Pressure-adjustable vertical probe card testing device

Abstract

The utility model relates to the technical field of vertical probe card testing, and discloses a pressure-adjustable vertical probe card testing device which comprises a workbench, a supercharger is fixedly connected to the right end of the rear side of the top of the workbench, and an air storage barrel is fixedly connected to the left end of the rear side of the top of the workbench. The output end of the supercharger communicates with the bottom end of the right side of a gas storage barrel, a pressure stabilizing assembly is arranged in the gas storage barrel, the top of the gas storage barrel communicates with a connecting pipe, the top of the workbench is fixedly connected with a pressure regulator, and the output end of the connecting pipe communicates with the rear side of the pressure regulator. According to the utility model, external gas is compressed by the supercharger and then is conveyed to the gas storage barrel, and the pressure plate is pushed by the gas of which the pressure is adjusted by the pressure regulator, so that the pressure of different vertical probe cards can be accurately and stably adjusted and tested, the test accuracy is realized, errors caused by unstable pressure are reduced, and the test efficiency is improved. And meanwhile, the efficiency of the test process is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vertical probe card testing, in particular to a vertical probe card testing device with adjustable pressure. Background Art

[0002] Vertical probe cards are core components of chip testing in the semiconductor manufacturing field. Serving as a bridge connecting chips and testing equipment, vertical probe cards provide key support for chip functional testing and quality assessment. They are widely used throughout the manufacturing processes of various chips. The manufacturing of various chips relies on vertical probe cards for efficient and accurate testing to ensure that chip performance meets design standards and meets the needs of different application scenarios.

[0003] The vertical probe card is a highly specialized test interface device designed around chip testing needs. It contains multiple vertically arranged precision probes that contact the pins of the chip. During the chip testing process, the electrical signals generated by the test equipment are accurately transmitted to the internal circuit of the chip through the probes of the vertical probe card. The feedback signal after the chip operation is also returned to the test equipment through the probe card.

[0004] Existing vertical probe card test devices use a fixed pressure mode or a narrow pressure adjustment range, and are unable to flexibly adjust the pressure according to the characteristics of vertical probe cards of different models and sizes. This limitation results in excessive pressure causing excessive deformation or damage to the probes of delicate and small probe cards during the test process, reducing the service life and test accuracy of the probe cards. For large or specially designed probe cards, excessively low pressure cannot ensure good contact between the probes and chip pins, resulting in unstable test signal transmission, inaccurate test results, and misjudgment of chip yield. A vertical probe card test device with adjustable pressure is now proposed to solve the above problems by precisely controlling and flexibly adjusting the test pressure. Utility Model Content

[0005] In order to make up for the above shortcomings, the utility model provides a vertical probe card testing device with adjustable pressure, which aims to improve the problem in the existing technology that the pressure cannot be flexibly adjusted according to the characteristics of vertical probe cards of different models and sizes due to the use of a fixed pressure mode or a narrow pressure adjustment range.

[0006] In order to achieve the above-mentioned purpose, the present invention adopts the following technical scheme: a vertical probe card testing device with adjustable pressure, including a workbench, a booster is fixedly connected to the right end of the top rear side of the workbench, and an air storage barrel is fixedly connected to the left end of the top rear side of the workbench, the output end of the booster is connected to the bottom end of the right side of the air storage barrel, a pressure stabilizing component is arranged inside the air storage barrel, the top of the air storage barrel is connected to a connecting pipe, the top of the workbench is fixedly connected to a pressure regulator, the output end of the connecting pipe is connected to the rear side of the pressure regulator, the front side of the workbench is fixedly connected to two vertical slide rails, the output end of the pressure regulator is fixedly connected to a vertical sliding plate, the rear side of the vertical sliding plate is slidably connected to the outer walls of the two vertical slide rails, the bottom end of the vertical sliding plate is fixedly connected to a pressure plate, and the top front side of the workbench is provided with a clamping and pushing mechanism.

[0007] As a further description of the above technical solution:

[0008] The clamping and pushing mechanism includes a controller, the bottom of the controller is fixedly connected to the top front end of the workbench, the output end of the controller is fixedly connected to an electric push rod, the outer wall of the electric push rod is slidably connected to the clamping base plate, the bottom of the clamping base plate is provided with a longitudinal sliding assembly, the middle of the clamping base plate is fixedly connected to a fixed plate, the left and right sides of the fixed plate are fixedly connected to two compression springs, the interiors of multiple compression springs are provided with telescopic slide rods, the far-away ends of multiple compression springs are fixedly connected to a splint, the adjacent ends of multiple telescopic slide rods are respectively fixedly connected to the left front and rear ends and the right front and rear ends of the fixed plate, and the far-away ends of multiple telescopic slide rods are respectively fixedly connected to the adjacent front and rear ends of one side of the two splints.

[0009] As a further description of the above technical solution:

[0010] The pressure stabilizing assembly includes a partition, which is fixedly connected to the inside of the gas storage barrel, and a pressure stabilizer is fixedly connected to the middle of the partition.

[0011] As a further description of the above technical solution:

[0012] The longitudinal sliding assembly includes two longitudinal slide grooves, both of which are opened on the top front side of the workbench. The left and right sides of the bottom of the clamping base plate are fixedly connected with longitudinal slide rails, and the outer walls of the two longitudinal slide rails are respectively slidably connected to the inside of the two longitudinal slide grooves.

[0013] As a further description of the above technical solution:

[0014] A console is fixedly connected to the right end of the top front side of the workbench, and a plurality of control buttons are fixedly connected to the top of the console.

[0015] As a further description of the above technical solution:

[0016] A pressure gauge is fixedly connected to the left end of the top front side of the workbench, and the pressure gauge is electrically connected to the voltage regulator.

[0017] As a further description of the above technical solution:

[0018] The four corners of the bottom of the workbench are fixedly connected with anti-skid bases, and the bottoms of the multiple anti-skid bases all adopt an anti-skid design.

[0019] As a further description of the above technical solution:

[0020] The clamping and pushing mechanism adopts a symmetrical design, and the exterior of the clamping plate adopts a smooth design.

[0021] The utility model has the following beneficial effects:

[0022] 1. In the present invention, the external gas is compressed by a booster and then transported to a gas storage tank. The gas reaches the pressure regulator through a connecting pipe. The gas with adjusted pressure pushes the vertical sliding plate and the pressure plate connected to the vertical slide rail, thereby realizing accurate and stable adjustment and testing of the pressure of different vertical probe cards, achieving test accuracy, reducing errors caused by unstable pressure, and improving the efficiency of the test process.

[0023] 2. In the present invention, the controller controls the electric push rod to extend and retract linearly along the clamping base plate, and the spring is compressed to squeeze the clamping plate to clamp the probe card, thereby achieving precise pushing and stable clamping of the probe card, avoiding displacement during detection, reducing measurement errors, ensuring a smooth test process, and improving efficiency, thereby adapting to different test requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A three-dimensional diagram of a vertical probe card testing device with adjustable pressure proposed by the present invention;

[0025] Figure 2 This is a front view of a vertical probe card testing device with adjustable pressure proposed by the present invention;

[0026] Figure 3 This is a rear view of a vertical probe card testing device with adjustable pressure proposed by the present invention;

[0027] Figure 4 This is a cross-sectional view of a gas storage barrel in a vertical probe card test device with adjustable pressure proposed by the present invention;

[0028] Figure 5This is a structural schematic diagram of a clamping and pushing mechanism in a vertical probe card testing device with adjustable pressure proposed by the present invention;

[0029] Figure 6 This is a structural breakdown diagram of the telescopic slide rod in a vertical probe card testing device with adjustable pressure proposed by the present invention.

[0030] Legend:

[0031] 1. Workbench; 2. Clamping and pushing mechanism; 201. Controller; 202. Electric push rod; 203. Clamping base; 204. Fixed plate; 205. Compression spring; 206. Telescopic slide; 207. Clamp; 3. Booster; 4. Gas storage tank; 5. Partition; 6. Voltage stabilizer; 7. Connecting pipe; 8. Voltage regulator; 9. Vertical slide rail; 10. Vertical slide plate; 11. Pressure plate; 12. Longitudinal slide; 13. Longitudinal slide rail; 14. Control console; 15. Control button; 16. Pressure gauge; 17. Anti-slip base. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0033] Reference Figure 1 、 Figure 2 and Figure 3, the utility model provides an embodiment: a vertical probe card test device with adjustable pressure, including a workbench 1, a booster 3 is fixedly connected to the right end of the top rear side of the workbench 1, which can compress the external gas and transport it to the gas storage barrel 4, providing a gas source for the entire system, ensuring that there is sufficient gas pressure for subsequent testing, and a gas storage barrel 4 is fixedly connected to the left end of the top rear side of the workbench 1. The gas storage barrel 4 is provided with a pressure stabilizing component inside the gas storage barrel 4, which can perform preliminary pressure stabilization on the gas transported by the booster 3, reduce pressure fluctuations, ensure gas pressure stability, and ensure test accuracy. The output end of the booster 3 is connected to the bottom end of the right side of the gas storage barrel 4, which can allow the pressurized gas to enter smoothly The gas is fed into the gas storage barrel 4 to ensure the continuity of gas transmission and facilitate subsequent operations. The top of the gas storage barrel 4 is connected with a connecting pipe 7, which can transport the stabilized gas to the pressure regulator 8 to provide a stable input gas source for the pressure regulator 8, making the pressure regulation more precise. The top of the workbench 1 is fixedly connected with the pressure regulator 8, and the output end of the connecting pipe 7 is connected to the rear side of the pressure regulator 8, which can accurately adjust the input gas pressure to meet the pressure requirements of the probe card in different test scenarios and improve the flexibility of the test. The front side of the workbench 1 is fixedly connected with two vertical slide rails 9, which provide a stable sliding track for the vertical sliding plate 10 to ensure the vertical sliding plate 10 to move smoothly in the vertical direction. To prevent its shaking from affecting the pressure transmission, the output end of the voltage regulator 8 is fixedly connected with a vertical sliding plate 10, and the rear side of the vertical sliding plate 10 is slidably connected to the outer wall of the two vertical slide rails 9, which can stably slide along the vertical slide rails 9 under the action of gas pressure, and accurately transmit the pressure adjusted by the voltage regulator 8 to the pressure plate 11, ensuring the accuracy of pressure application. The bottom end of the vertical sliding plate 10 is fixedly connected with a pressure plate 11, which can evenly transmit the pressure on the vertical sliding plate 10 to the probe card, realize the pressure loading of the probe card, and complete the pressure application required for the test. A clamping and pushing mechanism 2 is provided on the top front side of the workbench 1, which can clamp and push the probe card. To ensure that the position of the probe card is stable during the test and to avoid test errors caused by displacement, a control console 14 is fixedly connected to the right end of the top front side of the workbench 1, providing a platform for the operation of the entire device and facilitating user control. A plurality of control buttons 15 are fixedly connected to the top of the control console 14, which can be used to control various functions of the device, such as starting, stopping and parameter adjustment of components such as the booster 3 and the voltage regulator 8, to achieve convenient operation. A pressure gauge 16 is fixedly connected to the left end of the top front side of the workbench 1. The pressure gauge 16 is electrically connected to the voltage regulator 8 and can display the pressure value output by the voltage regulator 8 in real time, so that the user can intuitively understand the current pressure situation and adjust the pressure parameters in time.

[0034] Reference Figure 1 、 Figure 5 and Figure 6The clamping and pushing mechanism 2 includes a controller 201. The bottom of the controller 201 is fixedly connected to the top front end of the workbench 1. It serves as the control core of the entire mechanism, receives and processes instructions, and ensures that all components work in coordination. The output end of the controller 201 is fixedly connected to an electric push rod 202. The electric push rod 202 can be extended and retracted under the instruction of the controller 201 to provide power for the clamping and pushing actions. The outer wall of the electric push rod 202 is slidably connected to a clamping base plate 203, which can move under the push of the electric push rod 202, driving the components on it to move together to achieve position adjustment of the probe card. A longitudinal sliding component is provided at the bottom of the clamping base plate 203, which can make the clamping base plate 203 slide smoothly in the longitudinal direction to ensure the stability of the movement and avoid affecting the position accuracy of the probe card. The middle part of the clamping base plate 203 is fixedly connected to a fixed plate 204 to provide a stable installation base for other components and enhance the integrity of the structure. The left and right sides of the fixed plate 204 are fixedly connected to The two compression springs 205 undergo elastic deformation when subjected to external force, providing a clamping force for clamping the probe card. A telescopic slide bar 206 is provided inside the multiple compression springs 205. The telescopic slide bar 206 can ensure the stability of the telescopic direction of the compression spring 205, while enhancing the strength of the clamping structure to prevent structural deformation. The ends of the multiple compression springs 205 that are away from each other are fixedly connected to a clamping plate 207. The clamping plate 207 clamps the probe card under the action of the compression springs 205 to ensure that the probe card is firmly fixed and does not move during the test. The adjacent ends of the multiple telescopic slide bars 206 are respectively fixedly connected to the front and rear ends of the left side and the right side of the fixed plate 204, ensuring the stability of the structural connection and making the clamping action more reliable. The ends of the multiple telescopic slide bars 206 that are away from each other are respectively fixedly connected to the front and rear ends of the adjacent sides of the two clamping plates 207, further stabilizing the position of the clamping plate 207, so that the clamping plate 207 can more accurately fix the probe card during the clamping process.

[0035] Reference Figure 1 、 Figure 2 and Figure 4The pressure stabilizing assembly includes a partition 5, which is fixedly connected to the inside of the gas storage barrel 4. It divides the inside of the gas storage barrel 4 and provides an installation position for the pressure stabilizer 6, which helps to stabilize the internal structure. The middle part of the partition 5 is fixedly connected to the pressure stabilizer 6, which can further stabilize the gas passing through the partition 5, ensure the stability of the output gas pressure, and make the subsequent test pressure more accurate. The longitudinal sliding assembly includes two longitudinal slide grooves 12, and the two longitudinal slide grooves 12 are both opened on the top front side of the workbench 1 to provide sliding tracks for the longitudinal slide rails 13 to ensure the accuracy of the longitudinal sliding and make the movement of the clamping base 203 smoother. The left and right sides of the bottom of the clamping base 203 are fixedly connected with longitudinal slide rails 13, and the outer walls of the two longitudinal slide rails 13 are slidably connected to the two longitudinal slide grooves The inside of 12 can slide along the longitudinal slide groove 12, driving the clamping base 203 to move longitudinally, which is convenient for adjusting the position of the probe card. The four corners at the bottom of the workbench 1 are fixedly connected with anti-slip bases 17, which can increase the friction between the workbench 1 and the placement plane, prevent the workbench 1 from sliding during the test, and ensure the stability of the test. The bottoms of multiple anti-slip bases 17 all adopt an anti-slip design to further enhance the anti-slip effect and better fix the workbench 1. The clamping and pushing mechanism 2 adopts a symmetrical design, which can make the force on both sides of the probe card uniform, ensure the stability of the clamping, and avoid the probe card from being damaged due to uneven force. The outside of the clamping plate 207 adopts a smooth design to avoid scratching the probe card when clamping the probe card, protect the probe card from damage, and extend its service life.

[0036] Working principle: The booster 3 is fixedly connected to the right end of the top rear side of the workbench 1, and its output end is connected to the right bottom end of the gas storage barrel 4. The function of the booster 3 is to compress the external gas and transport it to the gas storage barrel 4. A pressure stabilizing component is provided inside the gas storage barrel 4. This pressure stabilizing component can perform preliminary stabilization on the gas pressure entering the gas storage barrel 4 to avoid drastic fluctuations in pressure. If the pressure is unstable, the pressure subsequently transmitted to the probe card will be inaccurate, affecting the test results. A connecting pipe 7 is connected to the top of the gas storage barrel 4, and the gas is transported to the pressure regulator 8 through the connecting pipe 7. The pressure regulator 8 is fixed on the top of the workbench 1, and the output end of the connecting pipe 7 is connected to the rear side of the pressure regulator 8. The pressure regulator 8 can accurately adjust the gas pressure transmitted from the gas storage barrel 4. By adjusting the relevant parameters of the pressure regulator 8, the gas pressure can be adjusted to the test pressure. The specific value required for the test is determined by the pressure regulator 8. The output end of the pressure regulator 8 is fixedly connected to a vertical sliding plate 10. The rear side of the vertical sliding plate 10 is slidably connected to the outer walls of the two vertical slide rails 9. The gas with a pressure adjusted by the pressure regulator 8 acts on the vertical sliding plate 10. Due to the guiding effect of the vertical slide rails 9, the vertical sliding plate 10 can slide stably in the vertical direction. The bottom end of the vertical sliding plate 10 is fixedly connected to a pressure plate 11. When the vertical sliding plate 10 moves under the push of the gas pressure, the pressure plate 11 also moves accordingly. The clamping and pushing mechanism 2 clamps and pushes the probe card so that the probe card can be accurately placed in the appropriate test position so that it remains stable during the test. When the pressure plate 11 applies pressure to the probe card in the vertical direction, the clamping and pushing mechanism 2 ensures that the probe card will not be displaced, thereby ensuring the accuracy of the test.

[0037] In addition, the bottom of the controller 201 is fixedly connected to the top front end of the workbench 1, and can receive external instructions or coordinate the actions of various components in the mechanism according to a preset program, thereby achieving precise operation of the probe card. One end of the electric push rod 202 is fixedly connected to the output end of the controller 201. When the controller 201 issues an instruction, the electric push rod 202 starts working. The electric push rod 202 can achieve telescopic movement under the control of the controller 201, and its telescopic length and speed can be accurately adjusted according to specific test requirements. During operation, the electric push rod 202 moves linearly along the clamping base plate 203 to which it is slidably connected along its outer wall. A longitudinal sliding component is provided at the bottom of the clamping base plate 203, and this longitudinal sliding component enables the clamping base plate 203 to move smoothly in the longitudinal direction. This ensures stability throughout the entire motion process when the electric push rod 202 pushes the clamping base 203, preventing the probe card from misaligning due to factors such as shaking. A fixed plate 204 is fixedly connected to the center of the clamping base 203. Two compression springs 205 are fixedly connected to the left and right sides of the fixed plate 204. These compression springs 205 are one of the components that implement the probe card clamping function. In their natural state, the compression springs 205 have a certain amount of elastic potential energy. Each compression spring 205 is internally provided with a telescopic slide 206, which works in conjunction with the compression spring 205. The telescopic slide 206 not only ensures the stability of the spring's expansion and contraction direction, but also enhances the strength of the entire clamping structure. A clamping plate 207 is fixedly connected to the distal ends of the multiple compression springs 205. When the probe card is to be clamped, the electric push rod 202 pushes the clamping base 203 forward, positioning the probe card between the two clamping plates 207. As the clamping base 203 continues to advance, the probe card presses against the clamping plates 207, which in turn compress the compression springs 205. Under the elastic force of the compression springs 205, the two clamping plates 207 tightly clamp the probe card. The adjacent ends of the multiple telescopic slides 206 are fixedly connected to the left and right front and rear ends of the fixed plate 204, respectively. Their distal ends are fixedly connected to the adjacent front and rear ends of the two clamping plates 207. This further ensures the stability and accuracy of the clamping plates 207 during the clamping process, allowing the probe card to maintain a stable position during testing.

[0038] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A vertical probe card test device with adjustable pressure, comprising a workbench (1), characterized in that: The right end of the top rear side of the workbench (1) is fixedly connected to a supercharger (3), the left end of the top rear side of the workbench (1) is fixedly connected to an air storage barrel (4), the output end of the supercharger (3) is connected to the right bottom end of the air storage barrel (4), a pressure stabilizing component is provided inside the air storage barrel (4), the top of the air storage barrel (4) is connected to a connecting pipe (7), the top of the workbench (1) is fixedly connected to a pressure regulator (8), the output end of the connecting pipe (7) is connected to the rear side of the pressure regulator (8), the front side of the workbench (1) is fixedly connected to two vertical slide rails (9), the output end of the pressure regulator (8) is fixedly connected to a vertical sliding plate (10), the rear side of the vertical sliding plate (10) is slidably connected to the outer walls of the two vertical slide rails (9), the bottom end of the vertical sliding plate (10) is fixedly connected to a pressure plate (11), and the top front side of the workbench (1) is provided with a clamping and pushing mechanism (2).

2. The pressure-adjustable vertical probe card testing device according to claim 1, wherein: The clamping and pushing mechanism (2) comprises a controller (201), the bottom of the controller (201) is fixedly connected to the top front end of the workbench (1), the output end of the controller (201) is fixedly connected to an electric push rod (202), the outer wall of the electric push rod (202) is slidably connected to a clamping base plate (203), the bottom of the clamping base plate (203) is provided with a longitudinal sliding component, the middle of the clamping base plate (203) is fixedly connected to a fixed plate (204), and the fixed plate (204) is Two compression springs (205) are fixedly connected to the left and right sides, and a plurality of compression springs (205) are provided with telescopic slide rods (206) inside. The ends of the plurality of compression springs (205) that are away from each other are fixedly connected to the splints (207). The adjacent ends of the plurality of telescopic slide rods (206) are respectively fixedly connected to the front and rear ends of the left side and the front and rear ends of the right side of the fixed plate (204). The ends of the plurality of telescopic slide rods (206) that are away from each other are respectively fixedly connected to the front and rear ends of the adjacent sides of the two splints (207).

3. The pressure-adjustable vertical probe card testing device according to claim 1, wherein: The pressure stabilizing assembly comprises a partition (5), the partition (5) is fixedly connected to the interior of the gas storage barrel (4), and a pressure stabilizer (6) is fixedly connected to the middle of the partition (5).

4. The pressure-adjustable vertical probe card testing device according to claim 2, wherein: The longitudinal sliding assembly includes two longitudinal slide grooves (12), both of which are opened on the top front side of the workbench (1), and the left and right sides of the bottom of the clamping base plate (203) are fixedly connected with longitudinal slide rails (13), and the outer walls of the two longitudinal slide rails (13) are respectively slidably connected to the inside of the two longitudinal slide grooves (12).

5. The vertical probe card testing device with adjustable pressure according to claim 1, wherein: A console (14) is fixedly connected to the right end of the top front side of the workbench (1), and a plurality of control buttons (15) are fixedly connected to the top of the console (14).

6. The pressure-adjustable vertical probe card testing device according to claim 1, wherein: A pressure gauge (16) is fixedly connected to the left end of the top front side of the workbench (1), and the pressure gauge (16) is electrically connected to the voltage regulator (8).

7. The pressure-adjustable vertical probe card testing device according to claim 1, wherein: The four corners of the bottom of the workbench (1) are all fixedly connected with anti-skid bases (17), and the bottoms of the multiple anti-skid bases (17) all adopt an anti-skid design.

8. The pressure-adjustable vertical probe card testing device according to claim 2, wherein: The clamping and pushing mechanism (2) adopts a symmetrical design, and the exterior of the clamping plate (207) adopts a smooth design.

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