Vacuum coating equipment and solar cell production line

Abstract

The utility model discloses vacuum coating equipment and a solar cell production line, and relates to the technical field of coating equipment. According to the vacuum coating equipment, the position of the second electrode assembly in the vacuum coating equipment can be conveniently adjusted. The vacuum coating equipment comprises a shell, a first electrode piece and a second electrode assembly. Wherein the shell is provided with an accommodating cavity; the first electrode piece is positioned in the accommodating cavity; the second electrode assembly is located in the containing cavity and connected with the shell through an adjusting mechanism, a working space is formed between the second electrode assembly and the first electrode piece, and the second electrode assembly can be driven to move relative to the first electrode piece by adjusting the adjusting mechanism. The vacuum coating equipment provided by the utility model is used for coating a to-be-coated part.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of coating equipment, and particularly relates to a vacuum coating equipment and a solar cell production line. BACKGROUND

[0002] The vacuum coating technology is used for the coating process of solar cell. In a plasma enhanced chemical vapor deposition (PECVD) vacuum coating equipment, a parallel plate electrode plasma discharge structure is usually used. For example, two parallel plate electrodes are arranged in parallel in the vacuum coating equipment. In the working process of the vacuum coating equipment, the cavity of the equipment is in a vacuum state, and under the action of atmospheric pressure, the cavity will be slightly deformed, thus affecting the parallelism and the distance between the two parallel plate electrodes. SUMMARY

[0003] The present application provides a vacuum coating equipment and a solar cell production line, which can adjust the position of the second electrode assembly in the vacuum coating equipment, so that the parallelism between the first electrode and the second electrode assembly in the vacuum coating equipment can meet the use requirements.

[0004] The first aspect of the present application provides a vacuum coating equipment, which comprises a shell, a first electrode and a second electrode assembly. The shell has a receiving cavity; the first electrode is located in the receiving cavity; the second electrode assembly is located in the receiving cavity and is connected with the shell through an adjusting mechanism; the second electrode assembly and the first electrode form a working space; and the adjusting mechanism can drive the second electrode assembly to move relative to the first electrode.

[0005] The vacuum coating device provided by the application can install the first electrode member and the second electrode assembly in the accommodating cavity, and has a working space between the first electrode member and the second electrode assembly, so that the workpiece to be coated can be placed in the working space to facilitate coating. Meanwhile, the second electrode assembly is connected with the shell through the adjusting mechanism. When the distance between the second electrode assembly and the first electrode member changes, the second electrode assembly and the first electrode member do not meet the parallelism requirement. In this case, the position of at least part of the parts in the adjusting mechanism relative to the shell can be adjusted to drive the second electrode assembly to move relative to the first electrode member, so that the second electrode assembly and the first electrode member always meet the parallelism requirement. The vacuum coating device provided by the embodiment of the application only needs to adjust the position of at least part of the parts in the adjusting mechanism relative to the shell when adjusting the position of the second electrode assembly relative to the first electrode member. Therefore, the vacuum coating device provided by the embodiment of the application facilitates the adjustment of the position of the second electrode assembly in the vacuum coating device, and can make the parallelism between the first electrode member and the second electrode assembly in the vacuum coating device meet the use requirement.

[0006] In a possible implementation manner of the application, the adjusting mechanism comprises an adjusting assembly. One end of the adjusting assembly is connected with the second electrode assembly, and the other end is movably connected with the shell. Along the axial direction of the adjusting assembly, the adjusting assembly can at least partially move relative to the shell.

[0007] The technical scheme of the application can not only adjust the position of the adjusting assembly relative to the shell along the axial direction, but also facilitate the movement of the adjusting assembly relative to the shell along the radial direction during the adjustment of the position of the adjusting assembly relative to the shell along the axial direction. After the position of the second electrode assembly relative to the first electrode member is adjusted, the stress between the adjusting assembly and the shell can be eliminated, and the stress between the adjusting assembly and the second electrode assembly can also be eliminated.

[0008] In a possible implementation manner of the application, the adjusting assembly comprises a matched adjusting stud and adjusting nut. One end of the adjusting stud is connected with the second electrode assembly, and the other end penetrates into the shell. The adjusting nut is arranged on the adjusting stud away from the second electrode assembly, and abuts against the side of the shell away from the accommodating cavity. When the adjusting nut rotates relative to the shell, the adjusting stud moves relative to the shell.

[0009] The technical scheme of the application can drive the adjusting stud to move relative to the shell by rotating the adjusting nut, so that the second electrode assembly can move relative to the first electrode member through the adjusting stud.

[0010] In a possible implementation manner of the present application, the adjusting mechanism further comprises a pressing piece, the pressing piece is sleeved on the adjusting stud close to one end of the adjusting nut, the pressing piece is fixedly connected with the shell and abuts against the adjusting nut, and the adjusting nut can be limited to move along the axial direction.

[0011] The technical scheme of the present application can limit the movement of the adjusting nut away from the first electrode assembly through the pressing piece, so that the adjusting nut can be driven to move away from the first electrode assembly or to move close to the first electrode assembly through the rotation of the adjusting nut, thereby realizing the adjustment of the second electrode assembly in any direction away from or close to the first electrode assembly.

[0012] In a possible implementation manner of the present application, the adjusting stud is sleeved with a first insulating piece, the first insulating piece has a protrusion formed thereon along the radial direction of the adjusting stud, and the adjusting nut abuts against the side of the shell away from the accommodating cavity through the protrusion.

[0013] The technical scheme of the present application can make the adjusting stud abut against the shell through the first insulating piece, so as to insulate the voltage and current between the adjusting stud and the shell, thereby improving the insulation performance of the vacuum coating equipment.

[0014] In a possible implementation manner of the present application, the adjusting nut is sleeved with a second insulating piece, the second insulating piece covers the end of the adjusting stud away from the second electrode assembly and the adjusting nut.

[0015] The technical scheme of the present application can insulate the voltage and current between the adjusting nut and the shell and between the adjusting stud and the shell through the second insulating piece, thereby improving the insulation performance of the vacuum coating equipment.

[0016] In a possible implementation manner of the present application, the adjusting mechanism further comprises a supporting assembly, the adjusting assembly abuts against the shell through the supporting assembly, and the adjusting assembly can move along the radial direction of the adjusting assembly relative to the shell through the supporting assembly.

[0017] The technical scheme of the present application can make the adjusting assembly move relative to the shell along the radial direction of the adjusting assembly through the supporting assembly, so that the external force acting on the adjusting assembly can be eliminated, thereby eliminating the stress between the adjusting assembly and the second electrode assembly and between the adjusting assembly and the shell.

[0018] In a possible implementation of the present application, the supporting assembly comprises a supporting frame and a rolling body, the fixed part of the supporting frame is in abutment with the shell, the moving part of the supporting frame is in abutment with the adjusting assembly, and the rolling body is located between the fixed part and the moving part, and the moving part can move relative to the fixed part through the rolling body.

[0019] The technical scheme of the present application can set the rolling body in the supporting frame, so that the two parts of the supporting frame can move relative to each other through the rolling body. The convex ring of the first insulating piece is in abutment with the shell through the supporting assembly, so that the first insulating piece can move relative to the shell through the rolling body, and the adjusting assembly can move relative to the shell through the rolling body.

[0020] In a possible implementation of the present application, the second electrode assembly comprises a second electrode piece and a spraying piece, the adjusting mechanism passes through the second electrode piece to connect the spraying piece, one end of the connecting piece is fixedly connected with the second electrode piece, the other end of the connecting piece is slidably connected with the spraying piece, and the second electrode piece, the spraying piece and the connecting piece enclose the uniform gas cavity.

[0021] The technical scheme of the present application can enclose the uniform gas cavity through the spraying piece, the connecting piece and the second electrode piece, so that after the process gas enters the uniform gas cavity through the gas inlet hole on the second electrode piece, the process gas can first fill the uniform gas cavity, and then flow from the plurality of spraying holes to the working space after the uniform gas cavity is filled or nearly filled with the process gas, which is beneficial to improve the uniformity of the distribution of the process gas in the working space. The spraying piece is connected with the shell through the adjusting mechanism, which is convenient for adjusting the distance between the spraying piece and the first electrode piece through the adjusting mechanism to meet the parallelism requirement between the spraying piece and the first electrode piece. At the same time, the spraying piece is slidably connected with the connecting piece, so that the spraying piece can slide relative to the connecting piece when thermal expansion occurs, thereby absorbing the excess extension of the spraying plate caused by temperature difference, which is beneficial to reduce the deformation amount of the spraying piece caused by external force.

[0022] In a possible implementation of the present application, the spraying piece is connected with the adjusting mechanism through a fixing piece, part of the fixing piece is arranged in the spraying piece, and the other part is connected with the adjusting mechanism, air flow channels are formed on the fixing piece and the adjusting mechanism, one end of the air flow channel is located on the part of the adjusting mechanism in the uniform gas cavity, and the other end of the air flow channel is located on the surface of the fixing piece close to the first electrode piece.

[0023] The technical solution of this application facilitates assembly and disassembly of the spray element and the regulating mechanism by connecting them via a fixing member. Furthermore, airflow channels are formed on the fixing member and the regulating mechanism, allowing spray holes to be formed in the portion of the spray element occupied by the regulating mechanism through the airflow channels. This facilitates more uniform distribution of the working gas flowing into the workspace through the spray holes.

[0024] In a possible implementation of the present application, a mounting groove is provided on the housing, the portion where the adjustment mechanism is connected to the housing is located in the mounting groove, and the housing further includes a seal that is sealingly connected to the mounting groove.

[0025] The technical solution of this application, because the housing is provided with a mounting groove, a portion of the adjustment mechanism can be accommodated within the mounting groove, facilitating connection of the adjustment mechanism to the housing. Furthermore, a sealing member is provided in the mounting groove to seal the mounting groove, thereby improving the sealing performance of the housing cavity within the housing.

[0026] The second aspect of the present application provides a solar cell production line, which includes: a transfer device and a vacuum coating device provided by any one of the first aspects above; the transfer device is used to transport the solar cells to the vacuum coating device, and / or remove the solar cells from the vacuum coating device.

[0027] The solar cell production line provided in the present application includes the vacuum coating equipment provided in the above embodiment. Therefore, the steps of adjusting the second electrode assembly in the vacuum coating equipment can be simplified, making it easier to adjust the position of the second electrode assembly in the vacuum coating equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiment below. The accompanying drawings are for illustration purposes only and are not to be considered as limiting the present application. The same reference numerals are used throughout the drawings to denote the same components. In the drawings:

[0029] Figure 1 A schematic diagram of the structure of the vacuum coating equipment provided in this application;

[0030] Figure 2 Provided for this application Figure 1 A partial enlarged schematic diagram of part A;

[0031] Figure 3 A schematic diagram of the adjustment mechanism in the vacuum coating equipment provided in this application;

[0032] Figure 4 Provided for this applicationFigure 2 Partial enlarged view of middle B part.

[0033] Legend of reference signs:

[0034] 1 - housing; 11 - box body; 12 - cover body; 13 - mounting groove; 14 - sealing member; 15 - air inlet; 2 - first electrode member; 3 - second electrode assembly; 31 - second electrode member; 32 - spraying member; 321 - spraying hole; 33 - connecting member; 34 - fixing member; 4 - adjusting mechanism; 41 - adjusting assembly; 411 - adjusting stud; 412 - adjusting nut; 413 - first insulating member; 414 - second insulating member; 42 - pressing member; 43 - supporting assembly; 431 - supporting frame; 4311 - fixed part; 4312 - moving part; 432 - rolling body; 44 - third insulating member; 5 - conductive member; 6 - power supply; 7 - connecting rod; Y - radial direction; Z - axial direction. DETAILED DESCRIPTION

[0035] The embodiments of the technical solutions of the present application will be described in detail below with reference to the drawings. The following embodiments are only used to more clearly illustrate the technical solutions of the present application, and therefore only serve as examples, and cannot limit the protection scope of the present application.

[0036] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the present application; the terms "comprising" and "having," and any variations thereof, as used herein are intended to cover a non-exclusive inclusion.

[0037] In the description of the embodiments of the present application, the technical terms "first", "second", "third" and the like are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number, specific order or primary and secondary relationship of the indicated technical features. In the description of the embodiments of the present application, the meaning of "multiple" is two or more, unless otherwise explicitly and specifically limited.

[0038] Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearance of the phrase in various places in the specification does not necessarily all refer to the same embodiment, nor is it necessarily independent or alternative embodiments to each other. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0039] In the description of the embodiments of the present application, the term "and / or" is merely an association relationship of the associated objects, which means that there can be three relationships, for example, A and / or B, which can represent the three cases of A existing alone, A and B existing together, and B existing alone. In addition, the character " / " in this paper generally represents that the front and rear associated objects are "or" relationship.

[0040] In the description of the embodiments of the present application, the technical terms "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the embodiments of the present application and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed in a particular orientation, operate or be used, and therefore cannot be understood as a limitation on the embodiments of the present application.

[0041] In the description of the embodiments of the present application, unless otherwise explicitly specified and limited, the technical terms "mounting", "connection", "connection", "fixing" and the like should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0042] In the description of the embodiments of the present application, unless otherwise explicitly specified and limited, the technical term "contact" should be understood in a broad sense, which can be direct contact or contact through an intermediate medium layer, which can be contact between two objects in contact without interaction force, or contact between two objects in contact with interaction force.

[0043] In the PECVD vacuum coating equipment, a parallel plate electrode plasma discharge structure is usually used. The parallel plate electrode is divided into an upper electrode plate and a lower electrode plate. A spray plate is arranged between the upper electrode plate and the lower electrode plate, and the upper electrode plate and the spray plate are at the same potential. The parallel plate electrode has a high requirement for the parallelism of the two electrode plates. However, since the spray plate is installed on the cavity cover of the equipment, the cavity is in a vacuum state during the working process of the equipment, and the cavity cover is deformed downward due to the atmospheric pressure, which causes the spray plate to also be deformed downward, thereby affecting the distance between the spray plate and the lower electrode plate, and affecting the parallelism between the electrode plates.

[0044] The embodiments of the present application provide a vacuum coating equipment, which refers to Figure 1 and Figure 2 , Figure 1 the structure schematic diagram of the vacuum coating equipment provided by the present application, Figure 2Provided in the present application Figure 1 A partial enlarged view of the middle A part. The vacuum coating equipment provided in the embodiments of the present application comprises a shell 1, a first electrode member 2 and a second electrode assembly 3. The shell 1 has a receiving cavity; the first electrode member 2 is located in the receiving cavity; the second electrode assembly 3 is located in the receiving cavity and is connected with the shell 1 through an adjusting mechanism 4; the working space is formed between the second electrode assembly 3 and the first electrode member 2; and the second electrode assembly 3 is driven to move relative to the first electrode member 2 by adjusting the position of the adjusting mechanism 4 relative to the shell 1.

[0045] In the embodiments of the present application, the shell 1 is used to arrange other components in the vacuum coating equipment. The shell 1 can be arranged as a structure having a receiving cavity, so as to facilitate the installation of other components in the receiving cavity. For example, the receiving cavity is arranged as a sealed cavity, and the receiving cavity can be pumped by a negative pressure pump or the like, so as to form a negative pressure state (vacuum environment) in the receiving cavity which meets the use requirements.

[0046] For example, as shown in Figure 1 The shell 1 can be arranged as a structure comprising a box body 11 and a cover body 12. For example, the box body 11 can be a cuboid structure having a receiving groove, and the plate-shaped cover body 12 can be sealed and covered on the opening of the box body 11 to form the shell 1 having the receiving cavity. The box body 11 and the cover body 12 can both be made of aluminum or aluminum alloy or the like.

[0047] For another example, an air inlet 15 can be arranged on the shell wall of the shell 1, so as to connect the receiving cavity of the shell 1 with the gas source of the process gas through the air inlet 15. For example, a through hole serving as the air inlet 15 can be arranged on the cover body 12, and the through hole is connected with the gas source through a pipeline or the like. In this way, the process gas can enter the receiving cavity through the pipeline and the air inlet 15.

[0048] In the embodiments of the present application, the first electrode member 2 and the second electrode assembly 3 are used to form an electromagnetic field in the receiving cavity, so that the plasma can be generated in the receiving cavity. For example, the first electrode member 2 and the second electrode assembly 3 can be arranged as a structure comprising at least two electrode plates, the at least two electrode plates are arranged in the receiving cavity, and the first electrode member 2 and the second electrode assembly 3 have a gap therebetween, so as to form the working space between the second electrode assembly 3 and the first electrode member 2.

[0049] For example, as shown in Figure 1 and Figure 2As shown, the first electrode member 2 can be configured as a flat plate, and the flat plate-shaped first electrode member 2 can be installed at the bottom of the box 11. The first electrode member 2 can be electrically connected to the negative pole of the power supply 6, or the first electrode member 2 can be grounded. For example, a lifting mechanism can be provided, a lifting rod in the lifting mechanism passes through the bottom of the box 11, a driving member in the lifting mechanism is fixedly connected to the lifting rod, and the first electrode member 2 is fixedly connected to one end of the lifting rod located inside the box 11. The lifting mechanism can then drive the first electrode member 2 to move a certain distance within the box 11 toward or away from the second electrode assembly 3.

[0050] Another example, such as Figure 2 As shown, the second electrode assembly 3 can also be configured as a flat plate, and the second electrode assembly 3 can be connected to the cover 12, with a gap between the first electrode member 2 and the second electrode assembly 3. For example, a metal conductive member 5 can be provided on the cover 12, the conductive member 5 passing through the cover 12, and the conductive member 5 and the cover 12 are sealed. An insulating member can be provided between the conductive member 5 and the cover 12 to isolate the current between the cover 12 and the conductive member 5 through the insulating member. The end of the conductive member 5 located in the working space is electrically connected to the second electrode assembly 3, and the end of the conductive member 5 located outside the housing 1 can be connected to the power supply 6 through a wire, so that a voltage can be applied to the second electrode assembly 3 to form an electric field between the second electrode assembly 3 and the first electrode member 2.

[0051] In another example, the second electrode assembly 3 can be connected to the cover 12 using an adjustment mechanism 4, and the adjustment mechanism 4 can be configured to have a structure capable of adjusting its position or shape relative to the housing 1. For example, the adjustment mechanism 4 can use a sliding rod and a locking member, with one end of the sliding rod fixedly connected to the second electrode assembly 3, the other end of the sliding rod passing through the cover 12, the locking member mounted on the end of the sliding rod located outside the housing 1, and the locking member abutting against the outer wall of the cover 12, thereby mounting the second electrode assembly 3 in a suspended manner within the accommodating cavity. In this way, when it is necessary to adjust the distance between the second electrode assembly 3 and the first electrode member 2, the clamp serving as the locking member can be first loosened, allowing the sliding rod to move relative to the housing 1 along the axial direction Z of the sliding rod, thereby allowing the sliding rod to drive the second electrode assembly 3 to move relative to the first electrode member 2, and further adjusting the distance between the second electrode assembly 3 and the first electrode member 2. After the adjustment is complete, the clamp is then locked on the sliding rod to limit the movement of the sliding rod relative to the housing 1.

[0052] The vacuum coating device provided by the embodiment of the present application has the accommodating cavity formed in the shell 1, the first electrode member 2 and the second electrode assembly 3 are both installed in the accommodating cavity, and the working space is formed between the first electrode member 2 and the second electrode assembly 3, so that the workpiece to be coated can be placed in the working space, thereby facilitating the coating of the workpiece. Meanwhile, the second electrode assembly 3 is connected with the shell 1 through the adjusting mechanism 4, when the distance between the second electrode assembly 3 and the first electrode member 2 changes, if the parallelism of the second electrode assembly 3 and the first electrode member 2 does not meet the requirement, the position of at least part of the parts in the adjusting mechanism 4 relative to the shell 1 can be adjusted to drive the second electrode assembly 3 to move relative to the first electrode member 2, so that the parallelism of the second electrode assembly 3 and the first electrode member 2 can always meet the requirement. The vacuum coating device provided by the embodiment of the present application only needs to adjust the position of at least part of the parts in the adjusting mechanism 4 relative to the shell 1 when adjusting the position of the second electrode assembly 3 relative to the first electrode member 2, so that the vacuum coating device provided by the embodiment of the present application is convenient for adjusting the position of the second electrode assembly 3 in the vacuum coating device, and can also make the parallelism between the first electrode member 2 and the second electrode assembly 3 in the vacuum coating device meet the requirement.

[0053] In some possible embodiments of the present application, as shown in Figure 2 The adjusting mechanism 4 includes the adjusting assembly 41, one end of the adjusting assembly 41 is connected with the second electrode assembly 3, and the other end is movably connected with the shell 1, and at least part of the adjusting assembly 41 can move relative to the shell 1 along the axial direction Z of the adjusting assembly 41.

[0054] In the embodiment of the present application, the adjusting assembly 41 can be arranged in the adjusting mechanism 4, so as to adjust the position of the second electrode assembly 3 relative to the first electrode member 2 through the adjusting assembly 41.

[0055] For example, the adjusting assembly 41 is fixedly connected with the second electrode assembly 3 by welding, bonding, screwing or the like. The other end of the adjusting assembly 41 is movably connected with the shell 1. For example, a groove matched with the adjusting assembly 41 is arranged on the cover 12 of the shell 1, and a through hole is arranged at the bottom of the groove. A part of the adjusting assembly 41 passes through the through hole at the bottom of the groove, and the adjusting assembly 41 is in sliding abutment with the bottom of the groove. In this way, in the process of adjusting the position of the part of the adjusting assembly 41 connected with the second electrode assembly 3 relative to the shell 1 along the axial direction Z of the adjusting assembly 41 to drive the second electrode assembly 3 to move relative to the first electrode piece 2 by the part of the adjusting assembly 41 connected with the second electrode assembly 3, the part of the adjusting assembly 41 connected with the second electrode assembly 3 can not only move relative to the shell 1 along the axial direction Z, but also facilitate the displacement of the adjusting assembly 41 relative to the shell 1 along the radial direction Y.

[0056] In the above embodiment, since the adjusting mechanism 4 includes the adjusting assembly 41 and movably connects the adjusting assembly 41 with the shell 1, not only the position of the adjusting assembly 41 relative to the shell 1 along the axial direction Z can be adjusted, but also the movement of the adjusting assembly 41 relative to the shell 1 along the radial direction Y can be facilitated in the process of adjusting the position of the adjusting assembly 41 relative to the shell 1 along the axial direction Z. After the position of the second electrode assembly 3 relative to the first electrode piece 2 is adjusted, the stress between the adjusting assembly 41 and the shell 1 can be eliminated, and the stress between the adjusting assembly 41 and the second electrode assembly 3 can also be eliminated.

[0057] In some possible embodiments of the present application, as shown in Figure 2 The adjusting assembly 41 includes a matched adjusting stud 411 and an adjusting nut 412. One end of the adjusting stud 411 is connected with the second electrode assembly 3, and the other end of the adjusting stud 411 is arranged in the shell 1. The adjusting nut 412 is arranged on the adjusting stud 411 away from the second electrode assembly 3 and abuts against the side of the shell 1 away from the accommodating cavity.

[0058] In the embodiments of the present application, the adjusting assembly 41 can adopt an adjusting stud 411 and an adjusting nut 412. For example, an external thread matched with the adjusting nut 412 can be arranged on one end of the adjusting stud 411. The end of the adjusting stud 411 with the external thread can be passed through the shell 1, i.e. the external thread part of the adjusting stud 411 is located outside the shell 1, the adjusting nut 412 can be installed on the adjusting stud 411 and abut against the outside of the shell (the side of the shell 1 away from the accommodating cavity), and then the adjusting stud 411 can be suspended in the accommodating cavity. The end of the adjusting stud 411 located in the accommodating cavity can be connected with the second electrode assembly 3, such as fixedly connected with the second electrode assembly 3 by welding, bonding, clamping, threaded connection or the like. In this way, by screwing the adjusting nut 412, the adjusting nut 412 can drive the adjusting stud 411 to move up and down along the axial direction Z of the adjusting stud 411 relative to the shell 1, so that the second electrode assembly 3 can be driven by the adjusting stud 411 to move away from or close to the first electrode piece 2.

[0059] In the above embodiments, since one end of the adjusting stud 411 is connected with the second electrode assembly 3, the other end is passed through the shell 1, and the adjusting nut 412 abuts against the outside of the shell 1, by screwing the adjusting nut 412, the adjusting stud 411 can be driven to move relative to the shell 1, so that the second electrode assembly 3 can be driven by the adjusting stud 411 to move relative to the first electrode piece 2.

[0060] In some possible embodiments of the present application, referring to Figure 3 , Figure 3 a schematic view of an adjusting mechanism in a vacuum coating device provided by the present application is provided. The adjusting mechanism 4 further includes a pressing piece 42, which is sleeved on the end of the adjusting stud 411 close to the adjusting nut 412, the pressing piece 42 is fixedly connected with the shell 1 and abuts against the adjusting nut 412, and can limit the movement of the adjusting nut 412 along the axial direction Z.

[0061] In the embodiments of the present application, as shown in Figure 3 , the pressing piece 42 can be arranged in the adjusting mechanism 4 to limit the movement of the adjusting nut 412 along the axial direction Z of the adjusting stud 411.

[0062] For example, the pressing member 42 can be provided in a ring shape. For example, a protruding ring can be provided on the adjusting nut 412 near one end of the second electrode assembly 3. The through hole of the ring-shaped pressing member 42 has a diameter smaller than that of the protruding ring on the adjusting nut 412 and larger than that of the body of the adjusting nut 412. The ring-shaped pressing member 42 can be sleeved on the adjusting nut 412 with the protruding ring, and the pressing member 42 abuts against the protruding ring on the adjusting nut 412 to be fixedly connected with the shell 1. Alternatively, the through hole of the ring-shaped pressing member 42 can have a diameter smaller than that of the body of the adjusting nut 412 and larger than that of the adjusting stud 411. The pressing member 42 can abut against the side end surface of the adjusting nut 412 away from the second electrode assembly 3, and the pressing member 42 can be fixedly connected with the shell 1. The movement of the adjusting nut 412 along the axial direction Z of the adjusting stud 411 relative to the shell 1 can be limited by the pressing member 42.

[0063] In the above embodiment, the pressing member 42 abuts against the adjusting nut 412, and the pressing member 42 is fixedly connected with the shell 1, so that the movement of the adjusting nut 412 away from the first electrode member 2 can be limited by the pressing member 42. In this way, the adjusting stud 411 can be moved away from the first electrode member 2 by rotating the adjusting nut 412, and the adjusting stud 411 can also be moved toward the first electrode member 2 by rotating the adjusting nut 412, so that the second electrode assembly 3 can be adjusted in any direction away from or toward the first electrode member 2.

[0064] In some possible embodiments of the present application, as shown in Figure 2 and Figure 3 The adjusting stud 411 is sleeved with a first insulating member 413, the first insulating member 413 has a protruding block extending from the first insulating member 413 along the radial direction Y of the adjusting stud 411, and the adjusting nut 412 abuts against the shell 1 away from the accommodating cavity through the protruding block.

[0065] In the embodiments of the present application, the first insulating member 413 can be sleeved on the adjusting stud 411. For example, a through hole matched with the rod of the adjusting stud 411 is arranged on the first insulating member 413, so that the first insulating member 413 is sleeved on the adjusting stud 411 in a clearance fit manner. A protrusion can be arranged on the first insulating member 413 away from the second electrode assembly 3, and the protrusion extends from the surface of the first insulating member 413 along the radial direction Y of the adjusting stud 411. For example, the protrusion can be arranged as a ring-shaped protruding ring structure, and the outer diameter of the protruding ring is greater than the diameter of the through hole of the shell 1 through which the first insulating member 413 passes. Thus, the first insulating member 413 can be abutted on the shell 1 away from the accommodating cavity through the protruding ring. The adjusting nut 412 can be abutted on the end of the first insulating member 413 away from the second electrode assembly 3. The first insulating member 413 can be made of engineering plastic, ceramic or other materials that cannot conduct current. For example, the first insulating member 413 can be made of phenolic or fluoroplastic.

[0066] In the above embodiments, since the first insulating member 413 is sleeved on the adjusting stud 411, the adjusting stud 411 can be abutted on the shell through the first insulating member 413, so that the voltage and current between the adjusting stud 411 and the shell can be insulated, which is beneficial to improve the insulation performance of the vacuum coating equipment.

[0067] In some possible embodiments of the present application, as shown in Figure 2 and Figure 3 The second insulating member 414 is sleeved on the adjusting nut 412, and the second insulating member 414 covers the end of the adjusting stud 411 away from the second electrode assembly 3 and the adjusting nut 412.

[0068] In the embodiments of the present application, the second insulating member 414 can be sleeved on the adjusting nut 412. For example, the second insulating member 414 can be arranged as a barrel-shaped structure, and the barrel-shaped second insulating member 414 can be invertedly buckled on the adjusting nut 412, so as to insulate and cover the end of the adjusting stud 411 and the adjusting nut 412.

[0069] For example, the second insulating member 414 can be sleeved on the adjusting nut 412 in an interference fit manner, or the second insulating member 414 can be detachably connected with the first insulating member 413 in a clamping or bonding manner.

[0070] In the above embodiments, since the second insulating member 414 is sleeved on the adjusting nut 412, the voltage and current between the adjusting nut 412 and the shell, and between the adjusting stud 411 and the shell can be insulated through the second insulating member 414, which is beneficial to improve the insulation performance of the vacuum coating equipment.

[0071] In some possible embodiments of the present application, as shown in Figure 1 andFigure 2 As shown, the adjusting mechanism 4 further comprises a support assembly 43, the adjusting assembly 41 abuts against the shell 1 through the support assembly 43, and the adjusting assembly 41 can move along the radial direction Y of the adjusting assembly 41 relative to the shell 1 through the support assembly 43.

[0072] In the embodiments of the present application, the support assembly 43 can be arranged between the adjusting assembly 41 and the shell 1, so that the adjusting assembly 41 abuts against the shell 1 through the support assembly 43, and the support assembly 43 is arranged to be movable relative to the shell 1.

[0073] For example, the support assembly 43 can adopt a universal ball, the base of the universal ball is fixed to the shell 1, and the adjusting assembly 41 abuts against the ball body of the universal ball. After adjusting the adjusting assembly 41, the adjusting assembly 41 can move slightly relative to the shell 1, at this time, the adjusting assembly 41 can drive the ball body of the universal ball to rotate, so that the adjusting assembly 41 can slide along the radial direction Y of the adjusting assembly 41 relative to the shell 1, so as to eliminate the force acting on the adjusting assembly 41, and the adjusting assembly 41 and the shell 1 continue to maintain linear contact or surface contact.

[0074] In the above embodiments, the support assembly 43 is arranged between the adjusting assembly 41 and the shell 1, and the support assembly 43 can move the adjusting assembly 41 along the radial direction Y of the adjusting assembly 41 relative to the shell 1. In the case that the adjusting assembly 41 is subjected to an external force, the adjusting assembly 41 is easy to move relative to the shell 1, so as to eliminate the external force acting on the adjusting assembly 41, and the stress between the adjusting assembly 41 and the second electrode assembly 3, and between the adjusting assembly 41 and the shell 1 can be eliminated.

[0075] In some possible embodiments of the present application, as shown in Figure 2 and Figure 3 The support assembly 43 comprises a support frame 431 and a rolling body 432, the fixed part 4311 of the support frame 431 abuts against the shell 1, the moving part 4312 of the support frame 431 abuts against the adjusting assembly 41, the rolling body 432 is located between the fixed part 4311 and the moving part 4312, and the moving part 4312 can move relative to the fixed part 4311 through the rolling body 432.

[0076] In the embodiments of the present application, a groove for mounting the support assembly 43 can be arranged on the shell 1, for example, a groove matched with the support assembly 43 can be arranged on the cover 12. When the support assembly 43 is arranged in the structure of the support frame 431 and the rolling body 432, the support frame 431 can be fixedly mounted in the groove on the cover 12, the first insulating part 413 abuts against the support frame 431, and the rolling body 432 is arranged in the support frame 431, so that the two parts of the support frame 431 can move relative to each other through the rolling body 432.

[0077] For example, the support frame 431 can be configured to include a fixed portion 4311 and a moving portion 4312, both of which can be made of metal material. The fixed portion 4311 and the moving portion 4312 can both be in a sheet-shaped annular structure, and the diameter of the through hole on the fixed portion 4311 and the moving portion 4312 can be greater than the outer diameter of the first insulating member 413. For example, an annular groove can be arranged on the opposite surfaces of the fixed portion 4311 and the moving portion 4312, and the shape of the annular groove can match the shape of the rolling body 432. The rolling body 432 can be a spherical ball or the like. The spherical ball can be clamped between the fixed portion 4311 and the moving portion 4312, so that the moving portion 4312 and the fixed portion 4311 can move along the radial direction Y of the adjusting bolt through the spherical ball. For example, the fixed portion 4311 can be fixedly connected with the cover 12, and the protrusion on the first insulating member 413 can be connected with the moving portion 4312.

[0078] Another example, as shown in Figure 3 along the axial direction Z of the adjusting bolt, a set of support assemblies 43 can be arranged on both sides of the protrusion of the first insulating member 413, that is, a set of support assemblies 43 can be arranged between the housing 1 and the protrusion of the first insulating member 413, and a set of support assemblies 43 can be arranged between the adjusting nut 412 and the pressing member 42. The two sets of support assemblies 43 can be provided with a third insulating member 44, so that the support assemblies 43 in contact with the adjusting nut 412 are in contact with the pressing member 42 through the third insulating member 44, and the other set of support assemblies 43 are in contact with the housing 1 through the third insulating member 44.

[0079] In the above embodiment, since the support assembly 43 includes the support frame 431 and the rolling body 432, the rolling body 432 can be arranged in the support frame 431, so that the two parts of the support frame 431 can move relative to each other through the rolling body 432. The protrusion of the first insulating member 413 is in contact with the housing 1 through the support assembly 43, so that the first insulating member 413 can move relative to the housing 1 through the rolling body 432, and the adjusting assembly 41 can move relative to the housing 1 through the rolling body 432.

[0080] In some possible embodiments of the present application, as shown in Figure 2 and Figure 3 The second electrode assembly 3 includes a second electrode member 31 and a spraying member 32, the second electrode member 31 is located between the spraying member 32 and the housing 1, and is connected with the housing 1, the adjusting mechanism 4 passes through the second electrode member 31 and is connected with the spraying member 32, and the second electrode member 31 and the spraying member 32 form a uniform gas cavity.

[0081] In the embodiments of the present application, the second electrode assembly 3 can be configured to include the spraying member 32 and the second electrode member 31. For example, the spraying member 32 and the second electrode member 31 can be configured as flat plate structures, and the second electrode member 31 can be connected to the cover 12 in the housing 1 by the connecting rod 7. For example, a plurality of connecting rods 7 can be arranged between the cover 12 and the second electrode member 31, and the connecting rod 7 can be movably connected to the second electrode member 31, so that the second electrode member 31 can move slightly relative to the cover 12 through the connecting rod 7. Alternatively, one end of the connecting rod 7 can be welded to the cover 12, and the second electrode member 31 can be welded to the other end of the connecting rod 7, so that the second electrode member 31 is fixedly connected to the cover 12.

[0082] For example, a through hole matched with the first insulating member 413 can be arranged on the second electrode member 31, so that the first insulating member 413 and the adjusting bolt pass through the second electrode member 31 through the through hole. The spraying member 32 can be arranged between the first electrode member 2 and the second electrode member 31, and the adjusting bolt can be connected to the spraying member 32, so that the spraying member 32 is hung in the accommodating cavity through the adjusting assembly 41.

[0083] For another example, a connecting portion can be arranged on the edge of the second electrode member 31, or a connecting portion can be arranged on the edge of the spraying member 32, the connecting portion is formed from the edge of the second electrode member 31 and / or the spraying member 32 along the axial direction Z of the adjusting assembly 41, and the connecting portion surrounds the second electrode member 31. Then, the second electrode member 31 and the spraying member 32 can be connected through the connecting portion, and the uniform gas cavity can be formed between the second electrode member 31 and the spraying member 32.

[0084] For another example, a plurality of air inlet holes can be arranged on the second electrode member 31, the air inlet holes are formed from the side of the second electrode member 31 away from the spraying member 32 to the side of the second electrode member 31 close to the spraying member 32. For example, one end of each air inlet hole away from the spraying member 32 can be communicated with the air inlet 15 through a pipeline, or an air flow channel can be formed on the second electrode member 31, the plurality of air inlet holes are communicated through the air flow channel, and the air flow channel is communicated with the air inlet 15. For example, the air flow channel can be a plurality of hole channels.

[0085] For another example, a plurality of spraying holes 321 can be arranged on the spraying member 32, the spraying hole 321 can be a through hole approximately in the shape of a horn, that is, the diameter of one end of the spraying hole 321 close to the first electrode member 2 is greater than the diameter of the other end of the spraying hole 321 away from the first electrode member 2. The plurality of spraying holes 321 can be uniformly distributed on the spraying member 32, that is, the distance between two adjacent spraying holes 321 is equal or close to equal.

[0086] In the above embodiment, since the second electrode assembly 3 comprises the second electrode piece 31 and the spraying piece 32, the uniform gas cavity can be enclosed by the spraying piece 32 and the second electrode piece 31, so that after the process gas enters the uniform gas cavity through the gas inlet hole on the second electrode piece 31, the process gas can first fill the uniform gas cavity, and after the uniform gas cavity is filled or close to be filled with the process gas, the process gas flows from the plurality of spraying holes 321 to the working space, which is beneficial to improve the uniformity of the distribution of the process gas in the working space. Moreover, the spraying piece 32 is connected with the shell 1 through the adjusting mechanism 4, so that the distance between the spraying piece 32 and the first electrode piece 2 can be adjusted through the adjusting mechanism 4, so that the parallelism requirement between the spraying piece 32 and the first electrode piece 2 is met.

[0087] In some possible embodiments of the present application, reference is made to Figure 4 , Figure 4 provided in the present application Figure 2 , a partial enlarged view of B part of the schematic diagram. The second electrode assembly 3 further comprises a connecting piece 33, one end of the connecting piece 33 is fixedly connected with the second electrode piece 31, and the other end is slidably connected with the spraying piece 32.

[0088] In the embodiments of the present application, the spraying piece 32 and the second electrode piece 31 can be movably connected through the connecting piece 33. For example, along the circumferential direction of the spraying piece 32, a plurality of connecting pieces 33 can be arranged between the spraying piece 32 and the second electrode piece 31, and the length of the connecting piece 33 can be set according to the distance between the second electrode piece 31 and the spraying piece 32.

[0089] For example, the connecting piece 33 can be provided in an approximately L-shaped structure. One end of the L-shaped connecting piece 33 can be fixedly connected with the edge of the second electrode piece 31. Correspondingly, a sliding groove matched with the L-shaped connecting piece 33 can be arranged on the edge of the spraying piece 32, which extends from the side wall of the spraying piece 32 along the radial direction Y of the adjusting assembly 41, and one end of the L-shaped connecting piece 33 can be inserted into the sliding groove. Along the circumferential direction of the spraying piece 32, the connecting piece 33 can be arranged around the spraying piece 32, so that the uniform gas cavity can be enclosed by the second electrode piece 31, the connecting piece 33 and the spraying plate. In this way, when the temperature of the spraying piece 32 changes and the spraying piece 32 expands and deforms, the spraying piece 32 can slide relative to the connecting piece 33.

[0090] In the above embodiment, since the spraying piece 32 and the second electrode piece 31 are slidably connected through the connecting piece 33, not only can the uniform gas cavity be enclosed by the spraying piece 32, the connecting piece 33 and the second electrode piece 31, but also when the spraying piece 32 expands due to heat, the spraying piece 32 can slide relative to the connecting piece 33, so that the excess extension of the spraying plate caused by the temperature difference can be absorbed, and the deformation amount of the spraying piece 32 caused by external force can be reduced.

[0091] In some possible embodiments of the present application, as shown in Figure 2 and Figure 3 The spray member 32 is connected with the adjusting mechanism 4 through the fixing member 34, part of the fixing member 34 is arranged in the spray member 32, and the other part is connected with the adjusting mechanism 4, the fixing member 34 and the adjusting mechanism 4 are formed with an airflow channel, one end of the airflow channel is located on the part of the adjusting mechanism 4 in the uniform gas chamber, and the other end of the airflow channel is located on the surface of the fixing member 34 close to the first electrode member 2.

[0092] In the embodiments of the present application, the spray member 32 can be connected with the adjusting mechanism 4 through the fixing member 34, that is, the spray member 32 is connected with the adjusting screw column 411 through the fixing member 34. For example, the fixing member 34 can be a screw, a countersunk hole matched with the screw can be arranged on the spray member 32, the screw is arranged in the countersunk hole, and the screw is screwed into the adjusting screw column 411, so as to fix and connect the adjusting screw column 411 and the spray member 32 through the screw.

[0093] For example, the airflow channel can be arranged as a through hole structure, one end of the through hole is arranged on the adjusting screw column 411 on the side wall of the uniform gas chamber, the other end of the through hole is arranged on the surface of the fixing member 34 close to the first electrode member 2, and the two ends of the through hole are connected. That is, the through hole is arranged on the fixing member 34 and the adjusting screw column 411, the fixing member 34 is arranged in the through hole of the adjusting screw column 411, so that the through hole on the fixing member 34 and the through hole on the adjusting screw column 411 are communicated to form the airflow channel.

[0094] In the above embodiments, since the spray member 32 and the adjusting mechanism 4 are connected through the fixing member 34, the spray member 32 and the fixing member 34 are convenient to assemble and disassemble. Moreover, the airflow channel is formed on the fixing member 34 and the adjusting mechanism 4, the spray hole 321 can also be formed on the part of the spray member 32 occupied by the adjusting mechanism 4 through the airflow channel, which is beneficial to make the working gas flowing to the working space through the spray hole 321 more uniformly distributed in the working space.

[0095] In some possible embodiments of the present application, the shell 1 is provided with a mounting groove 13, the part of the adjusting mechanism 4 connected with the shell 1 is located in the mounting groove 13, and the shell 1 further comprises a sealing member 14, which is sealingly connected to the mounting groove 13.

[0096] In the embodiments of the present application, as shown in Figure 2 and Figure 3As shown, the mounting groove 13 can be arranged on the shell 1 to mount the adjusting mechanism 4 on the shell 1 through the mounting groove 13. For example, the mounting groove 13 can be arranged on the cover 12 and can be arranged in the structure of a stepped hole, the through hole diameter of the stepped hole matches the outer diameter of the first insulating piece 413, and the support assembly 43 can be abutted on the bottom of the stepped hole to make the support assembly 43, the adjusting nut 412 and the second insulating piece 414 all located in the stepped hole as the mounting groove 13.

[0097] For example, the mounting groove 13 can be arranged with a matched sealing piece 14, for example, the sealing piece 14 is arranged as a cover plate matched with the slot of the mounting groove 13, an inner thread can be arranged on the slot wall of the mounting groove 13, an outer thread is arranged on the cover plate, and the cover plate is detachably connected with the cover 12 through the threaded connection. The sealing piece 14 and the cover 12 can also be connected through bonding, welding and the like. A fourth sealing piece 14 can also be arranged between the sealing piece 14 and the slot wall of the mounting groove 13, for example, the fourth sealing piece 14 can adopt an O-shaped sealing ring to make the sealing piece 14 and the slot wall of the mounting groove 13 abut through the O-shaped sealing ring.

[0098] In the above embodiment, since the mounting groove 13 is arranged on the shell 1, part of the adjusting mechanism 4 can be accommodated in the mounting groove 13, which facilitates the connection of the adjusting mechanism 4 and the shell 1. Moreover, the sealing piece 14 is sealingly arranged on the mounting groove 13, which can seal the mounting groove 13 through the sealing piece 14, thereby improving the sealing performance of the accommodating cavity in the shell 1.

[0099] In addition, the application also provides a solar cell production line, which comprises: a transfer device and the vacuum coating device provided by any one of the above embodiments; the transfer device is used for transporting the solar cell to the vacuum coating device and / or removing the solar cell from the vacuum coating device.

[0100] In the application, the transfer device can be a conveying device capable of conveying the solar cell, or a grabbing device capable of grabbing the solar cell. For example, the conveying device can be an automated guided vehicle (AGV), a belt conveying device, etc. The grabbing device can be a mechanical hand, etc. The specific structure of the transfer device is not limited in the application. The transfer device can transport the solar cell to be coated from the production device to the vacuum coating device and place the solar cell to be coated in the vacuum coating device. The transfer device can also take out the solar cell after coating from the vacuum coating device and transport it to a storage station or the next production station.

[0101] The solar cell production line provided by the embodiments of the present application can simplify the step of adjusting the second electrode assembly 3 in the vacuum coating equipment and facilitate the adjustment of the position of the second electrode assembly 3 in the vacuum coating equipment.

[0102] The above embodiments are only used to illustrate the technical solutions of the present application, rather than limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that the technical solutions recorded in the foregoing embodiments can still be modified, or some or all of the technical features can be replaced equivalently; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application, and they should be covered in the scope of the specification of the present application. In particular, as long as there is no structural conflict, each technical feature mentioned in each embodiment can be combined in any way.

Claims

1. A vacuum coating apparatus, characterized by, The utility model relates to a kind of electrode device, including: Shell (1), the shell (1) has accommodating cavity; First electrode piece (2), the first electrode piece (2) is located in the accommodating cavity; Second electrode assembly (3), the second electrode assembly (3) is located in the accommodating cavity, and with the shell (1) is connected by adjusting mechanism (4), the second electrode assembly (3) is formed with the first electrode piece (2) between work space, by adjusting the adjusting mechanism (4) can drive the second electrode assembly (3) relative to the first electrode piece (2) movement.

2. The vacuum coating apparatus according to claim 1, wherein The adjusting mechanism (4) includes adjusting assembly (41), one end of the adjusting assembly (41) is connected with the second electrode assembly (3), and the other end is movably connected with the shell (1), and at least part of the adjusting assembly (41) can generate movement relative to the shell (1) along the axial direction of the adjusting assembly (41).

3. The vacuum coating apparatus according to claim 2, wherein The adjusting assembly (41) includes matched adjusting stud (411) and adjusting nut (412), one end of the adjusting stud (411) is connected with the second electrode assembly (3), and the other end is arranged in the shell (1), the adjusting nut (412) is arranged on the adjusting stud (411) away from one end of the second electrode assembly (3), and is in abutment with the side of the shell (1) away from the accommodating cavity, when the adjusting nut (412) rotates relative to the shell (1), the adjusting stud (411) generates movement relative to the shell (1).

4. The vacuum coating apparatus according to claim 3, wherein The adjusting mechanism (4) further includes pressing piece (42), the pressing piece (42) is sleeved on the adjusting stud (411) close to one end of the adjusting nut (412), the pressing piece (42) is fixedly connected with the shell (1), and is in abutment with the adjusting nut (412), so as to limit the movement of the adjusting nut (412) along the axial direction.

5. The vacuum coating apparatus according to claim 3, wherein The adjusting stud (411) is sleeved with first insulating piece (413), the first insulating piece (413) has protrusion, the protrusion is formed on the first insulating piece (413) and extends along the radial direction of the adjusting stud (411), and the adjusting nut (412) is in abutment with the side of the shell (1) away from the accommodating cavity through the protrusion.

6. The vacuum coating apparatus according to claim 3, wherein The adjusting nut (412) is sleeved with second insulating piece (414), and the second insulating piece (414) covers the end of the adjusting stud (411) away from the second electrode assembly (3) and the adjusting nut (412).

7. The vacuum coating apparatus according to any one of claims 2 to 6, wherein The adjusting mechanism (4) further includes support assembly (43), the adjusting assembly (41) is in abutment with the shell (1) through the support assembly (43), and the adjusting assembly (41) can generate movement along the radial direction of the adjusting assembly (41) relative to the shell (1) through the support assembly (43).

8. The vacuum coating apparatus according to claim 7, wherein The support assembly (43) comprises a support frame (431) and a rolling body (432), the fixed part (4311) of the support frame (431) is in abutment with the shell (1), the moving part (4312) of the support frame (431) is in abutment with the adjusting assembly (41), and the rolling body (432) is located between the fixed part (4311) and the moving part (4312), the moving part (4312) can move relative to the fixed part (4311) through the rolling body (432).

9. The vacuum coating apparatus according to any one of claims 1 to 6, wherein The second electrode assembly (3) comprises a second electrode piece (31) and a spraying piece (32), the adjusting mechanism (4) passes through the second electrode piece (31) and is connected with the spraying piece (32), one end of the second electrode piece (31) is fixedly connected with a connecting piece (33), the other end of the connecting piece (33) is slidably connected with the spraying piece (32), and the second electrode piece (31), the spraying piece (32) and the connecting piece (33) enclose a uniform gas cavity.

10. The vacuum coating apparatus according to claim 9, wherein The spraying piece (32) is connected with the adjusting mechanism (4) through a fixing piece (34), part of the fixing piece (34) is arranged in the spraying piece (32), and the other part is connected with the adjusting mechanism (4), the fixing piece (34) and the adjusting mechanism (4) form an air flow channel, one end of the air flow channel is located on the part of the adjusting mechanism (4) in the uniform gas cavity, and the other end of the air flow channel is located on the surface of the fixing piece (34) close to the first electrode piece (2).

11. The vacuum coating apparatus according to any one of claims 1 to 6, wherein The shell (1) is provided with a mounting groove (13), and the part of the adjusting mechanism (4) connected with the shell (1) is located in the mounting groove (13), and the shell (1) further comprises a sealing piece (14), and the sealing piece (14) is sealingly connected on the mounting groove (13).

12. A solar cell production line, characterized by, The vacuum coating device comprises: The vacuum coating device according to any one of claims 1 to 11; A transfer device for transporting the solar cell to the vacuum coating device and / or removing the solar cell from the vacuum coating device.

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