on the side of the production equipment relative to the collapse platform body; the bottom of the collapse platform body is connected to a support connecting rod; the support connecting rod is provided with an operating handle; the inner side of the support connecting rod is connected to a folding pull rod; the two sides of the collapse platform body are rotatably connected to the installation window through an upper fixing piece; the end of the folding pull rod is rotatably connected to the installation window through a lower fixing piece.

[0007] Furthermore, the upper end of the support link is rotatably connected to the bottom of the collapse platform body through a first rotating shaft; a first accommodating groove is provided at the bottom of the collapse platform body relative to the support link; and a second accommodating groove is provided on the inner side of the support link.

[0008] Furthermore, a second rotating shaft is provided in the second accommodating groove; one end of the folding pull rod is connected to the second rotating shaft; the second accommodating groove is arranged relative to the folding pull rod; and the operating handle is located on the other side of the supporting connecting rod relative to the folding pull rod.

[0009] Furthermore, the lower fixing member is arranged at the other end of the folding rod relative to the second rotating shaft; the lower fixing member is a hinge seat; a third rotating shaft is arranged in the hinge seat; a hinge head is arranged at the end of the folding rod; the hinge head is rotatably connected to the third rotating shaft.

[0010] Furthermore, the upper fixing member includes a fixing seat; the fixing seat is fixedly connected to both sides of the collapse platform body; the fixing seat is rotatably connected to the wheel body; and a guide platform is provided on the inner side of the installation window.

[0011] Furthermore, the wheel body is vertically slidably connected to the guide platform; the side of the collapse platform body is also provided with a bottom groove; the end of the bottom groove is provided with a water collection pipe joint.

[0012] This utility model has the following beneficial effects: the collapse platform body can be folded and stored in the installation window during the automatic operation of the equipment; when manual operation is required, the collapse platform body can be flipped downward and supported by the support link and folding link, thereby increasing the manual operation interface and improving the equipment utilization rate. Due to the rational design of the support link and folding link, as well as the upper and lower fixing parts, the collapse platform body can be kept flush with the installation window in the folded state; and the support stability is guaranteed in the unfolded state.

[0013] At the same time, a bottom trough and a water collection pipe joint are set on the side of the collapse platform body, which can collect, recycle and discharge sewage. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural diagram of the present utility model.

[0015] Figure 2 It is a schematic diagram of the combined structure of the utility model.

[0016] Figure 3 This is a schematic diagram of the side structure of the utility model (expanded state).

[0017] Figure 4 This is a schematic diagram of the side structure of the utility model (folded state).

[0018] Figure 5 This is a schematic diagram of the structure of the utility model when viewed from above.

[0019] Figure 6 This is an enlarged schematic diagram of part A.

[0020] Figure 7 This is an enlarged schematic diagram of part B.

[0021] Among them: 1 is the collapse platform body, 2 is the installation window, 3 is the supporting connecting rod, 4 is the operating handle, 5 is the folding rod, 6 is the upper fixing part, 7 is the lower fixing part, 8 is the first rotating shaft, 9 is the second rotating shaft, 10 is the third rotating shaft, 11 is the hinged joint, 12 is the fixing seat, 13 is the wheel body, 14 is the guide platform, 15 is the bottom trough, and 16 is the water collection pipe joint. DETAILED DESCRIPTION

[0022] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0023] The terms used herein, including technical and scientific terms, have the same meaning as those commonly understood by those skilled in the art, unless otherwise defined. It should be understood that the terms defined in commonly used dictionaries have the same meaning as those in the prior art.

[0024] See also Figure 1-Figure 7

[0025] A waterproof folding collapse platform comprises a collapse platform body 1, and an installation window 2 is opened on the side of the production equipment relative to the collapse platform body 1; the bottom of the collapse platform body 1 is connected to a support link 3; the support link 3 is provided with an operating handle 4; the inner side of the support link 3 is connected to a folding pull rod 5; the two sides of the collapse platform body 1 are rotatably connected to the installation window 2 through an upper fixing member 6; the end of the folding pull rod 5 is rotatably connected to the installation window 2 through a lower fixing member 7.

[0026] Furthermore, the upper end of the support link 3 is rotatably connected to the bottom of the collapse platform body 1 through a first rotating shaft 8; a first accommodating groove is provided at the bottom of the collapse platform body 1 relative to the support link 3; and a second accommodating groove is provided on the inner side of the support link 3.

[0027] Furthermore, a second rotating shaft 9 is provided in the second accommodating groove; one end of the folding rod 5 is connected to the second rotating shaft 9; the second accommodating groove is arranged relative to the folding rod 5; the operating handle 4 is located on the other side of the supporting connecting rod 3 relative to the folding rod 5.

[0028] Specifically, the expansion is as follows Figure 3As shown, when folding, the platform body 1, the supporting link 3, and the folding rod 5 are flipped upward at the same time; the supporting link 3 rotates relative to the first rotating shaft 8 and is accommodated in the first receiving groove; the folding rod 5 rotates relative to the second rotating shaft 9 and is accommodated in the second receiving groove. At the same time, the ends of the platform body 1 and the folding rod 5 rotate relative to the installation window 2 through the upper fixing member 6 and the lower fixing member 7 respectively, realizing the rotation of the multi-link mode. In addition, during the rotation process of the platform body 1, the axis position of the platform body 1 will move in the vertical direction to adapt to the angle change between the platform body 1 and the supporting link 3.

[0029] Furthermore, the lower fixing member 7 is arranged at the other end of the folding rod 5 relative to the second rotating shaft 9; the lower fixing member 7 is a hinged seat; the hinged seat is rotatably arranged in the installation window 2; a third rotating shaft 10 is arranged in the hinged seat; a hinged head 11 is arranged at the end of the folding rod 5; the hinged head 11 is rotatably connected to the third rotating shaft 10.

[0030] When folding, pull the operating handle 4 upward, the folding rod 5 will be subjected to an upward force, and the angle between the folding rod 5 and the supporting link 3 will become larger; the angle between the folding rod 5 and the installation window 2 will gradually become smaller; and the rotation of the folding rod 5 is achieved by rotating the lower fixing part 7, and the lower fixing part 7 will be driven by the hinge head 11 and rotate synchronously with the folding rod 5 within the installation window 2.

[0031] Furthermore, the upper fixing member 6 includes a fixing seat 12 ; the fixing seat 12 is fixedly connected to both sides of the collapse platform body 1 ; the fixing seat 12 is rotatably connected to the wheel body 13 ; and a guide platform 14 is provided on the inner side of the installation window 2 .

[0032] Furthermore, the wheel body 13 is vertically slidably connected to the guide platform 14; a bottom groove 15 is further provided on the side of the collapse platform body 1; and a water collection pipe joint 16 is provided at the end of the bottom groove 15.

[0033] As the angle between the folding rod 5 and the supporting link increases, the angle between the folding rod 5 and the platform body 1 gradually decreases. In this process, the platform body 1 rotates around the wheel body 13 as the axis, and at the same time, the wheel body 13 moves vertically on the guide platform 14 to adapt to the angle change of the platform body 1.

[0034] Finally, it should be noted that the above embodiments are only intended to illustrate the technical solutions of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the purpose and scope of the technical solutions of the present invention, and all of these should be included in the scope of the claims of the present invention.

Claims

1. A waterproof folding platform, comprising a platform body (1), characterized in that: An installation window (2) is provided on the side of the production equipment relative to the collapse platform body (1); a support connecting rod (3) is connected to the bottom of the collapse platform body (1); an operating handle (4) is provided on the support connecting rod (3); a folding pull rod (5) is connected to the inner side of the support connecting rod (3); both sides of the collapse platform body (1) are rotatably connected to the installation window (2) through an upper fixing member (6); the end of the folding pull rod (5) is rotatably connected to the installation window (2) through a lower fixing member (7).

2. The waterproof folding platform according to claim 1, characterized in that: The upper end of the supporting connecting rod (3) is rotatably connected to the bottom of the collapse platform body (1) via a first rotating shaft (8); a first receiving groove is provided at the bottom of the collapse platform body (1) relative to the supporting connecting rod (3); and a second receiving groove is provided on the inner side of the supporting connecting rod (3).

3. The waterproof folding platform according to claim 2, characterized in that: A second rotating shaft (9) is provided in the second receiving groove; one end of the folding pull rod (5) is connected to the second rotating shaft (9); the second receiving groove is provided relative to the folding pull rod (5); and the operating handle (4) is located on the other side of the supporting connecting rod (3) relative to the folding pull rod (5).

4. The waterproof folding platform according to claim 3, characterized in that: The lower fixing member (7) is arranged at the other end of the folding pull rod (5) relative to the second rotating shaft (9); the lower fixing member (7) is a hinge seat; the hinge seat is rotatably arranged in the installation window (2); a third rotating shaft (10) is arranged in the hinge seat; a hinge head (11) is arranged at the end of the folding pull rod (5); the hinge head (11) is rotatably connected to the third rotating shaft (10).

5. The waterproof folding platform according to claim 4, characterized in that: The upper fixing member (6) includes a fixing seat (12); the fixing seat (12) is fixedly connected to both sides of the platform body (1); the fixing seat (12) is rotatably connected to the wheel body (13); and a guide platform (14) is provided on the inner side of the installation window (2).

6. The waterproof folding platform according to claim 5, characterized in that: The wheel body (13) is vertically slidably connected to the guide platform (14); a bottom groove (15) is further provided on the side of the collapse platform body (1); and a water collection pipe joint (16) is provided at the end of the bottom groove (15).

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