Desktop type plasma cleaning machine

Abstract

The utility model discloses a desktop type plasma cleaning machine, and particularly relates to the field of plasma cleaning machines, a discharge cavity is arranged in the cleaning machine, the front end of the discharge cavity is embedded on a panel on the front side of the cleaning machine, and a plurality of layers of sample discs which are arranged up and down are arranged in the discharge cavity. Electrode plates are arranged above the plurality of layers of sample discs, movable parts for driving the sample table to adjust the height are arranged on the two sides of the sample discs, the movable parts are arranged on the inner walls of the two sides of the discharge cavity, and a radio frequency power supply is arranged at the top end of the discharge cavity. According to the utility model, the sample plates are moved up and down by utilizing the vertically extending movable rod and the movable sleeve, so that the distance and the height of the sample plates are adjusted, in the actual use process, the operation is more convenient, the whole part does not need to be pulled out of the cavity and re-inserted, the operation steps are simplified, and the working efficiency is improved. Even if the product is on the sample disc, the product can be adjusted, so that more accurate spacing control is facilitated.

Description

Technical Field

[0001] The utility model relates to the field of plasma cleaning machines, and more specifically, to a desktop plasma cleaning machine. Background Art

[0002] In the semiconductor and thick film circuit industries, plasma cleaning processes are required for components before packaging, coating, and chip bonding. The cleaning effect will affect the final product quality. Plasma cleaning machine is a new material surface modification method that can change the surface properties of materials. It can contact a variety of materials, including metals, semiconductors, oxides, polymers, etc., regardless of the treatment object. The uniqueness of plasma cleaning machine is that it can not only change the surface properties of materials, but also can contact a variety of materials, regardless of the treatment object. Generally, during the product processing process, the product is placed on a sample tray in the internal cavity of the cleaning machine. The sample tray generally includes multiple upper and lower parts, and the sample trays are fixed on both sides with snap-on components. However, in actual use, the spacing between them is inconvenient to adjust. Utility Model Content

[0003] In order to solve the above technical problems, the utility model provides a desktop plasma cleaning machine, wherein a discharge chamber is installed inside the cleaning machine, the front end of the discharge chamber is embedded in the panel on the front side of the cleaning machine, several layers of sample trays arranged vertically are installed inside the discharge chamber, electrode plates are arranged above the several layers of sample trays, movable parts for driving the sample stage for height adjustment are arranged on both sides of the sample tray, the movable parts are installed on the inner walls on both sides of the discharge chamber, a radio frequency power supply is installed at the top of the discharge chamber, and a discharge system is installed at the rear end of the discharge chamber.

[0004] In a preferred embodiment, the movable parts are arranged in four groups and are respectively located at the four corners of the sample tray. The movable parts include two upper and lower fixed blocks, a movable rod is connected between the upper and lower fixed blocks, a movable sleeve with lifting and lowering movements is provided on the outside of the movable rod, and two upper and lower clamping plates are installed on the outer wall of the movable sleeve facing the inner cavity of the discharge chamber.

[0005] In a preferred embodiment, the upper and lower fixed blocks are respectively fixed on the inner walls of the top and bottom of the discharge chamber, the movable rod is configured to be prismatic and a gap is left between it and the inner wall of the discharge chamber, the inner wall of the movable sleeve is fitted on the outer wall of the movable rod, and the upper and lower clamping plates are clamped on the surface of the sample tray.

[0006] In a preferred embodiment, a scale is provided on the outer wall of the movable rod near the front end of the discharge chamber, a spiral tube is fixed on the outer wall of the movable sleeve near the front end of the discharge chamber, a screw rod passing through the movable sleeve is inserted into the spiral tube, the rear end of the screw rod is attached to the outer wall of the movable rod, and a turntable is fixed at the front end of the screw rod.

[0007] In a preferred embodiment, a microwave power supply is installed inside the cleaning machine below the discharge cavity, a flow meter is provided on one side of the microwave power supply, and a control panel is installed on one side of the discharge cavity.

[0008] In a preferred embodiment, a movable hinged front door panel is installed at the front end of the discharge chamber, and an observation window is installed on the front door panel.

[0009] The technical effects and advantages of this utility model are:

[0010] The utility model utilizes a vertically extending movable rod and a movable sleeve to move the sample tray up and down to adjust the spacing and height. In actual use, the operation is more convenient and there is no need to pull the entire component out of the cavity and reinsert it, which simplifies the operation steps. Even if the product is on the sample tray, it can be adjusted, which facilitates more accurate spacing control. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0012] Figure 2 This is a schematic diagram of the internal structure of the utility model;

[0013] Figure 3 This is a schematic diagram of the internal structure of the utility model from another angle;

[0014] Figure 4 It is a schematic diagram of the structure of the movable part of the utility model.

[0015] Explanation of the accompanying symbols: 1 cleaning machine, 2 discharge chamber, 3 sample tray, 4 electrode plate, 5 radio frequency power supply, 6 discharge system, 7 fixed block, 8 movable rod, 9 movable sleeve, 10 clamping plate, 11 scale, 12 screw tube, 13 screw, 14 turntable, 15 microwave power supply, 16 flow meter, 17 control panel, 18 front door panel, 19 observation window. DETAILED DESCRIPTION

[0016] The present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for purposes of illustration and description and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those skilled in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention and to enable those skilled in the art to understand the present invention and design various embodiments with various modifications suitable for specific applications.

[0017] like Figure 1-4A desktop plasma cleaning machine 1 is shown. A discharge chamber 2 is installed within the cleaning machine 1. The front end of the discharge chamber 2 is embedded in a panel on the front side of the cleaning machine 1. Several layers of sample trays 3 are installed in the discharge chamber 2, arranged vertically. Electrode plates 4 are provided above the layers of sample trays 3. Movable parts that drive the sample stage for height adjustment are provided on both sides of the sample trays 3. The movable parts are mounted on the inner walls of the discharge chamber 2 on both sides. A radio frequency power supply 5 is installed at the top of the discharge chamber 2, and a discharge system 6 is installed at the rear end of the discharge chamber 2.

[0018] A movable hinged front door panel 18 is installed at the front end of the discharge cavity 2, and an observation window 19 is installed on the front door panel 18. A sealing component is installed on the front door panel 18, which can seal the discharge cavity 2 after closing. The observation window 19 facilitates observation of the internal state of the discharge cavity during operation.

[0019] Furthermore, the movable parts are arranged in four groups and are respectively located at the four corners of the sample tray 3. The sample tray 3 is supported by the four groups of movable parts inside the discharge chamber 2. The product to be cleaned is placed on the sample tray 3. The height of the sample tray 3 can be adjusted by the movable parts to change the spacing between different layers of sample trays 3 to adapt to different products.

[0020] Among them, a vacuum system is also provided inside the cleaning machine 1, which consists of a vacuum pump, an inflation system, seals, valves, and a pressure sensor. The vacuum pump draws vacuum and maintains the air pressure balance in the discharge cavity 2, and the pressure sensor measures the pressure during the reaction.

[0021] The discharge system 6 is located at the rear end of the discharge chamber 2 and includes components such as the target feeder, the feeder electrode, and the electrode plate 4. During operation, the plasma cleaning machine 1 applies a high voltage to the target material, and the feeder electrode transfers electrical energy to the working gas, exciting the gas to generate plasma, thereby achieving cleaning, etching, coating, and other treatments on the material surface. It can remove organic matter, such as the surface, pores, and cracks of semiconductor chips, and reduce bubbles and cracks generated during the packaging process, thereby ensuring the performance and working life of the packaged equipment.

[0022] The plasma cleaning machine 1 can also be used in the semiconductor industry to perform surface preventive treatment, thereby improving the efficiency and quality of the semiconductor production process. The plasma cleaning machine 1 can remove pollutants, scratches and oxide layers on the surface of the device, thereby improving the reliability and maintenance efficiency of the device.

[0023] A microwave power supply 15 is installed inside the cleaning machine 1 below the discharge cavity 2 , a flow meter 16 is provided on one side of the microwave power supply 15 , and a control panel 17 is installed on one side of the discharge cavity 2 ;

[0024] The control panel 17 performs functions such as automatic process control and safety interlock protection to control the entire cleaning process. The flow meter 16 connects valves and gas pipes to quantitatively fill the discharge chamber 2 with reaction gas.

[0025] The movable part includes two upper and lower fixed blocks 7, a movable rod 8 is connected between the upper and lower fixed blocks 7, a movable sleeve 9 that can be lifted and lowered is sleeved on the outer side of the movable rod 8, and two upper and lower clamping plates 10 are installed on the outer wall of the movable sleeve 9 facing the inner cavity of the discharge chamber 2;

[0026] The upper and lower fixing blocks 7 are respectively fixed to the inner walls of the top and bottom of the discharge chamber 2. The movable rod 8 is set in a prismatic shape and has a gap between it and the inner wall of the discharge chamber 2. The inner wall of the movable sleeve 9 is attached to the outer wall of the movable rod 8. The upper and lower clamping plates 10 are clamped on the surface of the sample tray 3.

[0027] A scale 11 is provided on the outer wall of the movable rod 8 near the front end of the discharge chamber 2, a screw 12 is fixed on the outer wall of the movable sleeve 9 near the front end of the discharge chamber 2, a screw 13 penetrating the movable sleeve 9 is inserted into the screw 12, the rear end of the screw 13 is attached to the outer wall of the movable rod 8, and a rotary disk 14 is fixed at the front end of the screw 13;

[0028] Based on the above, multiple upper and lower sample trays 3 are clamped and fixed by the movable parts on both sides. The edges of the sample trays 3 are inserted between the two clamping plates 10 on the movable sleeve 9. The spacing between the clamping plates 10 matches the thickness of the sample tray 3, and the height of the movable sleeve 9 can be adjusted outside the movable rod 8. The screw 13 is driven by the turntable 14 so that its end rests on the outer wall of the movable rod 8, and the movable sleeve 9 is limited outside the movable rod 8 to achieve fixation of the movable sleeve 9.

[0029] Furthermore, during use, the spacing between the sample plates 3 can be freely adjusted according to the specifications of the product to be cleaned. After adjustment, the distance between the movable sleeve 9 on the movable rod 8 is fixed. During the adjustment process, the spacing and height are controlled by the scale 11 on the outer wall of the movable rod 8.

[0030] By utilizing the vertically extending movable rod 8 and movable sleeve 9 to move the sample tray 3 up and down, the spacing and height thereof can be adjusted. In actual use, the operation is more convenient and there is no need to pull the entire component out of the cavity and reinsert it, which simplifies the operation steps. Even if the product is on the sample tray 3, it can be adjusted, which facilitates more precise spacing control.

[0031] Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without making any creative efforts should fall within the scope of protection of the present invention. Structures, devices, and operating methods not specifically described and explained in this utility model shall be implemented in accordance with conventional means in the field unless otherwise specified or limited.

Claims

1. A desktop plasma cleaning machine, wherein a discharge chamber is installed inside the cleaning machine, the front end of the discharge chamber is embedded in the panel on the front side of the cleaning machine, and several layers of sample trays arranged in an upper and lower manner are installed inside the discharge chamber, characterized in that: Electrode plates are arranged above several layers of sample trays, and movable parts are arranged on both sides of the sample trays to drive the sample stage for height adjustment. The movable parts are installed on the inner walls on both sides of the discharge cavity. A radio frequency power supply is installed at the top of the discharge cavity, and a discharge system is installed at the rear end of the discharge cavity.

2. The desktop plasma cleaning machine according to claim 1, characterized in that: The movable parts are arranged in four groups and are respectively located at the four corners of the sample tray. The movable parts include two upper and lower fixed blocks. A movable rod is connected between the upper and lower fixed blocks. A movable sleeve that can be lifted and lowered is provided on the outside of the movable rod. Two upper and lower clamping plates are installed on the outer wall of the movable sleeve facing the inner cavity of the discharge chamber.

3. The desktop plasma cleaning machine according to claim 2, characterized in that: The upper and lower fixed blocks are respectively fixed on the inner walls of the top and bottom of the discharge chamber, the movable rod is set to be prismatic and a gap is left between it and the inner wall of the discharge chamber, the inner wall of the movable sleeve is fitted on the outer wall of the movable rod, and the upper and lower clamping plates are clamped on the surface of the sample tray.

4. The desktop plasma cleaning machine according to claim 2, characterized in that: A scale is provided on the outer wall of the movable rod near the front end of the discharge cavity, a screw tube is fixed on the outer wall of the movable sleeve near the front end of the discharge cavity, a screw rod passing through the movable sleeve is inserted into the screw tube, the rear end of the screw rod is attached to the outer wall of the movable rod, and a turntable is fixed at the front end of the screw rod.

5. The desktop plasma cleaning machine according to claim 1, characterized in that: A microwave power supply is installed inside the cleaning machine below the discharge cavity, a flow meter is provided on one side of the microwave power supply, and a control panel is installed on one side of the discharge cavity.

6. The desktop plasma cleaning machine according to claim 1, characterized in that: A movable hinged front door panel is installed at the front end of the discharge cavity, and an observation window is installed on the front door panel.

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