Detection device and lamination equipment

Abstract

The embodiment of the utility model relates to the technical field of semiconductor detection, and particularly discloses a detection device and lamination equipment, the detection device comprises an imaging mechanism and a movement mechanism, the imaging mechanism comprises an imaging module and a lens module, and the imaging module is detachably fixed on the lens module; and the movement mechanism is fixed on the lens module and is used for driving the lens module to move. By means of the mode, the stacking effect of the MLCC machined semi-finished products can be detected through the detection device, the yield of the MLCC machined finished products is improved, and waste of resources is reduced.

Description

Technical Field

[0001] The embodiments of the utility model relate to the field of semiconductor detection technology, and in particular to a detection device and a stacking device. Background Art

[0002] MLCC (Multi-layer Ceramic Capacitors) is an essential basic component in the electronics industry. When the stacking operation is involved in the MLCC preparation process, the dielectric film printed with the conductive layer needs to be initially cut and then stacked according to the required number of layers using stacking equipment. The MLCC semi-finished product after the stacking operation is completed is called a block.

[0003] In the process of realizing the present invention, the inventors of the present invention found that: at present, the existing stacking equipment does not have corresponding detection devices to detect the stacking state and stacking effect of the blocks, and it is difficult to accurately observe the stacking state and stacking effect of the edges of the blocks using the human eye, which will cause some unqualified semi-finished products to flow into subsequent processing steps, resulting in waste of resources and affecting the yield of the finished products. Utility Model Content

[0004] The main technical problem solved by the embodiments of the present utility model is to provide a detection device and a stacking device, which can realize the detection of the stacking effect of the semi-finished product of the dielectric diaphragm printed with a conductive layer in the MLCC processing flow.

[0005] In order to solve the above technical problems, a technical solution adopted by the present invention is: to provide a detection device, including an imaging mechanism and a motion mechanism, the imaging mechanism includes an imaging module and a lens module, the imaging module is detachably fixed to the lens module; the motion mechanism is fixed to the lens module, and the motion mechanism is used to drive the lens module to move.

[0006] Optionally, the motion mechanism includes a first motion component and a second motion component, the first motion component is connected to the second motion component, the first motion component drives the imaging mechanism to reciprocate along a first direction, and the second motion component drives the imaging mechanism to reciprocate along a second direction, wherein the first direction and the second direction are perpendicular.

[0007] Optionally, the first motion assembly includes a first telescopic rod and a first sleeve, and the first telescopic rod and the first sleeve are movably connected.

[0008] Optionally, the second motion assembly includes a second telescopic rod and a second sleeve, and the second telescopic rod and the second sleeve are movably connected.

[0009] Optionally, the first motion component further includes a first fixed portion and a first rotating portion, and the first rotating portion is rotatably connected to the first fixed portion.

[0010] Optionally, the second motion component further includes a second fixed portion and a second rotating portion, and the second rotating portion is rotatably connected to the second fixed portion.

[0011] Optionally, the first motion component also includes a first limiting portion, a portion of the first limiting portion is fixed to the first rotating portion, and the other portion of the first limiting portion is located at the first fixed portion; the first fixed portion also includes a first slider; the first limiting portion is provided with a first sliding hole, one end of the first slider is fixed to the first fixed portion, and the other end of the first slider passes through and extends out of the first sliding hole.

[0012] Optionally, the second motion component also includes a second limiting portion, a portion of the second limiting portion is fixed to the second rotating portion, and the other portion of the second limiting portion is located at the second fixed portion; the second fixed portion also includes a second slider; the second limiting portion is provided with a second sliding hole, one end of the second slider is fixed to the second fixed portion, and the other end of the second slider passes through and extends out of the second sliding hole.

[0013] Optionally, the detection device further includes a cover, which covers the imaging mechanism and the movement mechanism.

[0014] Optionally, the detection device further includes an anti-collision member, which is sleeved on the outer surface of the imaging mechanism.

[0015] Optionally, the detection device further includes a distance measuring component, which is fixed to the imaging mechanism and is used to measure the distance between the imaging mechanism and the object to be detected.

[0016] In order to solve the above technical problems, another technical solution adopted by the present invention is: to provide a lamination device, including a mounting plate and the above detection device, wherein the detection device is fixed to the mounting plate.

[0017] The beneficial effects of the embodiments of the present invention are as follows: Unlike the prior art, the embodiments of the present invention provide a detection device comprising an imaging mechanism, including an imaging module and a lens module, wherein the imaging module is detachably fixed to the lens module; and a motion mechanism, wherein the motion mechanism is fixed to the lens module. Through the above structure, the embodiments of the present invention can use the detection device to accurately detect semi-finished MLCCs, thereby facilitating the screening of semi-finished products during the MLCC production process and improving the yield rate of finished MLCCs. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the drawings without creative work.

[0019] Figure 1 This is a schematic diagram of the explosion structure of the detection device provided by an embodiment of the utility model;

[0020] Figure 2 This is a schematic diagram of the assembly structure of the detection device provided by an embodiment of the utility model;

[0021] Figure 3 It is a three-dimensional structural diagram of the motion mechanism provided by an embodiment of the utility model. DETAILED DESCRIPTION

[0022] In order to facilitate the understanding of the present invention, the present invention is described in more detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that when an element is described as "fixed to" another element, it can be directly on the other element, or there can be one or more centered elements therebetween. When an element is described as "connected to" another element, it can be directly connected to the other element, or there can be one or more centered elements therebetween. The terms "vertical", "horizontal", "left", "right" and similar expressions used in this specification are for illustrative purposes only.

[0023] Unless otherwise defined, all technical and scientific terms used in this specification have the same meanings as those commonly understood by those skilled in the art to which this utility model belongs. The terms used in this specification and in the description of this utility model are only for the purpose of describing specific embodiments and are not intended to limit the utility model. The term "and / or" used in this specification includes any and all combinations of one or more of the relevant listed items.

[0024] See also Figure 1 and Figure 2 The detection device 1000 includes an imaging mechanism 1 and a motion mechanism 2. The imaging mechanism 1 is used to take photos or videos of the detected part. The imaging mechanism 1 is fixed to the motion mechanism 2. The motion mechanism 2 is used to drive the imaging mechanism 1 to move in different directions and angles, thereby realizing detection of different angles of the detected part, improving detection accuracy, and reducing the reduction in detection accuracy caused by visual errors that may exist at different viewing angles. The detection device 1000 is electrically connected to an external control device, and the control device is used to compare and analyze the detection data generated by the detection device 1000, or perform manual comparison processing.

[0025] It is understandable that the connection methods between the imaging mechanism 1 and the movement mechanism 2 include but are not limited to: screw connection, clamping connection, adhesive connection, integral processing and molding, etc.

[0026] For the imaging mechanism 1 mentioned above, please refer to Figure 1 The imaging mechanism 1 includes an imaging module 11 and a lens module 12. The imaging module 11 is detachably fixed to the lens module 12, and the lens module 12 is fixed to the motion mechanism 2. The lens module 12 is used to capture and collect image data of the part to be inspected, and transmit the corresponding image data to the imaging module 11. The imaging module 11 analyzes and processes the received image data, generates corresponding comparison data, and transmits it to an external control device, thereby realizing comparative analysis of the part to be inspected.

[0027] It can be understood that the detachable fixing methods of the imaging module 11 and the lens module 12 include but are not limited to: screw connection, clamping, etc. For example, a groove is set in the imaging module 11, and an internal thread is set in the groove. An external thread is correspondingly set at one end of the lens module 12 connected to the imaging module. The external thread of the lens module 12 cooperates with the internal thread of the imaging module 11 to realize the detachable connection between the imaging module 11 and the lens module 12.

[0028] It is understandable that in some embodiments, the imaging module 11 has a built-in microcomputer for processing the image data of the lens module 12 and comparing it with preset qualified data, thereby realizing automated detection and improving the integration of the detection device 1000.

[0029] In some embodiments, the lens module 12 includes multiple lenses and telescopic components. The multiple lenses are arranged in sequence according to a certain order. The telescopic components are used to adjust the distance between the lenses, thereby realizing the zoom function of the lens module 12.

[0030] It can be understood that in order to improve the degree of automation of the detection device 1000, a corresponding driving mechanism is set to drive the adjustment of the distance between multiple lenses to achieve automatic zoom, so that the lens module 12 can obtain clear and lossless image data at different angles and at different distances from the part to be detected, thereby improving the applicability of the detection device 1000 and ensuring the detection accuracy of the detection device 1000.

[0031] In some embodiments, the working magnification of the lens module 12 is 50 to 400 times, and the working distance for shooting is 10 mm to 100 mm. Preferably, in this embodiment, the optimal working distance between the lens module 12 and the component to be detected is 63 mm.

[0032] For the above mentioned motion mechanism 2, please refer to Figure 1The motion mechanism 2 includes a first motion component 21 and a second motion component 22. The first motion component 21 is connected to the second motion component 22, that is, the first motion component 21 is fixed to the second motion component 22. The first motion component 21 drives the imaging mechanism 1 to reciprocate along the first direction Y, so that the imaging mechanism 1 can adapt to the shooting requirements of the parts to be detected with different lengths along the first direction Y. The second motion component 22 drives the imaging mechanism 1 to reciprocate along the second direction X, so that the imaging mechanism 1 can adapt to the shooting requirements of the parts to be detected with different lengths along the second direction X, thereby improving the detection device 1000 for different detection requirements of different parts to be detected, and improving the applicability of the detection equipment, wherein the first direction Y and the second direction X are perpendicular.

[0033] It is worth noting that the first direction Y and the second direction X are specified for the purpose of facilitating understanding of the movement of the motion mechanism 2 in this embodiment, and are not limited to the motion mechanism 2 being able to move only in the first direction Y and the second direction X.

[0034] It can be understood that the above-mentioned motion mechanism 2 is electrically connected to the external control device, so that the motion mechanism 2 can realize automatic adjustment of various parameters, automatic start and stop, etc., thereby improving the automation level of the ranging device, reducing the degree of manual intervention, and improving work efficiency.

[0035] For the first motion component 21 mentioned above, please refer to Figure 1 and Figure 3 The first motion component 21 includes a first telescopic rod 211 and a first sleeve 212, and the first telescopic rod 211 and the first sleeve 212 are movably connected; specifically, the first telescopic rod 211 is inserted into the first sleeve 212, and the first sleeve 212 is fixed to the first motion component 21. The first telescopic rod 211 and the first sleeve 212 can move relative to each other, thereby realizing the movement of the first motion component 21 along the first direction Y.

[0036] It is worth noting that the power source for driving the first telescopic rod 211 and the first sleeve 212 to move relative to each other includes but is not limited to pneumatic, hydraulic, motor, etc., and these examples will not be given one by one in this embodiment.

[0037] In some embodiments, the first motion assembly 21 further includes a first fixed portion 213 and a first rotating portion 214 . The first rotating portion 214 is rotatably connected to the first fixed portion 213 , thereby forming an adjustable angular deflection between the first fixed portion 213 and the first rotating portion 214 .

[0038] It is worth noting that the structure for achieving the rotational connection between the first fixed portion 213 and the first rotating portion 214 should be such that a certain limit can be generated between the first fixed portion 213 and the first rotating portion 214 to prevent the first fixed portion 213 and the first rotating portion 214 from disengaging or deviating from the preset trajectory during relative rotation. The specific rotation structure includes, but is not limited to, a slide and a slider. Preferably, this embodiment adopts a first slide (not shown) provided on the first fixed portion 213 and a first sliding portion (not shown) provided on the first rotating portion 214, wherein the structure of the first sliding portion and the first slide forms a limit for the first fixed portion 213 and the first rotating portion 214 along an extension direction perpendicular to the first slide. In addition, the first sliding portion and the first slide are both configured in an arc shape to form an angular deflection when the first fixed portion 213 and the first rotating portion 214 rotate.

[0039] It can be understood that a corresponding limiting structure should be set between the first rotating part 214 and the first fixed part 213 to prevent the first rotating part 214 and the first fixed part 213 from exceeding the preset moving distance when relative rotation occurs, including but not limited to: a slide groove and a slider, a limiting part and a limiting block, etc.

[0040] In some preferred embodiments, the first motion assembly 21 further includes a first limiting portion 215, a portion of which is fixed to the first rotating portion 214, and another portion of which is located on the first fixing portion 213. The first fixing portion 213 further includes a first slider 2131. The first limiting portion 215 is provided with a first sliding hole 2151. One end of the first slider 2131 is fixed to the first fixing portion 213, and the other end of the first slider 2131 passes through and extends out of the first sliding hole 2151. The first sliding hole 2151 is arc-shaped, thereby guiding the sliding trajectory of the first slider 2131.

[0041] It can be understood that the rotatable angle of the first fixed portion 213 and the first rotating portion 214 is determined by the shape of the first sliding hole 2151, the sliding length, and the first sliding groove and the first sliding portion. It needs to be set according to actual needs and the working angle required by the detection device 1000. This embodiment will not illustrate them one by one.

[0042] In some embodiments, the first motion assembly 21 further includes a first screw (not labeled) and a first universal joint (not shown). One end of the first screw is connected to an external power device, which includes but is not limited to a motor, and the first screw can be driven by the power device to reciprocate along the first direction Y. The specific connection structure and positional relationship are not described one by one in this embodiment. The other end of the first screw is fixedly connected to the universal joint, which is rotatably connected to the first rotating part 214. The rotation of the first screw drives the first universal joint to reciprocate along the first direction Y. The first universal joint drives the first rotating part 214 to rotate and cause relative displacement and angular deflection along the first direction Y. The first universal joint includes but is not limited to a universal joint, etc.

[0043] For the second motion component 22 mentioned above, please refer to Figure 1 and Figure 3 The second motion component 22 includes a second telescopic rod 221 and a second sleeve 222. The second telescopic rod 221 and the second sleeve 222 are movably connected. Specifically, the second telescopic rod 221 is inserted into the second sleeve 222. The second sleeve 222 and the second telescopic rod 221 can move relative to each other, thereby realizing the movement of the second motion component 22 along the second direction X.

[0044] It is worth noting that the power source for driving the second telescopic rod 221 and the second sleeve 222 to move relative to each other includes but is not limited to pneumatic, hydraulic, motor, etc., and examples are not given one by one in this embodiment.

[0045] In some embodiments, the second motion assembly 22 includes a second fixed portion 223 and a second rotating portion 224 . The second rotating portion 224 is rotatably connected to the second fixed portion 223 , thereby forming an adjustable angular deflection between the second fixed portion 223 and the second rotating portion 224 .

[0046] It is worth noting that the structure for realizing the rotational connection between the second fixed portion 223 and the second rotating portion 224 should be such that a certain limit can be generated between the second fixed portion 223 and the second rotating portion 224 to prevent the second fixed portion 223 and the second rotating portion 224 from being disengaged or deviating from the preset trajectory during the rotation process. The specific rotation structure includes but is not limited to: a slide groove and a slider, etc. Preferably, this embodiment adopts a method of providing a second slide groove (not marked) on the second fixed portion 223 and a second sliding portion (not marked) on the second rotating portion 224, wherein the structure in which the second sliding portion and the second slide groove cooperate to form a limit for the second fixed portion 223 and the second rotating portion 224 along the extension direction perpendicular to the second slide groove, and the second sliding portion and the second slide groove are both arranged in an arc shape to form an angular deflection when the second fixed portion 223 and the second rotating portion 224 rotate.

[0047] It is understandable that a corresponding limiting structure should be set between the second rotating part 224 and the second fixed part 223 to prevent the first rotating part 214 and the second rotating part 224 from exceeding the preset moving distance when they rotate relative to each other, including but not limited to: a limiting part and a limiting block.

[0048] In some preferred embodiments, see Figure 3 The second motion assembly 22 further includes a second limiting portion 225. A portion of the second limiting portion 225 is fixed to the second rotating portion 224, while the other portion is located on the second fixing portion 223. The second fixing portion 223 further includes a second slider 2231. The second limiting portion 225 is provided with a second sliding hole 2251. One end of the second slider 2231 is fixed to the second fixing portion 223, and the other end of the second slider 2231 passes through and extends out of the second sliding hole 2251. The second sliding hole 2251 is arc-shaped, thereby guiding the sliding trajectory of the second slider 2231.

[0049] It can be understood that the rotatable angle of the second fixed portion 223 and the second rotating portion 224 is determined by the shape of the second sliding hole 2251, the sliding length, and the second sliding groove and the second sliding portion. It needs to be set according to actual needs and the working angle required by the detection device 1000. This embodiment will not give examples one by one.

[0050] In some embodiments, the second motion component 22 also includes a second screw (not marked) and a second universal joint (not shown). One end of the second screw is fixedly connected to an external power device, and the second screw can reciprocate along the second direction X under the drive of the power device. The power device includes but is not limited to a motor, etc. The specific connection structure and position relationship are no longer illustrated one by one in this embodiment. The other end of the second screw is fixedly connected to the second universal joint, and the second universal joint is rotatably connected to the second rotating part 224, and the second universal joint can also drive the second rotating part 224 to move. The second screw rotates to drive the second universal joint to reciprocate along the second direction X. The second universal joint drives the second rotating part 224 to rotate and cause relative displacement and generate angular deflection. The second universal joint includes but is not limited to a universal joint, etc.

[0051] It is worth noting that the first screw can be integrated into the first telescopic rod 211, and the second screw can be integrated into the second telescopic rod 221, thereby improving the integration of the first motion component 21 and the second motion component 22 and reducing the volume of the first motion component 21 and the second motion component 22. For example: a first channel is set inside the first telescopic rod 211, and the first screw is accommodated in the first channel. The movement of the first telescopic rod 211 is independent of the movement of the first screw and does not affect each other; a second channel is set inside the second telescopic rod 221, and the second screw is accommodated in the second channel. The movement of the second telescopic rod 221 is independent of the movement of the second screw and does not affect each other.

[0052] In some embodiments, the detection device 1000 further comprises a cover, which covers the imaging mechanism 1 and the motion mechanism 2. The cover is used to cover the top of the detection device 1000 to achieve the dustproof effect.

[0053] It is worth mentioning that the imaging effect of the imaging module 11 is affected by the external environmental light factor, so the cover can also realize the light shielding function of the detection assembly according to the adjustment of the material quality, for example, selecting a translucent or opaque material, so as to meet the shooting conditions required by different imaging assemblies.

[0054] In some embodiments, the detection device 1000 further comprises an anti-collision piece, which is sleeved on the outer surface of the imaging mechanism 1.

[0055] It can be understood that in order to achieve the anti-collision effect, the material of the anti-collision piece should be selected as an elastic material that can absorb impact force, including but not limited to rubber, silicone, high-density sponge, etc. And the anti-collision piece should not affect the imaging effect of the imaging assembly.

[0056] In some embodiments, the detection device 1000 further comprises a distance measuring assembly, which is fixed to the imaging mechanism 1. The distance measuring assembly is used to measure the distance between the imaging mechanism 1 and the to-be-detected piece.

[0057] It can be understood that the distance measuring assembly can be electrically connected with an external control device, which is used to control the distance measuring assembly to work, and receive and process the distance between the imaging mechanism 1 and the to-be-detected piece measured by the distance measuring assembly, so that the working activity range of the imaging mechanism 1 can be further accurately controlled in the working state of the detection device 1000, avoiding the collision between the imaging mechanism 1 and the to-be-detected piece.

[0058] In the embodiment of the utility model, the detection device 1000 comprises an imaging mechanism 1, a motion mechanism 2, a distance measuring assembly, an anti-collision piece and a cover. The imaging mechanism 1 is used to take pictures or videos of the to-be-detected piece. The imaging mechanism 1 is fixed to the motion mechanism 2. The motion mechanism 2 is used to drive the imaging mechanism 1 to move in different directions and at different angles, so as to realize the detection of the to-be-detected piece at different angles, improve the detection precision, and reduce the reduction of detection accuracy caused by possible visual errors of different visual angles. The distance measuring assembly is fixed to the imaging mechanism 1 and is used to detect the distance between the imaging mechanism 1 and the external device. The anti-collision piece is sleeved on the imaging mechanism 1 to absorb the impact force caused by the collision of the imaging mechanism 1 due to the misoperation. The cover covers the imaging mechanism 1 and the motion mechanism 2, so as to realize the dustproof and light shielding functions. The detection device 1000 is electrically connected with an external control device. The control device is used to compare the detection data generated by the detection device 1000 or manually compare and process.

[0059] The present invention also provides an embodiment of a lamination device, which includes a mounting frame and the above-mentioned detection device 1000. The detection device 1000 is fixed on the mounting frame. For the structure and function of the detection device 1000, please refer to the above-mentioned embodiment and will not be described in detail here.

[0060] It should be noted that the preferred embodiments of the present invention are given in the specification and drawings of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described in this specification. These embodiments do not serve as additional limitations on the content of the present invention. The purpose of providing these embodiments is to make the understanding of the disclosure of the present invention more thorough and comprehensive. In addition, the above-mentioned technical features continue to be combined with each other to form various embodiments not listed above, which are all considered to be within the scope of the description of the present invention; further, it is obvious to those skilled in the art that improvements or changes can be made based on the above description, and all such improvements and changes should fall within the scope of protection of the claims attached to the present invention.

Claims

1. A detection device, characterized in that: include The imaging mechanism includes an imaging module and a lens module. The imaging module is detachably fixed to the lens module. The lens module is used to capture and collect image data of the part to be inspected and transmit the corresponding image data to the imaging module for data comparison. A motion mechanism, the motion mechanism being fixed to the lens module and being used to drive the lens module to move; The motion mechanism includes a first motion component and a second motion component, the first motion component is connected to the second motion component, the first motion component drives the imaging mechanism to reciprocate along a first direction, and the second motion component drives the imaging mechanism to reciprocate along a second direction, wherein the first direction and the second direction are perpendicular.

2. The detection device according to claim 1, characterized in that The first motion assembly includes a first telescopic rod and a first sleeve, and the first telescopic rod and the first sleeve are movably connected; and / or The second motion assembly includes a second telescopic rod and a second sleeve, and the second telescopic rod and the second sleeve are movably connected.

3. The detection device according to claim 1, characterized in that The first motion assembly further includes a first fixed portion and a first rotating portion, the first rotating portion being rotatably connected to the first fixed portion; and / or The second motion assembly further includes a second fixed portion and a second rotating portion, wherein the second rotating portion is rotatably connected to the second fixed portion.

4. The detection device according to claim 3, characterized in that The first motion assembly further includes a first limiting portion, a portion of the first limiting portion is fixed to the first rotating portion, and another portion of the first limiting portion is located at the first fixed portion; The first fixing portion further includes a first sliding block; The first limiting portion is provided with a first sliding hole, one end of the first sliding block is fixed to the first fixing portion, and the other end of the first sliding block passes through and extends out of the first sliding hole.

5. The detection device according to claim 3, characterized in that The second motion assembly further includes a second limiting portion, a portion of the second limiting portion is fixed to the second rotating portion, and another portion of the second limiting portion is located at the second fixed portion; The second fixing portion further includes a second slider; The second limiting portion is provided with a second sliding hole, one end of the second sliding block is fixed to the second fixing portion, and the other end of the second sliding block passes through and extends out of the second sliding hole.

6. The detection device according to any one of claims 1 to 5, characterized in that: The detection device further comprises a cover shell, which covers the imaging mechanism and the movement mechanism.

7. The detection device according to any one of claims 1 to 5, characterized in that: The detection device further comprises an anti-collision member, which is sleeved on the outer surface of the imaging mechanism.

8. The detection device according to any one of claims 1 to 5, characterized in that: The detection device further comprises a distance measuring component, which is fixed to the imaging mechanism and is used to measure the distance between the imaging mechanism and the object to be detected.

9. A lamination device, characterized in that: It comprises a mounting plate and a detection device according to any one of claims 1 to 8, wherein the detection device is fixed to the mounting plate.

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