Single crystal furnace cover and single crystal furnace

Abstract

The single crystal furnace cover comprises a furnace cover body and a suspension device, the suspension device is arranged at the bottom of the furnace cover body and comprises a cover plate and a hook, the first end of the hook is fixedly connected to the inner wall of the furnace cover, and the second end of the hook supports the edge of the cover plate; the side face, back on to the furnace cover body, of the cover plate is a light absorption face. The hanging device with the cover plate and the hook is arranged in the furnace cover, the cover plate is hung on the lower portion of the furnace cover body through the hook, the side face, opposite to the furnace cover body, of the cover plate is arranged to be the light absorption face, the brightness of light reflected to the cover plate by high-temperature liquid silicon liquid is effectively reduced, and then the influence of light reflection on camera capturing and operator observation is reduced; and the smoothness of the inner wall of the furnace cover can be kept, and the adhesion of crystal pulling residues is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to single crystal silicon technical field especially is a single crystal furnace cover and single crystal furnace. BACKGROUND

[0002] Single crystal furnace is one of the core production equipment for preparing single crystal silicon, and is a device for growing single crystal without dislocation by using a graphite heater to melt polycrystalline silicon and non-polycrystalline silicon material in an environment mainly of inert gas argon through a Czochralski method. A CCD camera (a digital camera with a charge-coupled device image sensor) is arranged on the single crystal furnace for observing and analyzing images in the crystal growth process.

[0003] In order to maintain the smoothness of the inner wall of the furnace cover, the inner wall of the single crystal furnace cover is polished to a high degree at present, which causes the CCD camera in the single crystal furnace to be affected by the reflection of the inner wall of the furnace cover, affecting the imaging in the crystal growth process, and thus seriously affecting the normal crystal pulling process of the single crystal furnace. In order to solve this problem, the inner wall of the single crystal furnace cover is currently polished or a matte furnace cover is replaced, but the effect is very small. Therefore, a technical means or auxiliary tool is urgently needed to solve the problem of the reflection of the inner wall of the furnace cover affecting the imaging of the CCD camera. SUMMARY

[0004] In order to solve the technical problem of the smooth inner wall of the single crystal furnace cover causing the inability to normally pull crystals, the utility model provides a suspension device and a single crystal furnace.

[0005] To achieve the above purpose, the utility model provides a single crystal furnace cover, which comprises a furnace cover body and a suspension device, is arranged at the bottom of the furnace cover body, and comprises a cover plate and a hook, the first end of the hook is fixedly connected to the inner wall of the furnace cover, and the second end of the hook supports the edge of the cover plate; the side face of the cover plate away from the furnace cover body is provided as a light-absorbing face.

[0006] Further, the cover plate comprises a cover plate body and an extension, the extension is arranged at the edge of the cover plate body, the cover plate body is in close contact with the furnace cover body, and there is a gap between the two, and the extension is supported on the second end of the hook.

[0007] Further, the first end of the hook is in close contact with the inner wall of the furnace cover body.

[0008] Further, the second end of the hook is horizontally arranged, and the extension of the cover plate is horizontally extended.

[0009] Further, the extension is provided with a notch in the circumferential direction, and the caliber of the notch is not less than the width of the second end of the hook.

[0010] Further, a hanging hole is formed on the extension part, the hanging hole is arranged at a position where each of the notches is rotated by a predetermined angle in a clockwise or counterclockwise direction, and a threaded hole is formed in the second end of the hook, and a fastener is fastened through the hanging hole and the threaded hole.

[0011] Further, the extension part comprises a first part and a second part connected to each other, wherein the first part is connected to the edge of the cover plate body, and the second part is connected to the second end of the hook.

[0012] Further, the first part of the extension part extends vertically.

[0013] Further, a plurality of windows are formed on the cover plate, and the plurality of windows correspond to the functional holes on the furnace cover body.

[0014] Another object of the embodiment is to provide a single crystal furnace provided with the single crystal furnace cover.

[0015] The above technical solution of the utility model has the following advantages compared with the prior art.

[0016] The suspension device with the cover plate and the hook is arranged in the furnace cover, the cover plate is suspended in the lower part of the furnace cover body through the hook, the side of the cover plate facing away from the furnace cover body is arranged as a light absorption surface, the brightness of the bright light reflected to the cover plate by the high-temperature liquid silicon liquid is effectively reduced, the influence of the reflection on the camera capturing and the operator observation is further reduced, and the smoothness of the inner wall of the furnace cover can be maintained to reduce the adhesion of the crystal pulling residues. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiment description, and obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without creative labor.

[0018] Figure 1 It is the structure diagram of the suspension device of the utility model;

[0019] Figure 2 It is the bottom view of the suspension device of the utility model;

[0020] Figure 3 It is the structure diagram of the cover plate in the suspension device of the utility model;

[0021] Figure 4 It is the structure diagram of the hook in the suspension device of the utility model.

[0022] Description of the drawings: furnace cover body - 1; cover plate - 2; cover plate body - 21; extension - 22; hanging hole - 23; notch - 24; hook - 3; first end - 31; second end - 32; threaded hole - 33; window - 4. DETAILED DESCRIPTION

[0023] Example One

[0024] Reference Figures 1-4 A single crystal furnace cover provided by the utility model, comprising a furnace cover body 1 and a suspension device, the suspension device is installed at the bottom of the furnace cover body 1, the suspension device comprises a cover plate 2 and a hook 3, the first end 31 of the hook 3 is fixedly connected to the inner wall of the furnace cover body 1, specifically, the first end 31 of the hook is fixed to the inner wall of the furnace cover body 1 by welding. The second end of the hook 3 supports the edge of the cover plate 2, where "support" can mean movable support or fixed support, the cover plate 2 is hung at the bottom of the furnace cover body 1 through the hook 3, the side of the cover plate 2 away from the furnace cover body 1 is provided as a light-absorbing surface, in this embodiment, the material of the cover plate 2 is molybdenum, molybdenum has a high melting point, a hard texture and strong corrosion resistance, so that the cover plate 2 hung in the furnace cover body 1 will not melt and deform due to high temperature, ensuring its normal use in the high-temperature environment of the crystal pulling furnace. The inner wall of the cover plate 2 is provided as a dark frosted surface capable of absorbing light, such as gray, black, gray-black and the like, in the process of pulling single crystal in the single crystal furnace, high-temperature liquid silicon reflects light to the inner wall of the cover plate 2, effectively reducing the brightness of the reflected light, avoiding the influence of reflected light on the capture of the CCD camera and the observation of the operator, and since the cover plate 2 is hung at the bottom of the furnace cover body 1 through the hook 3, the inner wall of the furnace cover body 1 can also maintain a certain smoothness, thereby reducing the residual attachments in the pulling process and facilitating the cleaning of the residual attachments in the inner wall of the furnace cover body 1.

[0025] Further, the molybdenum cover plate has a certain thickness, which ensures that the cover plate 2 deforms when used in high temperature and suspension, and in the case of meeting the above requirements, the self-weight of the entire suspension device is the lightest, the cover plate 2 adopts an integrated structure, which is convenient for employees to disassemble, install and clean, and is easy to use.

[0026] In one embodiment, referring to Figure 3 , the cover plate 2 comprises a cover plate body 21 and an extension 22, the extension 22 is arranged at the edge of the cover plate body 21, the cover plate body 21 is attached to the furnace cover body 1, and there is a gap between the two, the extension 22 is supported on the second end 32 of the hook 3 to realize the suspension of the cover plate 2 at the bottom of the furnace cover body 1. It should be noted that the gap between the cover plate body 21 and the furnace cover body 1 reserves space for the installation and disassembly of the cover plate 2. As a preferred, under the premise of reserving the installation and disassembly of the cover plate 2, the cover plate body 21 is tightly attached to the inner wall of the furnace cover, which reduces the influence of the cover plate 2 on the airflow in the furnace to the minimum, and ensures the normal operation of the furnace.

[0027] In one embodiment, the first end 31 of the hook 3 is attached to the inner wall of the furnace cover body 1, and when the inner wall of the furnace cover body 1 has an inclined angle, the first end 31 of the hook 3 also has the same inclined angle, so as to meet the welding requirements and ensure the stability of the connection between the hook 3 and the furnace cover body 1.

[0028] In one embodiment, the second end 32 of the hook 3 is horizontally arranged, the extension 22 of the cover plate 2 is horizontally extended, and the extension 22 of the cover plate 2 is connected to the second end 32 of the hook 3. Since both are in a horizontal position, the connection between the cover plate 2 and the hook 3 is horizontal, which can ensure the stability of the connection between the cover plate 2 and the hook 3, and the cover plate 2 can be hung by simply overlapping the extension 22 on the second end 32.

[0029] In one embodiment, referring to Figure 2 and 3 , the extension 22 is circumferentially provided with a notch 24 matched with the hook 3. In order to facilitate the hook 3 to pass through the notch 24, the caliber of the notch 24 is not less than the width of the second end 32 of the hook 3. The width of the second end 32 is the length of the second end 32 in the circumferential direction of the cover plate 2. When the cover plate 2 is installed, the cover plate 2 is lifted upwards from the bottom of the hook 3, the second end 32 of the hook 3 passes through the notch 24 of the cover plate 2, the cover plate 2 is rotated counterclockwise or clockwise, and the cover plate 2 is overlapped on the second end 32 of the hook 3. Since the second end 32 of the hook 3 is a horizontal plane, the stability of the cover plate 2 can be ensured when there are multiple hooks 3. The notch 24 is arranged on the edge of the extension of the cover plate and matched with the hook 3. The cover plate is overlapped on the hook 3 through the notch 24, so that the cover plate is overlapped on the upper surface of the bottom of the hook 3, which facilitates the installation and fixation of the cover plate.

[0030] In one embodiment, referring to Figure 3 , a hanging hole 23 is arranged on the extension 22. The hanging hole 23 is arranged at a position where each notch 24 is rotated by a predetermined angle in the clockwise or counterclockwise direction. That is, the angle required for each notch 24 to reach the adjacent hanging hole 23 is the same. The second end 32 of the hook 3 is provided with a threaded hole 33. The fastener passes through the hanging hole 23 and the threaded hole 33 for fastening. In this embodiment, the hanging hole 23 is arranged at a counterclockwise direction of 10° of the notch 24. When the cover plate 2 is installed, the cover plate 2 is lifted upwards, the hook 3 passes through the notch 24, and then the cover plate 2 is rotated counterclockwise by 10°. The threaded hole 33 on the hook 3 is rotated to the position of the hanging hole 23. The fastener passes through the hanging hole 23 and the threaded hole 33 to realize the installation and positioning of the cover plate 2 and the hook 3. The weight of the multiple hooks 3 is greater than the total weight of the hook 3 and the cover plate 2, which avoids the falling of the hook 3 and affects the working process of the single crystal furnace.

[0031] In one embodiment, the extension 22 comprises a first part and a second part connected to each other, wherein the first part is connected to the edge of the cover plate body 21, and the second part is connected to the second end 32 of the hook 3, the first part of the extension 22 separates the second part connected with the hook 3 from the cover plate body 21, the embodiment divides the extension 22 into two parts, and separates the second part connected with the hook 3 from the cover plate body 21 through the first part, so that the cover plate body 21 can be as close to the furnace cover body 1 as possible without affecting the installation of the hanging device.

[0032] As a preferred, the first part of the extension 22 extends vertically, further expands the distance between the cover plate body 21 and the second part in the vertical direction, and can better ensure that the cover plate body 21 is close to the furnace cover body 1.

[0033] In this embodiment, referring to Figure 2 , a plurality of windows 4 are provided on the cover plate 2, and the plurality of windows 4 correspond to a plurality of function holes on the furnace cover body 1 respectively, further, the plurality of windows 4 comprise a CCD camera window and a personnel observation window, so as to prevent the single crystal furnace CCD camera window and the personnel observation window from being blocked, and it should be noted that the CCD camera window and the personnel observation window can be provided in a direction perpendicular to the axis of the cover plate 2, and the angle range of the window is increased while the area of the window is kept constant.

[0034] The working principle of the embodiment is as follows: the hanging device comprises a cover plate 2 installed on the inner wall of the furnace cover body 1 and a hook 3 welded to the inner wall of the furnace cover body 1 for suspending the cover plate 2, the inner wall of the cover plate 2 is provided as a gray-black frosted surface, and the hook 3 is provided with four hooks evenly distributed on the inner wall of the furnace cover body 1, in the actual application process, during installation, first, a pair of hooks 3 perpendicular to the direction of the personnel observation window in the window 4 are welded to the inner wall of the furnace cover body 1, the first end 31 of the hook 3 is attached to the inner wall of the furnace cover body 1, and the second end 32 is kept relatively horizontal, then the distance between the second ends 32 of the two opposite hooks 3 is measured, the distance between the hooks 3 is matched with the diameter of the cover plate 2, so as to determine the welding position, the welding direction of the remaining pair of hooks 3 is perpendicular to the above-mentioned hooks 3, after the four hooks 3 are welded, the cover plate 2 is lifted, the edge of the cover plate 2 is provided with four notches 24, the hook 3 passes through the notch 24, the cover plate 2 is above the second end 32, the cover plate 2 is rotated by 10° clockwise, the extension 22 of the cover plate 2 is seated on the upper surface of the second end 32, the threaded hole 33 on the hook 3 is aligned with the hanging hole 23 on the cover plate 2, and the installation and fixation of the cover plate 2 are realized through bolt fastening, at this time, during the operation of the single crystal furnace, the reflection of the high-temperature silicon liquid in the furnace body is absorbed by the gray-black frosted surface of the inner wall of the cover plate 2, so as to avoid affecting the CCD photography and personnel observation.

[0035] Embodiment 2

[0036] Different from the above-mentioned embodiments, the embodiment provides a single crystal furnace, which comprises the single crystal furnace cover, the single crystal furnace cover comprises a cover body 1 and a suspension device, and the cover plate 2 in the suspension device provides a light absorption surface for the single crystal furnace, so as to reduce the influence of the reflection of the high-temperature silicon liquid in the furnace on the CCD photography and the observation of personnel.

[0037] It should be noted that the above are only preferred embodiments of the present application and the technical principles applied. Those skilled in the art will understand that the present application is not limited to the specific embodiments described herein, and those skilled in the art can make various obvious changes, re-adjustments and substitutions without departing from the scope of the present application. Therefore, although the present application has been described in more detail through the above embodiments, the present application is not limited to the above embodiments, and can include more other equivalent embodiments without departing from the concept of the present application, and the scope of the present application is determined by the scope of the appended claims.

Claims

1. A single crystal furnace lid, characterized by, The utility model relates to a furnace cover, comprising: a furnace cover body (1); and a hanging device arranged at the bottom of the furnace cover body (1) and comprising a cover plate (2) and a hook (3), the first end (31) of the hook (3) being fixedly connected to the inner wall of the furnace cover body (1), and the second end (32) of the hook (3) supporting the edge of the cover plate (2); the side of the cover plate (2) facing away from the furnace cover body (1) being provided as a light-absorbing surface.

2. The single crystal furnace lid of claim 1, wherein The cover plate (2) comprises a cover plate body (21) and an extension (22), the extension (22) being arranged at the edge of the cover plate body (21), the cover plate body (21) being in abutment with the furnace cover body (1) and a gap being present between the two, and the extension (22) being supported on the second end (32) of the hook (3).

3. The single crystal furnace lid of claim 2, wherein, The first end (31) of the hook (3) is in abutment with the inner wall of the furnace cover body (1).

4. The single crystal furnace lid of claim 3, wherein, The second end (32) of the hook (3) is arranged horizontally, and the extension (22) of the cover plate (2) extends horizontally.

5. The single crystal furnace lid of claim 2, wherein, The extension (22) is provided with a notch (24) in the circumferential direction, the aperture of the notch (24) not being smaller than the width of the second end (32) of the hook (3).

6. The single crystal furnace lid of claim 5, wherein, A hanging hole (23) is arranged on the extension (22), the hanging hole (23) being arranged at a position in which each notch (24) is rotated by a predetermined angle in the clockwise or counterclockwise direction, and the second end (32) of the hook (3) is provided with a threaded hole (33), and a fastener is fastened through the hanging hole (23) and the threaded hole (33).

7. The single crystal furnace lid of claim 2, wherein The extension (22) comprises a first part and a second part connected to each other, wherein the first part is connected to the edge of the cover plate body (21), and the second part is connected to the second end (32) of the hook (3).

8. The single crystal furnace lid of claim 7, wherein, The first part of the extension (22) extends vertically.

9. The single crystal furnace lid of claim 1, wherein, A plurality of windows (4) are arranged on the cover plate (2), and the plurality of windows (4) correspond to functional holes on the furnace cover body (1).

10. A single crystal furnace characterized by comprising: The utility model relates to a furnace cover, comprising: a furnace cover body (1); and a hanging device arranged at the bottom of the furnace cover body (1) and comprising a cover plate (2) and a hook (3), the first end (31) of the hook (3) being fixedly connected to the inner wall of the furnace cover body (1), and the second end (32) of the hook (3) supporting the edge of the cover plate (2); the side of the cover plate (2) facing away from the furnace cover body (1) being provided as a light-absorbing surface. The cover plate (2) comprises a cover plate body (21) and an extension (22), the extension (22) being arranged at the edge of the cover plate body (21), the cover plate body (21) being in abutment with the furnace cover body (1) and a gap being present between the two, and the extension (22) being supported on the second end (32) of the hook (3). The first end (31) of the hook (3) is in abutment with the inner wall of the furnace cover body (1). The second end (32) of the hook (3) is arranged horizontally, and the extension (22) of the cover plate (2) extends horizontally. The extension (22) is provided with a notch (24) in the circumferential direction, the aperture of the notch (24) not being smaller than the width of the second end (32) of the hook (3). A hanging hole (23) is arranged on the extension (22), the hanging hole (23) being arranged at a position in which each notch (24) is rotated by a predetermined angle in the clockwise or counterclockwise direction, and the second end (32) of the hook (3) is provided with a threaded hole (33), and a fastener is fastened through the hanging hole (23) and the threaded hole (33). The extension (22) comprises a first part and a second part connected to each other, wherein the first part is connected to the edge of the cover plate body (21), and the second part is connected to the second end (32) of the hook (3). The first part of the extension (22) extends vertically. A plurality of windows (4) are arranged on the cover plate (2), and the plurality of windows (4) correspond to functional holes on the furnace cover body (1). The utility model relates to a furnace cover, comprising: a furnace cover body (1); and

Images