Electronic gas mixing device

Abstract

The utility model relates to the technical field of gas mixing, in particular to an electronic gas mixing device which comprises a cabinet body, a gas storage box is fixedly connected to the rear side of the cabinet body, a vacuum pump is installed on the rear side of the cabinet body, an extraction opening of the vacuum pump is communicated with the cabinet body, an exhaust opening of the vacuum pump is communicated with the gas storage box, and a gas distribution bin is installed in an inner cavity of the cabinet body. The bottom of the gas distribution bin is fixedly communicated with a plurality of groups of gas inlet pipes, the side wall of the gas distribution bin is fixedly communicated with a gas outlet pipe, a gas detector is fixedly installed in an inner cavity of the cabinet body, the bottom of each gas inlet pipe is fixedly communicated with an anti-explosion hose, and the other end of each anti-explosion hose is fixedly communicated with a gas cylinder. The cabinet body is provided with a placing assembly for placing a gas cylinder, the cabinet body is provided with a driving assembly for driving the placing assembly to move back and forth, if gas leaks, the gas detector sends out a signal, the vacuum pump pumps the gas in the cabinet body into the gas storage box, and meanwhile, the alarm lamp gives an audible and visual alarm, so that the harm of gas leakage can be effectively reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of gas mixing, in particular to an electronic gas mixing device. Background Art

[0002] Electronic gases are essential, fundamental supporting materials for the development of integrated circuits, optoelectronics, and microelectronics, particularly in the manufacturing of very large-scale integrated circuits (VLSI), liquid crystal displays (LCDs), semiconductor light-emitting devices, and semiconductor materials. They are often called the "blood" and "food" of the electronics industry. Electronic gas blending involves mixing different types of electronic gases in specific proportions to meet the stringent composition and purity requirements of semiconductor manufacturing. This process requires a high degree of precision and control to ensure the quality of the mixed gas meets the high standards of semiconductor manufacturing.

[0003] Since most gases commonly used in the semiconductor industry are flammable, explosive, and highly corrosive, as well as toxic to the human blood, nerves, and internal organs, mixing electronic gases presents significant challenges. Existing electronic gas mixtures are often prepared using conventional standard gas preparation devices, lacking comprehensive protection against gas leaks, which can endanger the health of operators. To promptly detect and mitigate the hazards of electronic gas leaks, we propose an electronic gas mixing device. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides an electronic gas mixing device, which can promptly detect electronic gas leakage problems and reduce the hazards of electronic gas leakage.

[0005] In order to achieve the above objectives, the present invention is implemented through the following technical solutions:

[0006] An electronic gas mixing device comprises a cabinet, a gas storage box is fixedly connected to the rear side of the cabinet, a vacuum pump is fixedly installed on the rear side of the cabinet, the suction port of the vacuum pump is fixedly connected to the cabinet, the exhaust port of the vacuum pump is fixedly connected to the gas storage box, an upper cabinet door and a lower cabinet door are provided on the front side of the cabinet, a gas distribution warehouse is fixedly installed in the inner cavity of the cabinet, a plurality of groups of air inlet pipes are fixedly connected to the bottom of the air distribution warehouse, an air outlet pipe is fixedly connected to the side wall of the air distribution warehouse, the air outlet pipe passes through the cabinet, a valve is provided on the air outlet pipe, a gas detector is fixedly installed in the inner cavity of the cabinet, an explosion-proof hose is fixedly connected to the bottom of the air inlet pipe, and the other end of the explosion-proof hose is fixedly connected to a gas cylinder, a placement component for placing the gas cylinder is installed on the cabinet, and a driving component for driving the placement component to move back and forth is installed on the cabinet.

[0007] Preferably, the placement component includes a base plate, which is slidably connected to the bottom of the cabinet inner cavity, a vertical plate fixedly connected to the top of the base plate, several groups of positioning rings fixedly connected to the left and right sides of the vertical plate, and a first limit plate fixedly connected to the top of the vertical plate.

[0008] Preferably, the driving assembly includes a cylinder, which is fixedly installed on the rear side of the cabinet, and the output end of the cylinder is fixedly connected to a driving rod, which slides into the cabinet, and the other end of the driving rod is fixedly connected to the bottom plate, and the top of the driving rod is fixedly connected to a vertical rod, and two groups of connecting rods are hinged on both sides of the vertical rod, and the other end of the connecting rod is hinged to a second limit plate, and the second limit plate is fixedly connected to several groups of telescopic rods on the side close to the cabinet side wall, and the other end of the telescopic rod is fixedly connected to the cabinet side wall.

[0009] Preferably, an alarm light is fixedly installed on the top of the cabinet, and the alarm light is electrically connected to an external power supply.

[0010] Preferably, a plurality of groups of rollers are provided at the bottom of the cabinet, and a brake device is provided on the rollers.

[0011] Preferably, a partition plate is fixedly connected to the inner wall of the cabinet, the air inlet pipe passes through the partition plate, and a plurality of through holes are opened on the partition plate.

[0012] Preferably, the first limiting plate and the second limiting plate are both provided with grooves matching the shape of the gas cylinder.

[0013] Preferably, the air outlet pipe and the air inlet pipe are both provided with a pressure gauge, a flow meter and a one-way valve.

[0014] Preferably, both the upper cabinet door and the lower cabinet door are provided with handles.

[0015] Preferably, explosion-proof glass is provided on the upper cabinet door.

[0016] Beneficial effects

[0017] The utility model provides an electronic gas mixing device. Compared with the prior art, it has the following advantages:

[0018] This electronic gas mixing device can prevent gas leakage caused by shaking of the gas cylinder during the gas mixing process by setting a first limit plate and a second limit plate, thereby reducing the risk of gas leakage. If gas leakage still occurs during the mixing process, the gas detector sends a signal to control the vacuum pump to start and draw the gas in the cabinet into the gas storage box for temporary storage. At the same time, the alarm light gives an audible and visual alarm to remind the operator and ensure the operator's health. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the main structure of the utility model;

[0020] Figure 2 This is a schematic diagram of the rear view structure of the main body of the utility model;

[0021] Figure 3 This is a schematic diagram of the internal structure of the main body of the utility model;

[0022] Figure 4 This is a schematic diagram of the structure of the components of the main body of the utility model;

[0023] Figure 5 This is a schematic diagram of the structure of the main driving component of the utility model;

[0024] Figure 6 This is a schematic diagram of the connection structure between the main air distribution chamber and the air intake pipe of the utility model.

[0025] In the figure: 1. Cabinet body; 2. Alarm light; 3. Upper cabinet door; 4. Lower cabinet door; 5. Roller; 6. Exhaust pipe; 7. Valve; 8. Gas storage box; 9. Pressure gauge; 10. Flow meter; 11. One-way valve; 12. Vacuum pump; 13. Cylinder; 14. Gas distribution chamber; 15. Inlet pipe; 16. Partition plate; 17. Gas detector; 18. Explosion-proof hose; 19. Gas cylinder; 20. Vertical plate; 21. Bottom plate; 22. First limit plate; 23. Positioning ring; 24. Drive rod; 25. Vertical rod; 26. Connecting rod; 27. Second limit plate; 28. Telescopic rod. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0027] See also Figure 1-6The utility model provides a technical solution: an air storage box 8 is fixedly connected to the rear side of the cabinet 1, a vacuum pump 12 is fixedly installed on the rear side of the cabinet 1, the air suction port of the vacuum pump 12 is fixedly connected to the cabinet 1, and the exhaust port of the vacuum pump 12 is fixedly connected to the air storage box 8. The front side of the cabinet 1 is provided with an upper cabinet door 3 and a lower cabinet door 4. An air distribution warehouse 14 is fixedly installed in the inner cavity of the cabinet 1, and several groups of air inlet pipes 15 are fixedly connected to the bottom of the air distribution warehouse 14. The side wall of the air distribution warehouse 14 is fixedly connected to the air outlet pipe 6, which passes through the cabinet 1, and a valve 7 is provided on the air outlet pipe 6. A gas detector 17 is fixedly installed in the inner cavity of the cabinet 1, and an explosion-proof hose 18 is fixedly connected to the bottom of the air inlet pipe 15. The other end of the explosion-proof hose 18 is fixedly connected to a gas cylinder 19. A placement component for placing the gas cylinder 19 is installed on the cabinet 1, and a driving component for driving the placement component to move back and forth is installed on the cabinet 1.

[0028] When using this electronic gas mixing device, the operator first places the corresponding gas cylinder 19 on the placement component, then moves the placement component to the inner cavity of the cabinet 1 through the driving component, and then connects the gas cylinder 19 to the gas distribution warehouse 14 through the explosion-proof hose 18 and the air inlet pipe 15. After operating the gas distribution warehouse 14 to set the relevant parameters, gas mixing begins. During the mixing process, the upper cabinet door 3 and the lower cabinet door 4 need to be closed. If gas leakage occurs during the mixing process, the leaked gas is detected by the gas detector 17. The gas detector 17 sends a signal to the console to control the vacuum pump 12 to start and draw the gas in the cabinet 1 into the gas storage box 8 for temporary storage. At this time, the cabinet 1 is in a negative pressure state, and the gas will not leak out. The gas in the gas storage box 8 can be recycled or harmlessly treated to prevent environmental pollution. After the mixing is completed, the valve 7 is opened, and the gas in the gas distribution warehouse 14 is transported to the gas storage device through the outlet pipe 6.

[0029] The placement component includes a bottom plate 21, which is slidably connected to the bottom of the inner cavity of the cabinet 1. The top of the bottom plate 21 is fixedly connected to a vertical plate 20. Several groups of positioning rings 23 are fixedly connected to the left and right sides of the vertical plate 20. The top of the vertical plate 20 is fixedly connected to a first limit plate 22.

[0030] The driving assembly includes a cylinder 13, which is fixedly installed on the rear side of the cabinet 1. The output end of the cylinder 13 is fixedly connected to a driving rod 24, which slides into the cabinet 1. The other end of the driving rod 24 is fixedly connected to the bottom plate 21. The top of the driving rod 24 is fixedly connected to a vertical rod 25. Two groups of connecting rods 26 are hinged on both sides of the vertical rod 25. The other end of the connecting rod 26 is hinged to a second limit plate 27. The second limit plate 27 is fixedly connected to several groups of telescopic rods 28 on the side close to the side wall of the cabinet 1. The other end of the telescopic rod 28 is fixedly connected to the side wall of the cabinet 1.

[0031] First, place the gas cylinder 19 into the positioning ring 23 to prevent the gas cylinder 19 from tipping over during the movement, then start the cylinder 13, and drive the bottom plate 21 to move into the cabinet 1 through the driving rod 24, thereby driving the gas cylinder 19 to move into the cabinet 1. At the same time, the driving rod 24 drives the vertical rod 25 to move into the cabinet 1, so that the two sets of connecting rods 26 rotate around the top of the vertical rod 25, driving the two sets of second limit plates 27 to move closer to the middle until the gas cylinder 19 is clamped by the first limit plate 22 and the second limit plate 27, thereby preventing gas leakage caused by the shaking of the gas cylinder 19 during the gas distribution process.

[0032] An alarm light 2 is fixedly mounted on the top of the cabinet 1 and is electrically connected to an external power supply. When gas leaks, the alarm light 2 receives a signal from the gas detector 17 and generates an audible and visual alarm to alert the operator and protect the operator's health.

[0033] The bottom of the cabinet 1 is provided with a plurality of rollers 5, and the rollers 5 are provided with brake devices, which are convenient for operators to move the device to a specified position.

[0034] A partition plate 16 is fixedly connected to the inner wall of the cabinet 1, and the air inlet pipe 15 passes through the partition plate 16. The partition plate 16 is provided with a plurality of through holes to prevent the air inlet pipe 15 from shaking and improve the efficiency of the pipeline connection.

[0035] The first limiting plate 22 and the second limiting plate 27 are both provided with grooves that match the shape of the gas cylinder 19. The gas cylinder 19 can be limited.

[0036] The outlet pipe 6 and the inlet pipe 15 are both provided with a pressure gauge 9, a flow meter 10 and a one-way valve 11. Real-time detection of gas delivery data makes gas mixing more accurate and efficient.

[0037] Both the upper cabinet door 3 and the lower cabinet door 4 are provided with handles, which are convenient for operators to open and close the upper cabinet door 3 and the lower cabinet door 4.

[0038] Explosion-proof glass is provided on the upper cabinet door 3. The operator can observe the instrument parameters on the gas distribution warehouse 14 through the explosion-proof glass.

[0039] The cylinder 19 is then driven by the piston 22 and the piston 23 to move to the left of the cylinder 19. The piston 22 is moved to the right of the piston 23 and the piston 23 is moved to the right of the piston 23. The piston 22 is moved to the left of the cylinder 19. The piston 22 is moved to the right of the piston 23 and the piston 23 is moved to the right of the piston 23. Instrument parameters, if gas leakage occurs during the mixing process, the leaked gas is detected by the gas detector 17, and the gas detector 17 sends a signal to the console to control the vacuum pump 12 to start the gas in the cabinet 1 to be drawn into the gas storage box 8 for temporary storage. At this time, the cabinet 1 is in a negative pressure state, and the gas will not leak out. The gas in the gas storage box 8 can be recycled or harmlessly treated to prevent environmental pollution. At the same time, the alarm light 2 can receive the signal sent by the gas detector 17 and give an audible and visual alarm to remind the operator and protect the operator's health. After the mixing is completed, the valve 7 is opened, and the gas in the gas distribution warehouse 14 is transported to the gas storage device through the outlet pipe 6. The outlet pipe 6 and the inlet pipe 15 are both provided with a pressure gauge 9, a flow meter 10 and a one-way valve 11, which can detect the gas transmission data in real time, making the gas mixing more accurate and efficient. Several groups of rollers 5 are provided at the bottom of the cabinet 1, and a brake device is provided on the roller 5 to facilitate the operator to move the device to the specified position.

[0040] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0041] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An electronic gas mixing device, comprising a cabinet (1), characterized in that: The cabinet (1) is fixedly connected to an air storage box (8) on the rear side, and a vacuum pump (12) is fixedly installed on the rear side of the cabinet (1). The air extraction port of the vacuum pump (12) is fixedly connected to the cabinet (1), and the exhaust port of the vacuum pump (12) is fixedly connected to the air storage box (8). The cabinet (1) is provided with an upper cabinet door (3) and a lower cabinet door (4) on the front side. An air distribution chamber (14) is fixedly installed in the inner cavity of the cabinet (1), and a plurality of air inlet pipes (15) are fixedly connected to the bottom of the air distribution chamber (14). The air distribution chamber (14) has a plurality of air inlet pipes (15) on the side. An outlet pipe (6) is fixedly connected to the wall, the outlet pipe (6) passes through the cabinet (1), a valve (7) is provided on the outlet pipe (6), a gas detector (17) is fixedly installed in the inner cavity of the cabinet (1), an explosion-proof hose (18) is fixedly connected to the bottom of the inlet pipe (15), the other end of the explosion-proof hose (18) is fixedly connected to a gas cylinder (19), a placement component for placing the gas cylinder (19) is installed on the cabinet (1), and a driving component for driving the placement component to move forward and backward is installed on the cabinet (1).

2. The electronic gas mixing device according to claim 1, characterized in that: The placement assembly comprises a bottom plate (21), the bottom plate (21) is slidably connected to the bottom of the inner cavity of the cabinet (1), the top of the bottom plate (21) is fixedly connected to a vertical plate (20), the left and right sides of the vertical plate (20) are fixedly connected to a plurality of groups of positioning rings (23), and the top of the vertical plate (20) is fixedly connected to a first limiting plate (22).

3. The electronic gas mixing device according to claim 2, characterized in that: The driving assembly comprises a cylinder (13), wherein the cylinder (13) is fixedly mounted on the rear side of the cabinet (1), an output end of the cylinder (13) is fixedly connected to a driving rod (24), the driving rod (24) is slidably inserted into the cabinet (1), the other end of the driving rod (24) is fixedly connected to the bottom plate (21), the top of the driving rod (24) is fixedly connected to a vertical rod (25), two groups of connecting rods (26) are hinged on both sides of the vertical rod (25), the other end of the connecting rod (26) is hinged to a second limiting plate (27), the second limiting plate (27) is fixedly connected to a plurality of telescopic rods (28) on a side close to the side wall of the cabinet (1), and the other end of the telescopic rod (28) is fixedly connected to the side wall of the cabinet (1).

4. The electronic gas mixing device according to claim 3, characterized in that: An alarm light (2) is fixedly mounted on the top of the cabinet (1), and the alarm light (2) is electrically connected to an external power supply.

5. The electronic gas mixing device according to claim 4, characterized in that: A plurality of groups of rollers (5) are provided at the bottom of the cabinet (1), and a brake device is provided on the rollers (5).

6. The electronic gas mixing device according to claim 5, characterized in that: A partition plate (16) is fixedly connected to the inner wall of the cabinet (1), the air inlet pipe (15) passes through the partition plate (16), and a plurality of through holes are formed on the partition plate (16).

7. The electronic gas mixing device according to claim 6, characterized in that: The first limiting plate (22) and the second limiting plate (27) are both provided with grooves matching the shape of the gas cylinder (19).

8. The electronic gas mixing device according to claim 7, characterized in that: The air outlet pipe (6) and the air inlet pipe (15) are both provided with a pressure gauge (9), a flow meter (10) and a one-way valve (11).

9. The electronic gas mixing device according to claim 1, characterized in that: Both the upper cabinet door (3) and the lower cabinet door (4) are provided with handles.

10. The electronic gas mixing device according to claim 9, characterized in that: The upper cabinet door (3) is provided with explosion-proof glass.

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