Displacement-preventing wafer tray
By setting fixing rings and limit rings on the wafer tray, the problems of shaking and collision of wafers during transportation are solved, and stable transportation of wafers and cost reduction are achieved.
Patent Information
- Application Number
- CN202423088012.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-14
- Publication Date
- 2025-10-17
- Estimated Expiration
- 2034-12-14
AI Technical Summary
Existing wafer trays are prone to causing wafer shaking and collision during transportation, resulting in surface damage or even cracking, and increasing production costs.
An anti-displacement wafer tray is designed. By arranging a first fixing ring, a second fixing ring and a limit ring on the placement plate, the tray is ensured to be accurately docked when stacked, and the limit ring contacts the edge of the wafer to prevent shaking and falling off.
Effectively prevent wafer displacement and shaking during transportation, reduce damage risks, improve transportation safety and efficiency, reduce material usage and reduce costs.
Smart Images
Figure CN223444077U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to wafer tray technical field, especially relate to a wafer tray of preventing displacement. BACKGROUND
[0002] The existing wafer tray is usually made of a frame, a plurality of placing grooves are formed on the frame, the wafer is inserted into the grooves to be moved and transported, but in order to take and place conveniently, the width of the placing groove exceeds the thickness of the wafer, the wafer is prone to shaking during the handling and colliding with the tray, so the wafer surface is very easy to be damaged, and even the wafer is broken, so that the production cost is increased. SUMMARY
[0003] The utility model discloses a wafer tray of preventing displacement, which can fix and limit the wafer, prevent displacement, avoid surface scratch, and stack multiple trays together for convenient handling.
[0004] To achieve the above object, the utility model provides a wafer tray of preventing displacement, characterized by comprising:
[0005] The tray body has a placing plate, a first fixing ring is vertically arranged along the edge of the placing plate, the wafer is placed on the placing plate, the edge of the wafer is abutted and limited on the surface of the fixing ring, and a limiting ring is circumferentially arranged at the bottom of the placing plate.
[0006] Any tray body can be overlapped and placed on another tray body, the limiting ring of the upper tray body can slide downward along the inner wall of the first fixing ring of the lower tray body until abutting the edge of the wafer.
[0007] In an embodiment of the utility model, the top end of the first fixing ring is outwardly bent to form a stepped portion, and a second fixing ring is vertically arranged on the edge of the stepped portion.
[0008] In an embodiment of the utility model, the tray body is provided with a taking and placing opening on part of the edge.
[0009] In an embodiment of the utility model, the surface of the placing plate is provided with a weight-reducing hole.
[0010] The utility model discloses technical scheme through setting up first, second fixed ring and limit ring on the placing plate, can ensure that tray can be accurate butt joint when stacking on one side, prevent upper and lower tray position misalignment, on the other side, the limit ring of upper tray can be inserted downwards along the inner wall of the first fixed ring of lower tray, until with the edge of wafer contact, when tray stacks, the limit ring of upper tray will abut with the edge of wafer in lower tray, the purpose of this design is to ensure that upper and lower tray can be closely matched during stacking, prevent wafer from moving and shaking in vertical direction after stacking, in addition, when limit ring inserts lower tray, can prevent two trays from falling off accidentally to a certain extent, reduce the possibility of wafer being damaged. BRIEF DESCRIPTION OF DRAWINGS
[0011] In order to more clearly illustrate the technical scheme in the embodiment of the utility model or prior art, the following will briefly introduce the drawing needed to be used in the embodiment or prior art description, obviously, the drawing in the following description is only some embodiments of the utility model, for those skilled in the art, under the premise of not paying creative labor, other drawings can also be obtained according to the structure shown in these drawings.
[0012] Fig. 1 It is the structural schematic diagram of the utility model;
[0013] Fig. 2 It is the stacking state schematic diagram of the utility model.
[0014] Explanation of the attached drawing:
[0015] 1, placing plate;11, weight reduction hole;21, first fixed ring;22, step portion;23, second fixed ring;3, wafer;4, limit ring;5, taking and placing mouth.
[0016] The realization of the utility model, functional characteristics and advantages will be further explained by combining with the embodiment, and referring to the attached drawings. DETAILED DESCRIPTION
[0017] In order to make the purpose, technical scheme and advantages of the present application more clear, the following will be further detailed by combining with the attached drawings and embodiment.The specific embodiments described here are only used to explain the present application, and are not used to limit the present application.
[0018] Reference Figs. 1-2The utility model provides a kind of wafer 3 tray of anti-displacement, including tray body, tray body has a placing plate 1, first fixed ring 21 is vertically provided along the edge of placing plate 1, wafer 3 is placed on placing plate 1, the edge of wafer 3 is limited to fixed ring surface, and the bottom of placing plate 1 is circumferentially provided with limit ring 4;Any tray body can be overlapped and placed on another tray body, and the limit ring 4 of upper tray body can slide downwards along the inner wall of the first fixed ring 21 of lower tray body, until the edge of wafer 3 is contacted.
[0019] Understandably, placing plate 1 is a flat part on the tray body, used to place wafer 3. Wafer 3 is usually circular, so considering the placement and stability of circular wafer 3, placing plate 1 is designed to be consistent with the size of wafer 3 shape. The fixed ring vertically arranged along the edge of placing plate 1 plays a role in fixing and limiting the position of wafer 3. The function of the fixed ring is to limit the edge of wafer 3 to a certain position, prevent it from shifting and shaking during placement, and wafer 3 is placed on the surface of placing plate 1. The fixed ring limits the position of wafer 3 by contacting the edge of wafer 3, so that it is stably kept in the tray.
[0020] Limit ring 4 is another annular structure at the bottom of the tray. The role of limit ring 4 is to ensure that the trays can be accurately docked when stacked, preventing misalignment of the positions of upper and lower trays. On the other hand, the limit ring 4 of the upper tray can be inserted downwards along the inner wall of the first fixed ring 21 of the lower tray until it contacts the edge of wafer 3. That is, when the trays are stacked, the limit ring 4 of the upper tray will abut against the edge of wafer 3 in the lower tray. The purpose of this design is to ensure that the upper and lower trays can fit tightly during stacking, preventing wafer 3 from moving and shaking in the vertical direction after stacking. In addition, when the limit ring 4 is inserted into the lower tray, it can prevent the two trays from accidentally falling out to some extent, reducing the possibility of wafer 3 being damaged.
[0021] Referring to Figs. 1-2 In an embodiment of the present application, the top end of the first fixed ring 21 is outwardly bent to form a stepped portion 22, and a second fixed ring 23 is vertically arranged at the edge of the stepped portion 22.
[0022] Understandably, since the tray relies only on the limit ring 4 to prevent the tray from falling out when stacked, there is a high risk. Therefore, the stepped portion 22 and the second fixed ring 23 are arranged at the edge of the first fixed ring 21. When stacked, the stepped portion 22 of the upper tray is placed on the stepped portion 22 of the lower tray, increasing the support area and load capacity. At the same time, the second fixed ring 23 of the lower tray covers the first fixed ring 21 of the upper tray, further preventing the two trays from falling out, increasing the load capacity and safety during stacking.
[0023] Referring to Figs. 1-2In an embodiment of the present application, the tray body is provided with a taking and placing opening 5 on a part of the edge.
[0024] It can be understood that the taking and placing opening 5 can make it more convenient for the operator or a mechanical arm or the like to take out or put in the wafer 3, especially when the wafer 3 needs to be frequently taken out or put in, the taking and placing opening 5 provides a direct entrance, reduces the complexity of operation, and improves the efficiency and accuracy of automatic processing. When the wafer 3 is taken out or put in through the taking and placing opening 5, the contact between the wafer 3 and the edge of the tray will be reduced, thereby reducing the risk of damage to the wafer 3 due to improper operation or friction, etc. In particular in semiconductor manufacturing, the surface of the wafer 3 needs to be kept very clean, and reducing direct contact also helps to avoid contamination. With the taking and placing opening 5, the operator can take out or put in the wafer 3 more quickly, especially when processing in batches, which can improve the overall work efficiency and avoid the cumbersome operation of turning over or moving the entire tray in the traditional tray design.
[0025] Referring to Figs. 1-2 In an embodiment of the present application, the surface of the placing plate 1 is provided with a weight-reducing hole 11.
[0026] It can be understood that by providing the weight-reducing hole 11 on the wafer 3 tray, the overall weight of the tray can be effectively reduced, which is particularly helpful in improving the convenience and efficiency of operation when the tray needs to be frequently moved, transported or stacked. The weight-reduced tray is more portable, especially for the operator who manually moves, loads or takes out the wafer 3, reducing the burden can reduce fatigue and improve work efficiency. The weight-reducing hole 11 can reduce the material used for the tray, especially in large-scale production, reducing the use of materials directly helps to reduce production costs, and using less material means that the consumption of raw materials in the manufacturing process is reduced, which helps to reduce the unit cost and improve the cost-effectiveness when producing a large number of wafer 3 trays. The design of the weight-reducing hole 11 helps to reduce the weight of the tray, so that the tray can be stacked more stably and efficiently. Reducing the weight not only makes the stacking safer, but also reduces the pressure on the supporting equipment and improves the utilization rate of the storage space.
[0027] The technical scheme of the utility model discloses a first and second fixing ring and a limiting ring 4 are arranged on the placing plate 1, which can ensure that the trays are accurately connected when stacked and prevent the upper and lower trays from being misaligned. On the other hand, the limiting ring 4 of the upper tray can be inserted downward along the inner wall of the first fixing ring 21 of the lower tray until it contacts the edge of the wafer 3. When the trays are stacked, the limiting ring 4 of the upper tray abuts against the edge of the wafer 3 in the lower tray. The purpose of this design is to ensure that the upper and lower trays can be closely matched during stacking to prevent the wafer 3 from moving or shaking in the vertical direction after stacking. In addition, when the limiting ring 4 is inserted into the lower tray, it can prevent the two trays from accidentally falling out to some extent, reducing the possibility of damage to the wafer 3.
[0028] The same or similar reference numerals in the drawings of the embodiments correspond to the same or similar components; in the description of the present application, it is understood that if the orientations or positional relationships indicated by the terms "upper", "lower", "left", "right" and the like are based on the orientations or positional relationships shown in the drawings, they are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore the terms describing the positional relationships in the drawings are only used for exemplary illustration, and cannot be understood as a limitation on the present patent, for those of ordinary skill in the art, the specific meanings of the above terms can be understood according to the specific circumstances.
[0029] The above is only a preferred embodiment of the present application, and is not used to limit the present application, any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims
1. A wafer (3) tray with an anti-displacement function, characterized in that: include: A tray body, the tray body having a placement plate (1), a first fixing ring (21) vertically arranged along the edge of the placement plate (1), a wafer (3) placed on the placement plate (1), the edge of the wafer (3) abutting against the surface of the fixing ring, and a limiting ring (4) circumferentially arranged at the bottom of the placement plate (1); Any of the tray bodies can be placed on top of another tray body, and the limiting ring (4) of the upper tray body can slide downward along the inner wall of the first fixing ring (21) of the lower tray body until it abuts against the edge of the wafer (3).
2. The anti-displacement wafer (3) tray according to claim 1, characterized in that: The top end of the first fixing ring (21) is bent outward to form a stepped portion (22), and a second fixing ring (23) is vertically arranged on the edge of the stepped portion (22).
3. The anti-displacement wafer (3) tray according to claim 1, characterized in that: The tray body is provided with a take-in / out opening (5) on a portion of its edge.
4. The anti-displacement wafer (3) tray according to claim 1, characterized in that: The surface of the placement plate (1) is provided with weight-reducing holes (11).