Electron beam evaporation coating device and electron beam evaporation coating system

Abstract

The utility model relates to the technical field of coating, and discloses an electron beam evaporation coating device and an electron beam evaporation coating system. The electron beam evaporation coating device comprises a crucible which comprises a crucible body and an annular groove annularly formed in the crucible body, and the annular groove is suitable for containing a coating material; the electron beam gun is used for emitting electron beams to the coating material in the local area of the annular groove; and the driving mechanism is provided with a driving end, and the driving end is connected with the crucible body and used for driving the crucible body to rotate so as to switch the electron beam to act on the local area of the annular groove. Compared with a conventional small crucible matched with an electron beam gun for use, the crucible has the advantages that the annular groove annularly formed in the crucible body is selected to be formed in the crucible, so that the volume of the crucible for containing coating materials can be effectively increased, the frequency of stopping for feeding materials again in the subsequent coating process and the debugging time consumed for recovering normal coating are reduced, and the production efficiency is improved. And a foundation is laid for subsequent continuous coating.

Description

Technical Field

[0001] The utility model relates to the technical field, in particular to an electron beam evaporation coating device and an electron beam evaporation coating system. Background Art

[0002] Electron beam evaporation is a physical vapor deposition technology that uses an electron beam to directly heat and evaporate the coating material placed in a crucible under vacuum, causing it to vaporize and deposit on the substrate surface to form a thin film.

[0003] Due to the characteristics of the electron beam, the crucible currently used to hold the coating material has a relatively small volume and can only hold a limited amount of evaporation material. Therefore, frequent shutdowns are required to refill the crucible or replace it with a new crucible to hold the coating material. However, if refilling is used, the unevenness of the material in the crucible can lead to localized uneven distribution of the source gas during evaporation. If the crucible is replaced, because evaporation is performed under a high vacuum environment, replacing the crucible will cause the chamber to be opened and the vacuum environment in the coating chamber to be destroyed. It takes a long time to regain the original evaporation environment during re-coating, which is not conducive to achieving continuous production over a long period of time. Utility Model Content

[0004] In view of this, the present invention provides an electron beam evaporation coating device and an electron beam evaporation coating system to solve the problem in the related art that the electron beam evaporation coating device cannot support long-term continuous production.

[0005] In a first aspect, the present invention provides an electron beam evaporation coating device (hereinafter referred to as a "coating device" for convenience), comprising:

[0006] The crucible comprises a crucible body and an annular groove provided in an annular shape on the crucible body, wherein the annular groove is suitable for placing a coating material;

[0007] an electron beam gun, configured to emit an electron beam to the coating material in a local area of ​​the annular groove;

[0008] The driving mechanism has a driving end connected to the crucible body and used for driving the crucible body to rotate so as to switch the local area on the annular groove where the electron beam acts.

[0009] Beneficial Effects: Compared to conventional small crucibles used with electron beam guns, the present invention selects an annular groove provided on the crucible body, which can effectively increase the crucible's capacity for holding the coating material, reduce the number of times the machine needs to be stopped and refilled during the subsequent coating process, and reduce the debugging time consumed to restore normal coating, thus laying the foundation for subsequent continuous coating. In addition, to prevent the electron beam from heating the coating material in the same area of ​​the annular groove for a long time, causing the surface of the material that has not yet been vaporized near the heated area to sinter and become black or discolored, the present invention connects the driving end of the driving mechanism to the crucible body, allowing the crucible to rotate around its axis under the drive of the driving mechanism, so that the electron beam can act on the coating material in different areas of the annular groove. Secondly, because the crucible can rotate continuously under the drive of the driving mechanism, when the crucible rotates at a fixed rotation rate, the coating material in different areas of the crucible can sublime at the same rate. In this way, the surface height consistency of the coating material in different areas of the crucible can be ensured, ensuring the uniformity and density of the film. Furthermore, by adjusting the output rate of the driving mechanism, the operator can flexibly adjust the sublimation rate of the coating material according to the process requirements, and control the film formation speed and quality of the material on the substrate.

[0010] In an optional embodiment, the electron beam gun is disposed adjacent to one side of the crucible body, and the rotation center of the driving mechanism is coaxial with or parallel to the central axis of the annular groove.

[0011] Beneficial effects: The present invention arranges the electron beam and the crucible body adjacent to each other. On the one hand, it can make the overall structure of the coating device more compact and reduce the requirements for installation space; on the other hand, it can shorten the distance between the electron beam and the electron beam gun and the surface of the coating material, reduce the attenuation and scattering of the electron beam during propagation, improve the energy utilization rate of the electron beam, and enhance the sublimation effect of the coating material. Secondly, the rotation center of the driving mechanism is arranged coaxially or parallel to the central axis of the annular groove, so that the coating material in each area of ​​the annular groove corresponds to the electron beam during rotation, ensuring that the temperature and rate of evaporation of the coating material by the electron beam are the same or similar, and ensuring that the generated coating material gas is uniform and stable, thereby producing a high-quality thin film. In addition, compared with the case where the rotation center of the driving mechanism is arranged parallel to the central axis of the annular groove, the coating device will occupy a smaller lateral space in the case of a coaxial arrangement.

[0012] In an optional embodiment, a through hole is provided in the center of the crucible body, the annular groove is arranged around the through hole, the electron beam gun is arranged in the through hole, and the driving mechanism is arranged on the peripheral side of the crucible body.

[0013] Beneficial Effects: This invention positions the electron beam gun within the through-hole of the crucible body, making the overall structure of the coating apparatus more compact and reducing installation space requirements. It also shortens the distance between the electron beam gun and the surface of the coating material, reducing electron beam attenuation and scattering during propagation, improving the energy utilization of the electron beam, and enhancing the sublimation effect of the coating material. Furthermore, positioning the drive mechanism on the side of the crucible body prevents interference with the operation of the electron beam gun while providing ample space for operators, making it easier for them to maintain and replace the drive mechanism.

[0014] In an optional embodiment, the driving mechanism includes a driving motor, a driving wheel is provided on a driving shaft of the driving motor, and the driving wheel is drivingly connected to the side wall of the crucible body.

[0015] Beneficial effects: Compared with other types of driving mechanisms, the driving motor as a driving mechanism has the advantages of stable output power, strong adjustability, and reliable operation. In this way, the crucible body can achieve long-term stable rotation under the drive of the driving motor, so that the coating device can easily meet the requirements of continuous coating operations. Secondly, by providing a driving wheel that rotates synchronously with the driving shaft, the contact area between the driving motor and the crucible body can be increased, ensuring the continuity and stability of the power transmission. Furthermore, since the outer diameter of the driving wheel is larger than the diameter of the driving shaft, when the driving wheel abuts the crucible body, a certain gap is left between the driving shaft and the crucible body. This gap can prevent the driving shaft from interfering with the structure of the crucible body accessories, such as the cooling assembly, during rotation.

[0016] In an optional embodiment, the size of the annular groove decreases from large to small from the notch of the annular groove to the bottom of the groove.

[0017] Beneficial effects: The utility model makes the size of the annular groove notch larger than the size of the annular groove bottom. On the one hand, it can increase the contact area between the coating material and the electron beam and improve the coating efficiency; on the other hand, it can allow the annular groove to hold more coating materials and extend the working time of the coating device.

[0018] In an optional embodiment, a cooling assembly is provided at the bottom of the crucible, and a guide structure for limiting the rotation of the crucible body around the axis is provided on the cooling assembly.

[0019] Beneficial Effects: By providing a cooling assembly at the bottom of the crucible, the present invention can cool the crucible, preventing the crucible's own temperature from being too high, which could cause the coating material that has not yet been exposed to the electron beam to sinter and blacken or discolor. Furthermore, by providing a guide structure on the cooling assembly, the crucible body can be rotated around its axis during the coating process, ensuring that the coating material in different areas is evenly heated by the electron beam. This allows the sublimated material to be more evenly deposited on the chip, thereby improving the overall quality of the film layer and reducing film defects and impurities.

[0020] In an optional embodiment, the cooling assembly includes a crucible supporting seat for supporting the crucible and a cooling pipeline passing through the crucible supporting seat.

[0021] Beneficial effects: The crucible support in the present invention provides stable support for the crucible, reducing the possibility of the crucible tilting or shaking due to external force or its own weight during operation. In addition, the cooling pipe in the crucible support can quickly absorb the heat emitted by the crucible and quickly reduce the temperature of the crucible, avoiding the situation where the temperature of the coating material is too high. Secondly, since there is a continuously flowing cooling medium in the cooling pipe, the cooling component can continuously cool the crucible body. In this way, even if long-term continuous coating is carried out, the crucible's own temperature can always be controlled within a preset range.

[0022] In an optional embodiment, the crucible includes a circular outer contour, and the guide structure is a guide groove recessed on the cooling assembly. The shape of the guide groove is adapted to the outer contour of the crucible and is used to guide the crucible to rotate around its axis.

[0023] Beneficial Effects: This invention creates a circular crucible profile and adapts the shape of the guide groove to the crucible's profile. The guide groove guides the crucible's rotational motion, ensuring that the coating material in each area of ​​the annular groove is aligned with the electron beam, ensuring uniform evaporation of the coating material. Furthermore, adapting the shape of the guide groove to the crucible's profile allows the crucible body to rotate consistently along a pre-set trajectory, ensuring uniform heating of the coating material within the crucible.

[0024] In an optional embodiment, the guide groove is filled with thermal conductive glue.

[0025] Beneficial Effects: By placing thermally conductive adhesive within the guide grooves, the present invention optimizes the heat conduction path between the crucible and the cooling assembly, allowing the crucible to quickly transfer its own heat to the cooling assembly at its base. This allows the crucible's temperature to be consistently controlled within a preset range, even during long, continuous coating cycles.

[0026] In a second aspect, the present invention further provides an electron beam evaporation coating system, comprising:

[0027] coating chamber;

[0028] And an electron beam evaporation coating device as described above is arranged in the coating chamber.

[0029] Beneficial Effects: Because the electron beam evaporation coating system of the present invention utilizes the aforementioned electron beam evaporation coating device, it not only enables a long-term, continuous coating process on chips, but also reduces defects in the film deposited on the chips, thereby improving the overall quality of the film. Furthermore, the electron beam evaporation coating system of the present invention possesses all the advantages of the aforementioned coating device, which will not be elaborated upon here. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0031] Figure 1 This is a schematic structural diagram of an electron beam evaporation coating device according to an embodiment of the present invention;

[0032] Figure 2 This is a schematic structural diagram of another electron beam evaporation coating device according to an embodiment of the present invention;

[0033] Figure 3 This is a schematic structural diagram of an electron beam evaporation coating system according to an embodiment of the present invention.

[0034] Description of reference numerals:

[0035] 1. Crucible; 101. Crucible body; 102. Annular groove; 103. Through hole; 2. Electron beam gun; 201. Electron beam; 3. Drive mechanism; 301. Drive motor; 3011. Drive shaft; 302. Drive wheel; 4. Cooling assembly; 401. Crucible support; 4011. Guide groove; 402. Cooling pipe;

[0036] 100. Coating chamber; 200. Electron beam evaporation coating device. DETAILED DESCRIPTION

[0037] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts shall fall within the scope of protection of the present invention.

[0038] In view of the problem that the electron beam evaporation coating device in the related art does not support long-term continuous production, the utility model provides an electron beam evaporation coating device and an electron beam evaporation coating system.

[0039] The following combination Figures 1 to 3 , the embodiments of the present utility model are described.

[0040] According to an embodiment of the present invention, on the one hand, Figure 1 and Figure 2 As shown, an electron beam evaporation coating device 200 (hereinafter referred to as “coating device” for the sake of convenience) is provided, comprising: a crucible 1 , an electron beam gun 2 and a driving mechanism 3 .

[0041] Specifically, the crucible 1 includes a crucible body 101 and an annular groove 102 arranged in an annular shape on the crucible body 101, and the annular groove 102 is suitable for placing the coating material; the electron beam gun 2 is used to emit an electron beam 201 to the coating material in a local area of ​​the annular groove 102; the driving mechanism 3 has a driving end, which is connected to the crucible body 101 and is used to drive the crucible body 101 to rotate to switch the electron beam 201 to act on the local area on the annular groove 102.

[0042] Compared to the conventional small crucible 1 used in conjunction with the electron beam gun 2, this embodiment selects to provide an annular groove 102 in the crucible 1, which is provided in an annular shape on the crucible body 101. This can effectively increase the volume of the crucible 1 for holding the coating material, reduce the number of times the machine needs to be stopped and re-filled during the subsequent coating process, and reduce the debugging time consumed to restore normal coating, thus laying the foundation for subsequent continuous coating. In addition, to prevent the electron beam 201 from heating the coating material in the same area of ​​the annular groove 102 for a long time, causing the surface of the material near the heated area that has not yet been vaporized to sinter and become black or discolored, this embodiment connects the driving end of the driving mechanism 3 to the crucible body 101, allowing the crucible 1 to rotate around its axis under the drive of the driving mechanism 3, so that the electron beam 201 can act on the coating material in different areas of the annular groove 102. Secondly, because crucible 1 can rotate continuously under the drive of drive mechanism 3, when crucible 1 rotates at a fixed rotational speed, the coating material in different areas of crucible 1 can be sublimated at the same rate. This ensures the consistency of the coating material surface height in different areas of crucible 1, ensuring the uniformity and density of the film. Furthermore, by adjusting the output rate of drive mechanism 3, the operator can flexibly adjust the sublimation rate of the coating material according to process requirements, thereby controlling the film formation speed and quality of the material on the substrate.

[0043] It is understandable that if the sublimation speed of the coating material is adjusted, in addition to adjusting the rotation speed of the crucible 1 body, the heating speed of the coating material by the electron beam 201 can also be controlled by adjusting the energy of the electron beam 201 itself.

[0044] It should be noted that, because the electron beam 201 emitted by the electron beam gun 2 can change its trajectory via the deflection magnetic field, this characteristic allows the operator to flexibly adjust the relative position of the electron beam gun 2 and the crucible 1 according to actual needs. Generally, as long as the electron beam 201 emitted by the electron beam gun 2 can uniformly heat the coating material within the annular groove 102, it is sufficient. Similarly, the drive mechanism 3 in this embodiment only needs to be able to drive the crucible body 101 to rotate and switch the local area of ​​the annular groove 102 where the electron beam 201 acts. This is not specifically limited in the present invention.

[0045] Furthermore, since the coating apparatus will subsequently need to be installed in the coating chamber 100, facilitating assembly requires reducing the size of the coating apparatus and its installation space requirements. Furthermore, during this process, interference between the electron beam gun 2 and the drive mechanism 3 must be avoided. The following describes the placement of the electron beam gun 2 and the drive mechanism 3 using a few examples.

[0046] In one embodiment, Figure 1As shown, the electron beam gun 2 is positioned adjacent to one side of the crucible body 101, and the rotation center of the drive mechanism 3 is coaxial or parallel to the central axis of the annular groove 102. This embodiment places the electron beam 201 adjacent to the crucible body 101. This, on the one hand, makes the overall structure of the coating apparatus more compact and reduces installation space requirements; on the other hand, it shortens the distance between the electron beam 201 and the surface of the coating material, reducing attenuation and scattering of the electron beam 201 during propagation, improving the energy utilization of the electron beam 201, and enhancing the sublimation effect of the coating material. Furthermore, the rotation center of the drive mechanism 3 is coaxial or parallel to the central axis of the annular groove 102. The drive end of the drive mechanism 3 can be directly or indirectly connected to the crucible 1. The specific position can be adjusted based on actual space requirements. As long as the coating material in each area of ​​the annular groove 102 is aligned with the electron beam 201 during rotation, the temperature and rate of evaporation of the coating material by the electron beam 201 are consistent or similar, ensuring that the generated coating material gas is uniform and stable, thereby producing a high-quality thin film. In addition, compared with the case where the rotation center of the driving mechanism 3 is arranged parallel to the central axis of the annular groove 102, in the case of a coaxial arrangement, the coating device will occupy a smaller lateral space.

[0047] In another embodiment, Figure 2 As shown, a through hole 103 is provided at the center of the crucible body 101, and an annular groove 102 is arranged around the through hole 103. The electron beam gun 2 is disposed within the through hole 103, and the drive mechanism 3 is disposed on the circumference of the crucible body 101. In this embodiment, the electron beam gun 2 is disposed within the through hole 103 of the crucible body 101. This, on the one hand, makes the overall structure of the coating apparatus more compact, reducing the installation space requirement; on the other hand, it shortens the distance between the electron beam 201 from the electron beam gun 2 and the surface of the coating material, reducing the attenuation and scattering of the electron beam 201 during propagation, improving the energy utilization of the electron beam 201, and enhancing the sublimation effect of the coating material. Furthermore, the drive mechanism 3 is disposed on the circumference of the crucible body 101. This prevents the drive mechanism 3 from interfering with the operation of the electron beam gun 2, and on the other hand, it provides ample space for operators, making it easier for them to maintain and replace the drive mechanism 3.

[0048] It is understandable that since the rotation center of the driving mechanism 3 can be coaxially arranged with the central axis of the annular groove 102, when a through hole 103 is provided in the center of the crucible body 101, the positions of the electron beam gun 2 and the driving mechanism 3 in this embodiment can be swapped.

[0049] In addition, in order to reduce the difficulty of manufacturing the crucible 1 in this embodiment, the through hole 103 and the annular groove 102 can be coaxially arranged.

[0050] It can be understood that the function of the through hole 103 is, on the one hand, to provide installation space for the electron beam gun 2, and on the other hand, to allow the electron beam 201 to deflect from the central area of ​​the crucible 1 to the outer peripheral side and act on the coating material in the annular groove 102. Therefore, the through hole 103 can be of any cross-sectional shape.

[0051] Furthermore, if Figure 1 and Figure 2 As shown, the drive mechanism 3 includes a drive motor 301, and a drive wheel 302 is provided on the drive shaft 3011 of the drive motor 301. The drive wheel 302 is in transmission connection with the side wall of the crucible body 101. Compared with other types of drive mechanisms 3, the drive motor 301 as a drive mechanism 3 has the advantages of stable output power, strong adjustability, and reliable operation. In this way, the crucible body 101 can achieve long-term stable rotation under the drive of the drive motor 301, thereby allowing the coating device to easily meet the requirements of continuous coating operations. Secondly, by providing the drive wheel 302 on the drive shaft 3011 to rotate synchronously with it, the contact area between the drive motor 301 and the crucible body 101 can be increased, ensuring the continuity and stability of the power transmission. Furthermore, because the outer diameter of the drive wheel 302 is larger than the diameter of the drive shaft 3011, when the drive wheel 302 abuts the crucible body 101, a certain gap remains between the drive shaft 3011 and the crucible body 101. This gap can prevent the driving shaft 3011 from interfering with the structures adjacent to the crucible body 101 , such as the cooling assembly 4 , during the rotation process.

[0052] It should be noted that, since the driving mechanism 3 can be arranged in the through hole 103 , under this layout, if the crucible 1 is to be driven to rotate, the driving wheel 302 needs to be in transmission connection with the hole wall of the through hole 103 .

[0053] It is understandable that the driving wheel 302 and the circumferential side wall of the crucible body 101 can be driven by friction in surface contact or by gear meshing.

[0054] According to one embodiment of the present invention, Figure 1 and Figure 2 As shown, the size of the annular groove 102 decreases from large to small from the notch to the bottom. In this embodiment, the notch of the annular groove 102 is larger than the bottom. This increases the contact area between the coating material and the electron beam 201, improving coating efficiency. Furthermore, it allows the annular groove 102 to hold more coating material, extending the operating time of the coating device. Furthermore, the larger-at-top, smaller-at-bottom structure prevents the coating material from sintering and discoloring due to limited heat dissipation at the bottom.

[0055] According to one embodiment of the present invention, Figure 1 and Figure 2 As shown, a cooling assembly 4 is provided at the bottom of the crucible 1, and a guide structure for limiting the rotation of the crucible body 101 around the axis is provided on the cooling assembly 4. In this embodiment, by providing a cooling assembly 4 at the bottom of the crucible 1, the crucible 1 can be cooled to prevent the crucible 1 from being too hot and causing the coating material that has not yet contacted the electron beam 201 to sinter and become black or discolored. Furthermore, by providing a guide structure on the cooling assembly 4, the crucible body 101 can always rotate around its axis during the coating process, ensuring that the coating materials in different areas can be evenly heated by the electron beam 201. At the same time, a larger contact area is provided between the crucible 1 and the cooling assembly 4, thereby improving the heat dissipation capacity. In this way, the sublimated material can be deposited more evenly on the chip, thereby improving the overall quality of the film layer and reducing film defects and impurities.

[0056] Furthermore, if Figure 1 and Figure 2 As shown, the cooling assembly 4 includes a crucible supporting seat 401 for supporting the crucible 1 and a cooling pipe 402 passing through the crucible supporting seat 401. In this embodiment, the crucible supporting seat 401 provides a stable support for the crucible 1, reducing the possibility of the crucible 1 tilting or shaking due to external force or its own weight during operation. In addition, through the cooling pipe 402 in the crucible supporting seat 401, the heat emitted by the crucible 1 can be quickly absorbed and the temperature of the crucible 1 can be quickly reduced, avoiding the situation where the temperature of the coating material is too high. Secondly, since there is a continuously flowing cooling medium in the cooling pipe 402, the cooling assembly 4 can continuously cool the crucible body 101. In this way, even if long-term continuous coating is carried out, the temperature of the crucible 1 itself can always be controlled within a preset range.

[0057] It is understood that the number of cooling pipes 402 provided within the crucible support 401 may be one or more. This number may be adjusted based on heat dissipation requirements. For example, in one specific embodiment, there are two cooling pipes 402 , which are spaced apart within the crucible support 401 .

[0058] According to one embodiment of the present invention, Figure 1 and Figure 2As shown, the crucible 1 includes a circular outer contour, and the guide structure is a guide groove 4011 recessed in the cooling assembly 4. The shape of the guide groove 4011 is adapted to the outer contour of the crucible 1 and is used to guide the crucible 1 in rotation about its axis. In this embodiment, the outer contour of the crucible 1 is set to a circular shape, and the shape of the guide groove 4011 is adapted to the outer contour of the crucible 1. The guide groove 401 guides the rotational motion of the crucible 1, ensuring that the coating material in each area of ​​the annular groove 102 is aligned with the electron beam 201, thereby ensuring uniform evaporation of the coating material. Secondly, the shape of the guide groove 4011 is adapted to the outer contour of the crucible 1, and the crucible body 101 can always rotate according to a preset trajectory, ensuring that the coating material in the crucible 1 is evenly heated.

[0059] Furthermore, to increase the heat transfer rate between crucible 1 and cooling assembly 4 and reduce the thermal resistance therebetween, thermally conductive adhesive can be filled onto the outer contour of crucible 1 or the walls of guide groove 4011. This optimizes the heat transfer path between crucible 1 and cooling assembly 4, allowing crucible 1 to quickly transfer its own heat to cooling assembly 4 at its base. This allows the crucible 1's temperature to be consistently controlled within a preset range, even during long, continuous coating cycles.

[0060] In a second aspect, the present invention also provides an electron beam evaporation coating system, such as Figure 3 As shown, it includes: a coating chamber 100; and an electron beam evaporation coating device 200 as described above, which is arranged in the coating chamber 100.

[0061] Because the electron beam evaporation coating system of this embodiment utilizes the aforementioned electron beam evaporation coating device 200, it can not only perform a long-term continuous coating process on chips, but also reduce defects in the film layer deposited on the chip, thereby improving the overall quality of the film layer. Furthermore, the electron beam evaporation coating system of this embodiment possesses all the advantages of the aforementioned coating device, which will not be further elaborated here.

[0062] Although the embodiments of the present invention have been described with reference to the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations shall fall within the scope defined by the appended claims.

Claims

1. An electron beam evaporation coating device, characterized in that: include: A crucible (1) comprises a crucible body (101) and an annular groove (102) provided in an annular shape on the crucible body (101), wherein the annular groove (102) is suitable for placing a coating material; An electron beam gun (2) for emitting an electron beam (201) to the coating material in a local area of ​​the annular groove (102); A driving mechanism (3) has a driving end connected to the crucible body (101) and used to drive the crucible body (101) to rotate so as to switch the electron beam (201) to act on a local area on the annular groove (102).

2. The electron beam evaporation coating device according to claim 1, characterized in that: The electron beam gun (2) is arranged adjacent to one side of the crucible body (101), and the rotation center of the driving mechanism (3) is arranged coaxially or parallel to the central axis of the annular groove (102).

3. The electron beam evaporation coating device according to claim 1, characterized in that: A through hole (103) is provided at the center of the crucible body (101), the annular groove (102) is arranged around the through hole (103), the electron beam gun (2) is arranged in the through hole (103), and the driving mechanism (3) is arranged on the peripheral side of the crucible body (101).

4. The electron beam evaporation coating device according to claim 3, characterized in that: The driving mechanism (3) comprises a driving motor (301), a driving shaft (3011) of the driving motor (301) is provided with a driving wheel (302), and the driving wheel (302) is drivingly connected to the side wall of the crucible body (101).

5. The electron beam evaporation coating device according to any one of claims 1 to 4, characterized in that: From the notch of the annular groove (102) to the groove bottom, the size of the annular groove (102) decreases from large to small.

6. The electron beam evaporation coating device according to any one of claims 1 to 4, characterized in that: A cooling assembly (4) is provided at the bottom of the crucible (1), and a guide structure for limiting the rotation of the crucible body (101) around the axis is provided on the cooling assembly (4).

7. The electron beam evaporation coating device according to claim 6, characterized in that: The cooling assembly (4) comprises a crucible supporting seat (401) for supporting the crucible (1) and a cooling pipeline (402) passing through the crucible supporting seat (401).

8. The electron beam evaporation coating device according to claim 6, characterized in that: The crucible (1) includes a circular outer contour, and the guide structure is a guide groove (4011) recessed on the cooling component (4). The shape of the guide groove (4011) is adapted to the outer contour of the crucible (1) and is used to guide the crucible (1) to rotate around an axis.

9. The electron beam evaporation coating device according to claim 8, characterized in that: The guide groove (4011) is filled with heat-conducting glue.

10. An electron beam evaporation coating system, characterized in that: include: a coating chamber (100); And an electron beam evaporation coating device (200) according to any one of claims 1 to 9, arranged in the coating chamber (100).

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