Pipeline pressure relief device for conveying ultra-pure wet electronic chemicals

Abstract

The utility model discloses a pipeline pressure relief device for conveying ultra-pure wet electronic chemicals, which is used for being mounted on a conveying pipeline and comprises a connecting pipeline arranged on the conveying pipeline. A mounting plate is arranged on the connecting pipeline, a pressure relief valve is arranged on the mounting plate, a mounting pipeline is arranged between the pressure relief valve and the connecting pipeline, a locking assembly is further arranged on the mounting plate, and the pressure relief valve is matched with the locking assembly, so that the pressure relief valve is positioned on the connecting pipeline; the utility model has the beneficial effects that the pressure relief valve is ensured to be accurately positioned on the connecting pipeline through the matching of the pressure relief valve and the locking component, so that the pressure can be effectively controlled in the conveying process of wet electronic chemicals, the breakage or leakage of the conveying pipeline caused by overhigh pressure can be prevented, and the safety of the whole conveying system is improved.

Description

Technical Field

[0001] The utility model relates to a pipeline pressure relief device for conveying ultra-high purity wet electronic chemicals. Background Art

[0002] Pressure control in piping systems is crucial for the delivery of wet electronic chemicals. Wet electronic chemicals, such as electronic-grade ammonia and hydrogen peroxide, typically need to be delivered under strictly controlled pressure and temperature conditions to ensure chemical purity and performance while ensuring the safety of operators and the environment.

[0003] Ultra-high purity wet electronic chemicals have extremely high requirements for the cleanliness of pipelines. The main pipeline types are stainless steel lined fluoroplastic pipelines and pure fluoroplastic pipelines. However, traditional wet electronic chemical transportation pipeline systems do not consider the pipeline transportation safety design. For example, when the pressure in the pipeline is too high, it may cause the pipeline to rupture or leak, thereby causing chemical loss, environmental pollution and even safety accidents. In view of this, the utility model proposes a pipeline pressure relief device for the transportation of ultra-high purity wet electronic chemicals to solve the above problems. Utility Model Content

[0004] The purpose of the utility model is to provide a pipeline pressure relief device for transporting ultra-high purity wet electronic chemicals, so as to solve the problems raised in the above background technology.

[0005] To achieve the above purpose, the present invention provides the following technical solutions:

[0006] A pipeline pressure relief device for conveying ultra-high purity wet electronic chemicals, which is used to be installed on a conveying pipeline and includes a connecting pipeline, wherein the connecting pipeline is arranged on the conveying pipeline;

[0007] A mounting plate is provided on the connecting pipe, a pressure relief valve is provided on the mounting plate, a mounting pipe is provided between the pressure relief valve and the connecting pipe, a locking assembly is also provided on the mounting plate, and the pressure relief valve cooperates with the locking assembly to position the pressure relief valve on the connecting pipe.

[0008] As an improvement to the above technical solution, the connecting pipe is communicated with the inner cavity of the delivery pipe;

[0009] The connecting pipe is provided with a connecting flange, the connecting flange is connected to a mounting flange via bolts, and the mounting plate is provided on the mounting flange.

[0010] As an improvement to the above technical solution, a fixed pipe communicating with the inner cavity is provided on the mounting flange, and the mounting pipe is connected between the fixed pipe and the pressure relief valve.

[0011] As an improvement of the above technical solution, the pressure relief valve includes two groups of pressure relief limiting pipes, the pressure relief limiting pipes are provided with limiting connection outer walls, and the installation pipe is sleeved on the limiting connection outer walls.

[0012] As an improvement to the above technical solution, the pressure relief limiting pipe is provided with a limiting threaded outer wall, and a limiting sleeve is provided on the threaded sleeve of the limiting threaded outer wall;

[0013] The limiting sleeve is provided with a limiting hole, the installation pipe is arranged in the limiting hole, and the inner wall of the limiting hole is in close contact with the outer wall of the installation pipe.

[0014] As an improvement to the above technical solution, the locking assembly includes two sets of locking plates, which are symmetrically arranged on the mounting plate;

[0015] The locking plate is provided with a limit plate, and the pressure relief valve is provided with two groups of limit grooves, and the two groups of limit plates are respectively arranged in the two groups of limit grooves.

[0016] As an improvement to the above technical solution, a deformation groove is provided on the locking plate;

[0017] A penetrating locking hole is provided on the locking plate, a locking bolt is provided between the two groups of locking plates, the locking bolt is provided between the locking holes of the two groups of locking plates that match each other, and a locking nut is provided on the locking bolt.

[0018] Compared with the prior art, the beneficial effects of the present invention are:

[0019] By arranging the cooperation between the pressure relief valve and the locking assembly, the accurate positioning of the pressure relief valve on the connecting pipe is ensured, so that during the transportation of wet electronic chemicals, the pressure can be effectively controlled to prevent the transportation pipeline from rupture or leakage due to excessive pressure, thereby improving the safety of the entire transportation system. The components in the pressure relief valve that are in contact with the fluid are made of PFA material. PFA material has excellent chemical resistance and high temperature resistance. Therefore, the pressure relief valve can maintain stable physical and chemical properties when in contact with wet electronic chemicals, thereby enhancing the reliability and durability of the pressure relief device. In addition, the pressure relief valve is positioned on the connecting pipe through the locking assembly, which simplifies the installation process of the pressure relief valve, makes the installation of the pressure relief valve faster and more convenient, and reduces installation time and cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the structure of the utility model;

[0021] Figure 2 For this utility model Figure 1 Schematic diagram of the enlarged structure at A in the middle;

[0022] Figure 3This is a schematic diagram of the locations of the delivery pipeline and the connecting pipeline of the utility model;

[0023] Figure 4 This is a schematic diagram of the structure of the flange installation of the utility model;

[0024] Figure 5 This is a schematic diagram of the structure of the pressure relief valve of the utility model;

[0025] Figure 6 This is a structural diagram of the pressure relief valve of the utility model from another angle;

[0026] Figure 7 This is a structural diagram of the limit sleeve of the utility model.

[0027] In the figure: 10, conveying pipeline; 20, pressure relief valve; 21, limiting sleeve; 211, limiting hole; 22, pressure relief limiting pipeline; 221, limiting thread outer wall; 222, limiting connection outer wall; 23, limiting groove; 30, mounting pipeline; 40, mounting flange; 41, mounting plate; 42, fixing pipeline; 50, connecting pipeline; 51, connecting flange; 60, locking assembly; 61, limiting plate; 62, locking bolt; 63, deformation groove; 64, locking hole; 65, locking plate. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0029] Example:

[0030] like Figure 1-7 As shown, this embodiment provides a pipeline pressure relief device for transporting ultra-high purity wet electronic chemicals, which is used to be installed on a transport pipeline 10 and includes a connecting pipeline 50, which is arranged on the transport pipeline 10;

[0031] A mounting plate 41 is provided on the connecting pipe 50, a pressure relief valve 20 is provided on the mounting plate 41, a mounting pipe 30 is provided between the pressure relief valve 20 and the connecting pipe 50, and a locking assembly 60 is also provided on the mounting plate 41. The pressure relief valve 20 cooperates with the locking assembly 60 to position the pressure relief valve 20 on the connecting pipe 50.

[0032] In this case, the contact parts with the fluid in the pressure relief valve 20 are made of PFA material. PFA material, whose full name is tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer, is a high-performance fluoroplastic material.

[0033] In this embodiment, when the pressure relief valve 20 is installed, the pressure relief valve 20 is first positioned on the connecting pipe 50 using the locking assembly 60, and then the pressure relief valve 20 is connected to the installation pipe 30. The installation pipe 30 is connected to the inner cavity of the connecting pipe 50, thereby connecting the inner cavity of the delivery pipe 10 to the pressure relief valve 20.

[0034] By arranging the pressure relief valve 20 in cooperation with the locking assembly 60, the accurate positioning of the pressure relief valve 20 on the connecting pipe 50 is ensured, so that during the transportation of wet electronic chemicals, the pressure can be effectively controlled to prevent the transportation pipe 10 from rupture or leakage due to excessive pressure, thereby improving the safety of the entire transportation system. The components in the pressure relief valve 20 that are in contact with the fluid are made of PFA material. PFA material has excellent chemical resistance and high temperature resistance. Therefore, the pressure relief valve 20 can maintain stable physical and chemical properties when in contact with wet electronic chemicals, thereby enhancing the reliability and durability of the pressure relief device. Moreover, the pressure relief valve 20 is positioned on the connecting pipe 50 by the locking assembly 60, which simplifies the installation process of the pressure relief valve 20, making the installation of the pressure relief valve 20 faster and more convenient, and reducing installation time and cost.

[0035] Specifically, the connecting pipe 50 is communicated with the inner cavity of the delivery pipe 10;

[0036] The connecting pipe 50 is provided with a connecting flange 51 , the connecting flange 51 is connected to the mounting flange 40 via bolts, and the mounting plate 41 is provided on the mounting flange 40 .

[0037] Specifically, the mounting flange 40 is provided with a fixed pipe 42 communicating with the inner cavity, and the mounting pipe 30 is connected between the fixed pipe 42 and the pressure relief valve 20 .

[0038] In this embodiment, the delivery pipe 10 and the connecting pipe 50 are both provided with an inner lining, and the inner lining is made of PFA material;

[0039] Of course, the mounting flange 40 and the fixing pipe 42 are an integrally formed structure, and the mounting flange 40 , the fixing pipe 42 and the mounting pipe 30 are all made of PFA material.

[0040] Of course, the cooperation between the mounting flange 40 and the connecting flange 51 can facilitate the installation of the pressure relief valve 20 on the delivery pipeline 10 for a protection process, thereby preventing the delivery pipeline 10 from rupture or leakage due to excessive pressure.

[0041] Specifically, the pressure relief valve 20 includes two groups of pressure relief limiting pipes 22 . The pressure relief limiting pipes 22 are provided with limiting connection outer walls 222 , and the installation pipe 30 is sleeved on the limiting connection outer walls 222 .

[0042] Specifically, the pressure relief limiting pipe 22 is provided with a limiting threaded outer wall 221, and a limiting sleeve 21 is threadedly provided on the limiting threaded outer wall 221;

[0043] The limiting sleeve 21 defines a limiting hole 211 , and the installation pipe 30 is disposed in the limiting hole 211 . The inner wall of the limiting hole 211 is in close contact with the outer wall of the installation pipe 30 .

[0044] In this embodiment, when the installation pipe 30 is connected, one end of the installation pipe 30 is sleeved on the outer wall of the fixed pipe 42 and fastened by screws and other fasteners, and the installation pipe 30 is extended into the limiting hole 211 and sleeved on the limiting connection outer wall 222. Then, the limiting sleeve 21 is threadedly connected to the limiting threaded outer wall 221, and the outer wall of the installation pipe 30 is squeezed by the inner wall of the limiting hole 211, so that the installation pipe 30 is tightly connected to the limiting connection outer wall 222.

[0045] Specifically, the locking assembly 60 includes two sets of locking plates 65, and the two sets of locking plates 65 are symmetrically arranged on the mounting plate 41;

[0046] The locking plate 65 is provided with a limit plate 61 , and the pressure relief valve 20 is provided with two groups of limit grooves 23 , and the two groups of limit plates 61 are respectively provided in the two groups of limit grooves 23 .

[0047] Specifically, the locking plate 65 is provided with a deformation groove 63;

[0048] The locking plate 65 is provided with a locking hole 64 therethrough, and a locking bolt 62 is provided between the two groups of locking plates 65 . The locking bolt 62 is provided between the matching locking holes 64 on the two groups of locking plates 65 , and a locking nut is provided on the locking bolt 62 .

[0049] In this embodiment, when installing the pressure relief valve 20, the two sets of limit grooves 23 are aligned with the two sets of limit plates 61. Then, the pressure relief valve 20 is pushed to move, so that the limit plates 61 slide in the limit grooves 23. At the same time, the locking bolt 62 is inserted into the locking hole 64, and the locking nut is threadedly connected to the locking bolt 62. Through the cooperation between the locking nut and the locking bolt 62, the locking plate 65 is deformed in the deformation groove 63 toward the pressure relief valve 20, so that the two sets of limit plates 61 are tightly in contact with the groove wall of the limit groove 23, and the locking process is completed.

[0050] Of course, the pressure relief valve 20 is provided between the two sets of locking bolts 62 .

[0051] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A pipeline pressure relief device for transporting ultra-high purity wet electronic chemicals, characterized by: Used for installation on a delivery pipeline (10), comprising a connecting pipeline (50), wherein the connecting pipeline (50) is arranged on the delivery pipeline (10); A mounting plate (41) is provided on the connecting pipe (50), a pressure relief valve (20) is provided on the mounting plate (41), a mounting pipe (30) is provided between the pressure relief valve (20) and the connecting pipe (50), and a locking assembly (60) is further provided on the mounting plate (41). The pressure relief valve (20) cooperates with the locking assembly (60) so that the pressure relief valve (20) is positioned on the connecting pipe (50).

2. A pipeline pressure relief device for transporting ultra-high purity wet electronic chemicals according to claim 1, characterized in that: The connecting pipe (50) is in communication with the inner cavity of the delivery pipe (10); A connecting flange (51) is provided on the connecting pipe (50), a mounting flange (40) is connected to the connecting flange (51) via bolts, and the mounting plate (41) is provided on the mounting flange (40).

3. The pipeline pressure relief device for transporting ultra-high purity wet electronic chemicals according to claim 2, characterized in that: The mounting flange (40) is provided with a fixed pipe (42) communicating with the inner cavity, and the mounting pipe (30) is connected between the fixed pipe (42) and the pressure relief valve (20).

4. The pipeline pressure relief device for transporting ultra-high purity wet electronic chemicals according to claim 1, characterized in that: The pressure relief valve (20) comprises two groups of pressure relief limiting pipes (22), the pressure relief limiting pipes (22) are provided with limiting connection outer walls (222), and the installation pipe (30) is sleeved on the limiting connection outer walls (222).

5. The pipeline pressure relief device for transporting ultra-high purity wet electronic chemicals according to claim 4, characterized in that: The pressure relief limiting pipe (22) is provided with a limiting threaded outer wall (221), and a threaded sleeve on the limiting threaded outer wall (221) is provided with a limiting sleeve (21); The limiting sleeve (21) is provided with a limiting hole (211), the installation pipe (30) is arranged in the limiting hole (211), and the inner wall of the limiting hole (211) is in close contact with the outer wall of the installation pipe (30).

6. The pipeline pressure relief device for transporting ultra-high purity wet electronic chemicals according to claim 1, characterized in that: The locking assembly (60) comprises two sets of locking plates (65), and the two sets of locking plates (65) are symmetrically arranged on the mounting plate (41); The locking plate (65) is provided with a limit plate (61), and the pressure relief valve (20) is provided with two groups of limit grooves (23), and the two groups of limit plates (61) are respectively provided in the two groups of limit grooves (23).

7. A pipeline pressure relief device for transporting ultra-high purity wet electronic chemicals according to claim 6, characterized in that: The locking plate (65) is provided with a deformation groove (63); A locking hole (64) is provided through the locking plate (65), a locking bolt (62) is provided between the two sets of locking plates (65), the locking bolt (62) is provided between the locking holes (64) on the two sets of locking plates (65) whose positions match, and a locking nut is provided on the locking bolt (62).

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