Test probe station for CIS chip

Abstract

The utility model discloses a test probe station for a CIS chip, and relates to the technical field of chip test. The chip testing device comprises a working table, a sample table is fixedly connected to the middle of the upper end of the working table, an adsorption hole is formed in the upper end of the sample table and used for containing and adsorbing a chip, probe bodies are arranged on the two sides of the upper portion of the working table and used for testing the chip, and a sealing assembly is arranged on the upper portion of the working table. The sealing assembly comprises a plurality of elastic plates arranged on the upper surface of the sample table. The unused adsorption hole is covered by the elastic plate, and the chip is limited in combination with the strip-shaped block, so that the problem that the chip moves or falls off due to the fact that the adsorption hole is not stably covered is effectively avoided, the stability and reliability of testing are improved, meanwhile, the CIS chip testing device can adapt to CIS chips of different sizes, and by means of flexible adjustment of the adjusting assembly, the testing efficiency is improved. And unstable paper sheets or other covering objects do not need to be additionally used, so that the operation process is simplified, and the use convenience and practicability of the equipment are improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of chip testing, in particular to a testing probe station for a CIS chip. Background Art

[0002] The CIS chip test probe station is a precision device dedicated to testing CIS chips. It is mainly used to directly test the electrical performance of the chip, including the measurement of resistance, voltage, current and other parameters. However, it has the following shortcomings when used:

[0003] 1. Some existing probe stations need to adsorb the chip on the sample table when in use. Due to the different sizes of the chips, the excess adsorption holes need to be covered with paper. The paper covering method may not be stable enough. The looseness or displacement of the paper may affect the stability of the adsorption hole on the chip, thereby affecting the reliability of the test results. At the same time, it is not convenient to limit the chip, which is not conducive to improving the practicality of the equipment.

[0004] To this end, we propose a test probe station for CIS chips. Utility Model Content

[0005] The purpose of the utility model is to solve the problem in the prior art that some probe stations need to adsorb the chip on the sample table when in use. Due to the different sizes of the chips, the redundant adsorption holes need to be covered with paper. The covering method of the paper may not be stable enough. The loosening or displacement of the paper may affect the stability of the adsorption of the chip by the adsorption hole, thereby affecting the reliability of the test results. At the same time, it is not convenient to limit the chip, which is not conducive to improving the practicality of the equipment. A test probe station for CIS chip is proposed.

[0006] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0007] A test probe station for a CIS chip, comprising:

[0008] A workbench, wherein a sample stage is fixedly connected to the middle of the upper end of the workbench, an adsorption hole is provided on the upper end of the sample stage for placing and adsorbing the chip, and probe bodies are provided on both sides above the workbench for testing the chip;

[0009] The sealing component includes a plurality of elastic plates arranged on the upper surface of the sample stage, which are used to cover the adsorption holes. A strip block is fixedly connected to one side of the elastic plates near the middle of the sample stage, which is used to limit the chip;

[0010] The adjustment component includes a first bidirectional screw rod and a second bidirectional screw rod rotatably installed at the lower end and the middle part of the sample stage respectively. The lower end of the sample stage is fixedly connected to a support frame. The first bidirectional screw rod and the second bidirectional screw rod are both rotatably connected to the support frame. The outer walls of the first bidirectional screw rod and the second bidirectional screw rod are threaded with splints, and the upper ends of multiple splints are fixedly connected to the elastic plate for adjusting the position of the elastic plate.

[0011] In a possible design, one side of the interior of the workbench is fixedly connected to a limit plate, the middle part of the limit plate is rotatably connected to a first connecting shaft, one side of the first bidirectional screw rod passes through the support frame and is fixedly connected to a first bevel gear, the rear end of the first connecting shaft is fixedly connected to a second bevel gear, the first bevel gear is meshed with the second bevel gear, the second bidirectional screw rod and the front end of the first connecting shaft pass through the workbench and are respectively fixedly connected to a first rotating handle and a second rotating handle for driving the first bidirectional screw rod and the second bidirectional screw rod to rotate.

[0012] In a possible design, both sides of the upper surface of the workbench are fixedly connected to support platforms, the middle parts of the two support platforms are rotatably connected to the first one-way screw rods, the outer walls of the two first one-way screw rods are threadedly sleeved with support frames, the interiors of the two support frames are slidably connected to sliding frames, the interiors of the sliding frames are slidably connected to adjustment frames, one side of the two adjustment frames is fixedly connected to support plates, and one side of the two support plates is fixedly connected to the probe body for adjusting the position of the probe body.

[0013] In a possible design, one side of the two support frames is rotatably connected to the second connecting shaft, the lower ends of the two support frames are rotatably connected to the second one-way screw rods, the lower ends of the two second connecting shafts are fixedly connected to the third bevel gear, one side of the two second one-way screw rods is fixedly connected to the fourth bevel gear, the third bevel gear is meshed with the fourth bevel gear, the outer walls of the two second one-way screw rods are threadedly connected to the lower end of the sliding frame for adjusting the position of the sliding frame, the interior of the two sliding frames are rotatably connected to the third one-way screw rods, and the outer wall of the third one-way screw rod is threadedly connected to the adjustment frame for lifting and lowering the adjustment frame.

[0014] In a possible design, the upper ends of the two second connecting shafts and the third one-way screw rod are fixedly connected with knobs.

[0015] In a possible design, the front ends of the two first one-way screw rods both pass through the support platform and are fixedly connected to the third rotating handle.

[0016] In a possible design, a connecting tube is provided at the rear end of the sample stage for connecting to an external air pump.

[0017] In a possible design, a guard plate is fixedly connected to the upper end of the workbench.

[0018] In the present application, when in use, first, the chip is placed in the adsorption hole on the sample stage, and the connecting tube at the rear end of the sample stage is connected to the external air pump to generate negative pressure, thereby adsorbing and fixing the chip. Then, multiple elastic plates in the closed assembly are used to cover the adsorption holes not occupied by the chip to ensure stable adsorption of the chip. The elastic plate also limits the chip through the bar block to prevent it from moving during the test. The position of the elastic plate is adjusted by rotating the first bidirectional screw and the second bidirectional screw. Through the meshing connection of the first bevel gear and the second bevel gear, and the operation of the first rotating handle and the second rotating handle, the splint moves with the rotation of the screw, thereby driving the displacement of the elastic plate and the bar block to adapt to chips of different sizes. At the same time, the position of the probe body is adjusted by the first unidirectional screw on the support platform to adjust the position of the support frame, and then the position of the sliding frame and the adjustment frame are adjusted respectively by rotating the second unidirectional screw and the third unidirectional screw, finally realizing three-dimensional adjustment of the probe body, allowing the tester to accurately align with the test point on the chip to measure parameters such as resistance, voltage, and current.

[0019] In the utility model, a test probe station for CIS chips is described, which covers unused adsorption holes with an elastic plate and limits the chip in position in combination with a bar block, effectively avoiding the problem of chip movement or falling off caused by the adsorption holes not being stably covered, thereby improving the stability and reliability of the test, and can adapt to CIS chips of different sizes. By flexibly adjusting the adjustment components, there is no need to use additional unstable paper or other covering materials, which simplifies the operation process and improves the convenience and practicality of the device.

[0020] In the present invention, a test probe station for CIS chips realizes precise adjustment of the probe body in three-dimensional space through the precise cooperation of a multi-stage adjustment mechanism including first, second and third one-way screw rods, thereby ensuring accurate alignment of the test points on the chip and improving the precision and accuracy of the test. At the same time, the design of the guard plate at the upper end of the workbench helps to reduce the impact of external interference and pollution on the test process, protect the purity of the test environment and the accuracy of the test results. The structural design of the test probe station is concise and clear, and the connection and adjustment methods between the components are intuitive and easy to understand, which is convenient for testers to carry out daily maintenance and quick operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0022] Figure 1 This is a schematic diagram of the three-dimensional structure of an embodiment of the present utility model;

[0023] Figure 2 This is a schematic diagram of the internal three-dimensional structure of a workbench according to an embodiment of the present invention;

[0024] Figure 3 This is a schematic diagram of the three-dimensional structure of the adjustment component of one embodiment of the utility model;

[0025] Figure 4 This is a schematic diagram of the internal three-dimensional structure of the support frame according to one embodiment of the present invention.

[0026] In the figure: 1. workbench; 2. sample table; 3. adsorption hole; 4. support table; 5. first one-way screw; 6. support frame; 7. sliding frame; 8. adjustment frame; 9. support plate; 10. probe body; 11. first two-way screw; 12. second two-way screw; 13. clamping plate; 14. elastic plate; 15. bar block; 16. first bevel gear; 17. limit plate; 18. first connecting shaft; 19. second bevel gear; 20. second connecting shaft; 21. third bevel gear; 22. second one-way screw; 23. fourth bevel gear; 24. third one-way screw; 25. support frame; 26. first rotating handle; 27. second rotating handle; 28. third rotating handle; 29. ​​knob; 30. guard plate; 31. connecting pipe. DETAILED DESCRIPTION

[0027] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0028] In the description of the present invention, it should be understood that the terms "opening", "upper", "middle", "length", "inner" and the like indicating orientation or positional relationship are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0029] In order to keep the following description of the embodiments of the present invention clear and concise, the present invention omits detailed descriptions of known functions and known components.

[0030] Example 1

[0031] Reference Figures 1-4, a test probe station, comprising:

[0032] A workbench 1 is provided with a sample stage 2 fixedly connected to the middle of the upper end of the workbench 1. An adsorption hole 3 is provided on the upper end of the sample stage 2 for placing and adsorbing the chip. Probe bodies 10 are provided on both sides above the workbench 1 for testing the chip.

[0033] The sealing component includes a plurality of elastic plates 14 provided on the upper surface of the sample stage 2, which are used to cover the adsorption holes 3. A strip block 15 is fixedly connected to one side of the plurality of elastic plates 14 near the middle of the sample stage 2, which is used to limit the chip;

[0034] The adjustment component includes a first bidirectional screw rod 11 and a second bidirectional screw rod 12 which are respectively rotatably installed at the lower end and the middle part of the sample stage 2. The lower end of the sample stage 2 is fixedly connected to a support frame 25. The first bidirectional screw rod 11 and the second bidirectional screw rod 12 are both rotatably connected to the support frame 25. The outer walls of the first bidirectional screw rod 11 and the second bidirectional screw rod 12 are both threadedly sleeved with a splint 13. The upper ends of the multiple splints 13 are fixedly connected to the elastic plate 14 for adjusting the position of the elastic plate 14.

[0035] In the above technical solution, an adsorption hole 3 is provided through the sample table 2 in the middle of the upper end of the workbench 1, which is used to place and adsorb the chip. The external air pump is connected through the connecting pipe 31 at the rear end of the sample table 2 to generate negative pressure to adsorb the chip to ensure the stability of the chip. The adsorption hole 3 is covered by multiple elastic plates 14 on the upper surface of the sample table 2 to prevent the adsorption holes not occupied by the chip from affecting the test stability. The elastic plate 14 limits the chip through the strip block 15 to prevent the chip from moving. The position of the clamping plate 13 is adjusted by rotating the first bidirectional screw rod 11 and the second bidirectional screw rod 12, thereby driving the displacement of the elastic plate 14 and the strip block 15 to adapt to chips of different sizes.

[0036] In one aspect of this embodiment, Figure 3 As shown, one side of the interior of the workbench 1 is fixedly connected to a limit plate 17, and the middle part of the limit plate 17 is rotatably connected to the first connecting shaft 18. One side of the first bidirectional screw rod 11 passes through the support frame 25 and is fixedly connected to the first bevel gear 16. The rear end of the first connecting shaft 18 is fixedly connected to the second bevel gear 19. The first bevel gear 16 is meshed with the second bevel gear 19. The second bidirectional screw rod 12 and the front end of the first connecting shaft 18 pass through the workbench 1 and are respectively fixedly connected to the first rotating handle 26 and the second rotating handle 27, which are used to drive the first bidirectional screw rod 11 and the second bidirectional screw rod 12 to rotate.

[0037] In the above technical solution, the first rotating handle 26 and the second rotating handle 27 are provided to rotate the first bidirectional screw rod 11 and the second bidirectional screw rod 12 .

[0038] In one aspect of this embodiment, Figure 4 As shown, support platforms 4 are fixedly connected to both sides of the upper surface of the workbench 1, and the middle parts of the two support platforms 4 are rotatably connected to the first one-way screw rods 5. The outer walls of the two first one-way screw rods 5 are threadedly sleeved with support frames 6, and the interiors of the two support frames 6 are slidably connected to sliding frames 7, and the interiors of the sliding frames 7 are slidably connected to adjustment frames 8. One side of the two adjustment frames 8 is fixedly connected to support plates 9, and one side of the two support plates 9 is fixedly connected to the probe body 10 for adjusting the position of the probe body 10.

[0039] In the above technical solution, the position of the support frame 6 is adjusted by the first one-way screw 5 on the support platform 4, and the positions of the sliding frame 7 and the adjustment frame 8 are adjusted respectively by rotating the second one-way screw 22 and the third one-way screw 24 to achieve three-dimensional adjustment of the probe body 10.

[0040] This application can be used in the field of chip testing, and can also be used in other fields applicable to this application.

[0041] Example 2

[0042] Improved on the basis of Example 1: A CIS chip test probe station, which is used in the field of chip testing,

[0043] In one aspect of this embodiment, Figure 4 As shown, one side of the two support frames 6 is rotatably connected to the second connecting shaft 20, the lower ends of the inside of the two support frames 6 are rotatably connected to the second one-way screw rods 22, the lower ends of the two second connecting shafts 20 are fixedly connected to the third bevel gear 21, one side of the two second one-way screw rods 22 is fixedly connected to the fourth bevel gear 23, the third bevel gear 21 is meshed with the fourth bevel gear 23, the outer walls of the two second one-way screw rods 22 are threadedly connected to the lower end of the sliding frame 7, for adjusting the position of the sliding frame 7, the interior of the two sliding frames 7 are rotatably connected to the third one-way screw rods 24, the outer wall of the third one-way screw rod 24 is threadedly connected to the adjustment frame 8, for lifting and lowering the adjustment frame 8.

[0044] In the above technical solution, the second one-way screw rod 22 is provided to adjust the position of the sliding frame 7 , and the third one-way screw rod 24 is provided to lift and lower the adjustment frame 8 .

[0045] In one aspect of this embodiment, Figure 4 As shown, the upper ends of the two second connecting shafts 20 and the third one-way screw rod 24 are fixedly connected with knobs 29.

[0046] In the above technical solution, the knob 29 is provided to facilitate the rotation of the second connecting shaft 20 and the third one-way screw 24 .

[0047] In one aspect of this embodiment, Figure 1As shown, the front ends of the two first one-way screw rods 5 both pass through the support platform 4 and are fixedly connected to the third rotating handle 28.

[0048] In the above technical solution, a third rotating handle 28 is provided to rotate the first one-way screw rod 5 .

[0049] In one aspect of this embodiment, Figure 3 As shown, a connecting pipe 31 is provided at the rear end of the sample stage 2 .

[0050] In the above technical solution, a connecting pipe 31 is provided for connecting to an external air pump.

[0051] In another aspect of this embodiment, Figure 1 As shown, a guard plate 30 is fixedly connected to the upper end of the workbench 1 .

[0052] In the above technical solution, the design of the guard plate 30 helps to reduce the impact of external interference and pollution on the testing process.

[0053] Throughout this specification, references to terms such as "one embodiment," "example," or "specific example" indicate that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0054] The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The preferred embodiments do not describe all details in detail, nor do they limit the present invention to the specific embodiments described. Obviously, many modifications and variations are possible based on the contents of this specification. These embodiments are selected and described in detail in this specification to better explain the principles and practical applications of the present invention, thereby enabling those skilled in the art to better understand and utilize the present invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A CIS chip test probe station, characterized in that: include: A workbench (1), wherein a sample stage (2) is fixedly connected to the middle of the upper end of the workbench (1), an adsorption hole (3) is provided at the upper end of the sample stage (2) for placing and adsorbing a chip, and probe bodies (10) are provided on both sides above the workbench (1) for testing the chip; A sealing component, comprising a plurality of elastic plates (14) arranged on the upper surface of the sample stage (2) for covering the adsorption holes (3), wherein a strip block (15) is fixedly connected to one side of the plurality of elastic plates (14) close to the middle of the sample stage (2) for limiting the position of the chip; An adjustment component includes a first bidirectional screw rod (11) and a second bidirectional screw rod (12) rotatably mounted on the lower end and the middle portion of the sample stage (2), respectively; the lower end of the sample stage (2) is fixedly connected to a support frame (25); the first bidirectional screw rod (11) and the second bidirectional screw rod (12) are both rotatably connected to the support frame (25); the outer walls of the first bidirectional screw rod (11) and the second bidirectional screw rod (12) are both threadedly sleeved with a clamping plate (13); the upper ends of a plurality of the clamping plates (13) are fixedly connected to the elastic plate (14) for adjusting the position of the elastic plate (14).

2. A CIS chip test probe station as claimed in claim 1, characterized in that, One side of the interior of the workbench (1) is fixedly connected to a limit plate (17), and the middle part of the limit plate (17) is rotatably connected to a first connecting shaft (18). One side of the first bidirectional screw rod (11) passes through the support frame (25) and is fixedly connected to a first bevel gear (16). The rear end of the first connecting shaft (18) is fixedly connected to a second bevel gear (19). The first bevel gear (16) is meshed with the second bevel gear (19). The front ends of the second bidirectional screw rod (12) and the first connecting shaft (18) pass through the workbench (1) and are respectively fixedly connected to a first rotating handle (26) and a second rotating handle (27), which are used to drive the first bidirectional screw rod (11) and the second bidirectional screw rod (12) to rotate.

3. A CIS chip test probe station as claimed in claim 2, characterized in that, Both sides of the upper surface of the workbench (1) are fixedly connected to support platforms (4), the middle parts of the two support platforms (4) are rotatably connected to the first one-way screw rods (5), the outer walls of the two first one-way screw rods (5) are threadedly sleeved with support frames (6), the interiors of the two support frames (6) are slidably connected to sliding frames (7), the interiors of the sliding frames (7) are slidably connected to adjustment frames (8), one side of the two adjustment frames (8) is fixedly connected to support plates (9), and one side of the two support plates (9) is fixedly connected to the probe body (10) for adjusting the position of the probe body (10).

4. A CIS chip test probe station as claimed in claim 3, characterized in that, One side of the two support frames (6) is rotatably connected to a second connecting shaft (20), the lower ends of the interiors of the two support frames (6) are rotatably connected to a second one-way screw rod (22), the lower ends of the two second connecting shafts (20) are fixedly connected to a third bevel gear (21), one side of the two second one-way screw rods (22) is fixedly connected to a fourth bevel gear (23), the third bevel gear (21) is meshedly connected to the fourth bevel gear (23), the outer walls of the two second one-way screw rods (22) are threadedly connected to the lower end of the sliding frame (7) for adjusting the position of the sliding frame (7), the interiors of the two sliding frames (7) are rotatably connected to a third one-way screw rod (24), the outer wall of the third one-way screw rod (24) is threadedly connected to the adjustment frame (8) for lifting the adjustment frame (8).

5. A CIS chip test probe station as claimed in claim 4, characterized in that, The upper ends of the two second connecting shafts (20) and the third one-way screw rod (24) are both fixedly connected with a knob (29).

6. A CIS chip test probe station as claimed in claim 3, characterized in that, The front ends of the two first one-way screw rods (5) both pass through the support platform (4) and are fixedly connected to a third rotating handle (28).

7. A CIS chip test probe station as claimed in claim 1, characterized in that, The rear end of the sample stage (2) is provided with a connecting pipe (31) for connecting to an external air pump.

8. A CIS chip test probe station as claimed in claim 1, characterized in that, A guard plate (30) is fixedly connected to the upper end of the workbench (1).

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