CDA heating device

Abstract

The utility model provides a CDA heating device, which comprises an outer cylinder, an inner cylinder suspended in the outer cylinder and at least one electric heating tube, the inner cylinder and the outer cylinder jointly define a gas flow channel, the gas flow channel comprises an outer ring flow channel which is formed between the outer cylinder and the inner cylinder and is communicated with a gas inlet, and the outer ring flow channel is communicated with a gas outlet. And the central flow channel is formed in the inner cylinder and is communicated with an exhaust port and the outer ring flow channel, and the wall surface where the gas flow channel and the at least one electric heating pipe jointly provide CDA contact has a smooth characteristic, so that the problem that residual particles or pollutants in the CDA are easy to accumulate in the heating device is solved.

Description

Technical Field

[0001] The utility model relates to a technology for heating compressed dry air, in particular to a heating device for compressed dry air (CDA) used in precision processes. Background Art

[0002] Currently, the instruments and equipment used in processes such as sorting, packaging, testing, processing, assembly, etching, and cleaning in the semiconductor, optoelectronics, electronics, panel, substrate, biochemical, and pharmaceutical industries generally require pure compressed dry air (CDA) to prevent contamination of precision products and the effects of cleanroom environments.

[0003] CDA is typically obtained through a CDA supply system. This system consists of an air compressor, a storage tank, a dryer, and a filter in series. The air compressor compresses the air, which is then stored in the storage tank. The dryer then dehumidifies the compressed air, and the filter filters the dehumidified compressed air to produce dry, clean compressed air (i.e., CDA) for use in clean rooms and the instruments and equipment within them.

[0004] Although CDA passes through the filters in the aforementioned supply system, it still contains trace amounts of moisture and fine particles. These trace amounts of moisture and fine particles are insufficient to meet the needs of the high-precision, advanced processes in these industries. Furthermore, high-precision, advanced processes such as semiconductors often require the use of ultra-clean compressed air (XCDA). This is because the permissible moisture and fine particle levels in XCDA are even more stringent, thoroughly preventing contamination of high-precision products during manufacturing, which could affect process accuracy and quality.

[0005] It is also known that the CDA or XCDA used in process equipment such as cleaning equipment is generally required to have a specific temperature. In other words, an electric heater must be connected in series to the back end of the CDA or XCDA supply system to heat the CDA or XCDA provided by the supply system, thereby supplying CDA with a specific temperature to the process equipment at the demand end to meet the needs.

[0006] Furthermore, existing patents disclose several advanced electric heaters that can be used to heat CDA or other fluids. These patents teach that the electric heaters have built-in heating tubes (or heat pipes). The tube walls of these heating tubes are often made of metal or quartz glass with high thermal conductivity, and contain heating wires or thermocouples. Some heating tubes are also filled with special powders (such as magnesium oxide) or special gases that help increase the heat-work equivalent. This allows the heating tubes to generate higher electrical power, thereby improving the heating efficiency of the fluid or CDA.

[0007] The aforementioned patent also teaches configuring the heater's heating tube into a spiral shape, wrapping it around the heater's fluid flow path, thereby increasing the area for heat transfer (including conduction, convection, and radiation) between the tube wall and the fluid. In addition, heating tubes are also commonly configured in folded or corrugated shapes, all of which serve to increase the area for heat transfer (including conduction, convection, and radiation) between the tube wall and the fluid, and are described in detail.

[0008] On the other hand, when supplying tubes for these high-precision advanced processes, CDA or XCDA are typically required to use stainless steel tubes that have undergone near-mirror electrolytic polishing (EP) or bright annealing (BA). This creates a smooth tube surface that facilitates contact with the CDA or XCDA and reduces the accumulation of moisture and fine particles within the tube. It is also known that generally straight metal tubes are more easily subjected to the EP or BA processing to make the tube wall present smooth surface features; in contrast, the spirally curved electric heating tubes disclosed in the above patents, or the electric heating tubes with wrinkles or corrugations, are not conducive to being subjected to the EP or BA processing after shaping; it is also known that generally straight metal tubes are difficult to be shaped into the spirally curved, wrinkled or corrugated tube shape after the EP or BA processing, resulting in the tube wall of the existing heater or its built-in electric heating tube being extremely prone to accumulating particles or contaminants remaining in the CDA or XCDA, thereby becoming a breach that affects the cleanliness of the CDA or XCDA. Utility Model Content

[0009] Based on the above technical background, the purpose of the present invention is to provide a CDA heating device. The technical problem to be overcome is: under the premise that the heated fluid is CDA or XCDA, the accumulation of particles or contaminants remaining in the CDA or XCDA on the walls of the electric heating tube and the flow channel can be avoided as much as possible, so as to improve the cleanliness of the CDA or XCDA supplied to the demand end of the equipment.

[0010] For ease of explanation, the pure compressed dry air (CDA) described below in this invention should be considered to include ultra-clean compressed air (XCDA). It must be emphasized that this invention was developed based on the stringent requirements of advanced high-precision manufacturing processes for using smooth surface features in the pipe walls used to guide XCDA.

[0011] To this end, the present invention provides a CDA heating device suitable for guiding and heating CDA or XCDA. The CDA heating device comprises: an outer cylinder, an inner cylinder suspended in the outer cylinder, and at least one electric heating tube; the outer cylinder is axially arranged along a straight line and introduces CDA through an air inlet; the inner cylinder is suspended in the outer cylinder along the straight line and discharges CDA through an air outlet; the gas flow channel comprises an outer ring flow channel formed along the straight line between the outer cylinder and the inner cylinder and connected to the air inlet, and a central flow channel formed along the straight line in the inner cylinder and connected to the air outlet, so that the outer ring flow channel passes through the air inlet. The inner tube is spaced to enclose the periphery of the central flow channel; at least one of the electric heating tubes forms a straight tube body along the straight axis and is suspended in the central flow channel; wherein: the outer annular flow channel and the central flow channel are connected to each other via an annular connecting port, at least one of the electric heating tubes maintains a heating distance along the straight axis, the annular connecting port and the exhaust port are distributed at both ends of the heating distance, and the wall surface provided by the gas flow channel and at least one of the electric heating tubes for CDA contact has a smooth feature.

[0012] In a further embodiment, one end of the outer tube forms a first end disc, and one end of the inner tube forms a second end disc. The first and second end discs are spaced apart from each other by the outer tube and together frame a portion of the wall surface of the gas flow channel having the smooth characteristic. In an even further embodiment, the other end of the outer tube forms a flange, and the second end disc engages with the flange to suspend the inner tube within the outer tube. The annular communication port is formed between the wall surface of the first end disc and an open end of the inner tube; furthermore, the exhaust port is formed on the wall surface of the second end disc.

[0013] In a further embodiment, a center line of the central flow channel is collinear with an axial center line of the straight line, and the exhaust port is located on the center line of the central flow channel.

[0014] In a further implementation, the outer ring flow channel maintains an insulation distance axially extending along the straight line, and the annular connecting port maintains a connecting width formed axially along the straight line, and the heating distance is equal to the total length of the insulation distance and the connecting width.

[0015] In a further embodiment, the device further comprises at least one partition disposed within the central flow channel for supporting at least one of the electric heating tubes. The at least one partition is formed with a plurality of vents distributed thereon for passage of the CDA within the central flow channel, and the walls of the at least one partition and the plurality of vents each have the smooth features for contact with the CDA. Furthermore, the device further comprises an inner cavity temperature sensing rod for detecting the thermal energy provided by the at least one electric heating tube. The rod is supported by the at least one partition and suspended within the central flow channel along the straight line axially adjacent to the at least one electric heating tube.

[0016] In a further embodiment, the device further comprises an inner cavity temperature sensing rod for detecting the thermal energy provided by at least one of the electric heating tubes. The inner cavity temperature sensing rod is suspended within the central flow channel along the straight line axially adjacent to the at least one electric heating tube. One end of the outer cylinder forms a first end plate that frames a portion of the gas flow channel. The first end plate provides a connection for the at least one electric heating tube and the inner cavity temperature sensing rod.

[0017] In the above embodiment, the electric heating tube is composed of a plurality of electric heating tubes that can only provide electrical power individually, and the plurality of electric heating tubes are suspended in the central flow channel at intervals along the straight axial direction.

[0018] In addition, the present invention further comprises an outlet temperature sensing rod installed at the exhaust port for detecting the CDA exhaust temperature.

[0019] In summary, the technical effect of the present invention is that the flow channel and the wall surface of the electric heating tube within the heating device that provide gas contact are both smooth, and at least one electric heating tube is arranged along the straight axial direction of gas flow, eliminating the presence of curved, wrinkled, or wavy wall surfaces. As a result, even if there are trace amounts of particles or contaminants in the CDA, it is difficult to accumulate inside the heating device.

[0020] The implementation contents and technical effects disclosed above will be specifically presented in the following drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a three-dimensional schematic diagram of the heating device of the present invention.

[0022] Figure 2 yes Figure 1 Schematic diagram of three-dimensional decomposition.

[0023] Figure 3 yes Figure 1 A cross-sectional view of the heating device shown.

[0024] Figure 4 yes Figure 3 AA cross-sectional view of the .

[0025] Figure 5 yes Figure 3FIG2 is an explanatory diagram illustrating the flow of CDA in the heating device, with dotted arrows indicating the flow direction of CDA.

[0026] Explanation of the reference numerals: 10-outer cylinder; 11-first end plate; 113-inner wall surface; 12-flange; 13-inner wall surface; 20-inner cylinder; 21-second end plate; 213-inner wall surface; 22-cylinder mouth; 23-inner wall surface; 24-outer wall surface; 30-electric heating tube; 40-gas flow channel; 41-outer annular flow channel; 42-central flow channel; 43-annular connecting port; 45-partition; 450-double-side wall surface; 451-air vent; 451a-wall surface; 452-tube hole; 50-air inlet pipe; 51-air inlet; 60-discharge pipe; 61-exhaust port; 70-inner cavity temperature sensing rod; 71-outlet temperature sensing rod; 80-airtight pad; X-linear axis; L-center line; S1-heating distance; S2-insulation distance; W-connection width. DETAILED DESCRIPTION

[0027] Please refer to the combined Figures 1 to 3 As shown, in a preferred embodiment, the present invention provides a CDA heating device, comprising an outer tube 10 and an inner tube 20 made of a seamless stainless steel tube having a bevel end (BE) and a near-mirror electrolytic polishing (EP) or bright annealing (BA) treatment, wherein the inner tube 20 is disposed within the outer tube 10, and at least one electric heating tube 30 is disposed within the inner tube 20.

[0028] Depend on Figure 3 As can be seen, the heating device has a linear axis X, along which the outer cylinder 10 and the inner cylinder 20 are formed. Specifically, the inner cylinder 20 is suspended within the outer cylinder 10 along the linear axis X, forming a gas flow channel 40 between the outer cylinder 10 and the inner cylinder 20. The gas flow channel 40 comprises an outer annular flow channel 41 and a central flow channel 42, which are interconnected. The outer annular flow channel 41 is formed on the periphery of the central flow channel.

[0029] To create the aforementioned gas flow passage 40, broadly speaking, the outer tube 10 can be formed into a hollow cylindrical body with both ends closed, and the inner tube 20 can be formed into a hollow cylindrical body with one end closed and the other end open. The closed end of the inner tube 20 can be coupled to one of the closed ends of the outer tube 10, thereby creating a structural form in which the inner tube 20 is suspended within the outer tube 10 and has the aforementioned gas flow passage 40.

[0030] However, in order to facilitate processing, in this embodiment (such as Figure 2As shown in FIG, the outer tube 10 is fixed with a first end plate 11 and a flange 12 made of stainless steel and in an annular shape at both ends; the inner tube 20 is fixed with a second end plate 21 made of stainless steel and in an annular shape at one end, and the other end of the inner tube 20 is formed into an open tube mouth 22; please see further Figure 3 , revealing that after the inner tube 20 is implanted into the outer tube 10, the second end plate 21 can be locked and combined with the flange 12 with an airtight gasket 80, so that the inner tube 20 is suspended in the outer tube 10, and the first end plate 11 and the second end plate 21 can be spaced apart from each other along the straight axis X through the outer tube 10.

[0031] In this manner, the outer annular flow channel 41 is formed between the outer cylinder 10 and the inner cylinder 20 along the linear axial direction X, with both ends of the outer annular flow channel 41 respectively framed by the first end plate 11 and the second end plate 21. Furthermore, the central flow channel 42 is formed within the inner cylinder 20 along the linear axial direction X. An annular communication opening 43 is formed at one end of the central flow channel 42, and the other end of the central flow channel 42 is framed by the second end plate 21. Thus, the annular communication opening 43 is formed between the wall surface of the first end plate 11 and the opening 22 of the inner cylinder 20, and the opening 22 is prevented from contacting the first end plate 11. Furthermore, the outer annular flow channel 41 can wrap around the periphery of the central flow channel 42 through the gap of the inner cylinder 20. Furthermore, the outer annular flow channel 41 and the central flow channel 42 can communicate with each other via the annular communication opening 43.

[0032] Furthermore, if Figure 3 As shown, an air inlet pipe 50 is fixed to the outer cylinder 10 wall adjacent to the flange 12 or the second end plate 21. The air inlet pipe 50 defines an air inlet port 51 communicating with the outer annular flow channel 41. The heating device, through the air inlet port 51, guides pure compressed dry air (CDA) at room temperature, provided by a CDA supply system (not shown), into the outer annular flow channel 41. Furthermore, a discharge pipe 60 is fixed to the inner cylinder 20 along the linear axial direction X, via the wall of the second end plate 21. The discharge pipe 60 defines an exhaust port 61 communicating with the central flow channel 42. In a preferred embodiment, the centerline L of the central flow channel 42 is collinear with an axis of the linear axial direction X, and the exhaust port 51 is located on the centerline L of the central flow channel 42. This facilitates smooth discharge of CDA from the central flow channel 42 through the exhaust port 51, thereby mitigating CDA deflection.

[0033] Please match Figure 2 、 Figure 3 Further reading Figure 4 As shown, the present invention discloses the use of three electric heating tubes 30 for implementation. Due to the relationship between the cross-sectional angles, Figure 3Only a single electric heating tube 30 can be seen in the figure, but this does not affect the conversion of the electric heating tube 30 to be a single or plural number.

[0034] like Figure 3 As shown, the first end plate 11 is provided with at least one electric heating tube 30, and the electric heating tube 30 is formed into a straight tube shape along the straight axis X and is suspended in the central flow channel 42. The electric heating tube 30 can generate electrical power and dissipate heat energy. In addition, as Figure 3 As shown, a feasible implementation scheme is disclosed, that is, at least one partition 45 is set in the central flow channel 42 to support at least one electric heating tube 30; Figure 2 As shown, at least one of the partitions 45 is distributed and formed with a plurality of mutually spaced vents 451 and a plurality of tube holes 452. The vents 451 can be presented in the form of holes or grooves to provide passage for the CDA in the central flow channel 42. The tube holes 452 are used to pass through the electric heating tubes 30 and an inner cavity temperature sensing rod 70. In this manner, the electric heating tubes 30 can be suspended in the central flow channel 42 along the linear axis X, and each of the electric heating tubes 30 maintains a heating distance S1 along the linear axis X. The annular communication port 43 and the exhaust port 61 are distributed at both ends of the heating distance S1, so that the CDA introduced into the central flow channel 42 through the annular communication port 43 can fully contact and absorb the heat energy transferred by each of the electric heating tubes 30 within the heating distance S1, thereby heating to the CDA temperature required by the demand-side equipment or clean room. Generally speaking, the CDA temperature required by demand-side equipment or clean rooms is approximately between 60°C and 80°C. In the present invention, a single or multiple electric heating tubes 30 can be configured according to the amount of electric power generated by each electric heating tube 30 (which is a predetermined specification of commercially available products), so as to heat the CDA to the temperature required by the demand-side equipment or clean room (e.g., 60°C) within the heating distance S1.

[0035] Fu Ru Figure 3 and Figure 4As shown, the first end plate 11 further provides an inner cavity temperature sensing rod 70 for insertion, so that the inner cavity temperature sensing rod 70 is suspended within the central flow channel 42 along the linear axis X. Alternatively, the inner cavity temperature sensing rod 70 can be supported by at least one partition 45 and suspended within the central flow channel 42 along the linear axis X. The inner cavity temperature sensing rod 70 is adjacent to the electric heating tube 30 in a non-contact manner, thereby sensing the heat energy provided by the electric heating tube 30 within the central flow channel 42. When the inner cavity temperature sensing rod 70 detects that the heat energy provided by the electric heating tube 30 in the central flow channel 42 is too high, the electric heating tube 30 stops supplying power to prevent the heated CDA within the central flow channel 42 from overheating. Thus, the inner cavity temperature sensing rod 70 provides over-temperature protection. Furthermore, an outlet temperature sensing rod 71 can be installed on the exhaust port 61 or the exhaust pipe 60 to detect the discharge temperature of the CDA to ensure that it meets the temperature requirements of the demand-side equipment or clean room.

[0036] Please continue reading Figure 5 As shown, the dotted arrows indicate the flow direction of CDA, indicating that normal temperature or unheated CDA provided by a conventional CDA supply system is positively pressurized and introduced into the outer annular flow channel 41 via the air inlet 51. The CDA then flows through the annular communication port 43 into the central flow channel 42, where it is heated by the electric heating tube 30 during the flow time of the heating distance S1. The inner cavity temperature sensor 70 is used to detect whether the temperature generated by the electric heating tube 30 is sufficient to heat the CDA in the central flow channel 42 to the temperature required by the demand-side equipment or cleanroom. As the CDA in the central flow channel 42 is discharged to the demand-side equipment or cleanroom via the exhaust port 61 and the discharge pipe 60, the outlet temperature sensor 71 can also be used to detect whether the hot CDA supplied through the central flow channel 42 meets the requirements of the demand-side equipment or cleanroom.

[0037] During the heating process, the inner tube 20 is located relatively close to the outer tube 10, with the inner tube 20 having a wall that is relatively close to the electric heating tube 30. In other words, the temperature within the outer annular flow channel 41 is relatively lower than that within the central flow channel 42, allowing the outer annular flow channel 41 to serve as a thermal insulation layer for the central flow channel 42. To this end, the outer annular flow channel 41 maintains an insulation distance S2 extending along the linear axial direction X, and the annular communication opening 43 maintains a communication width W formed along the linear axial direction V. The heating distance S1 is equal to the total length of the insulation distance S2 and the communication width W, thereby enhancing the thermal insulation effect of the outer annular flow channel 41 and thereby saving energy for the electric heating tube 30.

[0038] In addition, the gas flow channel 40 and the electric heating tube 30 of the present invention provide CDA contact walls that are smooth. Figure 3As shown, the gas flow channel 40 provides the wall surface contacted by the CDA, including the inner wall surface 13 of the outer cylinder 10, the inner wall surface 113 of the first end plate 11 exposed in the gas flow channel 40, the inner wall surface 23 and the outer wall surface 24 of the inner cylinder 20, the double-side wall surface 450 of the partition 45, the wall surface 451a of the vent 451 and the inner wall surface 213 of the second end plate 21 exposed in the gas flow channel 40.

[0039] Furthermore, the gas flow channel 40 and the electric heating tube 30 provide smooth features for the wall surface with which the CDA contacts, including the stainless steel tube surface formed by electrolytic polishing (EP) or bright annealing (BA) treatment to be nearly mirror-like, and excluding spiral bends, wrinkles, or waves. Furthermore, the wall surface of the electric heating tube 30 providing contact with the CDA can also be made of quartz glass or the like to have a nearly mirror-like shape, both of which fall within the applicable technical scope of the present invention, thereby preventing the accumulation of trace particles or contaminants in the CDA.

[0040] Furthermore, the electric heating tube 30 of the present invention, configured according to the above-described technique, has a straight tube wall with which the CDA contacts within the heating distance S1. Therefore, while still being able to heat the CDA to the desired temperature, the problem of having a spiral, curved, wrinkled, or corrugated tube wall, which could easily accumulate trace particles or contaminants in the CDA, is eliminated.

[0041] The above-described embodiments are merely preferred embodiments of the present invention, but should not be construed as limiting the present invention.

Claims

1. A CDA heating device, characterized in that: include: An outer cylinder is arranged axially along a straight line and is introduced into the CDA through an air inlet; an inner cylinder axially suspended within the outer cylinder along the straight line and configured to discharge CDA through an exhaust port; a gas flow channel comprising an outer annular flow channel formed along the linear axis between the outer tube and the inner tube and communicating with the gas inlet, and a central flow channel formed along the linear axis within the inner tube and communicating with the gas outlet, wherein the outer annular flow channel is wrapped around the periphery of the central flow channel via the gap of the inner tube; and At least one electric heating tube is formed into a straight tube shape along the straight axis and is suspended in the central flow channel; in: The outer annular flow channel and the central flow channel are connected to each other via an annular connecting port. At least one of the electric heating tubes maintains a heating distance axially extending along the straight line. The annular connecting port and the exhaust port are distributed at both ends of the heating distance. The wall surface contacted by the CDA provided by the gas flow channel and at least one of the electric heating tubes has a smooth feature.

2. The CDA heating device according to claim 1, wherein: One end of the outer tube forms a first end disk, and one end of the inner tube forms a second end disk. The first end disk and the second end disk are spaced apart from each other via the outer tube and jointly frame a portion of the wall of the gas flow channel having the smooth feature.

3. The CDA heating device according to claim 2, wherein: The other end of the outer tube forms a flange, and the second end plate is combined with the flange to suspend the inner tube in the outer tube.

4. The CDA heating device according to claim 2, wherein: The annular communication port is formed between the wall surface of the first end plate and an open tube opening of the inner tube.

5. The CDA heating device according to claim 2, wherein: The exhaust port is formed on the wall surface of the second end plate.

6. The CDA heating device according to claim 1 or 5, characterized in that: A center line of the central flow channel is collinear with an axial center line of the straight line, and the exhaust port is located on the center line of the central flow channel.

7. The CDA heating device according to claim 1, wherein: The outer ring flow channel maintains a heat preservation distance along the straight line axially, and the annular communication port maintains a communication width formed along the straight line axially. The heating distance is equal to the total length of the heat preservation distance and the communication width.

8. The CDA heating device according to claim 1, wherein: It also includes at least one partition configured in the central flow channel for supporting at least one of the electric heating tubes, and at least one of the partitions is distributed with multiple vents to provide CDA in the central flow channel with passage, and the walls of at least one of the partitions and the multiple vents respectively have the smooth features that provide CDA contact.

9. The CDA heating device according to claim 8, wherein: It also includes an inner cavity temperature sensing rod for detecting the thermal energy provided by at least one of the electric heating tubes, which is supported by at least one of the partitions and is suspended in the central flow channel along the straight line axially adjacent to at least one of the electric heating tubes.

10. The CDA heating device according to claim 1, wherein: The invention also comprises an inner cavity temperature sensing rod for detecting the heat energy provided by at least one of the electric heating tubes. The inner cavity temperature sensing rod is suspended in the central flow channel along the straight line axially adjacent to at least one of the electric heating tubes.

11. The CDA heating device according to claim 9 or 10, characterized in that: One end of the outer cylinder forms a first end plate that frames a portion of the gas flow channel, and the first end plate provides a passage for at least one of the electric heating tubes and the inner cavity temperature sensing rod.

12. The CDA heating device according to claim 1, wherein: The electric heating tube is composed of a plurality of electric heating tubes that can only provide electric power individually, and the plurality of electric heating tubes are suspended in the central flow channel at intervals along the straight axis.

13. The CDA heating device according to claim 1 or 10, characterized in that: The device also includes an outlet temperature sensing rod installed at the exhaust port for detecting the CDA exhaust temperature.

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