High-generation substrate size measuring device

Abstract

The utility model discloses an advanced-generation substrate dimension measuring device, which comprises a measuring table, four groups of supporting legs are uniformly mounted at the bottom of the measuring table, a speed reducer is mounted on the surface of the bottom of the measuring table, and a power output shaft of the speed reducer is fixedly connected with a rotating shaft of a switching table. According to the advanced-generation substrate size measuring device, after a set of adsorption discs are measured, the servo motor drives the switching table again through the speed reducer to rotate in a stepping mode, the adsorption discs completing measurement can be moved out of a measuring station, and the measurement accuracy is improved. The adsorption discs which are not measured are moved to a measurement station; the arrangement of the switching table can quickly switch one group of substrate bodies to the next group after the measurement is completed, so that the operation of frequently assembling and disassembling and repositioning a single substrate body is avoided, the interval time in the measurement process is greatly reduced, and the whole measurement process is more coherent and efficient.

Description

Technical Field

[0001] The utility model relates to the field of dimension measuring equipment, in particular to a high-generation substrate dimension measuring device. Background Art

[0002] To increase the accuracy of dimensional measurement, high-generation substrates are generally measured using a CCD. The specific method is to use an optical lens to magnify the substrate image and project it onto a CCD (charge-coupled device) or CMOS (complementary metal-oxide-semiconductor) sensor. The image is then processed and analyzed by software to measure the substrate's dimensions. This system can measure a variety of dimensions, including the substrate's contour, hole position, and line spacing. Advantages: High accuracy, capable of measuring the dimensions of complex shapes and tiny features. Measurement results can be directly output in digital form for easy recording and analysis. Some advanced image measuring instruments can also perform automatic and batch measurements, improving measurement efficiency.

[0003] However, during the specific measurement process, after measuring a group of substrates, the substrates need to be removed and replaced with new substrates that need to be measured. The time for taking and putting them away increases or decreases the time for changing materials, increases the total time for measuring a large number of substrates, and reduces the efficiency of dimensional measurement. Utility Model Content

[0004] The purpose of the present invention is to provide a high-generation substrate size measuring device to solve the defects mentioned in the above background technology.

[0005] To achieve the above-mentioned purpose, a high-generation substrate size measuring device is provided, comprising a measuring table, four sets of supporting feet are evenly installed on the bottom of the measuring table, and a reducer is installed on the bottom surface of the measuring table, while the power output shaft of the reducer is fixedly connected to the rotating shaft of the switching table, and the power input shaft of the reducer is fixed to the output shaft of the servo motor, five sets of adsorption disks are evenly installed on the surface of the switching table, and the surface of the adsorption disk adsorbs and fixes the substrate body, a fixing frame is screwed on the outer side of the end of the measuring table, and an adjusting cylinder is installed on the top of the fixing frame, while the telescopic rod at the bottom of the adjusting cylinder is fixedly connected to the CCD measuring camera.

[0006] Preferably, the switching table is a circular structure made of metal material, and the adsorption plates on the surface of the switching table are arranged in a circular shape, and the distances between the adsorption plates are consistent.

[0007] Preferably, six groups of suction cups are evenly installed on the surface of the adsorption plate, and the six groups of suction cups are arranged in a plum blossom shape, and the surfaces of the six groups of suction cups are arranged flush.

[0008] Preferably, a control box is installed at the bottom of the adsorption plate, and a vacuum generator is provided inside the control box. The vacuum generator is connected to the six groups of suction cups, and a switch of the vacuum generator is embedded and fixed on the outside of the control box.

[0009] Preferably, three groups of arc-shaped openings are evenly opened on the surface of the adsorption disk, and the adsorption disk performs vacuum adsorption on the substrate body through six groups of suction cups on the surface.

[0010] Preferably, three groups of arc-shaped sliders are evenly installed on the bottom of the switching table, and a ring-shaped slide rail is opened on the surface of the measuring table. At the same time, the size of the slide rail is adapted to the size of the slider, and the slider is slidably arranged inside the slide rail; the cross-section of the slide rail and the slider are both dovetail-shaped.

[0011] Compared with the prior art, the beneficial effects of the present invention are as follows: after the measurement of a group of adsorption discs is completed, the servo motor drives the switching table to rotate in steps again through the reducer, so that the adsorption discs that have completed the measurement can be moved out of the measurement station and the adsorption discs that have not been measured can be moved into the measurement station; the setting of the switching table can quickly switch one group of substrate bodies to the next group after the measurement is completed, avoiding frequent loading and unloading and repositioning operations of a single substrate body, greatly reducing the interval time during the measurement process, and making the entire measurement process more coherent and efficient. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a front view schematic diagram of the structure of the utility model;

[0013] Figure 2 for Figure 1 Bottom view of

[0014] Figure 3 for Figure 1 A top view of

[0015] Figure 4 Schematic diagram of the adsorption disk structure;

[0016] Figure 5 for Figure 4 Top view of .

[0017] Numbers in the figure: 1. Measuring table; 2. Support legs; 3. Switching table; 4. Adsorption plate; 41. Suction cup; 42. Control box; 43. Slider; 44. Slide rail; 5. Fixing bracket; 6. Adjusting cylinder; 7. CCD measuring camera; 8. Base plate body; 9. Reducer; 10. Servo motor. DETAILED DESCRIPTION

[0018] See also Figure 1-5The utility model provides a high-generation substrate size measuring device, including a measuring table 1, four groups of supporting feet 2 are evenly installed on the bottom of the measuring table 1, and a reducer 9 is installed on the bottom surface of the measuring table 1, and the power output shaft of the reducer 9 is fixedly connected to the rotating shaft of the switching table 3, and the power input shaft of the reducer 9 is fixed to the output shaft of the servo motor 10, five groups of adsorption disks 4 are evenly installed on the surface of the switching table 3, and the surface of the adsorption disk 4 adsorbs and fixes the substrate body 8, a fixing frame 5 is screwed on the outer side of the end of the measuring table 1, and an adjusting cylinder 6 is installed on the top of the fixing frame 5, and the telescopic rod at the bottom of the adjusting cylinder 6 is fixedly connected to the CCD measuring camera 7.

[0019] Working principle: When in use, the adsorption disk 4 vacuum-adsorbs the substrate body 8 through the six groups of suction cups 41 on the surface. At this time, the servo motor 10 drives the switching table 3 to rotate step by step through the reducer 9, so that the substrate body 8 adsorbed and fixed by the six groups of suction cups 41 moves to the bottom of the CCD measuring camera 7. The size of the substrate body 8 is measured by the CCD measuring camera 7, and the on-site non-contact measurement of the glass substrate is completed through optical imaging; the specific measurement method is: use an optical lens to magnify the image of the substrate and project it onto the CCD or CMOS sensor, and process and analyze the image through software to measure the size of the substrate. It can measure various dimensions such as the contour, hole position, and line spacing of the substrate; the working principle of this technology and the circuit connection method of the controller are also well known to people in this field. They are not necessary technical features of this case and will not be repeated here;

[0020] After measuring a group of adsorption discs 4, the external switch of the servo motor 10 is started, and the servo motor 10 drives the switching table 3 to rotate step by step again through the reducer 9. The switching table 3 rotates by an angle of 72° each time, which can move the adsorption discs 4 that have completed measurement out of the measurement station and move the adsorption discs 4 that have not been measured into the measurement station; the measurement station is set directly below the CCD measurement camera 7; the setting of the switching table 3 can quickly switch from one group of substrate bodies 8 to the next group after measurement, avoiding frequent loading and unloading and repositioning operations of individual substrate bodies 8, greatly reducing the interval time during the measurement process, and making the entire measurement process more consistent and efficient; the continuous measurement method can quickly complete the dimensional inspection of a large number of substrate bodies 8, meet the rapid inspection requirements of the production line, and significantly improve the measurement throughput. It is particularly suitable for the rapid screening and inspection of a large number of substrate bodies 8 on the production line.

[0021] The switching table 3 is a circular structure made of metal material, and the adsorption plates 4 on the surface of the switching table 3 are arranged in a circular shape, and the distances between the adsorption plates 4 are consistent.

[0022] Six groups of suction cups 41 are evenly installed on the surface of the adsorption plate 4 , and the six groups of suction cups 41 are arranged in a plum blossom shape, and the surfaces of the six groups of suction cups 41 are arranged flush.

[0023] As a preferred embodiment, a control box 42 is installed at the bottom of the suction cup 4, and a vacuum generator is provided inside the control box 42. At the same time, the vacuum generator is connected to the six groups of suction cups 41, and the switch of the vacuum generator is embedded and fixed on the outside of the control box 42.

[0024] Three groups of arc-shaped openings are evenly formed on the surface of the adsorption disk 4 , and the adsorption disk 4 performs vacuum adsorption on the substrate body 8 through six groups of suction cups 41 on the surface.

[0025] As a preferred embodiment, three groups of arc-shaped sliders 43 are evenly installed on the bottom of the switching table 3, and a ring-shaped slide rail 44 is opened on the surface of the measuring table 1. At the same time, the slide rail 44 is adapted to the size of the slider 43, and the slider 43 is slidably set inside the slide rail 44; the cross-section of the slide rail 44 and the slider 43 are both dovetail-shaped.

[0026] When the switch table 3 rotates, the three blocks 43 at the bottom thereof are slidably arranged inside the slide rails 44 , which can limit and guide the switch table 3 during rotation, thereby preventing the switch table 3 from tilting during rotation.

Claims

1. A high-generation substrate dimension measuring device, comprising a measuring table (1), characterized in that: Four groups of supporting legs (2) are evenly installed on the bottom of the measuring platform (1), and a reducer (9) is installed on the bottom surface of the measuring platform (1). At the same time, the power output shaft of the reducer (9) is fixedly connected to the rotating shaft of the switching platform (3), and the power input shaft of the reducer (9) is fixed to the output shaft of the servo motor (10). Five groups of adsorption disks (4) are evenly installed on the surface of the switching platform (3), and the surfaces of the adsorption disks (4) adsorb and fix the substrate body (8). A fixing frame (5) is screwed on the outer side of the end of the measuring platform (1), and an adjusting cylinder (6) is installed on the top of the fixing frame (5). At the same time, the telescopic rod at the bottom of the adjusting cylinder (6) is fixedly connected to the CCD measuring camera (7).

2. The high-generation substrate dimension measuring device according to claim 1, characterized in that: The switching platform (3) is a circular structure made of metal material, and the adsorption plates (4) on the surface of the switching platform (3) are arranged in a circular shape, and the distances between the adsorption plates (4) are consistent.

3. The high-generation substrate dimension measuring device according to claim 1, characterized in that: Six groups of suction cups (41) are evenly installed on the surface of the adsorption disk (4), and the six groups of suction cups (41) are arranged in a plum blossom shape. At the same time, the surfaces of the six groups of suction cups (41) are arranged flush.

4. The high-generation substrate dimension measuring device according to claim 3, characterized in that: A control box (42) is installed at the bottom of the adsorption disk (4), and a vacuum generator is provided inside the control box (42). The vacuum generator is connected to the six groups of suction cups (41), and a switch of the vacuum generator is embedded and fixed on the outside of the control box (42).

5. The high-generation substrate dimension measuring device according to claim 4, characterized in that: The surface of the adsorption disk (4) is evenly provided with three groups of arc-shaped openings, and the adsorption disk (4) performs vacuum adsorption on the substrate body (8) through six groups of suction cups (41) on the surface.

6. The high-generation substrate dimension measuring device according to claim 1, characterized in that: Three groups of arc-shaped sliders (43) are evenly installed on the bottom of the switching platform (3), and an annular slide rail (44) is opened on the surface of the measuring platform (1). The sizes of the slide rail (44) and the slider (43) are adapted, and the slider (43) is slidably arranged inside the slide rail (44); the cross sections of the slide rail (44) and the slider (43) are both dovetail-shaped.

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