Vertical furnace

Abstract

The utility model provides a vertical furnace, and relates to the technical field of photovoltaic module manufacturing equipment. The vertical furnace comprises an outer furnace tube, a furnace cover, a furnace body and a furnace door, a penetrating process cavity is formed in the outer furnace tube, and first connecting flanges are arranged at the two ends of the outer furnace tube; the furnace cover is hermetically connected with the first connecting flange at one end of the outer furnace tube; the furnace body is divided into at least two vertical units which can be connected into a whole in the extending direction of an inner cavity of the furnace body, and the outer furnace tube is arranged in the inner cavity of the furnace body. The furnace door is arranged at the other end of the outer furnace tube, a material loading mechanism is arranged on the furnace door, and when the furnace door is in a closed state, a closed cavity is formed in the process cavity. And the furnace body ensures that the distance between the heating body and the heated body on the inner wall of the furnace body accords with the optimal distance through the cohesion mounting structure, so that the energy utilization rate is improved, and the production requirements of energy conservation and emission reduction are met.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic component manufacturing equipment, in particular to a vertical furnace. Background Art

[0002] The current photovoltaic industry's diffusion, oxidation, annealing, doping, PECVD (low-pressure chemical vapor deposition), LPCVD (plasma-enhanced chemical vapor deposition) and other processes are produced in two types of furnaces: vertical furnaces and horizontal furnaces. Both types of structures require the silicon wafers to be placed in a specific carrier and transferred into the reaction chamber for processing. By introducing specific reaction gases, specific coating, diffusion, oxidation and thin film deposition processes can be achieved on the silicon wafers.

[0003] Existing vertical furnace designs include three types of tubes: integrated inner and outer tubes, separate inner and outer tubes, and a single outer tube. For the latter two types, the outer tube can be a through-tube structure, meaning it's open at both ends and sealed with the upper cover and furnace door to maintain the process environment within the furnace. Therefore, flanges are installed at both ends. However, the outer tube can only be installed by inserting it from one end of the furnace body, or by inserting the furnace body from one end of the outer tube. The furnace's internal cavity expands to accommodate the flanges at both ends of the outer tube, increasing the distance between the external heating element and the heated object, resulting in reduced energy efficiency. Utility Model Content

[0004] The utility model provides a vertical furnace with high energy utilization rate, which is used for diffusion, oxidation, annealing, doping and other processes in the photovoltaic industry.

[0005] The technical solution adopted by the present invention is: a vertical furnace, comprising an outer furnace tube, a furnace cover, a furnace body, and a furnace door, wherein the outer furnace tube is provided with a penetrating process cavity, and first connecting flanges are provided at both ends; the furnace cover is sealed and connected to the first connecting flange at one end of the outer furnace tube; the furnace body is divided into at least two vertical units that can be connected as one along the extension direction of the inner cavity of the furnace body, the outer furnace tube is provided in the inner cavity of the furnace body, the inner diameter of the inner cavity of the furnace body is smaller than the outer diameter of the first connecting flange, and the inner diameter of the inner cavity of the furnace body is larger than the diameter of the outer furnace tube; the furnace door is provided at the other end of the outer furnace tube, and a loading mechanism is provided on it, and when the furnace door is in a closed state, a closed chamber is formed in the process cavity.

[0006] Preferably, the vertical furnace includes a base mounted on an external support structure, the base is provided with a support flange, the furnace body is provided on the base, and the outer furnace tube is sealedly connected to one end face of the support flange.

[0007] Preferably, the vertical furnace includes a flow equalizer plate arranged in the process chamber, and the flow equalizer plate is provided with a plurality of flow equalizer holes.

[0008] Preferably, the vertical furnace includes an inner furnace tube and an inner heating body, the inner furnace tube is arranged in the outer furnace tube to form an annular process chamber, one end of the inner furnace tube is open and the other end is closed, and the open end of the inner furnace tube is provided with a second connecting flange, and the heating section of the inner heating body is arranged in the inner furnace tube.

[0009] Optionally, the open end of the inner furnace tube faces the furnace door, and the inner furnace tube is sealed and connected to the furnace door.

[0010] Optionally, a mounting hole is provided on the furnace cover, and the open end of the inner furnace tube is close to the furnace cover and is sealed to the furnace cover.

[0011] Furthermore, a support frame is provided above the furnace cover, and the internal heating body is installed on the support frame.

[0012] Preferably, a cooling channel is provided in the furnace cover.

[0013] Preferably, a heat insulating member is suspended on the furnace cover, and the heat insulating member extends into the process chamber.

[0014] Furthermore, a reaction gas pipe is installed on the furnace cover, and the heat insulation component is provided with an avoidance hole for the reaction gas pipe to pass through.

[0015] The utility model adopts the above technical solution to achieve the following beneficial effects:

[0016] Compared with the prior art in which the furnace body is set as an integral unit and the furnace body and the outer furnace tube are installed by sleeve fitting from the end, in the present application, the furnace body is set as a combined vertical unit, and each vertical unit is installed by hugging from the circumference of the outer furnace tube, so that the outer furnace tube is installed in the inner cavity of the furnace body. This can solve the problem that the aperture of the furnace cavity must be increased to complete the installation, ensure that the distance between the heating body and the heated body on the inner wall of the furnace body meets the optimal distance, improve energy utilization, and meet the production requirements of energy conservation and emission reduction. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the three-dimensional structure of the vertical furnace in Example 1 of the present application;

[0018] Figure 2 This is a schematic diagram of the internal structure of a vertical furnace in Example 1 of the present application;

[0019] Figure 3 for Figure 2 Enlarged view of part a in the middle;

[0020] Figure 4 Schematic diagram of the three-dimensional structure of the outer furnace tube in this application;

[0021] Figure 5 This is a schematic diagram of the three-dimensional structure of the vertical furnace in Example 2 of the present application;

[0022] Figure 6 This is a schematic diagram of the internal structure of the vertical furnace in Example 2 of the present application;

[0023] Figure 7 This is a schematic diagram of the three-dimensional structure of the vertical furnace in Example 3 of the present application;

[0024] exist Figure 1-Figure 7 middle,

[0025] 100, furnace body; 110, vertical unit; 120, locking mechanism; 130, fixing base; 140, clamping mechanism; 200, outer furnace tube; 210, first connecting flange; 220, bracket;

[0026] 300, furnace cover; 310, cooling channel; 320, reinforcing rib; 330, thermal insulation; 331, avoidance hole; 340, reaction gas pipe;

[0027] 400, furnace door; 410, loading mechanism;

[0028] 500, base; 510, support flange;

[0029] 600, flow plate;

[0030] 700, inner furnace tube; 710, inner heating element; 720, second connecting flange;

[0031] 800, external drive device;

[0032] 900. Support frame. DETAILED DESCRIPTION

[0033] To facilitate understanding of the present invention, a more comprehensive description of the present invention will be provided below with reference to the accompanying drawings. The accompanying drawings illustrate preferred embodiments of the present invention. However, the present invention may be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and comprehensive understanding of the disclosure of the present invention.

[0034] It should be noted that when an element is referred to as being “disposed on” or “positioned on” another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be “connected to” another element, it may be directly connected to the other element or there may be an intermediate element at the same time.

[0035] It should also be noted that, in this document, relational terms such as first and second, etc. are merely used to distinguish the first feature from the second feature, but do not necessarily require or imply any actual relationship or order between these features.

[0036] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0037] For ease of understanding, the applicant provides the following explanation of the working principle of the existing vertical furnace so as to better understand the technical problem to be solved by this application.

[0038] Vertical furnaces used in the photovoltaic industry for diffusion, oxidation, annealing, doping, PECVD (low-pressure chemical vapor deposition), and LPCVD (plasma-enhanced chemical vapor deposition) processes typically incorporate furnace tubes (made of high-temperature-resistant materials such as quartz, silicon nitride, and silicon boron nitride). This ensures the process environment within the tubes while protecting the furnace components, particularly the heating elements. During operation, the heating element within the furnace heats the material to the process temperature. Reactive gases enter through one end of the tubes, react with the material, and are discharged from the other end. The advantage of vertical furnaces over horizontal furnaces is that they reduce the equipment footprint and allow for larger outer tube apertures. The closed end of a single-open outer tube reduces structural stability. The outer furnace tube through-tube structure in the prior art has flanges at both ends of the outer furnace tube. When the vertical furnace is installed, the outer furnace tube needs to be inserted from one end of the furnace body or the furnace body needs to be installed from one end of the outer furnace tube. Therefore, the inner cavity size of the furnace body must be larger than the size of the flanges at both ends of the outer furnace tube, and sufficient installation space must be left. This leads to an increase in the distance between the heating body and the heated body on the furnace body. Since the heated body is mainly heated by heat radiation, the increase in distance will significantly reduce the heating effect. Therefore, the increase in heating distance will seriously affect the utilization rate of energy.

[0039] The utility model provides a vertical furnace, such as Figure 1-Figure 4As shown, the vertical furnace includes an outer furnace tube 200, a furnace cover 300, a furnace body 100 and a furnace door 400, wherein the outer furnace tube 200 is a through structure, and a through process chamber is provided therein, which is a material processing chamber, and first connecting flanges 210 are provided at both ends of the outer furnace tube 200; the furnace cover 300 is installed at one end of the outer furnace tube 200 and is sealed with the first connecting flange 210 at the end of the outer furnace tube 200; the furnace body 100 is divided into at least two detachably connected vertical units 110 along the extension direction of its inner cavity, the outer furnace tube 200 is provided in the inner cavity of the furnace body 100, the inner diameter of the inner cavity of the furnace body 100 is larger than the diameter of the outer furnace tube 200, and the inner diameter of the inner cavity of the furnace body 100 is smaller than the outer diameter of the first connecting flange; the furnace door 400 is provided at the other end of the outer furnace tube 200, and a loading mechanism 410 is provided on it. When the furnace door 400 is in a closed state, a closed chamber is formed in the process cavity.

[0040] In the present application, each vertical unit 110 is installed in an embrace from the circumferential side of the outer furnace tube 200, so that the outer furnace tube 200 is installed in the inner cavity of the furnace body 100. Compared with the prior art, by setting the furnace body 100 as an integral whole and adopting the method of sleeve-installing the furnace body 100 and the outer furnace tube 200 from the end, the problem of having to increase the aperture of the inner cavity of the furnace body 100 (the sum of the outer diameter of the flanges at both ends of the outer furnace tube 200 and the installation margin) to complete the installation can be solved, and the distance between the heating body and the heated body on the inner wall of the furnace body 100 is ensured to meet the optimal distance requirement. That is to say, the aperture of the inner cavity of the furnace body 100 of the present application can be smaller than the outer diameter of the flanges at both ends of the outer furnace tube 200, and the external heating body installed on the inner wall of the inner furnace tube 700 can be set close to the outer wall of the outer furnace tube 200, thereby improving energy utilization and meeting the production requirements of energy conservation and emission reduction.

[0041] Of course, its split-type clasping installation structure can also be used in horizontal furnaces.

[0042] It should be noted that the vertical unit 110 in the present application includes a furnace shell, a heat-insulating structure, and an external heating structure. The specific heating and heat-insulating functions are similar to those of the furnace body 100 in the prior art. The present application will not elaborate on its specific heating and heat-insulating structure and combination method (such as the use of a multi-temperature zone structure at the top and bottom). In addition, the outer furnace tube 200 is arranged in the inner cavity of the furnace body 100, which means that the cross section of the outer furnace tube 200 is located within the cross section of the inner cavity of the furnace body 100, and the outer furnace tube 200 can exceed the furnace body 100 in the height direction. In addition, the vertical unit 110 in the present application refers to a furnace body 100 that can be assembled from the side of the outer furnace tube 200 to form a complete furnace body 100. The docking surface between the vertical units 110 can be a flat surface or a curved surface. The present application does not specifically limit the docking form between the vertical units 110 or the shape of the vertical units 110.

[0043] In addition, the inner diameter of the furnace cavity may be slightly larger than the outer diameter of the first connecting flange. However, if the margin is insufficient when using a sleeve installation, the above-mentioned separate furnace structure may also be used.

[0044] like Figure 1-Figure 4 As shown, in one embodiment, the furnace body 100 is formed by two semicircular vertical units 110 that are joined together. Specifically, the bottoms of the two semicircular vertical units 110 are provided with fixing seats 130 for supporting and fixing the first connecting flange 210 of the outer furnace tube 200. The first connecting flange 210 at the lower end of the outer furnace tube 200 is higher than the lower end surface of the outer furnace tube 200. When installing the vertical furnace, the two vertical units 110 are first joined together and installed on the circumference of the outer furnace tube 200, and the outer furnace tube 200 is fixed by the fixing seats 130. At the same time, the two vertical units 110 are locked together by bolts. Of course, other locking mechanisms 120 can also be used to lock the two vertical units 110 together. Then, the furnace cover 300 is installed on the top of the outer furnace tube 200. A high-temperature resistant sealing gasket is provided between the furnace cover 300 and the first connecting flange 210, and the two are sealed together by a clamping mechanism 140. When the material needs to be processed, the material is loaded onto the loading mechanism 410 provided on the furnace door 400, and the furnace door 400 is moved toward the furnace body 100 by the external driving device 800 until the furnace door 400 abuts against the bottom of the outer furnace tube 200, so that a closed chamber is formed in the process chamber.

[0045] In this embodiment, when installing the furnace body 100, the two vertical units 110 are installed from the circumferential side of the outer furnace tube 200 and fixed so that the outer furnace tube 200 is installed in the inner cavity of the furnace body 100, ensuring that the distance between the heating body and the heated body on the furnace body 100 meets the distance requirement for optimal energy utilization.

[0046] Of course, in other embodiments of the present application, the number of vertical units 110 can be three, four, etc. The specific number can be selected and determined according to actual needs, and the present application does not make any specific limitation on this.

[0047] In another embodiment of the present application, a vertical furnace such as Figure 7 As shown, the vertical furnace further includes a base 500 mounted on the external support structure. The base 500 is provided with a support flange 510 . The furnace body 100 is provided on the base 500 , and the outer furnace tube 200 is sealedly connected to the support flange 510 .

[0048] In one embodiment, the base 500 is a bottom plate mounted on an external support structure, with a support flange 510 mounted on the bottom plate. During installation, the first connecting flange 210 of the outer furnace tube 200 is aligned with the support flange 510, with a high-temperature resistant gasket positioned between them. The two are then secured and sealed by a clamping mechanism 140. The two vertical units 110 are then joined around the outer furnace tube 200 and locked together, while the furnace body 100 is secured to the bottom plate. To process material, the material is loaded onto the loading mechanism 410 mounted on the furnace door 400. The external drive device 800 then moves the furnace door 400 toward the bottom plate until it abuts against the support flange 510, forming a sealed chamber within the process chamber. In this embodiment, after the outer furnace tube 200 is installed and fixed by the clamping mechanism 140 , the furnace door 400 no longer directly contacts the outer furnace tube 200 , thereby preventing the outer furnace tube 200 from being damaged by the pressure of the furnace door 400 when opening and closing.

[0049] The clamping mechanism 140 herein refers to a component, such as a pressure ring, that clamps the connecting flange of the outer furnace tube 200 / inner furnace tube 700 together with the connecting component during installation. Alternatively, it may be another clamping component. A protective pad may be added between the connecting flange and the clamping component during clamping to ensure uniform force on the connecting flange.

[0050] In this embodiment, if Figure 7 As shown, a flange for independently supporting the furnace body 100 may be further provided on the bottom plate to facilitate the installation and positioning of the furnace body 100 and the installation of the outer furnace tube 200 .

[0051] Of course, if Figure 2 As shown, a flow equalizer plate 600 can also be set in the vertical furnace. A number of flow equalizer holes (not shown in the figure) are provided on the flow equalizer plate 600. The flow equalizer plate 600 can effectively disperse the process gas entering the process chamber from the furnace cover 300, so that the process gas passes through the process chamber evenly, which can improve the process quality.

[0052] When installing the flow equalizer 600, the flow equalizer 600 can be hoisted on the furnace cover 300, or a support ear 220 can be provided on the inner wall of the outer furnace tube 200 and the flow equalizer 600 can be placed on the support ear 220. Other methods of fixing the flow equalizer 600 can also be used, and this application does not specifically limit this.

[0053] Compared to the aforementioned vertical furnace, another vertical furnace in the present application further includes an inner furnace tube 700 and an inner heating element 710. The inner furnace tube 700 is disposed within the outer furnace tube 200 to form an annular process chamber. The inner furnace tube 700 is open at one end and closed at the other. A second connecting flange 720 is provided at the open end of the inner furnace tube 700, and the heating section of the inner heating element 710 is disposed within the inner furnace tube 700. By providing the inner furnace tube 700, a dual furnace tube structure is formed. During the process, the inner heating element 710 and the outer heating element can heat the material simultaneously, which can not only improve the heating efficiency of the vertical furnace, but also ensure that the material is heated more evenly, thereby improving the process effect.

[0054] like Figure 5 As shown, one of the installation methods of the inner furnace tube 700 is that the inner furnace tube 700 is installed on the furnace door 400. At this time, the open end of the inner furnace tube 700 faces the furnace door 400, and the inner furnace tube 700 is sealed and connected to the furnace door 400. In this case, the inner furnace tube 700 can be directly mounted on the side of the furnace door 400 facing the furnace body 100, with the inner heating element 710 fixed to the furnace door 400. A sealing gasket is provided between the furnace door 400 and the second connecting flange 720, and the second connecting flange 720 and the furnace door 400 are connected via a clamping mechanism 140. Alternatively, a through-hole can be provided in the furnace door 400, with the inner furnace tube 700 passing through the furnace door 400, and the second connecting flange 720 of the inner furnace tube 700 located on the side of the furnace door 400 away from the furnace body 100. A sealing gasket is provided between the furnace door 400 and the second connecting flange 720, and the second connecting flange 720 and the furnace door 400 are connected via a clamping mechanism 140. In this case, the clamping mechanism 140 is located outside the reaction chamber to prevent erosion by the reaction atmosphere. In this case, when loading, the material is placed around the inner furnace tube 700, and the furnace door 400 is closed using the external drive device 800.

[0055] like Figure 7 As shown, a second installation method for the inner furnace tube 700 is to provide a mounting hole in the furnace cover 300, with the open end of the inner furnace tube 700 adjacent to the furnace cover 300 and sealed therewith. In this case, the furnace cover 300 provides a mounting hole for the inner furnace tube 700 to pass through. The inner furnace tube 700 passes through the furnace cover 300, and the second connecting flange 720 of the inner furnace tube 700 is located on the side of the furnace cover 300 away from the furnace body 100. A sealing gasket is provided between the furnace cover 300 and the second connecting flange 720, and the second connecting flange 720 and the furnace cover 300 are connected by a clamping mechanism 140. In this case, when loading, the material is placed around the inner furnace tube 700, leaving space in the middle to avoid the inner furnace tube 700. The furnace door 400 can then be closed using the external drive device 800.

[0056] In the second installation method of the inner furnace tube 700, as shown in FIG. Figure 6-Figure 7As shown, a support frame 900 is provided above the furnace cover 300, and the internal heating element 710 is mounted on the support frame 900. Thus, by using the support frame 900 as a supporting structure for the internal heating element 710, it is possible to prevent the internal heating element 710 from directly acting on the furnace cover 300 and the outer furnace tube 200. It should be noted that the support frame 900 here is suspended on the furnace cover 300 and does not contact the furnace cover 300. It can be mounted on an external bracket.

[0057] It should be noted that if Figure 7 As shown, when the inner heating body 710 is installed in the inner furnace tube 700 , an insulation layer is provided between the heating section of the inner heating body 710 and the opening position of the inner furnace tube 700 .

[0058] In another embodiment of the present application, Figure 2 As shown, a cooling channel 310 is provided within the furnace cover 300. A flowing cooling medium is injected into the cooling channel 310 to cool the furnace cover 300 during the process, preventing the furnace cover 300 from overheating and causing deformation of the furnace cover 300. At the same time, it can also protect the sealing gasket. At the same time, reinforcing ribs 320 can be provided on the furnace cover 300 to further prevent deformation of the furnace cover 300.

[0059] It is worth noting that in this application, Figure 3 As shown, cooling channels 310 are provided at locations where sealed connections are used to cool the sealing gasket to prevent it from failing, such as the connection locations at the upper and lower ends of the outer furnace tube 200 and the sealed connection locations at the open end of the inner furnace tube 700.

[0060] In the above embodiment, if Figure 5 、 Figure 7 As shown, a heat insulating member 330 may be suspended from the furnace cover 300. When installed, the heat insulating member 330 extends into the process chamber, thereby reducing heat loss within the process chamber during processing. The heat insulating member 330 may be an insulation bag, an insulation board, or the like, and may be provided in one or more layers as required, which is not specifically limited in this application.

[0061] Of course, when the heat insulating member 330 is provided, the heat insulating member 330 will affect the reaction gas flow. Therefore, in another embodiment of the present application, as shown in FIG. Figure 7 As shown, a reaction gas pipe 340 is mounted on the furnace cover 300, and a heat insulator 330 is provided with an escape hole 331 for the reaction gas pipe 340 to pass through. In this way, the reaction gas passes through the reaction gas pipe 340 and directly reaches the bottom of the heat insulator 330. It should be noted that in this case, the installation position of the flow plate 600 is lower than the gas outlet of the reaction gas pipe 340.

[0062] In addition, for the components located in the reaction chamber, it is preferred to use high temperature resistant and corrosion resistant materials, and other components can have a petrolatum anti-corrosion layer added on their surface; the heat insulation member 330 can also be set at the furnace door 400 to reduce the heat loss in the process chamber during the process.

[0063] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vertical furnace, characterized in that: include, The outer furnace tube (200) is provided with a through process cavity and has first connecting flanges (210) at both ends; a furnace cover (300) sealedly connected to the first connecting flange (210) at one end of the outer furnace tube (200); A furnace body (100) is divided into at least two vertical units (110) that can be connected into one body along the extension direction of its inner cavity; the outer furnace tube (200) is arranged in the inner cavity of the furnace body (100); the inner diameter of the inner cavity of the furnace body (100) is smaller than the outer diameter of the first connecting flange (210); and the inner diameter of the inner cavity of the furnace body (100) is larger than the diameter of the outer furnace tube (200); A furnace door (400) is provided at the other end of the outer furnace tube (200) and is provided with a loading mechanism (410). When the furnace door (400) is in a closed state, a sealed chamber is formed in the process chamber.

2. A vertical furnace according to claim 1, characterized in that: The invention comprises a base (500) installed on an external support structure, wherein a support flange (510) is provided on the base (500), the furnace body (100) is arranged on the base (500), and the outer furnace tube (200) is sealed and connected to one end face of the support flange (510).

3. A vertical furnace according to claim 1, characterized in that: It comprises a flow-distributing plate (600) arranged in the process chamber, wherein the flow-distributing plate (600) is provided with a plurality of flow-distributing holes.

4. A vertical furnace according to claim 1, characterized in that: The invention comprises an inner furnace tube (700) and an inner heating body (710), wherein the inner furnace tube (700) is arranged in the outer furnace tube (200) to form an annular process chamber, the inner furnace tube (700) is open at one end and closed at the other end, and a second connecting flange (720) is provided at the open end of the inner furnace tube (700), and the heating section of the inner heating body (710) is arranged in the inner furnace tube (700).

5. A vertical furnace according to claim 4, characterized in that: The open end of the inner furnace tube (700) faces the furnace door (400), and the inner furnace tube (700) is sealed and connected to the furnace door (400).

6. A vertical furnace according to claim 4, characterized in that: The furnace cover (300) is provided with a mounting hole, and the open end of the inner furnace tube (700) is close to the furnace cover (300) and is sealed and connected to the furnace cover (300).

7. A vertical furnace according to claim 6, characterized in that: A support frame (900) is provided above the furnace cover (300), and the internal heating body (710) is installed on the support frame (900).

8. The vertical furnace according to claim 1, characterized in that: A cooling channel (310) is provided in the furnace cover (300).

9. A vertical furnace according to any one of claims 1 to 8, characterized in that: A heat insulating member (330) is suspended on the furnace cover (300), and the heat insulating member (330) extends into the process chamber.

10. A vertical furnace according to claim 9, characterized in that: A reaction gas pipe (340) is installed on the furnace cover (300), and the heat insulating member (330) is provided with an avoidance hole (331) for the reaction gas pipe (340) to pass through.

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