Spraying unit, spraying device and photovoltaic material processing equipment

Abstract

The utility model discloses a spraying unit, a spraying device and photovoltaic material processing equipment. The spraying unit comprises a first plate, a first air supply structure, a second air supply structure, an air exhaust structure, a first air inlet pipeline, a second air inlet pipeline and an air exhaust pipeline. The first air supply structure and the air exhaust structure are annularly arranged at the bottom, and the first air supply structure, the air exhaust structure and the second air supply structure are sequentially distributed from the edge of the bottom to the inner side of the bottom. The first gas inlet pipeline is connected with the first plate and provides protective gas for the first gas supply structure. The second gas inlet pipeline is connected with the first plate and provides reaction gas with the second gas supply structure. The air exhaust pipeline is connected with the first plate and communicates with the air exhaust structure. According to the spraying unit, the gas extraction structure and the first gas supply structure are sequentially arranged on the outer side of the second gas supply structure, so that the protective gas surrounds the periphery of the reaction gas, and the gas extraction structure extracts redundant reaction gas, so that the risk that the reaction gas is diffused to the periphery is reduced.

Description

Technical Field

[0001] The present application relates to the field of photovoltaic manufacturing equipment, and in particular to a spray unit, a spray device and photovoltaic material processing equipment. Background Art

[0002] In the process of photovoltaic material production, it is necessary to convey the sheet material through two different reaction gases in sequence, so that one of the reaction gases first reacts with the surface of the sheet material to generate an intermediate product, and then the other reaction gas reacts with the intermediate product on the surface of the sheet material to generate a final product, thereby achieving the coating of the sheet material.

[0003] However, when one of the reaction gases is sprayed toward the sheet material, the reaction gas easily diffuses and directly contacts the other reaction gas to generate a granular final product, resulting in the problem that the granular final product contaminates the sheet material. Utility Model Content

[0004] In view of this, the present application provides a spray unit, which sprays the reaction gas while isolating the reaction gas, so as to solve the problem that the reaction gas diffuses around and directly contacts with another reaction gas to contaminate the sheet material.

[0005] The present application provides a spray unit comprising a first plate, a first air supply structure, a second air supply structure, an air extraction structure, a first air inlet duct, a second air inlet duct, and an air extraction duct. The first plate has a bottom and a top arranged opposite each other along a first direction. The first air supply structure and the air extraction structure are respectively arranged in a ring shape at the bottom. The first air supply structure, the air extraction structure, and the second air supply structure are sequentially arranged from the edge of the bottom toward the inner side of the bottom, perpendicular to the first direction. A first air inlet duct is connected to the first plate and communicates with the first air supply structure. The first air inlet duct is configured to supply a protective gas to the first air supply structure and eject the protective gas from the first air supply structure toward a sheet material. A second air inlet duct is connected to the first plate and communicates with the second air supply structure. The second air inlet duct is configured to supply a reactive gas to the second air supply structure and eject the reactive gas from the second air supply structure toward the sheet material. An air extraction duct is connected to the first plate and communicates with the air extraction structure. The air extraction duct is configured to extract air from the sheet material through the air extraction structure. The first direction is the thickness direction of the first plate.

[0006] In the above embodiment, the exhaust structure and the first gas supply structure are sequentially arranged outside the second gas supply structure so that the protective gas surrounds the reaction gas and the exhaust structure extracts excess reaction gas, thereby reducing the risk of the reaction gas diffusing to the surroundings.

[0007] In some embodiments, the first air supply structure includes a plurality of first holes spaced apart on the first plate, the first holes having two opposite ports, one port of each first hole respectively extending through the bottom along the first direction, and the other port of each first hole respectively communicating with the first air inlet duct. And / or the second air supply structure includes a plurality of second holes spaced apart on the first plate, the second holes having two opposite ports, one port of each second hole respectively extending through the bottom along the first direction, and the other port of each second hole respectively communicating with the second air inlet duct. And / or the exhaust structure includes an exhaust groove provided on the first plate, from the inner side of the bottom to the outer side of the bottom, the exhaust groove is located between the first hole and the second hole, the exhaust groove having two opposite ports, one port of the exhaust groove extending through the bottom along the first direction, and the other port of the exhaust groove communicating with the exhaust duct.

[0008] In some embodiments, the first air supply structure further includes a first cavity provided in the first plate, the first cavity being in communication with the first air inlet pipe and all the first holes, respectively, and the cross-sectional area of ​​the first cavity being greater than the cross-sectional area of ​​the first holes in a direction perpendicular to the first direction. And / or the second air supply structure further includes a second cavity provided in the first plate, the second cavity being in communication with the first air inlet pipe and all the second holes, respectively, and the cross-sectional area of ​​the second cavity being greater than the cross-sectional area of ​​the second holes in a direction perpendicular to the first direction. And / or the exhaust structure further includes a third cavity provided in the first plate, the third cavity being in communication with the exhaust pipe and the exhaust groove, respectively, and the cross-sectional area of ​​the third cavity being greater than the cross-sectional area of ​​the exhaust groove in a direction perpendicular to the first direction.

[0009] In some embodiments, the air extraction structure has two air extraction grooves, which are arranged on opposite sides of the second air supply structure along the second direction. The air extraction structure also includes a plurality of spaced air extraction holes, each of which has two ports opposite to each other along the first direction, one port of each air extraction hole extending through the bottom, and the other port of each air extraction hole communicating with an air extraction pipe. The plurality of air extraction holes are divided into two parts, and the air extraction holes of the two parts are arranged on opposite sides of the second air supply structure along the third direction. The air extraction holes and the air extraction grooves are arranged around the outside of the second air supply structure. The second direction is the width direction of the first plate, the third direction is the length direction of the first plate, and the first, second, and third directions are perpendicular to each other.

[0010] In some embodiments, the air extraction holes of each portion are distributed in an arc shape, and all the air extraction holes and the air extraction grooves together enclose an oblong shape.

[0011] In some embodiments, the second air supply structure also includes a first groove provided at the bottom, the first groove extending along the direction of all second hole spacings, and each second hole port away from the top is connected to the first groove, and in a direction perpendicular to the first direction, the cross-sectional area of ​​the first groove is greater than the cross-sectional area of ​​the second hole.

[0012] In some embodiments, there are two or more air extraction structures, and the two or more air extraction structures are disposed between the first air supply structure and the second air supply structure, and all the air extraction structures are spaced apart from the first air supply structure to the second air supply structure.

[0013] A spray device comprises a second plate and a spray unit as described above, wherein the second plate is provided with an installation space extending through the second plate along a first direction. There are at least two spray units, all of which are sequentially distributed along a second direction. The second gas supply structures of two adjacent spray units are configured to spray different reactive gases toward the sheet material. A portion of the first plate of each spray unit is disposed within the installation space. The second direction is the width of the first plate and is perpendicular to the first direction.

[0014] In some embodiments, the spray device further includes a first seal, the first seal being disposed between the first plate and the second plate and configured to seal the first plate and the second plate. Alternatively, the first seal being disposed between two adjacent first plates and configured to seal the two adjacent first plates.

[0015] A photovoltaic material processing apparatus comprises a reaction chamber, a conveying device, and a spraying device as described above. The conveying device is partially located within the reaction chamber and is configured to convey sheet material and sequentially pass the sheet material through the reaction chamber along a second direction. A spraying device is disposed within the reaction chamber and is disposed opposite the conveying device within the reaction chamber along a first direction, with a gap between the spraying device and the sheet material on the conveying device. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of photovoltaic material processing equipment provided in one embodiment of the present application.

[0017] Figure 2 for Figure 1 Schematic diagram of the nozzle group device.

[0018] Figure 3 for Figure 2 Schematic diagram of the working status of the spray device.

[0019] Figure 4 for Figure 2 Side view of the spray device.

[0020] Figure 5 for Figure 4 A magnified schematic diagram of point A in FIG.

[0021] Figure 6 for Figure 4 Schematic diagram of the spray device after being cut along the cutting line aa.

[0022] Figure 7 for Figure 6 An enlarged schematic diagram of point B.

[0023] Description of main component symbols

[0024] 100. Photovoltaic material processing equipment; 11. Reaction chamber; 12. Conveying device; 13. Spraying device; 130. Gap; 131. Second plate; 1310. Installation space; 132. Spraying unit; 1321. First plate; 1322. First air supply structure; 13221. First hole; 13222. First cavity; 1323. Second air supply structure; 13231. Second hole; 13232. Second cavity; 13233. First groove; 1324. Exhaust structure; 13241. Exhaust groove; 13242. Third cavity; 13243. Exhaust hole; 13244. Second groove; 1325. First air inlet duct; 1326. Second air inlet duct; 1327. Exhaust duct; X, first direction; Y, second direction; Z, third direction. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments.

[0026] It should be noted that when a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component. When a component is considered to be "disposed on" another component, it can be directly disposed on the other component or there may be an intermediate component. The terms "top," "upper," "lower," "front," "rear," and similar expressions used herein are for illustrative purposes only.

[0027] The terms "first", "second", etc. are only used to distinguish different objects and cannot be understood as indicating or implying relative importance or implying the quantity, specific order or primary and secondary relationship of the technical features indicated.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application pertains. The terms used herein in the specification of this application are for the purpose of describing specific embodiments only and are not intended to limit this application.

[0029] See also Figure 1The present application provides a photovoltaic material processing device 100, comprising a reaction chamber 11, a conveying device 12, and a spraying device 13. The conveying device 12 is partially located within the reaction chamber 11 and is used to convey a sheet material and pass the sheet material through the reaction chamber 11 along a second direction Y. The spraying device 13 is partially disposed within the reaction chamber 11, and the spraying device 13 is disposed opposite the conveying device 12 within the reaction chamber 11 along a first direction X. During operation, the spraying device 13 sprays two reaction gases toward the sheet material, causing one of the reaction gases to first react with the surface of the sheet material to produce an intermediate product, and then causing the other reaction gas to react with the intermediate product on the surface of the sheet material to produce a final product, thereby achieving film coating processing on the sheet material.

[0030] In addition, a gap 130 is provided between the spray device 13 and the conveying device 12 to form a reaction space for accommodating the sheet material, and to keep a certain distance between the spray device 13 and the sheet material to reduce the risk of the spray device 13 contacting the sheet material and damaging the sheet material.

[0031] In some embodiments, the sheet material is a silicon wafer, a battery wafer, etc.

[0032] In some embodiments, the reaction chamber 11 is vacuum-set to reduce the risk of reaction between the air in the reaction chamber 11 and the reaction gas sprayed from the spray device 13 .

[0033] In some embodiments, the conveying device 12 is a conveying device such as a conveyor belt, a plurality of conveying rollers arranged at intervals, or a magnetic fluid conveying device.

[0034] In some embodiments, the first direction X is a direction in which gravity is upward, and the second direction Y is perpendicular to the first direction X.

[0035] In other embodiments, the first direction X is arranged to intersect the direction of gravity.

[0036] In other embodiments, the second direction Y intersects the first direction X at any angle other than 90°.

[0037] In some embodiments, the spray device 13 is disposed on the top wall of the reaction chamber 11 , and a portion of the spray device 13 is located inside the reaction chamber 11 .

[0038] In other embodiments, the spraying device 13 is entirely disposed in the reaction chamber 11 .

[0039] In some embodiments, see Figure 2The spray device 13 includes a second plate 131 and two spray units 132. The second plate 131 is connected to the reaction chamber 11 and has an installation space 1310 extending through the second plate 131 along the first direction X. The two spray units 132 are disposed within the installation space 1310, with each spray unit 132 partially extending into the reaction chamber 11. The two spray units 132 are sequentially arranged along the second direction Y. When the conveying device 12 conveys the sheet material through the reaction chamber 11 along the second direction Y, the two spray units 132 spray different reaction gases onto the surface of the sheet material. This causes one of the reaction gases to react with the surface of the sheet material first to produce an intermediate product, and then causes the other reaction gas to react with the intermediate product on the surface of the sheet material to produce a final product, thereby achieving the effect of coating the sheet material.

[0040] It is understandable that the second plate 131 is detachably connected to the reaction chamber 11 , thereby facilitating replacement of different spraying devices 13 according to different processing techniques.

[0041] In some embodiments, the spray device 13 further includes a second seal (not shown), which is disposed between the second plate 131 and the reaction chamber 11 to seal the reaction chamber 11 to reduce the risk of reaction gas leaking from the reaction chamber 11 and reducing the risk of air entering the reaction chamber 11.

[0042] In some embodiments, when the second plate 131 is disposed to cover the reaction chamber 11 , the second sealing member is located on a side of the second plate 131 facing the reaction chamber 11 .

[0043] In some embodiments, the first reaction gas is trimethylaluminum (TMA) and the second reaction gas is water vapor (H2O). When the conveying device 12 conveys the sheet material along the second direction Y through the reaction chamber 11, one spray unit 132 first sprays the first reaction gas toward the sheet material, and then the other spray unit 132 sprays the second reaction gas toward the sheet material.

[0044] In some embodiments, see Figure 3 The spray device 13 has more than two spray units 132, all of which are distributed in sequence along the second direction Y, and two adjacent spray units 132 respectively spray two different reaction gases so that the two reaction gases are alternately distributed along the second direction Y. When the conveying device 12 conveys the sheet material along the second direction Y through multiple spray units 132 in sequence, the two sprayed reaction gases alternately contact the surface of the sheet material, thereby achieving the effect of multi-layer coating on the sheet material.

[0045] In some embodiments, the number of the spray units 132 is an even number, which helps the two reaction gases sprayed from two adjacent spray units 132 to react evenly.

[0046] In other embodiments, when there are three types of reaction gases, the number of spray units 132 is three or more, and three adjacent spray units 132 spray out three types of reaction gases respectively, so that the three reaction gases react with the surface of the sheet material in turn, and the effect of coating the sheet material can also be achieved.

[0047] Furthermore, when the number of reaction gases is three or more, the number of the spray units 132 is a positive integer multiple of the number of reaction gases.

[0048] In some embodiments, see Figure 2 and Figure 4 The spray unit 132 includes a first plate 1321, a first air supply structure 1322, a second air supply structure 1323, an air extraction structure 1324, a first air inlet duct 1325, a second air inlet duct 1326, and an air extraction duct 1327. The first plate 1321 is disposed within the installation space 1310 and contacts the second plate 131, thereby enabling the spray unit 132 to be installed on the second plate 131. The thickness direction of the first plate 1321 is parallel to the first direction X. The first plate 1321 has a bottom (not labeled) and a top (not labeled) disposed opposite each other in the thickness direction. The bottom is closer to the conveying device 12 than the top. The first air supply structure 1322, the second air supply structure 1323, and the air extraction structure 1324 are all located at the bottom. The first air supply structure 1322 and the air extraction structure 1324 are arranged in an annular shape. The first air supply structure 1322, the air extraction structure 1324, and the second air supply structure 1323 are sequentially arranged along a direction perpendicular to the first direction X, from the edge of the bottom toward the inner side of the bottom. A first air inlet duct 1325 is connected to the first plate 1321 and communicates with the first air supply structure 1322. A second air inlet duct 1326 is connected to the first plate 1321 and communicates with the second air supply structure 1323. An air extraction duct 1327 is connected to the first plate 1321 and communicates with the air extraction structure 1324.

[0049] See also Figure 3When the spray unit 132 is operating, the second air inlet pipe 1326 supplies the reaction gas to the second air supply structure 1323, causing the reaction gas to be sprayed toward the sheet material from the second air supply structure 1323. Simultaneously, the first air inlet pipe 1325 supplies the shielding gas to the first air supply structure 1322, causing the shielding gas within the first air supply structure 1322 to be sprayed toward the sheet material. The shielding gas surrounds the reaction gas through the annular first air supply structure 1322, isolating the reaction gas. This reduces the risk of the reaction gas diffusing along the gap 130 after contact with the sheet material. This helps prevent the reaction gas sprayed from one spray unit 132 from coming into contact with another reaction gas sprayed from an adjacent spray unit 132, reducing the risk of the two reaction gases directly contacting each other to produce a final product that could contaminate the sheet material. At the same time, the exhaust pipe 1327 exhausts air toward the sheet material through the exhaust structure 1324 to immediately extract the excess or residual reaction gas in the gap 130 between the spray unit 132 and the sheet material, further avoiding the risk of excess or residual reaction gas diffusing to the surroundings and reacting with another reaction gas.

[0050] It can be understood that since the exhaust structure 1324 is located between the first gas supply structure 1322 and the second gas supply structure 1323, the protective gas is also extracted by the exhaust structure 1324. In the process of the protective gas being extracted, the protective gas flows toward the direction of the reaction gas to achieve the effect of suppressing the reaction gas from diffusing to the surroundings.

[0051] In some embodiments, the exhaust pipe 1327 can also extract impurities in the gap 130 between the spray unit 132 and the sheet material through the exhaust structure 1324 to reduce the risk of impurities adhering to the sheet material and causing contamination of the sheet material.

[0052] In some embodiments, the protective gas is a gas such as nitrogen that does not react with the reactive gas.

[0053] In some embodiments, flanges are respectively provided on the first air inlet pipe 1325, the second air inlet pipe 1326 and the exhaust pipe 1327, so that the first air inlet pipe 1325 is connected to the protective gas source, the second air inlet pipe 1326 is connected to the reaction gas source, and the exhaust pipe 1327 is connected to the external vacuum pumping device through the flanges.

[0054] In some embodiments, see Figure 4 and Figure 5The second gas supply structure 1323 includes a plurality of second holes 13231 spaced apart from the first plate 1321. The second holes 13231 have two ports opposite to each other along the first direction X. One port of each second hole 13231 passes through the bottom, and the other port of each second hole 13231 is connected to the second air inlet pipe 1326. The arrangement of the plurality of second holes 13231 helps to improve the uniformity of the reaction gas spraying toward the sheet material.

[0055] In other embodiments, part or all of the spaced second holes 13231 may also adopt a groove-shaped structure (not shown), which is communicated with the second air intake duct 1326 .

[0056] In some embodiments, see Figures 4 to 7 The second gas supply structure 1323 also includes a second cavity 13232 provided in the first plate 1321. The second cavity 13232 is respectively connected to the second gas inlet pipe 1326 and all the second holes 13231. When the second gas inlet pipe 1326 provides reaction gas, the reaction gas is ejected from the second holes 13231 respectively through the second cavity 13232. The reaction gas is stabilized by the second cavity 13232 to help improve the uniformity of the reaction gas when it is ejected from the first holes 13221.

[0057] In some embodiments, from the first gas supply structure 1322 to the second gas supply structure 1323, the width of the second cavity 13232 is greater than the width of the second hole 13231, so that the cross-sectional area of ​​the second cavity 13232 is greater than the cross-sectional area of ​​the second hole 13231, so as to narrow the flow path of the reaction gas through the second hole 13231, increase the flow rate of the reaction gas, help to improve the stability of the reaction gas sprayed toward the surface of the sheet material along the first direction X, reduce the divergence of the reaction gas when it is sprayed out from the second hole 13231, thereby improving the accuracy of the contact between the reaction gas and the surface of the sheet material.

[0058] In some embodiments, see Figures 4 to 7The second gas supply structure 1323 also includes a first groove 13233 provided at the bottom of the first plate 1321. The first groove 13233 extends in the direction in which the second holes 13231 are spaced apart. The port of each second hole 13231, away from the top, is connected to the first groove 13233. After the reactant gas flows out of the second holes 13231, it first passes through the first groove 13233 before being ejected toward the sheet material. The first groove 13233 shapes the reactant gas flow, allowing the reactant gas flowing out of multiple second holes 13231 to diffuse toward adjacent second holes 13231. This creates a regular, uniformly wide strip-shaped area where the reactant gas contacts the sheet material, improving the uniformity of the reactant gas ejection toward the sheet material. Furthermore, the first groove 13233 limits the width of the reactant gas contacting the sheet material in the second direction Y, maintaining a high unit density of reactant gas molecules when in contact with the surface of the sheet material, allowing the reactant gas to fully react with the surface of the sheet material.

[0059] In some embodiments, from the first gas supply structure 1322 to the second gas supply structure 1323, the width of the first groove 13233 is greater than the width of the second hole 13231, so that the cross-sectional area of ​​the first groove 13233 is greater than the cross-sectional area of ​​the second hole 13231, so as to reduce the flow rate of the reaction gas by increasing the flow path of the reaction gas, thereby reducing the risk of the reaction gas flow being directly ejected from the first groove 13233 toward the sheet material due to excessive flow rate, which helps to improve the stability of the first groove 13233 in shaping the reaction gas flow.

[0060] In some embodiments, when the second air supply structure 1323 includes the second cavity 13232 , the first groove 13233 , and the second hole 13231 , the cross-sectional areas of the second cavity 13232 , the first groove 13233 , and the second hole 13231 decrease sequentially.

[0061] In other embodiments, the cross-sectional areas of the second cavity 13232 and the first groove 13233 are equal.

[0062] In other embodiments, the plurality of spaced second holes 13231 may be replaced by a continuous slot-like structure, and the reaction gas provided by the second air inlet pipe 1326 flows through the second cavity 13232 and the slot-like structure and then is ejected toward the sheet material.

[0063] In some embodiments, see Figure 4 and Figure 5The exhaust structure 1324 includes an exhaust groove 13241 provided on the first plate 1321. From the inner side of the bottom to the outer side of the bottom, the exhaust groove 13241 is located between the first hole 13221 and the second hole 13231. The exhaust groove 13241 has two ports opposite to each other along the first direction X. One port of the exhaust groove 13241 passes through the bottom, and the other port of the exhaust groove 13241 is connected to the exhaust pipe 1327. Through the continuous exhaust groove 13241, the exhaust structure 1324 can evenly extract the reaction gas.

[0064] In some embodiments, see Figures 4 to 7 The exhaust structure 1324 also includes a third cavity 13242 provided in the first plate 1321. The third cavity 13242 is respectively connected to the exhaust pipe 1327 and the exhaust groove 13241. When the exhaust pipe 1327 exhausts air toward the sheet material through the exhaust groove 13241, the third cavity 13242 is first exhausted to form a uniform vacuum state in the third cavity 13242, and then the exhaust groove 13241 is exhausted through the third cavity 13242 to help improve the uniformity of the pressure in the exhaust groove 13241.

[0065] In some embodiments, from the first air supply structure 1322 to the second air supply structure 1323, the width of the third cavity 13242 is greater than the width of the air extraction groove 13241, so that the cross-sectional area of ​​the third cavity 13242 is greater than the area of ​​the air extraction groove 13241 of the second hole 13231, so as to narrow the air extraction path through the air extraction groove 13241, so that the gas in the third cavity 13242 is faster than that in the air extraction groove 13241, thereby achieving the third cavity 13242 forming a vacuum state faster than the air extraction groove 13241.

[0066] At the same time, the gas flow rate in the third cavity 13242 is greater than the flow rate in the exhaust groove 13241, so as to increase the pressure difference between the third cavity 13242 and the exhaust groove 13241, which helps to increase the suction force of the exhaust structure 1324, so that the exhaust structure 1324 can smoothly extract the gas attached to the sheet material along the first direction X.

[0067] In addition, the continuous exhaust groove 13241 is provided to make the exhaust range of the exhaust structure 1324 continuous, which helps to improve the stability of exhaust.

[0068] In some embodiments, the total cross-sectional area of ​​the exhaust pipe 1327 is greater than the total cross-sectional area of ​​the exhaust groove 13241 to avoid the risk of the exhaust speed of the external vacuum device being reduced when passing through the spray unit 132.

[0069] In some embodiments, see Figure 4 and Figure 5The exhaust structure 1324 further includes a plurality of exhaust holes 13243 spaced apart from each other. The exhaust holes 13243 are divided into two sections: one section of the exhaust holes 13243 is located on one side of the second gas supply structure 1323 along the third direction Z, and the other section of the exhaust holes 13243 is located on the other side of the second gas supply structure 1323 along the third direction Z. The third direction Z is the lengthwise direction of the first plate 1321, and the first direction X, the second direction Y, and the third direction Z are perpendicular to each other. There are two exhaust grooves 13241, which are oppositely disposed on either side of the second gas supply structure 1323 along the second direction Y. The two sections of the exhaust holes 13243 and the two sections of the exhaust grooves 13241 together form an annular shape surrounding the outside of the second gas supply structure 1323, thereby fully extracting excess reaction gas that has diffused to the surrounding area.

[0070] It can be understood that since the content of the reaction gas on both sides of the second gas supply structure 1323 along the third direction Z is less than the content in the middle of the second gas supply structure 1323, the use of spaced exhaust holes 13243 can meet the need to exhaust the reaction gas diffusing along the third direction Z.

[0071] In addition, the intervally arranged exhaust holes 13243 can maintain the continuity of the bottom surface of the first plate 1321, so as to help maintain a certain strength of the plate surface of the first plate 1321 after the second cavity 13232 and / or the third space are opened in the first plate 1321.

[0072] In some embodiments, see Figure 4 and Figure 5 The exhaust holes 13243 of each part are distributed in an arc shape, so that all the exhaust holes 13243 and the exhaust grooves 13241 are jointly enclosed on the outside of the second air supply structure 1323 to form an oblong circle. Compared with the exhaust holes 13243 and the exhaust grooves 13241 jointly enclosing a rectangle, the risk of uneven exhaust caused by inconsistent pressure at the top corners of the rectangle and other areas can be reduced.

[0073] In some embodiments, see Figure 4 and Figure 5 There are two air extraction structures 1324, each air extraction structure 1324 includes an air extraction hole 13243 and an air extraction groove 13241, and the two air extraction structures 1324 are distributed in sequence from the second air supply structure 1323 to the first air supply structure 1322 to increase the air extraction width of the air extraction structure 1324 in the direction from the second air supply structure 1323 to the first air supply structure 1322.

[0074] In some embodiments, see Figures 4 to 7The exhaust structure 1324 also includes a second groove 13244. The direction in which the first groove 13233 extends is the same as the direction in which the exhaust groove 13241 extends and the direction in which the exhaust holes 13243 are spaced apart. The port away from the top of each exhaust groove 13241 and the exhaust hole 13243 is connected to the second groove 13244. The second grooves 13244 of the exhaust structure 1324 are connected to each other so that the exhaust range of all the exhaust structures 1324 can be continuous, which helps to improve the uniformity of the exhaust.

[0075] In other embodiments, the number of the air pumping structures 1324 is more than two.

[0076] In some embodiments, all of the air extraction holes 13243 are replaced by air extraction grooves 13241 or all of the air extraction grooves 13241 are replaced by a plurality of air extraction holes 13243 arranged at intervals.

[0077] In some embodiments, see Figure 4 and Figure 5 The first air supply structure 1322 includes a plurality of first holes 13221 spaced apart on the first plate 1321. The first hole 13221 has two ports opposite to each other along the first direction X. One port of each first hole 13221 passes through the bottom, and the other port of each first hole 13221 is connected to the first air intake duct 1325.

[0078] In some embodiments, see Figure 7 The first air supply structure 1322 also includes a first cavity 13222 provided in the first plate 1321. The first cavity 13222 is respectively connected to the first air inlet pipe 1325 and all the first holes 13221. When the first air inlet pipe 1325 provides protective gas, the protective gas is ejected from the first holes 13221 respectively through the first cavity 13222. The protective gas is stabilized by the first cavity 13222 to help improve the uniformity of the protective gas when it is ejected from the first holes 13221.

[0079] In some embodiments, the first holes 13221 arranged at intervals can maintain the continuity of the bottom surface of the first plate 1321, so as to help maintain a certain strength of the plate surface of the first plate 1321 after the first cavity 13222, the second cavity 13232 and / or the third space are opened in the first plate 1321.

[0080] In some embodiments, the protective gas can also be used to blow the surface of the sheet material to remove impurities on the surface of the sheet material.

[0081] In some embodiments, in a direction perpendicular to the first direction X, the cross-sectional area of ​​the first cavity 13222 is larger than the cross-sectional area of ​​the first hole 13221, so as to increase the flow rate of the protective gas by narrowing the flow path of the protective gas, thereby helping to improve the effect of the protective gas in blowing off the surface of the sheet material.

[0082] In other embodiments, the plurality of spaced-apart first holes 13221 may also be replaced by a groove-shaped structure, which is distributed in a ring shape and communicates with the first air intake duct 1325 .

[0083] In some embodiments, the spray device 13 further includes a first seal (not shown), which is disposed between the first plate 1321 and the second plate 131 , so that the first seal seals the first plate 1321 and the second plate 131 to reduce the risk of reaction gas escaping from the reaction chamber 11 .

[0084] In some embodiments, the first seal may also be provided between two adjacent first plates 1321, so that the first seal seals the two adjacent first plates 1321, thereby reducing the risk of the reaction gases sprayed from the adjacent spray units 132 escaping along the gaps between each other's first plates 1321 and contacting each other, causing different reaction gases to react at the first plates 1321.

[0085] In some embodiments, see Figure 2 The first air intake duct 1325, the second air intake duct 1326 and the air extraction duct 1327 are respectively connected to the top of the first plate 1321 to reduce the risk of the first air intake duct 1325, the second air intake duct 1326 and the air extraction duct 1327 of one of the spray units 132 interfering with the adjacent spray unit 132.

[0086] In some embodiments, the first air inlet duct 1325, the second air inlet duct 1326 and / or the exhaust duct 1327 are also connected to one side of the first plate 1321 along the third direction Z to improve the utilization rate of the plate surface of the first plate 1321 and reduce the risk of interference between the first air inlet duct 1325, the second air inlet duct 1326 and the exhaust duct 1327 at the top of the first plate 1321.

[0087] In other embodiments, the first air intake duct 1325, the second air intake duct 1326 and the air extraction duct 1327 are all arranged in the first plate 1321, connected to the first plate 1321 through external pipelines, and respectively communicated with the first air intake duct 1325, the second air intake duct 1326 and the air extraction duct 1327.

[0088] In some embodiments, the first sealing member and / or the second sealing member are respectively a sealing ring or a sealing gasket.

[0089] In other embodiments, the first air supply structure 1322 and the second air supply structure 1323 are nozzles disposed on the first plate 1321 .

[0090] In addition, those skilled in the art should recognize that the above embodiments are merely intended to illustrate the present application and are not intended to limit the present application. As long as they are within the substantive scope of the present application, appropriate changes and modifications to the above embodiments are within the scope disclosed in the present application.

Claims

1. A spray unit for spraying reaction gas onto a sheet material, characterized in that: include: a first plate having a bottom portion and a top portion disposed opposite to each other along a first direction; a first air supply structure, the first air supply structure being annularly arranged at the bottom; a second air supply structure; an air extraction structure, the air extraction structure being annularly arranged at the bottom, wherein the first air supply structure, the air extraction structure, and the second air supply structure are sequentially distributed from the edge of the bottom to the inner side of the bottom along a direction perpendicular to the first direction; a first air inlet conduit connected to the first plate and in communication with the first air supply structure, the first air inlet conduit being configured to provide a protective gas to the first air supply structure and to eject the protective gas toward the sheet material within the first air supply structure; a second air inlet conduit connected to the first plate and in communication with the second air supply structure, the second air inlet conduit being configured to supply the reaction gas to the second air supply structure and eject the reaction gas toward the sheet material within the second air supply structure; an air extraction pipe connected to the first plate and in communication with the air extraction structure, wherein the air extraction pipe is configured to extract air toward the sheet material through the air extraction structure; The first direction is the thickness direction of the first plate.

2. The spray unit according to claim 1, characterized in that The first air supply structure includes a plurality of first holes spaced apart on the first plate, the first holes having two opposite ends, one end of each first hole passing through the bottom along the first direction, and the other end of each first hole communicating with the first air inlet duct; and / or The second air supply structure includes a plurality of second holes spaced apart on the first plate, the second holes having two opposite ends, one end of each second hole passing through the bottom along the first direction, and the other end of each second hole communicating with the second air inlet duct; and / or The exhaust structure includes an exhaust groove provided on the first plate, from the inner side of the bottom to the outer side of the bottom, the exhaust groove is located between the first hole and the second hole, the exhaust groove has two opposite ports, one port of the exhaust groove passes through the bottom along the first direction, and the other port of the exhaust groove is connected to the exhaust pipe.

3. The spray unit according to claim 2, characterized in that: The first air supply structure further includes a first cavity provided in the first plate, the first cavity being in communication with the first air inlet duct and all the first holes respectively, and an area of ​​a cross section of the first cavity in a direction perpendicular to the first direction being larger than an area of ​​a cross section of the first hole; and / or The second air supply structure further includes a second cavity provided in the first plate, the second cavity being in communication with the first air inlet duct and all the second holes respectively, and an area of ​​a cross section of the second cavity in a direction perpendicular to the first direction being larger than an area of ​​a cross section of the second holes; and / or The exhaust structure also includes a third cavity provided in the first plate, and the third cavity is connected to the exhaust pipe and the exhaust groove respectively. In the direction perpendicular to the first direction, the cross-sectional area of ​​the third cavity is larger than the cross-sectional area of ​​the exhaust groove.

4. The spray unit according to claim 3, characterized in that: The number of the air extraction grooves of the air extraction structure is two, and the two air extraction grooves are oppositely arranged on two sides of the second air supply structure along the second direction; The air extraction structure further includes a plurality of air extraction holes distributed at intervals, each of the air extraction holes having two ports opposite to each other along the first direction, one port of the air extraction hole respectively passing through the bottom, and the other port of the air extraction hole respectively communicating with the air extraction pipe, the plurality of air extraction holes being divided into two parts, the air extraction holes of the two parts being relatively arranged on both sides of the second air supply structure along the third direction, the air extraction holes and the air extraction groove being jointly arranged around the outer side of the second air supply structure; The second direction is the width direction of the first plate, the third direction is the length direction of the first plate, and the first direction, the second direction and the third direction are perpendicular to each other.

5. The spray unit according to claim 4, characterized in that: The air extraction holes of each part are distributed in an arc shape, and all the air extraction holes and the air extraction grooves together enclose an oblong shape.

6. The spray unit according to claim 2, characterized in that: The second air supply structure also includes a first groove arranged at the bottom, the first groove extends along the direction of all the second hole intervals, and each port of the second hole away from the top is connected to the first groove. In the direction perpendicular to the first direction, the cross-sectional area of ​​the first groove is larger than the cross-sectional area of ​​the second hole.

7. The spray unit according to claim 1, characterized in that The number of the air extraction structures is two or more, and the two or more air extraction structures are arranged between the first air supply structure and the second air supply structure, and all the air extraction structures are spaced apart from the first air supply structure to the second air supply structure.

8. A spraying device, characterized in that: comprising a second plate and the spray unit according to any one of claims 1 to 7, wherein the second plate is provided with an installation space penetrating along the first direction; There are at least two spray units, all of which are sequentially distributed along the second direction, and the second gas supply structures of two adjacent spray units are configured to spray different reaction gases toward the sheet material; The first plate portion of each of the spray units is disposed in the installation space; The second direction is the width direction of the first plate, and the second direction is perpendicular to the first direction.

9. The spraying device according to claim 8, characterized in that: The spray device further includes a first sealing member, the first sealing member being disposed between the first plate and the second plate and configured to seal between the first plate and the second plate; and or The first sealing member is disposed between two adjacent first plates and is configured to seal between the two adjacent first plates.

10. A photovoltaic material processing device, characterized in that: comprising a reaction chamber, a conveying device, and the spraying device as claimed in claim 8, wherein a portion of the conveying device is located in the reaction chamber, and the conveying device is configured to convey the sheet material and pass the sheet material through the reaction chamber in sequence along the second direction; The spray device is disposed in the reaction chamber. The spray device and the conveying device in the reaction chamber are arranged opposite to each other along the first direction. There is a gap between the spray device and the sheet material on the conveying device.

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