Alloy target material convenient to disassemble and assemble

Abstract

The utility model discloses an alloy target convenient to disassemble and assemble, which comprises a base, an annular seat arranged at the upper end of the base, a support shaft fixedly mounted at the bottom of the annular seat, the lower end of the support shaft rotatably mounted on the base, and an alloy target sheet arranged in the annular seat. The alloy target material convenient to disassemble and assemble is characterized in that an annular base is arranged on the outer side of the alloy target material sheet, two sets of fixing mechanisms distributed in a mirror image mode are arranged in the annular base, the fixing mechanisms are attached to the alloy target material sheet and used for fixing the alloy target material sheet, and each fixing mechanism comprises an elastic piece attached to the outer side of the alloy target material sheet. The elastic pieces apply pressure to the alloy target material sheet, the elastic pieces on the two sides are matched with each other to fix the alloy target material sheet, the electromagnet is powered off, the elastic pieces are bent through the bending parts and separated from the alloy target material sheet, and therefore the elastic pieces restore to the original shape, and the alloy target material sheet can be directly disassembled subsequently.

Description

Technical Field

[0001] The utility model relates to the technical field of alloy target materials, in particular to an alloy target material which is easy to assemble and disassemble. Background Art

[0002] Alloy targets are alloys composed of two or more metal elements and are commonly used in processes such as electron beam evaporation and magnetron sputtering. They offer high electrical and thermal conductivity, high strength, and excellent corrosion resistance, making them widely used in high-tech industries.

[0003] Existing alloy targets have a wide range of applications in multiple fields due to their unique physical and chemical properties. In integrated circuit manufacturing, alloy targets (such as copper targets) are used to deposit conductive layers, which can improve the performance and reliability of chips. Aluminum targets are often used to produce reflective layers for photovoltaic panels, which can enhance the photoelectric conversion efficiency. Titanium targets also have important applications in the aerospace field, such as coating aircraft parts to provide wear resistance and corrosion resistance. Titanium targets are also widely used in the medical device field due to their good biocompatibility, such as coatings for artificial bones. In addition, alloy targets are also used in the manufacture of electronic components such as resistors and heaters, as well as in optical coatings, tool and mold coatings and other fields. With the continuous advancement of science and technology, the application scenarios of alloy targets will continue to expand.

[0004] Existing alloy targets lack a structure that facilitates assembly and disassembly. This inconvenient design increases replacement and installation time, reduces production efficiency, and increases production costs. These inconvenient alloy targets may require additional operations during replacement or maintenance, increasing operational difficulty and safety risks. Furthermore, this inconvenient assembly and disassembly can lead to target damage during replacement, resulting in a waste of resources. Therefore, we propose an alloy target that facilitates assembly and disassembly. Summary of the Invention

[0005] In order to solve the defects of the prior art, the utility model provides an alloy target material that is easy to disassemble and assemble.

[0006] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0007] The utility model discloses an alloy target material which is easy to disassemble and assemble, comprising a machine base, wherein an annular seat is provided at the upper end of the machine base, a supporting shaft is fixedly installed at the bottom of the annular seat, and the lower end of the supporting shaft is rotatably installed on the machine base, and an alloy target material piece is provided in the annular seat.

[0008] Two groups of mirror-imaged fixing mechanisms are provided in the annular seat, and the fixing mechanisms are attached to the alloy target sheet and are used to fix the alloy target sheet. The fixing mechanism includes an elastic member attached to the outside of the alloy target sheet, and the elastic member is provided in the annular seat and is located on one side of the alloy target sheet. Support sheets are fixedly installed on both sides of the elastic member, and the ends of the support sheets are fixedly connected to the annular seat. The inner side of the elastic member is provided with an arc surface, and both ends of the elastic member are provided with a bending portion. The thickness of the bending portion on the elastic member is thinner than that of other positions. Magnet sheets are fixedly installed at both ends of the annular seat facing the elastic member. Two symmetrically distributed electromagnets are fixedly installed on the annular seat, and the electromagnets are respectively provided facing the magnet sheets.

[0009] As a preferred technical solution of the present invention, the side of the elastic member facing the alloy target sheet is provided with anti-slip lines.

[0010] As an optimal technical solution of the present invention, two symmetrically distributed slide grooves are fixedly installed on the upper and lower sides of the annular seat, and a plate is provided on one side of the alloy target sheet. The two ends of the plate extend into the slide grooves on the upper and lower sides respectively, and the end of the plate is slidably set in the slide groove.

[0011] As a preferred technical solution of the present invention, clamping mechanisms are provided at both upper and lower ends of the plate, and the clamping mechanisms on both sides are located at the upper and lower ends of the alloy target sheet and in contact with the alloy target sheet.

[0012] As an optimal technical solution of the present utility model, the clamping mechanism includes an arc-shaped clamping plate, which is located inside the plate and contacts the alloy target sheet. Two spring retraction rods are fixedly installed on the inner side of the plate at intervals, and the movable ends of the spring retraction rods are both fixedly connected to the arc-shaped clamping plate.

[0013] As a preferred technical solution of the present invention, the contact surface between the arc-shaped clamping plate and the alloy target sheet is provided with anti-slip grooves.

[0014] As an optimal technical solution of the present invention, the surface of the support shaft is provided with anti-slip grooves, and limiting mechanisms are provided on both sides of the support shaft. The limiting mechanism is installed on the machine base. The limiting mechanism includes a support plate fixedly connected to the machine base, and a guide frame passes through the support plate. A pressure plate is fixedly installed at one end of the guide frame, and an anti-slip pad is fixedly connected to one side of the pressure plate. Two elastic sheets arranged at intervals are fixedly connected between the pressure plate and the support plate, and a handle is fixedly installed on one side of the guide frame.

[0015] The beneficial effects of the utility model are:

[0016] 1. This type of alloy target is easy to disassemble and assemble. The electromagnet applies a repulsive force to the magnet sheet on the elastic part, and the elastic part applies pressure to the alloy target sheet. The elastic parts on both sides cooperate with each other to fix the alloy target sheet. When the electromagnet is powered off, the elastic part bends from the bending portion and detaches from the alloy target sheet, thereby restoring the elastic part to its original shape. The alloy target sheet can then be directly removed.

[0017] 2. When removing the alloy target sheet, slide the two ends of the plate out of the slide groove. At the same time, the spring contraction rod applies a repulsive force to the arc-shaped clamping plate. The arc-shaped clamping plate clamps the alloy target sheet and can be taken out synchronously. Therefore, the alloy target sheet can be removed without the operator touching the alloy target sheet.

[0018] 3. This alloy target is easy to disassemble and assemble. The convenient disassembly process reduces operation time, making the replacement or maintenance of the alloy target sheet much faster. This is particularly important in a high-efficiency production environment and can significantly improve overall production efficiency. Operators do not need to directly touch the alloy target sheet, avoiding the safety risks that may arise from direct contact. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0020] Figure 1 This is a schematic structural diagram of an alloy target material that is easy to disassemble and assemble in the utility model;

[0021] Figure 2 This is a schematic diagram of the partial structure of an alloy target material that is easy to disassemble and assemble in this utility model. Figure 1 ;

[0022] Figure 3 This is a schematic diagram of the partial structure of an alloy target material that is easy to disassemble and assemble in this utility model. Figure 2 ;

[0023] Figure 4 This is an enlarged structural diagram of an elastic member of an alloy target material that is easy to disassemble and assemble in the utility model;

[0024] Figure 5 This is an enlarged cross-sectional view of a portion of the structure of the support shaft of an alloy target material that is easy to disassemble and assemble in the present invention;

[0025] Figure 6 The utility model is an alloy target material which is easy to disassemble and assemble. Figure 2 A is an enlarged schematic diagram.

[0026] In the figure: machine base 1, annular base 2, support shaft 3, alloy target sheet 4, elastic member 5, support sheet 6, bending portion 7, magnet sheet 8, electromagnet 9, slide groove 10, plate 11, arc-shaped splint 12, spring retraction rod 13, support plate 14, guide frame 15, pressure plate 16, elastic sheet 17. DETAILED DESCRIPTION

[0027] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention and are not used to limit the present invention.

[0028] Example: Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 6 As shown, the present invention provides an alloy target that is easy to disassemble and assemble, including a machine base 1, an annular base 2 is provided at the upper end of the machine base 1, a support shaft 3 is fixedly installed at the bottom of the annular base 2, and the lower end of the support shaft 3 is rotatably mounted on the machine base 1, and an alloy target sheet 4 is provided in the annular base 2. Two sets of mirror-image-distributed fixing mechanisms are provided in the annular base 2. The fixing mechanisms are attached to the alloy target sheet 4 and are used to fix the alloy target sheet 4. The fixing mechanisms include an elastic member 5 attached to the outside of the alloy target sheet 4. The elastic member 5 is provided in the annular base 2 and is located on one side of the alloy target sheet 4. Support sheets 6 are fixedly installed on both sides of the elastic member 5. The ends of the support sheets 6 are both fixedly connected to the annular base 2. The inner side of the elastic member 5 is provided with an arc surface, and a bent portion 7 is provided at both ends of the elastic member 5. The thickness of the bent portion 7 on the elastic member 5 is thinner than that at other positions. Magnet sheets 8 are fixedly installed at both ends of the side of the annular base 2 facing the elastic member 5. Two symmetrically distributed electromagnets 9 are fixedly installed on the annular base 2, and the electromagnets 9 are respectively arranged facing the magnet sheet 8. The side of the elastic member 5 facing the alloy target sheet 4 is provided with anti-slip lines.

[0029] Two symmetrically distributed chutes 10 are fixedly installed on the upper and lower sides of the annular seat 2. A plate 11 is provided on one side of the alloy target sheet 4. The two ends of the plate 11 extend into the chutes 10 on the upper and lower sides respectively. The ends of the plate 11 are slidably set in the chutes 10. Clamping mechanisms are provided on the upper and lower ends of the plate 11. The clamping mechanisms on both sides are located at the upper and lower ends of the alloy target sheet 4 and contact the alloy target sheet 4. The clamping mechanism includes an arc-shaped clamping plate 12, which is located in the plate 11 and contacts the alloy target sheet 4. Two spring retraction rods 13 are fixedly installed on the inner side of the plate 11 at intervals. The movable ends of the spring retraction rods 13 are both fixedly connected to the arc-shaped clamping plate 12. The contact surface between the arc-shaped clamping plate 12 and the alloy target sheet 4 is provided with anti-slip grooves.

[0030] The alloy target sheet 4 is placed in the annular seat 2, and by energizing the electromagnet 9, the electromagnet 9 applies a repulsive force to the magnet sheet 8 on the elastic member 5, and the elastic member 5 applies pressure to the alloy target sheet 4. The elastic members 5 on both sides cooperate with each other to fix the alloy target sheet 4. When the alloy target sheet 4 needs to be removed, the electromagnet 9 is de-energized, and the elastic member 5 is bent by the bending portion 7 and separated from the alloy target sheet 4, so that the elastic member 5 returns to its original shape, and the alloy target sheet 4 can be directly removed later. When removing the alloy target sheet 4, the two ends of the plate 11 are slid out of the chute 10, and at the same time, the spring retraction rod 13 applies a repulsive force to the arc-shaped clamping plate 12, and the arc-shaped clamping plate 12 clamps the alloy target sheet 4, and the alloy target sheet 4 can be taken out synchronously, so that the alloy target sheet 4 can be removed without the operator touching the alloy target sheet 4.

[0031] The surface of the support shaft 3 is provided with anti-slip grooves, and both sides of the support shaft 3 are provided with limiting mechanisms, which are installed on the machine base 1. The limiting mechanism includes a support plate 14 fixedly connected to the machine base 1, and a guide frame 15 is passed through the support plate 14. A pressure plate 16 is fixedly installed at one end of the guide frame 15, and an anti-slip pad is fixedly connected to one side of the pressure plate 16. Two elastic sheets 17 are fixedly connected between the pressure plate 16 and the support plate 14, and a handle is fixedly installed on one side of the guide frame 15. By rotating the annular seat 2 around the support shaft 3, the alloy target sheet 4 in the annular seat 2 can be driven to rotate synchronously, and the orientation of the alloy target sheet 4 can be adjusted. The elastic sheet 17 drives the pressure plate 16 to press the support shaft 3. The pressure plates 16 on both sides work together to prevent the angle of the support shaft 3 from changing easily, and the orientation of the alloy target sheet 4 is also not easily changed.

[0032] Working principle: The alloy target sheet 4 is placed in the annular seat 2, and by energizing the electromagnet 9, the electromagnet 9 applies a repulsive force to the magnet sheet 8 on the elastic member 5, and the elastic member 5 applies pressure to the alloy target sheet 4. The elastic members 5 on both sides cooperate with each other to fix the alloy target sheet 4. When the alloy target sheet 4 needs to be removed, the electromagnet 9 is powered off, and the elastic member 5 is bent by the bending portion 7 and detached from the alloy target sheet 4, so that the elastic member 5 returns to its original shape, and the alloy target sheet 4 can be directly removed later. When removing the alloy target sheet 4, the two ends of the plate 11 are slid out of the slide groove 10, and at the same time, the spring retraction rod 13 applies a repulsive force to the arc-shaped clamping plate 12, and the arc-shaped clamping plate 12 clamps the alloy target sheet 4, so that the alloy target sheet 4 can be taken out synchronously, so that the alloy target sheet 4 can be removed without the operator touching the alloy target sheet 4.

[0033] The convenient disassembly process reduces operation time, making the replacement or maintenance of the alloy target sheet faster. This is especially important in a high-efficiency production environment and can significantly improve overall production efficiency. The operator does not need to directly touch the alloy target sheet, avoiding the safety risks that may arise from direct contact. For example, the alloy target may have characteristics such as high temperature, high pressure or radioactivity, and direct contact may cause harm to the human body. Therefore, the non-contact operation method effectively ensures the safety of the operator. During the disassembly process, if the operator directly touches the alloy target sheet, it may cause scratches, contamination or damage to its surface. The convenient disassembly method can avoid these potential problems, thereby protecting the integrity and performance of the alloy target sheet.

[0034] By rotating the annular seat 2 around the support shaft 3, the alloy target sheet 4 inside the annular seat 2 can be driven to rotate synchronously, and the orientation of the alloy target sheet 4 can be adjusted. The elastic sheet 17 drives the pressure plate 16 to press the support shaft 3. The pressure plates 16 on both sides work together to prevent the angle of the support shaft 3 from changing easily, and the orientation of the alloy target sheet 4 is also not easily changed. The alloy target sheet 4 with adjustable angle can be optimized and adjusted according to different coating requirements and process parameters. By adjusting the angle of the target sheet 4, the energy and angular distribution of the sputtered particles can be changed, thereby affecting the quality and performance of the coating.

[0035] Finally, it should be noted that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. An alloy target material that is easy to disassemble and assemble, comprising a machine base (1), characterized in that: An annular seat (2) is provided at the upper end of the machine base (1), a support shaft (3) is fixedly mounted on the bottom of the annular seat (2), the lower end of the support shaft (3) is rotatably mounted on the machine base (1), and an alloy target sheet (4) is provided in the annular seat (2); Two sets of mirror-image-distributed fixing mechanisms are provided in the annular seat (2), and the fixing mechanisms are attached to the alloy target sheet (4) and used to fix the alloy target sheet (4). The fixing mechanisms include an elastic member (5) attached to the outside of the alloy target sheet (4), and the elastic member (5) is provided in the annular seat (2) and is located on one side of the alloy target sheet (4). Support sheets (6) are fixedly installed on both sides of the elastic member (5), and the ends of the support sheets (6) are fixedly connected to the annular seat (2). The inner side of the elastic member (5) is provided as an arc surface, and both ends of the elastic member (5) are provided with a bending portion (7), and the thickness of the bending portion (7) on the elastic member (5) is thinner than that at other positions. Magnet sheets (8) are fixedly installed on both ends of the side of the annular seat (2) facing the elastic member (5), and two symmetrically distributed electromagnets (9) are fixedly installed on the annular seat (2), and the electromagnets (9) are respectively provided facing the magnet sheets (8).

2. The alloy target material that is easy to disassemble and assemble according to claim 1, characterized in that: The elastic member (5) is provided with anti-slip lines on a side facing the alloy target sheet (4).

3. The alloy target material that is easy to disassemble and assemble according to claim 2, characterized in that: Two symmetrically distributed slide grooves (10) are fixedly installed on both upper and lower sides of the annular seat (2), and a plate (11) is provided on one side of the alloy target sheet (4). Both ends of the plate (11) extend into the slide grooves (10) on the upper and lower sides respectively, and the end of the plate (11) is slidably provided in the slide groove (10).

4. The alloy target material that is easy to disassemble and assemble according to claim 3, characterized in that: Clamping mechanisms are provided at both upper and lower ends of the plate (11), and the clamping mechanisms on both sides are located at the upper and lower ends of the alloy target sheet (4) and are in contact with the alloy target sheet (4).

5. The alloy target material that is easy to disassemble and assemble according to claim 4, characterized in that: The clamping mechanism comprises an arc-shaped clamping plate (12), the arc-shaped clamping plate (12) is located in the plate (11) and contacts the alloy target sheet (4), two spring retraction rods (13) arranged at intervals are fixedly installed on the inner side of the plate (11), and the movable ends of the spring retraction rods (13) are both fixedly connected to the arc-shaped clamping plate (12).

6. The alloy target material that is easy to assemble and disassemble according to claim 5, characterized in that: The contact surface between the arc-shaped clamping plate (12) and the alloy target sheet (4) is provided with anti-slip grooves.

7. The alloy target material that is easy to assemble and disassemble according to claim 6, characterized in that: The surface of the support shaft (3) is provided with anti-skid grooves, and both sides of the support shaft (3) are provided with limiting mechanisms, and the limiting mechanisms are installed on the machine base (1). The limiting mechanism includes a support plate (14) fixedly connected to the machine base (1), and a guide frame (15) is passed through the support plate (14). A pressure plate (16) is fixedly installed at one end of the guide frame (15), and an anti-skid pad is fixedly connected to one side of the pressure plate (16). Two elastic sheets (17) arranged at intervals are fixedly connected between the pressure plate (16) and the support plate (14), and a handle is fixedly installed on one side of the guide frame (15).

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