Probe card tool

Abstract

The embodiment of the utility model discloses a probe card tool. The probe card tool comprises a fixed seat, a jig, a probe body, a bracket and a circuit board, the fixed seat is detachably connected with the jig, the jig comprises an abutting part abutting against all the needle tips, a plurality of limiting holes used for limiting the needle tail sections are formed in the fixed seat, the limiting holes are through holes, and the fixed seat is detachably connected with the bottom face of the support; the support and the circuit board are respectively provided with an avoiding hole for the tail end to pass through. According to the embodiment of the invention, more accurate positions and postures of all the probe bodies can be ensured, the connection efficiency of all the probe bodies and the circuit board can be improved through the arrangement of the fixed seat, the interference of an ultra-low temperature environment can be effectively reduced through the fitting support of the pure copper support to the circuit board, and the reliability of the probe body is improved. The deformation of the circuit board in an ultralow temperature environment is reduced, the flatness of the whole probe card is improved, and the test efficiency is improved.

Description

Technical Field

[0001] The present application relates to the field of wafer testing technology, and in particular to a probe card tooling. Background Art

[0002] Cantilever probe cards are precision interface adapters placed between automated test systems and wafers, used to test the functional parameters of semiconductor chips before packaging. During product chip functional testing, they can be used to measure chip performance and assess reliability and stability in their environment. This testing can help understand the chip's operating life and performance changes at ultra-low temperatures, providing valuable information for chip design and optimization. Currently used cantilever probe cards struggle to accurately test chip functionality, performance, and reliability at ultra-low temperatures of 4K (-263°C). Utility Model Content

[0003] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a probe card tooling to improve the testing effect of the probe card in an ultra-low temperature environment.

[0004] The present application provides a probe card tooling, comprising: a fixing seat, a fixture, a probe body, a bracket and a circuit board;

[0005] The probe body is a Z-shaped probe and has a first bend and a second bend along its extension direction. The portion between the needle tip of the probe body and the first bend is a needle head segment, the portion between the first bend and the second bend is an intermediate segment, and the portion between the second bend and the tail end of the probe body is a needle tail segment. There are at least two probe bodies, and both the needle head segment and the needle tail segment extend along the first direction.

[0006] The fixing seat is detachably connected to the jig, the jig includes an abutting portion that abuts against all the needle tips, the fixing seat is provided with a plurality of limiting holes for limiting the needle tail section, the limiting holes are through holes, and the fixing seat is detachably connected to the bottom surface of the bracket;

[0007] The bracket and the circuit board are both provided with avoidance holes for the tail end to pass through;

[0008] A bracket groove for accommodating the circuit board is provided on the top surface of the bracket, the bottom surface of the circuit board is fitted with the bracket groove, and a plurality of test points for connecting with the tail end are arranged on the top surface of the circuit board. The bracket is a pure copper bracket.

[0009] Based on the probe card tooling, the position and posture of all probe bodies can be more accurately guaranteed. At the same time, the connection efficiency of all probe bodies and circuit boards can be improved through the setting of the fixing seat. The pure copper bracket supports the circuit board, which can effectively reduce the interference of the ultra-low temperature environment, reduce the deformation of the circuit board in the ultra-low temperature environment, improve the flatness of the entire probe card, and improve the test efficiency. It should be noted that the test point is set on the upper surface of the circuit board, which can also improve the stability of the test point in the ultra-low temperature environment.

[0010] Optionally, the jig includes a jig base and a jig arm; the jig base and the fixed seat are arranged opposite to each other in a first direction, and the abutment portion is formed on the top surface of the jig base; the jig arm extends a set distance along the first direction, and one end of the jig arm is connected to the jig base, and the other end is detachably connected to the fixed seat.

[0011] Furthermore, based on the above jig, the jig arm can be used to fix the fixing seat at a set height position, and the space between the jig arm and the jig base can be used to more conveniently adjust the position and posture of the probe body.

[0012] Optionally, there are at least two jig arms arranged along the circumference of the jig base.

[0013] Furthermore, based on the above-mentioned fixture, the support stability of the fixture arm on the fixing seat can be further improved, thereby making it easier to adjust all probe bodies, thereby improving efficiency and accuracy.

[0014] Optionally, the fixing seat and the fixture support arm slide together in a first direction.

[0015] and / or,

[0016] The bracket and the fixture support arm are slidably matched along a first direction;

[0017] The fixture support arm is provided with a first limiting structure that cooperates with the fixing seat in the circumferential limit direction.

[0018] and / or,

[0019] The fixture support arm is provided with a second limiting structure that cooperates with the bracket in the circumferential upper limit direction.

[0020] Furthermore, based on the above jig, after adjusting the positions and postures of all probe bodies, the fixing seat and / or the bracket can be smoothly slid to the set position on the probe body.

[0021] Optionally, all of the probe bodies have the same length.

[0022] Furthermore, based on the above-mentioned probe body, the length of the signal transmission path from the tip to the tail of all probe bodies is the same, thereby ensuring the time consistency of the signal received by all test points, further providing a reliable basis for data analysis and ensuring the test accuracy of the probe card.

[0023] Optionally, an insulating sleeve is provided on at least a portion of the needle tail section above the limiting hole.

[0024] Furthermore, based on the above-mentioned insulating sleeve, short circuit between two needle tail sections with a small distance between them can be avoided.

[0025] Optionally, the number of the limiting holes is at least two groups, and the at least two groups of limiting holes are evenly arranged along the circumference of the fixing seat, and each group of limiting holes is evenly arranged along an arc with the concave side facing the axis of the fixing seat;

[0026] The test points are arranged in one-to-one correspondence with the limiting holes, and the distance between any one of the test points and the corresponding limiting hole is equal to the distance between another test point and the corresponding limiting hole.

[0027] Furthermore, based on the arrangement of the above-mentioned limiting holes, the arrangement of all probe bodies is made more reasonable, which facilitates the connection of the tail end with the test point, while reducing the probability of short circuit between the two probe bodies. At the same time, it can also ensure that the positions of all test points are reasonable, thereby improving the test stability of the probe card.

[0028] Optionally, each group of the test points is arranged on the circuit board along an arc that matches the arc in which the limiting holes are arranged.

[0029] Furthermore, based on the arrangement of the above-mentioned test points, all test points and limit holes are made to correspond one to one, and the needle tail sections of each group of probe bodies are evenly arranged along a fan shape on the upper surface of the circuit board, making the arrangement of all probe bodies more reasonable, further facilitating the connection of the tail end with the test point, and at the same time further reducing the probability of short circuit between the two probe bodies.

[0030] Optionally, at least two groups of first arc-shaped grooves are formed on the top surface of the fixing seat, and the top opening of each group of the limiting holes is located in the same first arc-shaped groove;

[0031] and / or,

[0032] At least two groups of second arc-shaped grooves are formed on the bottom surface of the fixing seat, and the bottom opening of each group of the limiting holes is located in the same second arc-shaped groove;

[0033] The first arc-shaped groove and / or the second arc-shaped groove are filled with insulating adhesive.

[0034] Furthermore, based on the first arc groove and the second arc groove, it is possible to provide accommodation space for the insulating adhesive, so that the probe body in the limiting hole can be fixed within a controllable space. Specifically, after the position and posture of the probe body are adjusted, the fixing seat can be slid down to the set position. At this time, the insulating adhesive is first filled into the first arc groove. After baking into shape, it can be turned over and the insulating adhesive is filled into the second arc groove and baked into shape again.

[0035] Optionally, the second arcuate groove extends toward the axial direction of the fixing seat, and the length of the second arcuate groove in the radial direction of the fixing seat is greater than the length of the middle section to form a clearance groove for accommodating at least part of the middle section and at least part of the needle section.

[0036] Furthermore, based on the above-mentioned recess, the size of the entire probe card in the first direction can be further reduced, so that the entire middle section and part of the needle section overlap with the fixing seat in the first direction, which is more convenient for the arrangement of the probe card. At the same time, the fixing seat also has a better support effect on the probe body.

[0037] One or more of the above embodiments of the present application have at least one or more of the following beneficial effects:

[0038] It can ensure that the position and posture of all probe bodies are more accurate, and at the same time, it can improve the connection efficiency between all probe bodies and circuit boards through the setting of the fixing seat. The pure copper bracket supports the circuit board, which can effectively reduce the interference of the ultra-low temperature environment, reduce the deformation of the circuit board in the ultra-low temperature environment, improve the flatness of the entire probe card, and improve the test efficiency. It should be noted that the test point is set on the upper surface of the circuit board, which can also improve the stability of the test point in the ultra-low temperature environment.

[0039] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] The disclosure of this application will be more easily understood with reference to the accompanying drawings. Those skilled in the art will readily appreciate that these drawings are for illustrative purposes only and are not intended to limit the scope of protection of this application. Furthermore, similar numbers in the figures represent similar components, where:

[0041] Figure 1 This is a schematic structural diagram of the probe card tooling described in an embodiment of the present application;

[0042] Figure 2 This is a schematic structural diagram of the top surface of the probe card tooling according to an embodiment of the present application;

[0043] Figure 3This is a schematic structural diagram of the bottom surface of the probe card tooling according to an embodiment of the present application;

[0044] Figure 4 for Figure 3 A partial enlarged view of point A in the middle;

[0045] Figure 5 A top view of the probe card tooling according to an embodiment of the present application;

[0046] Figure 6 for Figure 5 Cross-sectional view at AA in the middle;

[0047] Figure 7 for Figure 6 A partial enlarged view of point B in the middle;

[0048] Figure 8 This is a schematic structural diagram of the bracket and the fixing seat according to an embodiment of the present application;

[0049] Figure 9 This is a schematic structural diagram of the fixing base described in an embodiment of the present application;

[0050] Figure 10 This is a schematic structural diagram of the fixing seat and the fixture according to an embodiment of the present application;

[0051] Figure 11 This is a structural diagram of the fixing base and the fixture according to an embodiment of the present application from another angle;

[0052] Figure 12 for Figure 10 A partial enlarged view of point C in the middle.

[0053] Description of Reference Numerals

[0054] 1. Fixing seat; 11. Limiting hole; 12. First arc-shaped groove; 13. Second arc-shaped groove; 2. Probe body; 21. Needle tip; 211. Needle head section; 22. Middle section; 23. Tail end; 231. Needle tail section; 3. Bracket; 31. Bracket slot; 4. Circuit board; 41. Test point; 51. Fixture base; 52. Fixture support arm; 53. Film. DETAILED DESCRIPTION

[0055] Some embodiments of the present application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present application and are not intended to limit the scope of protection of the present application.

[0056] Cantilever probe cards are precision interface adapters placed between automated test systems and wafers, used to test the functional parameters of semiconductor chips before packaging. During product chip functional testing, they can be used to measure chip performance and assess reliability and stability in their environment. This testing can help understand the chip's operating life and performance changes at ultra-low temperatures, providing valuable information for chip design and optimization. Currently used cantilever probe cards struggle to accurately test chip functionality, performance, and reliability at ultra-low temperatures of 4K (-263°C).

[0057] Based on this, the present application provides a probe card tooling that can ensure that the position and posture of all probe bodies are more accurate, and at the same time, it can improve the connection efficiency of all probe bodies and circuit boards through the setting of fixed seats. The pure copper bracket supports the circuit board, which can effectively reduce the interference of the ultra-low temperature environment, reduce the deformation of the circuit board in the ultra-low temperature environment, improve the flatness of the entire probe card, and improve the test efficiency. It should be noted that the test point is set on the upper surface of the circuit board, which can also improve the stability of the test point in the ultra-low temperature environment.

[0058] The present application will be described in detail below through specific embodiments.

[0059] Reference Figures 1 to 12As shown, this embodiment provides a probe card tooling, including: a fixing seat 1, a fixture, a probe body 2, a bracket 3 and a circuit board 4; the probe body 2 is a Z-shaped probe, and has a first bend and a second bend along its extension direction, the part between the needle tip 21 of the probe body 2 and the first bend is the needle head section 211, the part between the first bend and the second bend is the middle section 22, and the part between the second bend and the tail end 23 of the probe body 2 is the needle tail section 231. The number of probe bodies 2 is at least two, and the needle head section 211 and the needle tail section 231 both extend along the first direction, which can be a vertical direction, and is not limited to vertical upward or vertical downward. Specifically, the needle head section 211 and the needle tail section 231 of the probe body 2 extend in opposite directions respectively, and the needle head section 211 and the needle tail section 231 both form an angle of about 90 degrees with the middle section 22. Furthermore, the needle head section 21 1 and / or the needle tail section 231 can form an angle of 80 to 100 degrees with the middle section 22, that is, the needle head section 211 and / or the needle tail section 231 can form a set angle of 0 to 10 degrees with the first direction, as long as all the needle tail sections 231 are parallel to each other; the fixing seat 1 is detachably connected to the jig, and the jig includes an abutting portion that abuts against all needle tips 21. The fixing seat 1 is provided with a plurality of limiting holes 11 for limiting the needle tail section 231, and the limiting holes 11 are through holes, wherein the limiting holes 11 extend along the first direction, and the fixing seat 1 is detachably connected to the bottom surface of the bracket 3; the bracket 3 and the circuit board 4 are both provided with avoidance holes for the tail end 23 to pass through; a bracket groove 31 for accommodating the circuit board 4 is provided on the top surface of the bracket 3, the bottom surface of the circuit board 4 is in contact with the bracket groove 31, and a plurality of test points 41 for connecting with the tail end 23 are arranged on the top surface of the circuit board 4, and the bracket 3 is a pure copper bracket.

[0060] The probe card tooling provided in this embodiment first passes the bent Z-shaped probe onto the fixing seat 1, and then installs the fixing seat 1 on the jig. The position and angle adjustment of all probe bodies 2 can be completed on the jig. After the adjustment is completed, the fixing seat 1 can drive all probe bodies 2 to be installed on the bracket 3 and the circuit board 4, or the bracket 3 and the circuit board 4 can be placed on the fixing seat 1 to complete the connection, and then the fixing seat 1 is separated from the jig. Based on the probe card tooling, the position and posture of all probe bodies 2 can be more accurately guaranteed. At the same time, the connection efficiency of all probe bodies 2 and the circuit board 4 can be improved through the setting of the fixing seat 1. The pure copper bracket 3 supports the circuit board 4, which can effectively reduce the interference of the ultra-low temperature environment, reduce the deformation of the circuit board 4 in the ultra-low temperature environment, improve the flatness of the entire probe card, and improve the test efficiency. It should be noted that the test point 41 is set on the upper surface of the circuit board 4, which can also improve the stability of the test point 41 in the ultra-low temperature environment.

[0061] In some embodiments, the upper surface of the circuit board 4 is fully copper-clad and grounded, thereby better reducing the ground impedance, improving anti-interference ability, reducing voltage drop, and improving power efficiency; further, the bracket 3 can be connected to the circuit board 4 by bolts, and the surface of the bracket 3 can be plated with hard gold and anti-oxidation treated, thereby further reducing the degree of deformation of the bracket 3 in an ultra-low temperature environment.

[0062] It should be understood that the jig is a structure used to provide a fixed position for the fixing base 1 before the fixing base 1 is installed on the bracket 3 and the circuit board 4 to form a complete probe card, and to facilitate adjustment of the position and posture of all probe bodies 2. The jig includes a jig base 51 and a jig arm 52; the jig base 51 and the fixing base 1 are arranged opposite to each other in a first direction, and the abutment portion is formed on the top surface of the jig base 51; the jig arm 52 extends a set distance along the first direction, and one end of the jig arm 52 is connected to the jig base 51, and the other end is detachably connected to the fixing base 1.

[0063] Furthermore, based on the above-mentioned jig, the jig arm 52 can be used to fix the fixing seat 1 at a set height position, and the space between the jig arm 52 and the jig base 51 can be used to more conveniently adjust the position and posture of the probe body 2.

[0064] Continue to refer to Figure 12 As shown, a film 53 is provided at the abutment position on the fixture base 51. The film 53 can provide a certain resistance to the needle tips 21 of all probe bodies 2, so that after the position and posture of the probe body 2 are adjusted, the probe body 2 is not easy to move spontaneously; further, holes can be opened on the film 53, which is more convenient for positioning and fixing the needle tips 21 of all probe bodies 2. It should be noted that the bottoms of all holes can be set to planes at the same height to ensure that all needle tips 21 are located on the same plane.

[0065] Continue to refer to Figure 10 and Figure 11 As shown, there are at least two jig arms 52 arranged along the circumference of the jig base 51. The jig arms 52 can specifically be a rod-shaped structure or a C-shaped or L-shaped bracket structure, as long as it can connect the jig base 51 and the fixed base 1, and ensure the relative fixation between the fixed base 1 and the jig base 51.

[0066] Furthermore, based on the above-mentioned jig, the support stability of the jig arm 52 on the fixing base 1 can be further improved, thereby making it easier to adjust all the probe bodies 2, thereby improving efficiency and accuracy.

[0067] Optionally, the fixed seat 1 and the jig arm 52 slide in cooperation along the first direction, and / or the bracket 3 and the jig arm 52 slide in cooperation along the first direction; the jig arm 52 is provided with a first limiting structure that cooperates with the fixed seat 1 in the circumferential upper limit position, and / or the jig arm 52 is provided with a second limiting structure that cooperates with the bracket 3 in the circumferential upper limit position; specifically, it can be through a slider slot, or the jig arm 52 itself is a telescopic structure, so as to achieve relative sliding of the fixed seat 1 and / or the bracket 3 with it, the first limiting structure and the second limiting structure are used to prevent the fixed seat 1 and the bracket 3 from rotating relative to each other during sliding, so as to avoid the probe body 2 from being bent and twisted.

[0068] Furthermore, based on the above-mentioned jig, after adjusting the position and posture of all probe bodies 2, the fixing seat 1 and / or the bracket 3 can be smoothly slid to the set position on the probe body 2. That is to say, when adjusting the position and posture of the probe body 2, in order to facilitate the adjustment of the probe body 2, it is necessary to first fix the fixing seat 1 to the set height position, which is specifically determined by the length of the jig arm 52, which can be 60mm, or 50mm, 70mm, 80mm, 85mm, etc., to leave a larger space near the needle tip 21 of the probe body 2 to adjust the probe body 2.

[0069] In some embodiments, all probe bodies 2 are the same length.

[0070] Furthermore, based on the above-mentioned probe body 2, the length of the signal transmission path from the needle tip 21 to the tail end 23 of all probe bodies 2 is the same, thereby ensuring the time consistency of the signal received by all test points 41, further providing a reliable basis for analyzing data and ensuring the test accuracy of the probe card.

[0071] Optionally, an insulating sleeve is provided on at least part of the needle tail section 231 located above the limiting hole 11; it should be noted that the needle tail section 231 located above the limiting hole 11 needs to be bent again at an angle of approximately 90 degrees to enable the tail end 23 to be connected to the test point 41.

[0072] Furthermore, based on the above-mentioned insulating sleeve, short circuit between the two needle tail sections 231 with a small distance between them can be avoided.

[0073] Continue to refer to Figure 1 and Figure 9As shown, the number of the limiting holes 11 is at least two groups, and at least two groups of limiting holes 11 are evenly arranged along the circumference of the fixing seat 1, and each group of limiting holes 11 is evenly arranged in an arc along the concave side toward the axis of the fixing seat 1; the test points 41 and the limiting holes 11 are set one by one, and the spacing between any test point 41 and the corresponding limiting hole 11 is equal to the spacing between another test point 41 and the corresponding limiting hole 11, wherein the diameter of the limiting hole 11 is larger than the diameter of the needle tail section 231, thereby facilitating the adjustment of the probe body 2.

[0074] Furthermore, based on the arrangement of the above-mentioned limiting holes 11, the arrangement of all probe bodies 2 is made more reasonable, which facilitates the connection between the tail end 23 and the test point 41, while reducing the probability of short circuit between the two probe bodies 2. At the same time, it can also ensure that the positions of all test points 41 are reasonable, thereby improving the test stability of the probe card.

[0075] Continue to refer to Figure 1 As shown, each group of test points 41 is arranged on the circuit board 4 along an arc that matches the arc formed by the limiting holes 11. Specifically, the arc formed by the test points 41 can be concentric with the arc formed by the limiting holes 11, and the two have different radii, or the concave sides of the two arcs are facing the same side, and the line connecting the centers of the two arcs is the symmetry axis of the two arcs.

[0076] Furthermore, based on the arrangement of the above-mentioned test points 41, all test points 41 and the limiting holes 11 are made to correspond one to one, and the needle tail sections 231 of each group of probe bodies 2 are evenly arranged along a fan shape on the upper surface of the circuit board 4, so that the arrangement of all probe bodies 2 is more reasonable, further facilitating the connection between the tail end 23 and the test point 41, and at the same time further reducing the probability of short circuit between the two probe bodies 2.

[0077] Optionally, at least two groups of first arc-shaped grooves 12 are provided on the top surface of the fixing seat 1, and the top opening of each group of limiting holes 11 is located in the same first arc-shaped groove 12; and / or, at least two groups of second arc-shaped grooves 13 are provided on the bottom surface of the fixing seat 1, and the bottom opening of each group of limiting holes 11 is located in the same second arc-shaped groove 13; the first arc-shaped groove 12 and / or the second arc-shaped groove 13 are filled with insulating adhesive.

[0078] Furthermore, based on the first arc groove 12 and the second arc groove 13, it is possible to provide a holding space for the insulating adhesive, so that the probe body 2 in the limiting hole 11 can be fixed in a controllable space. Specifically, after the position and posture of the probe body 2 are adjusted, the fixing seat 1 can be slid down to the set position. At this time, the insulating adhesive is first filled into the first arc groove 12. After baking and forming, it can be turned over and the insulating adhesive is filled into the second arc groove 13, and baked and formed again.

[0079] Optionally, the second arcuate groove 13 extends toward the axial direction of the fixing seat 1 , and the radial length of the second arcuate groove 13 in the fixing seat 1 is greater than the length of the middle section 22 to form a clearance groove for accommodating at least part of the middle section 22 and at least part of the needle section 211 .

[0080] Furthermore, based on the above-mentioned recess, the size of the entire probe card in the first direction can be further reduced, so that the entire middle section 22 and part of the needle section 211 overlap with the fixing seat 1 in the first direction, which is more convenient for the arrangement of the probe card. At the same time, the fixing seat 1 also has a better support effect on the probe body 2.

[0081] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "examples," "specific examples," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0082] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0083] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A probe card tooling, characterized in that: include: A fixing seat (1), a fixture, a probe body (2), a bracket (3) and a circuit board (4); The probe body (2) is a Z-shaped probe and has a first bend and a second bend along its extension direction; the portion between the needle tip (21) of the probe body (2) and the first bend is a needle head section (211); the portion between the first bend and the second bend is an intermediate section (22); the portion between the second bend and the tail end (23) of the probe body (2) is a needle tail section (231); the number of the probe bodies (2) is at least two, and the needle head section (211) and the needle tail section (231) both extend along the first direction; The fixing seat (1) is detachably connected to the jig, the jig includes an abutting portion that abuts against all the needle tips (21), the fixing seat (1) is provided with a plurality of limiting holes (11) for limiting the needle tail section (231), the limiting holes (11) are through holes, and the fixing seat (1) is detachably connected to the bottom surface of the bracket (3); The bracket (3) and the circuit board (4) are both provided with an avoidance hole for the tail end (23) to pass through; A bracket groove (31) for accommodating the circuit board (4) is provided on the top surface of the bracket (3); the bottom surface of the circuit board (4) is in contact with the bracket groove (31); a plurality of test points (41) for connecting to the tail end (23) are arranged on the top surface of the circuit board (4); and the bracket (3) is a pure copper bracket.

2. The probe card tooling according to claim 1, wherein: The jig comprises a jig base (51) and a jig support arm (52); the jig base (51) and the fixing seat (1) are arranged opposite to each other in a first direction, and the abutment portion is formed on the top surface of the jig base (51); the jig support arm (52) extends a set distance along the first direction, and one end of the jig support arm (52) is connected to the jig base (51), and the other end is detachably connected to the fixing seat (1).

3. The probe card tooling according to claim 2, wherein: At least two of the jig support arms (52) are arranged along the circumference of the jig base (51).

4. The probe card tooling according to claim 2, wherein: The fixing seat (1) and the fixture support arm (52) are slidably matched along a first direction, and / or, The bracket (3) and the fixture support arm (52) are slidably engaged along a first direction; The fixture support arm (52) is provided with a first limiting structure that cooperates with the fixing seat (1) in the circumferential upper limit direction. and / or, The jig support arm (52) is provided with a second limiting structure that cooperates with the bracket (3) in the circumferential upper limit direction.

5. The probe card tooling according to claim 1, wherein: All the probe bodies (2) have the same length.

6. The probe card tooling according to claim 1, wherein: An insulating sleeve is sleeved on at least a portion of the needle tail section (231) located above the limiting hole (11).

7. The probe card tooling according to any one of claims 1 to 6, characterized in that: The number of the limiting holes (11) is at least two groups, and the at least two groups of limiting holes (11) are evenly arranged along the circumference of the fixing seat (1), and each group of limiting holes (11) is evenly arranged in an arc shape along the concave side toward the axis of the fixing seat (1); The test points (41) are arranged in one-to-one correspondence with the limiting holes (11), and the distance between any one of the test points (41) and the corresponding limiting hole (11) is equal to the distance between another test point (41) and the corresponding limiting hole (11).

8. The probe card tooling according to claim 7, wherein: Each group of test points (41) is arranged on the circuit board (4) along an arc that matches the arc in which the limiting holes (11) are arranged.

9. The probe card tooling according to any one of claims 1 to 6, characterized in that: At least two groups of first arc-shaped grooves (12) are provided on the top surface of the fixing seat (1), and the top opening of each group of the limiting holes (11) is located in the same first arc-shaped groove (12); and / or, At least two groups of second arc-shaped grooves (13) are provided on the bottom surface of the fixing seat (1), and the bottom opening of each group of the limiting holes (11) is located in the same second arc-shaped groove (13); The first arc-shaped groove (12) and / or the second arc-shaped groove (13) are filled with insulating adhesive.

10. The probe card tooling according to claim 9, wherein: The second arcuate groove (13) extends toward the axial direction of the fixing seat (1), and the length of the second arcuate groove (13) in the radial direction of the fixing seat (1) is greater than the length of the middle section (22), so as to form a clearance groove for accommodating at least part of the middle section (22) and at least part of the needle section (211).

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