Vacuum coating equipment, vacuum coating system and solar cell production line

Abstract

The utility model discloses vacuum coating equipment, a vacuum coating system and a solar cell production line, and relates to the technical field of coating equipment. The vacuum coating equipment is favorable for improving the uniformity of a film layer formed on the to-be-coated piece. The vacuum coating equipment comprises a shell, a first electrode piece and a second electrode assembly. Wherein a containing cavity is defined by the shell, and at least one air inlet is formed in the shell; the first electrode piece is arranged in the accommodating cavity; the second electrode assembly is arranged in the containing cavity, a containing space is formed between the second electrode assembly and the first electrode piece, the second electrode assembly is provided with a plurality of spraying holes, the spraying holes are all communicated with the gas inlet, and the process gas sequentially passes through the gas inlet and the spraying holes to flow to the containing space.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of coating equipment, in particular to a vacuum coating equipment, a vacuum coating system and a solar cell production line. BACKGROUND

[0002] The vacuum coating technology is used for the coating process of solar cell. For the plasma enhanced chemical vapor deposition (PECVD) vacuum coating equipment, the uniformity of the coating layer is one of the indexes for measuring the performance of the equipment. In the related art, the thickness of the coating layer formed by the vacuum coating equipment on different areas of the piece to be coated is not consistent. SUMMARY

[0003] The present application provides a vacuum coating equipment, a vacuum coating system and a solar cell production line, which are beneficial to improve the uniformity of the coating layer formed on the piece to be coated.

[0004] The first aspect of the present application provides a vacuum coating equipment, which comprises a housing, a first electrode piece and a second electrode assembly. The housing encloses a receiving cavity, and the housing has at least one gas inlet. The first electrode piece is arranged in the receiving cavity. The second electrode assembly is arranged in the receiving cavity and has a receiving space between the first electrode piece and the second electrode assembly. The second electrode assembly has a plurality of spray holes, and the plurality of spray holes are in communication with the gas inlet. Process gas flows to the receiving space through the gas inlet and the plurality of spray holes in sequence.

[0005] The vacuum coating equipment provided by the present application has the receiving cavity formed in the housing, so that the first electrode piece and the second electrode assembly can be installed in the receiving cavity, and the receiving space is formed between the first electrode piece and the second electrode assembly. The piece to be coated can be placed in the receiving space to facilitate coating. Meanwhile, the plurality of spray holes are arranged on the second electrode assembly, and each spray hole is in communication with the gas inlet of the housing. The process gas can enter the receiving space from multiple points through the plurality of spray holes after passing through the gas inlet, so that the process gas is uniformly distributed in the receiving space, a uniform gas field is formed in the receiving space, and the uniformity of the coating layer formed on the piece to be coated is improved.

[0006] In a possible implementation manner of the present application, the second electrode assembly comprises a second electrode piece and a spray piece. The second electrode piece and the spray piece enclose a uniform gas cavity. The spray holes are arranged on the spray piece and are in communication with the uniform gas cavity. The spray piece is located between the second electrode piece and the first electrode piece. The second electrode piece has a gas outlet hole. The uniform gas cavity is in communication with the gas inlet through the gas outlet hole.

[0007] In the technical solution of the present application, the second electrode assembly includes the second electrode piece and the spraying piece, the uniform gas cavity can be formed by the spraying piece and the second electrode piece, the gas outlet holes on the second electrode piece are communicated with the gas inlet on the shell, and the spraying holes are arranged on the spraying piece. In this way, after the process gas enters the uniform gas cavity through the gas outlet holes on the second electrode piece, the process gas can first fill the uniform gas cavity, and then flow to the containing space from the plurality of spraying holes after the uniform gas cavity is filled with or close to being filled with the process gas, which is beneficial to the uniform distribution of the process gas in the containing space.

[0008] In a possible implementation manner of the present application, the gas distribution channel is arranged between the gas outlet hole and the gas inlet, one end of the gas distribution channel is communicated with the gas inlet, and the other end of the gas distribution channel has a plurality of gas distribution holes, each of which is communicated with a gas outlet hole.

[0009] In the technical solution of the present application, the gas distribution channel is arranged between the gas inlet and the plurality of gas outlet holes, so that the plurality of gas outlet holes are communicated with the same gas inlet through a group of gas distribution channels, thereby the process gas entering the vacuum coating equipment from one gas inlet can be distributed to the plurality of gas outlet holes through the gas distribution channel, and the purpose of simultaneously conveying the process gas to the uniform gas cavity through the plurality of gas outlet holes can be achieved.

[0010] In a possible implementation manner of the present application, the second electrode piece has the gas distribution channel, the gas distribution channel is communicated with the gas inlet through the first gas inlet pipe, and the distance between adjacent two gas outlet holes is consistent.

[0011] In the technical solution of the present application, the gas distribution channel is arranged on the second electrode, which can reduce the space occupied by the gas distribution channel in the vacuum coating equipment, and is beneficial to the miniaturization of the vacuum coating equipment. Moreover, the distance between adjacent two gas outlet holes is consistent, so that each gas outlet hole can convey the process gas to the same volume of space in the uniform gas cavity, thereby the process gas in the uniform gas cavity can be more uniformly distributed.

[0012] In a possible implementation manner of the present application, the connecting lines of the three spraying holes adjacent to each other in turn around the vertical second electrode assembly form an equilateral triangle.

[0013] In the technical solution of the present application, the three spraying holes adjacent to each other are arranged in the form of an equilateral triangle on the spraying piece, so that the distance between any two adjacent spraying holes is the same, thereby the uniformity of the process gas in the containing space can be improved.

[0014] In a possible implementation manner of the present application, the spraying hole includes an extension section and an expansion section, the diameter of the expansion section is greater than that of the extension section, the extension section is a part of the spraying hole away from the first electrode piece, and the expansion section is a part of the spraying hole close to the first electrode piece.

[0015] In the technical solution of the present application, the diameter of the expansion section of the spray hole is larger than the diameter of the extension section. During the process that the process gas flows through the extension section and the expansion section in sequence to the accommodation space, the cross section of the channel through which the process gas flows increases. This not only allows the process gas to diffuse to a larger area in the accommodation space, but also slows down the flow rate of the process gas, which is conducive to the smooth flow and diffusion of the process gas, so that the process gas in each area of the accommodation space is more uniform.

[0016] In a possible implementation manner of the present application, the diameter of the expansion section continuously increases from the second electrode assembly to the first electrode piece.

[0017] In the technical solution of the present application, the diameter of the expansion section continuously increases, which can uniformly slow down the flow rate of the process gas flowing through the expansion section, so that the process gas can flow and diffuse more smoothly to the accommodation space.

[0018] The second aspect of the present application provides a vacuum coating system, which comprises a gas mixing piece and the vacuum coating device provided in any one of the first aspect. The gas mixing piece has a gas mixing cavity and a first gas outlet in communication with the gas mixing cavity, and the gas mixing cavity is capable of being in communication with a gas source. The gas inlet on the shell is in communication with the first gas outlet.

[0019] The vacuum coating system provided by the present application comprises the vacuum coating device provided in any one of the first aspect, so that the process gas in the accommodation space in the vacuum coating device is uniformly distributed, thereby forming a uniform gas field in the accommodation space, which is conducive to improving the uniformity of the film layer formed on the piece to be coated.

[0020] In a possible implementation manner of the present application, the vacuum coating system further comprises a buffer tank, the buffer tank has a buffer cavity, the buffer tank has a gas inlet and a plurality of second gas outlets in communication with the buffer cavity, the gas inlet is in communication with the first gas outlet, and one second gas outlet is in communication with one gas inlet.

[0021] In the technical solution of the present application, the buffer tank is further arranged between the gas mixing piece and the vacuum coating device, so that the buffer tank can be used to fully mix a plurality of process gases, which is conducive to improving the uniformity of the mixed process gases.

[0022] In a possible implementation manner of the present application, the end of the gas inlet away from the accommodation cavity is provided with a control piece, and the control piece is used to control the flow rate of the process gas flowing into the gas inlet.

[0023] In the technical solution of the present application, the control piece is arranged at the end of the gas inlet away from the controller, so as to control the flow rate and flow of the process gas flowing into the vacuum coating device through the gas inlet.

[0024] The third aspect of the present application provides a solar cell production line, comprising: a transfer device and the vacuum coating device provided in any one of the first aspect. The transfer device is used to transport the solar cell to the vacuum coating device and / or remove the solar cell from the vacuum coating device.

[0025] The solar cell production line provided by the embodiments of the present application can make the process gas uniformly distributed in the accommodation space of the vacuum coating device, so as to form a uniform gas field in the accommodation space, thereby facilitating the uniformity of the film layer formed on the piece to be coated. BRIEF DESCRIPTION OF DRAWINGS

[0026] Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The accompanying drawings are included to provide a description of the preferred embodiments, and are not intended to limit the scope of the present application. Moreover, like reference numerals designate like parts throughout the several views in the drawings. In the drawings:

[0027] Figure 1 a structural schematic diagram of the vacuum coating device provided by the present application;

[0028] Figure 2 a structural schematic diagram of the second electrode assembly in the vacuum coating device provided by the present application;

[0029] Figure 3 a structural schematic diagram of the vacuum coating system provided by the present application;

[0030] Figure 4 a distribution schematic diagram of the spray holes in the vacuum coating device provided by the present application;

[0031] Figure 5 a structural schematic diagram of the spray holes in the vacuum coating device provided by the present application Figure 1 ;

[0032] Figure 6 a structural schematic diagram of the spray holes in the vacuum coating device provided by the present application Figure 2 .

[0033] BRIEF DESCRIPTION OF DRAWINGS:

[0034] 1 - shell; 11 - box body; 12 - cover body; 13 - air inlet; 14 - accommodation space; 15 - cleaning gas inlet; 2 - first electrode piece; 3 - second electrode assembly; 31 - second electrode piece; 311 - air outlet hole; 312 - air distribution channel; 3121 - main channel; 3122 - first branch channel; 3123 - second branch channel; 3124 - third branch channel; 32 - spraying piece; 321 - spraying hole; 3211 - extension section; 3212 - expansion section; 33 - air uniformizing cavity; 34 - connecting plate; 4 - control piece; 5 - gas mixing piece; 6 - buffer tank; 7 - connecting rod; 8 - first air inlet pipe; 9 - second air inlet pipe; Z - arrangement direction. DETAILED DESCRIPTION

[0035] The embodiments of the technical solutions of the present application will be described in detail below with reference to the drawings. The following embodiments are only used to more clearly illustrate the technical solutions of the present application, and therefore only serve as examples, and cannot limit the protection scope of the present application.

[0036] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the present application; the terms "include" and "have" and any variations thereof in the specification and the above description of drawings are intended to cover non-exclusive inclusion.

[0037] In the description of the embodiments of the present application, the technical terms "first", "second", "third" and the like are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number, specific order or primary and secondary relationship of the indicated technical features. In the description of the embodiments of the present application, the meaning of "multiple" is two or more, unless otherwise explicitly and specifically limited.

[0038] Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the present application. The appearance of the phrase in various places in the specification does not necessarily all refer to the same embodiment, nor is it necessarily independent or alternative embodiments to other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0039] In the description of the embodiments of the present application, the term "and / or" is only a description of the association relationship of the associated objects, which means that there can be three relationships, for example, A and / or B, which can represent the three cases of A alone, A and B together, and B alone. In addition, the character " / " in this paper generally represents the "or" relationship between the front and rear associated objects.

[0040] In the description of the embodiments of the present application, the directions or positional relationships indicated by the technical terms "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "circumferential" and the like are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed, operated or used in a particular orientation, and therefore cannot be understood as a limitation on the embodiments of the present application.

[0041] In the description of the embodiments of the present application, unless otherwise explicitly specified and limited, the technical terms "mounting", "connecting", "connecting", "fixing" and the like should be understood in a broad sense, for example, can be fixedly connected, or can be detachably connected, or can be integrated; can be mechanically connected, or can be electrically connected; can be directly connected, or can be indirectly connected through an intermediate medium, or can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0042] In the description of the embodiments of the present application, unless otherwise explicitly specified and limited, the technical term "contact" should be understood in a broad sense, which can be direct contact or contact through an intermediate medium layer, and can be contact between two objects in contact without interaction force, or can be contact between two objects in contact with interaction force.

[0043] The plasma enhanced chemical vapor deposition (PECVD) technology is a commonly used film coating technology. In this technology, plasma is generated under the action of an electric field, and gaseous substances containing film layer component atoms are chemically reacted by means of the plasma to deposit a film layer on the surface of a substrate to be coated.

[0044] For a plasma enhanced chemical vapor deposition (PECVD) vacuum film coating device, there are many factors that affect the uniformity of the film layer. The uniformity of the electric field, the temperature field and the gas field of the vacuum film coating device in the working state can affect the uniformity of the film layer. For example, in the case of uneven distribution of process gas in the vacuum film coating device, the chemical reactions at different positions in the vacuum film coating device under the action of plasma are different, thereby affecting the thickness of the film layer formed in different areas of the substrate, and the film layer on the substrate is not uniform in thickness.

[0045] The embodiment of the present application provides a vacuum coating equipment, which can improve the uniformity of the film formed on the film-coated part. Figure 1 , Figure 2 and Figure 3 , Figure 1 The embodiment of the present application provides a vacuum coating equipment, which can improve the uniformity of the film formed on the film-coated part. Figure 2 The embodiment of the present application provides a vacuum coating equipment, which can improve the uniformity of the film formed on the film-coated part. Figure 3 The embodiment of the present application provides a vacuum coating equipment, which can improve the uniformity of the film formed on the film-coated part. The vacuum coating equipment provided by the embodiment of the present application comprises a shell 1, a first electrode 2 and a second electrode assembly 3. The shell 1 is enclosed to form a containing cavity, and the shell 1 is provided with at least one gas inlet 13; the first electrode 2 is arranged in the containing cavity; the second electrode assembly 3 is arranged in the containing cavity and has a containing space 14 with the first electrode 2, and the second electrode assembly 3 is provided with a plurality of spray holes 321, the plurality of spray holes 321 are communicated with the gas inlet 13, and the process gas flows to the containing space 14 through the gas inlet 13 and the plurality of spray holes 321 in sequence.

[0046] In the embodiment of the present application, the shell 1 is used to arrange other components in the vacuum coating equipment, and the shell 1 can be arranged as a structure with a containing cavity, so that other components can be installed in the containing cavity. For example, the containing cavity is arranged as a sealed cavity, and the containing cavity can be pumped by a negative pressure pump or the like, so that a negative pressure state (vacuum environment) meeting the use requirement is formed in the containing cavity.

[0047] For example, as shown in Figure 1 , the shell 1 can be arranged as a structure comprising a box body 11 and a cover body 12. For example, the box body 11 can be a cuboid structure with a containing groove, and the plate-shaped cover body 12 can be sealed and covered on the opening of the box body 11 to form the shell 1 with the containing cavity. The box body 11 and the cover body 12 can both be made of aluminum or aluminum alloy.

[0048] For example, as shown in Figure 3 , the gas inlet 13 can be arranged on the shell wall of the shell 1, so that the containing cavity of the shell 1 is connected with the gas source of the process gas through the gas inlet 13. For example, a through hole serving as the gas inlet 13 can be arranged on the cover body 12, the through hole is connected with the gas source through a pipeline, one gas inlet 13 can be arranged on the cover body 12, or a plurality of gas inlets 13 can be arranged on the cover body 12, and the number of the gas inlets 13 is not limited in the embodiment of the present application. In this way, the process gas can enter the containing cavity through the pipeline and the gas inlet 13.

[0049] In the embodiments of the present application, the first electrode member 2 and the second electrode assembly 3 are used to form an electromagnetic field in the accommodating cavity, so that plasma can be generated in the accommodating cavity. For example, the first electrode member 2 and the second electrode assembly 3 can be arranged in a structure comprising at least two electrode plates, the at least two electrode plates are arranged in the accommodating cavity, and a gap is provided between the first electrode member 2 and the second electrode assembly 3 to form an accommodating space 14 between the second electrode assembly 3 and the first electrode member 2.

[0050] As shown in the examples, Figure 1 The first electrode member 2 can be arranged in a flat plate shape, the flat plate-shaped first electrode member 2 can be mounted at the bottom of the box body 11, and the first electrode member 2 can be electrically connected to the negative electrode of the power supply or grounded. For example, a jacking mechanism can be provided, a jacking rod in the jacking mechanism passes through the bottom of the box body 11, a driving member in the jacking mechanism is fixedly connected with the jacking rod, and the first electrode member 2 is fixedly connected with one end of the jacking rod in the box body 11. Then the first electrode member 2 can be driven by the jacking mechanism to move a certain distance in the box body 11 towards or away from the second electrode assembly 3.

[0051] In another example, the second electrode assembly 3 can also be arranged in a flat plate shape, and the second electrode assembly 3 can be connected with the cover body 12 to arrange the second electrode assembly 3 in the accommodating cavity. A conductive member can be provided on the cover body 12, and the conductive member can be welded or threadedly connected with the second electrode assembly 3. Then the second electrode assembly 3 can be electrically connected with the power supply through the conductive member.

[0052] In yet another example, a plurality of spray holes 321 can be provided on the second electrode assembly 3. For example, the plurality of spray holes 321 can be uniformly distributed on the second electrode assembly 3, one end of each spray hole 321 is in communication with the accommodating space 14, and the other end of each spray hole 321 is in communication with the air inlet 13 on the shell 1. For example, a pipeline can be used, one end of the pipeline is connected with the air inlet 13, and a plurality of branches can be provided at the other end of the pipeline. Each branch can be in communication with a spray hole 321, so that each spray hole 321 is in communication with the air inlet 13.

[0053] The vacuum coating device provided by the embodiments of the present application has the accommodation cavity formed in the shell 1, the first electrode member 2 and the second electrode assembly 3 can be both installed in the accommodation cavity, and the accommodation space 14 is formed between the first electrode member 2 and the second electrode assembly 3, the workpiece to be coated can be placed in the accommodation space 14, so that the workpiece to be coated can be coated. Meanwhile, the plurality of spray holes 321 are arranged on the second electrode assembly 3, and each spray hole 321 is communicated with the gas inlet 13 on the shell 1, so that the process gas can enter the accommodation space 14 from multiple points through the plurality of spray holes 321 after passing through the gas inlet 13, so that the process gas in the accommodation space 14 can be uniformly distributed, and a uniform gas field can be formed in the accommodation space 14, thereby facilitating the uniformity of the film formed on the workpiece to be coated.

[0054] In some possible embodiments of the present application, as shown in Figure 1 The second electrode assembly 3 includes the second electrode member 31 and the spray member 32, the second electrode member 31 and the spray member 32 enclose the gas uniformization cavity 33, the spray holes 321 are arranged on the spray member 32 and communicated with the gas uniformization cavity 33, the spray member 32 is located between the second electrode member 31 and the first electrode member 2, the second electrode member 31 has the gas outlet hole 311, and the gas uniformization cavity 33 is communicated with the gas inlet 13 through the gas outlet hole 311.

[0055] In the embodiments of the present application, the second electrode assembly 3 can be arranged in the structure including the spray member 32 and the second electrode member 31. For example, the spray member 32 and the second electrode member 31 can both be arranged in the flat plate structure, the second electrode member 31 can be connected with the cover 12 in the shell 1 through the connecting rods 7, and a plurality of connecting rods 7 can be arranged between the cover 12 and the second electrode member 31. The connecting plate 34 can be arranged between the spray member 32 and the second electrode member 31, the connecting plate 34 is arranged around the second electrode member 31, so as to fix and connect the second electrode member 31 and the spray member 32 through the connecting plate 34, and the gas uniformization cavity 33 is enclosed by the connecting plate 34, the second electrode member 31 and the spray member 32.

[0056] For example, the gas outlet hole 311 can be arranged on the second electrode member 31 and extend from the side of the second electrode member 31 away from the spray member 32 to the side close to the spray member 32, for example, one end of the gas outlet hole 311 away from the spray member 32 can be communicated with the gas inlet 13 through the pipeline, or the gas flow channel can be formed on the second electrode member 31, the plurality of gas outlet holes 311 are communicated through the gas flow channel, and the gas flow channel is communicated with the gas inlet 13. For example, the gas flow channel can be a plurality of hole channels.

[0057] In another example, the spray holes 321 can be arranged on the spray member 32, and the spray holes 321 can be approximately trumpet-shaped through holes or cylindrical through holes. A plurality of spray holes 321 can be uniformly distributed on the spray member 32, that is, the distance between two adjacent spray holes 321 is equal or close to equal.

[0058] In the above embodiment, since the second electrode assembly 3 includes the second electrode member 31 and the spray member 32, the uniform gas cavity 33 can be formed by the spray member 32 and the second electrode member 31, the gas outlet holes 311 on the second electrode member 31 are communicated with the gas inlet 13 on the shell 1, the spray holes 321 are arranged on the spray member 32, and the process gas can first fill the uniform gas cavity 33 after the process gas enters the uniform gas cavity 33 through the gas outlet holes 311 on the second electrode member 31. After the uniform gas cavity 33 is filled with or close to filled with the process gas, the process gas flows to the containing space 14 from the plurality of spray holes 321, which is beneficial to make the process gas more uniformly distributed in the containing space 14.

[0059] In some possible embodiments of the present application, as shown in Figure 2 The gas distribution channel 312 has one end communicated with the gas inlet 13 and the other end having a plurality of gas distribution openings, and each gas distribution opening is communicated with one gas outlet hole 311.

[0060] In the embodiments of the present application, the gas distribution channel 312 can be arranged between the gas inlet 13 and the gas outlet hole 311, so as to communicate at least two gas outlet holes 311 with the same gas inlet 13 through the gas distribution channel 312.

[0061] For example, the gas distribution channel 312 can be arranged in the structure of a plurality of pipes, and the distribution and connection mode of the plurality of pipes are as shown in Figure 2 For example, one main channel 3121 can be arranged, the main channel 3121 is communicated with the gas inlet 13 through a connecting pipe, a first branch channel 3122 is connected at each end of the main channel 3121, a second branch channel 3123 is connected at each end of the first branch channel 3122, a third branch channel 3124 is connected at each end of the second branch channel 3123, and each end of the third branch channel 3124 is taken as a gas distribution opening. In this way, each gas distribution opening is communicated with one gas outlet hole 311 on the second electrode member 31, and one gas inlet 13 can be communicated with sixteen gas outlet holes 311 through the gas distribution channel 312.

[0062] Another example, the main passage 3121, the first branch passage 3122, the second branch passage 3123 and the third branch passage 3124 of the gas distribution passage 312 can all be made of a pipe made of plastic, metal, ceramic or the like. The gas distribution passage 312 can be located in the region between the cover 12 and the second electrode member 31. In the above manner of arranging the gas distribution passage 312, one gas inlet 13 can be in communication with thirty-two gas outlets 311, or one gas inlet 13 can be in communication with sixty-four gas outlets 311, and the number of gas outlets 311 in communication with the same gas inlet 13 is not limited in the embodiments of the present application.

[0063] In the above embodiments, since the gas distribution passage 312 is arranged between the gas inlet 13 and the plurality of gas outlets 311, the plurality of gas outlets 311 can be in communication with the same gas inlet 13 through a group of gas distribution passages 312, so that the process gas entering the vacuum coating device from one gas inlet 13 can be distributed to the plurality of gas outlets 311 through the gas distribution passages 312, and the process gas can be simultaneously delivered to the uniformizing chamber 33 through the plurality of gas outlets 311.

[0064] In some possible embodiments of the present application, as shown in Figure 1 The second electrode member 31 has the gas distribution passage 312, which is in communication with the gas inlet 13 through the first gas inlet pipe 8, and the distance between adjacent two gas outlets 311 is consistent.

[0065] In the embodiments of the present application, the gas distribution passage 312 can be arranged on the second electrode member 31, for example, the gas distribution passage 312 can be arranged on the side of the second electrode member 31 close to the cover 12, and the gas outlet can be arranged on the side of the second electrode member 31 away from the shower member 32.

[0066] For example, the distribution form of the gas distribution passage 312 arranged on the second electrode member 31 can refer to the form shown in Figure 2 For example, the recess of the main passage 3121 can be first formed on the second electrode member 31, then the recess of the first branch passage 3122 in communication with the recess of the main passage 3121 is formed, then the recess of the second branch passage 3123 in communication with the recess of the first branch passage 3122 is formed, then the recess of the second branch passage 3123 is in communication with the plurality of gas outlets 311 through the recess of the third branch passage 3124, and finally the cover plate is arranged on each recess, and the opening end of each recess is sealed by the cover plate, so as to form a gas distribution passage 312 on the second electrode member 31. The main passage 3121 of one gas distribution passage 312 can be in communication with one gas inlet 13 through the first gas inlet pipe 8. A plurality of gas distribution passages 312 can be arranged on the second electrode member 31 in the above manner.

[0067] Another example, as shown inFigure 2 As shown in the drawings, the plurality of gas outlet holes 311 on the second electrode piece 31 can be arranged on the second electrode piece 31 in an equidistant manner. For example, the plurality of gas outlet holes 311 can be arranged in a rectangular array, and the distance between any two adjacent gas outlet holes 311 is consistent or close to consistent.

[0068] In the above embodiment, since the gas distribution channel 312 is arranged on the second electrode, the space occupied by the gas distribution channel 312 in the vacuum coating equipment can be reduced, which is conducive to the miniaturization of the vacuum coating equipment. Moreover, the consistent distance between the two adjacent gas outlet holes 311 can make each gas outlet hole 311 transport process gas to the same volume of space in the uniform gas cavity 33, so that the process gas in the uniform gas cavity 33 can be more evenly distributed.

[0069] In some possible embodiments of the present application, as shown in the drawings, the shell 1 has a plurality of gas inlets 13, and each gas inlet 13 is in communication with a gas distribution channel 312. Figure 3

[0070] In the embodiments of the present application, at least two gas inlets 13 can be arranged on the shell 1, and at least two gas distribution channels 312 can be arranged on the second electrode piece 31. One gas inlet 13 and one gas distribution channel 312 can be communicated by one first gas inlet pipe 8. For example, four gas inlets 13 can be arranged on the cover 12 in the shell 1, and four gas distribution channels 312 can be arranged on the second electrode piece 31. The four gas inlets 13 can be communicated with the gas source by pipelines.

[0071] For example, as shown in the drawings, Figure 1 and Figure 3 A cleaning gas inlet 15 can also be arranged on the cover 12, and the cleaning gas inlet 15 is in communication with the uniform gas cavity 33. For example, a second gas inlet pipe 9 can be arranged on the cover 12, one end of the second gas inlet pipe 9 is in communication with the cleaning gas inlet 15, and the second gas inlet pipe 9 passes through the second electrode piece 31. Alternatively, a cleaning gas through hole can be arranged on the second electrode piece 31, and the second gas inlet pipe 9 is in communication with the cleaning gas through hole, so that the second gas inlet pipe 9 is in communication with the uniform gas cavity 33. The cleaning gas inlet 15 can be communicated with a cleaning gas source, so that the impurity gas in the vacuum coating equipment can be discharged by the cleaning gas.

[0072] In the above embodiment, since a plurality of gas inlets 13 are arranged on the shell 1, each gas inlet 13 can be communicated with a gas distribution channel 312, so that the number of channels for transporting process gas into the vacuum coating equipment can be increased, which is conducive to improving the efficiency of transporting process gas into the vacuum coating equipment.

[0073] ​In some possible embodiments of the present application, the distance between any two adjacent spray holes 321 is consistent.

[0074] In some possible embodiments of the present application, the distance between any two adjacent spray holes 321 is consistent.

[0075] In some possible embodiments of the present application, the distance between any two adjacent spray holes 321 is consistent.

[0076] In some possible embodiments of the present application, the distance between any two adjacent spray holes 321 is consistent.

[0077] In some possible embodiments of the present application, the distance between any two adjacent spray holes 321 is consistent. Figure 1 and Figure 4 In some possible embodiments of the present application, the distance between any two adjacent spray holes 321 is consistent. Figure 4 In some possible embodiments of the present application, the distance between any two adjacent spray holes 321 is consistent.

[0078] In some possible embodiments of the present application, the distance between any two adjacent spray holes 321 is consistent.

[0079] In some possible embodiments of the present application, the distance between any two adjacent spray holes 321 is consistent. Figure 5 and Figure 6 , Figure 5 In some possible embodiments of the present application, the distance between any two adjacent spray holes 321 is consistent. Figure 1 , Figure 6 In some possible embodiments of the present application, the distance between any two adjacent spray holes 321 is consistent. Figure 2The spray hole 321 includes an extension section 3211 and an expansion section 3212. The diameter of the expansion section 3212 is greater than that of the extension section 3211. The extension section 3211 is a part of the spray hole 321 away from the first electrode member 2, and the expansion section 3212 is a part of the spray hole 321 close to the first electrode member 2.

[0080] In the embodiments of the present application, as shown in Figure 6 different structures and shapes. For example, the two ends of the spray hole 321 can be provided with different shapes along the extension direction of the spray hole 321 (the thickness direction of the spray member 32).

[0081] For example, the extension section 3211 of the spray hole 321 close to the second electrode member 31 can be provided as a cylindrical through hole, and the expansion section 3212 of the spray hole 321 close to the first electrode member 2 can be provided as a conical through hole, and the small-diameter end of the conical expansion section 3212 is connected with the extension section 3211. Alternatively, the expansion section 3212 can also be provided as a cylindrical through hole with a diameter greater than that of the extension section 3211. In this way, the part of the spray hole 321 close to the accommodation space 14 can have a greater diameter than the part of the spray hole 321 away from the accommodation space 14. Alternatively, as shown in Figure 5 the spray hole 321 can be provided as a cylindrical through hole as a whole.

[0082] In the above embodiments, since the diameter of the expansion section 3212 of the spray hole 321 is greater than that of the extension section 3211, the cross-sectional area of the channel through which the process gas flows increases during the process gas flowing through the extension section 3211 and the expansion section 3212 to the accommodation space 14 in sequence. This not only allows the process gas to diffuse to a larger area in the accommodation space 14, but also slows down the flow rate of the process gas, which is beneficial to the smooth flow and diffusion of the process gas, so that the process gas in each area of the accommodation space 14 is more uniform.

[0083] In some possible embodiments of the present application, as shown in Figure 5 the diameter of the expansion section 3212 continuously increases from the second electrode assembly 3 to the first electrode member 2.

[0084] In the embodiments of the present application, the expansion section 3212 of the spray hole 321 can be provided as a conical structure, that is, the diameter of the end of the expansion section 3212 close to the second electrode member 31 is small, the diameter of the end of the expansion section 3212 close to the first electrode member 2 is large, and the radius of the expansion section 3212 uniformly increases from the second electrode member 31 to the first electrode member 2, as shown in Figure 5 the cross section of the expansion section 3212 is approximately triangular.

[0085] In the above embodiment, since the diameter of the expansion section 3212 continuously increases, the flow rate of the process gas flowing through the expansion section 3212 can be uniformly slowed down, so that the process gas can flow and diffuse to the accommodation space 14 more stably.

[0086] In addition, the embodiment of the present application further provides a vacuum coating system, as shown in the drawings, the vacuum coating system comprises a gas mixing element 5 and the vacuum coating device provided by any one of the above embodiments. Wherein, the gas mixing element 5 has a gas mixing cavity and a first gas outlet in communication with the gas mixing cavity, the gas mixing cavity can be in communication with a gas source; the gas inlet 13 of the shell 1 is in communication with the first gas outlet. Figure 3

[0087] In the embodiment of the present application, the gas mixing element 5 is used to distribute multiple process gases from the gas source, for example, multiple gas source interfaces connected with the gas source can be arranged in the gas mixing element 5, and each gas source interface can be connected with one gas source. The multiple gas source interfaces can be communicated to the first gas outlet on the gas mixing element 5 through a pipeline. For example, the multiple gas source interfaces can be communicated with the first gas outlet by using a three-way joint, a four-way joint, a five-way joint, etc., and a control valve can be arranged for each gas source interface, and the three-way joint, the four-way joint or the five-way joint between the gas source interface and the first gas outlet can be used as the gas mixing cavity. Then, by controlling each control valve, various process gases can be delivered to the first gas outlet according to different proportions, so that the multiple process gases can be mixed in the gas mixing element.

[0088] For example, the first gas outlet of the gas mixing element can be communicated with the gas inlet 13 on the shell 1 in the vacuum coating device through a pipeline, so that the multiple process gases in the gas mixing element can be delivered to the vacuum coating device through the pipeline.

[0089] The vacuum coating system provided by the embodiment of the present application can make the process gas in the accommodation space 14 of the vacuum coating device uniformly distributed, so that a uniform gas field can be formed in the accommodation space 14, thereby facilitating to improve the uniformity of the film layer formed on the to-be-coated element.

[0090] In some possible embodiments of the present application, as shown in the drawings, the vacuum coating system further comprises a buffer tank 6, the buffer tank 6 has a buffer cavity, the buffer tank 6 has a gas inlet and multiple second gas outlets in communication with the buffer cavity, the gas inlet is in communication with the first gas outlet, and one second gas outlet is in communication with one gas inlet 13. Figure 3

[0091] ​​In the embodiments of the present application, the buffer tank 6 can be arranged between the gas mixing member 5 and the vacuum coating device, so that the buffer tank 6 can be used to mix the multiple process gases more uniformly. For example, the buffer tank 6 can be arranged in the form of a tank body, and a sealed buffer cavity is formed in the tank body. A gas inlet can be arranged on the buffer tank 6, and the gas inlet is communicated with the first gas outlet of the gas mixing member 5 through a pipeline. Multiple second gas outlets can be arranged on the buffer tank 6, and each second gas outlet can be communicated with one of the gas inlets 13 on the housing 1 through a pipeline.

[0092] In the above embodiments, since the buffer tank 6 is arranged between the gas mixing member 5 and the vacuum coating device, the buffer tank 6 can be used to mix the multiple process gases sufficiently, which is beneficial to improve the uniformity of the mixed process gases.

[0093] In some possible embodiments of the present application, the control member 4 is arranged at the end of the gas inlet 13 away from the accommodating cavity, and the control member 4 is used to control the flow rate of the process gas flowing into the gas inlet 13.

[0094] In the embodiments of the present application, as shown in Figure 3 the control member 4 can be arranged between the gas inlet 13 and the buffer tank 6, so that the control member 4 can be used to control the flow rate and flow rate of the process gas entering the vacuum coating device.

[0095] For example, the control member 4 can be a mass flow controller (MFC), and the MFC can be arranged on the pipeline connecting the gas inlet 13 and the second gas outlet. Then, the MFC can be used to control the flow rate and flow rate of the process gas flowing through the gas inlet 13, and the MFC can be used to measure the volume of the process gas transported into the vacuum coating device through the gas inlet 13.

[0096] In the above embodiments, since the control member 4 is arranged at the end of the gas inlet 13 away from the controller, the control member 4 can be used to control the flow rate and flow rate of the process gas flowing through the gas inlet 13 into the vacuum coating device.

[0097] In addition, the embodiments of the present application also provide a solar cell production line, which comprises: a transfer device and the vacuum coating device provided by any one of the above embodiments. The transfer device is used to transport the solar cell to the vacuum coating device and / or remove the solar cell from the vacuum coating device.

[0098] In the embodiments of the present application, the transfer device can be a transport device capable of transporting the solar cell. For example, the transport device can be an automated guided vehicle (AGV), a belt transport device, etc. The embodiments of the present application do not limit the specific structure of the transfer device. The solar cell to be coated can be transported from the production equipment to the vacuum coating equipment by the transfer device. The solar cell after coating can also be transported from the vacuum coating equipment to the storage station or the next production station by the transfer device.

[0099] The solar cell production line provided by the embodiments of the present application can make the process gas uniformly distributed in each part of the accommodation space 14 in the vacuum coating equipment, so as to form a uniform gas field in the accommodation space 14, thereby facilitating the uniformity of the film layer formed on the piece to be coated.

[0100] The above embodiments are only used to illustrate the technical solutions of the present application, but not to limit the same; although the present application has been described in detail with reference to the above embodiments, those skilled in the art should understand that the technical solutions recorded in the above embodiments can still be modified, or some or all of the technical features can be replaced by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application, and they should be covered in the scope of the specification of the present application. In particular, as long as there is no structural conflict, each technical feature mentioned in each embodiment can be combined in any way.

Claims

1. A vacuum coating device, characterized in that: include: A housing (1), the housing (1) enclosing a receiving cavity, the housing (1) having at least one air inlet (13); a first electrode member (2), the first electrode member (2) being arranged in the accommodating cavity; A second electrode assembly (3), wherein the second electrode assembly (3) is arranged in the accommodating cavity and has an accommodating space (14) between the second electrode assembly (3) and the first electrode member (2); the second electrode assembly (3) has a plurality of spray holes (321), and the plurality of spray holes (321) are all connected to the air inlet (13); the process gas flows to the accommodating space (14) through the air inlet (13) and the plurality of spray holes (321) in sequence.

2. The vacuum coating equipment according to claim 1, characterized in that: The second electrode assembly (3) comprises a second electrode member (31) and a spray member (32); the second electrode member (31) and the spray member (32) enclose a uniform air cavity (33); the spray hole (321) is provided on the spray member (32); the spray hole (321) is communicated with the uniform air cavity (33); the spray member (32) is located between the second electrode member (31) and the first electrode member (2); the second electrode member (31) has an air outlet (311); the uniform air cavity (33) is communicated with the air inlet (13) via the air outlet (311).

3. The vacuum coating equipment according to claim 2, characterized in that: An air separation channel (312) is provided between the air outlet (311) and the air inlet (13); one end of the air separation channel (312) is connected to the air inlet (13); and the other end of the air separation channel (312) has a plurality of air separation ports, each of which is connected to one of the air outlets (311).

4. The vacuum coating equipment according to claim 3, characterized in that: The second electrode member (31) is provided with the gas separation channel (312), the gas separation channel (312) is connected to the gas inlet (13) through the first gas inlet pipe (8), and the distance between two adjacent gas outlet holes (311) is consistent.

5. The vacuum coating equipment according to any one of claims 1 to 4, characterized in that: Around a direction perpendicular to the second electrode assembly (3), a line connecting three spray holes (321) arranged adjacent to each other in sequence forms an equilateral triangle.

6. The vacuum coating equipment according to any one of claims 1 to 4, characterized in that: The spray hole (321) comprises an extension section (3211) and an expansion section (3212); the diameter of the expansion section (3212) is larger than the diameter of the extension section (3211); the extension section (3211) is the portion of the spray hole (321) away from the first electrode member (2); and the expansion section (3212) is the portion of the spray hole (321) close to the first electrode member (2).

7. The vacuum coating equipment according to claim 6, characterized in that: In a direction from the second electrode assembly (3) to the first electrode member (2), the diameter of the expansion section (3212) increases continuously.

8. A vacuum coating system, characterized in that: include: A gas mixing element (5), the gas mixing element (5) having a gas mixing chamber and a first gas outlet, the first gas outlet being in communication with the gas mixing chamber, and the gas mixing chamber being capable of being in communication with a gas supply source; The vacuum coating equipment according to any one of claims 1 to 7, wherein the gas inlet (13) on the shell (1) is connected to the first gas outlet.

9. The vacuum coating system according to claim 8, characterized in that: The invention also includes a buffer tank (6), wherein the buffer tank (6) has a buffer cavity, and the buffer tank (6) has a gas inlet and a plurality of second gas outlets connected to the buffer cavity, wherein the gas inlet is connected to the first gas outlet, and one of the second gas outlets is connected to one of the gas inlets (13).

10. The vacuum coating system according to claim 8 or 9, characterized in that: A control component (4) is provided at one end of the air inlet (13) away from the accommodating cavity, and the control component (4) is used to control the flow rate of the process gas flowing into the air inlet (13).

11. A solar cell production line, characterized in that: include: The vacuum coating equipment according to any one of claims 1 to 7; A transfer device is used to transport the solar cell to the vacuum coating device and / or remove the solar cell from the vacuum coating device.

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