MOCVD coating device

Abstract

The utility model provides an MOCVD (Metal Organic Chemical Vapor Deposition) coating device, belongs to the technical field of semiconductor processing, and solves the problem of poor coating quality of an MOCVD coating device in the prior art. The reaction device comprises a shell, a reaction cavity is formed in the shell, the reaction cavity is used for material reaction, the reaction cavity is communicated with a first pipeline, and the first pipeline is used for conveying a precursor; the base station is arranged in the reaction cavity, and the base station is used for bearing a substrate; the first heating assembly is arranged below the base table, and the first heating assembly acts on the base table to conduct heating; and the second heating assembly is arranged between the shell and the reaction cavity, and the second heating assembly acts on the reaction cavity for heating. According to the MOCVD coating device, the second heating assembly is arranged between the shell and the reaction cavity, and the second heating assembly heats the periphery of the reaction cavity, so that the heating uniformity of the reaction cavity is improved, the metal deposition uniformity above the base station is improved, and the coating quality of the MOCVD coating device is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor processing, and in particular relates to an MOCVD film coating device. Background Art

[0002] Coating equipment is a technology used to grow semiconductor thin films on substrates. It uses metal organic compounds and hydrides as raw materials to perform vapor phase epitaxy on the substrate, growing materials with specific optical and electrical properties.

[0003] The coating equipment mainly consists of an evaporation chamber, a reaction chamber, and a heating assembly. The evaporation chamber heats and sublimates the metal compound into a raw gas, which is then transferred to the reaction chamber for reactive coating. The heating assembly provides high temperature conditions in the reaction chamber, allowing the raw gas to react and coat the substrate inside the reaction chamber.

[0004] However, the heating components of the coating equipment in the prior art are generally arranged below the machine plate, and the temperature of the bottom of the reaction chamber is higher than that of the top, which makes the heat distribution in the reaction chamber uneven, resulting in uneven distribution of metal deposition, and ultimately affecting the coating quality.

[0005] Based on the above content, the technical problem to be solved by this application is: how to improve the coating quality of the MOCVD coating device. Utility Model Content

[0006] The purpose of this utility model is to address the above-mentioned problems existing in the prior art and propose an MOCVD coating device to solve the problem of poor coating quality in the prior art. The technical effect of this application solution is to improve the coating quality of the MOCVD device.

[0007] The objectives of the present utility model can be achieved through the following technical solutions: an MOCVD coating device, comprising a shell, a reaction chamber formed in the shell, the reaction chamber is used for material reaction, the reaction chamber is connected to a first pipeline, the first pipeline is used to transport a precursor; a base, the base is arranged in the reaction chamber, the base is used to carry a substrate; a first heating component, the first heating component is arranged below the base, and the first heating component acts on the base for heating; and a second heating component, the second heating component is arranged between the shell and the reaction chamber, and the second heating component acts on the reaction chamber for heating.

[0008] It is understandable that the materials in the reaction chamber include a precursor and oxygen. The precursor is a metal organic substance. The two can react at high temperature to obtain a metal deposit, which can be deposited on the substrate on the base, thereby completing the coating. Among them, the first pipeline is connected to the reaction chamber in the shell from the outside of the shell. The outside of the first pipeline can be connected to the precursor supply source, and the precursor is sent into the reaction chamber through the first pipeline; a base is set in the reaction chamber, and the base can be placed on the supporting substrate. With the reaction in the reaction chamber, a metal film layer will gradually be generated on the substrate. The first heating component mainly heats the base below, thereby catalyzing the reaction deposition above the base. In addition, by arranging a second heating component between the shell and the reaction chamber, the second heating component heats the periphery of the reaction chamber, thereby improving the heating uniformity of the reaction chamber, thereby improving the uniformity of metal deposition above the base, and then improving the coating quality of the MOCVD coating device.

[0009] In the above-mentioned MOCVD coating device, the second heating component includes: a heating chamber, the heating chamber is arranged between the shell and the reaction chamber, the heating chamber is externally connected to a second pipeline, the second pipeline is used to transport a thermal fluid to the heating chamber; a second heating element, the second heating element acts on the heating chamber to heat the heating chamber. The second pipeline is externally connected to a thermal fluid supply source, and the thermal fluid is transported into the heating chamber by the second pipeline. By uniformly distributing the thermal fluid around the periphery of the reaction chamber, the heating uniformity can be improved. Exemplarily, the second heating element is an electromagnetic induction coil, which heats the heating chamber by energizing it to maintain the heat of the thermal fluid.

[0010] In the aforementioned MOCVD coating apparatus, the heating chamber is annularly shaped to surround the reaction chamber. A heat-conducting wall is provided between the heating chamber and the reaction chamber, and the heat-conducting wall is at least partially made of a metal material. It will be appreciated that by configuring the heater in an annular shape, it can be evenly adhered to the periphery of the reaction chamber, and heat is transferred through the heat-conducting wall. The heat-conducting wall is at least partially made of metal to have a high thermal conductivity.

[0011] The MOCVD coating apparatus further includes a temperature control unit electrically connected to the first heating element and the second heating element, respectively, for controlling the heating power of the first heating element and the second heating element, respectively. It is understood that by providing the temperature control unit, the heating power of the first heating element and the second heating element can be controlled separately. In particular, when the heating power of the first heating element is higher than the heating power of the second heating element, the gas flows from the high temperature to the low temperature, which is more conducive to the reaction area being moved toward the center of the reaction chamber, i.e., above the base.

[0012] In the aforementioned MOCVD coating apparatus, the reaction chamber is connected to a first temperature measuring element, the heating chamber is connected to a second temperature measuring element, and the temperature control unit is electrically connected to the first and second temperature measuring elements, respectively. It is understood that by detecting the temperatures of the first and second temperature measuring elements, the temperature control unit can facilitate adaptive adjustment of the heating power of the first and second heating elements based on the temperature data. Exemplarily, the first and second temperature measuring elements may be infrared temperature sensors.

[0013] In the aforementioned MOCVD coating apparatus, the first heating assembly includes: a first heating element movably disposed within the reaction chamber; and a drive mechanism having an output end that acts on the first heating element to enable the first heating element to move horizontally and vertically. Exemplarily, the first heating element is a tungsten heater that heats the base. The first heating element is connected to the output end of the drive mechanism so that it moves synchronously with the rotation or elevation of the output end, thereby improving heating uniformity.

[0014] In the aforementioned MOCVD coating apparatus, the drive mechanism is disposed outside the reaction chamber, and the output terminal extends from the outside of the reaction chamber into the reaction chamber. A thermal insulation layer is provided outside the reaction chamber to reflect thermal radiation. For example, the thermal insulation layer can be made of a high-temperature metal such as molybdenum or tungsten. The thermal insulation layer can specularly reflect thermal radiation, allowing the first heating element to radiate heat in a unidirectional manner, thereby reducing heat loss.

[0015] In the aforementioned MOCVD coating apparatus, a seal is provided between the thermal insulation layer and the base, and the seal is a labyrinth seal. It is understood that providing a seal between the thermal insulation layer and the base prevents leakage of reaction products from the reaction chamber, thereby damaging the underlying drive mechanism. The labyrinth seal ensures a sufficiently strong sealing performance.

[0016] In the aforementioned MOCVD coating apparatus, a detection chamber is further provided below the thermal insulation layer. A vacuum gauge is externally connected to the detection chamber for monitoring the detection chamber. It is understood that by providing the detection chamber below the thermal insulation layer and using the external vacuum gauge to monitor the vacuum level in the detection chamber, it is possible to determine whether reactant leakage has occurred.

[0017] In the aforementioned MOCVD coating apparatus, a vacuum pump is provided outside the housing. The vacuum pump is connected to the reaction chamber via a third pipeline, which is used to extract material. It is understood that by operating the vacuum pump on the reaction chamber, material can be extracted from the reaction chamber via the third pipeline. The extracted material includes unreacted precursors or reaction products.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] 1. The present application provides a second heating assembly between the housing and the reaction chamber. The second heating assembly heats the periphery of the reaction chamber, thereby improving the heating uniformity of the reaction chamber, thereby improving the uniformity of metal deposition above the base, and further improving the coating quality of the MOCVD coating device;

[0020] 2. The present application connects the second pipeline to an external hot fluid supply source, and the hot fluid is transported to the heating chamber through the second pipeline, thereby evenly distributing the hot fluid around the periphery of the reaction chamber, thereby improving heating uniformity;

[0021] 3. The present application detects the temperature of the first temperature measuring element and the second temperature measuring element, so that the temperature control unit can adaptively adjust the heating power of the first heating component and the second heating component based on the temperature data, thereby improving the coating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the three-dimensional structure of the MOCVD coating device of the present application;

[0023] Figure 2 yes Figure 1 Schematic diagram of the cross-sectional structure;

[0024] Figure 3 yes Figure 2 Schematic diagram of the enlarged structure of area A in the middle;

[0025] Figure 4 This is a schematic diagram of the top view of the MOCVD coating device of the present application;

[0026] In the figure, 100, shell; 110, reaction chamber; 120, first pipeline; 130, first temperature measuring element; 140, second temperature measuring element; 150, thermal insulation layer; 160, sealing element; 170, detection chamber; 200, base; 300, first heating component; 310, first heating element; 320, driving mechanism; 321, output end; 400, second heating component; 410, heating chamber; 420, second heating element; 430, second pipeline; 440, heat-conducting wall; 500, temperature control unit; 600, vacuum gauge; 700, vacuum pump; 710, third pipeline. Specific embodiments

[0027] To make the above-mentioned objects, features, and advantages of the present invention more clearly understood, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without violating the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0028] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0029] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this utility model, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0030] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0031] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0032] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only embodiments.

[0033] Please refer to the attached drawings in the manual Figure 1-Figure 3 The present application includes a shell 100, a first pipe 120, a base 200, a first heating component 300, and a second heating component 400. A reaction chamber 110 is formed in the shell 100, and the reaction chamber 110 is used for material reaction. The first pipe 120 is connected to the reaction chamber 110 and is used to transport a precursor. The base 200 is disposed in the reaction chamber 110 and is used to support a substrate. The first heating component 300 is disposed below the base 200 and acts on the base 200 for heating. The second heating component 400 is disposed between the shell 100 and the reaction chamber 110 and acts on the reaction chamber 110 for heating.

[0034] It is understandable that the materials in the reaction chamber 110 include a precursor and oxygen. The precursor is a metal organic substance. The two can react at high temperature to obtain a metal deposit, which can be deposited on the substrate on the base 200, thereby completing the coating. Among them, the first pipeline 120 is connected from the outside of the shell 100 to the reaction chamber 110 in the shell 100. The outside of the first pipeline 120 can be connected to the precursor supply source, and the precursor is sent into the reaction chamber 110 through the first pipeline 120; the base 200 is set in the reaction chamber 110, and the base 200 can be placed to support the substrate. As the reaction in the reaction chamber 110, a metal film layer will gradually be generated on the substrate. The first heating component 300 mainly heats the base 200 below it, thereby catalyzing the reaction and deposition above the base 200. Additionally, by disposing a second heating component 400 between the shell 100 and the reaction chamber 110, the second heating component 400 heats the periphery of the reaction chamber 110, thereby improving the heating uniformity of the reaction chamber 110, thereby improving the uniformity of metal deposition above the base 200, and further improving the coating quality of the MOCVD coating device.

[0035] See also Figure 3 In some embodiments, the second heating assembly 400 includes a heating chamber 410 and a second heating element 420. The heating chamber 410 is disposed between the housing 100 and the reaction chamber 110. The heating chamber 410 is externally connected to a second pipe 430 for conveying a thermal fluid to the heating chamber 410. The second heating element 420 acts on the heating chamber 410 to heat the heating chamber 410. The second pipe 430 is externally connected to a thermal fluid supply source and conveys the thermal fluid into the heating chamber 410 via the second pipe 430. By uniformly distributing the thermal fluid around the periphery of the reaction chamber 110, heating uniformity can be improved. Exemplarily, the second heating element 420 is an electromagnetic induction coil that heats the heating chamber 410 by energizing it to maintain the heat of the thermal fluid.

[0036] See also Figure 3 In some embodiments, the heating chamber 410 is annularly shaped to surround the reaction chamber 110. A heat-conducting wall 440 is disposed between the heating chamber 410 and the reaction chamber 110. The heat-conducting wall 440 is at least partially made of metal. It will be appreciated that by configuring the heater in an annular shape, it can evenly fit the periphery of the reaction chamber 110, and heat is transferred through the heat-conducting wall 440. The heat-conducting wall 440 is at least partially made of metal to have high thermal conductivity.

[0037] See also Figure 1 and Figure 3In some embodiments, a temperature control unit 500 is further included. The temperature control unit 500 is electrically connected to the first heating component 300 and the second heating component 400, respectively, and is used to control the heating power of the first heating component 300 and the second heating component 400. It is understood that by providing the temperature control unit 500, the heating power of the first heating component 300 and the second heating component 400 can be controlled separately. In particular, when the heating power of the first heating component 300 is higher than the heating power of the second heating component 400, the gas flows from the high temperature to the low temperature, which is more conducive to the reaction area moving toward the middle of the reaction chamber 110, that is, above the base 200.

[0038] In some embodiments, the reaction chamber 110 is connected to a first temperature measuring element 130, the heating chamber 410 is connected to a second temperature measuring element 140, and the temperature control unit 500 is electrically connected to the first temperature measuring element 130 and the second temperature measuring element 140, respectively. It will be appreciated that by detecting the temperatures of the first and second temperature measuring elements 130, 140, the temperature control unit 500 can adaptively adjust the heating power of the first and second heating elements 300, 400 based on the temperature data. For example, the first and second temperature measuring elements 130, 140 can be infrared temperature sensors.

[0039] In some embodiments, the first heating assembly 300 includes a first heating element 310 and a drive mechanism 320. The first heating element 310 is movably disposed within the reaction chamber 110. The drive mechanism 320 has an output end 321 that acts on the first heating element 310, allowing the first heating element 310 to move horizontally and vertically. Exemplarily, the first heating element 310 is a tungsten heater that heats the base 200. The first heating element 310 is connected to the output end 321 of the drive mechanism 320, allowing it to move synchronously with the rotation or elevation of the output end 321, thereby improving heating uniformity.

[0040] In some embodiments, the drive mechanism 320 is disposed outside the reaction chamber 110, and the output end 321 extends from the outside of the reaction chamber 110 into the reaction chamber 110. A thermal insulation layer 150 is disposed outside the reaction chamber 110 to reflect thermal radiation. For example, the thermal insulation layer 150 can be made of a high-temperature metal such as molybdenum or tungsten. The thermal insulation layer 150 can reflect thermal radiation, allowing the first heating element 310 to radiate heat in a unidirectional manner, thereby reducing heat loss.

[0041] See also Figure 1 and Figure 3In some embodiments, a vacuum pump 700 is disposed outside the housing 100. The vacuum pump 700 is connected to the reaction chamber 110 via a third conduit 710, which is used to extract materials. It will be appreciated that the vacuum pump 700 extracts materials from the reaction chamber 110 via the third conduit 710. The extracted materials include unreacted precursors or reaction products.

[0042] See also Figure 3 In some embodiments, a seal 160 is provided between the thermal insulation layer 150 and the base 200. The seal 160 employs a labyrinth seal. It is understood that the provision of the seal 160 between the thermal insulation layer 150 and the base 200 prevents leakage of reaction products from the reaction chamber 110, thereby preventing damage to the underlying drive mechanism 320. The labyrinth seal employed by the seal 160 ensures a sufficiently strong sealing performance.

[0043] See also Figure 3 and Figure 4 In some embodiments, a detection chamber 170 is further provided below the thermal insulation layer 150. The detection chamber 170 is externally connected to a vacuum gauge 600 for detecting the detection chamber 170. It is understood that by providing the detection chamber 170 below the thermal insulation layer 150 and using the external vacuum gauge 600 to detect the vacuum level of the detection chamber 170, it is possible to determine whether there is a reactant leak.

[0044] Beneficial effects:

[0045] The present application sets a second heating component 400 between the shell 100 and the reaction chamber 110, and the second heating component 400 heats the periphery of the reaction chamber 110, thereby improving the heating uniformity of the reaction chamber 110, thereby improving the uniformity of metal deposition above the base 200, and further improving the coating quality of the MOCVD coating device; by connecting the second pipeline 430 to an external hot fluid supply source, the hot fluid is transported to the heating chamber 410 by the second pipeline 430, and the hot fluid is evenly distributed around the periphery of the reaction chamber 110, thereby improving the heating uniformity; through the temperature detection of the first temperature measuring component 130 and the second temperature measuring component 140, the temperature control unit 500 can conveniently adaptively adjust the heating power of the first heating component 300 and the second heating component 400 based on the temperature data, thereby improving the coating efficiency.

[0046] The specific embodiments described herein are merely illustrative of the spirit of the present invention. Persons skilled in the art may make various modifications, additions, or substitutions to the described specific embodiments without departing from the spirit of the present invention or exceeding the scope defined by the appended claims.

Claims

1. A MOCVD coating device, characterized in that: include: A shell (100) is formed in the shell (100), wherein a reaction chamber (110) is formed in the shell (100), wherein the reaction chamber (110) is used for material reaction, and wherein the reaction chamber (110) is connected to a first pipeline (120), wherein the first pipeline (120) is used for transporting a precursor; A base (200), the base (200) is arranged in the reaction chamber (110), and the base (200) is used to carry a substrate; a first heating component (300), the first heating component (300) being disposed below the base (200), and the first heating component (300) acting on the base (200) to perform heating; as well as A second heating component (400) is disposed between the shell (100) and the reaction chamber (110), and the second heating component (400) acts on the reaction chamber (110) to perform heating.

2. The MOCVD coating device according to claim 1, characterized in that: The second heating component (400) comprises: a heating chamber (410), the heating chamber (410) being arranged between the shell (100) and the reaction chamber (110), the heating chamber (410) being externally connected to a second pipeline (430), the second pipeline (430) being used to transport a hot fluid to the heating chamber (410); A second heating element (420), wherein the second heating element (420) acts on the heating chamber (410) to heat the heating chamber (410).

3. The MOCVD coating device according to claim 2, characterized in that: The heating chamber (410) is annular to surround the reaction chamber (110); a heat-conducting wall (440) is provided between the heating chamber (410) and the reaction chamber (110); and the heat-conducting wall (440) is at least partially made of metal material.

4. The MOCVD coating device according to claim 2, characterized in that: The invention also includes a temperature control unit (500), wherein the temperature control unit (500) is electrically connected to the first heating component (300) and the second heating component (400), respectively, and is used to control the heating power of the first heating component (300) and the second heating component (400).

5. The MOCVD film coating device according to claim 4, characterized in that: The reaction chamber (110) is connected to a first temperature measuring component (130), the heating chamber (410) is connected to a second temperature measuring component (140), and the temperature control unit (500) is electrically connected to the first temperature measuring component (130) and the second temperature measuring component (140), respectively.

6. The MOCVD coating device according to claim 5, characterized in that: The first heating component (300) comprises: a first heating element (310), the first heating element (310) being movably disposed in the reaction chamber (110); A driving mechanism (320) is provided with an output end (321), and the output end (321) acts on the first heating element (310) so as to enable the first heating element (310) to have the freedom of horizontal rotation and vertical lifting.

7. The MOCVD film coating device according to claim 6, characterized in that: The driving mechanism (320) is arranged outside the reaction chamber (110), and the output end (321) penetrates into the reaction chamber (110) from the outside of the reaction chamber (110). A heat insulation layer (150) is provided outside the reaction chamber (110), and the heat insulation layer (150) is used to reflect thermal radiation.

8. The MOCVD film coating device according to claim 7, characterized in that: A sealing member (160) is provided between the heat insulating layer (150) and the base (200), and the sealing member (160) adopts a labyrinth seal.

9. The MOCVD film coating device according to claim 7, characterized in that: A detection cavity (170) is further provided below the heat insulation layer (150), and a vacuum gauge (600) is externally connected to the detection cavity (170), and the vacuum gauge (600) is used to detect the detection cavity (170).

10. The MOCVD film coating device according to claim 1, wherein: A vacuum pump (700) is provided outside the shell (100), and the vacuum pump (700) is connected to the reaction chamber (110) via a third pipeline (710), and the third pipeline (710) is used to extract materials.

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