Probe pressure testing machine for probe card

Abstract

The utility model discloses a probe pressure testing machine for a probe card, which comprises a base, a probe pressure detection assembly is arranged on the base, a cantilever arm is fixed on a three-axis adjusting seat, the end part of the cantilever arm extends to a probe pressure detection area, a pressure sensor is fixed on the cantilever arm, and a test probe is arranged on the pressure sensor; the height sensor is fixed on the three-axis adjusting seat and is used for detecting the lifting height of the cantilever arm; a lighting assembly, a camera shooting assembly and a magnifying lens are arranged on the movable mounting table, and the camera shooting assembly and the magnifying lens directly face the shooting test needle; a display screen is arranged on the side face of the base and connected with the camera shooting assembly, the pressure sensor and the height sensor. According to the utility model, an abutting image is obtained from the display screen, a pressure value measured by the pressure sensor is obtained, the deformation quantity of the probe can be measured by the height sensor, the probe pressure value and the deformation quantity can be directly read on the display screen, and the device is more visual and convenient.

Description

TECHNICAL FIELD

[0001] The utility model relates to probe card technical field, especially a kind of probe card needle pressure testing machine. BACKGROUND

[0002] Probe card is the interface between electronic test system and semiconductor wafer. Usually, probe card is mechanically connected with probe and electrically connected with tester. The purpose is to provide an electrical path between test system and circuit on wafer, so as to allow testing and verification of circuit at wafer level. When probe card is used, probe is abutted with chip to be tested, so it is very important to detect the pressure of probe on probe card when it is shipped. At present, the needle pressure detection on probe card is to calculate the needle pressure value of probe by observing the deformation amount of probe when pressure is applied to probe. The whole detection process is relatively complicated, and the pressure value needs to be calculated, so the test result is not intuitive enough. SUMMARY

[0003] In order to solve the above problems, the utility model provides a kind of probe card needle pressure testing machine, can intuitively obtain needle pressure value, and it is convenient and fast to operate.

[0004] Therefore, the technical scheme of the utility model is as follows: a probe card needle pressure testing machine, comprising a base, a needle pressure detection assembly is arranged on the base, the needle pressure detection assembly comprises a three-axis adjusting seat, a pressure sensor and a height sensor, a cantilever arm is fixed on the three-axis adjusting seat, the cantilever arm extends to the needle pressure detection area at the end, and the pressure sensor is fixed on the cantilever arm, and a test needle is arranged on the pressure sensor; the height sensor is fixed on the three-axis adjusting seat, and is used for detecting the lifting height of the cantilever arm;

[0005] A door-shaped support is arranged on the base, a movable mounting table is arranged on the door-shaped support, the movable mounting table is located above the needle pressure detection area, and an illumination assembly, a camera assembly and a magnifying glass are arranged on the movable mounting table, and the camera assembly and the magnifying glass are opposite to the test needle for shooting; a display screen is arranged on the side of the base, and the display screen is connected with the camera assembly, the pressure sensor and the height sensor.

[0006] On the basis of the above scheme and as a preferred scheme of the above scheme: the camera assembly is used for shooting the abutment image of test needle and probe, the pressure sensor is used for obtaining the pressure value applied to the probe, and the height sensor is used for obtaining the height change of the probe tip, i.e. the deformation amount.

[0007] On the basis of the above scheme and as a preferred scheme of the above scheme: the abutment image of test needle and probe, the pressure value applied to the probe and the deformation amount of probe are displayed on the display screen.

[0008] On the basis of the above scheme and as a preferred scheme of the above scheme: the mobile mounting table is installed on the first guide rail of the door type support, and a second guide rail and a fixed seat are arranged on the mobile mounting table, the second guide rail is perpendicular to the first guide rail and is in sliding fit; the fixed seat is installed on the second guide rail, and a lighting assembly and a camera assembly are installed on the fixed seat; a supporting arm is rotatably installed on the fixed seat, and a magnifying glass is arranged at the bottom of the supporting arm.

[0009] On the basis of the above scheme and as a preferred scheme of the above scheme: the three-axis adjusting seat comprises an X-axis moving table, a Y-axis moving table and a Z-axis moving table, and the suspension beam arm is fixed at the Z-axis moving table; an extension plate is arranged on the suspension beam arm, and a height sensor is fixed on the Z-axis moving table, and a testing end of the height sensor is in abutment with the extension plate.

[0010] Compared with the prior art, the utility model has the advantages that the probe card to be tested is placed on the base, the base can be provided with a cushion block, the height of the probe card is raised, the position of the pressure sensor is adjusted by the three-axis adjusting seat, the testing needle is in abutment with the probe on the probe card, the operator can observe the abutment condition of the probe and the testing needle from the magnifying glass, or the camera assembly can shoot the abutment image of the probe and the testing needle, the operator can obtain the abutment image from the display screen and obtain the pressure value measured by the pressure sensor, that is, the needle pressure of the probe at this time; the height sensor can measure the height change on the probe tip, that is, the deformation amount, and the needle pressure value and the deformation amount can be directly read on the display screen, which is more intuitive and convenient. BRIEF DESCRIPTION OF DRAWINGS

[0011] The utility model will be further explained in detail in combination with the drawings and the embodiments

[0012] Figure 1 It is the structural schematic diagram of the utility model;

[0013] Figure 2 It is the structural schematic diagram of the mobile mounting table of the utility model;

[0014] Figure 3 It is the structural schematic diagram of the pressure sensor of the utility model;

[0015] Figure 4 It is the structural schematic diagram of the three-axis adjusting seat of the utility model.

[0016] In the drawing, it is marked as: base 1, three-axis adjusting seat 2, X-axis moving table 21, Y-axis moving table 22, Z-axis moving table 23, pressure sensor 3, testing needle 31, height sensor 4, testing end 41, suspension beam arm 5, extension plate 51, door type support 6, mobile mounting table 61, first guide rail 62, second guide rail 63, fixed seat 64, supporting arm 65, magnifying glass 66, display screen 7. DETAILED DESCRIPTION

[0017] In the description of the utility model, it is explained that, for the direction words, such as the term "center", "lateral (X)", "vertical (Y)", "vertical (Z)", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate the orientation and positional relationship based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element indicated must have a specific orientation, be constructed and operated in a specific orientation, and cannot be understood as limiting the specific protection scope of the utility model.

[0018] In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features. Therefore, the "first" and "second" features can be explicitly or implicitly included one or more features, and in the description of the utility model, the meaning of "several" is two or more than two, unless otherwise specifically limited.

[0019] Referring to the drawings. The probe card needle pressure testing machine described in the embodiment comprises a base 1, a needle pressure detection assembly is arranged on the base 1, the needle pressure detection assembly comprises a three-axis adjusting seat 2, a pressure sensor 3 and a height sensor 4, the three-axis adjusting seat 2 comprises an X-axis moving table 21, a Y-axis moving table 22 and a Z-axis moving table 23, and a suspension beam arm 5 is fixed at the end of the Z-axis moving table 23; the suspension beam arm 5 extends to the needle pressure detection area, and the pressure sensor 3 is fixed on the suspension beam arm 5, and a test needle 31 is arranged on the pressure sensor 3; an extension plate 51 is arranged on the suspension beam arm 5, the height sensor 4 is fixed on the Z-axis moving table 23, the test end 41 of the height sensor 4 abuts against the extension plate 51, and the height sensor 4 is used for detecting the lifting height of the suspension beam arm 5, i.e. obtaining the descending height of the pressure sensor, and obtaining the deformation amount of the probe.

[0020] The base 1 is provided with a door-shaped support 6, the door-shaped support 6 is provided with a movable mounting table 61, the movable mounting table 61 is installed on the first guide rail 62 of the door-shaped support, and the movable mounting table 61 is provided with the second guide rail 63 and the fixing seat 64, the second guide rail 63 is perpendicular to the first guide rail 62 and is in sliding fit; the fixing seat 64 is installed on the second guide rail 63, and the fixing seat 64 is installed with an illumination assembly and a camera assembly (not shown in the drawing); a supporting arm 65 is rotatably installed on the fixing seat 64, and the supporting arm 65 is provided with a magnifying glass 66 at the bottom. The movable mounting table 61 is located above a needle pressure detection area, and the camera assembly and the magnifying glass 66 are opposite to the test needle. The camera assembly is used for shooting the abutting image of the test needle and the probe, the illumination assembly is used for providing illumination, and the magnifying glass 66 can be used for conveniently placing a probe card and preliminarily observing the positional relationship between the test needle and the probe by naked eyes, and the magnifying glass can also not be used, and the display screen is directly used for observation.

[0021] The base 1 is provided with a display screen 7, the display screen 7 is connected with the camera assembly, the pressure sensor and the height sensor. The pressure sensor is used for acquiring the pressure value applied on the probe, and the height sensor is used for acquiring the height change, i.e. the deformation amount, on the probe tip. The display screen displays the abutting image of the test needle and the probe, the pressure value applied on the probe and the deformation amount of the probe.

[0022] In use, the probe card to be detected is placed on the base 1, the base can be provided with a cushion block, the height of the probe card is raised, the position of the pressure sensor 3 is adjusted by the three-axis adjusting seat 2, the test needle 31 is abutted with the probe on the probe card, the operator can observe the abutting condition of the probe and the test needle from the magnifying glass 66, or the camera assembly shoots the abutting image of the probe and the test needle, the operator can acquire the abutting image from the display screen 7 and acquire the pressure value measured by the pressure sensor, i.e. the needle pressure of the probe at this time; the height change, i.e. the deformation amount, on the probe tip can be measured by the height sensor, and the needle pressure value and the deformation amount can be directly read on the display screen, which is more intuitive and convenient.

[0023] The above is only the preferred embodiment of the present application, the protection scope of the present application is not limited to the above-mentioned embodiments, and any technical scheme falling within the concept of the present application belongs to the protection scope of the present application. It should be noted that, for ordinary technical personnel in the technical field, some improvements and decorations without departing from the principle of the present application are also regarded as the protection scope of the present application.

Claims

1. A probe card needle pressure tester includes a base, on which is mounted a needle pressure detection assembly, which includes a three-axis adjustment base, a pressure sensor, and a height sensor. A cantilever arm is fixed to the three-axis adjustment base, the end of which extends to the needle pressure detection area. The pressure sensor is fixed to the cantilever arm and is equipped with a test needle. The height sensor is fixed to the three-axis adjustment base and is used to detect the height of the cantilever arm. Its characteristics are: The base is provided with a door-shaped bracket, and the door-shaped bracket is provided with a movable mounting platform. The movable mounting platform is located above the needle pressure detection area. The movable mounting platform is provided with a lighting assembly, a camera assembly and a magnifying glass. The camera assembly and the magnifying glass are directly facing the test needle for shooting. A display screen is provided on the side of the base, and the display screen is connected to the camera assembly, pressure sensor and height sensor.

2. The probe card pressure tester according to claim 1, wherein: The camera assembly is used to capture the contact image between the test needle and the probe, the pressure sensor is used to obtain the pressure value applied to the probe, and the height sensor is used to obtain the height change on the probe tip, that is, the deformation amount.

3. The probe card pressure tester according to claim 2, wherein: The display screen displays an image of the contact between the test needle and the probe, a pressure value applied to the probe, and a deformation amount of the probe.

4. The probe card pressure tester according to claim 1, wherein: The mobile mounting platform is installed on the first guide rail of the door-shaped bracket, and a second guide rail and a fixed seat are provided on the mobile mounting platform. The second guide rail and the first guide rail are perpendicular to each other and slide together; the fixed seat is installed on the second guide rail, and a lighting assembly and a camera assembly are installed on the fixed seat; an arm is rotatably installed on the fixed seat, and a magnifying glass is provided at the bottom of the arm.

5. The probe card pressure tester according to claim 1, wherein: The three-axis adjustment seat includes an X-axis moving platform, a Y-axis moving platform and a Z-axis moving platform, and the end of the cantilever arm is fixed on the Z-axis moving platform; an extension plate is provided on the cantilever arm, and the height sensor is fixed on the Z-axis moving platform, and the test end of the height sensor is in contact with the extension plate.

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