Piezoelectric driving device

Abstract

The utility model provides a piezoelectric driving device, and relates to the technical field of ultra-precision equipment. The utility model relates to a driving mechanism and linear guide rail mechanisms arranged on the two sides of the driving mechanism correspondingly. Each linear guide rail mechanism comprises a stator and a rotor which is slidably connected with the stator and driven by the driving mechanism. The driving mechanism comprises two driving modules, and the two driving modules respectively drive the two rotors; the driving module comprises a driving component, the driving component is provided with a driving end portion, and the driving end portion abuts against the rotor; and the piezoelectric module is connected with the driving component, and the piezoelectric module enables the driving component to deform through deformation so as to drive the mover to move in the preset direction of the linear guide rail mechanism.

Description

Technical Field

[0001] The embodiments of this specification relate to the technical field of ultra-precision equipment, and more particularly to a piezoelectric drive device. Background Art

[0002] A piezoelectric actuator can be a device that utilizes the inverse piezoelectric effect of piezoelectric materials to convert electrical energy into mechanical energy, thereby achieving motion output. Piezoelectric actuators can include rotary piezoelectric actuators and linear piezoelectric actuators. The linear piezoelectric actuator can be a stick-slip piezoelectric actuator. In some embodiments, a single linear piezoelectric actuator operates by driving a single mover through a single stator. This single linear piezoelectric actuator can provide relatively low driving force and low stability. Utility Model Content

[0003] One or more embodiments of the present specification provide a piezoelectric drive device, which drives two linear guide mechanisms to work respectively through two drive modules and can provide a large driving force. The device includes: a drive mechanism and a linear guide mechanism respectively arranged on both sides of the drive mechanism, the linear guide mechanism including a stator and a mover slidably connected to the stator and driven by the drive mechanism; the drive mechanism includes two drive modules, and the two drive modules respectively drive the two movers; the drive module includes: a drive member, the drive member has a drive end, and the drive end abuts against the mover; a piezoelectric module, the piezoelectric module is connected to the drive member, and the piezoelectric module deforms the drive member to drive the mover to move along the preset direction of the linear guide mechanism.

[0004] According to some embodiments of the present specification, the piezoelectric drive device further includes: a pre-stress adjustment mechanism, which includes a pre-stress component and a force-applying component; the pre-stress component is against the piezoelectric module, and the force-applying component can apply force to deform or partially displace the pre-stress component to provide a pre-stress between the driving end of the driving component and the corresponding mover; the force-applying direction of the force-applying component intersects with the pre-stress direction provided by the pre-stressing component.

[0005] According to the piezoelectric drive device described in some embodiments of this specification, the pre-stressing member is a deformation block, which includes a plurality of first parts that abut against the piezoelectric module, and a second part connected to the first parts; the force-applying member is configured to apply a first force to the second part of the deformation block or to detach from the deformation block; wherein the deformation block is configured to: be able to deform based on the first force, so that the thrust of the first part on the piezoelectric module changes, so as to increase or decrease the first pre-stressing force between the driving end of the driving member and the corresponding mover.

[0006] According to the piezoelectric driving device described in some embodiments of this specification, each driving module is provided with two piezoelectric modules; the deformation block includes four first portions, and the four first portions respectively abut against four piezoelectric modules.

[0007] According to the piezoelectric drive device described in some embodiments of the present specification, the pre-stressing component includes: a moving block, one end of the moving block abuts against the piezoelectric module, and the other end of the moving block has a first driving inclined surface; a driving block, the driving block has a second driving inclined surface matching the first driving inclined surface and is movably connected to the moving block; the force-applying component is configured to be able to apply at least a second force to the driving block; wherein, the moving block and the driving block are configured such that: the driving block can change the thrust of the moving block on the piezoelectric module based on the second force, so as to increase or decrease the second pre-stressing force between the driving end of the driving component and the corresponding mover.

[0008] According to the piezoelectric drive device described in some embodiments of the present specification, each of the drive modules is provided with two piezoelectric modules; the pre-stressing component includes a drive block, and the second drive inclined surface is provided at both ends of the drive block; the pre-stressing component includes two moving blocks, each of the moving blocks has two moving block ends and one first drive inclined surface, and the four moving block ends respectively abut against the four piezoelectric modules, and each first drive inclined surface corresponds to one second drive inclined surface; or, the pre-stressing component includes four moving blocks, each of the moving blocks has one moving block end and one first drive inclined surface, and the four moving block ends respectively abut against the four piezoelectric modules, and the first drive inclined surfaces of the two moving blocks in the same drive module correspond to one second drive inclined surface.

[0009] According to some embodiments of the present specification, the piezoelectric drive device further includes: a base for arranging the drive mechanism and the linear guide mechanism; a beam provided above the base, the two linear guide mechanisms and the two drive modules being respectively provided on both sides of the beam; wherein the pre-stressing member is provided below the beam, the force-applying member is provided on the beam, the end of the force-applying member passes through the beam and abuts against the pre-stressing member, and the force-applying member is slidably connected or threadedly connected to the beam.

[0010] According to the piezoelectric driving device described in some embodiments of this specification, the driving module includes two piezoelectric modules, and the driving component includes a first accommodating space, a second accommodating space and two fixing components for accommodating the piezoelectric modules; the fixing components are fixedly arranged in the first accommodating space and the second accommodating space, and the fixing components are arranged to pass through in the direction toward the mover, and one piezoelectric module is arranged in each of the fixing components; the fixing components can limit the piezoelectric module to move only in the pre-pressure direction.

[0011] According to the piezoelectric drive device described in some embodiments of this specification, each drive module in the drive component is correspondingly provided with: a base, the drive end, a partition connecting the base and the drive end, and two side plates connecting the base and the drive end; the side plates are located on both sides of the partition, the first accommodating space is formed between one side plate and the partition, and the second accommodating space is formed between the other side plate and the partition, and the fixing parts are respectively connected to the partition and the side plates.

[0012] According to the piezoelectric drive device described in some embodiments of this specification, a cross roller is provided between the stator and the mover; the mover has a friction surface on the side facing the driving end, and the friction surface is provided by at least a portion of the surface of the mover and / or provided by a friction plate fixed on the surface of the mover.

[0013] The beneficial effects that may be brought about by the embodiments of this specification include but are not limited to: (1) two movers are driven respectively by two driving modules to provide a greater driving force based on two powered movers, and the driving is more stable; (2) the arrangement of the driving mechanism and the linear guide mechanism saves the size of the piezoelectric driving device in its arrangement plane; (3) the pre-pressure adjustment mechanism can be used to adjust the pre-pressure of the driving module on the mover to achieve more efficient driving; (4) the force-applying member can be arranged in a different plane from the driving member to further save the size of the piezoelectric driving device in its arrangement plane; (5) only one force-applying member is required to synchronously provide pre-pressure to the piezoelectric modules on both sides, so as to further save the size of the piezoelectric driving device in its arrangement plane; (6 ) The prestressing member can provide prestress to the piezoelectric modules on both sides synchronously in the form of deformation of the prestressing member or partial displacement of the prestressing member; (7) The fixed component can limit the direction of elongation or shortening of the piezoelectric module to prevent the change of the extension direction due to bending and affect the drive; (8) The structure of the base and the beam provides a compact overall frame; (9) The deformation direction of the deformation block is limited by the beam to avoid warping of the deformation block, so that the deformation of the deformation block can effectively act on the piezoelectric module to provide prestressing; (10) The displacement direction of the driving block is limited by the beam, so that the driving block can provide the same component force to the moving blocks on both sides without center offset; (11) The displacement direction of the moving block is limited by the beam, so that the thrust of the moving block can be correctly transmitted to the piezoelectric module.

[0014] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other possible beneficial effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] This specification will be further described in the form of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. The same numbers in the drawings represent the same structures or steps.

[0016] Figure 1 is a schematic diagram of a piezoelectric drive device according to some embodiments of this specification.

[0017] Figure 2 Schematic diagram of a pre-pressure adjustment mechanism of a piezoelectric drive device according to some embodiments of this specification.

[0018] Figure 3 Schematic diagram of a pre-pressure adjustment mechanism of a piezoelectric drive device according to another embodiment of the present specification.

[0019] Figure 4 yes Figure 3 A partial enlarged schematic diagram.

[0020] Figures 5 to 7 This is a schematic diagram of the arrangement of the stator, mover, driving end, and pre-stress direction of the piezoelectric driving device shown in some embodiments of this specification.

[0021] Markings in the figure: 1 driving mechanism; 11 driving module; 12 driving member; 120 driving end; 121 base; 122 partition; 1221 boss; 123 side plate; 1231 groove; 13 piezoelectric module; 130 notch; 131 first piezoelectric module; 132 second piezoelectric module; 2 linear guide mechanism; 21 stator; 211 fixing bolt; 212 limit screw; 22 mover; 23 cross roller bearing; 3 preload adjustment mechanism; 31 deformation block; 311 first part; 312 second part; 32 force member; 33 moving block; 331 first driving inclined surface; 332 moving block end; 34 driving block; 341 second driving inclined surface; 41 base; 42 beam. DETAILED DESCRIPTION

[0022] To more clearly illustrate the technical solutions of the embodiments of this specification, the embodiments will be described in detail below with reference to the accompanying drawings. Obviously, the following descriptions are some examples or embodiments of this specification, and those skilled in the art can apply the technical solutions or methods disclosed in this specification to other scenarios based on these technical contents without inventive effort.

[0023] It should be understood that the terms "system," "device," "equipment," "portion," and / or "component," "unit," and / or "module" used in this specification are a method for distinguishing different components, elements, parts, portions, or assemblies at different levels. However, if other terms can achieve the same purpose, the terms may be replaced by other expressions.

[0024] Unless otherwise specified, technical terms used in this specification to describe components, elements, and the like do not necessarily refer to the singular but may include the plural. Generally speaking, terms such as "include" and "comprising" only indicate the inclusion of the steps, elements, or components specifically identified, and these steps, elements, and components do not constitute an exclusive list. For example, the method or device being described may also include other steps or components.

[0025] In the description of this specification, it should be understood that the descriptions involving directions, such as up, down, front, back, left, and right, and the directions or positional relationships indicated are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on this application. In the description of this specification, unless otherwise expressly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meaning of the above terms in this specification in combination with the specific content of the technical solution.

[0026] In some embodiments, a piezoelectric actuator can utilize the inverse piezoelectric effect of piezoelectric materials to convert electrical energy into mechanical energy, thereby achieving motion output. In some embodiments, when a given voltage is applied to a piezoelectric element (e.g., a piezoelectric module made from piezoelectric material) of the piezoelectric actuator, the piezoelectric element deforms, which is then received by a mechanical converter and converted into rotational or linear motion.

[0027] The piezoelectric drive device may include a rotary piezoelectric drive device and a linear piezoelectric drive device. In some embodiments, the linear piezoelectric drive device may be a stick-slip piezoelectric drive device, which may include a linear guide mechanism and a drive module for driving the linear guide mechanism.

[0028] In some related embodiments, a linear guide mechanism of a linear piezoelectric actuator may include a stator fixed along a predetermined direction and a mover movable in the predetermined direction, wherein a drive module of the linear piezoelectric actuator drives the mover to move along the stator. For example, a single linear piezoelectric actuator operates by driving one mover via one drive module. A single linear piezoelectric actuator can provide relatively low driving force and low stability.

[0029] The piezoelectric driving device provided in one or more embodiments of this specification, wherein a single piezoelectric driving device drives two movers to work respectively through two driving modules, can provide a larger driving force and a more stable driving force. Figure 1 is a schematic diagram of a piezoelectric drive device according to some embodiments of this specification, see Figure 1 As shown, in some embodiments, the piezoelectric drive device may include: a drive mechanism 1 and linear guide mechanisms 2 respectively provided on both sides of the drive mechanism 1, wherein the linear guide mechanisms 2 include a stator 21 and a mover 22 slidably connected to the stator 21 and driven by the drive mechanism 1. The drive mechanism 1 drives the movers 22 in the two linear guide mechanisms 2 to move in a direction preset by the linear guide mechanisms 2, for example, the movers 22 move along the extension direction of the stator 21. In some embodiments, the movers 22 may be Figure 1 Movement in a roughly up and down direction.

[0030] In some embodiments, the stator 21 may be a stator guide rail, and the mover 22 may be a mover slider that slides along the stator guide rail. For example, the mover slider may be in the shape of a long strip. In some embodiments, the stator guide rail may be fixedly arranged, and the mover slider may be fitted to the stator guide rail by applying a pre-pressure to the mover slider. In some embodiments, the thickness of the mover 22 (e.g., Figure 1 The thickness in the vertical direction can be 2-15 mm, for example, 2 mm, 5 mm, 7.5 mm, 8.8 mm, 12 mm, 14 mm, and 15 mm.

[0031] In some embodiments, a linear bearing for converting sliding friction into rolling friction may be provided between the mover 22 and the stator 21. For example, the linear bearing may be a cross roller bearing 23, which may include cross rollers provided between the mover 22 and the stator 21.

[0032] In some embodiments, the cross roller bearing 23 may include a retainer, and a first roller and a second roller disposed on the retainer, and the first roller and the second roller may be the aforementioned cross rollers. In some embodiments, the retainer may be a plate-like structure, and the retainer may be provided with holes for retaining the first roller and the second roller. In some embodiments, there is a gap between the multiple holes on the retainer to maintain the interval between the first roller and the second roller. In some embodiments, the retainer may be a sliding plate, and the two sides of the sliding plate are in sliding contact with the stator 21 and the mover 22 respectively. In some embodiments, the first roller and the second roller may be arranged alternately. In some embodiments, the axis of the first roller and the axis of the second roller may be arranged in a cross-shaped manner along the direction of the retainer, and due to the mutual support between the first roller and the second roller, the cross roller guide can withstand large lateral forces and overturning. In some embodiments, the first roller and the second roller may be cylindrical rollers or tapered rollers. Taking cylindrical rollers as an example, the stator 21 can have a stator raceway groove that matches the outer circumferential surface of the first roller (i.e., its working surface) and the end face of the second roller, and the mover 22 can have a mover raceway groove that matches the end face of the first roller and the outer circumferential surface of the second roller (i.e., its working surface).

[0033] In one or more embodiments of the present specification, the driving mechanism 1 of the piezoelectric drive device includes two driving modules 11, each of which drives two movers 22. In some embodiments, the two driving modules 11 can be arranged symmetrically (e.g., mirror-image symmetry with respect to a parallel line midway between the two movers 22, where the parallel line is the locus of points equidistant from the two parallel movers 22). In other embodiments, the two driving modules 11 can be arranged in an interlaced manner.

[0034] In some embodiments, the two drive modules 11 can operate synchronously to synchronously drive the two movers 22 to move synchronously. In some embodiments, the driven component, such as a plate-like structure carrying various devices, can be fixedly connected to the two movers 22. The synchronous movement of the two movers 22 drives the plate-like structure to move, thereby applying a greater driving force to the plate-like structure.

[0035] In some embodiments, the drive module 11 includes a drive member 12 and a piezoelectric module 13. The drive member 12 has a drive end 120 that abuts against the mover 22. The piezoelectric module 13 is connected to the drive member 12. The piezoelectric module 13 deforms the drive member 12 to drive the mover 22 to move along a predetermined direction of the linear guide mechanism 2.

[0036] In some embodiments, the deformation of the drive member 12 causes the drive end 120 to displace, for example, by deflection / rotation. Exemplarily, the deformation of the drive member 12 allows the drive end 120 to move in a first direction to generate displacement in a first phase, and to return to its original position in a second phase by moving in a second direction opposite the first direction. In some embodiments, the drive member 12 may be a flexible drive member, and the drive member 12 may be made of a material such as an aluminum alloy, a titanium alloy, or stainless steel. The flexibility of the drive member 12 may include structural flexibility, such as by providing one or more grooves 1231 on the sidewall of the drive member 12 to provide flexibility.

[0037] In some embodiments, the driving end 120 slowly deflects in the first direction in the first stage to cause displacement, thereby driving the mover 22 in the first direction through static friction. In the first stage, no relative displacement occurs between the driving end 120 and the mover 22. In some embodiments, the driving end 120 rapidly deflects in the second direction in the second stage to cause displacement. Because the mover 22 has the inertia to move in the first direction or to remain stationary, the mover 22 maintains its current position, and the driving end 120 returns to its original position. In the second stage, relative displacement occurs between the driving end 120 and the mover 22. In some embodiments, the piezoelectric module 13 slowly extends in the first stage in response to electrical signal stimulation (e.g., an asymmetric sawtooth waveform signal) based on the piezoelectric effect and rapidly shortens in the second stage. During the slow extension of the piezoelectric module 13, static friction is generated between the driving end 120 and the mover 22, and the driving end 120 applies a gradually increasing oblique pressure to the mover 22. This oblique pressure can be decomposed into a positive pressure based on the normal direction of the mover 22 and a friction driving force based on the tangential direction of the mover 22. As the normal positive pressure gradually increases, the friction driving force also gradually increases, thereby increasing the output characteristics of the mover 22 in the "stick" phase of the stick-slip effect. During the rapid contraction of the piezoelectric module 13, dynamic friction is generated between the driving end 120 and the mover 22, and the driving end 120 returns to its initial position. In some embodiments, the first and second stages can be repeated to achieve continuous movement of the mover 22.

[0038] In some embodiments, when the aforementioned electrical signal excitation (eg, an asymmetric sawtooth waveform signal) is inputted into the piezoelectric module 13 in reverse, the mover 22 can be caused to continuously move in the opposite direction.

[0039] In some embodiments, the driving end 120 may directly abut the mover 22, or may abut other structures fixed to the mover 22. In some embodiments, the side of the mover 22 facing the driving end 120 may have a friction surface, the friction surface being provided by at least a portion of the surface of the mover 22, and the driving end 120 abuts against the friction surface of the mover 22. Exemplarily, the friction surface may be a rough portion of the surface of the mover 22, such as knurling. In other embodiments, a friction plate is fixed to the side of the mover 22 facing the driving end 120, the friction plate providing the friction surface, and the driving end 120 abuts against the friction surface on the friction plate. In some embodiments, the friction plate may be made of ceramic, fiberglass, or semi-metal friction materials.

[0040] In some embodiments, the driving end 120 abuts against the mover 22 and provides the aforementioned pre-pressure to the mover 22. Figure 5 As shown, in some embodiments, the pre-pressure direction provided by the driving end 120 to the mover 22 is ( Figure 5The direction indicated by the arrow in the middle) can be perpendicular to the sliding surface between the mover 22 and the stator 21 (for example Figure 5 The direction of the load force on the mover 22 (i.e., the direction of the gravity of the driven component on the mover 22, such as a plate-like structure carrying various devices) is parallel to the sliding surface between the mover 22 and the stator 21. In this embodiment, see Figure 5 As shown, the driving end 120, the mover 22, and the stator 21 are disposed on the same substantially horizontal surface. In this embodiment, the load force is primarily borne by the mover 22, and the driving end 120 does not need to resist the load force. Therefore, the driving end 120 can drive the mover 22 by providing a small lateral driving force. However, in order to provide a positive pressure between the driving end 120 and the mover 22 and to provide a positive pressure to maintain the mover 22 on the stator 21, the driving end 120 needs to provide a large preload force on the mover 22.

[0041] See also Figure 6 As shown, in other embodiments, the direction of the pre-pressure provided by the driving end 120 to the mover 22 is ( Figure 6 The direction indicated by the arrow in the middle) can be parallel to the sliding surface between the mover 22 and the stator 21 (for example Figure 6 The direction of the load force on the mover 22 (i.e., the direction of the gravity of the driven component on the mover 22, such as a plate-like structure carrying various devices) is perpendicular to the sliding surface between the mover 22 and the stator 21. In this embodiment, see Figure 6 As shown, the stator 21 is disposed on a substantially horizontal surface, the mover 22 is slidably disposed on the stator 21, and the driving end 120 is disposed on one side of the mover 22. In this embodiment, the load force is shared by the mover 22 and the stator 21. The driving end 120 can provide a certain preload force to the mover 22 (the driving end 120 does not need to provide a positive pressure to maintain the mover 22 on the stator 21) and a relatively small driving force (the driving end 120 does not bear the load force, so the friction between the driving end 120 and the mover 22 is not increased) to drive the mover 22 to operate; however, the preload force provided by the driving end 120 to the mover 22 is a lateral force, so it is necessary to further arrange an additional limiting structure, such as a track, on the mover 22 to prevent the mover 22 from deviating relative to the stator 21.

[0042] See also Figure 7 As shown, in some related embodiments, the direction of the pre-pressure provided by the driving end 120 to the mover 22 is ( Figure 7 The direction indicated by the arrow in the middle) can be parallel to the sliding surface between the mover 22 and the stator 21 (for example Figure 7The direction of the load force on the mover 22 (i.e., the direction of the gravity of the driven component on the mover 22, such as a plate-like structure carrying various devices) is also parallel to the sliding surface between the mover 22 and the stator 21. In this embodiment, see Figure 7 As shown, the stator 21 is disposed on a substantially vertical surface, the mover 22 is slidably disposed on one side of the stator 21, and the driving end 120 is disposed below the mover 22. In this embodiment, the load force is shared by the mover 22 and the driving end 120. The direction of the load force is opposite to the direction of the preload provided by the driving end 120. The load force helps the driving end 120 achieve a preload effect, so the driving end 120 can provide a relatively small preload to the mover 22. However, since the positive pressure between the driving end 120 and the mover 22 increases based on the sum of the preload and the load force, the friction between the driving end 120 and the mover 22 also increases accordingly. Therefore, the driving end 120 needs to provide a relatively large lateral driving force to drive the mover 22 to move.

[0043] In one or more embodiments of the present specification, the deformation of the driving member 12 is caused by the deformation of the piezoelectric module 13. In some embodiments, the driving module 11 includes two piezoelectric modules 13. Figure 2 As shown, the two piezoelectric modules 13 can be arranged in parallel or approximately parallel, and the two piezoelectric modules 13 can be perpendicular or approximately perpendicular to the mover 22. In some embodiments, the two piezoelectric modules 13 of the same driving module 11 can include a first piezoelectric module 131 and a second piezoelectric module 132. The deformation of the first piezoelectric module 131 and / or the second piezoelectric module 132 causes the deformation of the driving member 12, thereby achieving displacement of the mover 22 in the first direction or the second direction.

[0044] The mover 22 moves in the first direction A (eg Figure 2 Taking displacement in a generally upward direction (in the middle) as an example, in the first stage, the first piezoelectric module 131 extends toward the mover 22, while the second piezoelectric module 132 remains unchanged or shortens, causing the driving end 120 to deflect in the first direction A. Static friction drives the mover 22, thereby achieving displacement of the mover 22 in the first direction A. In the second stage, the first piezoelectric module 131 shortens away from the mover 22, while the second piezoelectric module 132 remains unchanged or extends, causing the driving end 120 to rapidly deflect in the second direction B. Relative sliding occurs between the driving end 120 and the mover 22, thereby returning the driving end 120 to its original position and maintaining the position of the mover 22. The first and second stages are repeated to continuously move the mover 22 in the first direction A.

[0045] The mover 22 moves in the second direction B (eg Figure 2Taking displacement in a generally downward direction (in the middle) as an example, in the first stage, the second piezoelectric module 132 extends toward the mover 22, while the first piezoelectric module 131 remains unchanged or shortens, thereby causing the driving end 120 to deflect in the second direction B. Static friction drives the mover 22, thereby achieving displacement of the mover 22 in the second direction B. In the second stage, the second piezoelectric module 132 shortens away from the mover 22, while the first piezoelectric module 131 remains unchanged or extends, thereby causing the driving end 120 to rapidly deflect in the first direction A. Relative sliding occurs between the driving end 120 and the mover 22, thereby returning the driving end 120 to its original position and maintaining the position of the mover 22. The first and second stages are repeated to continuously move the mover 22 in the second direction B.

[0046] In one or more embodiments of the present specification, the driving member 12 includes a first accommodating space, a second accommodating space and two fixing components for accommodating the piezoelectric module 13. The first accommodating space and the second accommodating space are used to accommodate the piezoelectric module 13. Fixed components are fixedly arranged in the first accommodating space and the second accommodating space. The fixed components are arranged through in the direction toward the mover 22. A piezoelectric module 13 is arranged in each fixed component. The fixed components can limit the piezoelectric module 13 to move only in the pre-pressure direction.

[0047] In some embodiments, the piezoelectric module 13 is made of a piezoelectric material such as piezoelectric ceramic. Exemplarily, the piezoelectric module 13 may include multiple piezoelectric sheets bonded together by an adhesive or by molten metal. In some embodiments, gaps of varying widths exist between the piezoelectric sheets. When the piezoelectric sheets deform, these gaps partially absorb the deformation. In other words, the deformation of the piezoelectric sheets first fills these gaps, and only then does the piezoelectric module 13 exhibit an elongation or contraction deformation. Therefore, in some embodiments, it is necessary to apply a certain preload to the piezoelectric module 13. This preload can significantly reduce the gaps between the piezoelectric sheets, improve deformation efficiency, and significantly enhance the performance and lifespan of the piezoelectric actuator. On the other hand, in a stick-slip piezoelectric actuator, the mover moves under the action of static friction. In this case, the preload can effectively provide static friction between the mover and the drive mechanism. Continuing with the previous example, the preload direction refers to the direction in which the preload is applied to the piezoelectric module 13. In one or more embodiments of this specification, the preload direction may be from the piezoelectric module 13 toward the mover 22.

[0048] The fixing member can be understood as a shell that is mounted on the outside of the piezoelectric module 13 and is penetrated at both ends. In some embodiments, the shape of the fixing member can match the shape of the piezoelectric module 13, and the fixing member can be flexible. In some embodiments, the fixing member allows the piezoelectric module 13 to move in the direction toward or away from the mover 22 (for example, Figure 2The piezoelectric module 13 is configured to extend or shorten in a direction perpendicular to the mover 22 while limiting the movement of the piezoelectric module 13 in other directions.

[0049] In one or more embodiments of the present specification, each driving module 11 in the driving member 12 is correspondingly provided with: a base 121, a driving end 120, a partition 122 connecting the base 121 and the driving end 120, and two side panels 123 connecting the base 121 and the driving end 120. The side panels 123 are located on both sides of the partition 122. A first accommodation space is formed between one side panel 123 and the partition 122, and a second accommodation space is formed between the other side panel 123 and the partition 122. The fixing components are respectively connected to the partition 122 and the side panels 123. In some embodiments, the side panels 123 limit the position of the piezoelectric module 13, and the partition 122 separates the two piezoelectric modules 13, such as the first piezoelectric module 131 and the second piezoelectric module 132, to prevent the two piezoelectric modules 13 from interfering with each other. In some embodiments, the driving end 120 provides an abutment portion with the piezoelectric module 13, allowing the piezoelectric module 13 to apply force to the driving end 120 when stimulated by an electrical signal (e.g., an asymmetric sawtooth waveform signal). In some alternative embodiments, the end of the piezoelectric module 13 can be fixed to the driving end 120.

[0050] See also Figure 1 、 Figure 3 As shown, in some embodiments, one or more grooves 1231 may be formed on the side panel 123. For example, the grooves 1231 may be located on the same side of the side panel 123 or on both sides of the side panel 123. The grooves 1231 reduce the material of the side panel 123 to achieve structural flexibility at some locations.

[0051] See also Figure 1 、 Figure 2 As shown, in some embodiments, the piezoelectric module 13 may include a notch 130 , and the partition 122 may include a boss 1221 matching the notch 130 . The notch 130 may be locked at the boss 1221 to limit the piezoelectric module 13 .

[0052] In some embodiments, a friction plate may be provided at the position where the driving end 120 contacts the mover 22. In some embodiments, the friction plate may be made of ceramic, glass fiber, or semi-metal friction materials.

[0053] One or more embodiments of the present specification further include: a pre-stress adjustment mechanism 3, the pre-stress adjustment mechanism 3 is used to provide pre-stress to reduce the gap between the piezoelectric sheets of the piezoelectric module 13. In some embodiments, the pre-stress provided by the pre-stress adjustment mechanism 3 can also be used to make the mover 22 fit against the stator 21 so that the mover 22 can move along the stator 21. The pre-stress adjustment mechanism 3 includes a pre-stress component and a force component 32. The pre-stress component is against the piezoelectric module 13, and the force component 32 can apply force to deform or partially displace the pre-stress component to provide a pre-stress between the driving end 120 of the driving component 12 and its corresponding mover 22. The force direction of the force component 32 intersects with the pre-stress direction provided by the pre-stress component. In some embodiments, the force direction of the force component 32 and the pre-stress direction provided by the pre-stress component can be perpendicular.

[0054] Continuing with the previous example, a pre-stressing member is used to provide pre-stress to the piezoelectric module 13. In some embodiments, the piezoelectric module 13 abuts the pre-stressing member in the operating state and, when stimulated by an electrical signal (e.g., an asymmetric sawtooth waveform signal), applies force to the driving end 120 to deform the driving end 120. The force-applying member 32 is used to apply force to the pre-stressing member so that the pre-stressing member abuts a surface of the piezoelectric module 13, such as an end or a portion of the end. The abutment of the pre-stressing member against the surface of the piezoelectric module 13 can be achieved through deformation of the pre-stressing member, through joint deformation of the pre-stressing member and the force-applying member 32, or through overall displacement of the pre-stressing member.

[0055] In some embodiments, the preload provided by the preload component may further include a preload provided to the driving end 120 by the piezoelectric module 13 so that the driving end 120 abuts against the mover 22. Based on this, the friction between the driving end 120 and the mover 22 can be adjusted by adjusting the preload according to actual working requirements. That is, within a certain range, the greater the friction between the driving end 120 and the mover 22, the greater the unit stroke range, speed, and thrust obtained by the mover 22. If the preload exceeds a certain range, the friction between the driving end 120 and the mover 22 will be too great, and the stick-slip effect cannot be generated, so that the linear piezoelectric drive device cannot operate normally.

[0056] See also Figure 1 、 Figure 2 As shown, Figure 1 、 Figure 2The present invention illustrates a pre-stressing member and a force-applying member 32 that primarily utilize deformation as a working principle in one or more embodiments. In some embodiments, the pre-stressing member may include a deformable block 31, which includes a plurality of first portions 311 that abut against the piezoelectric module 13, and a second portion 312 connected to the first portion 311. The force-applying member 32 is configured to apply a first force to the second portion 312 of the deformable block 31 or to disengage from the deformable block 31. The deformable block 31 is configured to deform based on the first force, thereby changing the thrust of the first portion 311 on the piezoelectric module 13, thereby increasing or decreasing the first pre-stressing force between the driving end 120 of the driving member 12 and its corresponding mover 22.

[0057] In some embodiments, see Figure 2 As shown, the force-applying member 32 moves downward against the surface of the deformable block 31. The force-applying member 32 further moves downward to compress the deformable block 31. The deformable block 31 is deformed and stretched to the sides under pressure, thereby pushing the piezoelectric modules 13 on both sides to move to the sides, respectively, thereby increasing the first preload between the piezoelectric modules 13 and their corresponding movers 22. In some embodiments, the action of the force-applying member 32 and the deformation of the deformable block 31 are synchronously deformed and stretched to the sides, and the first preload between the piezoelectric modules 13 on both sides and their corresponding movers 22 is synchronously increased.

[0058] In some embodiments, the deformation block 31 may be made of elastic material, such as rubber.

[0059] In some embodiments, the multiple first parts 311 of the deformation block 31 are against the piezoelectric module 13, and the force-applying component 32 applies a first force to the second part 312. The second part 312 is deformed to cause the first part 311 to displace or deform along with the deformation of the second part 312, thereby achieving a change in the first pre-pressure.

[0060] In some embodiments, each driving module 11 is provided with two piezoelectric modules 13, and the deformation block 31 includes four first portions 311, which respectively abut against the four piezoelectric modules 13. In some embodiments, the deformation block 31 is generally I-shaped.

[0061] In some embodiments, the thickness of the second portion 312 is greater than that of the first portion 311 to ensure that the deformation of the second portion 312 expands toward both sides and to avoid warping of the first portion 311 due to the deformation of the second portion 312 as much as possible.

[0062] See also Figure 3 、 Figure 4 As shown, Figure 3 、 Figure 4The figure shows a pre-stressing member and a force-applying member 32 that mainly work on the principle of displacement in one or more embodiments. In some embodiments, the pre-stressing member includes: a moving block 33 and a driving block 34, one end of the moving block 33 is against the piezoelectric module 13, the other end of the moving block 33 is provided with a first driving inclined surface 331, the driving block 34 is provided with a second driving inclined surface 341 that matches the first driving inclined surface 331, and the driving block 34 is movably connected to the moving block 33. The force-applying member 32 is configured to be able to apply at least a second force to the driving block 34. The moving block 33 and the driving block 34 are configured so that the driving block 34 can change the thrust of the moving block 33 on the piezoelectric module 13 based on the second force, so as to increase or decrease the second pre-stressing force between the driving end 120 of the driving member 12 and its corresponding mover 22.

[0063] In some embodiments, see Figure 4 As shown, the force member 32 moves downward against the surface of the driving block 34. The force member 32 further moves downward to push the driving block 34. Based on the cooperation between the second driving inclined surface 341 and the first driving inclined surface 331, the driving block 34 converts the downward second force provided by the force member 32 into a component force toward both sides (i.e., a thrust that pushes the moving block 33 to move). This causes the moving blocks 33 on both sides to move toward both sides, thereby pushing the piezoelectric modules 13 on both sides to move toward both sides, thereby increasing the second pre-pressure between the piezoelectric modules 13 and their corresponding movers 22. In some embodiments, the force member 32 pushes the driving block 34, and the driving block 34 synchronously pushes the two moving blocks 33. The two moving blocks 33 move toward both sides synchronously, and the second pre-pressure between the piezoelectric modules 13 on both sides and their corresponding movers 22 is synchronously increased.

[0064] In some embodiments, each driving module 11 is provided with two piezoelectric modules 13. The pre-stressing member includes a driving block 34, each end of which is provided with a second driving inclined surface 341. Furthermore, the pre-stressing member includes two moving blocks 33, each of which has two moving block ends 332 and a first driving inclined surface 331. The four moving block ends 332 respectively abut against the four piezoelectric modules 13, and each first driving inclined surface 331 corresponds to a second driving inclined surface 341. In some embodiments, both moving blocks 33 are C-shaped, and the two moving blocks 33 and the driving block 34 are collectively I-shaped. In some embodiments, one of the second driving inclined surfaces 341 of the driving block 34 is driven to move by the first driving inclined surface 331 of one moving block 33, while the other second driving inclined surface 341 of the driving block 34 is driven to move by the first driving inclined surface 331 of the other moving block 33. In some embodiments, the two moving blocks 33 are arranged symmetrically, and the two second driving inclined surfaces 341 of the driving blocks 34 are also arranged symmetrically, so as to drive the two moving blocks 33 to move synchronously.

[0065] In other embodiments, each driving module 11 is provided with two piezoelectric modules 13, and the pre-stressing member includes a driving block 34, each end of which is provided with a second driving inclined surface 341. Furthermore, the pre-stressing member includes four moving blocks 33, each of which has a moving block end 332 and a first driving inclined surface 331. The four moving block ends 332 respectively abut against the four piezoelectric modules 13. The first driving inclined surfaces 331 of the two moving blocks 34 in the same driving module 11 correspond to one second driving inclined surface 341. In some embodiments, the longitudinal cross-sections of the four moving blocks 33 are all trapezoidal or triangular, and the four moving blocks 33 and the driving block 34 are generally I-shaped. In some embodiments, one of the second driving inclined surfaces 341 of the driving block 34 drives the movement of the two moving blocks 33 via their respective first driving inclined surfaces 331, and the other second driving inclined surface 341 of the driving block 34 drives the movement of the other two moving blocks 33 via their respective first driving inclined surfaces 331. In some embodiments, two moving blocks 33 are located on one side of the driving block 34, and the other two moving blocks 33 are located on the other side of the driving block 34. The four moving blocks 33 are arranged symmetrically in pairs relative to the driving block 34, and the two second driving inclined surfaces 341 of the driving block 34 are also arranged symmetrically to drive the four moving blocks 33 to move synchronously.

[0066] In some related technologies, to achieve greater driving force, two independent piezoelectric actuators, such as stick-slip linear piezoelectric actuators, can be deployed to drive the same plate-like structure carrying various devices. Synchronous driving of the two independent piezoelectric actuators, for example, by simultaneously providing the same control signal, can drive the plate-like structure. However, two independent piezoelectric actuators take up considerable space and, furthermore, each requires its own independent preload adjustment mechanism to provide preload to its respective piezoelectric module.

[0067] In some related technologies, the arrangement direction of the pre-stress adjustment mechanism is consistent with the direction of providing the pre-stress, for example, the pre-stress adjustment mechanism is arranged in the same plane as the drive module and the linear guide mechanism. For example, in some related technologies, the pre-stress adjustment mechanism may include an adjustment rod or an adjustment bolt connected to the drive module, and the adjustment rod or the adjustment bolt is arranged in the same plane as the drive module and the linear guide mechanism, occupying a large space. In addition, the piezoelectric drive device not only needs to provide arrangement space for the adjustment rod and the adjustment bolt, but also needs to reserve space for the user to operate the adjustment rod and the adjustment bolt in the same plane, thereby making the size of the piezoelectric drive device in the axial direction of the adjustment rod or the adjustment bolt too large, and cannot adapt to the installation requirements of a narrow environment.

[0068] In one or more embodiments of this specification. Figure 1 、 Figure 2One or more embodiments shown, or as Figure 3 、 Figure 4 In one or more embodiments shown, pre-stress is simultaneously provided to the piezoelectric modules 13 on both sides by the deformation of the deformable block 31, or pre-stress is simultaneously provided to the piezoelectric modules 13 on both sides by the movement of the small-volume movable block 33. There is no need to arrange independent pre-stress adjustment mechanisms for each, thus saving space. In one or more embodiments of this specification, the user operates the deformable block 31 or the driving block 34 through the force-applying member 32. As mentioned above, the force-applying direction of the force-applying member 32 intersects (for example, is perpendicular) with the pre-stress direction provided by the pre-stressing member. Therefore, the force-applying member 32 can be arranged on a different plane from the deformable block 31 or the driving block 34. In other words, the force-applying member 32 can be arranged on a different plane from the driving module 11, for example, it can be arranged above the driving module 11, thereby further saving space in the plane size of the piezoelectric driving device.

[0069] In one or more embodiments of this specification, see Figure 1 As shown, the piezoelectric drive device further includes: a base 41 for arranging the drive mechanism 1 and the linear guide mechanism 2, and a beam 42 provided above the base 41, wherein the two linear guide mechanisms 2 and the two drive modules 11 are respectively provided on both sides of the beam 42.

[0070] In some embodiments, the base 41 can be made of materials such as aluminum alloy, titanium alloy, and stainless steel. In some embodiments, the base 41 can include a mover mounting surface for mounting the mover 22 and a stator mounting surface for mounting the stator 21. In some embodiments, the base 41 can be provided with stator mounting screw holes for connecting the stator 21 to the base 41. In some embodiments, the stator 21 is provided with guide rail fixing holes, and fixing bolts 211 pass through the guide rail fixing holes of the stator 21 and are threadedly connected to the stator mounting screw holes. Limit screws 212 are also provided at both ends of the stator 21. The base 41 can also be provided with drive module fixing screw holes for connecting the drive module 11 to the base 41.

[0071] In one or more embodiments of the present specification, the prestressing member is provided below the beam 42, and the beam 42 can limit the movement of the prestressing member in a direction perpendicular to the base 41. In the case where the prestressing member adopts the deformation block 31, the beam 42 can also limit the deformation direction of the deformation block 31, so that the deformation block 31 can be deformed toward or away from the mover 22, rather than warping upward or downward. In the case where the prestressing member adopts the moving block 33 and the driving block 34, the beam 42 can also limit the displacement direction of the moving block 33, so that the moving block 33 moves toward or away from the guide rail 22, rather than deflecting upward or downward. In addition, the beam 42 can also limit the movement of the driving block 34, so that the driving block 34 can move in a direction perpendicular to the base 41, so that the driving block 34 applies the same component force to the moving blocks 33 on both sides, thereby preventing the driving block 34 from deflecting to one side.

[0072] In one or more embodiments of the present specification, the force member 32 is provided on the beam 42, and the end of the force member 32 passes through the beam 42 and abuts against the pre-stressing member, such as the deformation block 31 or the driving block 34, and the force member 32 is slidably connected or threaded to the beam 42. In some embodiments, the force member 32 is slidably connected to the beam 42, and there is a large damping between the force member 32 and the beam to maintain its position. In some embodiments, the force member 32 is threadedly connected to the beam 42, and the force member 32 is rotated to move upward or downward relative to the beam 42 in a direction perpendicular to the base 41. As shown above, the force member 32 is arranged above the beam 42 to save space in the plane size of the piezoelectric drive device, for example, to reduce the size of the piezoelectric drive device in the plane. Figure 1 The width in the left and right directions.

[0073] While the basic concepts have been described above, it will be apparent to those skilled in the art that the detailed disclosure is merely illustrative and does not limit this specification. Although not explicitly stated herein, various modifications, improvements, and revisions to this specification may be made by those skilled in the art. Such modifications, improvements, and revisions are taught in this specification and remain within the spirit and scope of the exemplary embodiments of this specification.

Claims

1. A piezoelectric drive device, characterized in that: include: A driving mechanism and a linear guide mechanism respectively provided on both sides of the driving mechanism, wherein the linear guide mechanism includes a stator and a mover slidably connected to the stator and driven by the driving mechanism; The driving mechanism includes two driving modules, and the two driving modules respectively drive the two movers; The driving module includes: A driving member, wherein the driving member has a driving end portion, and the driving end portion abuts against the mover; A piezoelectric module is connected to the driving member, and the piezoelectric module causes the driving member to deform by deformation to drive the mover to move along a preset direction of the linear guide mechanism.

2. The piezoelectric drive device according to claim 1, wherein: Also includes: A pre-pressure adjustment mechanism, comprising a pre-pressure component and a force-applying component; The pre-stressing member abuts against the piezoelectric module, and the force applying member is capable of applying force to deform or partially displace the pre-stressing member, so as to provide a pre-stressing force between the driving end of the driving member and the corresponding mover; The force applying direction of the force applying member intersects with the pre-pressure direction provided by the pre-pressure member.

3. The piezoelectric drive device according to claim 2, wherein: The pre-pressing member is a deformation block, and the deformation block includes a plurality of first parts against the piezoelectric module and a second part connected to the first parts; The force applying member is configured to apply a first force to the second portion of the deformable block or to separate from the deformable block; The deformation block is configured to be deformable based on the first force, so that the thrust of the first part on the piezoelectric module changes, thereby increasing or decreasing the first preload between the driving end of the driving member and its corresponding mover.

4. The piezoelectric drive device according to claim 3, wherein: Each of the driving modules is provided with two piezoelectric modules; The deformation block includes four first parts, and the four first parts respectively abut against four piezoelectric modules.

5. The piezoelectric drive device according to claim 2, wherein: The pre-compression component comprises: a moving block, one end of which abuts against the piezoelectric module, and the other end of which is provided with a first driving inclined surface; a driving block, the driving block having a second driving inclined surface matching the first driving inclined surface and being movably connected to the moving block; The force applying member is configured to apply a second force to at least the driving block; The moving block and the driving block are configured such that the driving block can change the thrust of the moving block on the piezoelectric module based on the second force to increase or decrease the second preload between the driving end of the driving member and its corresponding mover.

6. The piezoelectric drive device according to claim 5, wherein: Each of the driving modules is provided with two piezoelectric modules; The pre-pressing member includes a driving block, and both ends of the driving block are provided with the second driving inclined surface; The pre-stressing component includes two moving blocks, each of which has two moving block ends and one first driving inclined surface, and the four moving block ends respectively abut against the four piezoelectric modules, and each first driving inclined surface corresponds to one second driving inclined surface; or, the pre-stressing component includes four moving blocks, each of which has one moving block end and one first driving inclined surface, and the four moving block ends respectively abut against the four piezoelectric modules, and the first driving inclined surfaces of the two moving blocks in the same driving module correspond to one second driving inclined surface.

7. The piezoelectric drive device according to claim 2, wherein: Also includes: A base for arranging the driving mechanism and the linear guide mechanism; A beam is provided above the base, and the two linear guide mechanisms and the two driving modules are respectively provided on both sides of the beam; The pre-stressing member is provided below the beam, the force applying member is provided on the beam, an end portion of the force applying member passes through the beam and abuts against the pre-stressing member, and the force applying member is slidably connected or threadedly connected to the beam.

8. The piezoelectric drive device according to claim 2, wherein: The driving module includes two piezoelectric modules, and the driving component includes a first accommodating space for accommodating the piezoelectric modules, a second accommodating space, and two fixing components; The fixing components are fixedly installed in the first accommodating space and the second accommodating space. The fixing components are arranged to penetrate in the direction toward the mover. A piezoelectric module is arranged in each of the fixing components. The fixing components can limit the piezoelectric module to move only in the pre-pressure direction.

9. The piezoelectric drive device according to claim 8, wherein: Each of the driving modules in the driving member is correspondingly provided with: a base, the driving end, a partition connecting the base and the driving end, and two side plates connecting the base and the driving end; The side plates are located on both sides of the partition plate. The first accommodation space is formed between one side plate and the partition plate, and the second accommodation space is formed between the other side plate and the partition plate. The fixing components are respectively connected to the partition plate and the side plates.

10. The piezoelectric driving device according to claim 1, wherein: A cross roller is provided between the stator and the mover; The mover has a friction surface on a side facing the driving end. The friction surface is provided by at least a portion of the surface of the mover and / or by a friction plate fixed on the surface of the mover.

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