Double-sided grinding and polishing equipment

Abstract

The utility model provides double-sided grinding and polishing equipment, and belongs to the technical field of semiconductor grinding equipment. Comprising a rack, a lower grinding disc, an upper grinding disc and a plurality of jig discs, a grinding base is arranged on the rack, a mounting frame is arranged on a first supporting frame in a lifting mode, the lower grinding disc and the upper grinding disc are arranged on the grinding base and the mounting frame respectively, and the upper grinding disc is horizontally and rotatably arranged through a rotary disc in the grinding base. A supporting disc is arranged on one side of the grinding base, and a conveying belt assembly is arranged on the supporting disc. An operator can place the jig discs and the workpieces to be ground on the conveying belt assembly, after placement is completed, the jig discs are sequentially arranged on the upper grinding base in the circumferential direction through the action of the conveying belt assembly and the rotation of the lower grinding disc, and the effect that the convenience and efficiency of placing the workpieces to be ground on the jig discs are improved is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor grinding equipment technical field especially relates to a double -sided grinding polishing equipment. BACKGROUND

[0002] The grinder is widely used in piezoelectric crystal, compound semiconductor, silicon crystal, optical glass, ceramic sheet, window glass, metal material, sapphire and other hard brittle material high-precision, carries out double -sided grinding / polishing processing.

[0003] The patent with the announcement number CN218837309U discloses a double-sided grinding and polishing machine, which comprises a rack, an inner gear ring device, an outer gear ring device, a lower grinding device, an upper grinding device and a jig disc, the rack is provided with a grinding and polishing cavity, the inner gear ring is rotatably arranged in the grinding and polishing cavity through a first driving mechanism, and the outer gear ring is rotatably arranged in the grinding and polishing cavity and located at the periphery of the inner gear ring through a second driving mechanism.

[0004] Because there are many mounting hole positions for mounting and limiting parts to be polished on the jig disc, during grinding operation, the jig disc needs to be placed in the grinding and polishing cavity first, and then the workers manually operate to place each workpiece to be polished in the jig disc, but the multiple jig discs on the grinding and polishing machine are arranged in a circle, after filling the workpiece mounting hole positions on one jig disc, it is necessary to walk around the grinding and polishing to fill the workpieces on each jig disc, but because the space in the industrial plant is compact, a passage for the workers to pass through cannot be reserved around the grinding and polishing machine, therefore, there is an inconvenient situation for the workers to load the grinding and polishing machine. UTILITY MODEL CONTENTS

[0005] In view of the above problems, the utility model provides a double-sided grinding and polishing equipment.

[0006] In order to achieve the above-mentioned invention purpose, the technical scheme adopted by the utility model is as follows:

[0007] The application provides a double-sided polishing equipment, which comprises a frame, a lower polishing disc, an upper polishing disc and a plurality of jig discs, a polishing seat is arranged on the frame, the lower polishing disc is arranged on the polishing seat, a first support frame is fixedly arranged on the frame above the lower polishing disc, an installation frame is vertically arranged on the first support frame, a first driving element for driving the installation frame to vertically move is arranged on the first support frame, the upper polishing disc is fixedly arranged on the bottom of the installation frame, a polishing cavity is formed between the lower polishing disc and the upper polishing disc, a rotating shaft is rotatably arranged on the frame, the rotating shaft penetrates through the lower polishing disc coaxially, a second driving element for driving the rotating shaft to rotate is arranged in the frame, an internal gear ring for engaging with the edge of the jig disc is arranged on the outer wall of the rotating shaft above the lower polishing disc, and an external gear ring for engaging with the edge of the jig disc is arranged on the bottom wall of the installation frame outside the upper polishing disc.

[0008] A support table for placing the jig disc is arranged on one side of the polishing seat on the frame, a conveying belt assembly for conveying the jig disc along the radial direction of the polishing seat is arranged on the support table, a rotating disc is rotatably arranged in the polishing seat, the lower polishing disc is detachably connected with the rotating disc, a clutch sleeve is vertically and coaxially arranged on the bottom of the rotating disc, and a third driving element for driving the clutch sleeve to vertically move so that the clutch sleeve is disconnected from / connected with the rotating shaft is arranged in the frame.

[0009] Further, a connecting sleeve is rotatably arranged on the installation frame coaxially, a connecting groove matched with the rotating shaft is arranged on the bottom end of the connecting sleeve, a rotating ring is rotatably arranged on the installation frame, the external gear ring is fixedly connected with the rotating ring, a middle transmission gear is rotatably arranged on the installation frame, and the middle transmission gear is engaged with the rotating ring and the connecting sleeve.

[0010] Further, the edge of the polishing seat and the outer wall of the rotating shaft are both coaxially provided with a first guide step higher than the lower polishing disc, the edge of the jig disc is provided with a second guide step matched with the first guide step, and an inlet for the jig disc on the conveying belt assembly to enter the polishing seat is arranged on one side of the polishing seat close to the support table.

[0011] Further, the conveying belt assembly comprises a plurality of conveying rollers arranged in parallel and spaced apart on the support table, a conveying belt is sleeved on the conveying rollers, a driving motor for driving the conveying rollers away from the polishing seat to rotate is arranged on the support table, a transition plate is arranged at the inlet of the polishing seat, the transition plate is flush with the upper surface of the conveying belt and the lower polishing disc, and one side edge of the transition plate is connected with the conveying belt and the other side edge is connected with the lower polishing disc.

[0012] Further, a plurality of photoelectric switches are uniformly and spaced apart along the circumference of the polishing seat between the installation frame and the frame, the photoelectric switches are used for detecting the passing of the jig disc on the lower polishing disc, and the photoelectric switches are electrically connected with the second driving element.

[0013] Further, a plurality of liquid outlet holes are formed through the upper grinding disc, a plurality of grinding liquid pipes are connected to the mounting frame, a liquid storage barrel for storing the grinding liquid is arranged in the frame, a liquid outlet pipe is connected to the outer wall of the liquid storage barrel through a water pump, one end of the grinding liquid pipe is connected to the liquid outlet hole and the other end is connected to the liquid outlet pipe;

[0014] The lower grinding disc and the upper grinding disc are both provided with a first liquid drainage groove in a grid shape, a second liquid drainage groove is formed between the lower grinding disc and the first guide step in the frame, and a collection barrel for collecting the grinding liquid in the second liquid drainage groove is arranged in the frame.

[0015] Further, the collection barrel is divided into a sedimentation chamber and a filtration chamber by a partition plate, the bottom of the partition plate is provided with a communication port communicating the sedimentation chamber and the filtration chamber, a filter layer is horizontally arranged in the filtration chamber, a liquid drainage pipe is connected to the second liquid drainage groove, the liquid drainage pipe is connected to the collection barrel and communicates the sedimentation chamber, the collection barrel is connected to the liquid storage barrel through a backflow pipe, one end of the backflow pipe is connected to the filtration chamber and is located above the filter layer.

[0016] The beneficial effects of the double-sided grinding and polishing equipment are as follows: when the jig disc and the workpieces to be polished are placed on the grinding and polishing equipment, the jig disc is placed on the conveying belt assembly on the support table, then the workpieces to be polished are placed in the jig disc one by one, subsequently the conveying belt assembly is started to send the jig disc and the workpieces to be polished on the jig disc into the grinding cavity, the jig disc is completely sent into the grinding cavity by manual determination of the operator or determination of the photoelectric switch, then the rotating shaft is connected to the rotating disc in the grinding seat and the rotating disc is started to rotate, the jig disc placed on the lower grinding disc is moved to one side of the inlet of the grinding seat, another jig disc can be placed on the conveying belt assembly again and the workpieces to be polished can be continuously placed, the operator can complete the placement of the workpieces to be polished without walking around the grinding and polishing equipment, and the operator does not need to place the workpieces in the jig disc in the narrow space of the grinding area, so that the convenience and efficiency of placing the workpieces on the jig disc are improved. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a whole structure schematic diagram of the double-sided grinding and polishing equipment of the embodiment of the application.

[0018] Figure 2 It is a whole structure schematic diagram of another state of the double-sided grinding and polishing equipment of the embodiment of the application.

[0019] Figure 3 It is a partial sectional structure schematic diagram of the double-sided grinding and polishing equipment of the embodiment of the application.

[0020] Figure 4 It is a sectional structure schematic diagram of the collection barrel of the embodiment of the application.

[0021] Wherein, 1, rack; 11, first support frame; 12, grinding seat; 13, mounting frame; 131, outer gear ring; 14, connecting sleeve; 15, rotating ring; 16, transfer gear; 17, transition plate; 18, rotating disc; 19, clutch sleeve; 2, lower grinding disc; 3, upper grinding disc; 4, jig disc; 5, rotating shaft; 51, inner gear ring; 6, support table; 61, conveyor belt assembly; 81, liquid storage barrel; 82, liquid outlet pipe; 83, grinding fluid pipe; 84, first drainage groove; 85, second drainage groove; 86, collection barrel; 87, partition; 88, filter layer; 91, first driving member; 92, second driving member; 93, third driving member. DETAILED DESCRIPTION

[0022] In order to better understand the above technical solutions, the above technical solutions will be described in detail below in conjunction with the drawings and specific embodiments of the specification.

[0023] The embodiment of the application discloses a double-sided grinding and polishing equipment, referring to Figure 1 , Figure 2 and Figure 3 , comprising a rack 1, a lower grinding disc 2, an upper grinding disc 3 and a plurality of jig discs 4, a grinding seat 12 is arranged on the rack 1, the lower grinding disc 2 is detachably fixed and installed on the top wall of the grinding seat 12, a first support frame 11 is fixed on one side of the grinding seat 12 on the rack 1, a mounting frame 13 is vertically and movably arranged on the first support frame 11, and a first driving member 91 for driving the mounting frame 13 to move up and down is arranged on the first support frame 11. Specifically, a guide rod is vertically fixed on the mounting frame 13, the guide rod vertically slides through the first support frame 11, and the first driving member 91 can be a first hydraulic cylinder, which is fixed on the first support frame 11, and the piston rod thereof is vertically and fixedly connected to the mounting frame 13.

[0024] The upper grinding disc 3 is detachably fixed on the bottom wall of the mounting frame 13. By replacing the upper grinding disc 3 and the lower grinding disc 2 with different mesh numbers, the workpiece to be processed can be coarsely ground, finely ground and polished. The grinding cavity is formed between the lower grinding disc 2 and the upper grinding disc 3. A plurality of jig plates 4 are uniformly and circumferentially arranged in the grinding cavity. Limiting holes adapted to the shape of the workpiece to be processed are formed through the jig plates 4. The thickness of the jig plate 4 should be less than the target thickness of the workpiece after thinning. The rotating shaft 5 is rotatably arranged on the frame 1. The top end of the rotating shaft 5 coaxially penetrates the grinding seat 12 and the lower grinding disc 2. The frame 1 is provided with a second driving member 92 for driving the rotating shaft 5 to rotate. The second driving member 92 can be an electric motor. The electric motor is drivingly connected with the rotating shaft 5 through any one of a wedge belt, a synchronous belt, a chain and the like. The edge of the jig plate 4 is tooth-shaped. An inner gear ring 51 for engaging with the edge of the jig plate 4 is arranged on the outer wall of the rotating shaft 5 above the lower grinding disc 2. An outer gear ring 131 for engaging with the edge of the jig plate 4 is arranged on the bottom wall of the mounting frame 13 outside the upper grinding disc 3. When the upper grinding disc 3 and the lower grinding disc 2 clamp the workpiece on both sides, the inner gear ring 51 and the outer gear ring 131 engage with the jig plate 4 on both sides, respectively. The second driving member 92 drives the rotating shaft 5 and the inner gear ring 51 to rotate, thereby driving the jig plate 4 to rotate. The upper surface and the lower surface of the workpiece are in frictional contact with the upper grinding disc 3 and the lower grinding disc 2, respectively, during the rotation. The first driving member 91 cooperates with a pressure sensor and other pressure sensing elements to apply a constant pressure to the workpiece, thereby maintaining the frictional contact between the upper grinding disc 3, the lower grinding disc 2 and the workpiece, and achieving the grinding / polishing operation of the workpiece.

[0025] A support table 6 for placing the jig plate 4 is further arranged on one side of the frame 1 and located at the grinding seat 12. The support table 6 is provided with a conveying belt assembly 61 for conveying the jig plate 4 into the grinding cavity along the radial direction of the grinding seat 12. The conveying belt assembly 61 is flush with the lower grinding disc 2. The width of the conveying belt assembly 61 should be not less than the diameter of the jig plate 4. In the embodiment, the conveying belt assembly 61 includes a plurality of conveying rollers which are arranged in parallel and at intervals on the support table 6. The two ends of each conveying roller are rotatably connected with the support table 6. A conveying belt is sleeved on the conveying rollers. The conveying belt can be a synchronous belt with smooth outer surface or a common belt. The support table 6 is provided with a driving motor for driving the conveying rollers to rotate. The driving motor is drivingly connected with the conveying roller farthest from the grinding seat 12.

[0026] In the embodiment, a first guiding step higher than the lower grinding disc 2 is coaxially arranged on the edge of the grinding seat 12 and the outer wall of the rotating shaft. A second guiding step cooperated with the first guiding step is arranged on the lower edge of the jig plate 4 along the circumferential direction of the jig plate 4. When the jig plate 4 engages with the outer gear ring 131 and the inner gear ring 51, the second steps on both sides of the jig plate 4 cooperate with the first guiding steps of the rotating shaft and the grinding seat 12 to move between the two first guiding steps.

[0027] An entrance is formed on the grinding seat 12 near one side of the support table 6 for the jig disc 4 on the conveying belt assembly 61 to enter the grinding seat 12, the entrance breaks the first guide step, so that the conveying belt assembly 61 can smoothly send the jig disc 4 into the grinding cavity. Further, a transition plate 17 is arranged at the entrance of the grinding seat 12, the transition plate 17 is flush with the upper surface of the conveying belt and the upper surface of the lower grinding disc 2, and the transition plate 17 can effectively support the jig disc 4 during the process that the conveying belt assembly 61 sends the jig disc 4 to the grinding cavity, so that the workpieces installed on the jig disc 4 can be effectively prevented from falling into the gap between the conveying belt and the lower grinding disc 2.

[0028] In the embodiment of the present application, the grinding seat 12 is coaxially and rotatably connected with a rotating disc 18, the lower grinding disc 2 is detachably and fixedly connected to the rotating disc 18, the bottom of the rotating disc 18 is coaxially and vertically slidably installed with a clutch sleeve 19, the clutch sleeve 19 is sleeved outside the rotating shaft 5, the bottom of the clutch sleeve 19 is coaxially and vertically installed with a matching hole with a regular polygonal cross section, and the outer wall of the rotating shaft 5 is provided with a connecting part with a cross section matched with the clutch hole, so that when the clutch sleeve 19 is lowered to match the connecting part, the rotating disc 18 rotates synchronously with the rotating shaft 5. A third driving member 93 is arranged in the rack 1 for driving the clutch sleeve 19 to vertically ascend and descend to make the clutch sleeve 19 disengage / connect with the rotating shaft 5, and the third driving member 93 can be an electric push rod, which is fixed in the rack 1, and the output end of the electric push rod is connected with a driving ring, which is coaxially and sleeved outside the clutch sleeve 19 through a bearing.

[0029] Further, a plurality of photoelectric switches are uniformly and circumferentially arranged between the mounting frame 13 and the rack 1 along the grinding seat 12, the photoelectric switches are used for detecting the passing of the jig disc 4 on the lower grinding disc 2, and the photoelectric switches are electrically connected with the first driving member 91, the second driving member 92 and the third driving member 93 through a central controller or a computer. When the jig disc 4 sending program is started, the third driving member 93 drives the clutch sleeve 19 to descend and connect with the rotating shaft 5, the conveying belt assembly 61 is actuated to transport the jig disc 4 to the grinding cavity, a photoelectric switch can be additionally arranged at the entrance of the grinding seat 12 to confirm that the jig disc 4 is completely sent into the grinding cavity, and then the second driving member 92 is started to drive the rotating shaft 5 and the rotating disc 18 to rotate, the jig disc 4 moves with the rotating disc 18 and the lower grinding disc 2, and when the first photoelectric switch along the moving direction of the jig disc 4 in the grinding cavity detects the passing of the jig disc 4, the second driving member 92 is stopped through the computer control, and the third driving member 93 drives the clutch sleeve 19 to ascend and disengage from the rotating shaft 5.

[0030] Further, the connecting sleeve 14 is coaxially arranged on the mounting frame 13, and a connecting groove matched with the rotating shaft is arranged at the bottom end of the connecting sleeve 14. When the mounting frame 13 is lowered to be inserted into the rotating shaft, the connecting sleeve 14 rotates synchronously with the rotating shaft. The rotating ring 15 is coaxially arranged at the edge of the mounting frame 13, and the outer gear ring 131 is coaxially arranged on the rotating ring 15. The intermediate gear 16 is rotatably arranged in the mounting frame 13 and is in meshing transmission with the rotating ring 15 and the connecting sleeve 14. When the connecting sleeve 14 rotates with the rotating shaft 5, the outer gear ring 131 rotates reversely relative to the inner gear ring 51, so that the rotating speed of the jig disc 4 in the grinding cavity is improved, and the grinding efficiency of the workpiece is improved.

[0031] Further, a plurality of liquid outlet holes are arranged on the upper grinding disc 3, and a plurality of grinding liquid pipes 83 are connected to the mounting frame 13. The storage tank 81 for storing the grinding liquid is arranged in the rack 1, and the outer wall of the storage tank 81 is connected with the liquid outlet pipe 82 through the water pump. One end of the grinding liquid pipe 83 is connected with the liquid outlet hole, and the other end is connected with the liquid outlet pipe 82. The grinding liquid in the storage tank 81 is pumped into the grinding liquid pipe 83 through the water pump, and is discharged from the liquid outlet hole. The grinding liquid is provided for the grinding of the workpiece in the grinding cavity, and has the effects of cooling, lubrication and discharge of grinding debris.

[0032] Further, the first drainage groove 84 in a grid shape is arranged on the lower grinding disc 2 and the upper grinding disc 3. The first drainage groove 84 can effectively keep part of the grinding liquid inside, and improve the cooling and lubrication effects during the grinding process of the workpiece. The second drainage groove 85 is arranged in the grinding seat 12 of the rack 1, between the lower grinding disc 2 and the first guide step. The collecting tank 86 for collecting the grinding liquid in the second drainage groove 85 is arranged in the rack 1, so that the continuously injected grinding liquid in the grinding cavity can be collected.

[0033] Referring to Figure 4 Further, the collecting tank 86 is divided into a sedimentation chamber and a filtering chamber by the partition plate 87. The bottom of the partition plate 87 is provided with a communication port communicating the sedimentation chamber and the filtering chamber. The filtering layer 88 is horizontally arranged in the filtering chamber. The filtering layer 88 can be a filter frame and a filter cloth covered in the filter frame. The liquid outlet pipe is connected to the second drainage groove 85, and is connected with the collecting tank 86 and communicates with the sedimentation chamber. The collecting tank 86 is connected with the storage tank 81 through the backflow pipe. One end of the backflow pipe is connected with the filtering chamber and is located above the filtering layer 88. The water pump is connected to the backflow pipe, so that the grinding liquid in the filtering chamber is pumped into the storage tank 81 again. The filtering layer 88 can slow down the turbulent flow of the solution in the collecting tank 86, so that the impurities in the grinding liquid can be effectively settled. Further, the collecting tank 86 can be designed as an upper-lower separation type, so that the debris deposited in the collecting tank 86 can be easily cleaned. The communication valve is arranged at the top of the collecting tank 86, so that the air pressure in the collecting tank 86 is balanced with the outside, and the grinding liquid can smoothly pass through the filtering layer 88 into the filtering chamber.

[0034] Those skilled in the art will appreciate that although the preferred embodiments of the present application have been described, those skilled in the art will be able to devise alterations and modifications of the preferred embodiments without departing from the spirit and scope of the application. Accordingly, it is intended that the appended claims be construed to include all alternatives and modifications to the preferred embodiments as fall within the true spirit and scope of the present application. Obviously, various modifications and changes can be made to the present application without departing from the spirit and scope of the present application. It is intended that the present application encompass all such modifications and changes and, accordingly, be limited only by the scope of the following claims.

Claims

1. A double-sided polishing equipment, comprising a frame (1), a lower polishing disc (2), an upper polishing disc (3) and a plurality of jig discs (4), wherein a polishing seat (12) is arranged on the frame (1), the lower polishing disc (2) is arranged on the polishing seat (12), a first support frame (11) is fixedly arranged on the frame (1) above the lower polishing disc (2), a mounting frame (13) is vertically arranged on the first support frame (11), a first driving member (91) for driving the mounting frame (13) to ascend and descend is arranged on the first support frame (11), and the upper polishing disc (3) is fixedly arranged on the bottom of the mounting frame (13), wherein a polishing cavity is formed between the lower polishing disc (2) and the upper polishing disc (3). The rotating shaft (5) is coaxially arranged through the lower grinding disc (2), the second driving member (92) is arranged in the rack (1) for driving the rotating shaft (5) to rotate, the inner gear ring (51) is arranged on the outer wall of the rotating shaft (5) above the lower grinding disc (2) for engaging with the edge of the jig disc (4), and the outer gear ring (131) is arranged on the bottom wall of the mounting frame (13) outside the upper grinding disc (3) for engaging with the edge of the jig disc (4). The support table (6) is arranged on one side of the grinding seat (12) for placing the jig disc (4), the conveying belt assembly (61) is arranged on the support table (6) for conveying the jig disc (4) along the radial direction of the grinding seat (12), the rotating disc (18) is arranged in the grinding seat (12) for damping rotation, the lower grinding disc (2) is detachably connected with the rotating disc (18), the clutch sleeve (19) is arranged in the bottom of the rotating disc (18) for coaxial vertical sliding, and the third driving member (93) is arranged in the rack (1) for driving the clutch sleeve (19) to vertically lift to separate / connect the clutch sleeve (19) and the rotating shaft (5).

2. The double-sided polishing apparatus according to claim 1, wherein The connecting sleeve (14) is coaxially arranged on the mounting frame (13) for rotating, the connecting groove matched with the rotating shaft is formed in the bottom end of the connecting sleeve (14), the rotating ring (15) is arranged on the mounting frame (13) for rotating, the outer gear ring (131) is fixedly connected with the rotating ring (15), and the middle transfer gear (16) is arranged on the mounting frame (13) for rotating.

3. The double-sided polishing apparatus according to claim 2, wherein The first guide step higher than the lower grinding disc (2) is coaxially arranged on the edge of the grinding seat (12) and the outer wall of the rotating shaft, the second guide step matched with the first guide step is arranged on the edge of the jig disc (4), and the inlet for the jig disc (4) on the conveying belt assembly (61) to enter the grinding seat (12) is formed in one side of the grinding seat (12) close to the support table (6).

4. The double-sided polishing apparatus according to claim 3, wherein The conveying belt assembly (61) comprises a plurality of conveying rollers arranged in parallel and at intervals on the support table (6), the conveying belt is sleeved on the conveying rollers, the driving motor for driving the conveying rollers away from the grinding seat (12) to rotate is arranged on the support table (6), the transition plate (17) is arranged at the inlet of the grinding seat (12), the transition plate (17) is flush with the upper plane of the conveying belt and the upper plane of the lower grinding disc (2), one side edge of the transition plate (17) is connected with the conveying belt, and the other side edge is connected with the lower grinding disc (2).

5. The double-sided polishing apparatus according to claim 4, wherein A plurality of photoelectric switches are uniformly and interval arranged between the mounting frame (13) and the rack (1) along the circumferential direction of the grinding seat (12), the photoelectric switches are used for detecting the passing of the jig disc (4) on the lower grinding disc (2), and the photoelectric switches are electrically connected with the second driving member (92).

6. The double-sided polishing apparatus according to claim 1, wherein The upper grinding disc (3) is provided with a plurality of liquid outlet holes, the mounting frame (13) is connected with a plurality of grinding liquid pipes (83), the rack (1) is provided with a liquid storage barrel (81) for storing grinding liquid, the outer wall of the liquid storage barrel (81) is connected with a liquid outlet pipe (82) through a water pump, one end of the grinding liquid pipe (83) is connected with the liquid outlet hole, and the other end is connected with the liquid outlet pipe (82); The lower grinding disc (2) and the upper grinding disc (3) are both provided with a first liquid drainage groove (84) in a grid shape, the rack (1) is provided with a second liquid drainage groove (85) between the lower grinding disc (2) and the first guide step, and the rack (1) is provided with a collecting barrel (86) for collecting grinding liquid in the second liquid drainage groove (85).

7. The double-sided polishing apparatus according to claim 6, wherein The collecting barrel (86) is divided into a sedimentation chamber and a filter chamber by a partition plate (87), the bottom of the partition plate (87) is provided with a communication port communicating the sedimentation chamber and the filter chamber, the filter chamber is horizontally provided with a filter layer (88), the second liquid drainage groove (85) is connected with a liquid drainage pipe, the liquid drainage pipe is connected with the collecting barrel (86) and communicates with the sedimentation chamber, the collecting barrel (86) is connected with the liquid storage barrel (81) through a backflow pipe, one end of the backflow pipe is connected with the filter chamber and located above the filter layer (88).

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