Substrate conveying system

Abstract

The utility model discloses a substrate conveying system, which is connected to a process chamber with a vacuum atmosphere and comprises a loading cavity, and the side wall of the loading cavity is provided with a conveying port used for being connected with the process chamber so as to communicate the loading cavity with the process chamber and form a conveying path; the arm unit is arranged in the loading cavity; the first-stage transmission unit comprises a moving part capable of moving along a conveying path; the second-stage transmission unit comprises a first transmission part which is connected with the moving part and synchronously moves along with the moving part; one end of the first transmission belt is fixedly arranged in the loading cavity, and the other end is fixedly arranged on the base part through a first transmission piece; the first transmission part synchronously moves along with the moving part and drives the first transmission belt to drag the base part to generate relative displacement with the moving part along the transmission path so as to transmit the substrate to the process chamber. According to the utility model, the stroke of the vacuum manipulator can be amplified in a limited space, so that the vacuum manipulator can obtain a longer touch degree, and the vacuum manipulator can reach a station with a longer distance.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a substrate conveying system. Background Art

[0002] The substrate transfer system includes an atmospheric transfer module for transferring substrates in an atmospheric environment, a vacuum transfer module for transferring substrates in a vacuum environment, and a load lock chamber connecting the vacuum transfer module and the atmospheric transfer device. A known vacuum transfer module includes a device in which multiple vacuum transfer robots are installed in the vacuum transfer chamber, corresponding to multiple process modules performing various processes, and substrate loading tables are provided between adjacent vacuum transfer robots. In this substrate transfer system, substrates are transferred from the atmospheric transfer module to the load lock chamber. The vacuum transfer robot then transfers the substrates into the load lock chamber. The vacuum transfer robot then transfers the substrates into the process modules.

[0003] In the prior art, the spatial range within the chamber is constant, so the range of motion of the robot within the chamber is fixed, and it cannot be applied to workstations with longer distances.

[0004] Therefore, it is necessary to provide a new substrate conveying system to solve the above problems existing in the prior art. Utility Model Content

[0005] The purpose of the utility model is to provide a substrate conveying system for conveying substrates, which can amplify the stroke of a vacuum robot in a limited space, so that the vacuum robot has a longer reach and can reach a workstation at a longer distance.

[0006] To achieve the above purpose, the technical solution of the utility model is as follows:

[0007] A substrate transfer system is connected to a process chamber with a vacuum atmosphere, comprising:

[0008] A loading chamber, the side wall of which has a transfer port for connecting with the process chamber to connect the loading chamber and the process chamber and form a transfer path;

[0009] an arm unit, movably disposed in the loading chamber along a conveying path, comprising a base and a finger portion, wherein the finger portion is used to carry the substrate;

[0010] a primary transmission unit, disposed in the loading chamber and comprising a moving part movable along a transmission path;

[0011] Secondary transmission unit, including:

[0012] a first transmission member connected to the moving member and moving synchronously with the moving member;

[0013] a first transmission belt, one end of which is fixedly disposed in the loading cavity, and the other end of which is fixedly disposed in the base through the first transmission member, and at least a portion of the first transmission belt is wrapped around the outer wall of the first transmission member;

[0014] In the working state, the substrate is placed on the finger part, the moving part is driven to extend from the transfer port along the transfer path, the first transmission part moves synchronously with the moving part, and the first transmission part drives the first transmission belt to drag the base along the transfer path to generate relative displacement with the moving part, thereby transferring the substrate to the process chamber.

[0015] By adopting the above-mentioned technical features, the first-level transmission unit and the second-level transmission unit cooperate to increase the stroke of the arm unit, wherein the first-level transmission unit drives the arm unit and the second-level transmission unit to move relative to the loading cavity, and the second-level transmission unit drives the arm unit to move relative to the first-level transmission unit, thereby enabling the arm unit to obtain a longer reach within a limited space.

[0016] Optionally, a fixing member is fixedly provided in the loading cavity; one end of the first transmission belt is fixedly provided on the fixing member, and the other end is fixedly provided on the base through the first transmission member; the first transmission member moves synchronously with the moving member and approaches the fixing member along the transmission path.

[0017] By adopting the above technical solution, a fixed part is set, and when the first transmission belt drives the finger part to extend from the transmission port along the transmission path, it drives the base part to approach the first transmission part, thereby realizing the secondary movement of the base part on the moving part.

[0018] Optionally, the secondary transmission unit further includes a first sliding portion and a first sliding member, wherein the first sliding member is slidably disposed on the first sliding portion;

[0019] The first sliding portion and the first sliding member are fixedly disposed on the moving member and the base, respectively, so that the arm unit can move on the moving member.

[0020] By adopting the above technical solution, the arm unit can move on the moving part through the cooperation of a sliding part and the first sliding part, thereby facilitating the position movement of the arm unit on the moving part relative to the moving part.

[0021] Optionally, the secondary transmission unit further includes:

[0022] a second transmission member connected to the moving member and spaced apart from the first transmission member along the transmission path, and moving synchronously with the moving member;

[0023] a second transmission belt, one end of which is fixedly mounted on the fixing member, and the other end of which is fixedly mounted on the base via the second transmission member, and at least a portion of the second transmission belt is wrapped around an outer wall of the second transmission member;

[0024] In the working state, the moving part is driven to retract from the conveying port along the conveying path, and the second transmission part moves synchronously with the moving part and moves away from the fixed part along the conveying path; the second transmission part drives the second transmission belt to drag the base along the conveying path to produce relative displacement with the moving part, so that the arm unit is retracted into the loading cavity.

[0025] By adopting the above technical solution, when the arm unit retracts, the second transmission member drives the second transmission belt to drag the base along the transmission path to produce relative displacement with the moving member, so that the arm unit retracts into the loading cavity.

[0026] Optionally, the primary transmission unit further includes a bottom plate, a second sliding portion and a second sliding member;

[0027] The bottom plate is fixedly arranged on the bottom wall of the loading cavity;

[0028] The second sliding member is slidably arranged on the second sliding portion; the second sliding portion and the second sliding member are fixedly arranged on the bottom plate and the moving member respectively.

[0029] By adopting the above technical features, through the cooperation of the base plate, the second sliding part and the second sliding member, the moving member can move in the loading cavity, thereby driving the arm unit to perform a first-level movement.

[0030] Optionally, it also includes a transmission assembly and a driving member;

[0031] The transmission assembly includes a guide rod disposed in the loading cavity along a transmission path, and a guide block movably disposed on the guide rod;

[0032] The guide block is fixedly connected to the moving member;

[0033] The driving member is connected to the guide rod and is used to drive the guide rod to rotate;

[0034] In a working state, the driving member drives the guide rod to rotate, causing the guide block to move along the conveying path, thereby driving the moving member to move.

[0035] By adopting the above technical features, the driving member drives the guide block to move on the guide rod through the transmission assembly, thereby driving the moving member to move along the transmission path.

[0036] Optionally, an outer wall of the loading cavity is fixedly provided with a sealing member, and the sealing member is connected with the driving member; the driving member drives the guide rod to rotate through the sealing member.

[0037] By adopting the above technical features, the sealing member is arranged on the outer wall of the loading cavity, and the driving member is also arranged outside the loading cavity. The driving member drives the guide rod to rotate through the sealing member, so that the guide rod can be driven to rotate outside the loading cavity.

[0038] Optionally, a loading cavity cover is connected to the loading cavity.

[0039] A stroke detection assembly is arranged in the loading cavity along a conveying path, and the stroke detection assembly has a first photoelectric sensor and a first reflecting member. The first photoelectric sensor is fixedly arranged in the loading cavity, and the first reflecting member is fixedly arranged on the loading cavity cover.

[0040] An optical shade is fixedly arranged on the guide block. When the optical shade moves to between the first photoelectric sensor and the first reflecting member, the laser of the first photoelectric sensor is blocked by the optical shade, so as to detect the position of the moving member.

[0041] By adopting the above technical features, the loading cavity cover is used to close the loading cavity, and the guide block moves to drive the optical shade to move. When the optical shade moves to between the first photoelectric sensor and the first reflecting member, the laser of the first photoelectric sensor is blocked by the optical shade. The first photoelectric sensor cannot receive the laser reflected by the first reflecting member, so as to output a position signal to detect the position of the moving member.

[0042] Optionally, a position detection assembly is arranged in the loading cavity, and the position detection assembly includes a second photoelectric sensor and a second reflecting member. The second photoelectric sensor is fixedly arranged in the loading cavity, and the second reflecting member is fixedly arranged on the loading cavity cover. When the substrate moves to between the second photoelectric sensor and the second reflecting member, the laser of the second photoelectric sensor is blocked by the substrate, so as to detect the position of the substrate.

[0043] By adopting the above technical features, when the substrate moves to between the second photoelectric sensor and the second reflecting member, the laser of the second photoelectric sensor is blocked by the substrate. The second photoelectric sensor cannot receive the laser reflected by the second reflecting member, so as to output a position signal to detect the position of the substrate.

[0044] Optionally, a first through hole and a second through hole are formed in the loading cavity cover, and the first through hole and the second through hole are both in communication with the inside of the loading cavity. The first through hole is used for vacuumizing, and the second through hole is used for releasing vacuum, so that the inside of the loading cavity is converted between an atmospheric pressure atmosphere and a vacuum atmosphere.

[0045] By adopting the above technical features, the first through hole is used for vacuuming, and the second through hole is used for releasing the vacuum, thereby realizing the conversion between the atmospheric pressure atmosphere and the vacuum atmosphere inside the loading cavity.

[0046] The beneficial effects of the substrate conveying system provided by the present application include at least:

[0047] 1. Adding a secondary transmission unit in the loading chamber allows the arm unit to have a longer reach and extend the transmission stroke of the arm unit, thereby reaching longer workstations and expanding the scope of application;

[0048] 2. The secondary transmission unit does not require an additional power source. During the operation of the arm unit, the primary transmission unit moves, driving the secondary transmission unit to move through the transmission structure, thereby driving the arm unit to move. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] Figure 1 This is a schematic diagram of the internal structure of a substrate conveying system according to an embodiment of the present utility model;

[0050] Figure 2 This is a structural schematic diagram of a primary transmission unit of a substrate conveying system according to an embodiment of the present utility model;

[0051] Figure 3 This is a structural schematic diagram of a secondary transmission unit of a substrate conveying system according to an embodiment of the present utility model;

[0052] Figure 4 This is a schematic diagram of a substrate conveying system in an embodiment of the present invention showing an arm unit in a retracted state;

[0053] Figure 5 This is a schematic diagram of an arm unit of a substrate conveying system in an embodiment of the present invention in an extended state;

[0054] Figure 6 This is a schematic diagram of the positional relationship between a stroke detection component and a position detection component of a substrate conveying system according to an embodiment of the present utility model.

[0055] Reference numerals:

[0056] 100, loading chamber; 110, loading chamber body; 111, transfer port; 112, detection port; 120, loading chamber cover; 121, first through hole; 122, second through hole; 123, pressure detection port; 124, safety valve interface; 125, reserved port; 200, arm unit; 210, finger part; 220, base; 221, mounting plate; 300, primary transmission unit; 310, moving part; 311, moving plate; 312, connecting plate; 313, sliding plate; 320, bottom plate; 330, second sliding part; 400, secondary transmission unit; 410, transmission part; 411, first transmission belt; 412, second transmission belt; 420, first transmission member; 430, second transmission member; 44 0. First sliding part; 450. First sliding member; 460. Connecting support rod; 470. Carrier plate; 480. End transition plate; 490. Fixed plate; 500. Fixed member; 610. Transmission assembly; 611. Guide rod; 612. Guide block; 613. First support block; 614. Second support block; 620. Driving member; 621. Active pulley; 622. Driven pulley; 623. Synchronous belt; 630. Sealing member; 640. Coupling; 710. Stroke detection assembly; 711. First photoelectric sensor; 712. First reflector; 713. Shading sheet; 720. Position detection assembly; 721. Second photoelectric sensor; 722. Second reflector; 800. Substrate; 900. Conveyance path. DETAILED DESCRIPTION

[0057] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be the common meanings understood by people with ordinary skills in the field to which the present invention belongs. The words "including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0058] The specific implementation of the present invention will be further described in detail below with reference to the accompanying drawings.

[0059] Reference Figure 1 、 Figure 2 and Figure 3The utility model discloses an embodiment provides a kind of substrate conveying system, substrate conveying system is used for semiconductor equipment, wherein semiconductor equipment also includes process chamber, process chamber has vacuum atmosphere inside, substrate conveying system is connected with process chamber, for conveying substrate 800 to process chamber, wherein substrate conveying system includes loading chamber 100, loading chamber 100 includes loading cavity 110 and loading cavity cover 120, loading cavity 110 is presented with buffer space, wherein buffer space can be converted between atmospheric pressure atmosphere and vacuum atmosphere, wherein the top of loading cavity 110 is provided with detection port 112, detection port 112 is used to connect loading cavity 110 and process chamber, while forming movement path between loading cavity 110 and process chamber by conveying port 111;Loading cavity cover 120 is rotatably connected in loading cavity 110 by pivot, and is used to close or open detection port 112;The side wall of loading cavity 110 is provided with conveying port 111, and conveying port 111 is used to convey substrate, while loading cavity 110 is also provided with arm unit 200, and arm unit 200 includes base 220 and finger part 210, wherein finger part 210 is used to carry substrate 800, base 220 is connected with finger part 210, and finger part 210 can be driven to move by controlling the movement of base 220, arm unit 200 is movably arranged in loading cavity 110 along conveying path 900, and can be stretched out or withdrawn from conveying port 111 along conveying path 900, so as to drive substrate 800 to move into process chamber;While loading cavity 110 is also provided with primary transmission unit 300 and secondary transmission unit 400, wherein primary transmission unit 300 is arranged in loading cavity 110, and can move along conveying path 900, arm unit 200 is arranged on primary transmission unit 300, so that the movement of primary transmission unit 300 can drive arm unit 200 to preliminarily move, secondary transmission unit 400 is also arranged on primary transmission unit 300, and secondary transmission unit 400 is used to drive arm unit 200 to move on primary transmission unit 300, during working process, primary transmission unit 300 moves along conveying path 900 in loading chamber 100, drives arm unit 200 and secondary transmission unit 400 to move along conveying path 900 in loading chamber 100, at this time, arm unit 200 and secondary transmission unit 400 move relative to the bottom wall of loading chamber 100, during the movement of primary transmission unit 300, secondary transmission unit 400 is driven by primary transmission unit 300, drives arm unit 200 to move, and makes arm unit 200 stretch out or withdraw from conveying port 111;Wherein, primary transmission unit 300 and secondary transmission unit 400 can be independent movement, or linkage movement, when they are independent movement, primary transmission unit 300 can be driven by cylinder or motor, and secondary transmission unit 400 can be driven by cylinder or motor.When the two are in linkage motion, the primary transmission unit 300 and the secondary transmission unit 400 are linked, so that the secondary transmission unit 400 does not require an additional power source for control. In this embodiment, the primary transmission unit 300 and the secondary transmission unit 400 are linked, and the specific linkage method is described below.

[0060] During the movement of the arm unit 200, the first-stage transmission unit 300 needs to be able to move in the loading cavity 110. Figure 1 、 Figure 2 and Figure 3, wherein the first-stage transmission unit 300 includes a moving part 310, and the moving part 310 is movably arranged inside the loading chamber 110, and the arm unit 200 is movably arranged on the moving part 310. Specifically, the moving part 310 also includes a moving plate 311, a connecting plate 312 and a sliding plate 313, wherein the moving plate 311 is slidably arranged on the bottom wall of the loading chamber 110 along the transmission path 900, and the connecting plate 312 is fixedly arranged on the side wall of the moving plate 311, and the fixing method thereof can be selected from bonding, welding or bolt fixing, etc. In this embodiment, the connecting plate 312 is fixedly arranged on the side wall of the moving plate 311 by bolt fixing, and the sliding plate 313 is fixedly arranged on the side wall of the connecting plate 312, and the fixing method thereof can be selected from bonding, welding or bolt fixing, etc. Adhesion, welding or bolt fixation, etc., in this embodiment, the sliding plate 313 is fixedly arranged on the side wall of the connecting plate 312 by means of bolt fixation, so that when the movable plate 311 moves, it can drive the connecting plate 312 and the sliding plate 313 to move synchronously, wherein the first-level transmission unit 300 also includes a bottom plate 320, a second sliding portion 330 and a second sliding member, the bottom plate 320 is fixedly arranged on the bottom wall of the loading cavity 110, and its fixing method can be adhesion, welding or bolt fixation, etc., in this embodiment, the bottom plate 320 is fixedly arranged on the bottom wall of the loading cavity 110 by means of bolt fixation, in addition, the second sliding member is slidably arranged on the second sliding portion 330, that is, the second sliding member can be on the second sliding portion 330 Move along the conveying path 900. In this embodiment, the second sliding member is block-shaped, and the second sliding portion 330 can be a groove-shaped slide rail or a raised slide rail. In this embodiment, the second sliding portion 330 is selected as a raised slide rail, and a groove adapted to the second sliding portion 330 is provided on the second sliding member, so that the second sliding member can move along the conveying path 900 on the second sliding portion 330. At the same time, the second sliding portion 330 is fixedly provided on the bottom plate 320, and its fixing method can be bonding, welding or bolt fixing, etc. In this embodiment, the second sliding portion 330 is fixedly provided on the bottom plate 320 by bolt fixing; the second sliding member is fixedly provided on the base 220 of the arm unit 200, and its fixing method can be Adhesion, welding or bolt fixing, etc., in this embodiment, the second sliding member is fixed to the base 220 by bolt fixing, and the length direction of the second sliding portion 330 is parallel to the transmission path 900, that is, the base 220 can move along the transmission path 900 on the second sliding portion 330 to drive the finger portion 210 to move, and the arm unit 200 extends or retracts from the transmission port 111; in addition, there are two second sliding portions 330 and second sliding members, and the two second sliding portions 330 are fixedly set on the bottom plate 320, one of the second sliding members is fixedly set on the end surface of the moving plate 311, and the other second sliding member is fixedly set on the end surface of the sliding plate 313, so that the overall movement of the moving member 310 is smooth.

[0061] During the movement of the arm unit 200, the primary transmission unit 300 is required to drive the secondary transmission unit 400 to move, so that the secondary transmission unit 400 drives the arm unit 200 to move on the moving plate 311. Figure 1 、 Figure 2 and Figure 3 In addition, a connecting rod 460 is fixedly provided on the sliding plate 313, and the fixing method thereof can be bonding, welding or bolting. In this embodiment, the connecting rod 460 is fixed on the sliding plate 313 by bolting. The length direction of the connecting rod 460 is parallel to the transmission path 900, and a carrier plate 470 is fixedly provided at the end of the connecting rod 460, so that there is a certain gap between the connecting rod 460 and the moving plate 311; the secondary transmission unit 400 includes a transmission part 410, a first transmission member 420 and a second transmission member 430, A transmission member 420 and a second transmission member 430 are arranged at intervals on the moving member 310 along the transmission path 900. Specifically, the first transmission member 420 is fixedly arranged on the connecting plate 312, and the second transmission member 430 is fixedly arranged on the carrier plate 470. The transmission part 410 is sleeved on the first transmission member 420 and the second transmission member 430. At the same time, a part of the transmission part 410 is fixedly arranged on the arm unit 200, and the other part is fixedly arranged inside the loading cavity 110; at the same time, the transmission part 410 can rotate relative to the first transmission member 420 and the second transmission member 430. The transmission part 410 can rotate relative to the first transmission member 420 and the second transmission member 430. The transmission part 410 is selected to be a belt, which can be a steel belt or a belt. In this embodiment, the transmission part 410 is selected to be a steel belt, and the first transmission member 420 and the second transmission member 430 can be rod-shaped or other shapes, as long as they are different from the rotation of the transmission part 410. In this embodiment, the first transmission member 420 and the second transmission member 430 are both wheel-shaped and are rotatably arranged on the connecting plate 312 and the carrier plate 470 respectively. In the actual working process, the moving parts 310 moves along the conveying path 900, driving the arm unit 200 and the secondary transmission unit 400 to move relative to the loading chamber 100. During the movement, since a part of the transmission part 410 is fixed inside the loading chamber 110, during the overall movement of the arm unit 200 and the secondary transmission unit 400, the transmission part 410 drives the arm unit 200 to move from the first transmission member 420 toward the second transmission member 430, or from the second transmission member 430 toward the first transmission member 420, so that the arm unit 200 extends or retracts from the conveying port 111.

[0062] In order to facilitate the movement of the transmission part 410, refer to Figure 2 、 Figure 4 and Figure 5, a fixing member 500 is fixedly provided on the bottom wall of the loading chamber 100. In this embodiment, the fixing member 500 is block-shaped. The fixing member 500 will not follow the movement of the primary transmission unit 300 and the secondary transmission unit 400, and will not interfere with the movement of the primary transmission unit 300 and the secondary transmission unit 400; the transmission part 410 includes a first transmission belt 411 and a second transmission belt 412, wherein the first transmission belt 411 and the second transmission belt 412 are both steel belts, and the base 220 of the arm unit 200 is fixedly provided with a mounting plate 221, which can be fixed by bonding, welding or bolting, etc. In this embodiment, the mounting plate 221 is fixedly provided on the The base 220, one end of the first transmission belt 411 is fixedly provided on the arm unit 200, specifically, one end of the first transmission belt 411 is fixedly provided on the mounting plate 221, and its fixing method can be bonding, welding or bolting, etc. In this embodiment, the two are fixedly connected by bolting, and the other end of the first transmission belt 411 passes through the first transmission member 420 and is fixedly connected to the fixing member 500, and its fixing method is bolting; one end of the second transmission belt 412 is fixedly provided on the arm unit 200, specifically, one end of the second transmission belt 412 is fixedly provided on the mounting plate 221, and its fixing method can be bonding, welding or bolting, etc. In this embodiment, the two are fixedly connected by bolting, and the other end of the first transmission belt 411 passes around the first transmission member 420 and is fixedly connected to the fixing member 500, and its fixing method is bolting; one end of the second transmission belt 412 is fixedly provided on the arm unit 200, specifically, one end of the second transmission belt 412 is fixedly provided on the mounting plate 221, and its fixing method can be bonding, welding or bolting, etc. In this embodiment, The two are fixedly connected by bolts, and the other end of the second transmission belt 412 passes around the second transmission member 430 and is fixedly connected to the fixed member 500; wherein, when the moving member 310 moves along the transmission path 900 toward the outside of the loading chamber 100, the first transmission member 420 is close to the fixed member 500, and the second transmission member 430 is away from the fixed member 500. During the movement, the first transmission member 420 is away from the fixed member 500, and the second transmission member 430 is close to the fixed member 500. The total length of the first transmission belt 411 remains unchanged. Therefore, the mounting plate 221 is gradually driven by the first transmission belt 411 to approach the first transmission member 420, so that the arm unit 200 can move on the moving member. 310, and the arm unit 200 extends from the transfer port 111; when the moving member 310 moves along the transfer path 900 toward the inside of the loading chamber 100, the first transmission member 420 moves away from the fixed member 500, and the second transmission member 430 approaches the fixed member 500. During the movement, the first transmission member 420 approaches the fixed member 500, and the second transmission member 430 moves away from the fixed member 500. Since the total length of the first transmission belt 411 remains unchanged, the mounting plate 221 gradually approaches the second transmission member 430 under the drive of the second transmission belt 412, thereby enabling the arm unit 200 to move on the moving member 310 and retracting the arm unit 200 from the transfer port 111;That is, in the working state, when the arm unit 200 is extended, the substrate 800 is placed on the finger portion 210, and the moving member 310 is driven to extend from the transfer port 111 along the transfer path 900. The first transmission member 420 moves synchronously with the moving member 310 and approaches the fixed member 500 along the transfer path 900. The first transmission member 420 drives the first transmission belt 411 to drag the base 220 along the transfer path 900 and the moving member 310 to generate relative displacement, thereby transferring the substrate 800 to the process chamber. When the arm unit 200 is retracted, the moving member 310 is driven to retract from the transfer port 111 along the transfer path 900. The second transmission member 430 moves synchronously with the moving member 310 and moves away from the fixed member 500 along the transfer path 900. The second transmission member 430 drives the second transmission belt 412 to drag the base 220 along the transfer path 900 and the moving member 310 to generate relative displacement, thereby retracting the arm unit 200 into the loading chamber 110.

[0063] In order to facilitate the movement of the arm unit 200 on the moving member 310, refer to Figure 3 、 Figure 4 and Figure 5 , the secondary transmission unit 400 also includes a first sliding portion 440 and a first sliding member 450, wherein the first sliding member 450 is slidably arranged on the first sliding portion 440, and the first sliding portion 440 and the first sliding member 450 are respectively fixedly arranged on the moving member 310 and the arm unit 200, specifically, the first sliding portion 440 and the first sliding member 450 are respectively fixedly arranged on the moving plate 311 and the base 220, wherein the first sliding portion 440 can be a groove-shaped track or a raised track. In this embodiment, the first sliding portion 440 is selected as a raised track, and the first sliding member 450 is block-shaped. A groove is provided on the first sliding member 450, so that the first sliding member 450 can slide on the first sliding portion 440, and at the same time, the length direction of the first sliding portion 440 is parallel to the transmission path 900, so that the first sliding member 450 can move along the transmission path 900 on the first sliding portion 440; In addition, the first sliding portion 440 can be fixedly provided on the movable plate 311, and the first sliding member 450 can be fixedly provided on the base 220, or the first sliding portion 440 can be fixedly provided on the base 220, and the first sliding member 450 can be fixedly provided on the movable plate 311. In this embodiment, the first sliding portion 440 is fixedly provided on the movable plate 311, and the first sliding member 450 is fixedly provided on the base 220, so that the base 220 can move along the conveying path 900 on the movable plate 311, even if the arm unit 200 can move along the conveying path 900 on the movable plate 311. In addition, there are two first sliding portions 440, and the ends of the two first sliding portions 440 are fixedly provided with an end transition plate 480 to connect the two first sliding portions 440. A fixed plate 490 is fixedly provided on the end transition plate 480, and the end transition plate 480 is connected to the carrier plate 470 through the fixed plate 490.

[0064] In order to drive the movement of the moving part 310, referring to Figure 1 , Figure 2 and Figure 3 , the substrate conveying system further comprises a transmission assembly 610 and a driving part 620, wherein the transmission assembly 610 comprises a guide rod 611 and a guide block 612, the guide rod 611 is arranged inside the loading cavity 110, and the axis direction of the guide rod 611 is parallel to the conveying path 900, and the guide block 612 is movably arranged on the guide rod 611. Specifically, the bottom wall of the loading cavity 110 is fixedly provided with a first support block 613 and a second support block 614, and the first support block 613 and the second support block 614 are arranged along the axial direction of the guide rod 611. One end of the guide rod 611 is rotatably connected to the first support block 613, and the other end is rotatably connected to the second support block 614, so that the guide rod 611 can rotate in the loading cavity 110. The driving part 620 is connected to the guide rod 611, so that the driving part 620 can drive the guide rod 611 to rotate. In this embodiment, the driving part 620 is a motor. The guide block 612 is fixedly connected to the moving part 310, specifically, the guide block 612 is fixedly connected to the moving plate 311, and the fixing mode can be selected from bonding, welding or bolt fixing. In this embodiment, the guide block 612 is fixedly connected to the moving plate 311 by bolt fixing. In addition, the guide rod 611 is threadedly connected to the guide block 612. In this embodiment, the guide rod 611 is a lead screw, and the guide block 612 is a nut. The nut is fixed on a nut seat, and the nut seat is bolted to the moving plate 311. During work, the driving part 620 is started to drive the guide rod 611 to rotate. Since the guide block 612 is connected to the moving plate 311, the guide block 612 does not rotate during the rotation of the guide rod 611. Since the guide rod 611 and the guide block 612 are threadedly connected, the rotation of the guide rod 611 can drive the guide block 612 to move along the axial direction of the guide rod 611, that is, to drive the moving part 310 to move along the conveying path 900.

[0065] Since the inside of the loading cavity 110 can be switched between a vacuum atmosphere and an atmospheric atmosphere, the driving part 620 needs to be able to drive the guide rod 611 to rotate when the loading cavity 110 is in a vacuum state. Referring to Figure 1The driving member 620 is fixedly arranged on the outer wall of the loading chamber 110, and its fixing method can be selected from bonding, welding or bolting. In this embodiment, the driving member 620 is fixedly arranged on the outer wall of the loading chamber 110 by bolting. At the same time, the rotating shaft of the driving member 620 is keyed to a rotating wheel. The outer wall of the loading chamber 110 is provided with a sealing member 630. In this embodiment, the sealing member 630 is a magnetic fluid sealing member 630, one end of which is connected to the guide rod 611 through a coupling 640, and the other end is provided with a There is a driven wheel 622, and a synchronous belt 623 is provided on the driving wheel 621 and the driven wheel 622, so that the rotation of the driving wheel 621 can drive the driven wheel 622 to rotate. At the same time, the function of the magnetic fluid sealing device is to transmit the rotational motion to the sealed container, which is often used for vacuum sealing. Therefore, no matter whether the interior of the loading cavity 110 is a vacuum atmosphere or an atmospheric atmosphere, the driving member 620 can drive the guide rod 611 to rotate, so that the guide block 612 moves along the transmission path 900, thereby driving the moving member 310 to move along the transmission path 900.

[0066] During the movement of the arm unit 200, it is necessary to detect the movement range and position of the arm unit 200. Figure 1 and Figure 6The cavity is provided with a stroke detection assembly 710, and the stroke detection assembly 710 is provided with at least two, can be three or more, in the embodiment, two stroke detection assemblies 710 are selected, the two stroke detection assemblies 710 are distributed along the conveying path 900, and the two stroke detection assemblies 710 are arranged at the start position and the end position of the movement of the arm unit 200 respectively; meanwhile, the stroke detection assembly 710 is provided with a first photoelectric sensor 711 and a first reflecting element 712, the first photoelectric sensor 711 emits laser, the laser is reflected after irradiating to the first reflecting element 712, and the laser is received by the first photoelectric sensor 711, at this time, the moving part 310 is not at the start position or the end position;The first photoelectric sensor 711 is fixedly arranged on the bottom wall of the loading cavity 100, and the fixing mode can be bonding, welding or bolt fixing, in the embodiment, the two are fixedly connected in the form of bolt fixing, the first reflecting element 712 is fixedly arranged on the loading cavity cover 120, and the fixing mode can be bonding, welding or bolt fixing, in the embodiment, the two are fixedly connected in the form of bolt fixing;Meanwhile, the light shielding piece 713 is fixedly arranged on the guide block 612, and the fixing mode can be bonding, welding or bolt fixing, in the embodiment, the two are fixedly connected in the form of bolt fixing;In the movement process of the moving part 310, the light shielding piece 713 moves synchronously with the moving part 310, when the light shielding piece 713 moves to between the first photoelectric sensor 711 and the first reflecting element 712, the laser emitted by the first photoelectric sensor 711 is blocked by the light shielding piece 713, at this time, the first reflecting element 712 cannot reflect the laser, and the first photoelectric sensor 711 cannot receive the reflected laser, at this time, the first photoelectric sensor 711 emits a position signal to detect the position of the moving part 310.In addition, a position detection component 720 is further provided in the loading chamber 110. The position detection component 720 is used to detect whether the substrate 800 is in the correct position. The position detection component 720 includes a second photoelectric sensor 721 and a second reflector 722. The second photoelectric sensor 721 is fixedly provided in the loading chamber 100. Specifically, the second photoelectric sensor 721 is fixedly provided on the bottom wall of the loading chamber 100. The fixing method can be adhesive, welding or bolt fixing. In this embodiment, the second photoelectric sensor 721 is fixedly provided on the bottom wall of the loading chamber 100 by bolt fixing, and the second reflector 722 is fixedly provided on the loading chamber cover 120. The fixing method can be adhesive, welding, or bolting. In this embodiment, a second reflector 722 is fixed to the loading chamber cover 120 by bolting. The second photosensor 721 emits a laser beam, which is reflected by the second reflector 722 and received by the second photosensor 721. The second photosensor 721 then emits a signal. When the substrate 800 moves between the second photosensor 721 and the second reflector 722, the laser beam from the second photosensor 721 does not strike the second reflector 722, preventing the second photosensor 721 from receiving the laser beam from the second reflector 722. This allows the second photosensor 721 to determine the position of the substrate 800.

[0067] In order to facilitate the switching between vacuum atmosphere and atmospheric atmosphere inside the reaction chamber, refer to Figure 1 and Figure 6 The loading chamber cover 120 is further provided with a first through hole 121 and a second through hole 122, both of which penetrate the loading chamber cover 120 and communicate with the interior of the loading chamber 110, and a blocking member is provided in the first through hole 121 and the second through hole 122 for blocking the first through hole 121 and the second through hole 122, so that the first through hole 121 and the second through hole 122 cannot open independently without external force, thereby maintaining the vacuum atmosphere in the loading chamber 110; in addition, the first through hole 121 is used for vacuuming, and the second through hole 122 is used for releasing vacuum, so that the interior of the loading chamber 110 is converted between atmospheric pressure atmosphere and vacuum atmosphere, which can be switched according to needs during operation; in addition, the loading chamber cover 120 is further provided with a pressure detection port 123 for detecting the pressure in the loading chamber 110; the loading chamber cover 120 is further provided with a safety valve interface 124 and a reserved port 125, which are convenient for adjusting the interior of the loading chamber 110.

[0068] The implementation principle of a substrate conveying system in an embodiment of the present application is as follows: the driving member 620 is started, and the guide rod 611 is driven to rotate around its own axis through the sealing member 630. During the rotation process, the guide block 612 is driven to move axially along the guide rod 611, thereby driving the movable plate 311 to move axially along the guide rod 611. The movement of the movable plate 311 drives the first transmission wheel and the second transmission wheel to move. Under the action of the transmission part 410, the arm unit 200 moves relative to the movable plate 311, thereby increasing the conveying stroke of the robot arm and obtaining a longer reach.

[0069] While the embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations may be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as set forth in the claims. Furthermore, the present invention described herein may have other embodiments and may be implemented or carried out in a variety of ways.

Claims

1. A substrate transfer system connected to a process chamber with a vacuum atmosphere, characterized in that: include: A loading chamber (110) has a side wall with a transfer port (111) for connecting with the process chamber, so as to connect the loading chamber (110) and the process chamber and form a transfer path (900); An arm unit (200) is movably disposed in the loading chamber (110) along a conveying path (900), and comprises a base (220) and a finger portion (210), wherein the finger portion (210) is used to carry a substrate (800); a primary transmission unit (300), disposed in the loading chamber (110), comprising a moving part (310) movable along a transmission path (900); The secondary transmission unit (400) comprises: a first transmission member (420) connected to the moving member (310) and moving synchronously with the moving member (310); a first transmission belt (411), one end of which is fixedly disposed on the loading cavity (110), and the other end of which is fixedly disposed on the base (220) via the first transmission member (420), and at least a portion of the first transmission belt (411) is wrapped around the outer wall of the first transmission member (420); In the working state, the substrate (800) is placed on the finger part (210), the moving part (310) is driven to extend from the conveying port (111) along the conveying path (900), the first transmission part (420) moves synchronously with the moving part (310), the first transmission part (420) drives the first transmission belt (411) to drag the base (220) along the conveying path (900) to generate relative displacement with the moving part (310), and the substrate (800) is conveyed to the process chamber.

2. The substrate conveying system according to claim 1, wherein: A fixing member (500) is fixedly arranged in the loading cavity (110); one end of the first transmission belt (411) is fixedly arranged on the fixing member (500), and the other end is fixedly arranged on the base (220) through the first transmission member (420); the first transmission member (420) moves synchronously with the moving member (310) and approaches the fixing member (500) along the transmission path (900).

3. The substrate conveying system according to claim 2, wherein: The secondary transmission unit (400) further includes a first sliding portion (440) and a first sliding member (450), wherein the first sliding member (450) is slidably disposed on the first sliding portion (440); The first sliding portion (440) and the first sliding member (450) are fixedly disposed on the moving member (310) and the base (220), respectively, so that the arm unit (200) can move on the moving member (310).

4. The substrate conveying system according to claim 2, wherein: The secondary transmission unit (400) further includes: a second transmission member (430) connected to the moving member (310) and spaced apart from the first transmission member (420) along the transmission path (900) and moving synchronously with the moving member (310); A second transmission belt (412), one end of which is fixedly disposed on the fixing member (500), and the other end of which is fixedly disposed on the base (220) via the second transmission member (430), and at least a portion of the second transmission belt (412) is wrapped around the outer wall of the second transmission member (430); In the working state, the movable member (310) is driven to retract from the conveying port (111) along the conveying path (900), and the second transmission member (430) moves synchronously with the movable member (310) and moves away from the fixed member (500) along the conveying path (900); the second transmission member (430) drives the second transmission belt (412) to drag the base (220) along the conveying path (900) to generate relative displacement with the movable member (310), so that the arm unit (200) is retracted into the loading cavity (110).

5. The substrate conveying system according to claim 1, wherein: The primary transmission unit (300) further includes a bottom plate (320), a second sliding portion (330) and a second sliding member; The bottom plate (320) is fixedly arranged on the bottom wall of the loading cavity (110); The second sliding member is slidably arranged on the second sliding portion (330); the second sliding portion (330) and the second sliding member are fixedly arranged on the bottom plate (320) and the moving member (310) respectively.

6. The substrate conveying system according to claim 1, wherein: Also included is a transmission assembly (610) and a driving member (620); The transmission assembly (610) includes a guide rod (611) disposed in the loading cavity (110) along a transmission path (900), and a guide block (612) movably disposed on the guide rod (611); The guide block (612) is fixedly connected to the moving member (310); The driving member (620) is connected to the guide rod (611) and is used to drive the guide rod (611) to rotate; In the working state, the driving member (620) drives the guide rod (611) to rotate, causing the guide block (612) to move along the transmission path (900), thereby driving the moving member (310) to move.

7. The substrate conveying system according to claim 6, wherein: A sealing member (630) is fixedly provided on the outer wall of the loading chamber (110), and the sealing member (630) is connected to the driving member (620); the driving member (620) drives the guide rod (611) to rotate through the sealing member (630).

8. The substrate conveying system according to claim 6, wherein: The loading chamber (110) is connected to a loading chamber cover (120); Stroke detection components (710) are arranged at intervals along the conveying path (900) in the loading chamber (110), and the stroke detection components (710) have a first photoelectric sensor (711) and a first reflector (712). The first photoelectric sensor (711) is fixedly arranged on the loading chamber (110), and the first reflector (712) is fixedly arranged on the loading chamber cover (120). A light shielding sheet (713) is fixedly provided on the guide block (612); when the light shielding sheet (713) moves between the first photoelectric sensor (711) and the first reflective member (712), the laser of the first photoelectric sensor (711) is blocked by the light shielding sheet (713), so as to detect the position of the movable member (310).

9. The substrate conveying system according to claim 8, wherein: A position detection assembly (720) is provided in the loading cavity (110), and the position detection assembly (720) comprises a second photoelectric sensor (721) and a second reflector (722), wherein the second photoelectric sensor (721) is fixedly provided in the loading cavity (110), and the second reflector (722) is fixedly provided on the loading cavity cover (120); the substrate (800) moves between the second photoelectric sensor (721) and the second reflector (722), and the laser of the second photoelectric sensor (721) is blocked by the substrate (800), so as to detect the position of the substrate (800).

10. The substrate conveying system according to claim 8, wherein: The loading chamber cover (120) is provided with a first through hole (121) and a second through hole (122), both of which are in communication with the interior of the loading chamber (110), the first through hole (121) being used for vacuuming, and the second through hole (122) being used for releasing the vacuum, so that the interior of the loading chamber (110) is switched between an atmospheric pressure atmosphere and a vacuum atmosphere.

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