Self-sealing evaporation platform deck for vacuum coating machine

Abstract

The utility model discloses a self-sealing evaporation platform deck for a vacuum coating machine. The self-sealing evaporation platform deck comprises a bearing bottom frame and a coating pot mounted on the right side of the top surface of the bearing bottom frame, a gate valve body is fixedly arranged on the top face of the bearing bottom frame, and a butt joint notch is formed in the right end of the gate valve body. A driving mechanism is arranged below the right side in the bearing bottom frame, and the bottom end of a driving rotating shaft is rotationally arranged on the bottom surface of the right side of the bearing bottom frame through a bearing; wherein a carrying table mechanism is arranged on the right side of the interior of the bearing bottom frame, the carrying table mechanism comprises a carrying table body, and the bottom face of the carrying table body is fixedly connected to the left end of the inclined support. According to the self-sealing type evaporation carrying table for the vacuum coating machine, the carrying table body is guided to rotate and ascend and descend through the inclined sliding table above the bearing bottom frame, and sealing of the butt joint notch and the carrying table body is achieved through the butt joint ring body and the sealing ring body after butt joint, so that leakage is prevented in the heating process.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating machines, in particular to a self-sealing evaporation carrier for a vacuum coating machine. Background Art

[0002] A vacuum coating machine refers to a coating device that operates under a relatively high vacuum degree. It heats metal or non-metal materials under high vacuum conditions, causing them to evaporate and condense on the surface of the coated part to form a thin film. The vacuum coating machine heats the evaporation carrier and its internal evaporation source to complete the coating work.

[0003] The invention with announcement number CN103966555B discloses a vapor deposition source heating device, in which several metal cylinders are arranged between the heating element and the crucible. The several metal cylinders are installed on the base. During heating, the heat of the heating element is gradually conducted to the crucible through the several metal cylinders. Due to the good thermal conductivity of the metal cylinders, the heat is evenly distributed on them, so that the crucible is heated evenly, ensuring the vapor deposition effect.

[0004] However, the above-mentioned heating source device for the coating machine still has the following problems during actual use: although the evaporation crucible is heated by the heating source, this type of heating mechanism and the coating machine are installed in a fixed manner. When adding heating sources and cleaning the heating mechanism, the operation process is complicated and cumbersome, which reduces the addition efficiency and sealing effect of the heating mechanism.

[0005] Therefore, we proposed a self-sealing evaporation carrier for vacuum coating machines to solve the above problems. Utility Model Content

[0006] The purpose of the present utility model is to provide a self-sealing evaporation carrier for a vacuum coating machine, in order to solve the problem that the existing heating source is used to heat the evaporation crucible, but this type of heating mechanism is installed in a fixed manner with the coating machine. When adding a heating source and cleaning the heating mechanism, the operation process is complicated and cumbersome, which reduces the addition efficiency and sealing effect of the heating mechanism.

[0007] To achieve the above-mentioned object, the present invention provides the following technical solutions: a self-sealing evaporation carrier for a vacuum coating machine, comprising a carrier frame, and a coating pot installed on the right side of the top surface of the carrier frame;

[0008] The top surface of the bearing chassis is fixedly provided with a gate valve body, and a docking notch is provided inside the right end of the gate valve body;

[0009] The invention also includes: a driving mechanism is provided at the lower right side of the interior of the supporting chassis, and the driving mechanism includes a driving shaft, and the bottom end of the driving shaft is rotatably provided on the right bottom surface of the supporting chassis through a bearing;

[0010] A platform mechanism is provided on the right side of the inner portion of the supporting base frame, and the platform mechanism includes a platform body, and the bottom surface of the platform body is fixedly connected to the left end of the oblique bracket.

[0011] Preferably, the top end of the driving shaft included in the driving mechanism is fixedly set on the servo motor, and a driving sleeve is slidingly penetrated on the outside of the driving shaft, and the driving shaft is engaged with the driving sleeve through an external protrusion, so that the driving sleeve is slidably set on the outside of the driving shaft and rotates with it.

[0012] Preferably, the right end of the oblique bracket included in the platform mechanism is fixedly connected to the outer wall of the driving sleeve included in the driving mechanism, and the top surface of the platform body included in the platform mechanism is slidably provided with a docking ring body, and the bottom surface of the docking ring body is fixedly connected to the top end of the positioning slide rod at an equal angle, and the bottom end of the positioning slide rod set at an equal angle slides through the bottom of the outer end of the platform body.

[0013] Preferably, the platform mechanism includes a lifting ring body, and the lifting ring body is slidably arranged below the bottom surface of the platform body, and the lifting ring body is fixedly connected to the bottom end of the positioning slide rod set at an equal angle, and the lifting ring body and the platform body are connected to each other through a resistance spring.

[0014] Preferably, the carrier mechanism includes a sealing ring body, and the sealing ring body is slidably arranged below the outside of the carrier body, and the outside of the sealing ring body is slidably connected to the top of the positioning bracket at an equal angle, and the top of the positioning bracket set at an equal angle and the sealing ring body are connected to each other through a reset spring.

[0015] Preferably, the bottom end of the positioning bracket included in the platform mechanism is fixedly connected to the outside of the bottom surface of the platform body, and the right side of the bottom surface of the positioning bracket is fixedly connected to the right end of the traction steel cable, and the left end of the traction steel cable is fixedly connected to the right side of the bottom surface of the lifting ring body, and the sealing ring body is driven to rise by the descent of the lifting ring body.

[0016] Preferably, an inclined slide is fixedly provided on the right side of the interior of the supporting base, and the inclined slide is fitted and connected to the bottom surface of the inclined bracket. The bottom end of the coating pot is connected to the docking slot, and the inclined bracket drives the carrier body to rotate along the inclined slide, so that the carrier body is connected to the docking slot.

[0017] Compared with the prior art, the present invention has the following beneficial effects: a self-sealing evaporation carrier for a vacuum coating machine is used, wherein the carrier body is guided to rotate and rise by an inclined slide above the carrier frame, and after docking, the docking notch and the carrier body are sealed by a docking ring body and a sealing ring body to prevent leakage during the heating process. The specific contents are as follows:

[0018] 1. The servo motor drives the driving shaft to rotate, and the driving sleeve and the oblique bracket connected to the driving shaft rotate accordingly. At the same time, the bottom surface of the oblique bracket and the top surface of the oblique slide are fitted and connected to each other, so that the oblique bracket extends the inclination of the oblique slide and drives the driving sleeve to slide gradually upward, thereby driving the carrier mechanism at the left end of the oblique bracket to gradually approach the docking groove opened on the gate valve body.

[0019] 2. The rotating carrier body contacts and squeezes the bottom surface of the gate valve body through the docking ring on the top surface, and then the docking ring moves downward to drive the positioning slide rod and the lifting ring to move downward so that the docking ring is located between the docking groove and the carrier body, thereby improving the sealing effect.

[0020] The lifting ring body loosens the traction cable, and the sealing ring body at the other end is not pulled. The sealing ring body is driven to slide upward by the extension of the reset spring. When the carrier body moves to the bottom of the docking groove, the sealing ring body rises to wrap and seal the docking groove and the carrier body to prevent leakage during the heating process. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the utility model;

[0022] Figure 2 This is a schematic diagram of the installation structure of the gate valve body of the utility model;

[0023] Figure 3 This is a schematic diagram of the three-dimensional structure of the oblique slide of the utility model;

[0024] Figure 4 This is a schematic diagram of the three-dimensional structure of the platform body of the utility model;

[0025] Figure 5 This is a schematic diagram of the installation structure of the sealing ring body of the utility model;

[0026] Figure 6 This is a schematic diagram of the installation structure of the docking ring body and the lifting ring body of the utility model;

[0027] Figure 7 For this utility model Figure 6 Enlarged structural diagram at point A in the middle.

[0028] In the figure: 1. Load-bearing base; 2. Coating pot; 3. Gate valve body; 4. Docking notch; 5. Driving shaft; 6. Carrier body; 7. Oblique bracket; 8. Servo motor; 9. Driving sleeve; 10. Docking ring; 11. Positioning slide; 12. Lifting ring; 13. Resistance spring; 14. Sealing ring; 15. Positioning bracket; 16. Return spring; 17. Traction cable; 18. Oblique slide. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the implementation regulations described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0030] See also Figure 1-Figure 7 , the utility model provides the following technical solutions:

[0031] Example 1: In order to solve the problems existing in the use of the carrier mechanism of the existing coating machine, this embodiment adopts the following technical solution: a self-sealing evaporation carrier for a vacuum coating machine, including a carrier base 1, an inclined slide 18 is fixedly provided on the right side of the interior of the carrier base 1, and the inclined slide 18 is fitly connected to the bottom surface of the inclined bracket 7; a driving mechanism is provided at the lower right side of the interior of the carrier base 1, and the driving mechanism includes a driving shaft 5, and the bottom end of the driving shaft 5 is rotatably provided on the right bottom surface of the carrier base 1 through a bearing; wherein, a carrier mechanism is provided on the right side of the interior of the carrier base 1, and the carrier mechanism includes a carrier body 6, and the bottom surface of the carrier body 6 is fixedly connected to the left end of the inclined bracket 7.

[0032] The bottom end of the coating pot 2 is connected to the docking slot 4, and after the oblique bracket 7 drives the carrier body 6 to rotate along the oblique slide 18, the carrier body 6 is connected to the docking slot 4; the coating pot 2 is installed on the right side of the top surface of the carrier base 1; the gate valve body 3 is fixedly provided on the top surface of the carrier base 1, and the right end of the gate valve body 3 is provided with a docking slot 4; the top end of the driving shaft 5 included in the driving mechanism is fixedly provided on the servo motor 8, and the outside of the driving shaft 5 is slidingly penetrated by a driving sleeve 9, and the driving shaft 5 is engaged with the driving sleeve 9 through the external protrusion, so that the driving sleeve 9 is slidably provided on the outside of the driving shaft 5 and rotates with it; the right end of the oblique bracket 7 included in the carrier mechanism is fixedly connected to the outer wall of the driving sleeve 9 included in the driving mechanism.

[0033] like Figure 1-Figure 3 As shown, when it is necessary to dock and install the carrier mechanism with the gate valve body 3, the servo motor 8 inside the carrier base 1 drives the fixedly connected driving shaft 5 to rotate through the output shaft, and the driving shaft 5 drives the embedded driving sleeve 9 and the oblique bracket 7 to rotate through the protrusion of the outer wall. At the same time, the bottom surface of the oblique bracket 7 and the top surface of the oblique slide 18 are fitted and connected to each other, so that the oblique bracket 7 extends the inclination of the oblique slide 18 to drive the driving sleeve 9 to gradually slide upward, and then drives the carrier mechanism at the left end of the oblique bracket 7 to gradually approach the docking slot 4 opened in the gate valve body 3.

[0034] Example 2: In order to solve the problems existing in the use of the carrier mechanism of the existing coating machine, this embodiment adopts the following technical solutions: the carrier mechanism includes a carrier body 6 whose top surface is slidably provided with a docking ring body 10, and the bottom surface of the docking ring body 10 is fixedly connected to the top end of the positioning slide bar 11 at equal angles, and the bottom end of the positioning slide bar 11 set at equal angles slides through the bottom end of the outer end of the carrier body 6; the carrier mechanism includes a lifting ring body 12, and the lifting ring body 12 is slidably provided below the bottom surface of the carrier body 6, and the lifting ring body 12 is fixedly connected to the bottom end of the positioning slide bar 11 set at equal angles, and the lifting ring body 12 and the carrier body 6 are connected to each other through a resistance spring 13; the carrier mechanism includes a sealing ring body 14, and the sealing ring body 14 is slidably provided below the outside of the carrier body 6, and the outside of the sealing ring body 14 is slidably connected to the top end of the positioning bracket 15 at equal angles, and the top end of the positioning bracket 15 set at equal angles and the sealing ring body 14 are connected to each other through a reset spring 16.

[0035] The bottom end of the positioning bracket 15 included in the carrier mechanism is fixedly connected to the outside of the bottom surface of the carrier body 6, and the right side of the bottom surface of the positioning bracket 15 is fixedly connected to the right end of the traction cable 17, and the left end of the traction cable 17 is fixedly connected to the right side of the bottom surface of the lifting ring body 12, and the sealing ring body 14 is driven to rise by the descent of the lifting ring body 12; the bottom end of the coating pot 2 is connected to the docking slot 4, and the inclined bracket 7 drives the carrier body 6 to rotate along the inclined slide 18, so that the carrier body 6 is connected to the docking slot 4; the coating pot 2 is installed on the right side of the top surface of the carrier base 1; the gate valve body 3 is fixedly provided on the top surface of the carrier base 1, and the right end of the gate valve body 3 is provided with a docking slot 4;

[0036] like Figure 5-Figure 7 As shown, in the process of the carrier body 6 rotating following the oblique bracket 7 and approaching the docking slot 4, the carrier body 6 first contacts and squeezes the bottom surface of the gate valve body 3 through the docking ring body 10 on the top surface, and then the docking ring body 10 moving downward drives the positioning slide rod 11 and the lifting ring body 12 to move downward. At the same time, the lifting ring body 12 drives the traction cable 17 fixedly connected to the bottom surface to relax. At this time, the sealing ring body 14 at the other end of the traction cable 17 is not pulled so that it can be extended through the positioning bracket 15 and the return spring 16 inside it, thereby making the sealing ring body 14 slide upward. When the carrier body 6 moves to the bottom of the docking slot 4, the sealing ring body 14 rises to wrap and seal the docking slot 4 and the carrier body 6 to prevent leakage during the heating process.

[0037] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A self-sealing evaporation carrier for a vacuum coating machine, comprising a carrier frame (1), and a coating pot (2) mounted on the right side of the top surface of the carrier frame (1); A gate valve body (3) is fixedly provided on the top surface of the bearing chassis (1), and a docking notch (4) is provided inside the right end of the gate valve body (3); It is characterized by: Also includes: A driving mechanism is provided at the lower right side of the interior of the supporting chassis (1), and the driving mechanism includes a driving shaft (5), and the bottom end of the driving shaft (5) is rotatably provided on the bottom surface of the right side of the supporting chassis (1) via a bearing; A platform mechanism is provided on the right side of the inner portion of the supporting base frame (1), and the platform mechanism includes a platform body (6), and the bottom surface of the platform body (6) is fixedly connected to the left end of the oblique bracket (7).

2. The self-sealing evaporation stage for a vacuum coating machine according to claim 1, characterized in that: The top end of the driving shaft (5) included in the driving mechanism is fixedly arranged on the servo motor (8), and a driving sleeve (9) is slidingly provided on the outside of the driving shaft (5), and the driving shaft (5) is engaged with the driving sleeve (9) through an external protrusion, so that the driving sleeve (9) is slidingly provided on the outside of the driving shaft (5) and rotates accordingly.

3. The self-sealing evaporation stage for a vacuum coating machine according to claim 1, characterized in that: The right end of the oblique bracket (7) included in the platform mechanism is fixedly connected to the outer wall of the driving sleeve (9) included in the driving mechanism, and the top surface of the platform body (6) included in the platform mechanism is slidably provided with a docking ring body (10), and the bottom surface of the docking ring body (10) is fixedly connected to the top end of the positioning slide rod (11) at an equal angle, and the bottom end of the positioning slide rod (11) set at an equal angle slides and penetrates the bottom end of the outer end of the platform body (6).

4. The self-sealing evaporation stage for a vacuum coating machine according to claim 3, characterized in that: The platform mechanism includes a lifting ring body (12), and the lifting ring body (12) is slidably arranged below the bottom surface of the platform body (6), and the lifting ring body (12) is fixedly connected to the bottom end of the positioning slide rod (11) arranged at an equal angle, and the lifting ring body (12) and the platform body (6) are connected to each other through a resistance spring (13).

5. The self-sealing evaporation stage for a vacuum coating machine according to claim 4, characterized in that: The platform mechanism includes a sealing ring body (14), and the sealing ring body (14) is slidably arranged below the outside of the platform body (6), and the outside of the sealing ring body (14) is slidably connected to the top of the positioning bracket (15) at an equal angle, and the top of the positioning bracket (15) set at an equal angle and the sealing ring body (14) are connected to each other through a return spring (16).

6. The self-sealing evaporation stage for a vacuum coating machine according to claim 5, characterized in that: The bottom end of the positioning bracket (15) included in the platform mechanism is fixedly connected to the outside of the bottom surface of the platform body (6), and the right side of the bottom surface of the positioning bracket (15) is fixedly connected to the right end of the traction cable (17), and the left end of the traction cable (17) is fixedly connected to the right side of the bottom surface of the lifting ring body (12), and the sealing ring body (14) is driven to rise by the descent of the lifting ring body (12).

7. The self-sealing evaporation stage for a vacuum coating machine according to claim 1, characterized in that: An inclined slide (18) is fixedly provided on the right side of the interior of the supporting base frame (1), and the inclined slide (18) is fitted and connected to the bottom surface of the inclined bracket (7). The bottom end of the coating pot (2) is connected to the docking slot (4), and the inclined bracket (7) drives the carrier body (6) to rotate along the inclined slide (18), so that the carrier body (6) is connected to the docking slot (4).

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