Cathode mechanism and magnetron sputtering device

Abstract

The utility model relates to a cathode mechanism and a magnetron sputtering device. The cathode mechanism comprises an end, the end comprises a supporting piece and a butt joint piece, a first wiring channel communicated with the outside is formed in the supporting piece, the butt joint piece is arranged on one side of the supporting piece, and an insertion cavity communicated with the first wiring channel is formed in the butt joint piece; the cathode target comprises a target tube and a magnetic bar connector, the target tube is detachably connected to one side of the end, the magnetic bar connector is arranged at the end, close to the end, of the target tube and inserted into the insertion cavity, and a containing cavity is formed in the magnetic bar connector; one end of the transmission cable is located outside the end, the other end of the transmission cable passes through the first wiring channel and is inserted into the containing cavity so as to be electrically connected with the magnetic bar connector, and the transmission cable is used for transmitting electric power and / or data signals. The cathode mechanism provided by the utility model is good in connection stability, and the reliability of the sputtering process is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of magnetron sputtering, in particular to a cathode mechanism and a magnetron sputtering device. BACKGROUND

[0002] Magnetron sputtering is a kind of physical vapor deposition, which can be used to prepare metal, semiconductor, insulator and other materials. The working principle of magnetron sputtering is based on the synergistic effect of electric field and magnetic field. In a vacuum environment, argon gas is introduced and ionized to form argon ions (Ar⁺); the cathode target in the magnetron sputtering device receives a negative voltage from an external power supply, so that the target material surface is negatively charged, which will attract argon ions to accelerate towards the cathode target. When these high-energy argon ions hit the target material surface, they will knock out atoms or molecules of the target material to form sputtering particles, which will be deposited on the substrate surface with the gas flow, i.e. to form a thin film.

[0003] At present, the transmission of current or the transmission of signal is usually realized by connecting the cathode target and the end head. This connection method is widely used in various sputtering devices. However, this connection method has certain instability, which leads to instability of current or signal transmission, and the instability of current or signal transmission will have adverse effects on the sputtering process, thereby affecting the quality of the produced thin film. CONTENT OF THE INVENTION

[0004] Therefore, it is necessary to provide a cathode mechanism and a magnetron sputtering device to solve the problem of instability of current or signal transmission.

[0005] A cathode mechanism, comprising:

[0006] An end head, comprising a support and a butt joint, a first wiring channel is formed in the inside of the support and is in communication with the outside, the butt joint is arranged on one side of the support, and the butt joint is provided with a plug-in cavity in communication with the first wiring channel;

[0007] A cathode target, comprising a target tube and a magnetic rod joint, the target tube is detachably connected to one side of the end head, the magnetic rod joint is arranged at one end of the target tube close to the end head and is inserted into the plug-in cavity, and the magnetic rod joint is provided with a containing cavity; and

[0008] A transmission cable, one end of the transmission cable is located outside the end head, the other end of the transmission cable passes through the first wiring channel and is inserted into the containing cavity of the magnetic rod joint to be electrically connected with the magnetic rod joint, and the transmission cable is used for transmitting power and / or data signal.

[0009] In one of the embodiments, the transmission cable comprises a cable body and a connector, the connector is inserted into the accommodating cavity, one end of the cable body is located outside the end head, and the other end of the cable body passes through the first wiring channel and is connected with the connector.

[0010] In one of the embodiments, the inner wall of the insertion cavity is provided with a limiting groove arranged in the axial direction, and the outer wall of the magnetic rod joint is correspondingly provided with a limiting protrusion, the limiting protrusion is slidingly arranged in the limiting groove.

[0011] In one of the embodiments, the abutting piece comprises a mounting part and an abutting part, the mounting part is connected with the support, the mounting part is provided with a second wiring channel which is in communication with the first wiring channel, the abutting part is arranged on the side of the mounting part close to the cathode target, and the insertion cavity is arranged in the abutting part and is in communication with the second wiring channel.

[0012] In one of the embodiments, the end head further comprises a bearing, a rotating sleeve, a connecting piece and a rotating assembly, the bearing is sleeved outside the abutting part, the rotating sleeve is sleeved outside the bearing, the connecting piece is connected to one end of the rotating sleeve close to the cathode target and is detachably connected with the target tube, and the rotating assembly is connected with the rotating sleeve and is used to drive the rotating sleeve to rotate relative to the abutting piece.

[0013] In one of the embodiments, the rotating assembly comprises a driving piece and a transmission unit, the driving piece and the transmission unit are located on the same side of the support, the output end of the driving piece is connected with the transmission unit, and the transmission unit is connected with the rotating sleeve.

[0014] In one of the embodiments, the transmission unit comprises a driving gear and a driven gear, the driving gear is located on one side of the support and is connected with the output end of the driving piece, the driven gear is arranged on the side of the driving gear close to the abutting part and is meshingly connected with the driving gear, and the driven gear is connected with the rotating sleeve.

[0015] In one of the embodiments, the connecting piece comprises a connecting piece body and an annular protrusion, the connecting piece body is connected to one end of the rotating sleeve close to the cathode target, the annular protrusion is arranged along the circumferential direction of the connecting piece body and is located at one end of the connecting piece body close to the rotating sleeve, one end of the target tube close to the end head is sleeved with a fixing piece, the fixing piece is provided with a mounting groove arranged around the circumferential direction of the fixing piece, and the connecting piece and the fixing piece are clampedly connected through the annular protrusion and the mounting groove.

[0016] In one of the embodiments, the end head further comprises a delivery pipe and a discharge pipe, which are connected with the support respectively; the support is provided with a first delivery pipe and a first discharge pipe along the axial direction of the support, the first delivery pipe is communicated with the delivery pipe, and the first discharge pipe is communicated with the discharge pipe; the mounting part is provided with a second delivery pipe and a second discharge pipe, the second delivery pipe is communicated with the first delivery pipe, and the second discharge pipe is communicated with the first discharge pipe; the butt joint part is provided with a third delivery pipe and a third discharge pipe along the axial direction of the butt joint part, the third delivery pipe and the third discharge pipe are oppositely arranged on both sides of the insertion cavity, the third delivery pipe is communicated with the second delivery pipe, and the third discharge pipe is communicated with the second discharge pipe; the cathode target further comprises a sealing pipe and a magnetic rod, the sealing pipe is arranged in the interior of the target pipe and is connected with the magnetic rod joint, the magnetic rod is arranged in the interior of the sealing pipe, and the gap between the target pipe and the sealing pipe forms a cooling channel; the cooling channel is communicated with the third delivery pipe and the third discharge pipe respectively.

[0017] A magnetron sputtering device comprises a vacuum chamber and the cathode mechanism as described above, and the cathode target of the cathode mechanism is arranged in the vacuum chamber.

[0018] The cathode mechanism described above uses a transmission cable to transmit power and / or data signals, and the transmission cable is directly introduced into the accommodating cavity of the magnetic rod joint to be electrically connected with the magnetic rod joint, so that the connection is more stable and is not prone to unstable connection such as poor contact, thereby improving the stability of current and / or signal transmission and improving the reliability of the sputtering process; at the same time, the operation process of the connection is simplified, the installation and disassembly process of the cathode mechanism is more convenient, and the operation time is saved. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 An exploded schematic view of the cathode mechanism provided in one embodiment of the present application.

[0020] Figure 2 A sectional view of part of the structure of the cathode mechanism provided in one embodiment of the present application.

[0021] Figure 3 A sectional view of part of the structure of the cathode mechanism provided in another embodiment of the present application.

[0022] Figure 4 A structural schematic view of the butt joint part in the cathode mechanism provided in one embodiment of the present application.

[0023] Figure 5 A sectional view of the butt joint part in the cathode mechanism provided in one embodiment of the present application.

[0024] Figure 6 For Figure 2 Enlarged view of the middle A.

[0025] Reference numerals: 10, end; 11, support; 111, first wiring channel; 12, butt joint; 121, mounting portion; 1211, second wiring channel; 1212, second conveying pipeline; 1213, second discharge pipeline; 122, butt joint portion; 1221, plug-in cavity; 1222, third conveying pipeline; 1223, third discharge pipeline; 1224, limiting groove; 13, bearing; 14, rotating sleeve; 15, connecting piece; 151, connecting piece body; 152, annular protrusion; 16, rotating assembly; 161, driving piece; 162, transmission unit; 1621, driving gear; 1622, transmission gear; 1623, driven gear; 17, conveying pipe; 20, cathode target; 21, target pipe; 211, cooling channel; 22, sealing pipe; 23, magnetic rod; 24, magnetic rod joint; 241, accommodating cavity; 25, limiting protrusion; 26, fixing piece; 261, mounting groove; 30, transmission cable; 31, cable body; 32, connector; 40, support seat. DETAILED DESCRIPTION

[0026] In order to make the above objectives, features and advantages of the present application more apparent, a detailed description of the specific embodiments of the present application will be given below with reference to the accompanying drawings. In the following description, a large number of specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be implemented in many different ways other than those described herein, and those skilled in the art can make similar improvements without departing from the spirit of the present application, so the present application is not limited to the specific embodiments disclosed below.

[0027] In the description of the present application, it should be understood that if these terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0028] In addition, the terms "first", "second", and the like, if any, are used herein for descriptive purposes only and should not be construed as indicating or implying relative importance or implicating the number of indicated technical features. Thus, a feature defined with "first", "second" may include at least one of the features explicitly or implicitly. In the description of the present application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise explicitly specified and limited.

[0029] In the present application, unless otherwise explicitly specified and limited, if the terms "mounting", "connecting", "connecting", "fixing" and the like appear, these terms should be interpreted broadly. For example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0030] In the present application, unless otherwise explicitly specified and limited, if the first feature is described as "on" or "under" the second feature, etc., it can mean that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be the first feature directly above or obliquely above the second feature, or it can only mean that the first feature is higher than the second feature in horizontal height. The first feature "below", "below" and "below" the second feature can be the first feature directly below or obliquely below the second feature, or it can only mean that the first feature is lower than the second feature in horizontal height.

[0031] It should be noted that if an element is referred to as "fixed to" or "disposed to" another element, it can be directly on another element or there can be a middle element. If an element is considered to be "connected" to another element, it can be directly connected to another element or there can be a middle element. If present, the terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used in the present application are only for the purpose of illustration and do not represent the only implementation.

[0032] As the background art, the current transmission or signal transmission is generally achieved by connecting the cathode target and the end head. The connector generally includes two parts, one part of the connector is installed in the end head, and the other part of the connector is installed in the cathode target. By plugging the end head and the cathode target, the connector can achieve the transmission of current and / or data signal, so as to ensure that the cathode target can receive the required current and / or data signal. However, the connector has some disadvantages. First, due to the small overall size of the connector, the alignment accuracy between the end head and the cathode target is high, and the plugging process is prone to misalignment, which may even cause mechanical damage to the connector, affecting the service life of the end head and the cathode target. Second, the connection stability of the connector also has hidden dangers. When the connection is not firm or the contact is poor, it may cause the interruption of current or signal transmission, thereby affecting the stability of the sputtering process.

[0033] To solve the above problems, the present application provides a cathode mechanism, please refer to Figure 1 With Figure 2 , Figure 1 shows the structure exploded view of the cathode mechanism provided by an embodiment of the present application, Figure 2 shows the partial structure section view of the cathode mechanism provided by an embodiment of the present application. The cathode mechanism provided by an embodiment of the present application includes an end head 10, a cathode target 20, a transmission cable 30 and a support seat 40. The cathode target 20 includes a first end and a second end arranged oppositely. The first end is detachably connected with the end head 10, and the second end is detachably connected with the support seat 40. The end head 10 includes a support piece 11 and a butt joint piece 12. The inside of the support piece 11 is provided with a first wiring passage 111, which is in communication with the outside, for the transmission cable 30 to pass through. The butt joint piece 12 is arranged on the side of the support piece 11 close to the cathode target 20, and the butt joint piece 12 is provided with a plug-in cavity 1221, which is in communication with the first wiring passage 111. The cathode target 20 includes a target pipe 21 and a magnetic rod joint 24. The target pipe 21 is detachably connected to one side of the end head 10, and the magnetic rod joint 24 is arranged at one end of the target pipe 21 close to the end head 10 and is inserted into the plug-in cavity 1221 of the butt joint piece 12. The magnetic rod joint 24 is provided with a containing cavity 241 for containing the transmission cable 30. One end of the transmission cable 30 is located outside the end head 10, and the other end of the transmission cable 30 passes through the first wiring passage 111 and is inserted into the containing cavity 241 of the magnetic rod joint 24 to be electrically connected with the magnetic rod joint 24. The transmission cable 30 is used for transmitting power and / or data signal.

[0034] It can be understood that the cathode mechanism provided by the application adopts the transmission cable 30 to transmit power and / or data signals, one end of the transmission cable 30 is arranged outside the end head 10, the other end of the transmission cable 30 passes through the first wiring channel 111 of the end head 10 and is inserted into the accommodating cavity 241 of the magnet rod joint 24 to be electrically connected with the magnet rod joint 24, so that the unstable connection is avoided, the stability of current and / or signal transmission is ensured, and the current in the sputtering process is more stable, and the sputtering efficiency and film layer quality are improved. In addition, the operation process of connection is simplified, the installation and disassembly process of the cathode mechanism is more convenient, and the operation time is saved.

[0035] Please refer to Figure 3 , Figure 3 Part of the structure of the cathode mechanism provided by another embodiment of the application is shown in the schematic cross-sectional view, in some embodiments, the transmission cable 30 includes a cable body 31 and a connector 32, wherein the connector 32 is inserted into the accommodating cavity 241 of the magnet rod joint 24, one end of the cable body 31 is located outside the end head 10, and the other end of the cable body 31 passes through the first wiring channel 111 and is connected with the connector 32. Such a transmission cable 30 can more reliably realize current and / or signal transmission, improve the reliability of the sputtering process; at the same time, it can also realize the quick plug of the transmission cable 30 and the magnet rod joint 24, and is more convenient for disassembly and replacement of the transmission cable 30.

[0036] Please refer to Figure 4 and Figure 5 , Figure 4 The structure of the cathode mechanism provided by an embodiment of the application is shown in the schematic view of the abutting piece 12, Figure 5 The structure of the cathode mechanism provided by an embodiment of the application is shown in the schematic view of the abutting piece 12. In some embodiments, the abutting piece 12 includes a mounting part 121 and an abutting part 122, the mounting part 121 is connected with the support 11, the inside of the mounting part 121 is provided with a second wiring channel 1211, the second wiring channel 1211 is in communication with the first wiring channel 111 of the support 11, and is used for passing the transmission cable 30. The abutting part 122 is arranged on one side of the mounting part 121 close to the cathode target 20, and a plug-in cavity 1221 is arranged in the abutting part 122 and is in communication with the second wiring channel 1211.

[0037] Please refer to Figure 6 , Figure 6 It is shown Figure 2In some embodiments, the end 10 further comprises a bearing 13, a rotating sleeve 14, a connecting piece 15 and a rotating assembly 16. The bearing 13 is sleeved on the outside of the abutting portion 122, the rotating sleeve 14 is sleeved on the outside of the bearing 13, the connecting piece 15 is connected to one end of the rotating sleeve 14 close to the cathode target 20 and detachably connected with the target tube 21, and the rotating assembly 16 is connected with the rotating sleeve 14 and used to drive the rotating sleeve 14 to rotate relative to the abutting piece 12. The connecting piece 15 connected with the rotating sleeve 14 can also rotate relative to the abutting piece 12 by driving the rotating sleeve 14 to rotate relative to the abutting piece 12 by the rotating assembly 16, so that the target tube 21 can rotate relative to the abutting piece 12. In the process of magnetron sputtering, driving the target tube 21 to rotate relative to the abutting piece 12 can improve the utilization rate of the target material on the surface of the target tube 21. In addition, the rotation of the target tube 21 can also disperse the heat of the target material to different parts, which helps to prevent local overheating.

[0038] In some embodiments, the rotating assembly 16 comprises a driving piece 161 and a transmission unit 162. The driving piece 161 and the transmission unit 162 are located on the same side of the support 11. The output end of the driving piece 161 is connected with the transmission unit 162, and the transmission unit 162 is connected with the rotating sleeve 14. In some embodiments, the driving piece 161 is an electric motor. The output shaft of the electric motor is connected with the transmission unit 162. The transmission unit 162 is driven to rotate the rotating sleeve 14 relative to the abutting piece 12. In other embodiments, the driving piece 161 can also be a pneumatic motor, which is not limited in this regard.

[0039] In some embodiments, the transmission unit 162 comprises a driving gear 1621 and a driven gear 1623. The driving gear 1621 is located on one side of the support 11 and connected with the output end of the driving piece 161. The driven gear 1623 is arranged on one side of the driving gear 1621 close to the abutting portion 122 and connected with the driving gear 1621 in meshing connection. The driven gear 1623 is connected with the rotating sleeve 14. The driving gear 1621 is driven to rotate by the driving piece 161, thereby driving the driven gear 1623 to rotate, so as to drive the rotating sleeve 14 to rotate relative to the abutting piece 12. In some embodiments, the transmission unit 162 further comprises at least one transmission gear 1622. The transmission gear 1622 is arranged between the driving gear 1621 and the driven gear 1623 and connected with both in meshing connection. The driving gear 1621 is driven to rotate by the driving piece 161, thereby driving the transmission gear 1622 to rotate, so as to drive the driven gear 1623 to rotate.

[0040] In some embodiments, a limiting groove 1224 is formed on the inner wall of the plug-in cavity 1221 of the connecting piece 12, and the limiting groove 1224 is arranged along the axial direction of the connecting piece 12. The outer wall of the magnetic rod joint 24 is provided with a limiting protrusion 25, the limiting protrusion 25 and the limiting groove 1224 on the inner wall of the plug-in cavity 1221 are matched with each other in position and shape, the limiting protrusion 25 is slidingly arranged in the limiting groove 1224, so that the magnetic rod joint 24 can only be inserted into the plug-in cavity 1221 of the connecting piece 12 in a specific direction and position, thereby avoiding the situation of improper plugging or incorrect insertion angle. At the same time, the cooperation of the limiting protrusion 25 and the limiting groove 1224 makes the magnetic rod joint 24 have a locking effect after being plugged into the connecting piece 12, so as to ensure that the magnetic rod joint 24 can remain stationary when the target tube 21 rotates relative to the connecting piece 12, thereby enhancing the firmness and stability of the connection between the magnetic rod joint 24 and the connecting piece 12.

[0041] In some embodiments, the connecting piece 15 includes a connecting piece body 151 and an annular protrusion 152, the connecting piece body 151 is connected to one end of the rotating sleeve 14 close to the cathode target 20, and the annular protrusion 152 is arranged along the circumferential direction of the connecting piece body 151 and located at one end of the connecting piece body 151 close to the rotating sleeve 14. The target tube 21 is sleeved with a fixing piece 26 close to the end head 10, the fixing piece 26 is provided with a mounting groove 261, the mounting groove 261 is arranged along the circumferential direction of the fixing piece 26 and located at one end of the fixing piece 26 close to the end head 10. The connecting piece 15 and the fixing piece 26 are connected through the engagement of the annular protrusion 152 and the annular groove, which facilitates the installation and disassembly of the end head 10 and the cathode target 20, and is also conducive to improving the connection stability and reliability of the end head 10 and the cathode target 20.

[0042] In some embodiments, the end head 10 further includes a delivery pipe 17 and an exhaust pipe (not shown in the figure), and the delivery pipe 17 and the exhaust pipe are respectively connected with the support 11. The support 11 is provided with a first delivery pipe (not shown in the figure) and a first exhaust pipe (not shown in the figure), both of which are arranged along the axial direction of the support 11, wherein the first delivery pipe is in communication with the delivery pipe 17, and the first exhaust pipe is in communication with the exhaust pipe. The mounting portion 121 is provided with a second delivery pipe 1212 and a second exhaust pipe 1213, the second delivery pipe 1212 is in communication with the first delivery pipe, and the second exhaust pipe 1213 is in communication with the first exhaust pipe. The connecting portion 122 is provided with a third delivery pipe 1222 and a third exhaust pipe 1223, both of which are arranged along the axial direction of the connecting portion 122, and the third delivery pipe 1222 and the third exhaust pipe 1223 are oppositely arranged on both sides of the plug-in cavity 1221, the third delivery pipe 1222 is in communication with the second delivery pipe 1212, and the third exhaust pipe 1223 is in communication with the second exhaust pipe 1213.

[0043] The cathode target 20 further comprises a sealed tube 22 arranged in the interior of the target tube 21 and connected with a magnetic rod joint 24, and a magnetic rod 23 arranged in the interior of the sealed tube 22. The gap between the inner wall of the target tube 21 and the sealed tube 22 forms a cooling channel 211 for the cooling fluid. The end head 10 is connected with the cathode target 20, the third delivery pipe 1222 is in communication with the cooling channel 211, and the third discharge pipe 1223 is in communication with the cooling channel 211. The delivery pipe 17 is connected with an external device for providing the cooling fluid, the cooling fluid is input into the delivery pipe 17 and flows through the first delivery pipe, the second delivery pipe 1212 and the third delivery pipe 1222, and finally is input into the cooling channel 211 in the cathode target 20; the cooling fluid is discharged from the cooling channel 211, flows through the third discharge pipe 1223, the second discharge pipe 1213 and the first discharge pipe, and finally is discharged to the outside through the discharge pipe. The cooling fluid in the cathode mechanism is used to take away the heat generated by the magnetic rod 23 during the sputtering process, so as to prevent the magnetic rod 23 from being overheated and causing the magnetic property to decrease or be damaged, thereby maintaining the stability of the sputtering process.

[0044] In some embodiments, the docking portion 122 is provided with a plurality of third delivery pipes 1222 and a plurality of third discharge pipes 1223, which are arranged on both sides of the plug-in cavity 1221 in a one-to-one correspondence, the plurality of third delivery pipes 1222 are arranged along the circumference of the plug-in cavity 1221 at intervals, and the plurality of third discharge pipes 1223 are arranged along the circumference of the plug-in cavity 1221 at intervals. The plurality of third delivery pipes 1222 can simultaneously deliver the cooling fluid to the cooling channel 211, thereby accelerating the speed of the cooling fluid delivered into the cooling channel 211, and the plurality of third discharge pipes 1223 can quickly discharge the cooling fluid in the cooling channel 211, thereby improving the heat dissipation efficiency of the magnetic rod 23.

[0045] The cathode mechanism provided in the application directly introduces the transmission cable 30 into the accommodating cavity 241 of the magnetic rod joint 24, uses the transmission cable 30 to transmit power and / or data signals, can ensure the stable transmission of the current and / or signals during the sputtering process, avoids unstable connection such as poor contact, and thereby improves the reliability of the sputtering process, which is beneficial to improving the quality of the produced film. Meanwhile, the connection operation is simplified, the installation and disassembly process of the cathode mechanism is more convenient, and the operation time is effectively shortened.

[0046] The application further provides a magnetron sputtering device comprising a vacuum chamber and the cathode mechanism as described above, wherein the cathode target 20 of the cathode mechanism is arranged in the vacuum chamber. The magnetron sputtering device has stable current during the sputtering process, which is beneficial to improving the sputtering efficiency and the quality of the film layer.

[0047] Any combination of the technical features in the above-described embodiments can be made, and for the sake of brevity, not all possible combinations are described, however, it is to be understood that the application embraces all such possible combinations.

[0048] The above-described embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the patent scope of the application. It should be pointed out that for ordinary skilled persons in the art, some modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. A cathode mechanism, characterized by, The cathode mechanism comprises: a head, comprising a support and a butt joint, the inside of the support is provided with a first wiring channel in communication with the outside, the butt joint is arranged on one side of the support, and the butt joint is provided with a plug-in cavity in communication with the first wiring channel; a cathode target, comprising a target tube and a magnetic rod joint, the target tube is detachably connected to one side of the head, the magnetic rod joint is arranged on one end of the target tube close to the head and is inserted into the plug-in cavity, and the magnetic rod joint is provided with a containing cavity; and a transmission cable, one end of the transmission cable is located outside the head, the other end of the transmission cable passes through the first wiring channel and is inserted into the containing cavity of the magnetic rod joint to be electrically connected with the magnetic rod joint, and the transmission cable is used for transmitting power and / or data signals.

2. The cathode mechanism of claim 1, wherein, The transmission cable comprises a cable body and a connector, the connector is inserted into the containing cavity, one end of the cable body is located outside the head, and the other end of the cable body passes through the first wiring channel and is connected with the connector.

3. The cathode mechanism of claim 1, wherein, The inner wall of the plug-in cavity is provided with a limiting groove arranged in the axial direction, and the outer wall of the magnetic rod joint is correspondingly provided with a limiting protrusion, and the limiting protrusion is slidingly arranged in the limiting groove.

4. The cathode mechanism of claim 1, wherein, The butt joint comprises a mounting part and a butt joint part, the mounting part is connected with the support, and the mounting part is provided with a second wiring channel in communication with the first wiring channel; the butt joint part is arranged on one side of the mounting part close to the cathode target, and the plug-in cavity is arranged in the butt joint part and is in communication with the second wiring channel.

5. The cathode mechanism of claim 4, wherein, The head further comprises a bearing, a rotating sleeve, a connecting piece and a rotating assembly, the bearing is sleeved outside the butt joint part, the rotating sleeve is sleeved outside the bearing, the connecting piece is connected to one end of the rotating sleeve close to the cathode target and is detachably connected with the target tube, and the rotating assembly is connected with the rotating sleeve and is used for driving the rotating sleeve to rotate relative to the butt joint part.

6. The cathode mechanism of claim 5, wherein, The rotating assembly comprises a driving piece and a transmission unit, the driving piece and the transmission unit are located on the same side of the support, the output end of the driving piece is connected with the transmission unit, and the transmission unit is connected with the rotating sleeve.

7. The cathode mechanism of claim 6, wherein, The transmission unit comprises a driving gear and a driven gear, the driving gear is located on one side of the support and is connected with the output end of the driving piece, the driven gear is arranged on one side of the driving gear close to the butt joint part and is meshingly connected with the driving gear, and the driven gear is connected with the rotating sleeve.

8. The cathode mechanism of claim 5, wherein, The connecting piece comprises a connecting piece body and an annular protrusion, the connecting piece body is connected to one end of the rotating sleeve close to the cathode target, and the annular protrusion is arranged along the circumference of the connecting piece body and is located at one end of the connecting piece body close to the rotating sleeve; one end of the target tube close to the head is sleeved with a fixing piece, the fixing piece is provided with a mounting groove arranged around the circumference thereof; the connecting piece and the fixing piece are connected through the annular protrusion and the mounting groove.

9. The cathode mechanism of claim 4, wherein, The end head further comprises a delivery pipe and a discharge pipe, which are connected with the support respectively; the support is provided with a first delivery pipe and a first discharge pipe along the axial direction of the support, the first delivery pipe is communicated with the delivery pipe, and the first discharge pipe is communicated with the discharge pipe; the mounting part is provided with a second delivery pipe and a second discharge pipe, the second delivery pipe is communicated with the first delivery pipe, and the second discharge pipe is communicated with the first discharge pipe; the butt joint part is provided with a third delivery pipe and a third discharge pipe along the axial direction of the butt joint part, the third delivery pipe and the third discharge pipe are oppositely arranged on both sides of the plug-in cavity, the third delivery pipe is communicated with the second delivery pipe, and the third discharge pipe is communicated with the second discharge pipe. The cathode target further comprises a sealing tube and a magnetic bar, the sealing tube is arranged in the interior of the target tube and is connected with the magnetic bar, the magnetic bar is arranged in the interior of the sealing tube, and the gap between the target tube and the sealing tube forms a cooling channel; the cooling channel is communicated with the third delivery pipe and the third discharge pipe respectively.

10. A magnetron sputtering device, characterized by The cathode mechanism comprises a vacuum chamber and a cathode mechanism as claimed in any one of claims 1 to 9, and the cathode target of the cathode mechanism is arranged in the vacuum chamber.

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