Anti-falling detection device for wafer box

Abstract

The utility model provides an anti-falling detection device for a wafer box, which is applied to the technical field of wafer carrying, and is characterized in that a base plate is fixed on a driving part of a lifting mechanism, a baffle plate is fixed on the base plate, and a baffle block is fixed on one side, facing a door plate, of the baffle plate; the check block is provided with a groove, the detection sensor is installed in the groove, and the detection sensor is used for detecting whether the door plate exists at the opening of the preset position or not. The lifting mechanism lifts the wafer box to the preset position, whether the door plate of the wafer box at the preset position exists or not can be detected through the detection sensor so that the crown block system can stop advancing when carrying the wafer box, and under the condition that the door plate of the wafer box is not locked, the door plate is blocked through the check block in front of the door plate at the preset position; the probability that a door plate falls off in the crown block carrying process is reduced, and therefore the risk that wafers in a wafer box fall off from the wafer box in the crown block running process, and serious losses are caused is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of wafer conveying, in particular to a falling prevention detection device for a wafer box. BACKGROUND

[0002] In the semiconductor manufacturing process, a wafer box is usually conveyed by a crane system, and the wafer box is used to carry wafers, so that the wafer can be efficiently conveyed, processed and handled. The wafer is placed in the wafer box through the opening on the side of the wafer box, and the door plate of the wafer box can be locked at the opening of the wafer box by a locking mechanism to block the opening of the wafer box and prevent the wafer from falling out of the opening of the wafer box during conveying.

[0003] However, if the wafer box does not have a door plate or the door plate is easily fallen due to no locking, the wafer is likely to directly fall out of the wafer box during the operation of the crane.

[0004] Therefore, there is a need for a new technical solution. UTILITY MODEL CONTENT

[0005] Therefore, the utility model provides a falling prevention detection device for a wafer box.

[0006] The utility model provides the following technical scheme:

[0007] The falling prevention detection device for the wafer box provided by the utility model is conveyed by a crane, wherein the crane comprises a vehicle body, a walking mechanism, a lifting mechanism and a clamping mechanism.

[0008] The wafer is placed in the wafer box through the opening on the side of the wafer box, the opening is recessed towards the inside of the wafer box to form a placing groove for the door plate, the groove surface close to the inside of the wafer box is used to limit the door plate from tilting towards the inside of the wafer box, and the groove surface close to the bottom of the wafer box is used to abut against the bottom of the door plate to prevent the wafer in the inside of the wafer box from falling out.

[0009] The anti-falling detection device comprises a base plate, a baffle, a block and a detection sensor; the base plate is fixed to the driving part of the lifting mechanism, the baffle is installed on the base plate, and the baffle extends from the base plate to the position of the door plate corresponding to the preset position in the descending direction of the lifting mechanism, and the baffle is located on the side of the door plate away from the inside of the wafer box; the block is fixed to the side of the baffle facing the door plate and corresponding to the door plate, so that the block blocks the door plate from falling from the placing groove.

[0010] The surface of the block away from the baffle is provided with a groove, and the detection sensor is installed in the groove, and the detection sensor is used to detect whether the door plate exists at the opening of the preset position.

[0011] Preferably, the block corresponds to the upper region of the door plate of the preset position, so that the block corresponds to block the upper region of the door plate.

[0012] The anti-falling detection device further comprises two swing rods corresponding to the lower region of the door plate of the preset position and two driving mechanisms respectively corresponding to driving the swing rods to rotate, two swing rods are respectively rotationally connected to the two sides of the wafer box inside the vehicle body, two swing rods are located on the side of the lower region of the door plate away from the inside of the wafer box, two swing rods in the avoiding position are located on the two sides of the wafer box, two swing rods in the blocking position correspond to the lower region of the door plate, and there is a gap between the two swing rods, the rotation axis of the swing rod is parallel to the direction of the block towards the door plate, and the driving mechanism drives the corresponding swing rod to switch between the avoiding position and the blocking position.

[0013] The distance from the swing rod to the surface where the opening edge of the wafer box is located is less than the thickness of the door plate.

[0014] Preferably, the driving mechanism comprises driving members and a transmission assembly, the transmission assembly comprising a hinged four-bar mechanism, a first rotating member and a second rotating member; two driving members are installed on both sides of the wafer box inside the vehicle body, one driving member is correspondingly connected to one hinged four-bar mechanism in rotation, so that the hinged four-bar mechanism moves in a plane, and the movement plane of the hinged four-bar mechanism is perpendicular to the lifting direction of the lifting mechanism, the hinged four-bar mechanism is used to block the wafer box from falling, the two hinged four-bar mechanisms in the avoidance position are located on both sides of the wafer box, and the hinged four-bar mechanism in the blocking position is located at the bottom of the wafer box; the first rotating member is rotatably connected to the vehicle body, and the hinged four-bar mechanism is drivingly connected to the first rotating member to drive the first rotating member to rotate; the first rotating member is in meshing transmission with the second rotating member, and the second rotating member is fixedly connected to the swing rod, so that the driving member drives the hinged four-bar mechanism to switch between the avoidance position and the blocking position, and simultaneously drives the swing rod to switch between the avoidance position and the blocking position.

[0015] Preferably, the swing rod in the blocking position is smoothly transitioned with a guide arc-shaped plate near the upper edge of the surface where the door plate is located, and the guide arc-shaped plate extends from the swing rod away from the door plate.

[0016] Preferably, the detection sensor is an optical fiber sensor.

[0017] The stop block is a rigid stop block, the distance from the stop block to the surface where the opening edge of the wafer box is located is less than the thickness of the door plate; or the stop block is an elastic stop block, the detection sensor is located in the groove after deformation; the distance from the elastic stop block to the surface where the opening edge of the wafer box is located after deformation is less than the thickness of the door plate.

[0018] Preferably, the base plate has a mounting surface, and the mounting surface is located at the edge part of the lower plate surface of the base plate close to the baffle plate, the baffle plate is provided with a mounting plate, and the mounting plate is located at the top edge part of the surface where the opening of the baffle plate is located, and the mounting plate is fixed to the mounting surface.

[0019] The stop block is located at the bottom edge part of the surface where the opening of the baffle plate is located, the baffle plate is provided with a weight-reducing hole in the surface where the opening is located, and the weight-reducing hole is located between the mounting plate and the stop block.

[0020] Preferably, a reinforcing rod is fixed in the weight-reducing hole, and the reinforcing rod divides the weight-reducing hole into two sub-holes; two reinforcing plates are fixed between the mounting plate and the baffle plate, and the two reinforcing plates are located on the two sides of the weight-reducing hole respectively, and a groove structure is formed on the end face of the reinforcing plate away from the mounting plate, and the groove structure is open to the direction away from the baffle plate and to the direction of the descending of the clamping mechanism.

[0021] Preferably, the lifting part of the lifting mechanism is a belt, and the lifting mechanism realizes the lifting of the clamping mechanism by winding and unwinding the belt.

[0022] The part of the stop block away from the baffle plate and close to the bottom of the baffle plate is formed as a guide inclined surface, and the guide inclined surface is inclined to the baffle plate along the descending direction of the lifting mechanism, and the distance between the guide inclined surface and the baffle plate gradually decreases in the descending direction of the lifting mechanism.

[0023] Preferably, the wafer box is a front opening wafer transfer box or a front opening shipping box.

[0024] Preferably, the overhead crane further comprises a transverse moving mechanism, the driving part of the transverse moving mechanism is installed on the vehicle body, and the transverse moving part of the transverse moving mechanism is fixedly connected to the driving part of the lifting mechanism, so that the transverse moving mechanism drives the lifting mechanism to move transversely, and the moving direction of the moving mechanism, the transverse moving direction of the transverse moving mechanism and the lifting direction of the lifting mechanism are perpendicular to each other.

[0025] Compared with the prior art, the above-mentioned at least one technical scheme of the utility model can achieve the beneficial effects at least including:

[0026] The lifting mechanism of the application lifts the wafer box to a preset position, and the detection sensor can detect whether the door plate of the wafer box at the preset position exists, so as to stop the start of the travel of the overhead crane system when the overhead crane system carries the wafer box, and when the door plate of the wafer box is not locked, the door plate is blocked by the stop block on the baffle plate, so as to reduce the probability of the door plate falling in the carrying process of the overhead crane, thereby reducing the risk that the wafers in the wafer box fall out of the wafer box and cause serious loss during the operation of the overhead crane. In addition, the detection sensor is arranged in the groove of the stop block, which can protect the detection sensor on the one hand and keep the surface of the baffle plate flat on the other hand. BRIEF DESCRIPTION OF DRAWINGS

[0027] In order to more clearly illustrate the technical scheme of the embodiments of the application, the drawings needed in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creating laborious work.

[0028] Figure 1 is a structural schematic diagram of a baffle in the present application;

[0029] Figure 2 is a structural schematic diagram of relative positions of a baffle and a wafer box in the present application;

[0030] Figure 3 is a structural schematic diagram of relative positions of a hoist, a wafer box and a baffle in the present application;

[0031] Figure 4 is a schematic diagram of the present application highlighting the structure of a hoist.

[0032] Reference signs: 1, baffle; 2, detection sensor; 3, swing lever; 4, wafer box; 5, door plate; 6, vehicle body; 7, traveling mechanism, 8, lifting mechanism; 9, clamping mechanism; 10, base plate; 11, stop block; 12, transverse moving mechanism; 13, driving member; 14, hinge four-bar mechanism; 15, first rotating member; 16, second rotating member; 17, clamping jaw; 18, rotation detector; 19, first driving rod; 20, second driving rod; 21, guide arc plate; 22, mounting plate; 23, lightening hole; 24, reinforcing rod; 25, reinforcing plate; 26, slot structure; 27, guide inclined surface; 28, mushroom head. DETAILED DESCRIPTION

[0033] The embodiments of the present application will be described in detail below with reference to the drawings.

[0034] The above embodiments are only some of the embodiments of the present application, but not all of the embodiments of the present application. The present application can be implemented or applied in other different specific embodiments, and each detail in the present specification can be modified or changed based on different views and applications without departing from the spirit of the present application. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0035] It is to be understood that the embodiments described herein are illustrative only and the scope of the application should not be deemed limited thereto based on their description in the attached claims. As such, many changes and modifications can occur to those skilled in the art, to which the scope of the application is directed, without departing from the scope thereof as defined by the scope of the appended claims. For instance, although embodiments described herein relate to a particular wireless communication system, the scope of the application is not limited in this regard, and the embodiments disclosed herein can apply equally to any wireless communication system.

[0036] It is also to be understood that the following description is only illustrative in nature and is not intended to limit the scope of the present application, as defined by the appended claims, in which equivalents are to be permitted.

[0037] Furthermore, in the following description, numerous specific details are set forth in order to provide a thorough understanding of the examples. However, it will be apparent to one skilled in the art that the examples can be practiced without these specific details.

[0038] In view of this, the applicant, through in-depth research and improvement of wafer handling equipment and wafer boxes, finds that the FOUP (Front Opening Unified Pod) door plate has two locking mechanisms inside the FOUP. Currently, the OHT (Overhead Hoist Transfer, also known as the overhead crane) does not detect whether the FOUP door plate exists or not during operation, or cannot guarantee that the FOUP door plate will not fall off in the case that the FOUP door plate is not closed and locked.

[0039] If the FOUP does not have a door plate or the door plate is not locked during the wafer handling process, there is a risk that the wafer may fall directly from the FOUP during the OHT operation. From the perspective of wafer protection and reducing customer loss, it is necessary to detect whether the FOUP door plate exists before the OHT operation and effectively prevent the FOUP door plate from falling off during the operation.

[0040] Based on this, the technical solutions provided by the embodiments of the present application are described below in conjunction with the drawings.

[0041] The embodiments of the present specification propose a fall-preventing detection device for a wafer box, as shown in Figure 1 、 Figure 3 andFigure 4 As shown, the wafer box 4 is carried by the crane; the crane includes a vehicle body 6, a traveling mechanism 7, a lifting mechanism 8, and a clamping mechanism 9; the traveling mechanism 7 is connected to the vehicle body 6 and used to drive the vehicle body 6 to travel; the driving part of the lifting mechanism 8 is installed on the vehicle body 6, and the lifting part of the lifting mechanism 8 is connected to the clamping mechanism 9, which is used to clamp the wafer box 4, so that the lifting mechanism 8 lifts the wafer box 4 to a preset position by lifting the clamping mechanism 9. The traveling mechanism 7 is located outside the vehicle body 6, for example, is connected to the vehicle body 6 through a connecting shaft, and is relatively rotatable. The preset position is, for example, the initial conveying position of the wafer box 4, which is located below the lifting mechanism 8 and close to the lifting mechanism 8. The clamping mechanism 9 is provided with a clamping jaw 17 for clamping the mushroom head 28 at the top of the wafer box 4.

[0042] The wafer is placed in the wafer box 4 through the opening on the side of the wafer box 4, and the opening is recessed towards the inside of the wafer box 4 to form a placing groove of the placing door plate 5. The groove surface close to the inside of the wafer box 4 is used to limit the door plate 5 from falling towards the inside of the wafer box 4, and the groove surface close to the bottom of the wafer box 4 is used to abut against the bottom of the door plate 5, so that the door plate 5 is used to block the wafer in the wafer box 4 from falling.

[0043] The anti-falling detection device includes a base plate 10, a baffle 1, a stop block 11, and a detection sensor 2; the base plate 10 is fixed on the driving part of the lifting mechanism 8, the baffle 1 is installed on the base plate 10, and the baffle 1 extends from the base plate 10 to the position of the door plate 5 corresponding to the preset position in the descending direction of the lifting mechanism 8, and the baffle 1 is located on the side of the door plate 5 away from the inside of the wafer box 4. The stop block 11 is fixed on the side of the baffle 1 facing the door plate 5 and corresponding to the door plate 5, for example, the stop block 11 is located in the relatively overlapping area of the baffle 1 and the door plate 5, so that the stop block 11 blocks the door plate 5 from falling from the placing groove. For example, the stop block 11 can be fixed on the baffle 1 by a plurality of bolts, and the bolt head is embedded in the stop block 11, so that there is no protruding part on the surface of the stop block 11, so as not to affect the stop block 11 blocking the door plate 5. The base plate 10 can be part of the lifting mechanism housing.

[0044] The surface of the stop block 11 away from the baffle 1 is provided with a groove, and the detection sensor 2 is installed in the groove. The detection sensor 2 is used to detect whether the door plate 5 exists at the opening of the preset position. The detection sensor 2 is, for example, an optical fiber sensor. For example, the depth of the groove can reach the surface of the baffle 1, and the detection sensor 2 can be fixed on the baffle 1 and located in the groove.

[0045] In an embodiment, the crane further includes a transverse moving mechanism 12, the driving part of the transverse moving mechanism 12 is installed inside the vehicle body 6, the transverse moving part of the transverse moving mechanism 12 is fixedly connected to the driving part of the lifting mechanism 8, so that the transverse moving mechanism 12 drives the lifting mechanism 8 to move transversely, and the traveling direction of the traveling mechanism 7, the transverse direction of the transverse moving mechanism 12, and the lifting direction of the lifting mechanism 8 are perpendicular to each other.

[0046] The overhead crane has two traveling mechanisms 7, a car body 6 coupled with the two traveling mechanisms 7, and a transverse moving mechanism 12 arranged on the car body 6, which is used to move a lifting mechanism 8 arranged on the lower side of the transverse moving mechanism 12 in a direction perpendicular to the lifting direction of the lifting mechanism 8 and the traveling direction of the traveling mechanism 7. The lifting mechanism 8 is connected with a clamping mechanism 9 through a belt assembly, which allows the clamping mechanism 9 to be lifted and lowered.

[0047] In an embodiment, the wafer box 4 is a front opening wafer transfer box or a front opening shipping box.

[0048] The present application can detect whether the door plate 5 in the FOUP exists or not, and in the case that the door plate 5 in the FOUP is not locked, the door plate 5 can be guaranteed not to fall off during the OHT driving and carrying process, so as to ensure that the wafers in the FOUP do not fall out and cause serious loss during the operation of the overhead crane. The lower part of the baffle 11 is provided with a pad block protruding inward and towards one side of the FOUP relative to the baffle 1, the pad block is a stop block 11, and a recess is arranged on the pad block, and a sensor is arranged at the recess. The pad block can be rigid or have a certain elasticity, for example, made of rubber, which can resist the door and buffer the impact when the door is loosened. The sensor is used to detect whether the currently clamped FOUP has a door or is not closed. The baffle 1 is designed with an optical fiber sensor, when the door plate 5 of the FOUP is not covered due to improper operation or other reasons, the optical fiber sensor will act and send an alarm signal, and the overhead crane control system will send an alarm prompt and stop running after receiving the optical fiber sensor signal. Thus, the risk of wafer falling out of the FOUP during the operation of the overhead crane is prevented.

[0049] In an embodiment, as shown in Figure 1 and Figure 2 , the stop block 11 corresponds to the upper area of the door plate 5 at the preset position, so that the stop block 11 corresponds to block the upper area of the door plate 5.

[0050] As shown in Figure 1 , Figure 3 and Figure 4As shown, the anti-drop detection device also includes two rocker arms 3 corresponding to the lower area of ​​the door panel 5 that blocks the preset position and two driving mechanisms that respectively drive the rocker arms 3 to rotate. The two rocker arms 3 are respectively rotatably connected to the two sides of the wafer box 4 inside the vehicle body 6. The two rocker arms 3 are located on the side of the lower area of ​​the door panel 5 away from the interior of the wafer box 4. The two rocker arms 3 in the avoidance position are located on both sides of the wafer box 4. The two rocker arms 3 in the blocking position correspond to the lower area of ​​the door panel 5. There is a gap between the two rocker arms 3 and they do not interfere with each other and are symmetrically arranged. The straight line where the two rocker arms 3 are located is set at an angle. The rotation axis of the rocker arm 3 is parallel to the direction of the stop block 11 toward the door panel 5. The driving mechanism drives the corresponding rocker arm 3 to switch between the avoidance position and the blocking position. Figure 4 The dotted lines in FIG. 1 show the baffle 1 and the rocker 3 .

[0051] The distance from the swing arm 3 to the surface where the opening edge of the wafer box 4 is located is less than the thickness of the door panel 5 .

[0052] In one embodiment, Figure 3 and Figure 4 As shown, the driving mechanism includes a driving member 13 and a transmission assembly, and the transmission assembly includes a hinged four-bar mechanism 14, a first rotating member 15 and a second rotating member 16; the two driving members 13 are installed on both sides of the wafer box 4 inside the vehicle body 6, and one driving member 13 rotates the first transmission rod connected to a hinged four-bar mechanism 14 accordingly, and the rotation axis of the driving member 13 connected to the first transmission rod is parallel to the lifting direction of the lifting mechanism 8; the second transmission rod of the hinged four-bar mechanism 14 is used to prevent the wafer box 4 from falling, and the movement plane of the hinged four-bar mechanism 14 is perpendicular to the lifting direction of the lifting mechanism 8, and the two second transmission rods in the avoidance position are located on both sides of the wafer box 4, in the blocking position The second transmission rod in the blocking state is located at the bottom of the wafer box 4; the first rotating member 15 is rotationally connected to the vehicle body 6, and the third transmission rod of the hinged four-bar mechanism 14 is transmission-connected to the first rotating member 15 to drive the first rotating member 15 to rotate; the fourth transmission rods of the two hinged four-bar mechanisms 14 are correspondingly located on both sides of the interior of the vehicle body 6 along the opening direction of the wafer box 4, and the bevel tooth surface of the first rotating member 15 is meshed with the bevel tooth surface of the second rotating member 16 for transmission. The second rotating member 16 is fixedly connected to the rocker 3, so that the driving member 13 drives the second transmission rod to switch between the avoidance position and the blocking position through the hinged four-bar mechanism 14, and the rocker 3 is driven to switch between the avoidance position and the blocking position in a linked manner. The driving member 13 is, for example, a combination of a motor and a reducer. The present application provides a fixed baffle 1 on the lifting mechanism 8, and a rocker 3 that can switch its position and posture through motor drive is provided on the vehicle body 6.

[0053] The lifting mechanism 8 is an OHT lifting unit. The OHT lifting unit is designed with a baffle 1 corresponding to the upper region of the door plate 5. The height of the overlapping region of the baffle 1 relative to the door plate 5 is about one third of the size of the entire door plate 5, mainly blocking the upper region of the door plate 5. If it is less than one third, the blocking block 11 on the baffle 1 may not be able to block the upper region of the door plate 5 when the door plate 5 is tilted. The blocking block 11 of the blocking block 1 is combined with the swing lever 3, so as to block half or more of the size of the door plate 5. The baffle 1 can block the upper outer side of the FOUP door, and the swing lever 3 can block the middle and lower outer side of the FOUP door.

[0054] The transmission assembly further comprises a fixed rod, a rotation detector 18, a first driving rod 19 and a second driving rod 20.

[0055] The driving shaft of the driving member 13 is rotationally connected to the first transmission rod, one end of the first transmission rod is hingedly connected to one end of the second transmission rod, the other end of the second transmission rod is hingedly connected to one end of the third transmission rod, the other end of the third transmission rod is hingedly connected to one end of the fourth transmission rod, and the other end of the fourth transmission rod is hingedly connected to the other end of the first transmission rod.

[0056] The fixed rod is fixed to the third transmission rod and extends from the third transmission rod in a direction parallel to the lifting direction of the lifting mechanism 8, so that the fixed rod and the first transmission member 15 are fixedly connected, the rotation detector 18 is installed on the vehicle body 6 and is used for detecting the rotation of the first transmission member 15 by detecting the rotation of the fixed rod, one end of each first driving rod 19 is rotationally connected to the fixed rod, and the other end of each first driving rod 19 is used for abutting against two sides of the wafer box 4 which are away from each other, so as to stabilize the wafer box 4, one end of the second driving rod 20 is rotationally connected to the fourth transmission rod, and the other end of the second driving rod 20 is rotationally connected to the first driving rod 19.

[0057] In some embodiments, the rotation detector 18 is a detection sheet connected to the fixed rod, and one or more position sensors are further arranged on the outer side of the fixed rod. The one or more position sensors are fixed on the vehicle body through a connecting bracket or the like. When a plurality of position sensors are arranged, the plurality of position sensors are arranged in a circumferential direction around the fixed rod. When the detection sheet rotates with the fixed rod, the detection sheet rotates to the position of any of the aforementioned sensors to trigger the sensor, so that the position to which the fixed rod currently rotates can be detected, and the position of the swing lever 4 connected to the fixed rod can be obtained, such as the avoidance position and the blocking position of the swing lever. It can be easily understood that the position sensor in the embodiment can be a photoelectric sensor, a proximity switch or the like, and the utility model does not limit this.

[0058] The driving member 13 and the hinge four-bar mechanism 14 can also be components of the FOUP anti-falling unit on the vehicle body 6, and the swing lever 3 is a swing stop lever corresponding to the lower region of the door plate 5. The FOUP anti-falling unit on the vehicle body 6 is designed with a pair of swing stop levers driven by bevel gears. A driving motor drives a pair of bevel gears through the hinge four-bar mechanism 14, and the bevel gears drive the swing stop levers to swing. The swing stop levers and the FOUP anti-falling mechanism can realize linkage operation. When the left and right anti-falling mechanisms are actuated, the swing stop levers will be rotated to block in front of the FOUP. The distance between the swing stop levers and the FOUP is less than the thickness of the door plate 5 of the FOUP. The detection sensor 2 is fixed on the stop plate 1 in the present application. A pair of bevel gear assemblies are added by using the hinge screw mechanism in the OHT anti-falling unit, and a swing lever 3 is added at the end of the bevel gear. The swing stop levers on the anti-falling mechanism are used in combination with the stop plate 1 on the lifting mechanism, which can effectively prevent the door plate 5 from falling out of the FOUP at a certain angle during the operation of the overhead crane.

[0059] In an embodiment, as shown in Figure 3 , the swing lever 3 in the blocking position is close to the upper edge of the surface of the door plate 5 and smoothly transitions with a guide arc plate 21, and the guide arc plate 21 extends from the swing lever 3 towards the direction away from the door plate 5.

[0060] In an embodiment, as shown in Figure 1 and Figure 3 , the detection sensor 2 is an optical fiber sensor.

[0061] The stop block 11 is a rigid stop block 11, and the distance from the stop block 11 to the surface of the opening edge of the wafer box 4 is less than the thickness of the door plate 5. Alternatively, the stop block 11 is an elastic stop block 11, and the detection sensor 2 is in the recess after deformation. The distance from the elastic stop block 11 to the surface of the opening edge of the wafer box 4 after deformation is less than the thickness of the door plate 5.

[0062] In an embodiment, as shown in Figure 1 and Figure 3 , the base plate 10 has a mounting surface, and the mounting surface is located at the edge portion of the lower surface of the base plate 10 close to the stop plate 1. The stop plate 1 is provided with a mounting plate 22 located at the top edge portion of the surface of the stop plate 1 facing the opening, and the mounting plate 22 is fixed to the mounting surface. The base plate 10 can be a part of the housing of the lifting mechanism 8.

[0063] The stop block 11 is located at the bottom edge portion of the surface of the stop plate 1 facing the opening, and the stop plate 1 is provided with a weight-reducing hole 23 located between the mounting plate 22 and the stop block 11.

[0064] In an embodiment, as shown in Figure 1As shown, the weight-reducing hole 23 is fixed with a reinforcing rod 24, and the reinforcing rod 24 separates the weight-reducing hole 23 into two sub-holes. Specifically, the weight-reducing hole 23 is a rectangular hole, and the reinforcing rod 24 is fixed at the opposite corners of the rectangular hole to divide the two sub-holes into triangular holes. Two reinforcing plates 25 are fixed between the mounting plate 22 and the baffle 1, and the two reinforcing plates 25 are located on the two sides of the weight-reducing hole 23, respectively. The end face of the reinforcing plate 25 away from the mounting plate 22 is formed with a groove structure 26, and the groove structure 26 is open to the direction away from the baffle 1 and the direction of the downward movement of the clamping mechanism 9. The groove structure 26 is an expanded port avoiding groove, which avoids the clamping jaw 17 clamping the wafer box 4.

[0065] In an embodiment, as shown in Figure 1 、 Figure 3 and Figure 4 , the lifting part of the lifting mechanism 8 is a belt, and the lifting mechanism 8 drives the clamping mechanism 9 to move up and down by winding and unwinding the belt. The part of the stop block 11 close to the bottom of the baffle 1 is formed as a guide inclined surface 27, and the guide inclined surface 27 is inclined to the baffle 1 along the direction parallel to the downward movement of the lifting mechanism 8, and the distance between the guide inclined surface 27 and the baffle 1 gradually decreases from the bottom of the stop block 11 in the downward movement direction of the lifting mechanism 8. The belt is soft, and the FOUP is easy to contact or even hit the baffle 1 in the shaking condition. When the FOUP is lifted to a high position, the shaking amount is relatively insufficient to contact, and at this time, the clamping jaw 17 is partially guided by the mechanism and does not shake obviously. Moreover, the distance between the baffle 1 of the FOUP door and the FOUP door is less than the thickness of the FOUP door, which can effectively prevent the FOUP door from falling off the front of the FOUP 4 during the operation of the crane. The clamping jaw 17 is connected to the lifting mechanism 8 through the belt assembly, and the clamping jaw 17 is driven to move up and down by winding and unwinding the belt. The baffle 1 is fixed on the lifting mechanism 8, and when the clamping jaw 17 clamps the FOUP and lifts it to a position close to the lifting mechanism 8 below the lifting mechanism 8, the baffle 1 is spaced apart and blocked on the outside of the door plate 5. At this time, the swing rod 3 is driven by the motor to rotate to a position spaced apart and blocked on the outside of the door plate 5.

[0066] Before the OHT runs with full FOUP, the application detects whether there is a FOUP door plate 5 in the FOUP. If there is a FOUP door plate 5 in the FOUP, the crane can continue to run; if there is no FOUP door plate 5 in the FOUP, the crane needs to stop running and prompt the alarm model, thereby avoiding the risk of falling of the wafers in the FOUP during the operation of the crane due to the lack of protection of the FOUP door plate 5. At the same time, it can also effectively prevent the accidental situation of the FOUP door plate 5 falling off when the FOUP door plate 5 is not completely locked in the FOUP, so as to reduce the risk of the wafers falling during transportation.

[0067] The application applies to the field of OHT carrying wafers FOUP in AMHS, and provides a mechanism for detecting whether the door plate 5 of the FOUP exists or not and preventing the door plate 5 from falling. After the FOUP is grabbed by the OHT, before the OHT runs to carry the FOUP, the detection signal of whether the door plate 5 of the FOUP exists or not can be obtained through the feedback of the sensor, and corresponding action processing is made according to the feedback signal; during the operation of the crane, the door plate 5 of the FOUP is protected to prevent the wafer from falling due to the falling of the door plate 5 of the FOUP; a sensor is installed on the baffle 1 of the OHT lifting unit to meet the functional requirements of the door plate 5 detection in the FOUP and FOSB and other wafer related transport boxes; on the OHT, the anti-falling unit drives the hinge screw mechanism through the motor and drives the swing lever assembly to rotate a certain angle through a pair of bevel gears, so as to realize the functional requirements of preventing the door plate 5 of the FOUP and FOSB from falling. Among them, the full name of AMHS is Automated Material Handling System, which is Chinese for automatic material handling system, also known as crane system. The full name of FOSB is Front Opening Shipping Box, which is Chinese for front opening shipping box, also known as fully transparent wafer packaging box.

[0068] In the specification, the same and similar parts between various embodiments can be referred to each other, and each embodiment focuses on the difference from other embodiments. Especially for the embodiments described later, the description is relatively simple, and the relevant part can be referred to the part of the foregoing embodiment.

[0069] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited to this. Any person skilled in the art can easily think of changes or replacements within the technical range disclosed in the present application, which should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A wafer box anti-drop detection device, characterized in that: The wafer box is transported by an overhead crane; the overhead crane includes a vehicle body, a traveling mechanism, a lifting mechanism, and a clamping mechanism; the traveling mechanism is connected to the vehicle body and is used to drive the vehicle body to travel; the driving part of the lifting mechanism is installed on the vehicle body, and the lifting part of the lifting mechanism is connected to the clamping mechanism, and the clamping mechanism is used to clamp the wafer box, so that the lifting mechanism lifts the wafer box to a preset position by lifting the clamping mechanism; The wafers are placed inside the wafer box through the opening on the side of the wafer box. The opening is concave toward the wafer box to form a placement groove for placing the door panel. The groove surface of the placement groove close to the inside of the wafer box is used to limit the door panel from tipping into the wafer box. The groove surface of the placement groove close to the bottom of the wafer box is used to abut the bottom of the door panel, so that the door panel is used to prevent the wafers inside the wafer box from falling. The anti-drop detection device includes a base plate, a baffle, a stopper, and a detection sensor; the base plate is fixed to the driving part of the lifting mechanism, the baffle is installed on the base plate, and the baffle extends from the base plate along the descending direction of the lifting mechanism to a position of the door panel corresponding to a preset position, and the baffle is located on a side of the door panel facing away from the interior of the wafer box, and the stopper is fixed on a side of the baffle facing the door panel and corresponds to the door panel, so that the stopper prevents the door panel from falling from the placement slot; A groove is provided on the surface of the stop block facing away from the baffle, and the detection sensor is installed in the groove. The detection sensor is used to detect whether there is a door panel at the opening at a preset position.

2. The anti-drop detection device for a wafer box according to claim 1, characterized in that: The stopper corresponds to the upper area of ​​the door panel at a preset position, so that the stopper blocks the upper area of ​​the door panel; The anti-drop detection device also includes two swing arms corresponding to the lower area of ​​the door panel blocking the preset position and two driving mechanisms respectively driving the swing arms to rotate, the two swing arms are respectively rotatably connected to the two sides of the wafer box inside the vehicle body, the two swing arms are located on the side of the lower area of ​​the door panel away from the interior of the wafer box, the two swing arms in the avoidance position are located on both sides of the wafer box, the two swing arms in the blocking position correspond to the lower area of ​​the door panel, and there is a gap between the two swing arms, the rotation axis of the swing arm is parallel to the direction of the stop block toward the door panel, and the driving mechanism drives the corresponding swing arm to switch between the avoidance position and the blocking position; The distance from the swing arm to the surface where the opening edge of the wafer box is located is less than the thickness of the door panel.

3. The anti-drop detection device for a wafer box according to claim 2, characterized in that: The driving mechanism includes a driving member and a transmission assembly, wherein the transmission assembly includes a hinged four-bar mechanism, a first rotating member and a second rotating member; the two driving members are installed on both sides of the wafer box inside the vehicle body, and one driving member is correspondingly rotatably connected to the hinged four-bar mechanism so that the hinged four-bar mechanism performs planar motion, and the motion plane of the hinged four-bar mechanism is perpendicular to the lifting direction of the lifting mechanism, and the hinged four-bar mechanism is used to prevent the wafer box from falling. The two hinged four-bar mechanisms in the avoidance position are located on both sides of the wafer box, and the hinged four-bar mechanism in the blocking position is located at the bottom of the wafer box; the first rotating member is rotatably connected to the vehicle body, and the hinged four-bar mechanism is transmission-connected to the first rotating member to drive the first rotating member to rotate; the bevel tooth surface of the first rotating member meshes with the bevel tooth surface of the second rotating member for transmission, and the second rotating member is fixedly connected to the rocker link, so that when the driving member drives the hinged four-bar mechanism to switch between the avoidance position and the blocking position, the rocker link is linked to switch between the avoidance position and the blocking position.

4. The anti-drop detection device for a wafer box according to claim 2, characterized in that: The upper edge of the surface of the swing rod in the blocking position close to the door panel is smoothly transitioned to a guide arc plate, and the guide arc plate extends from the swing rod in a direction away from the door panel.

5. The anti-drop detection device for a wafer box according to claim 1, characterized in that: The detection sensor is an optical fiber sensor; The stop block is a rigid stop block, and the distance from the stop block to the surface where the opening edge of the wafer box is located is less than the thickness of the door panel; or, the stop block is an elastic stop block, and the detection sensor is located inside the groove after deformation; the distance from the elastic stop block to the surface where the opening edge of the wafer box is located is less than the thickness of the door panel after deformation.

6. The anti-drop detection device for a wafer box according to claim 1, characterized in that: The base plate has a mounting surface, and the mounting surface is located at an edge of the lower plate surface of the base plate close to the baffle. The baffle is mounted with a mounting plate, and the mounting plate is located at a top edge of the baffle surface facing the opening, and the mounting plate is fixed to the mounting surface. The stopper is located at the bottom edge of the side of the baffle facing the opening. A weight-reducing hole is provided on the side of the baffle facing the opening, and the weight-reducing hole is located between the mounting plate and the stopper.

7. The anti-drop detection device for a wafer box according to claim 6, characterized in that: A reinforcing rod is fixed in the weight-reducing hole, and the reinforcing rod divides the weight-reducing hole into two sub-holes; two reinforcing plates are fixed between the mounting plate and the baffle, and the two reinforcing plates are respectively located on both sides of the weight-reducing hole, and a groove-like structure is formed on the end surface of the reinforcing plate away from the mounting plate, and the groove-like structure is an open structure in the direction away from the baffle and in the direction of the clamping mechanism descending.

8. The anti-drop detection device for a wafer box according to claim 1, characterized in that: The lifting part of the lifting mechanism is a belt, and the lifting mechanism realizes the lifting and lowering of the clamping mechanism by pulling the belt; A portion of the surface of the block facing away from the baffle and close to the bottom of the baffle is formed as a guide slope, and the guide slope is inclined toward the baffle in a direction parallel to the descending direction of the lifting mechanism, and the distance between the guide slope and the baffle gradually decreases in the descending direction of the lifting mechanism.

9. The anti-drop detection device for a wafer box according to claim 1, characterized in that: The wafer box is a front-opening wafer transfer box or a front-opening shipping box.

10. The anti-drop detection device for a wafer box according to claim 1, characterized in that: The overhead crane also includes a transverse movement mechanism, the driving part of the transverse movement mechanism is installed on the vehicle body, and the transverse movement part of the transverse movement mechanism is fixedly connected to the driving part of the lifting mechanism so that the transverse movement mechanism drives the lifting mechanism to move laterally, and the walking direction of the walking mechanism, the transverse direction of the transverse movement mechanism and the lifting direction of the lifting mechanism are perpendicular to each other.

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