Safety system of thermal activation vacuum sintering furnace

Abstract

The utility model relates to the technical field of welding furnaces, and provides a safety system of a thermal activation vacuum sintering furnace, which is characterized in that a first temperature sensor is arranged above a heat insulation plate, and a second temperature sensor is arranged below the heat insulation plate; the heat insulation plate flowmeter is connected with the cooling water path of the heat insulation plate and is used for detecting the flow of the cooling water path of the heat insulation plate; the computer control center is used for receiving data signals of the first temperature sensor and the second temperature sensor, comparing the data signals with a low temperature threshold value or a high temperature threshold value, alarming if the data signals are smaller than the low temperature threshold value, and alarming if the data signals are larger than the high temperature threshold value; the processor is used for receiving a data signal of the thermal baffle flowmeter and comparing the data signal with a first threshold, and alarming if the data signal is less than the first threshold; and the alarm is electrically connected with the computer control center, and the computer control center controls the alarm to give an alarm. The problems that the heat insulation plate does not insulate heat and the product quality is reduced are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of welding furnaces, in particular to a safety system of a heat-activated vacuum sintering furnace. Background Art

[0002] Most structures in the existing technology cannot meet the requirements of single-layer small-area jig welding with different temperatures in the same process; for example, when performing vacuum welding operations with a getter activation process, such as in MEMS device packaging and PGA chip packaging, the germanium window part of the welding component is coated with a getter, and the tube shell part is coated with solder. The activation of the getter needs to be maintained at a temperature of 360°C for 20 minutes. If the temperature is directly raised to 360°C, the melting point of the solder will be reached during the thermal activation process, and the solder will melt.

[0003] The heat-activated vacuum sintering furnace of the prior art has no safety system, and there is a risk that the heat insulation plate will not be insulated, thereby reducing the risk of product quality. Summary of the Invention

[0004] The utility model provides a safety system for a heat-activated vacuum sintering furnace, which is used to solve the problem of the risk of a heat insulation board of a heat-activated vacuum sintering furnace not being insulated in the prior art.

[0005] A safety system for a heat-activated vacuum sintering furnace, comprising:

[0006] A display screen is electrically connected to the computer control center and is used to display the temperature status above the heat insulation board, the temperature status below the heat insulation board, the status of the heat insulation board and the vacuum value;

[0007] at least one first temperature sensor, which is disposed above the heat insulation board and connected to the vacuum chamber, and is used to detect the temperature above the heat insulation board;

[0008] At least one second temperature sensor is provided below the heat insulation board, the second temperature sensor is connected to the vacuum chamber, and the second temperature sensor is used to detect the temperature below the heat insulation board;

[0009] A heat insulation board flow meter, connected to the cooling water channel of the heat insulation board, for detecting the flow rate of the cooling water channel of the heat insulation board;

[0010] A vacuum gauge is connected to the vacuum chamber and is used to detect the vacuum value of the vacuum chamber;

[0011] The computer control center is configured to receive a data signal from a first temperature sensor and compare it with a low temperature threshold or a high temperature threshold, and to trigger an alarm if the temperature is less than the low temperature threshold, or to trigger an alarm if the temperature is greater than the high temperature threshold; receive a data signal from a second temperature sensor and compare it with a low temperature threshold or a high temperature threshold, and to trigger an alarm if the temperature is less than the low temperature threshold, or to trigger an alarm if the temperature is greater than the high temperature threshold; receive a data signal from a heat shield flow meter and compare it with a first threshold, and to trigger an alarm if the temperature is less than the first threshold; receive a data signal from a vacuum gauge and compare it with a vacuum threshold, and to trigger an alarm if the temperature is greater than the vacuum threshold;

[0012] The alarm is electrically connected to the computer control center, and the computer control center controls the alarm to sound an alarm.

[0013] According to the safety system of the heat-activated vacuum sintering furnace of the present invention, it also includes a formic acid pressure sensor and a nitrogen pressure sensor; the formic acid pressure sensor is connected to the formic acid barrel for detecting the pressure of the formic acid barrel; the nitrogen pressure sensor is connected to the nitrogen tank for detecting the pressure of the nitrogen tank.

[0014] According to the safety system of the heat-activated vacuum sintering furnace of the present invention, the computer control center is further used to receive the data signal of the formic acid pressure sensor and compare it with the formic acid barrel pressure threshold, and if it is less than the formic acid barrel pressure threshold, an alarm is triggered; and to receive the data signal of the nitrogen pressure sensor and compare it with the nitrogen tank pressure threshold, and if it is less than the nitrogen tank pressure threshold, an alarm is triggered.

[0015] According to the safety system of the heat-activated vacuum sintering furnace of the present invention, the display screen is also used to display the pressure value of the formic acid barrel and the nitrogen pressure value.

[0016] The safety system of the heat-activated vacuum sintering furnace according to the present invention further includes a plurality of second formic acid detection sensors connected to the vacuum cavity for detecting the formic acid concentration in the vacuum cavity.

[0017] According to the safety system of the heat-activated vacuum sintering furnace of the present invention, the computer control center is also used to receive the data signal of the second formic acid detection sensor and compare it with the cavity formic acid threshold. If the signal is greater than the cavity formic acid threshold, the upper cover cannot be opened.

[0018] According to the safety system of the heat-activated vacuum sintering furnace of the present invention, the display screen is also used to display the formic acid concentration value in the cavity.

[0019] According to the safety system of the heat-activated vacuum sintering furnace of the present invention, it also includes a cooling pipe flow meter, which is connected to the water channel of the cooling pipe and is used to detect the water channel flow of the cooling pipe. The computer control center is also used to receive the data signal of the cooling pipe flow meter and compare it with a second threshold value. If it is less than the second threshold value, an alarm is issued.

[0020] According to the safety system of the heat-activated vacuum sintering furnace of the present invention, the display screen is also used to display the water flow value of the cooling pipe.

[0021] The utility model provides an alarm when the flow rate of the heat insulation board falls below a first threshold value, thereby reducing the risk of the heat insulation board not being insulated and preventing the occurrence of poor insulation due to low water flow in the heat insulation board, thereby reducing the risk of reduced product quality. The water path of the cooling pipe only has water when cooling, and is empty when heating. During cooling, the cooling pipe flow meter is connected to the water path of the cooling pipe to detect the water flow rate in the cooling pipe. The computer control center is used to receive the data signal of the cooling pipe flow meter and compare it with a second threshold value. If the flow rate is less than the second threshold value, an alarm is issued. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 Schematic diagram of the safety system structure of the heat-activated vacuum sintering furnace. DETAILED DESCRIPTION

[0024] The following embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0025] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be understood as limiting the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0026] In the description of the embodiments of the present invention, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in the embodiments of the present invention based on specific circumstances.

[0027] In the embodiments of the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, a first feature being "above," "above," or "above" a second feature may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below," "below," or "below" a second feature may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is lower in level than the second feature.

[0028] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or at least one embodiment or example in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.

[0029] The following combination Figure 1 A safety system for a heat-activated vacuum sintering furnace according to an embodiment of the present invention is described, comprising:

[0030] A display screen is electrically connected to the computer control center and is used to display the temperature status above the heat insulation board, the temperature status below the heat insulation board, the status of the heat insulation board and the vacuum value;

[0031] At least one first temperature sensor is disposed above the heat insulation board, the first temperature sensor is connected to the vacuum chamber, and is used to detect the temperature above the heat insulation board; the area above the heat insulation board is the activation area;

[0032] At least one second temperature sensor is provided below the heat insulation board, the second temperature sensor is connected to the vacuum chamber, and the second temperature sensor is used to detect the temperature below the heat insulation board; the welding area is below the heat insulation board;

[0033] The insulation board flow meter is connected to the cooling water path of the insulation board and is used to detect the cooling water path flow of the insulation board. During thermal activation, the insulation board is required to separate the upper and lower parts of the cavity to form two different temperature zones. The insulation effect of the insulation board is better only when the cooling water path flow of the insulation board is greater than a first threshold.

[0034] at least one first formic acid detection sensor, the first formic acid detection sensor being used to detect the formic acid concentration outside the vacuum chamber; that is, to detect whether there is formic acid leakage;

[0035] A vacuum gauge is connected to the vacuum chamber and is used to detect the vacuum value of the vacuum chamber; that is, to detect the vacuum condition of the chamber;

[0036] The computer control center is configured to receive a data signal from a first temperature sensor and compare it with a low temperature threshold or a high temperature threshold, and to trigger an alarm if the temperature is less than the low temperature threshold, or to trigger an alarm if the temperature is greater than the high temperature threshold; receive a data signal from a second temperature sensor and compare it with a low temperature threshold or a high temperature threshold, and to trigger an alarm if the temperature is less than the low temperature threshold, or to trigger an alarm if the temperature is greater than the high temperature threshold; receive a data signal from a heat shield flow meter and compare it with a first threshold, and to trigger an alarm if the temperature is less than the first threshold; receive a data signal from a vacuum gauge and compare it with a vacuum threshold, and to trigger an alarm if the temperature is greater than the vacuum threshold; receive a data signal from a first formic acid detection sensor and compare it with a formic acid concentration threshold, and to trigger an alarm if the temperature is greater than the formic acid concentration threshold;

[0037] The alarm is electrically connected to the computer control center, and the computer control center controls the alarm to sound an alarm.

[0038] In some embodiments, the system further includes a cooling pipe flow meter connected to the water circuit of the cooling pipe for detecting the water flow rate of the cooling pipe. The computer control center is further configured to receive a data signal from the cooling pipe flow meter and compare it with a second threshold value. If the signal is less than the second threshold value, an alarm is triggered. The display screen is further configured to display the water flow rate value of the cooling pipe. When the cooling pipe is heated, there is no water flow, and only when cooling is required. During cooling, the water flow rate of the cooling pipe must be greater than the second threshold value to ensure a cooling effect.

[0039] In some embodiments, a formic acid pressure sensor and a nitrogen pressure sensor are also included. The formic acid pressure sensor is connected to the formic acid barrel to detect the pressure in the formic acid barrel, and the nitrogen pressure sensor is connected to the nitrogen tank to detect the pressure in the nitrogen tank. The formic acid barrel stores a mixture of nitrogen, formic acid, and formic acid volatilization gas. Nitrogen and formic acid are charged into the formic acid barrel, and a mixture of nitrogen and formic acid flows out. This mixture is then charged into the vacuum chamber of the vacuum sintering furnace.

[0040] In some embodiments, the computer control center is further configured to receive data signals from a formic acid pressure sensor and compare them with a pressure threshold in the formic acid tank. If the pressure is less than the formic acid tank pressure threshold, an alarm is triggered. The computer control center is also configured to receive data signals from a nitrogen pressure sensor and compare them with a pressure threshold in the nitrogen tank. If the pressure is less than the nitrogen tank pressure threshold, an alarm is triggered. The formic acid tank and the nitrogen tank may be equipped with safety valves that automatically release the valves when the pressure exceeds a certain level.

[0041] In some embodiments, at least one heating tube current sensor is further included. The heating tube current sensors are electrically connected to the heating tubes one by one and are used to detect the current of the heating tubes. The device is used to receive the data signal of the heating tube current sensor and compare it with the current threshold. If the current is less than the current threshold, an alarm is triggered.

[0042] In some embodiments, at least one heating tube power sensor is further included. The heating tube power sensors are electrically connected to the heating tubes one by one, and are used to detect the power of the heating tubes. The data signal of the heating tube power sensor is received and compared with the power threshold. If the power is less than the threshold, an alarm is triggered.

[0043] In some embodiments, the display screen is also used to display the pressure value of the formic acid barrel and the nitrogen pressure value. During operation, operations can be performed according to the pressure value on the display screen. The display screen has green, yellow and red colors. Green indicates the safe zone, yellow indicates the warning zone, and red indicates the danger zone. The maximum pressure values ​​of the formic acid barrel and the nitrogen tank are in the yellow zone.

[0044] In some embodiments, a plurality of second formic acid detection sensors are further included, connected to the vacuum chamber, for detecting the formic acid concentration in the vacuum chamber.

[0045] In some embodiments, the computer control center is further configured to receive a data signal from a second formic acid detection sensor and compare it with a formic acid detection threshold of the vacuum chamber. If the signal is greater than the formic acid detection threshold, the vacuum chamber is kept closed. The upper cover of the chamber is prohibited from being opened in the presence of formic acid.

[0046] In some embodiments, the display screen is also used to display the formic acid concentration value in the vacuum chamber.

[0047] In some embodiments, a cavity pressure sensor is further included, connected to the vacuum cavity, for detecting the pressure in the vacuum cavity.

[0048] In some embodiments, the computer control center is further configured to receive a data signal from a cavity pressure sensor and compare the signal with a cavity pressure threshold, and to generate an alarm if the value is greater than the cavity pressure threshold.

[0049] In some embodiments, the display screen is also used to display the pressure value of the vacuum chamber.

[0050] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A safety system for a heat-activated vacuum sintering furnace, characterized in that: include: A display screen is electrically connected to the computer control center and is used to display the temperature status above the heat insulation board, the temperature status below the heat insulation board, the status of the heat insulation board and the vacuum value; at least one first temperature sensor, which is disposed above the heat insulation board and connected to the vacuum chamber, and is used to detect the temperature above the heat insulation board; At least one second temperature sensor is provided below the heat insulation board, the second temperature sensor is connected to the vacuum chamber, and the second temperature sensor is used to detect the temperature below the heat insulation board; A heat insulation board flow meter, connected to the cooling water channel of the heat insulation board, for detecting the flow rate of the cooling water channel of the heat insulation board; A vacuum gauge is connected to the vacuum chamber and is used to detect the vacuum value of the vacuum chamber; The computer control center is configured to receive a data signal from a first temperature sensor and compare it with a low temperature threshold or a high temperature threshold, and to trigger an alarm if the temperature is less than the low temperature threshold, or to trigger an alarm if the temperature is greater than the high temperature threshold; receive a data signal from a second temperature sensor and compare it with a low temperature threshold or a high temperature threshold, and to trigger an alarm if the temperature is less than the low temperature threshold, or to trigger an alarm if the temperature is greater than the high temperature threshold; receive a data signal from a heat shield flow meter and compare it with a first threshold, and to trigger an alarm if the temperature is less than the first threshold; receive a data signal from a vacuum gauge and compare it with a vacuum threshold, and to trigger an alarm if the temperature is greater than the vacuum threshold; The alarm is electrically connected to the computer control center, and the computer control center controls the alarm to sound an alarm.

2. The safety system for a heat-activated vacuum sintering furnace according to claim 1, characterized in that: It also includes a formic acid pressure sensor and a nitrogen pressure sensor; the formic acid pressure sensor is connected to the formic acid barrel to detect the pressure of the formic acid barrel; the nitrogen pressure sensor is connected to the nitrogen tank to detect the pressure of the nitrogen tank.

3. The safety system for a heat-activated vacuum sintering furnace according to claim 2, characterized in that: The computer control center is further configured to receive data signals from a formic acid pressure sensor and compare the signals with a formic acid barrel pressure threshold, and to trigger an alarm if the pressure is less than the formic acid barrel pressure threshold; and to receive data signals from a nitrogen pressure sensor and compare the signals with a nitrogen tank pressure threshold, and to trigger an alarm if the pressure is less than the nitrogen tank pressure threshold.

4. The safety system for a heat-activated vacuum sintering furnace according to claim 2, characterized in that: The display screen is also used to display the formic acid barrel pressure value and the nitrogen pressure value.

5. The safety system for a heat-activated vacuum sintering furnace according to claim 1, characterized in that: It also includes a plurality of second formic acid detection sensors connected to the vacuum cavity and used for detecting the formic acid concentration in the vacuum cavity.

6. The safety system for a heat-activated vacuum sintering furnace according to claim 5, characterized in that: The computer control center is also used to receive the data signal of the second formic acid detection sensor and compare it with the cavity formic acid threshold. If the value is greater than the cavity formic acid threshold, the upper cover cannot be opened.

7. The safety system for a heat-activated vacuum sintering furnace according to claim 6, characterized in that: The display screen is also used to display the formic acid concentration value in the cavity.

8. The safety system for a heat-activated vacuum sintering furnace according to claim 1, wherein: It also includes a cooling pipe flow meter, which is connected to the water channel of the cooling pipe and is used to detect the water channel flow of the cooling pipe. The computer control center is also used to receive the data signal of the cooling pipe flow meter and compare it with a second threshold value. If it is less than the second threshold value, an alarm is issued.

9. The safety system for a heat-activated vacuum sintering furnace according to claim 8, characterized in that: The display screen is also used to display the water flow value of the cooling pipe.

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