Tubular structure and tubular equipment

Abstract

The utility model relates to the technical field of battery piece preparation, in particular to a tubular structure and tubular equipment. In the tubular structure, a furnace door is arranged at a tube opening of the furnace tube and is connected with the furnace tube to seal and cover the furnace chamber; the furnace door comprises a tray and a gas guide assembly, the tray is arranged on the side, facing the furnace cavity, of the gas guide assembly, and the tray is provided with a tray through hole; an inlet of the air guide assembly is communicated with the tray through hole, and an outlet of the air guide assembly is used for being communicated with the outside. And gas in the furnace chamber sequentially passes through the tray through hole in the tray and the inlet of the gas guide assembly and is discharged from the outlet of the gas guide assembly. The tray is used for arranging the in-furnace boat and is perpendicular to the first direction Z, the tray is located in the middle of the interior of the furnace cavity, gas in the furnace cavity firstly passes through the tray through hole formed in the tray, the gas in the furnace cavity can be relatively uniformly discharged from the interior of the furnace cavity, the gas flow uniformity is good when the gas in the furnace cavity flows out, and the quality of a workpiece to be machined is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to battery piece preparation technical field, especially a kind of tubular structure and tubular equipment. BACKGROUND

[0002] In the production process of silicon wafer, silicon wafer needs to pass through diffusion process or chemical vapor deposition process and other processes.

[0003] In the process, silicon wafer is placed in tubular structure, source-carrying gas is introduced into tubular structure, and elements in source-carrying gas are doped or deposited film on silicon wafer. Conventional tubular structure has the defect of poor airflow uniformity when gas flows out, resulting in poor quality of silicon wafer. UTILITY MODEL CONTENT

[0004] Therefore, the utility model provides a kind of tubular structure and tubular equipment, to solve the technical problems that the airflow uniformity of conventional tubular structure is poor when gas flows out, resulting in poor quality of silicon wafer.

[0005] To achieve the above-mentioned purpose, the technical scheme of the utility model is as follows:

[0006] In the first aspect, the utility model embodiment provides a tubular structure, which includes a furnace tube and a furnace door. The furnace tube is provided with a furnace cavity. The furnace door is arranged at the pipe opening of the furnace tube and connected with the furnace tube to cover the furnace cavity. The furnace door includes a tray and a gas guide assembly. The tray is arranged on the side of the gas guide assembly facing the furnace cavity. The tray is provided with a tray through hole. The inlet of the gas guide assembly is in communication with the tray through hole. The outlet of the gas guide assembly is used to communicate with the outside.

[0007] Optionally, the surface of the tray facing the furnace cavity is provided with a plurality of mounting areas. Each mounting area is arranged separately from other mounting areas. The tray through hole is arranged between two adjacent mounting areas. The mounting area is used to arrange a furnace boat.

[0008] Optionally, the surface of the tray facing the furnace cavity is provided with a plurality of flow guide grooves. Each flow guide groove is in communication with at least one tray through hole. The plurality of flow guide grooves separate the surface of the tray facing the furnace cavity into a plurality of mounting areas.

[0009] Optionally, the tray through hole includes a central tray through hole. The central tray through hole is arranged in the middle of the tray and perpendicular to the first direction.

[0010] Optionally, the surface of the tray facing the furnace cavity is provided with a plurality of flow guide grooves. The plurality of flow guide grooves are respectively in communication with the central tray through hole. The plurality of flow guide grooves extend radially to the outer periphery of the tray with the central tray through hole as the center.

[0011] Optionally, the tray through holes further comprise a plurality of peripheral tray through holes, the plurality of peripheral tray through holes being arranged at intervals around the axis of the furnace tube.

[0012] Optionally, the peripheral tray through holes are arranged at the groove bottom of the flow guide groove; and / or, the peripheral tray through holes are arranged at intervals with the flow guide groove; and / or, the peripheral tray through holes are adjacent to the flow guide groove, and the peripheral tray through holes are in communication with the flow guide groove.

[0013] Optionally, the air guide assembly comprises,

[0014] an air guide cover and a furnace door plate, the air guide cover being buckled on the side of the furnace door plate facing the furnace cavity, the air guide cover and the furnace door plate forming the air guide channel, the air guide cover being arranged at the inlet of the air guide assembly and the outlet of the air guide assembly, and the air guide channel being in communication with the inlet of the air guide assembly and the outlet of the air guide assembly respectively;

[0015] the tray being arranged on the side of the air guide cover facing the furnace cavity.

[0016] Optionally, the inlet of the air guide assembly is arranged on the side of the air guide cover facing the tray;

[0017] the tray through holes and the inlets of the air guide assembly are each at least one, and each of the tray through holes is arranged in correspondence with one of the inlets of the air guide assembly.

[0018] Optionally, in the first direction, the periphery of the air guide cover is arranged at the outlet of the air guide assembly;

[0019] the air guide assembly further comprises a flange, the flange being arranged around the axis of the furnace tube, and the flange connecting the furnace door plate and the furnace tube;

[0020] the flange is arranged at a flange air outlet, the flange air outlet being arranged in correspondence with and in communication with the outlet of the air guide assembly, and the gas discharged from the outlet of the air guide assembly being transported to the outside through the flange air outlet.

[0021] Optionally, a cooling channel is further arranged in the flange, and the cooling channel is adapted to pass through a cooling medium.

[0022] Optionally, the furnace door further comprises a heating element, the heating element being arranged in sequence with the tray in the first direction, the heating element being arranged between the tray and the air guide cover, and the heating element being used for heating the furnace cavity.

[0023] Optionally, the furnace door further comprises a support plate, one side of the support plate being connected with the tray in the first direction, and the other side of the support plate being connected with the heating element.

[0024] Optionally, the furnace door further includes a plurality of heat insulation panels, and the plurality of heat insulation panels are arranged in the air guide hood at intervals along the first direction.

[0025] Optionally, the oven door further comprises a support column, one end of the support column is connected to the tray, and the other end of the support column is connected to the oven door panel.

[0026] In a second aspect, an embodiment of the present invention further provides a tubular device, which includes the tubular structure as described above.

[0027] The utility model discloses a tubular structure in which the gas in the furnace cavity sequentially passes through the tray through-holes on the tray, the inlet of the gas guide assembly, and is discharged from the outlet of the gas guide assembly. The tray is used to set the furnace boat, perpendicular to a first direction Z, and the tray is located in the middle of the furnace cavity. The gas in the furnace cavity first passes through the tray through-holes provided on the tray, and the gas in the furnace cavity can be discharged from the furnace cavity relatively evenly. The gas in the furnace cavity has good airflow uniformity when it flows out, which helps to improve the quality of the workpiece to be processed.

[0028] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the following briefly introduces the drawings required for describing the embodiments.

[0030] Figure 1 A schematic structural diagram of a perspective view of a tubular structure according to an embodiment of the present invention;

[0031] Figure 2 for Figure 1 The structural diagram of the enlarged view of part A in the middle;

[0032] Figure 3 This is a structural diagram of a perspective view of the furnace tube, the first air inlet pipe, and the second air inlet pipe after assembly according to an embodiment of the present invention;

[0033] Figure 4 This is a schematic diagram of a structure in which the outer tube is transparent and the inner tube is not transparent according to an embodiment of the present invention;

[0034] Figure 5 This is a partial structural diagram of the furnace door according to an embodiment of the present utility model;

[0035] Figure 6This is a perspective view of the structure of the furnace tube in use according to another embodiment of the present invention. Figure 2 ;

[0036] Figure 7 This is a structural schematic diagram of a tray according to another embodiment of the present invention.

[0037] Figure 8 This is a structural diagram of a heating furnace door according to an embodiment of the present invention;

[0038] Figure 9 This is a schematic diagram of the layout of the furnace pipe, the first air inlet pipe, and the second air inlet pipe according to an embodiment of the present utility model;

[0039] Figure 10 This is a schematic structural diagram of the second air intake pipe according to an embodiment of the present utility model;

[0040] Figure 11 This is a structural schematic diagram of the inner tube according to an embodiment of the present utility model.

[0041] Description of reference numerals:

[0042] 10. Furnace tube; 11. Furnace cavity; 124. Outlet of gas guide assembly; 13. Outer tube; 14. Inner tube; 141. Inner tube air inlet; 15. Interlayer cavity;

[0043] 21. Tray; 211. Diversion trough; 212. Center tray through hole; 22. Heating element; 23. Air guide hood; 24. Oven door panel; 25. Flange; 251. Flange air outlet; 26. Sealing ring; 27. Heat insulation board; 28. Support column; 29. ​​Support plate;

[0044] 40. First air inlet pipe; 50. Flow equalizer plate; 51. Flow equalizer hole; 60. Second air inlet pipe; 61. Second air inlet hole; 70. Furnace boat;

[0045] 81. Connecting plate; 82. Motor module;

[0046] Z, first direction. DETAILED DESCRIPTION

[0047] The following describes exemplary embodiments of the present invention in more detail with reference to the accompanying drawings. Although the accompanying drawings illustrate exemplary embodiments of the present invention, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments described herein. Rather, these embodiments are provided to facilitate a more thorough understanding of the present invention and to fully convey the scope of the present invention to those skilled in the art.

[0048] Reference Figure 1, which shows a structural schematic diagram of a perspective view of a tubular structure provided in an embodiment of the present application. The tubular structure can be applied in the fields of semiconductors, photovoltaics, etc. to process and produce battery cells, silicon wafers and other workpieces.

[0049] Reference Figures 1 to 11 As shown, the tubular structure of the embodiment of the present application includes a furnace tube 10 and a furnace door; the furnace tube 10 is provided with a furnace cavity 11; the furnace door is arranged at the pipe mouth of the furnace tube 10, and is connected to the furnace tube 10 to cover the furnace cavity 11; the furnace door includes a tray 21 and an air guide component, the tray 21 is arranged on the side of the air guide component facing the furnace cavity 11, and the tray 21 is provided with a tray through hole; the inlet of the air guide component is connected to the tray through hole, and the outlet 124 of the air guide component is used to communicate with the outside.

[0050] In the process of using the tubular structure, the furnace chamber 11 of the furnace tube 10 is used to place the workpiece to be processed, and the workpiece to be processed is, for example, a silicon wafer.

[0051] The furnace door is arranged at the tube mouth of the furnace tube 10, and the furnace door is connected to the furnace tube 10 to cover the furnace cavity 11. The furnace door can prevent the temperature in the furnace cavity 11 from leaking out, ensuring the temperature in the furnace cavity 11 and the range of the constant temperature zone in the furnace cavity 11.

[0052] In the embodiment of the present application, the surface of the tray 21 facing the furnace chamber 11 is used to connect to the furnace boat 70. When the tubular structure is used in a vertical position, the lower end of the furnace boat 70 is connected to the tray 21. The specific connection structure between the tray 21 and the furnace boat 70 can be configured according to the actual use requirements. For example, the tray 21 can be provided with a mounting groove, and the furnace boat 70 can be inserted into the mounting groove. This embodiment of the present application does not further describe this in detail.

[0053] Furthermore, the furnace boat 70 is a component for placing silicon wafers waiting for processing. It is understandable that the furnace boat 70 can be selected according to the use requirements, for example, the furnace boat 70 can be a quartz boat, a silicon carbide boat, etc.

[0054] In this embodiment of the present application, the tubular structure allows gas within furnace chamber 11 to sequentially pass through the tray holes on tray 21, the inlet of the gas guide assembly, and be discharged through the outlet of the gas guide assembly. Tray 21, used to support furnace boat 70, is positioned perpendicular to the first direction Z and located in the center of furnace chamber 11. Gas within furnace chamber 11 first passes through the tray holes provided on tray 21, allowing the gas within furnace chamber 11 to be discharged relatively evenly from the chamber. This improves the uniformity of the gas flow during discharge from furnace chamber 11, thereby improving the quality of the workpiece being processed.

[0055] In some embodiments, a plurality of installation areas are provided on the surface of the tray 21 facing the furnace cavity 11 , each installation area is spaced apart from other installation areas, and a tray through hole is provided between two adjacent installation areas, and the installation areas are used to set the in-furnace boat 70 .

[0056] In the embodiment of the present application, each installation area is used to accommodate a furnace boat 70. Each installation area can be provided with a structure such as a mounting slot for mounting the furnace boat 70, so as to conveniently and stably connect the furnace boat 70 to the tray 21. It is understood that a furnace boat 70 can be provided in each installation area, or one or more installation areas can be selected to accommodate the furnace boat 70 according to usage requirements. The number of furnace boats 70 provided is relatively flexible, and multiple furnace boats 70 can be provided, thereby increasing the production capacity of the tubular structure.

[0057] In the embodiment of the present application, a tray through hole is set between two adjacent installation areas, and the boat 70 in the furnace will not interfere with the tray through hole, thereby avoiding affecting the outflow of gas in the furnace cavity 11 through the tray through hole, thereby improving the airflow uniformity of the gas in the furnace cavity 11 when it flows out.

[0058] In some embodiments, a plurality of guide grooves 211 are provided on the surface of the tray 21 facing the oven cavity 11, and each guide groove 211 is connected to at least one tray through hole; the plurality of guide grooves 211 divide the surface of the tray 21 facing the oven cavity 11 into a plurality of installation areas.

[0059] In this embodiment of the present application, multiple guide grooves 211 divide the surface of the tray 21 facing the oven cavity 11 into multiple installation areas, thereby achieving the division of each installation area. The provision of the guide grooves 211 can serve as a guide, allowing the gas in the oven cavity 11 to be evenly discharged through the guide grooves 211 and at least one tray through-hole connected to the guide grooves 211.

[0060] In some embodiments, the tray through-holes include a central tray through-hole 212 , which is perpendicular to the first direction Z and is disposed in the middle of the tray 21 .

[0061] In the embodiment of the present application, perpendicular to the first direction Z, the center tray through hole 212 is located in the middle of the tray 21. The center tray through hole 212 helps to evenly discharge the gas in the furnace cavity 11, ensuring the uniformity of the airflow when the gas in the furnace cavity 11 flows out.

[0062] In some embodiments, a plurality of guide grooves 211 are provided on the surface of the tray 21 facing the oven cavity 11. Each of the guide grooves 211 is connected to the central tray through hole 212. The guide grooves 211 extend radially from the central tray through hole 212. In the above-described structure of the embodiment of the present application, each guide groove 211 is connected to the central tray through hole 212. When the tubular structure is in use, some of the gas within the oven cavity 11 can pass through the guide grooves 211, the central tray through hole 212, the inlet of the gas guide assembly, and be discharged from the outlet of the gas guide assembly.

[0063] Further references Figure 7As shown, the tray 21 is provided with four flow guide grooves 211, which extend radially from the center tray through hole 212 to the outer periphery of the tray 21 and form four mounting areas, each of which is provided with an inner furnace boat 70. At this time, the tubular structure adopts the center gas extraction of the tray 21 to realize the uniformity of the airflow between the four inner furnace boats 70 and achieve better airflow guidance.

[0064] In some embodiments, the tray through hole further comprises a plurality of outer periphery tray through holes, which are arranged at intervals around the axis of the furnace tube 10. In the above structure of the embodiments of the present application, the arrangement of the outer periphery tray through hole can improve the uniformity of the airflow when the gas in the furnace cavity 11 flows out.

[0065] In some embodiments, the outer periphery tray through hole is arranged at the groove bottom of the flow guide groove 211. At this time, part of the gas in the furnace cavity 11 can be discharged in turn through the flow guide groove 211 and the outer periphery tray through hole arranged at the groove bottom of the flow guide groove 211.

[0066] In some embodiments, the outer periphery tray through hole is arranged at the groove bottom of the flow guide groove 211. At this time, part of the gas in the furnace cavity 11 can be discharged in turn through the flow guide groove 211 and the outer periphery tray through hole arranged at the groove bottom of the flow guide groove 211.

[0067] In some embodiments, the outer periphery tray through hole is adjacent to the flow guide groove 211 and communicates with the flow guide groove 211. At this time, part of the gas in the furnace cavity 11 can be discharged in turn through the flow guide groove 211 and the outer periphery tray through hole adjacent to the flow guide groove 211, and part of the gas in the furnace cavity 11 can also be directly discharged through the outer periphery tray through hole.

[0068] It can be understood that the relationship between the outer periphery tray through hole and the flow guide groove 211 can be set according to the use requirements, for example, at least one of the outer periphery tray through hole arranged at the groove bottom of the flow guide groove 211, the outer periphery tray through hole arranged at intervals with the flow guide groove 211, and the outer periphery tray through hole adjacent to and communicating with the flow guide groove 211.

[0069] Similarly, part of the gas in the furnace cavity 11 can be directly discharged through the center tray through hole 212, or directly discharged through the outer periphery tray through hole, or discharged in turn through the flow guide groove 211 and the center tray through hole 212, or discharged in turn through the flow guide groove 211 and the outer periphery tray through hole, etc. The discharge of the gas in the furnace cavity 11 has multiple paths to improve the uniformity of the airflow when the gas in the furnace cavity 11 flows out.

[0070] In some embodiments, the air guide assembly comprises the air guide cover 23 and the furnace door plate 24, the air guide cover 23 is buckled on the side of the furnace door plate 24 facing the furnace cavity 11, and the air guide cover 23 and the furnace door plate 24 form the air guide channel; the air guide cover 23 is provided with the inlet of the air guide assembly and the outlet 124 of the air guide assembly, and the air guide channel is in communication with the inlet of the air guide assembly and the outlet 124 of the air guide assembly respectively; the tray 21 is arranged on the side of the air guide cover 23 facing the furnace cavity 11. In the above structure of the embodiment of the application, the furnace cavity 11 is capped by the furnace door plate 24, so that the temperature in the furnace cavity 11 is prevented from leaking out.

[0071] In some embodiments, the side of the air guide cover 23 facing the tray 21 is provided with the inlet of the air guide assembly; the tray through hole and the inlet of the air guide assembly each have at least one, and each tray through hole is correspondingly arranged with one inlet of the air guide assembly. In the above structure of the embodiment of the application, the gas in the furnace cavity 11 passes through the tray through hole on the tray 21 and the inlet of the air guide assembly in sequence and enters the air guide channel. Each tray through hole is correspondingly arranged with one inlet of the air guide assembly, so as to ensure that the gas passing through each tray through hole effectively enters the air guide channel.

[0072] In some embodiments, along the first direction, the outer periphery of the air guide cover 23 is provided with the outlet 124 of the air guide assembly; the air guide assembly further comprises the flange 25, the flange 25 is arranged around the axis of the furnace pipe 10, and the flange 25 connects the furnace door plate 24 and the furnace pipe 10; the flange 25 is provided with the flange gas outlet 251, the flange gas outlet 251 is correspondingly arranged with and in communication with the outlet 124 of the air guide assembly, and the gas discharged from the outlet 124 of the air guide assembly is transported to the outside through the flange gas outlet 251.

[0073] In the above structure of the embodiment of the application, the gas in the furnace cavity 11 passes through the tray through hole on the tray 21 and the inlet of the air guide assembly in sequence and enters the air guide channel, and the gas in the air guide channel passes through the outlet 124 of the air guide assembly and the flange gas outlet 251 in sequence and is discharged to the outside of the tubular structure.

[0074] In the embodiment of the application, the flange 25 is used to connect the furnace door plate 24 and the furnace pipe 10, which has the advantages of simple and reliable connection. The flange 25 is a ring-shaped structure, which facilitates the arrangement of the flange gas outlet 251 and makes the arrangement of the flange gas outlet 251 in the tubular structure relatively simple.

[0075] In some embodiments, the flange 25 is further provided with a cooling channel, and the cooling channel is suitable for passing a cooling medium.

[0076] In the embodiment of the present application, when the tubular structure is in use, a cooling medium is introduced into the cooling channel of flange 25. The cooling medium absorbs heat and then flows out of the cooling channel, removing the heat and achieving cooling. Furthermore, the provision of a cooling channel within flange 25 for the cooling medium eliminates the need for a separate cooling assembly, thereby reducing the number of components in the tubular structure and thus reducing the cost of the tubular structure.

[0077] In some embodiments, to enhance the sealing performance of the furnace cavity 11, a sealing ring 26 is provided on the furnace door panel 24. The furnace door panel 24 and the furnace tube 10 are sealed by the sealing ring 26. Once the furnace door panel 24 and the furnace tube 10 are connected, the furnace cavity 11 is sealed, ensuring uniform temperature and temperature field within the furnace cavity 11. The provision of a cooling channel within the flange 25 prevents the sealing ring 26 from aging and failing due to the temperature within the furnace cavity 11.

[0078] In some embodiments, the oven door further includes a heating element 22. The heating element 22 and the tray 21 are sequentially arranged along the first direction Z. The heating element 22 is disposed between the tray 21 and the air guide hood 23. The heating element 22 is used to heat the oven cavity 11. In the above-described structure of the embodiment of the present application, the tray 21 faces the oven cavity 11 and is used to support the oven boat 70. The heating element 22 is disposed below the tray 21. The heating element 22 generates heat to heat the oven cavity 11.

[0079] In the embodiment of the present application, the tray 21 and the heating element 22 can support the boat 70 in the furnace and heat the furnace cavity 11 to increase the temperature in the furnace tube 10 and the range of the constant temperature zone in the furnace tube 10, thereby improving the uniformity of the temperature field in the furnace tube 10.

[0080] When the furnace door includes a heating element 22, the furnace door is a heating furnace door, suitable for heating the furnace cavity 11, thereby increasing the temperature within the furnace cavity 11 and the range of the constant temperature zone within the furnace cavity 11, improving the uniformity of the temperature field within the furnace cavity 11, and thus improving the quality of the workpieces to be processed. Moreover, the furnace tube 10 can be configured with a larger tube diameter to accommodate more workpieces to be processed, effectively increasing the production capacity of the tubular structure. When the furnace door increases the range of the constant temperature zone within the furnace cavity 11, the furnace cavity 11 has more area suitable for processing workpieces to be processed. Therefore, more workpieces to be processed can be placed in the furnace cavity 11, further improving the production capacity of the tubular structure.

[0081] In some embodiments, the heating element 22 is a heating wire wound into a plate-like structure.

[0082] In some embodiments, to increase the structural strength of tray 21, the oven door further includes a support plate 29. Along the first direction, one side of support plate 29 is connected to tray 21, and the other side of support plate 29 is connected to heating element 22. That is, along the first direction, tray 21, support plate 29, and heating element 22 are arranged in sequence, with tray 21 facing oven cavity 11.

[0083] In some embodiments, the oven door further includes a support column 28 , one end of the support column 28 is connected to the tray 21 , and the other end of the support column 28 is connected to the oven door panel 24 .

[0084] In the embodiment of the present application, the support column 28 can realize the connection between the tray 21 and the oven door panel 24, and is used to support the tray 21 and the heating element 22. It is understandable that the connection between the support column 28 and the tray 21 can be direct or indirect, and can be set according to the specific use requirements.

[0085] It is understandable that the number of support columns 28 is set according to usage requirements. For example, four support columns 28 are provided, and the four support columns 28 are respectively close to the four corners of the tray 21.

[0086] In some embodiments, the support column 28 is connected to the tray 21 and the oven door panel 24 , and the heating element 22 is disposed on a side of the tray 21 facing the oven door panel 24 . The heating element 22 is in contact with or not in contact with the support column 28 .

[0087] In some embodiments, the support column 28 is connected to the heating element 22 and the oven door panel 24 , and the support column 28 is connected to the tray 21 through the heating element 22 .

[0088] In some embodiments, the support column 28 is connected to the support plate 29 and the oven door panel 24 , the support column 28 is connected to the tray 21 through the support plate 29 , and the heating element 22 is in contact with or not in contact with the support column 28 .

[0089] In some embodiments, the furnace door further includes a plurality of heat insulation panels 27 . Along the first direction Z, the plurality of heat insulation panels 27 are arranged in the air guide cover 23 at intervals.

[0090] In the embodiment of the present application, the provision of multiple insulation boards 27 can achieve the effect of heat insulation, block the heat transfer from the furnace cavity 11, avoid temperature loss in the furnace cavity 11, and ensure the temperature in the furnace cavity 11 and the range of the constant temperature zone in the furnace cavity 11.

[0091] In some embodiments, multiple thermal insulation boards 27 are respectively connected to support columns 28 to achieve the installation of multiple thermal insulation boards 27.

[0092] In some embodiments, the tubular structure further includes a first air inlet pipe 40, one end of which is disposed within the furnace cavity 11 and extends to the top of the furnace cavity 11. The first air inlet pipe 40 is used to introduce source-carrying gas into the top of the furnace tube 10. In the embodiment of the present application, one end of the first air inlet pipe 40 is disposed within the furnace cavity 11 and extends from the tail end of the furnace tube 10 along the length of the furnace tube 10 to the top of the furnace cavity 11. The first air inlet pipe 40 is used to introduce source-carrying gas into the top of the furnace tube 10. In this case, the tubular structure is top-intake, and is combined with bottom exhaust through the through-holes of the tray to achieve gas flow within the tubular structure.

[0093] In other embodiments, the first air inlet pipe 40 may be disposed outside the furnace tube 10 and along the length direction of the furnace tube 10. One end of the first air inlet pipe 40 passes through the top of the furnace cavity 11 and is disposed within the furnace cavity 11. One end of the first air inlet pipe 40 is located at the top of the furnace cavity 11. The length direction of the furnace tube 10 is the first direction Z.

[0094] In some embodiments, the first air intake structure also includes a flow equalizer plate 50, and the flow equalizer plate 50 is provided with a flow equalizer hole 51; in the first direction Z, the flow equalizer plate 50 divides the furnace chamber 11 into a first sub-furnace chamber and a second sub-furnace chamber, the first sub-furnace chamber is located on the side of the second sub-furnace chamber away from the tail, and the second sub-furnace chamber is used to set the furnace boat; one end of the first air intake pipe 40 extends into the first sub-furnace chamber, and the first air intake pipe 40 is used to introduce source-carrying gas into the first sub-furnace chamber, and the source-carrying gas flows into the second sub-furnace chamber through the flow equalizer hole 51.

[0095] In the embodiment of the present application, when the tubular structure is in use, the flow process of the source-carrying gas is as follows: it enters the first sub-furnace chamber through the first air inlet pipe 40, and then flows into the second sub-furnace chamber through the uniform flow hole 51. The uniform flow plate 50 has the function of uniformizing the gas, so that the source-carrying gas flows into the second sub-furnace chamber relatively evenly after passing through the uniform flow hole 51 of the uniform flow plate 50, thereby improving the uniformity of the source-carrying gas in the furnace chamber 11. The source-carrying gas can contact the workpiece to be processed more evenly, thereby effectively improving the quality of the workpiece to be processed. In addition, the uniform flow plate 50 can reduce the disturbance of the gas in the second sub-furnace chamber, avoid the influence of gas disturbance on the quality of the workpiece to be processed, and further improve the quality of the workpiece to be processed.

[0096] In the embodiment of the present application, by providing a flow equalizer 50 , spray air intake at the top of the furnace tube 10 can be achieved.

[0097] In some embodiments, the cross-sectional area of ​​the flow-uniform holes 51 decreases from the middle of the flow-uniform plate 50 to the edge of the flow-uniform plate 50 , perpendicular to the first direction Z. In the above-described structure of the embodiment of the present application, the flow-uniform holes 51 can meet the air intake requirements of the second sub-furnace chamber, allowing the source-carrying gas to enter the second sub-furnace chamber more evenly while avoiding disturbance of the gas in the second sub-furnace chamber, thereby ensuring uniform airflow in the second sub-furnace chamber.

[0098] In some embodiments, the plurality of flow-distributing holes 51 are arranged into a plurality of annular rings, which are arranged around the axis of the tubular structure; from the middle of the flow-distributing plate 50 to the edge of the flow-distributing plate 50, the plurality of annular rings are arranged at intervals and their radius increases successively.

[0099] The annular ring may be a circular ring, a square, a pentagon, etc., and there is no limitation on the specific shape of the annular ring.

[0100] It is understandable that the plurality of uniform flow holes 51 may be irregularly arranged according to the air intake requirements in the second sub-furnace chamber, as long as the use requirements are met.

[0101] In some embodiments, the tubular structure further includes a second air inlet pipe 60, one end of which is disposed in the furnace cavity 11; a second air inlet hole 61 is disposed on the side wall of the second air inlet pipe 60, and the second air inlet pipe 60 is used to introduce source-carrying gas to the side of the furnace cavity 11 through the second air inlet hole 61. In the embodiment of the present application, one end of the second air inlet hole 61 is disposed in the furnace cavity 11, and one end of the second air inlet hole 61 extends from the tail of the furnace tube 10 along the length of the furnace tube 10 to the top of the furnace cavity 11, and the second air inlet hole 61 is used to introduce source-carrying gas to the side of the furnace cavity 11 through the second air inlet hole 61. The second air inlet hole 61 can increase the uniformity of the source-carrying gas in the furnace cavity 11, and the source-carrying gas can contact the workpiece to be processed more evenly, thereby effectively improving the quality of the workpiece to be processed.

[0102] It is understandable that, in order to increase the uniformity of the source-carrying gas in the furnace cavity 11 , a plurality of second air inlet holes 61 are provided on the side wall of each second air inlet pipe 60 .

[0103] In the embodiment of the present application, the first air inlet pipe 40 is used to introduce the source gas into the top of the furnace tube 10. The second air inlet hole 61 is set, and the tubular structure can realize the structural form of top air intake, side air supply, and bottom air extraction.

[0104] In some embodiments, when the first air inlet pipe 40 introduces source-carrying gas into the top of the furnace chamber 11 , the density of the second air inlet holes 61 on the second air inlet pipe 60 gradually increases from the top of the furnace tube 10 to the tail of the furnace tube 10 .

[0105] In the embodiment of the present application, when the first air inlet pipe 40 introduces source-carrying gas into the top of the furnace chamber 11, the concentration of elements in the source-carrying gas at the top of the furnace chamber 11 is relatively high, and the concentration of elements in the source-carrying gas at the tail of the furnace chamber 11 is relatively low. Therefore, from the top of the furnace tube 10 to the tail of the furnace tube 10, the density of the second air inlet hole 61 on the second air inlet pipe 60 gradually increases, and the amount of source-carrying gas introduced into the furnace chamber 11 by the second air inlet pipe 60 through the second air inlet hole 61 increases, thereby increasing the uniformity of the source-carrying gas in the furnace chamber 11, and the source-carrying gas can be in more uniform contact with the workpiece to be processed, thereby effectively improving the quality of the workpiece to be processed.

[0106] In some embodiments, when the first air inlet pipe 40 introduces source-carrying gas into the top of the furnace chamber 11 , the cross-sectional area of ​​the second air inlet hole 61 on the second air inlet pipe 60 increases from the top of the furnace tube 10 to the tail of the furnace tube 10 .

[0107] In the embodiment of the present application, when the first air inlet pipe 40 introduces source-carrying gas into the top of the furnace chamber 11, the concentration of elements in the source-carrying gas at the top of the furnace chamber 11 is relatively high, and the concentration of elements in the source-carrying gas at the tail of the furnace chamber 11 is relatively low. Therefore, from the top of the furnace tube 10 to the tail of the furnace tube 10, the cross-sectional area of ​​the second air inlet hole 61 on the second air inlet pipe 60 increases, and the amount of source-carrying gas introduced into the furnace chamber 11 by the second air inlet pipe 60 through the second air inlet hole 61 increases, thereby increasing the uniformity of the source-carrying gas in the furnace chamber 11, and the source-carrying gas can be in more uniform contact with the workpiece to be processed, thereby effectively improving the quality of the workpiece to be processed.

[0108] In some embodiments, a plurality of first air inlet pipes 40 and a plurality of second air inlet pipes 60 are provided, and the plurality of first air inlet pipes 40 and the plurality of second air inlet pipes 60 are arranged at intervals around the axis of the furnace tube 10, with each first air inlet pipe 40 located between two adjacent second air inlet pipes 60. In the above structure of the embodiment of the present application, the plurality of first air inlet pipes 40 and the plurality of second air inlet pipes 60 are staggered around the axis of the furnace tube 10, so that the plurality of first air inlet pipes 40 and the plurality of second air inlet pipes 60 can more evenly introduce the source-carrying gas into the furnace cavity 11.

[0109] It is understood that the plurality of first air inlet pipes 40 and the plurality of second air inlet pipes 60 are staggered around the axis of the furnace tube 10, and the distance between each first air inlet pipe 40 and an adjacent second air inlet pipe 60 is equal. In other words, the plurality of first air inlet pipes 40 and the plurality of second air inlet pipes 60 are evenly spaced around the axis of the furnace tube 10. Of course, the plurality of first air inlet pipes 40 and the plurality of second air inlet pipes 60 can also be unevenly spaced around the axis of the furnace tube 10. Alternatively, each first air inlet pipe 40 is connected to an adjacent second air inlet pipe 60.

[0110] In some embodiments, a plurality of first air inlet pipes 40 are provided; each first air inlet pipe 40 has another first air inlet pipe 40 symmetrically arranged with respect to the axis of the furnace tube 10. In the above structure of the embodiment of the present application, each two first air inlet pipes 40 are symmetrically arranged with respect to the axis of the furnace tube 10. Thus, the plurality of first air inlet pipes 40 can more evenly introduce the source-carrying gas into the furnace cavity 11.

[0111] In some embodiments, a plurality of second air inlet pipes 60 are provided, and each second air inlet pipe 60 has another second air inlet pipe 60 symmetrically arranged with respect to the axis of the furnace tube 10. In the above structure of the embodiment of the present application, since every two second air inlet pipes 60 are symmetrically arranged with respect to the axis of the furnace tube 10, the plurality of second air inlet pipes 60 can more evenly introduce the source-carrying gas into the furnace chamber 11.

[0112] In some embodiments, the furnace chamber 11 is configured to house multiple furnace boats 70, with adjacent furnace boats 70 spaced apart from each other. A first air inlet pipe 40 is positioned corresponding to the space between the two adjacent furnace boats 70. In the above-described structure of the embodiment of the present application, the source-carrying gas introduced into the furnace chamber 11 through the first air inlet pipe 40 can flow more evenly toward the two furnace boats 70 adjacent to the first air inlet pipe 40, thereby ensuring uniform contact between the silicon wafers on the furnace boats 70 and the source-carrying gas.

[0113] In some embodiments, the furnace chamber 11 is configured to house multiple furnace boats 70, with adjacent furnace boats 70 spaced apart from each other. A second air inlet pipe 60 is positioned corresponding to the space between the two adjacent furnace boats 70. In the above-described structure of the embodiment of the present application, the source-carrying gas introduced into the furnace chamber 11 through the second air inlet pipe 60 can flow more evenly toward the two furnace boats 70 adjacent to the second air inlet pipe 60, thereby ensuring uniform contact between the silicon wafers on the furnace boats 70 and the source-carrying gas.

[0114] In some embodiments, each furnace boat 70 has multiple positional relationships with a first air inlet pipe 40 and a second air inlet pipe 60, which are set according to usage requirements. For example, a corresponding first air inlet pipe 40 is set; and / or, a corresponding second air inlet pipe 60 is set for each furnace boat 70; and / or, a corresponding first air inlet pipe 40 and a second air inlet pipe 60 are set for each furnace boat 70.

[0115] In some embodiments, the furnace tube 10 includes an outer tube 13 and an inner tube 14, and the outer tube 13 is arranged on the outer periphery of the inner tube 14 at intervals to form an interlayer cavity 15 between the outer tube 13 and the inner tube 14, and a furnace cavity 11 is arranged in the inner tube 14, and an inner tube air inlet 141 is arranged on the side wall of the inner tube 14; the source-carrying gas entering the interlayer cavity 15 enters the side of the furnace cavity 11 through the inner tube air inlet 141.

[0116] In an embodiment of the present application, the source-carrying gas introduced into the interlayer cavity 15 enters the side of the furnace cavity 11 through the inner tube air inlet hole 141. The inner tube air inlet hole 141 can increase the uniformity of the source-carrying gas in the furnace cavity 11, and the source-carrying gas can contact the workpiece to be processed more evenly, thereby effectively improving the quality of the workpiece to be processed.

[0117] In the embodiment of the present application, the first air inlet pipe 40 is used to introduce the source-carrying gas into the top of the furnace tube 10. The inner tube air inlet hole 141 is set on the inner tube 14. The tubular structure can realize the structural form of top air intake, side air supply, and bottom air exhaust.

[0118] In some embodiments, the density of the inner tube air inlet holes 141 on the inner tube 14 gradually increases from the top of the furnace tube 10 to the tail of the furnace tube 10. In the embodiment of the present application, when the first air inlet pipe 40 introduces the source-carrying gas into the top of the furnace chamber 11, the density of the inner tube air inlet holes 141 on the inner tube 14 gradually increases from the top of the furnace tube 10 to the tail of the furnace tube 10. The density of the inner tube air inlet holes 141 on the inner tube 14 is related to the air intake direction of the furnace chamber 11. The density of the inner tube air inlet holes 141 on the inner tube 14 cooperates with the first air inlet pipe 40 to introduce the source-carrying gas into the furnace chamber 11, which can increase the uniformity of the source-carrying gas in the furnace chamber 11. The source-carrying gas can be in more uniform contact with the workpiece to be processed, thereby effectively improving the quality of the workpiece to be processed.

[0119] In some embodiments, the cross-sectional area of ​​the inner tube air inlet hole 141 on the inner tube 14 decreases from the top of the furnace tube 10 to the tail of the furnace tube 10. Similarly, in the embodiment of the present application, when the first air inlet pipe 40 introduces the source-carrying gas into the top of the furnace chamber 11, the cross-sectional area of ​​the inner tube air inlet hole 141 on the inner tube 14 is related to the air inlet direction of the furnace chamber 11. The cross-sectional area of ​​the inner tube air inlet hole 141 on the inner tube 14 cooperates with the first air inlet pipe 40 to introduce the source-carrying gas into the furnace chamber 11, which can increase the uniformity of the source-carrying gas in the furnace chamber 11, and the source-carrying gas can more evenly contact the workpiece to be processed, thereby effectively improving the quality of the workpiece to be processed.

[0120] In some embodiments, to increase the uniformity of the source-carrying gas within the furnace chamber 11, a plurality of inner tube air inlet holes 141 are provided on the sidewall of the inner tube 14. The plurality of inner tube air inlet holes 141 are spaced apart along the first direction Z; alternatively, the plurality of inner tube air inlet holes 141 are spaced apart around the axis of the furnace tube 10; alternatively, the plurality of inner tube air inlet holes 141 are spaced apart along the first direction Z, and the plurality of inner tube air inlet holes 141 are spaced apart around the axis of the furnace tube 10.

[0121] An embodiment of the present application further provides a tubular device, which includes the tubular structure as described above.

[0122] In the embodiment of the present application, the tray 21 with a tubular structure is used to set the boat 70 in the furnace, perpendicular to the first direction Z, and the tray 21 is located in the middle of the furnace cavity 11. The gas in the furnace cavity 11 first passes through the tray through-holes set on the tray 21. The gas in the furnace cavity 11 can be discharged from the furnace cavity 11 relatively evenly. The gas in the furnace cavity 11 has good airflow uniformity when flowing out, which helps to improve the quality of the workpiece to be processed. Therefore, the tubular equipment has the advantage of high production quality.

[0123] Tubular equipment can have a variety of applications, for example, the tubular equipment can be used as a low-pressure deposition equipment, as a diffusion equipment, etc.

[0124] In some embodiments, reference Figure 8 As shown, the tubular equipment also includes a connecting plate 81 and a motor module 82. The heating furnace door is connected to the connecting plate 81, and the connecting plate 81 is connected to the motor module 82. The motor module 82 drives the heating furnace door up and down through the connecting plate 81 to realize the installation and disassembly of the heating furnace door and the furnace tube 10.

[0125] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or device. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of other identical elements in the process, method, article, or device comprising the element.

[0126] Each embodiment in this specification is described in a related manner. Similar portions between the various embodiments can be referenced to each other. Each embodiment focuses on the differences from other embodiments. The embodiments of the apparatus, electronic device, computer-readable storage medium, and computer program product containing instructions thereof are generally similar to the method embodiments, so their description is relatively simple. For related portions, reference can be made to the description of the method embodiments.

[0127] The above description is only a preferred embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention are included in the scope of protection of the present invention.

Claims

1. A tubular structure, characterized in that: include, A furnace tube (10) is provided with a furnace cavity (11); A furnace door is arranged at the pipe mouth of the furnace tube (10) and is connected to the furnace tube (10) to cover the furnace cavity (11); the furnace door includes a tray (21) and an air guide component, The tray (21) is arranged on a side of the air guide component facing the furnace cavity (11), and the tray (21) is provided with a tray through hole; The inlet of the air guide component is connected to the tray through hole, and the outlet (124) of the air guide component is used to communicate with the outside.

2. The tubular structure according to claim 1, characterized in that: The tray (21) is provided with a plurality of installation areas on the surface facing the furnace cavity (11), each installation area is spaced apart from the other installation areas, and a tray through hole is provided between two adjacent installation areas. The installation areas are used to set the furnace boat (70).

3. The tubular structure according to claim 2, characterized in that: A plurality of guide grooves (211) are provided on the surface of the tray (21) facing the oven cavity (11), each of the guide grooves (211) being connected to at least one of the tray through holes; the plurality of guide grooves (211) divide the surface of the tray (21) facing the oven cavity (11) into a plurality of installation areas.

4. The tubular structure according to claim 1, characterized in that: The tray through-holes include a central tray through-hole (212) perpendicular to the first direction (Z), and the central tray through-hole (212) is arranged in the middle of the tray (21).

5. The tubular structure according to claim 4, characterized in that: A plurality of guide grooves (211) are provided on the surface of the tray (21) facing the furnace cavity (11); the plurality of guide grooves (211) are respectively connected to the central tray through hole (212); and the plurality of guide grooves (211) extend radially toward the periphery of the tray (21) with the central tray through hole (212) as the center.

6. The tubular structure according to claim 5, characterized in that: The tray through-holes further comprise a plurality of peripheral tray through-holes, and the plurality of peripheral tray through-holes are arranged at intervals around the axis of the furnace tube (10).

7. The tubular structure according to claim 6, characterized in that: The peripheral tray through hole is arranged at the bottom of the guide groove (211); and / or the peripheral tray through hole and the guide groove (211) are arranged at intervals; and / or the peripheral tray through hole is adjacent to the guide groove (211), and the peripheral tray through hole is communicated with the guide groove (211).

8. The tubular structure according to claim 1, characterized in that: The air guide component includes: An air guide hood (23) and a furnace door panel (24), wherein the air guide hood (23) is buckled on a side of the furnace door panel (24) facing the furnace cavity (11), the air guide hood (23) and the furnace door panel (24) are surrounded to form an air guide channel, the air guide hood (23) is provided with an inlet of the air guide component and an outlet (124) of the air guide component, and the air guide channel is respectively connected to the inlet of the air guide component and the outlet (124) of the air guide component; The tray (21) is arranged on a side of the air guide cover (23) facing the furnace cavity (11).

9. The tubular structure according to claim 8, characterized in that: The inlet of the air guide component is provided on a side of the air guide cover (23) facing the tray (21); There is at least one through hole in the tray and at least one inlet of the air guide component, and each through hole in the tray is correspondingly arranged to an inlet of the air guide component.

10. The tubular structure according to claim 8, characterized in that: Along the first direction, the outer periphery of the air guide cover (23) is provided with an outlet (124) of the air guide component; The air guide assembly further comprises a flange (25), the flange (25) being arranged around the axis of the furnace tube (10), and the flange (25) connecting the furnace door plate (24) and the furnace tube (10); The flange (25) is provided with a flange air outlet (251), and the flange air outlet (251) is correspondingly provided with and communicated with the outlet (124) of the air guide component, and the gas discharged from the outlet (124) of the air guide component is transported to the outside through the flange air outlet (251).

11. The tubular structure according to claim 10, characterized in that: A cooling channel is also provided in the flange (25), and the cooling channel is suitable for passing a cooling medium.

12. The tubular structure according to claim 8, characterized in that The oven door further comprises a heating element (22). Along a first direction, the heating element (22) and the tray (21) are sequentially arranged. The heating element (22) is arranged between the tray (21) and the air guide cover (23). The heating element (22) is used to heat the oven cavity (11).

13. The tubular structure according to claim 12, characterized in that: The furnace door further comprises a support plate (29); along the first direction, one side of the support plate (29) is connected to the tray (21), and the other side of the support plate (29) is connected to the heating element (22).

14. The tubular structure according to claim 8, characterized in that The furnace door further comprises a plurality of heat insulation panels (27), and along a first direction (Z), the plurality of heat insulation panels (27) are arranged in the air guide cover (23) at intervals.

15. The tubular structure according to claim 8, characterized in that The oven door further comprises a support column (28), one end of the support column (28) is connected to the tray (21), and the other end of the support column (28) is connected to the oven door panel (24).

16. A tubular device, characterized in that: The invention comprises a tubular structure as claimed in any one of claims 1 to 15.

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