Cantilever type sheet measuring device based on confocal laser displacement sensor

Abstract

A cantilever type slice measuring device based on a confocal laser displacement sensor comprises a frame body, a mounting bottom plate, a cantilever type support, a two-dimensional hollow moving platform, the confocal laser displacement sensor, a clamp assembly and a control system. The mounting bottom plate is mounted on the frame main body; a two-dimensional hollow moving platform is mounted on the mounting bottom plate; the cantilever type bracket comprises a vertical rod and a cantilever; the cantilever is connected to the vertical rod through a height adjusting device; the bottom of the vertical rod is fixedly arranged on the mounting bottom plate, and an upper measuring head is mounted on the cantilever; the cantilever type support is used for realizing coarse adjustment of the upper measuring head; the middle part of the installation bottom plate is hollow, and one side edge of the hollow part is provided with a lower measuring head. According to the utility model, the upper measuring head is roughly adjusted by adopting the cantilever type bracket, and then is finely adjusted by the upper measuring head adjusting unit, so that the rough adjustment step is added, and the processing requirement of equipment is reduced.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of sheet measuring device, concretely relates to a kind of cantilever type sheet measuring device based on confocal laser displacement sensor. BACKGROUND

[0002] In length measurement field, the sheet (hereinafter collectively referred to as sheet) such as plug gauge with thickness<4mm, high-precision copper sheet, high-precision aluminum sheet, lithium battery sheet and thin rubber sheet has the characteristics of thin thickness, easy to bend and deform under microgravity, easy to wrinkle, high requirements for perpendicularity of measuring axis and sheet surface. GB / T 22523-2008 and JJG 62-2017 specify the thickness deviation and bending degree of plug gauge as two important technical parameters and detection methods thereof; GB / T 26303.3-2010 specifies the detection method of copper and copper alloy processing material shape size, and GB / T 3194-1998 specifies the size tolerance of aluminum and aluminum alloy plate and strip. In addition, thickness and side bending degree are also important geometric size parameters of high-precision copper sheet and high-precision aluminum sheet. In addition, lithium battery sheet and thin rubber sheet have corresponding requirements for thickness and bending degree.

[0003] In the prior art, the thickness deviation and bending degree of the sheet are generally measured by a contact type thickness measurement method. Although the measurement accuracy and reliability can basically meet the requirements of the existing technical specifications, the following problems exist: first, the measurement requires certain operation experience and skills, and the measurement speed is slow, the degree of automation is low, and batch measurement cannot be realized; second, the contact type measurement force can cause indentation deformation, which can easily damage the sheet, and the flatness of the measurement cap (anvil) and the measurement position deviation of the measurement instrument can affect the measurement results and are important sources of measurement errors; third, the measurement process is complicated, the measurement efficiency is low, the degree of automation is low, and online batch measurement cannot be realized. UTILITY MODEL CONTENTS

[0004] The utility model provides a cantilever type sheet measuring device based on confocal laser displacement sensor, which has high precision, is convenient and efficient to operate, and can automatically measure in batches.

[0005] The utility model is implemented as follows:

[0006] A cantilever type sheet measuring device based on confocal laser displacement sensor, comprising: a frame body, a mounting bottom plate, a cantilever type support, a two-dimensional hollow moving platform, a confocal laser displacement sensor, a clamp assembly and a control system.

[0007] The mounting bottom plate is a planar structure and is installed on the frame body; the two-dimensional hollow moving platform is installed on the mounting bottom plate.

[0008] The two-dimensional hollow moving platform is a hollow electrically-controlled x, y axis movement two-dimensional platform, wherein the hollow part is arranged with the clamp assembly, and movement control of the two-dimensional hollow moving platform drives the clamp assembly to be positioned; the inspected sheet is arranged on the clamp assembly;

[0009] The cantilevered support comprises a vertical rod and a cantilever, the cantilever is connected to the vertical rod through a height adjusting device, the bottom of the vertical rod is fixedly arranged on the mounting bottom plate, an upper measuring head adjusting unit is arranged on the cantilever, and an upper measuring head of the confocal laser displacement sensor is arranged on the upper measuring head adjusting unit; the cantilevered support is used for realizing coarse adjustment of the upper measuring head.

[0010] A lower measuring head adjusting unit is arranged on one side of the hollow part of the mounting bottom plate, and a lower measuring head of the confocal laser displacement sensor is arranged on the lower measuring head adjusting unit.

[0011] The upper measuring head adjusting unit and the lower measuring head adjusting unit are multi-dimensional adjustment structures, and are used for realizing fine adjustment of the upper measuring head and the lower measuring head of the confocal laser displacement sensor respectively; the upper measuring head and the lower measuring head are coaxial by adjusting the displacement and angle of the upper measuring head adjusting unit and the lower measuring head adjusting unit, so that the measurement requirement of the confocal laser displacement sensor is met.

[0012] The control system is arranged in the frame body.

[0013] Further, the confocal laser displacement sensor is one of a CL-L030 laser coaxial displacement meter, an IFS2406-10 optical spectrum confocal sensor and an HPS-CFL030 optical spectrum confocal displacement sensor.

[0014] Further, an inclination sensor is fixedly arranged on the cantilever of the cantilevered support and used for detecting the inclination angle of the cantilevered support.

[0015] The utility model discloses a batch, full-automatic detection of sheet is realized, the cantilevered support is used for coarsely adjusting the upper measuring head, and then the upper measuring head adjusting unit is used for finely adjusting the upper measuring head, so that the processing requirement of the equipment is reduced by adding the coarse adjustment step. BRIEF DESCRIPTION OF DRAWINGS

[0016] The utility model will be further described in connection with the embodiments and with reference to the drawings.

[0017] Figure 1 It is the structure schematic diagram of the utility model.

[0018] Figure 2 It is the structure schematic diagram of the utility model after removing the two-dimensional hollow moving platform.

[0019] Reference signs:

[0020] mounting base plate, 2 - two-dimensional hollow moving platform, 4 - clamp assembly, 51 - upper measuring head, 52 - lower measuring head, 6 - cantilever support, 61 - vertical rod, 62 - cantilever, 63 - height adjustment device, 7 - L-shaped connecting rib, 81 - upper measuring head adjustment unit, 82 - lower measuring head adjustment unit, 9 - inclination sensor. DETAILED DESCRIPTION

[0021] The cantilever type sheet measuring device based on the confocal laser displacement sensor of the embodiment is an improvement on the mechanical structure assembly of the non-contact optical plug gauge calibration device proposed in application No. 202411701720.0, and the same parts are not described here.

[0022] In the non-contact optical plug gauge calibration device proposed in application No. 202411701720.0, the upper measuring head and the lower measuring head can only be fine-tuned through the upper adjustment unit and the lower adjustment unit, and the requirement for the processing performance of the equipment is extremely high. Therefore, the embodiment improves it by adding a coarse adjustment structure to the upper measuring head. Specifically, as shown in Figure 1 and Figure 2 The cantilever type sheet measuring device based on the confocal laser displacement sensor includes a mounting base plate 1, a two-dimensional hollow moving platform 2, a cantilever support 7, a confocal laser displacement sensor, a clamp assembly 4, a control system (not shown in the figure), and a frame body (not shown in the figure). The control system is installed in the frame body.

[0023] The mounting base plate 1 is a planar structure installed on the frame body. The two-dimensional hollow moving platform 2 is installed on the mounting base plate 1. The two-dimensional hollow moving platform 2 is a hollow electrically controlled x, y-axis motion two-dimensional platform. The hollow part is used to place the clamp assembly 4. The motion control of the two-dimensional hollow moving platform drives the positioning of the clamp assembly 4. The detected sheet is installed on the clamp assembly 4.

[0024] The cantilever support 6 includes a vertical rod 61 and a cantilever 62. The cantilever 62 is connected to the vertical rod 61 through a height adjustment device 63. The bottom of the vertical rod 61 is fixedly arranged on the mounting base plate 1. The cantilever 62 is provided with an upper measuring head adjustment unit 81. The upper measuring head adjustment unit 81 is provided with an upper measuring head 51 of the confocal laser displacement sensor. The cantilever support 6 is used to realize the coarse adjustment of the upper measuring head 51. The cantilever 61 of the cantilever support 6 is also provided with an inclination sensor 9 for detecting the inclination angle of the cantilever support 6 and feeding back the data to the lower computer of the control system for data correction.

[0025] The middle part of the installation base plate 1 is hollow, and a lower measuring head adjusting unit 82 is fixedly installed on one side of the hollow part through an L-shaped connecting rib 7, and the lower measuring head adjusting unit 82 is installed with a lower measuring head 52 of a confocal laser displacement sensor;

[0026] The upper measuring head adjusting unit 81 and the lower measuring head adjusting unit 82 are multi-dimensional adjusting structures, and realize fine adjustment of the upper measuring head 51 and the lower measuring head 52 of the confocal laser displacement sensor respectively; by adjusting the displacement and angle of the upper measuring head adjusting unit 81 and the lower measuring head adjusting unit 82, the coaxiality of the upper measuring head 51 and the lower measuring head 52 is realized, and the measurement requirement of the confocal laser displacement sensor is met.

[0027] The confocal laser displacement sensor can be one of a CL-L030 laser coaxial displacement meter, an IFS2406-10 spectrum confocal sensor or an HPS-CFL030 spectrum confocal displacement sensor.

[0028] The utility model adopts a cantilever support to coarsely adjust the upper measuring head, and then finely adjusts the upper measuring head through the upper measuring head adjusting unit, so that the machining requirement of the equipment is reduced by adding the coarse adjustment step.

[0029] The above embodiments and drawings are not limited to the product shape and style of the utility model, and any ordinary technical personnel in the technical field can make appropriate changes or modifications, which should be regarded as not departing from the patent category of the utility model.

Claims

1. A cantilevered thin-film measuring device based on a confocal laser displacement sensor, characterized in that: include: Frame body, mounting base, cantilever bracket, two-dimensional hollow moving platform, confocal laser displacement sensor, fixture assembly, control system; The mounting base is a planar structure, which is mounted on the frame body; the two-dimensional hollow moving platform is mounted on the mounting base; The two-dimensional hollow mobile platform is a hollow electric-controlled x- and y-axis motion two-dimensional platform, wherein the fixture assembly is placed in the hollow part, and the motion control of the two-dimensional hollow mobile platform drives the fixture assembly to be positioned; The thin sheet to be inspected is installed on the fixture assembly; The cantilever bracket comprises: a vertical rod and a cantilever; The cantilever is connected to the vertical rod via a height adjustment device; the bottom of the vertical rod is fixedly mounted on the mounting base plate; an upper measuring head adjustment unit is mounted on the cantilever, and the upper measuring head of the confocal laser displacement sensor is mounted on the upper measuring head adjustment unit; the cantilever bracket is used to achieve coarse adjustment of the upper measuring head; The middle portion of the mounting base is hollow, wherein a lower measuring head adjustment unit is installed on one side of the hollow portion, and the lower measuring head of the confocal laser displacement sensor is installed on the lower measuring head adjustment unit; The upper measuring head adjustment unit and the lower measuring head adjustment unit are multi-dimensional adjustment structures, respectively realizing fine adjustment of the upper measuring head and the lower measuring head of the confocal laser displacement sensor; by adjusting the displacement and angle of the upper measuring head adjustment unit and the lower measuring head adjustment unit, the upper measuring head and the lower measuring head are coaxial, thereby meeting the measurement requirements of the confocal laser displacement sensor; The control system is installed in the frame body.

2. The cantilevered thin film measuring device based on a confocal laser displacement sensor according to claim 1, characterized in that: The confocal laser displacement sensor is one of the CL-L030 laser coaxial displacement meter, the IFS2406-10 spectral confocal sensor, or the HPS-CFL030 spectral confocal displacement sensor.

3. The cantilevered thin film measuring device based on a confocal laser displacement sensor according to claim 1, characterized in that: An inclination sensor is fixedly provided on the cantilever of the cantilever support for detecting the inclination angle of the cantilever support.

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