Heating disc lifting base and thin film deposition equipment

Abstract

The utility model discloses a heating plate lifting base and thin film deposition equipment. The heating plate lifting base comprises a base, the adjusting block is arranged on the base, and a plurality of first adjusting holes are formed in the periphery of the upper side of the adjusting block; the mounting seat is arranged on the adjusting block and is used for mounting the heating disc; the first adjusting parts are arranged on the periphery of the mounting base and matched with the first adjusting holes, and the first adjusting parts are used for moving in the height direction of the first adjusting holes so as to drive the periphery of the mounting base to adjust the levelness of the periphery of the mounting base. According to the heating plate lifting base, the horizontal state of the heating plate can be more reliably adjusted, the horizontal adjustment accuracy is high, and adjustment is more convenient.

Description

TECHNICAL FIELD

[0001] The utility model relates to thin film deposition technical field especially, relate to a kind of heating disc lifting base and thin film deposition equipment. BACKGROUND

[0002] In the whole semiconductor manufacturing process, atomic layer deposition (ALD) technology becomes important tool in today's semiconductor manufacturing and nanotechnology field. The heating disc motion lifting assembly is a structure used to drive the wafer heating disc to move up and down in the ALD equipment. In order to ensure that the wafer can be uniformly heated during heating process, the wafer heating disc needs to be kept in horizontal centering state in the semiconductor reaction chamber, so as to improve the uniformity and quality of thin film deposition. The heating disc lifting base, as a structure directly connected to the heating disc in the heating disc motion lifting assembly, needs to be able to adjust the horizontal centering state of the heating disc. However, the current heating disc lifting base of ALD equipment locks the base of wafer heating disc by locking it up and down with two bolts. The thread gap of the bolt is unstable after locking, which leads to the phenomenon of tilting and shifting of the heating disc, and the reliability of horizontal state adjustment is poor. SUMMARY

[0003] The utility model embodiment provides a kind of heating disc lifting base and thin film deposition equipment, solve the problem of poor reliability of heating disc horizontal state adjustment by bolt up and down locking mode.

[0004] In the first aspect, the utility model embodiment provides a kind of heating disc lifting base, it includes:

[0005] Base;

[0006] Adjusting block, be located on the base, the four around upper side of the adjusting block is equipped with multiple first adjusting holes;

[0007] Mounting seat, be located on the adjusting block for installing heating disc;

[0008] First adjusting part, multiple first adjusting parts are respectively located on the four around mounting seat and cooperate with the first adjusting hole, wherein the first adjusting part is used to move along the height direction of the first adjusting hole to drive the four around mounting seat to adjust its level.

[0009] In the heating disc lifting base provided by the utility model embodiment, the first adjusting part is bolt, the first adjusting hole is screw hole, the four around mounting seat is equipped with multiple first screw holes through its upper and lower sides, the first screw hole is vertically overlapped with the first adjusting hole, and the first adjusting part is arranged in the first screw hole and the first adjusting hole.

[0010] In the heating plate lifting base provided in an embodiment of the present invention, a vertically extending connection port is provided on the base, and the connection port is used to connect the heating plate, and a plurality of the first screw holes are arranged around the circumference of the connection port.

[0011] In the heating plate lifting base provided in an embodiment of the present invention, a spherical convex portion is convexly provided on the bottom of the mounting seat, a spherical groove is concavely provided on the upper side of the adjustment block, and a plurality of the first adjustment holes are arranged around the circumference of the spherical groove, and the spherical convex portion is accommodated in the spherical groove and can rotate relative to the spherical groove.

[0012] In the heating plate lifting base provided in the embodiment of the present invention, three first adjustment holes are provided, and the distances between the axis centers of the three first adjustment holes are equal.

[0013] In the heating plate lifting base provided in an embodiment of the present invention, the heating plate lifting base also includes a second adjusting member, and the bottom of the adjusting block extends downward to provide a plurality of support parts distributed around the four sides of the base, and the second adjusting member is provided on the support part and cooperates with the four sides of the base, wherein the second adjusting member is used to drive the support part to approach or move away from the four sides of the base in the horizontal direction to adjust the horizontal position of the adjusting block.

[0014] In the heating plate lifting base provided in an embodiment of the present invention, the second adjusting member is a bolt, and the supporting portion is provided with a second screw hole extending laterally toward the base. The second adjusting member is passed through the second screw hole and is opposite to the four sides of the base in the horizontal direction.

[0015] In the heating plate lifting base provided in an embodiment of the present invention, the base is provided with a plurality of abutment surfaces in the horizontal direction, each of the support portions is spaced apart from each of the abutment surfaces, and the second adjustment member is provided perpendicular to the abutment surfaces.

[0016] In the heating plate lifting base provided by the embodiment of the present invention, the plurality of support portions are distributed around the base at equal intervals.

[0017] In a second aspect, an embodiment of the present invention provides a thin film deposition device, which includes the heating plate lifting base described in the first aspect.

[0018] The utility model discloses a heating disc lifting base and thin film deposition equipment, the heating disc lifting base includes base, adjusting block, mounting seat and first adjusting piece, the adjusting block is located on the base, and the four all around of adjusting block upper side is equipped with a plurality of first adjusting hole, the mounting seat is located on the adjusting block for installing heating disc, a plurality of first adjusting piece is equipped respectively four all around of mounting seat with first adjusting hole cooperation, wherein, first adjusting piece is used for moving along the height direction of first adjusting hole to drive four all around of mounting seat and adjust its levelness. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical scheme of the utility model embodiment, the following will be needed to use the drawing in the embodiment description briefly introduced, obviously, the following description in the drawing is some embodiments of the utility model, for those skilled in the art, under the premise of not paying creative labor, can also obtain other drawings according to these drawings.

[0020] Figure 1 The cross-sectional view of the heating disc lifting base provided by the utility model embodiment is provided.

[0021] Figure 2 The cross-sectional view of the heating disc lifting base provided by the utility model embodiment is provided.

[0022] Figure 3 The cross-sectional view of the heating disc lifting base provided by the utility model embodiment is provided.

[0023] Figure 4 The enlarged view of A of Figure 3

[0024] Figure 5 The front view of the heating disc lifting base provided by the utility model embodiment is provided in an application scenario.

[0025] Figure 6 The perspective view of the heating disc lifting base provided by the utility model embodiment is provided in an application scenario.

[0026] Figure 7 The plan view of the heating disc lifting base provided by the utility model embodiment is provided in an application scenario.

[0027] Figure 8 ​A three-dimensional diagram of a heating plate lifting base in an application scenario provided by an embodiment of the present utility model;

[0028] Figure 9 for Figure 8 A magnified view of part A;

[0029] Figure 10 for Figure 8 A magnified view of part B;

[0030] The reference numerals in the figures are:

[0031] 100. Heating plate lifting base; 10. Base; 11. Abutment surface; 20. Mounting seat; 201. First screw hole; 202. Connecting port; 21. Spherical convex portion; 30. Adjustment block; 301. First adjustment hole; 31. Spherical groove; 32. Support portion; 302. Second screw hole; 40. First adjustment member; 50. Second adjustment member; 200. Lifting module; 300. Heating plate; 400. Bellows. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0033] Directional terms used in this disclosure, such as "upper," "lower," "front," "rear," "left," "right," "inner," "outer," and "side," refer only to directions in the accompanying drawings. Therefore, these directional terms are intended to illustrate and facilitate understanding of this disclosure and are not intended to limit this disclosure. Furthermore, in the accompanying drawings, similar or identical structures are denoted by the same reference numerals.

[0034] Reference Figures 1 to 8 , which shows an embodiment of the heating plate lifting base 100 provided by the present invention. The structure and working principle of the heating plate lifting base 100 are described in detail below in conjunction with the drawings in the specification. The heating plate lifting base 100 includes a base 10, an adjustment block 30, a mounting seat 20 and a first adjustment member 40; the adjustment block 30 is arranged on the base 10, and a plurality of first adjustment holes 301 are arranged around the upper side of the adjustment block 30; the mounting seat 20 is arranged on the adjustment block 30 for mounting the heating plate 300; a plurality of first adjustment members 40 are respectively arranged around the mounting seat 20 and cooperate with the first adjustment holes 301, wherein the first adjustment member 40 is used to move along the height direction of the first adjustment hole 301 to drive the mounting seat 20 to adjust its levelness.

[0035] In a specific implementation, the heating plate lifting base 100 is mainly used in thin film deposition equipment and is used to connect the lifting module 200 of the thin film deposition equipment. The heating plate lifting base 100 includes a base 10, an adjustment block 30, a mounting base 20, and a first adjustment member 40. The base 10 is directly connected to the lifting module 200 of the thin film deposition equipment, and the lifting module 200 of the thin film deposition equipment can directly drive the base 10 to move up and down. The adjustment block 30 is entirely arranged on the base 10 and can move horizontally relative to the base 10. A plurality of first adjustment holes 301 are distributed around the upper side of the adjustment block 30. The first adjustment holes 301 have a certain depth. The specific number of the first adjustment holes 301 is not limited and can be designed to be three or more. For example, when three first adjustment holes 301 are designed, the three first adjustment holes 301 can form a triangular distribution structure on the upper side of the adjustment block 30. The mounting base 20 is entirely arranged on the base 10 and is mainly used to mount the heating plate 300. The mounting base 20 is provided with a corresponding connection structure to connect and fix the heating plate 300. There are multiple first adjustment members 40, and the number of first adjustment members 40 corresponds to the number of first adjustment holes 301. Multiple first adjustment members 40 are respectively arranged around the mounting base 20 and cooperate with the first adjustment holes 301. The first adjustment members 40 and the first adjustment holes 301 can be matched by threaded matching or other matching methods, which are not limited here. When the first adjustment members 40 cooperate with the first adjustment holes 301, the first adjustment members 40 move along the height direction of the first adjustment holes. The movement of the first adjustment members 40 will cause the height of the corresponding position of the mounting base 20 to change. Each first adjustment member 40 corresponds to a first adjustment hole 301. By each first adjustment member 40 moving along the height direction of the corresponding first adjustment hole 301, the height of the surrounding position of the mounting base 20 will change, thereby adjusting the horizontality of the surrounding area of ​​the mounting base 20. The heating plate 300 is mounted on the mounting base, and the levelness of the mounting base 20 corresponds to the levelness of the heating plate 300. By adjusting the levelness of the surrounding areas of the mounting base 20, the levelness of the heating plate 300 can be adjusted, and the heating plate 300 can be easily adjusted to a horizontal state. In actual application, when the heating plate 300 needs to be adjusted to a horizontal state, the level of the heating plate 300 is observed, and the distance the first adjusting member 40 moves along the height direction of the first adjusting hole 301 is adjusted according to the vertical deviation of the heating plate 300. When the heating plate 300 deviates downward in the direction where a first adjusting member 40 is located, the first adjusting member 40 is adjusted to move upward along the height direction of the first adjusting hole 301, and the remaining first adjusting members 40 are also adjusted to move downward along the height direction of the first adjusting hole 301. By observing the overall horizontal deviation of the heating plate 300 and adjusting the first adjusting members 40, the heating plate 300 can be easily and accurately adjusted to a horizontal state.

[0036] The heating plate lifting base of this embodiment sets the adjustment block on the base, and sets the mounting base used to connect the heating plate on the adjustment block. First adjustment holes are set around the upper side of the adjustment block, and multiple first adjustment parts are respectively set around the mounting base to cooperate with the first adjustment holes. The first adjustment parts are moved along the height direction of the first adjustment holes to drive the four sides of the mounting base to adjust its level, so the adjustment accuracy is higher and the reliability is better.

[0037] In one embodiment, referring to Figure 4 The first adjusting member 40 is a bolt, the first adjusting hole 301 is a screw hole, and the mounting base 20 is provided with a plurality of first screw holes 201 passing through the upper and lower sides thereof. The first screw holes 201 are vertically overlapped and aligned with the first adjusting hole 301, and the first adjusting member 40 is passed through the first screw holes 201 and the first adjusting hole 301. In the specific implementation, the first adjusting member 40 and the first adjusting hole 301 are threadedly matched. The first adjusting member 40 is designed as a bolt with a certain length, and the first adjusting hole is designed as a screw hole with a certain depth. A plurality of first screw holes 201 are arranged around the mounting base 20. The first screw holes 201 pass through the upper and lower sides of the mounting base 20. The number of first screw holes 201 corresponds to the number of first adjustment holes 301 one by one, and each first screw hole 201 on the mounting base 20 is distributed the same as each first adjustment hole 301 around the adjusting block 30. Each first screw hole 201 on the mounting base 20 and each first adjustment hole 301 around the adjusting block 30 maintain overlapping alignment in the vertical direction, and the first adjusting member 40 as a whole is passed through the first screw hole 201 and the first adjustment hole 301 and is threadedly connected to the two. During assembly, the first adjusting member 40 is first screwed into the first screw hole 201 on the mounting base 20. After the first adjusting member 40 passes through the first screw hole 201, it is screwed into the first adjusting hole 301 on the adjusting block 30 to complete the threaded connection. In actual application, when adjusting the balance state of the heating plate 300, each first adjusting member 40 is first screwed into each first screw hole 201 around the mounting base 20, so that the first adjusting member 40 extends a certain length from the first screw hole 201. By observing the horizontality of the upper heating plate 300, the heating plate 300 is kept horizontal. Then, all the first adjusting members 40 are rotated so that all the first adjusting members 40 are screwed into the first adjusting holes 301 on the adjusting block 30. In this way, the heating plate 300 always remains horizontal until all the first adjusting members 40 are tightened. As a result, the heating plate 300 can be easily and accurately adjusted to a horizontal state as a whole.

[0038] Further, refer to Figures 1 to 4The base 10 is provided with a vertically extending connecting port 202, the connecting port 202 is used for connecting the heating disc 300, and a plurality of first screw holes 201 are arranged around the circumference of the connecting port 202. In the specific implementation, the vertically extending connecting port 202 is arranged on the base 10, and the connecting port 202 is mainly used for connecting the heating disc 300. The bottom end of the heating disc 300 can be inserted into the connecting port 202 to complete the connection. After the heating disc 300 is connected to the connecting port 202, the installation seat 20 is installed to form an integral whole. All the first screw holes 201 are arranged around the circumference of the connecting port 202, and all the first screw holes 201 are distributed at intervals on the circumference of the connecting port 202. The connecting port 202 is located in the area surrounded by all the first screw holes 201. After the connecting disc is connected to the connecting port 202, the first screw holes 201 surround the bottom of the heating disc 300, so that the center of gravity of the heating disc 300 is closer to the horizontal adjustment center. During the horizontal adjustment process, the swing range of the heating disc 300 is small, and the heating disc 300 can be more easily adjusted to a horizontal state.

[0039] In an embodiment, with reference to Figures 1 to 4 The bottom of the installation seat 20 is provided with a spherical convex surface portion 21, the upper side of the adjusting block 30 is recessed with a spherical groove 31, a plurality of first adjusting holes 301 are arranged around the circumference of the spherical groove 31, and the spherical convex surface portion 21 is accommodated in the spherical groove 31 and can rotate relative to the spherical groove 31. In the specific implementation, the spherical convex surface portion 21 is protruded on the bottom of the installation seat 20. The outer side wall of the spherical convex surface portion 21 is a spherical curved surface and has a certain smoothness. The upper side of the adjusting block 30 is recessed with the spherical groove 31, the groove wall of the spherical groove 31 is a spherical curved surface, all the first adjusting holes 301 are arranged around the circumference of the spherical groove 31, and the spherical convex surface portion 21 is accommodated in the spherical groove 31 as a whole. The spherical curved surface on the outer side of the spherical convex surface portion 21 is matched with the spherical curved surface of the groove wall of the spherical groove 31. The outer side wall of the spherical convex surface portion 21 can be attached to the groove wall of the spherical groove 31. After the spherical convex surface portion 21 is accommodated in the spherical groove 31, the spherical convex surface portion 21 can rotate relative to the spherical groove 31. In actual application, when the heating disc 300 is adjusted to a balanced state, the installation seat 20 as a whole can rotate in any direction relative to the adjusting block 30. The position adjustment of the installation seat 20 is more relaxed, and the leveling of the heating disc 300 is more convenient.

[0040] In one embodiment, there are three first adjustment holes 301, and the distances between the axes of the three first adjustment holes 301 are equal. In a specific implementation, the number of first adjustment holes 301 is set to three, and the distances between the axes of the three first adjustment holes 301 are equal, that is, among the three first adjustment holes 301, the distances from the axis of any one first adjustment hole 301 to the axes of the other two first adjustment holes 301 remain equal, and the axis lines connecting the three first axis holes form an equilateral triangle. The number of first adjustment members 40 is set to three according to the number of first adjustment holes 301. In actual application, the three first adjustment members 40 are respectively provided at three locations around the mounting base 20 and are threadedly connected to the three screw holes. Since the distances between the axes of the three first adjustment holes 301 are equal, a position adjustment in the form of an equilateral triangle is formed. Tightening or unscrewing each first adjustment member 40 in the first adjustment hole 301 can cause the heating plate 300 to produce the same offset, making adjustment more precise and convenient.

[0041] In one embodiment, referring to Figures 1 to 8The heating plate lifting base 100 further includes a second adjustment member 50. The bottom of the adjustment block 30 extends downwardly and is provided with a plurality of support portions 32 distributed around the four sides of the base 10. The second adjustment member 50 is provided on the support portion 32 and cooperates with the four sides of the base 10. The second adjustment member 50 is used to drive the support portion to move horizontally closer to or away from the four sides of the base 10 to adjust the horizontal position of the adjustment block 30. In a specific implementation, the heating plate lifting base 100 further includes a second adjustment member 50. The bottom of the adjustment block 30 extends downwardly and is provided with a plurality of support portions 32. The plurality of support portions 32 are distributed around the four sides of the base 10 in the horizontal direction. The base 10 is located as a whole between the plurality of support portions 32. The specific number of support portions 32 can be set to three or more. Each second adjusting member 50 is provided on each supporting portion 32, and the second adjusting member 50 cooperates with the four sides of the base 10 in the horizontal direction respectively. The second adjusting member 50 drives the supporting portion 32 to approach or move away from the four sides of the base 10 in the horizontal direction by cooperating with the four sides of the base 10, so that the adjusting block 30 as a whole moves and changes its position relative to the base 10, thereby adjusting the horizontal position of the adjusting block 30. The second adjusting member 50 can cooperate with the four sides of the base 10 in the horizontal direction by extending into and pressing, or by other cooperation methods. In actual application, each second adjusting member 50 can drive each support portion 32 to approach or move away from a corresponding side of the four sides of the base 10. Multiple support portions 32 surround the four sides of the base 10. The second adjusting member 50 on one support portion 32 forms an adjustment in one direction, which can make the adjustment block 30 move in one direction. The second adjusting members 50 on all support portions 32 correspondingly form adjustments in multiple different directions. Through the cooperation of the second adjusting members 50 on multiple support portions 32 and the four sides of the base 10, the adjustment block 30 can be adjusted to any horizontal position, and the mounting base 20 is entirely arranged on the adjustment block 30. The heating plate 300 is connected to the mounting base 20. The heating plate 300 and the mounting base 20 will move with the movement of the adjustment block 30. Therefore, by adjusting the second adjusting member 50 on each support portion 32, the centering adjustment of the heating plate can be achieved. The adjustment is very convenient and the centering accuracy is high.

[0042] Further, refer to Figures 1 to 8The second adjusting member 50 is a bolt. The support portion 32 is provided with a second screw hole 302 extending laterally toward the base 10. The second adjusting member 50 is inserted into the second screw hole 302 and faces the four sides of the base 10. In a specific embodiment, the second adjusting member 50 is designed as a bolt. The support portion 32 is provided with a second screw hole 302 extending laterally toward the base 10. The second screw hole 302 laterally penetrates the inner and outer sides of the support portion 32. The number of second adjusting members 50 corresponds to the number of second screw holes 302. Each second adjusting member 50 is inserted into the second screw hole 302 on each support portion 32 and is threadedly connected thereto. The second adjusting member 50 is threadedly engaged with the second screw hole 302. The rear end of each second adjusting member 50 passing through the second screw hole 302 faces the corresponding side edge of the four sides of the base 10. The rear ends of all the second adjusting members 50 passing through the corresponding second screw holes 302 respectively face the four sides of the base 10. In actual application, the second adjusting member 50 is threadedly engaged with the second screw hole 302. By rotating the second adjusting member 50, the second adjusting member 50 can be advanced in the second screw hole 302, so that the second adjusting member 50 is extended toward the side of the base 10 relative to the support part 32. After the second adjusting member 50 is extended to a certain length, the end of the second adjusting member 50 will abut against the side of the base 10 in the horizontal direction. When the end of the second adjusting member 50 abuts against the side of the base 10 in the horizontal direction, the second adjusting member 50 is continued to be rotated and extended. Through the interaction of forces, the adjustment block 30 will move in the direction opposite to the direction in which the second adjusting member 50 is extended, thereby realizing the adjustment of the horizontal position of the adjustment block 30. In actual application, when adjusting the centering of the heating plate 300, by observing the centering of the heating plate 300 connected to the mounting seat 20, the corresponding second adjusting member 50 on the support part 32 is rotated, so that the second adjusting member 50 provided on all the supporting parts 32 extends toward the four sides of the base 10 and presses, so that the adjusting block 30 moves horizontally with the mounting seat 20 and the heating plate 300 until the heating plate 300 is adjusted to be centered. All the second adjusting members 50 are respectively abutted against the four sides of the base 10, and the positions of the adjusting block 30 and the mounting seat 20 remain fixed, so that the heating plate 300 always remains in the centered state. The entire centering adjustment is completed, and the centering adjustment of the heating plate 300 is very simple, convenient, accurate and reliable.

[0043] Further, refer to Figure 9 and Figure 10The base 10 is provided with a plurality of abutment surfaces 11 in the horizontal direction, each of the support portions 32 and each of the abutment surfaces 11 is spaced apart from each other, and the second adjustment member 50 is arranged perpendicular to the abutment surfaces 11. In a specific embodiment, the base 10 is provided with a plurality of abutment surfaces 11 in the horizontal direction, and the abutment surfaces 11 are planes on the outside of the base 10. Each of the support portions 32 and each of the abutment surfaces 11 is spaced apart from each other on the horizontal plane by a certain distance, and one support portion 32 corresponds to one abutment surface 11. The second adjustment member 50 is a bolt structure, and the second adjustment member 50 is arranged perpendicular to the abutment surfaces 11 as a whole, that is, the second adjustment member 50 remains perpendicular to the abutment surfaces 11 after passing through the second screw hole 302 on the support portion 32. When actually adjusting the centering of the heating plate 300, the second adjustment member 50 provided on each support portion 32 can be vertically abutted against a corresponding abutment surface 11. By rotating the second adjustment member 50, the second adjustment member 50 can be vertically pressed toward the abutment surface 11. The movement of the adjustment block 30 will not deviate, the centering adjustment can be more precise, and the state of the fixed heating plate 300 can be more stable.

[0044] Furthermore, the plurality of support portions 32 are evenly spaced around the base 10. Specifically, the support portions 32 are designed to be evenly spaced around the base 10, and the distance between two adjacent support portions 32 is equal, so that each second adjustment member 50 extends toward the base 10 by the same length, and the heating plate 300 is displaced by the same distance in the horizontal direction, making adjustment more precise and convenient.

[0045] Preferably, three of each of the support portions 32 and the abutment surfaces 11 are provided. In a specific embodiment, three of each of the support portions 32 and the abutment surfaces 11 are provided. The three support portions 32 are provided at the bottom of the adjustment block 30 around the base 10, and the three support portions 32 are equidistant from one another, forming an equilateral triangle. The three abutment surfaces 11 in the horizontal direction of the base 10 correspond one-to-one with the three support portions 32, respectively. The three second adjustment members 50 pass through the second screw holes 302 on the three support portions 32, respectively, and can vertically abut against the three abutment surfaces 11, thereby forming a three-directional centering adjustment. This makes actual adjustment simpler and provides high centering accuracy.

[0046] In one embodiment, a thin film deposition device is provided, which can be referred to Figures 5 to 8The thin film deposition device includes the heating plate lifting base 100 described in the above embodiment. The thin film deposition device is mainly an atomic layer deposition (ALD) type device. The thin film deposition device also includes components such as a lifting module 200, a heating plate 300, a bellows 400, and a semiconductor reaction chamber. The heating plate lifting base 100 is mainly connected to the lifting module 200. The heating plate 300 is connected to the mounting seat 20 of the heating plate lifting base 100 and is located in the semiconductor reaction chamber. The heating plate 300 is used to support the wafer to be processed. The bellows 40 0 The flange at the end is connected to the mounting base 20 of the heating plate lifting base 100. The lifting module 200 can drive the heating plate lifting base 100 to move up and down, thereby realizing the lifting and moving of the heating plate 300 in the semiconductor reaction chamber. The heating plate lifting base 100 can realize the horizontal centering state adjustment of the heating plate 300 in the semiconductor reaction chamber. Since the previous specification has made a detailed introduction to the specific structure and working principle of the heating plate lifting base 100, it will not be repeated here for the sake of brevity.

[0047] The thin film deposition equipment in this embodiment adopts the heating plate lifting base provided by the present invention, so the horizontal centering adjustment of the heating plate becomes more accurate and convenient.

[0048] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in the present invention, and such modifications or substitutions are intended to be within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be subject to the scope of protection of the claims.

Claims

1. A heating plate lifting base, characterized in that: include: base; An adjustment block is provided on the base, and a plurality of first adjustment holes are provided around the upper side of the adjustment block; A mounting seat, provided on the adjusting block for mounting a heating plate; A first adjusting member, wherein a plurality of the first adjusting members are respectively arranged around the mounting seat and cooperate with the first adjusting hole, wherein the first adjusting member is used to move along the height direction of the first adjusting hole to drive the four sides of the mounting seat to adjust its levelness.

2. The heating plate lifting base according to claim 1, characterized in that: The first adjusting member is a bolt, the first adjusting hole is a screw hole, and a plurality of first screw holes are provided around the mounting base, passing through the upper and lower sides thereof. The first screw holes are vertically overlapped and aligned with the first adjusting hole, and the first adjusting member is passed through the first screw holes and the first adjusting hole.

3. The heating plate lifting base according to claim 2, characterized in that: The base is provided with a vertically extending connection port, which is used to connect the heating plate, and a plurality of first screw holes are arranged around the circumference of the connection port.

4. The heating plate lifting base according to any one of claims 1 to 3, characterized in that: A spherical convex portion is convexly provided on the bottom of the mounting seat, a spherical groove is concavely provided on the upper side of the adjustment block, a plurality of the first adjustment holes are arranged around the circumference of the spherical groove, and the spherical convex portion is accommodated in the spherical groove and is rotatable relative to the spherical groove.

5. The heating plate lifting base according to any one of claims 1 to 3, characterized in that: There are three first adjustment holes, and the distances between the axes of the three first adjustment holes are equal.

6. The heating plate lifting base according to any one of claims 1 to 3, characterized in that: The heating plate lifting base also includes a second adjusting member, and the bottom of the adjusting block extends downward to provide a plurality of supporting parts distributed around the four sides of the base. The second adjusting member is provided on the supporting parts and cooperates with the four sides of the base, wherein the second adjusting member is used to drive the supporting parts to approach or move away from the four sides of the base in the horizontal direction to adjust the horizontal position of the adjusting block.

7. The heating plate lifting base according to claim 6, characterized in that: The second adjusting member is a bolt. The supporting portion is provided with a second screw hole extending laterally toward the base. The second adjusting member is passed through the second screw hole and is opposite to the four sides of the base in the horizontal direction.

8. The heating plate lifting base according to claim 7, characterized in that: The base is provided with a plurality of abutment surfaces in a horizontal direction, each of the support portions is spaced apart from each of the abutment surfaces, and the second adjusting member is arranged perpendicular to the abutment surfaces.

9. The heating plate lifting base according to claim 7, characterized in that: The plurality of support portions are distributed around the base at equal intervals.

10. A thin film deposition device, characterized in that: It comprises the heating plate lifting base according to any one of claims 1 to 9.

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