Projection objective lens and projection device

Abstract

The utility model discloses a projection objective lens and projection equipment, and relates to the technical field of optical projection, the projection objective lens is provided with an object side and an image side which are correspondingly arranged along the optical axis direction, the projection objective lens comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth projection lens, a tenth lens, an eleventh lens and an image plane which are sequentially arranged from the object side to the image side, the total length of the object image conjugate distance of the projection objective lens is L, and the effective view field of the image space is phi a, the projection objective lens satisfies the following conditions: L = 550mm; and phi a is less than or equal to 66mm. By means of the arrangement, it can be ensured that the projection objective lens has a large enough exposure view field in the using process, and the projection objective lens can bear high power.

Description

Technical Field

[0001] The utility model relates to the technical field of optical projection, in particular to a projection objective lens and a projection device. Background Art

[0002] With the development of the semiconductor industry, the demand for lithography systems is increasing. Projection lenses are a key component of these systems. The resolution of the projection lens determines process accuracy, while the power and exposure field of view of the projection lens determine process efficiency. A larger exposure field of view and higher power often significantly improve process efficiency.

[0003] However, the exposure field of existing projection objectives is too small to withstand high power. Utility Model Content

[0004] The main purpose of the utility model is to provide a projection objective lens and a projection device, aiming to improve the problem that the exposure field of the existing projection objective lens is too small and cannot withstand high power.

[0005] To achieve the above-mentioned object, the present invention provides a projection objective lens, which has an object side and an image side correspondingly arranged along the optical axis direction, and includes a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens, a tenth lens, an eleventh lens, and an image plane, which are arranged in sequence from the object side to the image side;

[0006] The total length of the object-image conjugate distance of the projection objective is L, and the effective field of view on the image side is The projection objective lens meets the following conditions:

[0007] L = 550 mm;

[0008] In one embodiment, the optical power of the first lens is

[0009] The optical power of the second lens is

[0010] The optical power of the third lens is

[0011] The optical power of the fourth lens is

[0012] The optical power of the fifth lens is

[0013] The optical power of the sixth lens is

[0014] The optical power of the seventh lens is

[0015] The optical power of the eighth lens is

[0016] The optical power of the ninth lens is

[0017] The optical power of the tenth lens is

[0018] The optical power of the eleventh lens is

[0019] In one embodiment, the refractive index of the first lens is n1, 1.60≤n1≤1.68;

[0020] The refractive index of the second lens is n2, 1.62≤n2≤1.68;

[0021] The refractive index of the third lens is n3, 1.60≤n3≤1.68;

[0022] The refractive index of the fourth lens is n4, 1.45≤n4≤1.48;

[0023] The refractive index of the fifth lens is n5, 1.60≤n5≤1.67;

[0024] The refractive index of the sixth lens is n6, 1.50≤n6≤1.55;

[0025] The refractive index of the seventh lens is n7, 1.60≤n7≤1.68;

[0026] The refractive index of the eighth lens is n8, 1.45≤n8≤1.50;

[0027] The refractive index of the ninth lens is n9, 1.60≤n9≤1.63;

[0028] The refractive index of the tenth lens is n10, 1.50≤n10≤1.55;

[0029] The refractive index of the eleventh lens is n11, 1.45≤n11≤1.50.

[0030] In one embodiment, the Abbe coefficient of the first lens is v1, 30≤v1≤38;

[0031] The dispersion coefficient of the second lens is v2, 32≤v2≤38;

[0032] The Abbe coefficient of the third lens is v3, 30≤v3≤38;

[0033] The Abbe coefficient of the fourth lens is v4, 60≤v4≤68;

[0034] The Abbe coefficient of the fifth lens is v5, 34≤v5≤37;

[0035] The Abbe coefficient of the sixth lens is v6, 75≤v6≤83;

[0036] The Abbe coefficient of the seventh lens is v7, 30≤v7≤38;

[0037] The Abbe coefficient of the eighth lens is v8, 65≤v8≤70;

[0038] The dispersion coefficient of the ninth lens is v9, 40≤v9≤45;

[0039] The Abbe coefficient of the tenth lens is v10, 75≤v10≤85;

[0040] The dispersion coefficient of the eleventh lens is v11, 60≤v11≤70.

[0041] In one embodiment, the object side radius of the first lens is R11, the image side radius is R12, 400mm≤R11≤500mm, -100mm≤R12≤-60mm;

[0042] The object side radius of the second lens is R21, and the image side radius is R22, 50mm≤R21≤120mm, 80mm≤R22≤150mm;

[0043] The object side radius of the third lens is R31, the image side radius is R32, -80mm≤R31≤-30mm, 800mm≤R32≤900mm;

[0044] The object side radius of the fourth lens is R41, and the image side radius is R42, 50mm≤R41≤100mm, -60mm≤R42≤-20mm;

[0045] The object side radius of the fifth lens is R51, and the image side radius is R52, -30mm≤R51≤-10mm, -40mm≤R52≤-10mm;

[0046] The object side radius of the sixth lens is R61, and the image side radius is R62, 80mm≤R61≤130mm, -40mm≤R62≤-25mm;

[0047] The object side radius of the seventh lens is R71, and the image side radius is R72, 30mm≤R71≤50mm, -40mm≤R72≤-20mm;

[0048] The object side radius of the eighth lens is R81, the image side radius is R82, -50mm≤R81≤-30mm, 50mm≤R82≤80mm;

[0049] The object side radius of the ninth lens is R91, the image side radius is R92, -50mm≤R91≤-20mm, -800mm≤R92≤-500mm;

[0050] The object side radius of the tenth lens is R101, the image side radius is R102, 450mm≤R101≤600mm, -200mm≤R102≤-150mm;

[0051] The object side radius of the eleventh lens is R111, and the image side radius is R112, 150mm≤R111≤200mm, 800mm≤R112≤900mm.

[0052] In one embodiment, the design wavelength of the projection objective lens is λ, 370nm≤λ≤410nm.

[0053] In one embodiment, the main wavelength telecentricity of the object-image side of the projection objective lens is A, -0.15°≤A≤0.15°.

[0054] In one embodiment, the object-side numerical aperture of the projection objective lens is NA, and NA≤0.1.

[0055] In one embodiment, the projection objective lens further includes an aperture and a protective glass, wherein the aperture is spaced between the fifth lens and the sixth lens, and the protective glass is spaced between the eleventh lens and the image plane.

[0056] The utility model also provides a projection device, comprising the above-mentioned projection objective lens.

[0057] In the technical solution of the present utility model, by rationally designing the first lens, the second lens, the third lens, the fourth lens, the fifth lens, the sixth lens, the seventh lens, the eighth lens, the ninth lens, the tenth lens, and the eleventh lens, a projection objective lens having a total object-image conjugate length of 550 mm is obtained, so that the image-side effective field of view of the projection objective lens can reach 66 mm, thereby ensuring that the projection objective lens has a sufficiently large exposure field of view during use and enabling the projection objective lens to withstand high power. BRIEF DESCRIPTION OF THE DRAWINGS

[0058] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0059] Figure 1 A schematic structural diagram of an embodiment of a projection objective lens provided by the present utility model;

[0060] Figure 2 for Figure 1 Schematic diagram of the MTF of the projection objective at 20°C;

[0061] Figure 3 for Figure 1 Schematic diagram of the MTF of the projection objective at 60°C;

[0062] Figure 4 for Figure 1 Schematic diagram of the full field of view distortion of the projection objective.

[0063] Description of Figure Numbers:

[0064] 100. Projection objective lens; 1. First lens; 2. Second lens; 3. Third lens; 4. Fourth lens; 5. Fifth lens; 6. Sixth lens; 7. Seventh lens; 8. Eighth lens; 9. Ninth lens; 10. Tenth lens; 11. Eleventh lens; 12. Aperture stop; 13. Protective glass.

[0065] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0066] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0067] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0068] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of such features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme in which A and B are satisfied at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0069] The utility model provides a projection objective lens, which aims to improve the problem that the existing projection objective lens has a too small exposure field and cannot withstand high power.

[0070] In one embodiment of the present invention, the projection objective lens 100 has an object side and an image side correspondingly arranged along the optical axis direction. The projection objective lens 100 includes a first lens 1, a second lens 2, a third lens 3, a fourth lens 4, a fifth lens 5, a sixth lens 6, a seventh lens 7, an eighth lens 8, a ninth lens 9, a tenth lens 10, an eleventh lens 11 and an image plane arranged in sequence from the object side to the image side. The total length of the object-image conjugate distance of the projection objective lens 100 is L, the effective field of view on the image side is φa, and the projection objective lens 100 meets the following conditions: L=550mm; φa≤66mm.

[0071] In the technical solution of the present utility model, by rationally designing the first lens 1, the second lens 2, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6, the seventh lens 7, the eighth lens 8, the ninth lens 9, the tenth lens 10, and the eleventh lens 11, a projection objective lens 100 having a total object-image conjugate length of 550 mm is obtained, so that the image-side effective field of view of the projection objective lens 100 can reach 66 mm, thereby ensuring that the projection objective lens 100 has a sufficiently large exposure field of view during use and enabling the projection objective lens 100 to withstand high power.

[0072] It should be noted that, in order to reduce the material cost and manufacturing cost of the projection objective lens 100, in an embodiment of the present invention, the first lens 1, the second lens 2, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6, the seventh lens 7, the eighth lens 8, the ninth lens 9, the tenth lens 10 and the eleventh lens 11 are all configured as spherical lenses. With this configuration, the spherical lenses are easy to process, can ensure low processing costs, have low assembly sensitivity, and improve the yield rate of finished products.

[0073] Furthermore, in one embodiment of the present invention, the focal power of the first lens 1 is φ1, 0.008≤φ1≤0.010; the focal power of the second lens 2 is φ2, 0.003≤φ2≤0.005; the focal power of the third lens 3 is φ3, -0.020≤φ3≤-0.014; the focal power of the fourth lens 4 is φ4, 0.012≤φ4≤0.016; the focal power of the fifth lens 5 is φ5, -0.003≤φ5≤-0.001; the focal power of the sixth lens 6 is φ7, -0.003≤φ7≤-0.001; The focal power is φ6, 0.002≤φ6≤0.004; the optical focal power of the seventh lens 7 is φ7, -0.040≤φ7≤-0.020; the optical focal power of the eighth lens 8 is φ8, -0.030≤φ8≤-0.015; the optical focal power of the ninth lens 9 is φ9, 0.004≤φ9≤0.006; the optical focal power of the tenth lens 10 is φ10, 0.003≤φ10≤0.005; and the optical focal power of the eleventh lens 11 is φ11, 0.001≤φ11≤0.002.

[0074] It should be noted that the present invention does not limit the specific values ​​of the optical powers of the first lens 1, the second lens 2, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6, the seventh lens 7, the eighth lens 8, the ninth lens 9, the tenth lens 10, and the eleventh lens 11.

[0075] For example, in one embodiment of the present invention, the optical power φ1 of the first lens 1 can be set to 0.0080, 0.0081, 0.0082, 0.0083, 0.0084, 0.0085, 0.0086, 0.0087, 0.0088, 0.0089, 0.0090, etc.

[0076] The optical power φ2 of the second lens 2 can be set to 0.0030, 0.0031, 0.0032, 0.0033, 0.0034, 0.0035, 0.0036, 0.0037, 0.0038, 0.0039, 0.0040, ...

[0077] The focal power φ3 of the third lens 3 can be set to -0.020, -0.019, -0.018, -0.017, -0.016, -0.015, etc.

[0078] The optical power φ4 of the fourth lens 4 can be set to 0.012, 0.013, 0.014, 0.015, ...

[0079] The optical power φ5 of the fifth lens 5 can be set to -0.0030, -0.0029, -0.0028, -0.0027, -0.0026, -0.0025, -0.0024, -0.0023, -0.0022, -0.0021, -0.0020, ...

[0080] The optical power φ6 of the sixth lens 6 can be set to 0.0020, 0.0021, 0.0022, 0.0023, 0.0024, 0.0025, 0.0026, 0.0027, 0.0028, 0.0029, 0.0030, ...

[0081] The optical power φ7 of the seventh lens 7 can be set to -0.040, -0.039, -0.038, -0.037, -0.036, -0.035, -0.034, -0.033, -0.032, -0.031, -0.030, etc.

[0082] The optical power φ8 of the eighth lens 8 can be set to -0.030, -0.029, -0.028, -0.027, -0.026, -0.025, -0.024, -0.023, -0.022, -0.021, -0.020, etc.

[0083] The optical power φ9 of the ninth lens 9 can be set to 0.0040, 0.0041, 0.0042, 0.0043, 0.0044, 0.0045, 0.0046, 0.0047, 0.0048, 0.0049, 0.0050, etc.

[0084] The optical power φ10 of the tenth lens 10 can be set to 0.0030, 0.0031, 0.0032, 0.0033, 0.0034, 0.0035, 0.0036, 0.0037, 0.0038, 0.0039, 0.0040, ...

[0085] The optical power φ11 of the eleventh lens 11 can be set to 0.0010, 0.0011, 0.0012, 0.0013, 0.0014, 0.0015, 0.0016, 0.0017, 0.0018, 0.0019, ...

[0086] Of course, in other embodiments of the present invention, the optical power of the first lens 1, the second lens 2, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6, the seventh lens 7, the eighth lens 8, the ninth lens 9, the tenth lens 10, and the eleventh lens 11 can also be set to other values. It only needs to ensure that the optical power of each lens is within the corresponding range, and the present invention does not impose any limitation on this.

[0087] In addition, in a further embodiment of the present invention, the refractive index of the first lens 1 is n1, 1.60≤n1≤1.68; the refractive index of the second lens 2 is φ2, 1.62≤n2≤1.68; the refractive index of the third lens 3 is n3, 1.60≤n3≤1.68; the refractive index of the fourth lens 4 is n4, 1.45≤n4≤1.48; the refractive index of the fifth lens 5 is n5, 1.60≤n5≤1.67; the refractive index of the sixth lens 6 is n4, 1.60≤n5≤1.67; The refractive index is n6, 1.50≤n6≤1.55; the refractive index of the seventh lens element 7 is n7, 1.60≤n7≤1.68; the refractive index of the eighth lens element 8 is n8, 1.45≤n8≤1.50; the refractive index of the ninth lens element 9 is n9, 1.60≤n9≤1.63; the refractive index of the tenth lens element 10 is n10, 1.50≤n10≤1.55; and the refractive index of the eleventh lens element 11 is n11, 1.45≤n11≤1.50.

[0088] It is understandable that the present invention does not limit the specific values ​​of the refractive indices of the first lens 1, the second lens 2, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6, the seventh lens 7, the eighth lens 8, the ninth lens 9, the tenth lens 10, and the eleventh lens 11. For example, the refractive index n1 of the first lens 1 can be set to 1.60, 161, 162, 163, 164, 165, 166, 167, etc.

[0089] The refractive index n2 of the second lens 2 can be set to 162, 163, 164, 165, 166, 167, ...

[0090] The refractive index n3 of the third lens 3 can be set to 1.60, 161, 162, 163, 164, 165, 166, 167, ...

[0091] The refractive index n4 of the fourth lens 4 can be set to 1.45, 1.46, 1.47, ...

[0092] The refractive index n5 of the fifth lens 5 can be set to 1.60, 161, 162, 163, 164, 165, 166, ...

[0093] The refractive index n6 of the sixth lens 6 can be set to 1.50, 1.51, 1.52, 1.53, 1.54, ...

[0094] The refractive index n7 of the seventh lens 7 can be set to 1.60, 161, 162, 163, 164, 165, 166, 167, ...

[0095] The refractive index n8 of the eighth lens 8 can be set to 1.45, 1.46, 1.47, 1.48, 1.49, ...

[0096] The refractive index n9 of the ninth lens 9 can be set to 1.60, 161, 162, ...

[0097] The refractive index n10 of the tenth lens 10 can be set to 1.50, 1.51, 1.52, 1.53, 1.54, ...

[0098] The refractive index n11 of the eleventh lens 11 can be set to 1.45, 1.46, 1.47, 1.48, 1.49, ...

[0099] Similarly, in other embodiments of the present invention, the refractive indices of the first lens 1, the second lens 2, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6, the seventh lens 7, the eighth lens 8, the ninth lens 9, the tenth lens 10, and the eleventh lens 11 may also be set to other values. It is only necessary to ensure that the refractive index of each lens is within the corresponding range. The specific value can be selected according to actual needs during the actual setting.

[0100] It should also be noted that, in another embodiment of the present invention, the dispersion coefficient of the first lens 1 is v1, 30≤v1≤38; the dispersion coefficient of the second lens 2 is v2, 32≤v2≤38; the dispersion coefficient of the third lens 3 is v3, 30≤v3≤38; the dispersion coefficient of the fourth lens 4 is v4, 60≤v4≤68; the dispersion coefficient of the fifth lens 5 is v5, 34≤v5≤37; and the dispersion coefficient of the sixth lens The dispersion coefficient of the mirror 6 is v6, 75≤v6≤83; the dispersion coefficient of the seventh lens 7 is v7, 30≤v7≤38; the dispersion coefficient of the eighth lens 8 is v8, 65≤v8≤70; the dispersion coefficient of the ninth lens 9 is v9, 40≤v9≤45; the dispersion coefficient of the tenth lens 10 is v10, 75≤v10≤85; and the dispersion coefficient of the eleventh lens 11 is v11, 60≤v11≤70.

[0101] The present invention also does not limit the specific values ​​of the Abbe coefficients of the first lens 1, the second lens 2, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6, the seventh lens 7, the eighth lens 8, the ninth lens 9, the tenth lens 10, and the eleventh lens 11. For example, the Abbe coefficient v1 of the first lens 1 can be set to 30, 31, 32, 33, 34, 35, 36, 37, etc.

[0102] The dispersion coefficient v2 of the second lens 2 can be set to 32, 33, 34, 35, 36, 37, ...

[0103] The dispersion coefficient v3 of the third lens 3 can be set to 30, 31, 32, 33, 34, 35, 36, 37, ...

[0104] The dispersion coefficient v4 of the fourth lens 4 can be set to 60, 61, 62, 63, 64, 65, 66, 67, ...

[0105] The dispersion coefficient v5 of the fifth lens 5 can be set to 34, 35, 36, ...

[0106] The dispersion coefficient v6 of the sixth lens 6 can be set to 75, 76, 77, 78, 79, 80, 81, 82, ...

[0107] The dispersion coefficient v7 of the seventh lens 7 can be set to 30, 31, 32, 33, 34, 35, 36, 37, ...

[0108] The dispersion coefficient v8 of the eighth lens 8 can be set to 65, 66, 67, 68, 69, etc.

[0109] The dispersion coefficient v9 of the ninth lens 9 can be set to 40, 41, 42, 43, 44, etc.

[0110] The dispersion coefficient v10 of the tenth lens 10 can be set to 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, etc.

[0111] The Abbe coefficient v11 of the eleventh lens 11 can be set to 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, ...

[0112] Similarly, in other embodiments of the present invention, the chromatic aberration coefficients of the first lens 1, the second lens 2, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6, the seventh lens 7, the eighth lens 8, the ninth lens 9, the tenth lens 10, and the eleventh lens 11 may also be set to other values. It is only necessary to ensure that the chromatic aberration coefficient of each lens is within the corresponding range. The specific values ​​can be selected according to actual needs during the actual setting.

[0113] In addition, in another embodiment of the present invention, the radius of the object side surface of the first lens 1 is R11, and the radius of the image side surface is R12, 400mm≤R11≤500mm, -100mm≤R12≤-60mm; the radius of the object side surface of the second lens 2 is R21, and the radius of the image side surface is R22, 50mm≤R21≤120mm, 80mm≤R22≤150mm; the radius of the object side surface of the third lens 3 is R31, and the radius of the image side surface is R32, -80mm≤R 31≤-30mm, 800mm≤R32≤900mm; the object side radius of the fourth lens 4 is R41, the image side radius is R42, 50mm≤R41≤100mm, -60mm≤R42≤-20mm; the object side radius of the fifth lens 5 is R51, the image side radius is R52, -30mm≤R51≤-10mm, -40mm≤R52≤-10mm; the object side radius of the sixth lens 6 is R61, the image side radius is R62 , 80mm≤R61≤130mm, -40mm≤R62≤-25mm; the object side radius of the seventh lens 7 is R71, the image side radius is R72, 30mm≤R71≤50mm, -40mm≤R72≤-20mm; the object side radius of the eighth lens 8 is R81, the image side radius is R82, -50mm≤R81≤-30mm, 50mm≤R82≤80mm; the object side radius of the ninth lens 9 is R91, the image side radius The object side radius of the tenth lens 10 is R101, and the image side radius is R102, 450mm≤R101≤600mm, -200mm≤R102≤-150mm; the object side radius of the eleventh lens 11 is R111, and the image side radius is R112, 150mm≤R111≤200mm, 800mm≤R112≤900mm.

[0114] Of course, in the embodiment of the present invention, the object side radius R11 of the first lens 1 can be set to 400mm, 410mm, 420mm, 430mm, 440mm, 450mm, 460mm, 470mm, 480mm, 490mm... and the image side radius R12 can be set to -100mm, -90mm, -90mm, -80mm, -70mm...

[0115] The object side radius R21 of the second lens 2 can be set to 50mm, 60mm, 70mm, 80mm, 90mm, 100mm, 110mm... The image side radius R22 can be set to 80mm, 90mm, 100mm, 110mm, 120mm, 130mm, 140mm...

[0116] The object side radius R31 of the third lens 3 can be set to -80mm, -70mm, -60mm, -50mm, -40mm... The image side radius R32 can be set to 800mm, 810mm, 820mm, 830mm, 840mm, 850mm, 860mm, 870mm, 880mm, 890mm...

[0117] The object side radius R41 of the fourth lens 4 can be set to 50mm, 60mm, 70mm, 80mm, 90mm... The image side radius R42 can be set to -60mm, -50mm, -40mm, -30mm...

[0118] The object side radius R51 of the fifth lens 5 can be set to -30 mm, -20 mm, etc. The image side radius R52 can be set to -40 mm, -30 mm, -20 mm, etc.

[0119] The object side radius R61 of the sixth lens 6 can be set to 80 mm, 90 mm, 100 mm, 110 mm, 120 mm, etc. The image side radius R62 can be set to -40 mm, -30 mm, etc.

[0120] The object side radius R71 of the seventh lens 7 can be set to 30 mm, 40 mm, etc. The image side radius R72 can be set to -40 mm, -30 mm, etc.

[0121] The object side radius R81 of the eighth lens 8 can be set to -50 mm, -40 mm, etc. The image side radius R82 can be set to 50 mm, 60 mm, 70 mm, etc.

[0122] The object side radius R91 of the ninth lens 9 can be set to -50mm, -40mm, -30mm... The image side radius R92 can be set to -800mm, -790mm, -780mm, -770mm, -760mm, -750mm, -740mm, -730mm, -720mm, -710mm, -700mm...

[0123] The object side radius R101 of the tenth lens 10 can be set to 450mm, 460mm, 470mm, 480mm, 490mm, 500mm, 510mm, 520mm, 530mm, 540mm, 550mm, 560mm, 570mm, 580mm, 590mm... The image side radius R102 can be set to -200mm, -190mm, 0mm, -180mm, -170mm, -160mm...

[0124] The five side surface radius R111 of the eleventh lens 11 can be set to 150 mm, 160 mm, 170 mm, 180 mm, 190 mm, etc. The image side surface radius R112 can be set to 800 mm, 810 mm, 820 mm, 830 mm, 840 mm, 850 mm, 860 mm, 870 mm, 880 mm, 890 mm, etc.

[0125] Similarly, in other embodiments of the present invention, the object-side radius and image-side radius of the first lens 1, the second lens 2, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6, the seventh lens 7, the eighth lens 8, the ninth lens 9, the tenth lens 10, and the eleventh lens 11 may also be set to other values. It is only necessary to ensure that the object-side radius and the image-side radius of each lens are within the corresponding range. The specific values ​​can be selected according to needs during actual setting.

[0126] It should be further explained that, in order to further improve the accuracy of the projection objective lens 100 , in one embodiment of the present invention, the design wavelength of the projection objective lens 100 is λ, 370 nm ≤ λ ≤ 410 nm.

[0127] Furthermore, in another embodiment of the present invention, the main wavelength telecentricity of the object-image side of the projection objective lens 100 is A, -0.15°≤A≤0.15°.

[0128] In another embodiment of the present invention, the object-side numerical aperture of the projection objective lens 100 is NA, NA≤0.1. It is understood that such a setting can ensure the high resolution of the projection objective lens 100, so that the projection objective lens 100 maintains high resolution while ensuring its conjugate distance.

[0129] In other embodiments of the present invention, the projection objective lens 100 further includes an aperture 12 and a protective glass 13. The aperture 12 is interposed between the fifth lens 5 and the sixth lens 6, and the protective glass 13 is interposed between the eleventh lens 11 and the image plane. The aperture 12 limits the aperture of the light beam on the optical axis, ensuring the required resolution while improving the imaging quality of the projection objective lens 100. Furthermore, the protective glass 13 provides effective protection for the lens end closest to the image plane.

[0130] In a specific embodiment of the present invention, the radius, center distance, refractive index and Abbe number of each side surface of the multiple lenses in the projection objective lens 100 are shown in Table 1 below:

[0131] Table 1

[0132] radius Center distance Refractive index / Abbe number OBJ infinity 1 infinity 12.00 2 430.735 4.75 1.6539 36.4308 3 -85.770 0.10 4 60.187 9.16 1.6539 36.4308 5 105.315 33.31 6 -42.212 2.00 1.6539 36.4308 7 850.583 0.10 8 88.449 12.00 1.4707 67.8214 9 -43.020 22.50 10 -12.517 2.00 1.6539 36.4308 11 -20.869 0.10 STO infinity 0.10 13 30.006 4.14 1.5082 81.6128 14 -35.897 2.49 15 -32.410 11.72 1.6539 36.4308 16 55.401 31.31 17 -20.466 11.10 1.4707 67.7950 18 -800.827 50.65 19 -168.332 7.75 1.6093 40.8860 20 -70.804 2.06 21 497.507 7.33 1.5082 81.6128 22 -179.860 50.05 23 189.779 5.27 1.4707 67.8214 24 820.889 3.00 25 infinity 3.00 1.4707 67.8214 26 infinity 1.00 IMG

[0133] Please note that Figure 2-3 ,like Figure 2-3 As shown, in this embodiment, the projection objective lens 100 has an MTF greater than 0.6 contrast at 50 lp / mm when the temperatures are 20° C. and 60° C., respectively.

[0134] See also Figure 4 , Figure 4 is a schematic diagram of the full field distortion of the projection objective lens 100, as shown in Figure 4 As shown, the distortion of the projection objective lens 100 in the entire field of view is less than 3 μm.

[0135] The present invention also provides a projection device, which includes a projection objective lens 100. The specific structure of the projection objective lens 100 refers to the above embodiment. Since the present projection device adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be described one by one here.

[0136] The above description is merely an exemplary embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made using the contents of the present invention specification and drawings under the technical concept of the present invention, or direct / indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A projection objective lens, characterized in that: The projection objective lens has an object side and an image side correspondingly arranged along the optical axis direction, and the projection objective lens includes a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens, a tenth lens, an eleventh lens and an image plane arranged in sequence from the object side to the image side; The total length of the object-image conjugate distance of the projection objective is L, the effective field of view on the image side is φa, and the projection objective satisfies the following conditions: L=550mm;φa≤66mm.

2. The projection objective according to claim 1, wherein The optical power of the first lens is φ1, 0.008≤φ1≤0.010; The optical power of the second lens is φ2, 0.003≤φ2≤0.005; The focal power of the third lens is φ3, -0.020≤φ3≤-0.014; The optical power of the fourth lens is φ4, 0.012≤φ4≤0.016; The optical power of the fifth lens is φ5, -0.003≤φ5≤-0.001; The optical power of the sixth lens is φ6, 0.002≤φ6≤0.004; The optical power of the seventh lens is φ7, -0.040≤φ7≤-0.020; The optical power of the eighth lens is φ8, -0.030≤φ8≤-0.015; The optical power of the ninth lens is φ9, 0.004≤φ9≤0.006; The optical power of the tenth lens is φ10, 0.003≤φ10≤0.005; The optical power of the eleventh lens is φ11, 0.001≤φ11≤0.

002.

3. The projection objective lens according to claim 1, wherein The refractive index of the first lens is n1, 1.60≤n1≤1.68; The refractive index of the second lens is n2, 1.62≤n2≤1.68; The refractive index of the third lens is n3, 1.60≤n3≤1.68; The refractive index of the fourth lens is n4, 1.45≤n4≤1.48; The refractive index of the fifth lens is n5, 1.60≤n5≤1.67; The refractive index of the sixth lens is n6, 1.50≤n6≤1.55; The refractive index of the seventh lens is n7, 1.60≤n7≤1.68; The refractive index of the eighth lens is n8, 1.45≤n8≤1.50; The refractive index of the ninth lens is n9, 1.60≤n9≤1.63; The refractive index of the tenth lens is n10, 1.50≤n10≤1.55; The refractive index of the eleventh lens is n11, 1.45≤n11≤1.

50.

4. The projection objective according to claim 1, wherein The dispersion coefficient of the first lens is v1, 30≤v1≤38; The dispersion coefficient of the second lens is v2, 32≤v2≤38; The Abbe coefficient of the third lens is v3, 30≤v3≤38; The Abbe coefficient of the fourth lens is v4, 60≤v4≤68; The Abbe coefficient of the fifth lens is v5, 34≤v5≤37; The Abbe coefficient of the sixth lens is v6, 75≤v6≤83; The Abbe coefficient of the seventh lens is v7, 30≤v7≤38; The Abbe coefficient of the eighth lens is v8, 65≤v8≤70; The dispersion coefficient of the ninth lens is v9, 40≤v9≤45; The Abbe coefficient of the tenth lens is v10, 75≤v10≤85; The dispersion coefficient of the eleventh lens is v11, 60≤v11≤70.

5. The projection objective lens according to claim 1, wherein The object side radius of the first lens is R11, the image side radius is R12, 400mm≤R11≤500mm, -100mm≤R12≤-60mm; The object side radius of the second lens is R21, and the image side radius is R22, 50mm≤R21≤120mm, 80mm≤R22≤150mm; The object side radius of the third lens is R31, the image side radius is R32, -80mm≤R31≤-30mm, 800mm≤R32≤900mm; The object side radius of the fourth lens is R41, and the image side radius is R42, 50mm≤R41≤100mm, -60mm≤R42≤-20mm; The object side radius of the fifth lens is R51, and the image side radius is R52, -30mm≤R51≤-10mm, -40mm≤R52≤-10mm; The object side radius of the sixth lens is R61, and the image side radius is R62, 80mm≤R61≤130mm, -40mm≤R62≤-25mm; The object side radius of the seventh lens is R71, and the image side radius is R72, 30mm≤R71≤50mm, -40mm≤R72≤-20mm; The object side radius of the eighth lens is R81, the image side radius is R82, -50mm≤R81≤-30mm, 50mm≤R82≤80mm; The object side radius of the ninth lens is R91, the image side radius is R92, -50mm≤R91≤-20mm, -800mm≤R92≤-500mm; The object side radius of the tenth lens is R101, the image side radius is R102, 450mm≤R101≤600mm, -200mm≤R102≤-150mm; The object side radius of the eleventh lens is R111, and the image side radius is R112, 150mm≤R111≤200mm, 800mm≤R112≤900mm.

6. The projection objective according to claim 1, wherein The design wavelength of the projection objective lens is λ, 370nm≤λ≤410nm.

7. The projection objective according to claim 1, wherein The main wavelength telecentricity of the object-image side of the projection objective lens is A, -0.15°≤A≤0.15°.

8. The projection objective according to claim 1, wherein The object side numerical aperture of the projection objective lens is NA, and NA≤0.

1.

9. The projection objective according to claim 1, wherein The projection objective lens further includes an aperture and a protective glass. The aperture is spaced between the fifth lens and the sixth lens, and the protective glass is spaced between the eleventh lens and the image plane.

10. A projection device, characterized in that: Comprising the projection objective as claimed in any one of claims 1 to 9.

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