Glass fiber reinforced plastic nitrogen-sealed water tank with high purity requirement
By introducing sealing liquid containing trough plates, air isolation liquid and deformable air barrier membrane into the FRP nitrogen sealed water tank, the problem of air ingress when nitrogen supply is insufficient is solved, and sealed separation and pressure balance under pressure changes are achieved, thus maintaining the purity of water quality.
Patent Information
- Application Number
- CN202423035496.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-10
- Publication Date
- 2025-10-17
- Estimated Expiration
- 2034-12-10
AI Technical Summary
When the nitrogen supply of the existing glass fiber reinforced plastic nitrogen sealed water tank is insufficient, external air can easily enter the tank through the small gap at the air valve seal and come into contact with the ultrapure water, resulting in a decrease in purity.
The combined structure of sealing liquid containing groove plate, air isolation liquid, deformable air barrier membrane, hard connecting ring plate and 'L'-shaped liquid sealing ring plate is adopted to form a sealed separation, blocking the contact between air and ultrapure water, and adjusting the pressure balance through the deformable air barrier membrane.
When the nitrogen supply is insufficient, it effectively blocks the contact between air and ultrapure water, keeping the water pure, and automatically adjusts the sealing effect under pressure changes to ensure pressure balance inside and outside the water tank.
Smart Images
Figure CN223444255U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to nitrogen seal water tank technical field, concretely relates to a glass steel nitrogen seal water tank of high purity requirement. BACKGROUND
[0002] In the semiconductor industry, it is necessary to use ultra-pure water with a resistivity of up to eighteen mega-ohms, in order to maintain the purity of the ultra-pure water, it is necessary to use a nitrogen seal water tank to store the ultra-pure water, the glass steel nitrogen seal water tank blocks the air by filling nitrogen gas in the sealed tank body, which can effectively avoid the contact between the external air and the ultra-pure water stored in the tank body, and in the use process, the nitrogen supply equipment needs to inject nitrogen into the tank body to ensure that the pressure in the tank body is greater than the external air pressure, but in the use process, there is a problem that the nitrogen supply pressure is insufficient due to equipment failure or pipeline transportation problem, which leads to insufficient nitrogen pressure in the tank body, and the external air enters the tank body through the small gap of the air valve sealing part, and the current internal structure of the tank body cannot prevent the air entering the tank body from contacting the ultra-pure water in the tank body. SUMMARY
[0003] The utility model provides a glass steel nitrogen seal water tank of high purity requirement, which has the characteristics of blocking the contact between the air and the ultra-pure water in the glass steel nitrogen seal water tank body when the external air enters the glass steel nitrogen seal water tank body through the air valve at the top of the glass steel nitrogen seal water tank body due to insufficient nitrogen supply.
[0004] The utility model provides the following technical scheme: a glass steel nitrogen seal water tank of high purity requirement, including glass steel nitrogen seal water tank body, the fixed connection of glass steel nitrogen seal water tank body inner wall has the sealed liquid containing groove board, the sealed liquid containing groove board is filled with air isolation liquid, one side of sealed liquid containing groove board is equipped with the deformable air barrier membrane, the fixed connection of deformable air barrier membrane top has the hard quality connecting ring board, one side of hard quality connecting ring board is fixedly connected with " L " shape liquid seal ring board, " L " shape liquid seal ring board bottom end stretches into air isolation liquid.
[0005] Among them, the glass steel nitrogen seal water tank body side is installed with the water inlet pipeline, the glass steel nitrogen seal water tank body side is installed with the nitrogen gas delivery pipeline, and the nitrogen gas delivery pipeline is connected with the water inlet pipeline through the valve.
[0006] Among them, the fixed connection of hard quality connecting ring board inner wall has the sealed connecting ring, and the sealed connecting ring is hinged with the sealed liquid containing groove board.
[0007] Among them, the fixed connection of deformable air barrier membrane top has a plurality of telescopic adjusting rods, and the top of a plurality of telescopic adjusting rods is fixedly connected with the bottom end of the sealed liquid containing groove board.
[0008] The deformable air barrier membrane bottom is fixedly connected with a buoyancy bin.
[0009] The "L"-shaped liquid seal ring plate bottom is fixedly connected with a clamping positioning plate, which is clamped in the sealed liquid containing groove plate.
[0010] The "L"-shaped liquid seal ring plate bottom is fixedly connected with a clamping positioning plate, which is clamped in the sealed liquid containing groove plate.
[0011] The beneficial effects of the utility model are that: the sealed liquid containing groove plate, air isolation liquid, deformable air barrier membrane, hard connecting ring plate and "L"-shaped liquid seal ring plate cooperate to seal and separate the upper space in the glass steel nitrogen sealing water tank body, when nitrogen supply is insufficient and external air enters the glass steel nitrogen sealing water tank body through the gas valve on the top of the glass steel nitrogen sealing water tank body, the air is prevented from contacting the ultrapure water in the glass steel nitrogen sealing water tank body, and the deformable air barrier membrane can deform according to the air pressure change on both sides, so that pressure balance adjustment is realized under the premise of no gas exchange, to ensure the liquid seal effect of the sealed liquid containing groove plate and air isolation liquid.
[0012] The parts not involved in the device are the same as or can be realized by the prior art. BRIEF DESCRIPTION OF DRAWINGS
[0013] Figure 1 The structure schematic view of the utility model is shown in the figure;
[0014] Figure 2 The structure schematic view of the utility model is shown in the figure;
[0015] Figure 3 The structure schematic view of the utility model is shown in the figure;
[0016] Figure 4 The structure schematic view of the utility model is shown in the figure.
[0017] In the figure: 1, glass steel nitrogen sealing water tank body; 11, water inlet pipeline; 12, nitrogen gas conveying pipeline; 2, sealed liquid containing groove plate; 21, air isolation liquid; 3, deformable air barrier membrane; 31, hard connecting ring plate; 32, sealing connecting ring; 33, telescopic adjusting rod; 34, buoyancy bin; 4, "L"-shaped liquid seal ring plate; 41, clamping positioning plate; 42, sealing connecting ring. DETAILED DESCRIPTION
[0018] Please refer to Figures 1-4The utility model provides the following technical scheme: A glass steel nitrogen seal water tank of high purity requirement, including glass steel nitrogen seal water tank body 1, glass steel nitrogen seal water tank body 1 inner wall is fixedly connected with sealed liquid containing groove board 2, sealed liquid containing groove board 2 is filled with air isolation liquid 21, and one side of sealed liquid containing groove board 2 is equipped with deformable air barrier membrane 3, and the top of deformable air barrier membrane 3 is fixedly connected with hard connecting ring board 31, and one side of hard connecting ring board 31 is fixedly connected with " L " shape liquid seal ring board 4, and " L " shape liquid seal ring board 4 bottom end extends into air isolation liquid 21.
[0019] In the embodiment: sealed liquid containing groove board 2 is located in the upper space in glass steel nitrogen seal water tank body 1, after adding air isolation liquid 21 to sealed liquid containing groove board 2, " L " shape liquid seal ring board 4 and clamping positioning plate 41 are inserted into air isolation liquid 21, the bottom of clamping positioning plate 41 is in contact with the inner wall of sealed liquid containing groove board 2, and hard connecting ring board 31 and sealed connecting ring 32 are clamped with sealed liquid containing groove board 2, before injecting ultrapure water into glass steel nitrogen seal water tank body 1, first, nitrogen gas is filled into the space below deformable air barrier membrane 3 in glass steel nitrogen seal water tank body 1 by nitrogen gas conveying pipeline 12 and water inlet pipeline 11 cooperation, then, ultrapure water is injected into the space below glass steel nitrogen seal water tank body 1, when glass steel nitrogen seal water tank body 1 is used normally, nitrogen gas is continuously injected into glass steel nitrogen seal water tank body 1 by nitrogen gas conveying pipeline 12, to keep the pressure in glass steel nitrogen seal water tank body 1 higher than the pressure of external air, to keep the state of nitrogen gas leakage, to avoid external air entering the interior of glass steel nitrogen seal water tank body 1, when nitrogen gas supply is insufficient due to equipment failure or insufficient pressure supply, a small amount of air enters glass steel nitrogen seal water tank body 1 through the small gap of air valve sealing, and is isolated in the upper space in glass steel nitrogen seal water tank body 1 by deformable air barrier membrane 3, and the cooperation of sealed liquid containing groove board 2, air isolation liquid 21, deformable air barrier membrane 3, hard connecting ring board 31 and " L " shape liquid seal ring board 4 can seal and separate the upper space in glass steel nitrogen seal water tank body 1, the entering air does not contact the ultrapure water below deformable air barrier membrane 3, in the process, deformable air barrier membrane 3 deforms according to the air pressure change on both sides, to balance and regulate the pressure under the premise of not exchanging gas, to keep the pressure on both sides of deformable air barrier membrane 3 in equilibrium state, and the liquid level of air isolation liquid 21 in sealed liquid containing groove board 2 is stable, to ensure the liquid seal effect of sealed liquid containing groove board 2 and air isolation liquid 21.
[0020] The glass fiber reinforced plastic nitrogen sealed water tank body 1 is provided with a water inlet pipeline 11 on one side, and a nitrogen gas conveying pipeline 12 on the other side, and the nitrogen gas conveying pipeline 12 is connected with the water inlet pipeline 11 through a valve; the water inlet pipeline 11 is used as a water inlet pipe, the nitrogen gas conveying pipeline 12 is used as a nitrogen gas inlet pipe, and the nitrogen gas conveying pipeline 12 is connected with the water inlet pipeline 11 through a valve; when nitrogen gas is injected into the space below the deformable air barrier film 3, the nitrogen gas conveying pipeline 12 inputs nitrogen gas into the glass fiber reinforced plastic nitrogen sealed water tank body 1 through the water inlet pipeline 11, and the communication between the water inlet pipeline 11 and the nitrogen gas conveying pipeline 12 is disconnected in the normal use process.
[0021] The hard connecting ring plate 31 is fixedly connected with a sealing connecting ring 32 on the inner wall, and the sealing connecting ring 32 is clamped and connected with the sealing liquid containing groove plate 2; by arranging the sealing connecting ring 32, the sealing property and the connection stability of the hard connecting ring plate 31 and the sealing liquid containing groove plate 2 can be improved, so as to support the deformable air barrier film 3 and avoid pulling the “L”-shaped liquid sealing ring plate 4, and avoid destroying the stability of the “L”-shaped liquid sealing ring plate 4 and the air isolation liquid 21.
[0022] The deformable air barrier film 3 is fixedly connected with a plurality of telescopic adjusting rods 33 at the top end, and the top ends of the telescopic adjusting rods 33 are fixedly connected to the bottom end of the sealing liquid containing groove plate 2; by arranging the telescopic adjusting rods 33, the movement track of the deformable air barrier film 3 and the buoyancy bin 34 can be positioned.
[0023] The deformable air barrier film 3 is fixedly connected with a buoyancy bin 34 at the bottom end; by arranging the buoyancy bin 34, the deformable air barrier film 3 can be lifted by the buoyancy of the liquid level in the glass fiber reinforced plastic nitrogen sealed water tank body 1, so as to avoid the deformable air barrier film 3 directly contacting with water, thereby avoiding the influence of the acting force between the deformable air barrier film 3 and water on the deformation of the deformable air barrier film 3.
[0024] The “L”-shaped liquid sealing ring plate 4 is fixedly connected with a clamping positioning plate 41 at the bottom end, and the clamping positioning plate 41 is clamped in the sealing liquid containing groove plate 2; by arranging the clamping positioning plate 41, the clamping positioning plate 41 can be inserted into the air isolation liquid 21, so that the air isolation liquid 21 can effectively block the gas on both sides of the deformable air barrier film 3, and the bottom end of the “L”-shaped liquid sealing ring plate 4 is prevented from falling off from the air isolation liquid 21.
[0025] The “L”-shaped liquid sealing ring plate 4 is fixedly connected with a sealing connecting ring 42 on both sides, and the opposite sides of the two sealing connecting rings 42 are respectively attached to the inner wall of the glass fiber reinforced plastic nitrogen sealed water tank body 1 and the inner wall of the sealing liquid containing groove plate 2; by arranging the sealing connecting ring 42, the stability of the “L”-shaped liquid sealing ring plate 4 can be improved, and the air isolation liquid 21 can be blocked, so as to prevent the air isolation liquid 21 from leaking out of the sealing liquid containing groove plate 2 due to equipment vibration.
[0026] The utility model discloses a glass steel nitrogen seal water tank body 1 injects the superpure water before, first with the nitrogen gas delivery pipeline 12 and the water inlet pipeline 11 cooperation in the glass steel nitrogen seal water tank body 1 below the space of deformable air barrier membrane 3 fills in the appropriate nitrogen gas, then injects the superpure water in the glass steel nitrogen seal water tank body 1 below the space, nitrogen gas delivery pipeline 12 injects the nitrogen gas in the glass steel nitrogen seal water tank body 1 ceaselessly when the glass steel nitrogen seal water tank body 1 normal use, keeps the pressure in the glass steel nitrogen seal water tank body 1 higher than the outside air pressure, keeps the nitrogen gas leakage state, to avoid the external air to enter the glass steel nitrogen seal water tank body 1 inside, when the nitrogen gas supply is insufficient due to equipment failure or is insufficient, a small amount of air enters the glass steel nitrogen seal water tank body 1 through the small gap of air valve seal, is isolated in the glass steel nitrogen seal water tank body 1 upper space by deformable air barrier membrane 3, with the cooperation of sealed liquid containing groove plate 2, air isolation liquid 21, deformable air barrier membrane 3, hard connecting ring plate 31 and " L " shape liquid seal ring plate 4 can seal the separation of glass steel nitrogen seal water tank body 1 inside upper space, the entering air does not contact the superpure water below deformable air barrier membrane 3, in the process, deformable air barrier membrane 3 itself changes according to the air pressure of both sides and changes, carries out pressure balance regulation under the premise of not exchanging gas.
Claims
1. A glass fiber reinforced plastic nitrogen sealing water tank with high purity requirements, comprising a glass fiber reinforced plastic nitrogen sealing water tank body (1), characterized in that: The inner wall of the glass fiber reinforced plastic nitrogen sealing water tank body (1) is fixedly connected to a sealing liquid containing groove plate (2), the sealing liquid containing groove plate (2) is filled with air isolation liquid (21), a deformable air barrier film (3) is provided on one side of the sealing liquid containing groove plate (2), the top of the deformable air barrier film (3) is fixedly connected to a hard connection ring plate (31), one side of the hard connection ring plate (31) is fixedly connected to an "L"-shaped liquid sealing ring plate (4), and the bottom end of the "L"-shaped liquid sealing ring plate (4) extends into the air isolation liquid (21).
2. A glass fiber reinforced plastic nitrogen sealing water tank with high purity requirements according to claim 1, characterized in that: A water inlet pipe (11) is installed on one side of the glass fiber reinforced plastic nitrogen-sealed water tank body (1), and a nitrogen delivery pipe (12) is installed on one side of the glass fiber reinforced plastic nitrogen-sealed water tank body (1), and the nitrogen delivery pipe (12) is connected to the water inlet pipe (11) through a valve.
3. The high purity glass fiber reinforced plastic nitrogen sealing water tank according to claim 1, characterized in that: A sealing connection ring (32) is fixedly connected to the inner wall of the hard connection ring plate (31), and the sealing connection ring (32) is snap-connected to the sealing liquid containing groove plate (2).
4. The high purity glass fiber reinforced plastic nitrogen sealing water tank according to claim 1, characterized in that: The top end of the deformable air barrier film (3) is fixedly connected to a plurality of telescopic adjustment rods (33), and the top ends of the plurality of telescopic adjustment rods (33) are fixedly connected to the bottom end of the sealing liquid containing groove plate (2).
5. The high purity glass fiber reinforced plastic nitrogen sealing water tank according to claim 1, characterized in that: The bottom end of the deformable air barrier membrane (3) is fixedly connected to a buoyancy chamber (34).
6. The high purity glass fiber reinforced plastic nitrogen sealing water tank according to claim 1, characterized in that: The bottom end of the L-shaped liquid sealing ring plate (4) is fixedly connected to a snap-fit positioning plate (41), and the snap-fit positioning plate (41) is snap-fitted into the sealing liquid containing groove plate (2).
7. The high purity glass fiber reinforced plastic nitrogen sealing water tank according to claim 1, characterized in that: Both sides of the L-shaped liquid sealing ring plate (4) are fixedly connected with sealing connection rings (42), and the opposite sides of the two sealing connection rings (42) are respectively in contact with the inner wall of the glass fiber reinforced plastic nitrogen sealing water tank body (1) and the inner wall of the sealing liquid containing groove plate (2).