Substrate bearing device

Abstract

The utility model belongs to the technical field of vacuum treatment, and discloses a substrate bearing device. The substrate bearing device comprises a shell, a loading assembly and a driving assembly, a closed cavity is formed in the shell, the loading assembly comprises a rotating structure and a first slewing bearing piece which are arranged in the closed cavity, the rotating structure is connected to the inner cavity wall of the closed cavity through the first slewing bearing piece, and the rotating structure is used for fixing a substrate; the driving assembly is at least partially arranged in the closed cavity to drive the rotating structure to rotate so as to drive the substrate to rotate. The rotating structure and the first slewing bearing piece are arranged, the rotating structure is connected to the inner cavity wall through the first slewing bearing piece, the base plate is fixed to the rotating structure, the rotating structure and the inner cavity wall can be used for bearing the base plate, the driving assembly can also be used for driving the rotating structure to rotate so as to drive the base plate to rotate, and the coating uniformity is guaranteed; and the bearing capacity is effectively improved, and the device can be suitable for a heavy substrate.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum processing, in particular to a substrate carrying device. Background Art

[0002] In existing technology, vacuum processing equipment such as vacuum coating typically uses a substrate rack as a substrate loading structure. The rack is pivotally connected to the top wall of the vacuum processing equipment's chamber via a central shaft. The substrate is secured to the rack, and the rack drives the substrate's rotation to ensure uniform vacuum processing. However, because the weight of both the rack and the substrate must be supported by the shaft, the load-bearing capacity of existing racks is very limited, while ensuring stable rotation and vacuum processing. This makes them unsuitable for heavy substrates. Utility Model Content

[0003] The utility model aims to provide a substrate bearing device to solve the problem that the existing vacuum processing equipment has limited bearing capacity and is difficult to be applied to heavy substrates because the weight of the substrate umbrella frame and the substrate is supported by the rotating shaft.

[0004] To achieve this purpose, the present invention adopts the following technical solutions:

[0005] The utility model provides a substrate carrying device, which includes a shell, a loading assembly and a driving assembly. A closed chamber is provided in the shell. The loading assembly includes a rotating structure and a first slewing support placed in the closed chamber. The rotating structure is connected to the inner cavity wall of the closed chamber through the first slewing support. The rotating structure is used to fix the substrate. The driving assembly is at least partially placed in the closed chamber and is used to drive the rotating structure to rotate so as to drive the substrate to rotate.

[0006] As an optional technical solution for a substrate carrying device, the inner cavity wall includes a side wall and a carrying wall connected to the side wall; and / or, the rotating structure is connected to the carrying wall via the first slewing support, and reinforcing ribs are protruding from the outer sides of the shell corresponding to the side wall, wherein a first end of the reinforcing rib is connected to the outer sides of the shell corresponding to the carrying wall and a second end is used for support on the ground.

[0007] As an optional technical solution of the substrate supporting device, the extending direction of the supporting wall is perpendicular to the extending direction of the side wall; and / or the cross-sectional area of ​​the first end of the reinforcing rib is smaller than the cross-sectional area of ​​the second end of the reinforcing rib.

[0008] As an optional technical solution for the substrate carrying device, at least two groups of the reinforcing ribs are arranged at intervals around the outer circumference of the shell, each group includes two reinforcing ribs, and the two reinforcing ribs in the same group are symmetrically arranged.

[0009] As an optional technical solution for a substrate carrying device, the shell includes a bottom shell, an intermediate main shell and a top shell, the intermediate main shell is stacked on the bottom shell, and the top shell is covered on the intermediate main shell, so that the top shell, the bottom shell and the intermediate main shell together form the closed chamber and constitute the side wall, and part of the intermediate main shell and / or part of the bottom shell serves as the carrying wall.

[0010] As an optional technical solution of the substrate carrying device, the end of the intermediate main shell close to the bottom shell includes a first flange, and the end of the bottom shell close to the intermediate main shell includes a second flange;

[0011] One side of the first flange is overlapped and fixed to the second flange and the other side serves as the bearing wall; or, both the first flange and the first slewing support are fixed to the second flange, and part of the second flange serves as the bearing wall.

[0012] As an optional technical solution for the substrate carrying device, the diameter of the top shell gradually increases towards the middle main shell; and / or the bottom shell has a first end close to the middle main shell and a second end away from the middle main shell, and the first port diameter of the bottom shell is larger than the second port diameter.

[0013] As an optional technical solution for the substrate carrying device, the loading assembly further includes a fixed gear fixed to the housing, the rotating structure includes a revolving gear and a revolving frame fixed to the revolving gear, the revolving gear is connected to the inner cavity wall via the first slewing bearing, and the revolving frame is provided with a planetary gear and a planetary acceleration gear, the planetary gear is used to fix the substrate, and the planetary gear is meshed with the fixed gear via the planetary acceleration gear;

[0014] The driving assembly is used to drive the revolving gear to rotate. The rotation of the revolving gear drives the revolving frame to rotate, and drives the planetary gears and the planetary acceleration gears to revolve around the center of the revolving gear, and drives the planetary gears to rotate around the center of the planetary gears through the planetary acceleration gears.

[0015] As an optional technical solution of the substrate carrying device, the loading assembly further includes a second rotary support, and the planetary gear is connected to the revolution frame via the second rotary support.

[0016] As an optional technical solution of the substrate carrying device, the loading assembly further includes a supporting member, and the first rotary supporting member is fixed to the inner cavity wall through the supporting member.

[0017] Beneficial effects:

[0018] The utility model provides a substrate carrying device, which includes a shell, a loading assembly and a driving assembly. A closed chamber is provided in the shell, and the loading assembly includes a rotating structure and a first slewing support member placed in the closed chamber. The rotating structure is connected to the inner cavity wall of the closed chamber through the first slewing support member. The rotating structure is used to fix the substrate. The driving assembly is at least partially placed in the closed chamber to drive the rotating structure to rotate so as to drive the substrate to rotate. By arranging the rotating structure and the first slewing support member in the closed chamber of the shell, and the rotating structure is connected to the inner cavity wall through the first slewing support member, the substrate is fixed on the rotating structure. The rotating structure and the inner cavity wall can be used to carry the substrate, and the driving assembly can be partially placed in the closed chamber to drive the rotating structure to rotate so as to drive the substrate to rotate, thereby ensuring the uniformity of the coating. Compared with the existing coating equipment in which the rotating shaft bears the weight of the substrate umbrella frame and the substrate, the loading assembly is more stable and reliable, effectively improves the carrying capacity, and can be applied to substrates with heavier weights. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic structural diagram of a substrate carrying device provided by an embodiment of the present utility model;

[0020] Figure 2 This is a schematic diagram of the disassembly of the substrate carrying device provided by an embodiment of the present utility model;

[0021] Figure 3 It is a structural diagram of a loading assembly and a driving assembly provided by an embodiment of the present utility model;

[0022] Figure 4 is a cross-sectional view of a substrate carrying device provided by an embodiment of the present utility model;

[0023] Figure 5 It is a partial cross-sectional view of a substrate carrying device provided by an embodiment of the present invention from a first viewing angle;

[0024] Figure 6 is a partial cross-sectional view of a substrate supporting device provided by an embodiment of the present invention from a second viewing angle;

[0025] Figure 7 It is a partial cross-sectional view of the substrate carrying device provided by an embodiment of the present invention from a third viewing angle.

[0026] In the picture:

[0027] 10. Shell; 101. Side wall; 102. Load-bearing wall; 11. Top shell; 12. Intermediate main shell; 121. First flange; 13. Bottom shell; 131. Bottom plate; 132. Arc-shaped side wall; 1321. Connecting port; 133. Second flange; 134. Reinforcement rib;

[0028] 20. Loading assembly; 21. Fixed gear; 201. Rotating structure; 22. Revolution gear; 23. Revolution frame; 231. Mounting hole; 24. Planetary gear; 25. Planetary acceleration gear; 26. First rotary support; 261. First pressure ring; 262. Second pressure ring; 263. Roller; 263a. First roller; 263b. Second roller; 263c. Third roller; 27. Second rotary support; 28. Support member;

[0029] 30. Driving assembly; 31. Driving member; 32. Transmission gear;

[0030] 41. Base plate; 42. Auxiliary fixing mechanism. DETAILED DESCRIPTION

[0031] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0032] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0033] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0034] In the description of this embodiment, terms such as "upper," "lower," "left," and "right" are used to refer to positions or locations based on the positions or locations shown in the accompanying drawings. These terms are intended solely to facilitate description and simplify operation, and are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0035] like Figures 1 to 4 As shown, this embodiment provides a substrate carrying device, which includes a shell 10, a loading assembly 20 and a driving assembly 30. A closed chamber is provided in the shell 10. The loading assembly 20 includes a rotating structure 201 and a first rotary support 26 placed in the closed chamber. The rotating structure 201 is connected to the inner wall of the closed chamber through the first rotary support 26. The rotating structure 201 is used to fix the substrate 41. The driving assembly 30 is at least partially placed in the closed chamber to drive the rotating structure 201 to rotate to drive the substrate 41 to rotate.

[0036] By arranging a rotating structure 201 and a first swivel support 26 in the closed chamber of the shell 10, and the rotating structure 201 is connected to the inner cavity wall through the first swivel support 26, the substrate 41 is fixed on the rotating structure 201. The rotating structure 201 and the inner cavity wall can be used to support the substrate 41, and the driving component 30 can be at least partially placed in the closed chamber to drive the rotating structure 201 to rotate, thereby driving the substrate 41 to rotate, ensuring the uniformity of the coating. Compared with the existing coating equipment in which the rotating shaft bears the weight of the substrate umbrella frame and the substrate, it is more stable and reliable, effectively improves the bearing capacity, and can be suitable for substrates 41 with heavier weight.

[0037] Furthermore, the inner cavity wall of the housing 10 includes a side wall 101 and a bearing wall 102 connected to the side wall 101 , and the rotating structure 201 is connected to the bearing wall 102 via a first slewing support 26 .

[0038] By arranging the side wall 101 and the supporting wall 102 on the inner cavity wall of the shell 10, the rotating structure 201 is connected to the supporting wall 102 through the first slewing support 26, which not only facilitates the installation of the rotating structure 201, but also helps to design the thickness of the corresponding side wall 101 and supporting wall 102 positions of the shell 10 according to actual needs, thereby ensuring that the substrate supporting device has reliable bearing capacity.

[0039] Optionally, the direction in which the bearing wall 102 extends is perpendicular to the direction in which the side wall 101 extends. In this embodiment, the side wall 101 extends vertically, and the bearing wall 102 extends horizontally. By setting the direction in which the bearing wall 102 extends perpendicular to the direction in which the side wall 101 extends, the bearing wall 102 can more evenly distribute the vertical and horizontal loads it bears, ensuring a more uniform overall load distribution and preventing localized stress concentration.

[0040] Furthermore, a reinforcing rib 134 is provided protruding from the outer side of the housing 10 corresponding to the side wall 101. The first end of the reinforcing rib 134 is connected to the outer side of the housing 10 corresponding to the support wall 102, and the second end is used to support the ground. By providing the reinforcing rib 134 protruding from the outer side of the housing 10 corresponding to the side wall 101, with the first end connected to the outer side of the housing 10 corresponding to the support wall 102 and the second end supporting the ground, the weight of the base plate 41 and the rotating structure 201 can be directly transferred downward from the support wall 102 to the reinforcing rib 134, and then from the reinforcing rib 134 to the ground, further improving the load-bearing capacity.

[0041] Optionally, the cross-sectional area of ​​the first end of the reinforcing rib 134 is smaller than the cross-sectional area of ​​the second end of the reinforcing rib 134. By setting the cross-sectional area of ​​the second end of the reinforcing rib 134 larger than the cross-sectional area of ​​the first end, the reinforcing rib 134 can effectively transfer load, help the reinforcing rib 134 withstand greater stress, and improve the bending strength of the reinforcing rib 134.

[0042] Optionally, at least two groups of reinforcing ribs 134 are spaced apart around the periphery of the housing 10, each group including two reinforcing ribs 134, and the two reinforcing ribs 134 in the same group are symmetrically arranged. By providing symmetrical reinforcing ribs 134, the load can be evenly distributed, thus avoiding deformation caused by unilateral stress concentration and helping to reduce vibration.

[0043] Furthermore, the shell 10 includes a bottom shell 13, an intermediate main shell 12 and a top shell 11. The intermediate main shell 12 is stacked on the bottom shell 13, and the top shell 11 is covered on the intermediate main shell 12, so that the top shell 11, the bottom shell 13 and the intermediate main shell 12 together form a closed chamber and constitute the side wall 101, and part of the intermediate main shell 12 and / or part of the bottom shell 13 serves as the bearing wall 102.

[0044] By setting the shell 10 as three parts: a bottom shell 13, an intermediate main shell 12 and a top shell 11, the intermediate main shell 12 is stacked on the intermediate main shell 12, and then the top shell 11 is stacked on the intermediate main shell 12, the top shell 11, the bottom shell 13 and the intermediate main shell 12 together form a closed chamber, then the top shell 11, the bottom shell 13 and the intermediate main shell 12 constitute the inner cavity wall of the closed chamber, wherein the top shell 11, the bottom shell 13 and part of the inner side surface of the intermediate main shell 12 constitute the side wall 101, and part of the inner side surface of part of the intermediate main shell 12 and / or part of the bottom shell 13 serves as the bearing wall 102.

[0045] During operation, the loading assembly 20 is at least partially set in the middle main shell 12, and the substrate 41 can be directly hoisted and fixed flat on the loading assembly 20, which reduces the difficulty of transferring and the risk of damage to the substrate 41. Then the top shell 11 is covered on the middle main shell 12, so that the top shell 11, the middle main shell 12 and the bottom shell 13 are enclosed to form a closed chamber. The driving assembly 30 is at least partially placed in the closed chamber, and the driving assembly 30 is used to provide rotational power for the loading assembly 20 to complete the vacuum coating. The operation is simple and convenient, and can accommodate larger substrates 41. It can also reasonably plan and layout the space of the top shell 11, the middle main shell 12 and the bottom shell 13, effectively control the volume, and avoid high processing and transportation costs due to excessive volume.

[0046] In this embodiment, the top housing 11 and the bottom housing 13 are both detachably connected to the intermediate main housing 12. By arranging the top housing 11 and the bottom housing 13 to be detachably connected to the intermediate main housing 12, installation and maintenance are facilitated, and the vacuum processing source can be easily arranged in the bottom housing 13, and the substrate 41 can be easily hoisted and fixed flatly on the loading assembly 20.

[0047] It should be noted that when using a detachable connection, the sealing of the internal space of the shell 10 must be ensured. A variety of vacuum sealing methods can be used to achieve the seal between the top shell 11 and the bottom shell 13 and the middle main shell 12. For example, a sealing ring can be set at the connection to reduce the risk of air leakage, or a multi-stage sealing method can be used to further reduce the risk of air leakage. Since the static leakage rate of the sealing ring is essentially determined by the outgassing and permeability characteristics of its own material under vacuum, in some application scenarios, in order to achieve high-standard sealing effects and leakage rate control, the sealing ring is made of fluororubber; the fluororubber material reduces the static leakage rate to 10 with extremely low outgassing rate and permeability. -12 mbar·L / s~10 -9 mbar·L / s level.

[0048] In some application scenarios, metal sealing rings can also be used to achieve sealing, and the flange structure can be used to enhance the compression sealing effect. Atomic-level sealing can be achieved through plastic deformation of the metal, making the static leakage rate less than 10 -12 mbar·L / s. It is understandable that the sealing between adjacent shells is a conventional technology in the field of vacuum processing, and those skilled in the art can select an appropriate sealing means according to actual needs.

[0049] The removable connection method between the top housing 11 or the bottom housing 13 and the intermediate main housing 12 includes, but is not limited to, bolting. In other embodiments, the top housing 11 and the intermediate main housing 12 may be removably connected, while the bottom housing 13 and the intermediate main housing 12 may be welded together; or both the top housing 11 and the bottom housing 13 may be welded together.

[0050] Optionally, the end of the middle main shell 12 close to the bottom shell 13 includes a first flange 121, and the end of the bottom shell 13 close to the middle main shell 12 includes a second flange 133; one side of the first flange 121 is overlapped and fixed to the second flange 133 and the other side serves as a bearing wall 102.

[0051] By overlapping and fixing one side of the first flange 121 of the intermediate main shell 12 to the second flange 133 of the bottom shell 13 and using the other side as the bearing wall 102, and then arranging the rotating structure 201 and the first slewing support 26 on the bearing wall 102, it is possible to ensure reliable docking between the intermediate main shell 12 and the bottom shell 13, and also to utilize the bottom shell 13 to carry the loading assembly 20 and the base plate 41, thereby ensuring better bearing capacity.

[0052] In other embodiments, the first flange 121 and the first slewing support 26 can be fixed to the second flange 133 , and part of the second flange 133 can serve as the bearing wall 102 ; the rotating structure 201 can also be directly installed on the inner side of the middle main shell 12 or the bottom shell 13 .

[0053] In this embodiment, the top housing 11 gradually increases in diameter as it approaches the middle main housing 12. The bottom housing 13 has a first end proximal to the middle main housing 12 and a second end distal to the middle main housing 12. The first end of the bottom housing 13 has a larger diameter than the second end. By sizing the openings of the top and bottom housings 11, 13, they are aligned with the middle main housing 12 while minimizing space occupation, thus controlling the volume of the housing 10 and preventing excessive volume from impacting vacuum efficiency.

[0054] Among them, the shapes of the two ends of the middle main shell 12 match the shapes of the ends of the top shell 11 and the bottom shell 13, so that the middle main shell 12 can be docked with the top shell 11 and the bottom shell 13; when the chamber cross-section of the middle main shell 12 is circular, the diameter of the top shell 11 is the diameter of the top shell 11, the diameter of the first port of the bottom shell 13 is the diameter of the first end of the bottom shell 13, and the diameter of the second port of the bottom shell 13 is the diameter of the second end of the bottom shell 13; when the chamber cross-section of the middle main shell 12 is rectangular, the diameter of the top shell 11 is the diagonal length of the top shell 11, the diameter of the first port of the bottom shell 13 is the diagonal length of the first end of the bottom shell 13, and the diameter of the second port of the bottom shell 13 is the diagonal length of the second end of the bottom shell 13; when the chamber cross-section of the middle main shell 12 is irregular, the diameter of the top shell 11 is the longest chord length of the top shell 11, the diameter of the first port of the bottom shell 13 is the longest chord length of the first end of the bottom shell 13, and the diameter of the second port of the bottom shell 13 is the longest chord length of the second end of the bottom shell 13.

[0055] In this embodiment, the chamber cross-section of the middle main shell 12 is circular; the bottom shell 13 is bowl-shaped as a whole, that is, the diameter of the bottom shell 13 gradually increases and then gradually decreases towards the direction close to the middle main shell 12.

[0056] In this embodiment, the rotating structure 201 is disposed within the intermediate main housing 12, and the bottom housing 13 houses a vacuum processing source. The bottom housing 13 comprises a bottom plate 131 and an arcuate sidewall 132 connected to the bottom plate 131. A second flange 133 is radially projecting from the end of the arcuate sidewall 132, distal from the bottom plate 131, along the outer periphery. Reinforcing ribs 134 are projecting from the outer side of the arcuate sidewall 132. Both the first flange 121 and the second flange 133 are circular annular structures. Four groups of reinforcing ribs 134 are provided, with the two reinforcing ribs 134 in each group being symmetrically arranged. In other embodiments, the first flange 121 and the second flange 133 may alternatively be rectangular or elliptical annular structures.

[0057] See also Figure 2 Optionally, the outer periphery of the curved sidewall 132 is further provided with connection ports 1321 for installing pipelines and test circuits. When installing pipelines or test circuits at the connection ports 1321, strict sealing is required, including but not limited to welding or sealing with a sealing ring. In this embodiment, the connection ports 1321 are symmetrically arranged in two groups, each group including multiple connection ports 1321 spaced apart, and the multiple connection ports 1321 in the same group are all located between two adjacent reinforcing ribs 134.

[0058] See also Figures 2 to 5The loading assembly 20 also includes a fixed gear 21 fixed to the shell 10, and the rotating structure 201 includes a revolving gear 22 and a revolving frame 23 fixed to the revolving gear 22. The revolving gear 22 is connected to the inner cavity wall through a first rotary support 26. The revolving frame 23 is provided with a planetary gear 24 and a planetary acceleration gear 25. The planetary gear 24 is used to fix the substrate 41. The planetary gear 24 is meshed with the fixed gear 21 through the planetary acceleration gear 25; the driving assembly 30 is used to drive the revolving gear 22 to rotate. The rotation of the revolving gear 22 drives the revolving frame 23 to rotate, and drives the planetary gear 24 and the planetary acceleration gear 25 to revolve around the center of the revolving gear 22, and drives the planetary gear 24 to rotate around the center of the planetary gear 24 through the planetary acceleration gear 25.

[0059] In this embodiment, a fixed gear 21 is fixed within the intermediate main housing 12. A single planetary accelerator gear 25 is provided, which internally meshes with the fixed gear 21 and externally meshes with the planetary gears 24. The revolving frame 23 rotates in the same direction as the planetary gears 24. Specifically, when the revolving gear 22 and the revolving frame 23 revolve clockwise, the planetary accelerator gear 25 rotates counterclockwise, while the planetary gears 24 rotate clockwise. In other embodiments, multiple meshing planetary accelerator gears 25 may be provided, depending on the actual structure. The only requirement is that the planetary gears 24 rotate in the same direction as the revolving frame 23.

[0060] By setting the rotation direction of the revolution frame 23 (i.e., the revolution direction) to be the same as the rotation direction of the planetary gear 24, the planetary gear 24 rotates in the same direction on the basis of revolution, thereby increasing the speed of the planetary gear 24 and the speed of the substrate 41 relative to the vacuum processing source, thereby effectively improving the uniformity of the coating.

[0061] Specifically, the drive assembly 30 includes a drive member 31 and a transmission gear 32. The drive member 31 is a motor, and the transmission gear 32 is keyed to the motor's output shaft. The transmission gear 32 externally meshes with the revolving gear 22. The drive member 31 is partially and hermetically disposed within the intermediate main housing 12, and one end of the drive member 31 located within the intermediate main housing 12 is connected to the transmission gear 32. The transmission gear 32 is located within the intermediate main housing 12. By using the motor to drive the transmission gear 32 to rotate, and thereby drive the revolving gear 22 to rotate, high transmission efficiency and fast response are achieved. In other embodiments, the drive assembly 30 may be entirely located within the intermediate main housing 12.

[0062] Optionally, the revolving frame 23 is provided with a plurality of mounting holes 231 for mounting the planetary acceleration gears 25, with the centers of the plurality of mounting holes 231 being spaced at different distances from the center of the revolving frame 23. By providing a plurality of mounting holes 231 at different locations on the revolving frame 23, and since the centers of each mounting hole 231 are spaced at different distances from the center of the revolving frame 23, when a planetary gear 24 or planetary acceleration gear 25 of a different size needs to be replaced, the revolving frame 23 need not be replaced. Instead, the replaced planetary acceleration gear 25 can be directly installed in the appropriate mounting hole 231, thereby ensuring that the planetary acceleration gear 25 meshes with the planetary gears 24 and the fixed gear 21. This simple structure facilitates maintenance and replacement of the planetary acceleration gear 25.

[0063] See also Figure 3 In this embodiment, three mounting holes 231 are provided on the revolution frame 23 at intervals. The distances between the centers of the three mounting holes 231 and the center of the revolution frame 23 are different. The planetary acceleration gear 25 is installed at one of the mounting holes 231 .

[0064] See also Figure 4 Optionally, the substrate supporting device further includes an auxiliary fixing mechanism 42, which is overlapped and fixed to the planetary gear 24 and at least partially positioned inside the planetary gear 24. The inside of the auxiliary fixing mechanism 42 is used to fix the substrate 41. By overlapping and fixing the auxiliary fixing mechanism 42 on the planetary gear 24 and fixing the substrate 41 inside the auxiliary fixing mechanism 42, the overlapping structure can simultaneously withstand radial, axial, and tangential loads, and can also disperse the load by increasing the contact area, so that the weight of the substrate 41 and the auxiliary fixing mechanism 42 can be evenly transferred to the planetary gear 24, and then to the first slewing support 26 and the housing 10. Even if the auxiliary fixing mechanism 42 is damaged, the failure can be prevented from spreading to the planetary gear 24, thereby reducing associated losses.

[0065] See also Figure 5 and Figure 6 The loading assembly 20 further includes a support member 28 , through which the first rotary support member 26 is fixed to the inner cavity wall.

[0066] In this embodiment, the support member 28 is annular and is fixed to the second flange 133 of the bottom housing 13 and located inside the first flange 121 of the intermediate main housing 12. A gap is left between the outer side of the support member 28 and the inner side of the first flange 121. A gap is also left between the support member 28 and the side of the first flange 121 away from the second flange 133 and the revolving gear 22. In other embodiments, the first slewing support 26 can be directly mounted on the side of the first flange 121 away from the second flange 133 via the support member 28.

[0067] Compared with directly fixing the first slewing support 26 on the first flange 121 or the second flange 133, indirectly installing the first slewing support 26 using the support 28 can provide a more precise installation positioning surface, avoid the flange processing error affecting the installation accuracy of the first slewing support 26, and the support 28 can be adapted to flanges of different sizes, thereby improving the flexibility of bearing selection; at the same time, the support 28 is mainly used for bearing weight, and the first flange 121 and the second flange 133 are mainly used to ensure the sealing of the housing 10, so that appropriate materials can be selected according to the different functions of the support 28 and the first flange 121 and the second flange 133; by setting a gap between the support 28 and the first flange 121 and the revolving gear 22, the support 28 and the first flange 121 are prevented from affecting the rotation of the revolving gear 22.

[0068] In this embodiment, the first slewing support 26 is located inside the revolving gear 22 and spaced apart from the revolving frame 23. Placing the first slewing support 26 inside the revolving gear 22 provides a compact structure, high transmission efficiency, and suitability for high-speed and small-scale applications. The spaced-apart arrangement of the first slewing support 26 and the revolving frame 23 prevents contact friction between the first slewing support 26 and the revolving frame 23, which could affect the rotation of the revolving gear 22.

[0069] Optionally, the loading assembly 20 further includes a second slewing support 27, through which the planetary gears 24 are connected to the revolving frame 23. Using the second slewing support 27 to support the planetary gears 24 results in a compact structure, better utilization of installation space, better load-bearing capacity, and easier maintenance.

[0070] In this embodiment, the second slewing support 27 is located inside the planetary gear 24 and spaced apart from the auxiliary fixing mechanism 42. The second slewing support 27 is located inside the planetary gear 24 and spaced apart from the auxiliary fixing mechanism 42 to prevent contact friction between the second slewing support 27 and the auxiliary fixing mechanism 42, which could affect the rotation of the planetary gear 24.

[0071] See also Figures 5 to 7 Specifically, the first rotary support 26 includes a first pressure ring 261, a second pressure ring 262, and three rollers 263. The first pressure ring 261 is connected to the bearing wall 102 via a support member 28. The second pressure ring 262 is fixed to the first pressure ring 261 and forms a raceway with the first pressure ring 261 to accommodate the rollers 263. The rollers 263 roll in engagement with the revolving gear 22. The use of the first rotary support 26 with three rollers 263 provides a compact structure and good load-bearing capacity. It can simultaneously withstand axial force, radial force, and overturning moment, ensuring the stability and positioning accuracy of the substrate 41 during rotation.

[0072] In this embodiment, the three rollers 263 are respectively the first roller 263a, the second roller 263b and the third roller 263c. The first roller 263a and the second roller 263b are arranged at intervals and extend in the horizontal direction, and the third roller 263c extends in the vertical direction. The revolving gear 22 is located between the first roller 263a and the second roller 263b and the side is in rolling engagement with the third roller 263c.

[0073] The second roller 263b is located on the side of the revolving gear 22 close to the revolving frame 23, and the second roller 263b is spaced apart from the revolving frame 23; the first roller 263a is used to support the revolving gear 22 and has a load-bearing function, and the second roller 263b is used to prevent unbalanced loading. The first roller 263a and the second roller 263b can reduce the axial displacement of the revolving gear 22, and the third roller 263c is used to reduce the radial displacement of the revolving gear 22, so that it can operate stably under high-speed rotation.

[0074] Optionally, the surface of roller 263 is coated with a self-lubricating material. Optionally, the surfaces of first pressure ring 261 and second pressure ring 262 are both coated with a self-lubricating material. The surfaces of roller 263, first pressure ring 261, and second pressure ring 262 can be made of the same or different self-lubricating materials, including but not limited to modified polytetrafluoroethylene. By using a special self-lubricating material to support roller 263 and the pressure rings, excellent lubrication properties can be maintained even in high-temperature environments. Furthermore, the material eliminates particulate or chemical contamination of the film-forming process during operation, completely overcoming the problem of film contamination caused by friction-generated dust from commonly used solid lubricants (such as molybdenum disulfide and tungsten disulfide).

[0075] The self-lubricating material used for rollers 263 and raceways, or the special lubrication treatment applied to the contact surfaces between rollers 263 and raceways, prevents wear or adhesion issues that might otherwise arise when rollers 263, first pressure ring 261, and second pressure ring 262 are made of the same metal or are susceptible to cold welding. This provides excellent lubricity and wear resistance. Accordingly, the second slewing support 27 has the same structure as the first slewing support 26.

[0076] The following is the specific use process of the substrate carrier:

[0077] The vacuum processing source is set in the bottom shell 13, the middle main shell 12 is stacked on the bottom shell 13, the loading assembly 20 is at least partially set in the middle main shell 12, the substrate 41 is directly hoisted and fixed flatly on the loading assembly 20, and then the top shell 11 is covered on the middle main shell 12; the substrate 41 is fixed on the planetary gear 24, the driving assembly 30 is at least partially placed in the closed chamber, and the driving member 31 is used to drive the transmission gear 32 to rotate, the transmission gear 32 is engaged with the outside of the revolving gear 22 and then drives the revolving gear 22 to rotate, the rotation of the revolving gear 22 drives the revolving frame 23 to rotate, and drives the planetary gear 24 and the planetary acceleration gear 25 to revolve around the center of the revolving gear 22, and drives the planetary gear 24 to rotate around the center of the planetary gear 24 through the planetary acceleration gear 25.

[0078] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A substrate carrying device, characterized in that: The invention comprises a shell (10), a loading assembly (20) and a driving assembly (30), wherein a closed chamber is provided in the shell (10), the loading assembly (20) comprises a rotating structure (201) and a first rotary support (26) disposed in the closed chamber, the rotating structure (201) being connected to the inner wall of the closed chamber via the first rotary support (26), the rotating structure (201) being used to fix a substrate (41), and the driving assembly (30) being at least partially disposed in the closed chamber and being used to drive the rotating structure (201) to rotate so as to drive the substrate (41) to rotate.

2. The substrate carrying device according to claim 1, wherein: The inner cavity wall comprises a side wall (101) and a bearing wall (102) connected to the side wall (101), and the rotating structure (201) is connected to the bearing wall (102) via the first slewing support (26); and / or, a reinforcing rib (134) is convexly provided on the outer side of the shell (10) corresponding to the side wall (101), and the first end of the reinforcing rib (134) is connected to the outer side of the shell (10) corresponding to the bearing wall (102) and the second end is used for supporting on the ground.

3. The substrate carrying device according to claim 2, wherein: The extension direction of the bearing wall (102) is perpendicular to the extension direction of the side wall (101); and / or the cross-sectional area of ​​the first end of the reinforcing rib (134) is smaller than the cross-sectional area of ​​the second end of the reinforcing rib (134).

4. The substrate carrying device according to claim 2, wherein: At least two groups of the reinforcing ribs (134) are arranged at intervals around the outer circumference of the shell (10), each group includes two reinforcing ribs (134), and the two reinforcing ribs (134) in the same group are symmetrically arranged.

5. The substrate carrying device according to claim 2, wherein: The shell (10) comprises a bottom shell (13), an intermediate main shell (12) and a top shell (11); the intermediate main shell (12) is stacked on the bottom shell (13), and the top shell (11) is covered on the intermediate main shell (12), so that the top shell (11), the bottom shell (13) and the intermediate main shell (12) together enclose the closed chamber and constitute the side wall (101), and part of the intermediate main shell (12) and / or part of the bottom shell (13) serves as the bearing wall (102).

6. The substrate carrying device according to claim 5, characterized in that: The end of the intermediate main housing (12) close to the bottom housing (13) includes a first flange (121), and the end of the bottom housing (13) close to the intermediate main housing (12) includes a second flange (133); One side of the first flange (121) is overlapped and fixed to the second flange (133), and the other side serves as the bearing wall (102); or, the first flange (121) and the first slewing support (26) are both fixed to the second flange (133), and part of the second flange (133) serves as the bearing wall (102).

7. The substrate carrying device according to claim 5, wherein: The top shell (11) gradually increases in diameter toward the middle main shell (12); and / or the bottom shell (13) has a first end close to the middle main shell (12) and a second end away from the middle main shell (12), and the diameter of the first end of the bottom shell (13) is larger than the diameter of the second end.

8. The substrate carrying device according to claim 1, wherein: The loading assembly (20) further includes a fixed gear (21) fixed to the housing (10); the rotating structure (201) includes a revolving gear (22) and a revolving frame (23) fixed to the revolving gear (22); the revolving gear (22) is connected to the inner cavity wall via the first rotary support (26); a planetary gear (24) and a planetary acceleration gear (25) are provided on the revolving frame (23); the planetary gear (24) is used to fix the substrate (41); and the planetary gear (24) is meshed with the fixed gear (21) via the planetary acceleration gear (25); The driving assembly (30) is used to drive the revolving gear (22) to rotate. The rotation of the revolving gear (22) drives the revolving frame (23) to rotate, and drives the planetary gear (24) and the planetary acceleration gear (25) to revolve around the center of the revolving gear (22), and drives the planetary gear (24) to rotate around the center of the planetary gear (24) through the planetary acceleration gear (25).

9. The substrate carrying device according to claim 8, wherein: The loading assembly (20) further includes a second slewing support (27), and the planetary gear (24) is connected to the revolution frame (23) via the second slewing support (27).

10. The substrate carrying device according to any one of claims 1 to 9, characterized in that: The loading assembly (20) further includes a support member (28), and the first rotary support member (26) is fixed to the inner cavity wall via the support member (28).

Images