Crystal boat box night vision device

Abstract

The utility model relates to a wafer box night vision device, which structurally comprises a wafer box capable of accommodating a plurality of wafers arranged side by side, a plurality of gap parts, a wafer carrying device, a mechanical arm and a night vision device, and the night vision device comprises an infrared light emitting piece, a radiation detection piece and an image conversion piece capable of generating visible light images. The device is provided with a state detection module and a control module. Therefore, before the wafer carrying device grabs the wafer, the infrared light emitting part of the night vision device emits infrared light to the gap part, the radiation detection part receives reflected light, and the image conversion part generates a visible light image, so that the storage state of the wafer deep in the gap part is judged through the state detection module; and finally, the control module determines the action of the mechanical arm, so that the wafer is prevented from being broken due to the abnormal storage state of the wafer.

Description

Technical Field

[0001] The utility model provides a wafer boat box night vision device which has a simple setting method, low structural cost, fast identification method, and can deeply detect the storage status of wafers inside the wafer boat box to avoid wafer breakage caused by accidental contact of a robotic arm. Background Art

[0002] Wafers are generally stored in wafer cassettes, waiting for handling equipment to remove the wafers from the cassettes for subsequent procedures such as cutting and testing. Before removing the wafers, it is necessary to confirm whether the wafers assembled in the cassette are missing, overlapping, skewed or warped, etc., to avoid damaging the wafers during the loading and unloading process. Therefore, the storage status of the wafers in the cassette is detected before all wafers in the cassette are removed. If a wafer is in a bad configuration state, the loading and unloading operation is suspended until the user can resolve the error state.

[0003] Conventional detection methods include manual inspection, infrared interception sensing, proximity sensors, or complex optical image recognition systems. However, these detection methods have the following problems and shortcomings when used:

[0004] First, the large number of system devices and complicated detection procedures lead to poor comparison efficiency of the optical image recognition system.

[0005] Second, a large number of sensors need to be installed, resulting in high installation costs or a large size that is not conducive to the spatial configuration of the overall equipment.

[0006] Third, only the wafer storage status of the part visible to the naked eye on the outside of the wafer box can be determined. However, the wafers are extremely thin. Even if the external storage status appears normal, there may still be warping inside. The abnormal internal storage status cannot be detected by any of the above detection methods. Therefore, the handling device's pick-and-place operation still carries a high risk of damaging the wafers.

[0007] Therefore, how to solve the above common problems and shortcomings is the direction that the applicant of the present utility model and related manufacturers engaged in this industry want to study and improve. Utility Model Content

[0008] In view of the above-mentioned shortcomings, the applicant of the present utility model collected relevant information, conducted multiple evaluations and considerations, and after continuous attempts and modifications, designed a night vision device for the wafer boat box, which has a simple setting method, low structural cost, fast identification method, and can deeply detect the storage status of wafers inside the wafer boat box to avoid accidental touch of the robotic arm and cause breakage of wafers.

[0009] The main purpose of the utility model is to use a night vision device to deeply detect the storage status of wafers inside the wafer boat box, and then control the movement of the robotic arm to avoid accidental contact of the robotic arm and cause wafer breakage.

[0010] To achieve the above-mentioned purpose, the structure of the present invention includes: a wafer boat box, a plurality of wafers, a plurality of gap parts, a wafer handling device, a robotic arm, and a night vision device. The night vision device includes an infrared light emitting element, a radiation detection element, and an image conversion element that can generate visible light images, and has a status detection module and a control module. These wafers are arranged side by side and accommodated in a wafer boat box, and each of the gaps is defined between the wafers or between the wafers and the wall of the wafer boat box. The wafer handling device is arranged on one side of the wafer boat box, and the robotic arm is pivoted on the wafer handling device. The night vision device is arranged on the robotic arm. The emission direction of the infrared light emitting element is consistent with the grasping direction of the robotic arm and is emitted into the gap. The radiation detection element is arranged on one side of the infrared light emitting element to receive the reflected light of the infrared light emitting element and convert it into an electrical signal. The image conversion element information is connected to the radiation detection element to calculate and process the electrical signal to generate a visible light image. The status detection module information is connected to the night vision device to judge the storage status of each wafer based on the visible light image. The control module information is connected to the status detection module to drive the robotic arm to enter the gap when a normal storage status is read.

[0011] When the wafer handling device wants to grab the wafers in the wafer boat box, it first uses the infrared light emitter of the night vision device to emit infrared light into the gap. The radiation detection component receives the reflected light, and the image conversion component converts the reflected light into an electrical signal to generate a visible light image. The status detection module then determines the storage status of the wafers deep in the gap based on the visible light image. Finally, the control module determines the action of the robotic arm to avoid accidental contact and breakage of the wafers due to abnormal storage status of the wafers.

[0012] By using the above technology, the problems of conventional wafer storage status detection methods, such as poor comparison efficiency, high cost, and inability to detect the storage status inside the wafer boat box, can be overcome to achieve the above advantages. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a three-dimensional perspective view of a preferred embodiment of the present invention.

[0014] Figure 2 This is a diagram of the usage status of a preferred embodiment of the utility model.

[0015] Figure 3 This is a detection diagram of a preferred embodiment of the present utility model.

[0016] Figure 3AThis is a cross-sectional view of the wafer boat box in Figure 3.

[0017] Figure 4 This is a schematic diagram of a preferred embodiment of the present invention.

[0018] Figure 4A This is a cross-sectional view of the wafer boat box in Figure 4.

[0019] Figure 5 This is an action block diagram of a preferred embodiment of the present utility model.

[0020] Figure 6 This is a three-dimensional diagram of another preferred embodiment of the present invention.

[0021] Reference numerals:

[0022] Crystal Boat Box...1

[0023] Wafer...1 1

[0024] Gap...1 1 1

[0025] Wafer handling device...2

[0026] Robotic Arm...2 1

[0027] Night vision device...3

[0028] Infrared light emitter...3 1

[0029] Radiation detection parts...32

[0030] Image conversion parts...33

[0031] Status detection module...4

[0032] State Database...4 1

[0033] Comparison module...42

[0034] Control module...5

[0035] Angle adjustment piece...6

[0036] Curved track...6 1

[0037] Screw...62 DETAILED DESCRIPTION

[0038] In order to achieve the above-mentioned purpose and effect, the technical means and structure adopted by the present invention are described in detail with reference to the accompanying drawings for the features and functions of the preferred embodiment of the present invention so as to provide a complete understanding.

[0039] Please refer to Figure 1 and Figure 2As shown, it is a three-dimensional perspective view and a diagram of the use state of a preferred embodiment of the utility model. It can be clearly seen from the figure that the utility model includes:

[0040] The wafer cassette 1 is configured to accommodate a plurality of wafers 11 arranged side by side, with gaps 111 being defined between the wafers 11 or between the wafers 11 and the wall of the wafer cassette 1 .

[0041] The wafer transport device 2 is provided on one side of the wafer boat box 1;

[0042] A robotic arm 21, pivotally mounted on the wafer handling device 2;

[0043] The night vision device 3 is provided on the robotic arm 21 and includes:

[0044] The infrared light emitting element 31 has an emission direction consistent with the grasping direction of the robot arm 21 and emits light into the gap portion 111;

[0045] The radiation detection element 32 is provided on one side of the infrared light emitting element 31 to receive the reflected light from the infrared light emitting element 31 and convert it into an electrical signal;

[0046] The image conversion element 33 is connected to the radiation detection element 32 to process the electrical signal to generate a visible light image;

[0047] A status detection module 4 is connected to the night vision device 3 to determine the storage status of each wafer 11 based on the visible light image. The status detection module 4 is connected to the status database 41.

[0048] a comparison module 42 , provided on one side of the status database 41 , comparing the visible light image with the status database 41 to determine whether the storage status is normal; and

[0049] The control module 5 is connected to the state detection module 4 so as to drive the robot arm 21 to enter the gap 111 when a normal storage state is detected.

[0050] Among them, the wafer 11 is the abbreviation of semiconductor crystal circular wafer (Wafer), and the wafer handling device 2 is an example of a wafer conveyor (Equipment Front End Module, EFEM); the gap 111 is a low light source space or a dark space in the wafer boat box 1 that is not visible to the naked eye; the infrared light emitting element 31 is an example of infrared LED lighting, which provides visible or invisible infrared light to illuminate the target area; the radiation detection element 32 is an image sensor, and uses a complementary metal oxide semiconductor (CMOS) or a charge-coupled device (CCD) Device, CCD) technology is used for sensing; the image conversion element 33, for example, a signal processor, is used to convert electrical signals into digital signals and then calculate and process them to generate images; the status detection module 4 can be a cloud processor or a processor located in the wafer handling device 2. This embodiment uses the latter as an example. The comparison module 42 is one of the processor chips, the status database 41 is a storage medium such as a memory or a hard disk, and the control module 5 is another cloud processor or another processor located in the wafer handling device 2, all of which are represented by dotted boxes in the figure. However, the corresponding types of the above components are only examples of preferred embodiments. Any types with the same functions fall within the scope of the present invention and are not limited to the above examples.

[0051] Through the above description, we have gained some understanding of the structure of this technology. According to the corresponding coordination of this structure, it can achieve a simple setting method, low structural cost, fast identification method, and in-depth detection of the storage status of the wafers 11 inside the crystal boat box 1, thereby avoiding the advantages of accidental touch of the robotic arm 21 and causing breakage. The following will be explained in detail.

[0052] Please refer to Figures 1 to 5 As shown, it is a three-dimensional perspective view and an action block diagram of a preferred embodiment of the present invention. When the above components are assembled, it can be clearly seen from the figure that in terms of the configuration of the equipment mechanism, as long as the night vision device 3 is set on the existing robot arm 21, and the night vision device 3 and the wafer handling device 2 are connected by wired or wireless means for signal transmission, the complete installation is completed. The structure is relatively simple, and there is no need to provide too much additional installation space, and the required cost is low. When setting, the emission direction of the infrared light emitting element 31 must be consistent with the grasping direction of the robot arm 21 so that the infrared light can be injected into the gap portion 111. In this way, no matter which direction or height position the robot arm 21 is about to grasp the wafer 11, the night vision device 3 will move and swing synchronously. Therefore, the wafer storage status can be identified simply by setting a single set of night vision devices 3.

[0053] The identification light source used in this case is an infrared light emitter 31, which provides infrared light with a wavelength of, for example, 850nm to 940nm. Preferably, infrared light of 850nm is provided. Although this wavelength band is visible light, there is no need to conceal the light in the semiconductor process, and this wavelength band can provide a strong lighting effect. Most image sensors (including the radiation detection element 32 in this case) are also highly sensitive to light in this wavelength band. Infrared light in this wavelength band is used in low-light or dark spaces. When the target object is irradiated with infrared light, it will reflect the infrared light. At this time, the radiation detection element 32 can be used to receive the reflected infrared light and convert the optical signal or radiation signal of the reflected light into an electrical signal, which is then passed to the image conversion element 33 for processing. The image conversion element 33 can then perform steps such as denoising, contrast adjustment, gamma correction, and color processing to convert the electrical signal into a color-like image, which is a visible light image that can be identified by the naked eye.

[0054] In other words, the visible light image acquired by the night vision device 3 can clearly display the storage status of the wafers located deep within the gap 111, resolving the shortcoming that conventional detection methods cannot detect the storage status within the wafer cassette 1. Of course, after acquiring the visible light image, the storage status of each wafer 11 must be further confirmed by the status detection module 4. Therefore, the comparison module 42 will be used to compare the visible light image with the images in the status database 41. The image source of the status database 41 can be prepared to store multiple wafers 11 and confirm that there is no abnormal storage status for identification. In this way, the comparison data of the standard storage status is first provided to the status database 41. By comparing each visible light image, it is determined whether the storage status of the wafer at the corresponding position is normal.

[0055] The control module 5 reads the determination result of the status detection module 4. If a normal wafer storage state is detected, the control module 5 drives the robotic arm 21 into the corresponding gap 111 to retrieve and place the wafer 11. Conversely, if an abnormal wafer storage state is detected, such as tilt, overlap, missing wafers, or warping, the robotic arm 21 is stopped from entering the gap 111 and driven to the next gap 111 via the wafer handling device 2. Thus, before each wafer 11 is retrieved and placed, the robotic arm 21 uses the night vision device 3 to obtain a visible light image of the deep portion of the gap 111. Only when the status detection module 4 determines that there is no abnormality will the control module 5 allow the robotic arm 21 to proceed with the retrieval operation. This identification operation is not only simple and fast, but also effectively avoids blind spots such as the normal external storage state of the wafer cassette 1 and the abnormal internal storage state, effectively improving the safety of the robotic arm 21's retrieval operation and preventing damage to the wafers 11.

[0056] Please refer to Figure 6As shown in FIG. 1 , a perspective view of another preferred embodiment of the present invention is shown. It can be clearly seen from the figure that this embodiment is similar to the above embodiment, except that the night vision device 3 has at least one angle adjustment member 6, which can adjust the emission angle of the infrared light emitting member 31 to ensure that the infrared light can be emitted into the deep part of the gap. The angle adjustment member 6 can be a knob adjustment, a slide adjustment, or an electric adjustment. The knob adjustment is provided on the outside of the night vision device 3, and the infrared light emitting member 31 on the inside is connected with a screw. The angle can be adjusted simply by turning the knob. This method is simple in structure and action. Because the infrared light emitting element 31 does not need to be aligned synchronously with other light sources, there is no need to worry about the recognition rate problem caused by ghosting; the slide rail adjustment uses a shell with a hollow arc track 61, and cooperates with the screw 62 that slides in the arc track 61 and is locked on the infrared light emitting element 31 to adjust the angle. This method can be set on both sides of the infrared light emitting element 31 at the same time to increase the fixing strength and avoid angular position deviation after the robot arm 21 moves for a long time; the electric adjustment is similar to the knob adjustment method, only the knob is changed to a motor, so that precise angle adjustment can be performed semi-automatically. This embodiment is only illustrated in the slide rail adjustment method.

[0057] However, the above description is only a preferred embodiment of the present invention and does not limit the patent scope of the present invention. Therefore, all simple modifications and equivalent structural changes made by using the description and drawings of the present invention as examples should be included in the patent scope of the present invention and are hereby declared.

Claims

1. A crystal boat box night vision device, characterized in that: include: A wafer cassette can accommodate a plurality of wafers arranged side by side, with gaps between the wafers or between the wafers and the wall of the wafer cassette; A wafer transport device is provided on one side of the wafer boat box; a robotic arm, pivotally mounted on the wafer handling device; A night vision device is provided on the robotic arm and includes: an infrared light emitting element, the emitting direction of which is consistent with the grasping direction of the robotic arm and is emitted into the gap; a radiation detection element, disposed on one side of the infrared light emitting element, for receiving the reflected light from the infrared light emitting element and converting it into an electrical signal; An image conversion element, informationally connected to the radiation detection element, to process the electrical signal to generate a visible light image; A status detection module, information-linked to a night vision device, for determining the storage status of each of the wafers based on visible light images; and The control module is information-connected to the state detection module so as to drive the robot arm to enter the gap portion when a storage state without abnormality is read.

2. The wafer boat box night vision device according to claim 1, characterized in that: The radiation detection element is an image sensor and uses complementary metal oxide semiconductor (CMOS) or photosensitive coupling device (PCD) technology for sensing.

3. The wafer boat box night vision device according to claim 1, characterized in that: The status detection module information is linked to a status database.

4. The wafer boat box night vision device according to claim 3, characterized in that: A comparison module is provided on one side of the status database to compare the visible light image with the status database to determine whether the storage status is normal.

5. The wafer boat box night vision device according to claim 1, characterized in that: The storage state is one of normal, tilted, stacked, missing or warped.

6. The wafer boat box night vision device according to claim 1, characterized in that: The gap portion is a low light source space or a dark space that is not visible to the naked eye.

7. The wafer boat box night vision device according to claim 1, characterized in that: The night vision device is provided with at least one angle adjustment component, which can adjust the emission angle of the infrared light emitting component.

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