Multi-arc coating source device for improving utilization rate of target material

Abstract

The utility model relates to a multi-arc coating source device for improving the utilization rate of a target material, which comprises a mounting seat, a cathode cylinder and an anode cylinder are arranged on the mounting seat, the cathode cylinder is positioned in the anode cylinder, the mounting seat, the cathode cylinder and the anode cylinder are assembled and connected in an insulating manner through an insulating component, and a supporting seat for assembling the target material is arranged at the upper end of the cathode cylinder. A knocking mechanism for knocking and striking an arc on a target material is arranged beside the supporting seat, a magnetic control device is further arranged in the cathode cylinder, the magnetic control device is located on the lower side of the supporting seat, and the magnetic control device is movably and adjustably assembled in the length direction of the cathode cylinder. According to the scheme provided by the utility model, the combustion uniformity of the target material can be effectively improved, and the utilization rate of the target material is improved.

Description

Technical Field

[0001] The utility model relates to the field of vacuum coating, in particular to a multi-arc coating source device capable of improving target material utilization. Background Art

[0002] The film layers produced using magnetron multi-arc technology have finer grains, lower surface roughness, and higher target material utilization. The principle of its production is as follows: after evacuating the vacuum chamber, the metal target acts as the cathode, the anode cylinder and the grounded striking assembly act as the anode, the striking rod moves up and down and strikes the target surface in a short period of time. The instantaneous conduction between the cathode target and the anode cylinder generates an arc discharge, which evaporates and ionizes the target material, forming a spatial plasma that is then deposited on the substrate surface to form a metal film layer. Currently, there are still many problems with the actual use of vacuum coating equipment, such as low target material utilization on the multi-arc coating source device, uneven film layers at different locations in the chamber, and the target surface is easily contaminated before coating, resulting in poor adhesion to the base layer. Therefore, further research and development in these areas is necessary. Summary of the Invention

[0003] The purpose of the utility model is to provide a multi-arc coating source device which can improve the utilization rate of target materials, and can improve the utilization rate of target materials in the process of vacuum coating.

[0004] In order to achieve the above-mentioned purpose, the present invention is implemented according to the technical solution described below.

[0005] A multi-arc coating source device for improving target material utilization is characterized in that it includes a mounting seat, a cathode tube and an anode tube are arranged on the mounting seat, the cathode tube is located inside the anode tube, the mounting seat, the cathode tube and the anode tube are insulated and assembled and connected by an insulating component, the upper end of the cathode tube is provided with a support seat for assembling the target material, and a knocking mechanism for knocking the target material to strike an arc is provided on the side of the support seat. A magnetic control device is also provided in the cathode tube, the magnetic control device is located on the lower side of the support seat, and the magnetic control device is movably and adjustably assembled along the length direction of the cathode tube.

[0006] A further solution is: the magnetron device is installed at one end of the adjusting rod, the length direction of the adjusting rod is consistent with the length direction of the cathode tube, and the adjusting rod is movably assembled along its length direction.

[0007] A nut assembly is provided at the lower end of the cathode cylinder. The adjusting rod is a threaded rod. The threaded rod and the nut assembly form a screw nut adjusting mechanism. The other end of the adjusting rod extends to the outside of the cathode cylinder.

[0008] The other end of the adjustment rod is connected to the servo motor through a transmission assembly, and the servo motor is connected to a control device. The control device regulates the operating state of the servo motor according to the target material type or target material consumption.

[0009] The magnetron device includes a magnetic disk and magnets arranged on the magnetic disk. The N poles of the magnets are arranged toward the target material, and the magnets are arranged at intervals on the magnetic disk along the circumference of the magnetic disk.

[0010] The magnetic field formed by the magnetron device is strong in the center and weak on the outside. There are three circles of magnets on the disk, and the magnets are arranged radially on the disk.

[0011] An anode coil assembly is provided on the outer wall of the anode cylinder, and the anode coil assembly is used to expand the generated plasma beam outward.

[0012] The striking assembly includes an arc-starting needle and an arc-starting ring. The arc-starting ring is sleeved on the cathode cylinder. The arc-starting needle is installed on the inner end of the striking rod. The striking rod is rotatably installed on the mounting seat. The striking rod is located between the cathode cylinder and the anode cylinder. The striking rod extends to the outer end of the lower side of the mounting seat and is connected to the rotation adjustment assembly for adjusting its rotation. The rotation adjustment mechanism adjusts the arc-starting needle to the corresponding target material arrangement or moves it to the side of the target material.

[0013] The rotation adjustment component includes a rotating cylinder. The outer end of the knocking rod is transmission-connected to the rotating cylinder through a magnetic fluid seal. A bellows is sleeved on the knocking rod between the magnetic fluid seal and the mounting seat.

[0014] The anode cylinder is provided with a first cooling structure for water cooling, the cathode cylinder is provided with a second cooling structure for water cooling, the support seat is made of copper plate, and the support seat is provided with a third cooling structure for water cooling. The insulating assembly includes a first annular insulating member arranged between the cathode cylinder and the mounting seat, a cap-shaped second insulating member arranged between the cathode cylinder and the anode cylinder, and a tubular third insulating member arranged between the cathode cylinder and the arc striking ring. A metal sleeve is also provided on the inner wall surface of the anode cylinder, and the metal sleeve is located on the upper side of the second insulating member.

[0015] The above solution provided by the utility model can effectively improve the uniformity of target material combustion and increase the utilization rate of the target material. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural diagram of the present utility model.

[0017] Figure 2 for Figure 1 Schematic cross-sectional view of .

[0018] Figure 3 Schematic diagram of the assembly of the striking mechanism and cathode cylinder on the mounting base.

[0019] Explanation of figure numbers: 10-mounting seat, 20-cathode cylinder, 21-support seat, 30-anode cylinder, 31-anode coil assembly, 32-metal sleeve, 40-target material, 51-arcing needle, 52-arcing ring, 53-tapping rod, 54-magnetic fluid seal, 55-rotating cylinder, 56-bellows, 57-mounting bracket, 61-first insulating member, 62-second insulating member, 63-third insulating member, 70-magnetic control device, 71-adjusting rod, 72-nut assembly. DETAILED DESCRIPTION

[0020] In order to make the purpose and advantages of the present invention more clearly understood, the present invention is described in detail below with reference to the following embodiments. It should be understood that the following text is only used to describe one or several specific embodiments of the present invention and does not strictly limit the scope of protection of the present invention.

[0021] As used herein, the terms "parallel," "perpendicular," and the like are not limited to their strict geometric definitions, but include allowances for reasonable and inconsistent machining or human errors.

[0022] like Figures 1 to 3As shown, a multi-arc coating source device for improving the utilization rate of the target material 40 includes a mounting base 10, on which are mounted a cathode tube 20 and an anode tube 30. The cathode tube 20 is located inside the anode tube 30 and is connected to the multi-arc anode and multi-arc cathode, respectively. The mounting base 10, cathode tube 20, and anode tube 30 are insulated and assembled together via an insulating component. A support base 21 for mounting the target material 40 is provided at the upper end of the cathode tube 20. A striking mechanism for striking the target material 40 to strike an arc is provided next to the support base 21. A magnetron 70 is also provided within the cathode tube 20 and is located below the support base 21. The magnetron 70 is movable and adjustable along the length of the cathode tube 20. The multi-arc cathode is connected to the bottom of the cathode tube 20 and secured with M8 bolts. The multi-arc anode is connected to the side of the base of the anode tube 30 and secured with M8 bolts. The anode tube 30 is used to generate a loop current. By arranging the magnetron device 70 to be movable and adjustable along the length of the cathode cylinder 20, the distance between the magnetron device 70 and the target material 40 can be adaptively adjusted according to different targets 40 and their consumption, thereby achieving a better effect of the magnetron device 70 on the target material 40 and improving the utilization rate of the target material 40. A filter coil assembly is provided on the upper side of the anode cylinder 30 to control plasma movement and filter large impurities. Since the magnetic field generated by the filter coil assembly is close to the target material, it will affect the combustion of the target material. By providing an anode coil assembly, the direction of the magnetic field generated by the anode coil assembly is opposite to that of the magnetic field generated by the filter coil, thereby reducing the impact of the magnetic field generated by the filter coil assembly on the target material. The magnetic field generated by the magnetron device will pull the plasma on the target surface away, allowing the metal target to continue burning. However, different metal targets have different requirements for the strength of the magnetic field, so the magnetic field strength of the target surface is changed by adjusting the height. In addition, the anode coil assembly can increase the current in the second half of the process, and its magnetic field will pull the arc to the surrounding of the metal target, making the target surface burn more smoothly and improving the utilization rate of a single metal target.

[0023] The magnetron device 70 is mounted on one end of an adjustment rod 71. The length of the adjustment rod 71 is aligned with the length of the cathode cylinder 20, and the adjustment rod 71 is movable along its length. A nut assembly 72 is provided at the lower end of the cathode cylinder 20. The adjustment rod 71 is a threaded rod. The threaded rod and the nut assembly 72 form a screw-nut adjustment mechanism. The other end of the adjustment rod 71 extends to the exterior of the cathode cylinder 20. By mounting the target 40 on the threaded adjustment rod 71, the adjustment rod 71 and the nut assembly 72 form a screw-nut adjustment mechanism. This allows for precise control of the position of the magnetron device 70, improving adjustment accuracy.

[0024] An anode coil assembly 31 is mounted on the outer wall of the anode barrel 30, and is used to expand the generated plasma beam. The anode coil assembly 31 specifically consists of a coil sleeved around the anode barrel 30 and a coil protective sleeve. When the cathode target 40 and the anode barrel 30 are connected, an arc discharge is generated, vaporizing and ionizing the target 40, forming a spatial plasma. A magnetron 70 beneath the target 40 maintains this arc discharge. The magnetic field generated by the anode coil assembly 31 pulls the plasma beam outward, ensuring more uniform combustion of the target 40. The plasma, having subsequently acquired an initial velocity, is then accelerated in a spiral by the magnetic field of the filter coil. Large impurities are filtered out in the curved pipe, causing them to precipitate onto the substrate surface, forming a metal film. The control device also regulates the current flowing through the anode coil assembly 31. By controlling the position of the magnetron 70 and the current flowing through the anode coil assembly 31, the metal target 40 maintains continuous and stable combustion, improving target 40 utilization, shortening coating time, and significantly improving film quality.

[0025] The movement of the adjusting rod 71 can be adjusted manually or automatically, for example, by using a cylinder. The preferred solution is that the other end of the adjusting rod 71 is connected to the servo motor through a transmission assembly, and the servo motor is connected to the control device, and the control device regulates the operating state of the servo motor according to the type of target material 40 or the consumption of target material 40. The magnetic control device includes a disk and magnets arranged on the disk, the N pole of the magnet is arranged toward the target material 40, and the magnets are arranged at intervals on the disk along the circumference of the disk. The magnetic field formed by the magnetic control device is strong in the center and weak on the outside, and the magnets are arranged in three or four circles on the disk, and the magnets are arranged radially on the disk. The magnetic control device of the above structure can better enable the target material 40 to continuously generate arc discharge, so that the target material 40 can burn more evenly.

[0026] like Figure 3As shown, the striking assembly includes an arcing needle 51 and an arcing ring 52. The arcing ring 52 is sleeved on the cathode cylinder 20. The arcing needle 51 is mounted on the inner end of the striking rod 53. The striking rod 53 is rotatably mounted on the mounting base 10. The striking rod 53 is located between the cathode cylinder 20 and the anode cylinder 30. The striking rod 53 extends to the outer end of the lower side of the mounting base 10 and is connected to the rotation adjustment assembly for adjusting its rotation. The rotation adjustment mechanism adjusts the arcing needle 51 to be arranged corresponding to the target material 40 or moves it to the side of the target material 40. The rotation adjustment assembly includes a rotary cylinder 55. The outer end of the striking rod 53 is transmission-connected to the rotary cylinder 55 through a magnetic fluid seal 54. A bellows 56 is sleeved on the rod of the striking rod 53 between the magnetic fluid seal 54 and the mounting base 10. The striking rod 53 is rotatably mounted on the mounting base 10 through a tubular fourth insulating member. The rotary cylinder 55 is fixedly mounted on the mounting bracket 57. The arc-starting needle 51 is inserted into the center hole of the striking rod 53 and then tightened with a bolt, significantly reducing the chance of the arc-starting needle 51 falling. The rotating cylinder 55 can perform reciprocating rotational motion. In normal operation, the arc-starting needle 51 rotates 90 degrees to the side, reducing the amount of metal film deposited on the surface. When striking is required, the rotating cylinder 55 rotates 90 degrees and simultaneously extends downward a certain distance. The arc-starting needle 51 strikes the surface of the target 40, forming a pathway and allowing a high current to flow through the target 40, generating a glow discharge.

[0027] The anode cylinder 30 is provided with a first cooling structure for water cooling, and the cathode cylinder 20 is provided with a second cooling structure for water cooling. The support base 21 is made of a copper plate, specifically a red copper plate, and the support base 21 is provided with a third cooling structure for water cooling. The target 40 is fixedly mounted on the support base 21 by a threaded connection. The target 40 is tightly fitted to the copper plate through the threaded connection. A third cooling structure (cooling water channel) is provided below the copper plate, which allows for continuous water cooling. This prevents the target 40 from being melted over a large area by heat and causing target sticking, reduces target 40 loss, and improves target 40 utilization. The first cooling structure and the second cooling structure can specifically be double-layer water cooling. The cathode cylinder 20 uses one-inlet and one-outlet water cooling, and the anode cylinder 30 uses two-inlet and two-outlet water cooling (bottom-inlet and top-outlet), which better removes the heat generated by the combustion of the target 40, thereby effectively protecting the safety of equipment and personnel.

[0028] The insulating assembly includes an annular first insulating member 61 disposed between the cathode cylinder 20 and the mounting base 10, a cap-shaped second insulating member 62 disposed between the cathode cylinder 20 and the anode cylinder 30, and a tubular third insulating member 63 disposed between the cathode cylinder 20 and the arc starter ring 52. A metal sleeve 32 is also disposed on the inner wall surface of the anode cylinder 30, and the metal sleeve 32 is located above the second insulating member 62. The provision of the metal sleeve 32 prevents uneven plating on the inner wall of the anode cylinder 30. The first insulating member 61 and the second insulating member 62 are both made of ceramic material. The second insulating member 62 consists of an annular plate portion and a circular tubular portion. The annular plate portion is arranged in affixed relation to the upper surface of the mounting base 10, and the circular tubular portion is arranged in affixed relation to the inner wall of the anode cylinder 30.

[0029] The above description is merely a preferred embodiment of the present invention. It should be noted that those skilled in the art may make various improvements and modifications without departing from the principles of the present invention, and such improvements and modifications should be considered within the scope of protection of the present invention. Structures, devices, and operating methods not specifically described or explained in this invention shall, unless otherwise specified or limited, be implemented in accordance with conventional means in the art.

Claims

1. A multi-arc coating source device for improving target material utilization, characterized in that: It includes a mounting seat, on which a cathode tube and an anode tube are arranged. The cathode tube is located inside the anode tube. The mounting seat, cathode tube and anode tube are insulated and connected through an insulating component. A support seat for assembling a target material is provided at the upper end of the cathode tube. A knocking mechanism for knocking the target material to strike an arc is provided on the side of the support seat. A magnetic control device is also provided in the cathode tube. The magnetic control device is located on the lower side of the support seat. The magnetic control device is movably and adjustably assembled along the length direction of the cathode tube.

2. The multi-arc coating source device for improving target utilization according to claim 1, characterized in that: The magnetron device is mounted on one end of the regulating rod. The length direction of the regulating rod is consistent with the length direction of the cathode cylinder. The regulating rod is movably assembled along the length direction of the regulating rod.

3. The multi-arc coating source device for improving target utilization according to claim 2, characterized in that: A nut assembly is provided at the lower end of the cathode cylinder. The adjusting rod is a threaded rod. The threaded rod and the nut assembly form a screw nut adjusting mechanism. The other end of the adjusting rod extends to the outside of the cathode cylinder.

4. The multi-arc coating source device for improving target utilization according to claim 3, characterized in that: The other end of the adjustment rod is connected to the servo motor through a transmission assembly, and the servo motor is connected to a control device. The control device regulates the operating state of the servo motor according to the target material type or target material consumption.

5. The multi-arc coating source device for improving target utilization according to claim 1, characterized in that: The magnetron device includes a magnetic disk and magnets arranged on the magnetic disk. The N poles of the magnets are arranged toward the target material, and the magnets are arranged at intervals on the magnetic disk along the circumference of the magnetic disk.

6. The multi-arc coating source device for improving target utilization according to claim 5, characterized in that: The magnetic field formed by the magnetron device is strong in the center and weak on the outside. There are three circles of magnets on the disk, and the magnets are arranged radially on the disk.

7. The multi-arc coating source device for improving target utilization according to claim 1, characterized in that: An anode coil assembly is provided on the outer wall of the anode cylinder, and the anode coil assembly is used to expand the generated plasma beam outward.

8. The multi-arc coating source device for improving target utilization according to claim 1, characterized in that: The striking assembly includes an arc-starting needle and an arc-starting ring. The arc-starting ring is sleeved on the cathode cylinder. The arc-starting needle is installed on the inner end of the striking rod. The striking rod is rotatably installed on the mounting seat. The striking rod is located between the cathode cylinder and the anode cylinder. The striking rod extends to the outer end of the lower side of the mounting seat and is connected to the rotation adjustment assembly for adjusting its rotation. The rotation adjustment mechanism adjusts the arc-starting needle to the corresponding target material arrangement or moves it to the side of the target material.

9. The multi-arc coating source device for improving target utilization according to claim 8, characterized in that: The rotation adjustment component includes a rotating cylinder. The outer end of the knocking rod is transmission-connected to the rotating cylinder through a magnetic fluid seal. A bellows is sleeved on the knocking rod between the magnetic fluid seal and the mounting seat.

10. The multi-arc coating source device for improving target utilization according to claim 1, characterized in that: The anode cylinder is provided with a first cooling structure for water cooling, the cathode cylinder is provided with a second cooling structure for water cooling, the support seat is made of copper plate, and the support seat is provided with a third cooling structure for water cooling. The insulating assembly includes a first annular insulating member arranged between the cathode cylinder and the mounting seat, a cap-shaped second insulating member arranged between the cathode cylinder and the anode cylinder, and a tubular third insulating member arranged between the cathode cylinder and the arc striking ring. A metal sleeve is also provided on the inner wall surface of the anode cylinder, and the metal sleeve is located on the upper side of the second insulating member.

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