Silicon-based chip detection device

Abstract

The utility model relates to a silicon-based chip detection device, and belongs to the technical field of chip detection equipment. The detection device comprises a supporting plate, a detection plate, a material guide box, a fixing frame, an electric push rod, a connecting block, a connecting plate, a transmission component, a rotating component and a detection camera, the supporting plate is a circular plate, a rotating rod penetrates through the middle of the supporting plate, the detection plate is arranged at one end of the rotating rod, the rotating component is arranged at the other end of the rotating rod, and the material guide box is arranged at the top of the supporting plate; an electric push rod is fixedly arranged at the top of the fixing frame, an output shaft of the electric push rod faces the detection plate, a detection camera is arranged at the tail end of the output shaft of the electric push rod, a connecting block is arranged on the output shaft of the electric push rod, the other end of the connecting block penetrates through the fixing frame and then is connected with a connecting plate, and a transmission component is arranged at the tail end of the connecting plate; the transmission component is connected with a rotating component. According to the utility model, the disassembly and assembly process of the chip during detection is avoided, and the detection efficiency is greatly improved.

Description

Technical Field

[0001] The utility model relates to a silicon-based chip detection device, belonging to the technical field of chip detection equipment. Background Art

[0002] During the chip manufacturing process, there may be flaws and defects such as crystal defects and metal impurities on the silicon wafer. If these defects are not discovered and handled in time, they will directly affect the performance and stability of the chip, so the chip needs to be tested. Chinese patent document CN214310777U discloses a limit device for silicon-based chip detection. The device can play a protective role when the object is clamped by setting a rubber pad and a threaded rod to prevent the fixing plate from being too hard and causing a certain degree of damage to the object, affecting subsequent use. However, when the device is testing the chip, it is necessary to clamp the chip and disassemble it after testing. When the number of chips required for testing is large, it takes a lot of time to disassemble and assemble the chip, which reduces the efficiency of chip detection. Summary of the Invention

[0003] In view of the deficiencies in the prior art, the present invention provides a silicon-based chip detection device, which avoids the chip disassembly and assembly process during detection and greatly improves detection efficiency.

[0004] The technical solution of the utility model is as follows:

[0005] A silicon-based chip detection device includes a support plate, a detection plate, a material guide box, a fixing frame, an electric push rod, a connecting block, a connecting plate, a transmission component, a rotating component and a detection camera, wherein:

[0006] The support plate is a circular plate, with a rotating rod running through the middle of the support plate, a detection plate at one end of the rotating rod, and a rotating component at the other end. A material guide box is provided on the top of the support plate, a fixed bracket is provided on one side of the material guide box, an electric push rod is fixed on the top of the fixed bracket, the output shaft of the electric push rod faces the detection plate, a detection camera is provided at the end of the output shaft of the electric push rod, a connecting block is provided on the output shaft of the electric push rod, the other end of the connecting block passes through the fixed bracket and is connected to a connecting plate, a transmission component is provided at the end of the connecting plate, and the transmission component is connected to the rotating component.

[0007] According to the preferred embodiment of the present invention, the transmission component includes a movable plate, a spring, a fixed block and a ratchet. The movable plate is connected to a connecting plate. Several fixed blocks are evenly distributed on the movable plate. Ratchets are hinged on the fixed block. A spring is provided on the movable plate on one side of the fixed block. The spring is connected to the ratchet. The rotating component is a ratchet.

[0008] According to a further preferred embodiment of the present invention, a limit plate is provided on the movable plate on the other side of the fixed block to limit the flipping position of the ratchet.

[0009] According to the preferred embodiment of the present invention, the rotating rod is arranged in the middle of the support plate through the damping sleeve, which can produce damping restriction on the ratchet.

[0010] According to the preferred embodiment of the present invention, a plurality of detection grooves are evenly distributed on the side wall of the detection plate.

[0011] According to the preferred embodiment of the present invention, the angle between the material guide box and the fixing frame is less than 90°, ensuring that the silicon-based chip in the detection groove can be stably placed in the detection groove under the action of gravity after it is separated from the material guide box.

[0012] According to the preferred embodiment of the present invention, the material guide box is a hollow box body, and silicon-based chips are stacked in sequence from bottom to top in the box body.

[0013] According to the preferred embodiment of the present invention, a support frame is fixedly provided at the bottom of the support plate for supporting the entire detection device.

[0014] When in use, a silicon-based chip is placed in the material guide box, and the silicon-based chip at the bottom falls into the corresponding detection groove on the detection plate. The electric push rod is extended, and under the elastic force of the spring, the ratchet moves with the connecting plate. When the ratchet contacts the outer wall of the ratchet wheel, the spring is compressed, and at the same time, the damping sleeve damps and limits the ratchet wheel, causing the ratchet wheel to bend and only contact the ratchet wheel 13 without generating thrust. When the electric push rod is pulled back, the ratchet wheel is fixed under the elastic force of the spring and the limit plate, and cannot rotate, thereby generating a driving force for the ratchet wheel, driving the detection plate to rotate toward the fixed frame. When the detection plate rotates, it drives the detection groove corresponding to the bottom of the material guide box to move, taking away the silicon-based chip at the bottom. When the next detection groove moves to the position of the material guide box, it continues to carry the silicon-based chip in the material guide box until the silicon-based chip that first leaves the material guide box moves to the fixed frame;

[0015] Then, the electric push rod extends, allowing the inspection camera to approach the silicon-based chip for shooting and inspection. After the inspection is completed, the electric push rod retracts, driving the inspection plate to move, and the silicon-based chip leaves the inspection area. The inspected silicon-based chips in the inspection tank are manually collected, and the inspection of all chips in the material guide box is completed in sequence.

[0016] The beneficial effects of the present invention are:

[0017] 1. The utility model provides a silicon-based chip detection device, which avoids the chip disassembly and assembly process during detection and greatly improves the detection efficiency.

[0018] 2. The utility model integrates functions by utilizing the structural design of the fixing frame, electric push rod, transmission component, rotating component, etc. The rotation and detection movement of the silicon-based chip can be realized by using an electric push rod. The overall structure has high utilization rate and is easy to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1It is a structural diagram of the utility model;

[0020] Figure 2 It is a rear view of the utility model;

[0021] Figure 3 For the utility model Figure 2 A magnified schematic diagram of part A in FIG;

[0022] Figure 4 This is a schematic diagram of the three-dimensional structure of the detection board of the present utility model;

[0023] Figure 5 This is a structural diagram of the support plate of the present invention.

[0024] Description of reference numerals:

[0025] 1. Support plate; 2. Rotating rod; 3. Detection plate; 4. Material guide box; 5. Fixed frame; 6. Electric push rod; 7. Moving plate; 8. Connecting block; 9. Connecting plate; 10. Fixed block; 11. Ratchet; 12. Spring; 13. Ratchet; 14. Limiting plate; 15. Through hole; 16. Damping sleeve; 17. Detection slot; 18. Detection camera; 19. Support frame. DETAILED DESCRIPTION

[0026] The present invention will be further described below through embodiments and in conjunction with the accompanying drawings, but is not limited thereto.

[0027] Example 1:

[0028] like Figure 1-5 As shown, this embodiment provides a silicon-based chip detection device, including a support plate 1, a detection plate 3, a material guide box 4, a fixing frame 5, an electric push rod 6, a connecting block 8, a connecting plate 9, a transmission member, a rotating member and a detection camera 18, wherein:

[0029] The support plate 1 is a circular plate, with a rotating rod 2 passing through the middle of the support plate 1, a detection plate 3 provided at one end of the rotating rod 2, a through hole 15 provided in the middle of the detection plate 3 for the rotating rod to pass through, the rotating rod is fixed in the through hole, and a rotating component is provided at the other end of the rotating rod 2. A material guide box 4 is provided on the top of the support plate 1, a fixing frame 5 is provided on one side of the material guide box 4, an electric push rod 6 is fixed on the top of the fixing frame 5, the output shaft of the electric push rod 6 faces the detection plate 3, and a detection camera 18 is provided at the end of the output shaft of the electric push rod 6, a connecting block 8 is provided on the output shaft of the electric push rod 6, and the other end of the connecting block 8 passes through the strip hole on the fixing frame 5 and is connected to a connecting plate 9, a transmission component is provided at the end of the connecting plate 9, and the transmission component is connected to the rotating component.

[0030] The transmission component includes a movable plate 7, a spring 12, a fixed block 10 and a ratchet 11. The movable plate 7 is connected to the connecting plate 9. Several fixed blocks 10 are evenly distributed on the movable plate 7. The fixed blocks 10 are hinged with ratchets 11. A spring 12 is provided on the movable plate 7 on one side of the fixed block 10. The spring 12 is connected to the ratchet 11. The rotating component is a ratchet 13.

[0031] A limit plate 14 is provided on the movable plate 7 on the other side of the fixed block 10 to limit the flipping position of the ratchet.

[0032] The rotating rod 2 is arranged in the middle of the support plate 1 through the damping sleeve 16, which can generate damping restriction on the ratchet.

[0033] A plurality of detection slots 17 are evenly distributed on the side wall of the detection plate 3 .

[0034] The included angle α between the material guide box 4 and the fixing frame 5 is less than 90°, which ensures that the silicon-based chip in the detection tank can be stably placed in the detection tank under the action of gravity after being separated from the material guide box.

[0035] The material guide box 4 is a hollow box body, in which silicon-based chips are stacked in sequence from bottom to top.

[0036] A support frame 19 is fixedly provided at the bottom of the support plate 1 for supporting the entire detection device.

[0037] When in use, a silicon-based chip is placed in the material guide box 4, and the silicon-based chip at the bottom falls into the corresponding detection groove on the detection plate. The electric push rod is extended, and under the elastic force of the spring, the ratchet moves with the connecting plate. When the ratchet contacts the outer wall of the ratchet wheel, the spring is compressed, and at the same time, the damping sleeve damps and limits the ratchet wheel, causing the ratchet to bend and only contact with the ratchet wheel 13 without generating thrust. When the electric push rod is pulled back, the ratchet is fixed under the elastic force of the spring and the limit plate, and cannot rotate, thereby generating a driving force for the ratchet wheel, driving the detection plate to rotate toward the fixed frame. When the detection plate rotates, it drives the detection groove corresponding to the bottom of the material guide box to move, taking away the silicon-based chip at the bottom. When the next detection groove moves to the position of the material guide box, it continues to carry the silicon-based chip in the material guide box until the silicon-based chip that first leaves the material guide box moves to the fixed frame;

[0038] Then, the electric push rod extends, allowing the inspection camera to approach the silicon-based chip for shooting and inspection. After the inspection is completed, the electric push rod retracts, driving the inspection plate to move, and the silicon-based chip leaves the inspection area. The inspected silicon-based chips in the inspection tank are manually collected, and the inspection of all chips in the material guide box is completed in sequence.

[0039] The above description is merely illustrative of certain exemplary embodiments of the present invention. It goes without saying that those skilled in the art will be able to modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and description are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A silicon-based chip detection device, characterized in that: It includes a support plate, a detection plate, a material guide box, a fixing frame, an electric push rod, a connecting block, a connecting plate, a transmission component, a rotating component and a detection camera, wherein: The support plate is a circular plate, with a rotating rod running through the middle of the support plate, a detection plate at one end of the rotating rod, and a rotating component at the other end. A material guide box is provided on the top of the support plate, a fixed bracket is provided on one side of the material guide box, an electric push rod is fixed on the top of the fixed bracket, the output shaft of the electric push rod faces the detection plate, a detection camera is provided at the end of the output shaft of the electric push rod, a connecting block is provided on the output shaft of the electric push rod, the other end of the connecting block passes through the fixed bracket and is connected to a connecting plate, a transmission component is provided at the end of the connecting plate, and the transmission component is connected to the rotating component.

2. The silicon-based chip detection device according to claim 1, characterized in that: The transmission component includes a moving plate, a spring, a fixed block and a ratchet. The moving plate is connected to a connecting plate. Several fixed blocks are evenly distributed on the moving plate. The fixed blocks are hinged with ratchets. A spring is provided on the moving plate on one side of the fixed block. The spring is connected to the ratchet. The rotating component is a ratchet.

3. The silicon-based chip detection device according to claim 2, characterized in that: A limit plate is arranged on the movable plate on the other side of the fixed block.

4. The silicon-based chip detection device according to claim 2, characterized in that: The rotating rod is arranged in the middle of the supporting plate through a damping sleeve.

5. The silicon-based chip detection device according to claim 1, wherein: A number of detection slots are evenly distributed on the side wall of the detection plate.

6. The silicon-based chip detection device according to claim 1, characterized in that: The included angle between the material guide box and the fixed frame is less than 90°.

7. The silicon-based chip detection device according to claim 1, characterized in that: The material guide box is a hollow box body, in which silicon-based chips are stacked in sequence from bottom to top.

8. The silicon-based chip detection device according to claim 1, wherein: A support frame is fixedly arranged at the bottom of the support plate.

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